505920 A7 B7 五、發明說明（1 ) 〔發明領域〕 (請先閲讀背面之注意事項再填寫本頁) 本發明是關於光儲存媒體之製造裝置’更詳細的說是 關於將電介體以層壓疊膜來製造可重複燒錄的光儲存媒體 的製造裝置。特別是關於可以提高光儲存媒體的製造良率 以及降低運轉成本的光儲存媒體的製造裝置。 〔相關技藝說明〕 目前廣泛流行使用於音樂或資訊領域上的c D — R、 CD — RW、DVD — R、DVD — RW等的播放專用型 、追加燒錄型、以及重複燒錄型的光碟媒體，是在玻璃、 塑膠等透明基板上加上光記錄層及光電磁性記錄層來達到 光儲存媒體的功能。 關於最近幾年來快速普及的光及光電磁性資訊CD( Compact D1Sc )大致有追加燒錄型及重複燒錄型兩種。其 中追加燒錄型光碟（CD - R)是僅能提供一次燒錄的光 電資訊媒體，在燒錄時只要失敗一次的話，因爲無法修正 ，該光碟即無法使用必須廢棄。 經濟部智慧財產局員工消費合作社印製 爲了改善上述缺點而出現的可重複燒錄型光碟系統， 眾所周知的有光電磁性光碟系統、相變化型光碟系統、以 及有機色素系光碟系統等。這些光碟系統都各有優缺點。 例如，使用光電磁性光碟的C D — R W有改寫（overwnte )困難，與CD — ROM、CD — R的互換性不佳等缺點 。因此，在原理上互換性比較有利的相變化型重複燒錄 C D — R W光碟的實用化開發是相當被重視的。 本紙張尺度適用中國國家標準（CNS)A4規袼（210 X 297公釐） -4- 505920 A7 B7 五、發明說明（2 ) (請先閱讀背面之注意事項再填寫本頁) 相變化型光碟的記錄膜，以飛濺塗膜法（spattering ) 來形成膜的狀態時，膜是非晶質具有很低的反射率。若將 此狀態的膜施以較低溫的加熱-徐冷的話，該部分會結晶 化，能呈現出較非晶質狀態更高的反射率。若將此部分以 鐳射光急速加熱至記錄膜的溶融溫度附近並且急冷的話就 無法結晶化，會返回非晶質狀態，即可形成孔洞（Pit )。 要消去時，使用鐳射脈波慢慢加熱慢慢冷卻再度結晶化即 可。通常，相變化型光碟系統在燒錄以及讀取時所使用的 鐳射與拭除時所使用的鐳射是波長不同的獨立半導體鐳射 〇 以鐳射光束的照射來達成記錄、播放以及拭除（delete )功能的光記憶媒體，是利用結晶一非結晶相、結晶-結 晶相間的狀態轉移現象。這種相變化型記錄媒體因爲可以 利用單一光束來達成改寫（overwrite )功能（特別是光電 磁性記憶體在這方面是很困難的），所以在燒錄機上可以 使用較爲單純的光學系統。最近，實用化方面的硏究開發 有相當活潑的進展。 經濟部智慧財產局員工消費合作社印製 上述C D - R W等的相變化型光儲存媒體，大部分都 是在記錄層的上下兩邊包夾上電介體層形成多層構造。通 常，若是在聚碳酸酯（polycarbonate )等的塑膠基板或是 在以塑膠塗鍍成的玻璃基板上以層壓疊膜法將各種層製成 薄膜狀的方法來製造這些光儲存媒體時，飛濺塗膜法（以 下簡稱噴鍍法，sputter )是不可或缺的。 關於噴鍍法，是使用inline方式與枚葉式的噴鍍裝置等 -S ** 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 505920 A7 B7 五、發明說明（3 ) (請先閱讀背面之注意事項再填寫本頁) 。前者inline方式因爲可以兩面噴鍍成膜所以有較爲優良的 生產性，但後者的枚葉式卻是近年的主流。與前者相較雖 然生產性稍差但裝置的設置面積只須一半以下，同時不需 要託盤可以直接搬送基板，膜質較易維持。因爲有高流通 率（throughput )、小型化（compact )、以及低生產成本 等優點，故成爲製造裝置的主流。 關於上述光儲存媒體製造時的良品率，因爲必須在基 板上將記錄層、反射層以及電介體層（或保護層）等相異 的部材積層成多層膜，因此若是在成膜過程中有缺陷的話 就會造成品質不良，使得良品率降低。在成膜過程中，特 別是以噴鍍法等將電介體成膜時，常常會因爲附著在真空 檷內周邊上的成膜部材剝落掉下在非對象基板上等的原因 而造成良品率下降。 因此，爲了要提昇良品率，同時降低製造裝置的運轉 成本，如何設法儘量長時間防止在基板上以外的部位附著 成長的成膜部材剝落掉下，使製造裝置順利運轉，就變成 非常重要的因素。 經濟部智慧財產局員工消費合作社印製 爲此，一般的作法是裝設防著板，以防止真空槽內面 的附著，同時在某一適當間隔時間將此防著板更換，以防 止附著物掉落在基板上。但是，每一次在更換附著板時， 必須將真空系統解除回復到大氣狀態下來進行更換的工作 。這種做法使得裝置的停機時間（down time )增長，運轉 成本增筒，並無法充分滿足所需。 另外，在裝置的運轉中，防著板的更換除了剛好與噴 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -6- 505920 A7 --—_____ B7 五、發明說明（4 ) (請先閱讀背面之注意事項再填寫本頁) 鍍的鍍靶（target )材料的更換時機一致的特殊情況以外， 一般在電介體成膜的場合，鍍靶材料的更換周期遠比附著 板的更換周期還長得多。所以，若是採取在鍍靶材料更換 時期一起更換防著板的話，就無法充分防止附著物由防著 板剝落掉下所造成的良品率下降。 爲了改善這個問題，通常是將防著板施以噴砂（blast )處理，增大其表面積提高附著力，以便能抑制附著膜的 剝離。但是在目前是無法提昇良品率以及裝置的運轉率。 說明槪要 因此，本發明的目的在於一種改良的光儲存媒體製造 裝置，以解決上述固有技術所存在的所有問題，提昇C D - RW等光儲存媒體在製造過程的良品率，同時提昇裝置 的運轉率降低運轉成本。 如上所述，使用噴鍍裝置（特別是最近廣被使用的枚 葉式噴鍍裝置）在基板上將反射層、記錄層、保護層以及 電介體層等層壓疊膜成薄膜狀的過程中，存在種種必須解 決的問題，在現狀下並還沒有被充分解決。 經濟部智慧財產局員工消費合作社印製 爲了解決以上所說明的問題，本發明的發明者經過反 復銳意檢討的結果，著眼於附著成長的剝離落下，而發明 了解決的方法。 亦即本發明，是提供一種在碟片基板上將反射層、記 錄層、以及電介體層層壓疊膜成薄膜狀的光儲存媒體的製 造裝置。特徵是在製造裝置的真空成膜槽之內裝設有鍍上 -7- 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 505920 A7 ——— B7 五、發明說明（5 ) 金屬層的層狀結構（lamellar structure )的防著板。 (請先閱讀背面之注咅？事項再填寫本頁) 如上述在噴鍍成膜過程中因爲附著成長而產生的附著 物，會受到在噴鍍成膜過程中因爲周遭環境溫度上昇，下 降而產生的熱衝擊或熱應力甚至機械性的振動等影響。若 是在真空槽內裝設本發明所敘述的具有金屬層狀構造的塗 鍍層的防著板的話，這些應力會因爲層狀構造而由被緩和 的效果，周邊的附著成長物不會輕易剝離落下。與固有的 防著板相比之下，異物混入基板上的傾向會明顯減少，因 此其結果是可以使成膜的良品率以及製造裝置的運轉率明 顯提昇。 較佳實施例說明 以下將本發明使用在光儲存媒體的製造裝置上的實施 形態加以詳細說明。 經濟部智慧財產局員工消費合作社印製 本發明的在真空槽內防著板面等所實施的金屬塗鍍層 ，如圖1所示具有層狀構造。適合於本發明的金屬，其剪 切彈性係數最好在6 X 1 0 P a以下。如此的話，前述的 層狀構造除了能因爲其構造特性引發應力緩和性之外，也 能使附著物的應力緩和效果更好。 本發明除了前述的金屬剪性彈性係數的限制外，具有 層狀構造的金屬層的膜厚最好在1 0 /im以上較適合。膜 厚若是未滿1 0 //m的話，無法充分吸收上述的應力，故 無法充分發揮緩和的效果。 若能更進一步在形成前述膜厚的層狀構造時，使用2 本紙張尺度適用中國國家標準（CNS)A4規袼（210 X 297公釐） -8- 505920 A7 _— B7 五、發明說明（6 ) 種以上彈性係數相異的金屬層，則本發明將更能發揮其應 力緩和之效果。 (請先閲讀背面之注音？事項再填寫本頁) 使用多層構造的話，可以避免使應力緩和急劇的集中 ，階段性緩和’可以減輕因爲附著力應力緩和所造成的反 作用力，也就不容易發生因爲斷裂而造成的剝離掉落。 另外，關於前述的應力緩和，金屬的剪切彈性係數愈 小的話，愈能有效而且快速的發揮。雖然本發明不做特別 的限制，但可視需要將這些剪切彈性的大小與其疊層形成 的順序做適當的選擇。 本發明如前述將剪切彈性係數不同的2種以上的金屬 的層狀構造形成時，例如，對其母材防著板的疊層形成順 序，剪切彈性係數最好是從母村起漸序減低較適合。 如此的話，因爲附著在最上面一層的金屬層的剪切彈 性係數是最小的，可以將發生在附著物上的應力迅速的吸 收與消除。因爲同樣的理由，可以減輕因爲附著物的應力 緩和而發生的反作用力，因爲斷裂而造成的剝離掉落就不 容易發生。 經濟部智慧財產局員工消費合作社印製 將剪切彈性係數從母材開始漸序減低方式來將剪切彈 性係數相異的金屬構成的話，不只是可以分散附著膜的應 力，也可以使得剝離物的再生利用變得更爲容易。 同時，將剪切彈性係數相異的金屬層狀結構形成多層 的話，就可以使貼著於防著板的第一層使用剪切彈性係數 比較大的金屬層來形成。因此，在防著板交換時，就可以 很容易的使用石渣（ballast )處理等方法將附著物剝離再 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -9 - 505920 A7 ______ B7 五、發明說明（7 ) 生利用，降低剝離再生利用的成本。 <請先閱讀背面之注意事項再填寫本頁) 如以上所述’本發明內施行於防著板的金屬層狀構造 如圖一所示’在防著板的母材金屬面1上，如同將撲克牌 堆疊合排一樣’鱗片狀的金屬將被形成如圖二所示的層狀 構造2。 本發明在母材上形成層積（lamellar )層時，可視需要 ’最好是事先能將母材施行噴砂處理等變成粗糙面後在來 形成，從密著性的觀點來看，將會更適合。 關於母材的材料，一般來說有不鏽鋼、鋁、鋁合金以 及塑膠等’但是不鏽鋼與鋁合金在加工性、安定性、成本 等方面是較合適的。 另外’關於形成層狀構造的金屬，其彈性係數要比在 基板上成膜的材料的彈性係數更大較適合。一般有鋁、鋁 合金、銅、銅合金、銦（indium )、鋅、金、銀、鍚、等 ，從成本上來看的話，鋁合金與銅合金是較合適的。本發 明，如前述可使用其中一種或將二種以上組合來做積層。 經濟部智慧財產局員工消費合作社印製 另外，若能使剪切彈性係數相異的金屬從母材起將剪 切彈性係數漸序減小排列的話會更好。具有層狀構造的金 屬層的剪切彈性係數愈小愈好，但是如果太小的話，在使 用石渣法等來剝離時就會有困難，時再生利用更費時，亦 會損傷母材。 另外，再生利用時，雖然亦有使用酸性物質來剝離的 方法，但是因爲相變化型儲存媒體上的介電體大部分使用 Z n S · S i 0 2若施行酸性處理的話會產生硫化氫，很難 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -10 - 505920 A7 __.... B7 五、發明說明（8 ) 處理，同時亦會傷害母材。 (請先閲讀背面之注意事項再填寫本頁) 層狀構造的形成方法以噴鍍法最適合。使用的噴鍍法 包括有，電弧法（arc ) '框架法（franie )、電漿法（ plasma )等，從成本及密著力的觀點來看電弧法最適合使 〔實施例〕 以下，以實施例來進一步說明本發明。 (實施例1〜5 ) 具有寬0· 5//m，深3 5nm，溝槽（groove )的 1 · 2mm厚的聚碳酸酯（polycarbonate )基板上，將第 1保護層、記錄層、第2保護層、反射層使用枚葉型噴鍍 裝置以1 0秒槽溝（duct )來連續製膜，其次將紫外線硬 化性樹脂旋鍍（spin coat )，在基板面上形成硬鍍層（ hard coat )，以製造相變化型光碟片。 本實施例內，不論第1層或第2層都是Z n S · S i 0 2的介電體層。 經濟部智慧財產局員工消費合作社印製 實施例1 ，是使用前述枚葉型噴鍍裝置將第1保護層 與第2保護層成膜。成膜時的真空槽內，裝設經過8 厚度F e噴鍍處理（當做lamellar層形成）後的防著板*來 製作碟片基板。 實施例2，是在前述枚葉型噴鍍裝置的第1保護層與 第2保護層成膜的真空槽內裝設經過實施8 //m厚度A 1 本紙張尺度適用中國國家標準（CNS)A4規袼（210 X 297公釐） -11 - 505920 A7505920 A7 B7 V. Description of the invention (1) [Field of invention] (Please read the precautions on the back before filling out this page) The present invention is about a manufacturing device for optical storage media. More specifically, it is about the dielectric layer A manufacturing apparatus for laminating a film to produce a re-burnable optical storage medium. In particular, the present invention relates to an apparatus for manufacturing an optical storage medium, which can improve the manufacturing yield of optical storage media and reduce operating costs. [Related technical descriptions] CD-R, CD-RW, DVD-R, DVD-RW, etc. are currently widely used in music or information fields for playback-only, re-burning, and re-burning optical discs. The medium is to add an optical recording layer and a photoelectric magnetic recording layer on a transparent substrate such as glass or plastic to achieve the function of an optical storage medium. The optical and opto-magnetic information CD (Compact D1Sc), which has been rapidly spread in recent years, has two types: an additional recording type and a re-recording type. The CD-R is an optical information medium that can only be burned once. If it fails to burn once, it cannot be used because it cannot be corrected and must be discarded. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. To improve the above-mentioned shortcomings, the rewritable optical disc system appears to be well-known, including a photoelectric magnetic disc system, a phase change optical disc system, and an organic pigment optical disc system. Each of these optical disc systems has advantages and disadvantages. For example, CD-RW using electro-optical magnetic discs has disadvantages such as difficulty in overwriting and poor interchangeability with CD-ROM and CD-R. Therefore, the practical development of phase-change re-recording CD-RW discs that are relatively interchangeable in principle is very important. This paper size is in accordance with Chinese National Standard (CNS) A4 (210 X 297 mm) -4- 505920 A7 B7 V. Description of the invention (2) (Please read the precautions on the back before filling this page) Phase change disc When a recording film is formed by a sputtering method, the film is amorphous and has a low reflectance. If the film in this state is subjected to lower temperature heating-slow cooling, the portion will crystallize and exhibit a higher reflectance than that in the amorphous state. If this part is rapidly heated by laser light to the vicinity of the melting temperature of the recording film and rapidly cooled, it will not be crystallized, and will return to an amorphous state to form a hole (Pit). To eliminate it, use a laser pulse to heat it slowly, cool it down, and recrystallize it. Generally, the laser used in the phase-change optical disc system during burning and reading and the laser used for erasing are independent semiconductor lasers with different wavelengths. The recording, playback, and deletion are achieved by irradiation of a laser beam. Functional optical memory media utilize state transitions between crystalline-amorphous and crystalline-crystalline phases. Since this phase change type recording medium can use a single light beam to achieve the overwrite function (especially the photoelectric magnetic memory is difficult in this respect), a simpler optical system can be used in the recorder. Recently, research and development in practical applications have made considerable progress. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs, most of the above CD-R and other phase-change optical storage media are multilayered structures with dielectric layers sandwiched between the upper and lower sides of the recording layer. Generally, if these optical storage media are manufactured by using a plastic film such as a polycarbonate (polycarbonate) substrate or a glass substrate coated with plastic to make various layers into a thin film by a lamination method, the splash will occur. The coating method (hereinafter referred to as sputtering) is indispensable. Regarding the spray coating method, the inline method and the leaf-type spray coating device are used. -S ** This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 505920 A7 B7 V. Description of the invention (3 ) (Please read the notes on the back before filling this page). The former inline method has better productivity because it can be spray-coated on both sides, but the latter is the mainstream in recent years. Compared with the former, although the productivity is slightly worse, the installation area of the device only needs to be less than half, and the substrate can be directly transported without the need for a tray, and the film quality is easier to maintain. Because of its advantages such as high throughput, compactness, and low production costs, it has become the mainstream of manufacturing equipment. Regarding the yield of the above-mentioned optical storage medium, since different materials such as a recording layer, a reflective layer, and a dielectric layer (or a protective layer) must be laminated into a multilayer film on a substrate, there is a defect in the film formation process. If it does, it will cause poor quality and reduce the yield. In the film formation process, especially when the dielectric is formed by a spraying method, the yield rate is often caused by the peeling of the film-forming members attached to the inner periphery of the vacuum chamber on a non-target substrate, etc. decline. Therefore, in order to improve the yield and reduce the operating cost of the manufacturing equipment, how to try to prevent the film-forming materials that grow on the substrate and other parts from peeling off and fall off for a long time to make the manufacturing equipment run smoothly becomes a very important factor. . Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs for this purpose, the general practice is to install a guard plate to prevent the inner surface of the vacuum tank from being attached, and at the same time, replace the guard plate to prevent attachments from falling. Fall on the substrate. However, every time the attachment plate is replaced, the vacuum system must be released and returned to the atmosphere to perform the replacement work. This approach increases the down time of the device and increases the operating cost, which cannot fully meet the needs. In addition, in the operation of the device, except for the replacement of the anti-plate, it is just applicable to the Chinese paper standard (CNS) A4 specification (210 X 297 mm) -6- 505920 A7 ---_____ B7 V. Description of the invention (4) (Please read the precautions on the back before filling in this page) Except for the special case where the replacement timing of the plated target material is consistent, generally, in the case of dielectric film formation, the replacement cycle of the target material is far. Much longer than the replacement cycle of the attachment plate. Therefore, if it is necessary to replace the anti-plate at the time of replacement of the plating target material, it is not possible to sufficiently prevent the drop of the yield caused by the adherence of the anti-plate from falling off. In order to improve this problem, it is common to apply a blast treatment to the blocking plate, and increase the surface area to improve the adhesion so that peeling of the adhesion film can be suppressed. However, at present, it is impossible to improve the yield rate and the operating rate of the device. Explanation: Therefore, the object of the present invention is to improve an optical storage medium manufacturing device, to solve all the problems existing in the above-mentioned inherent technology, to improve the yield of optical storage media such as CD-RW in the manufacturing process, and to improve the operation of the device. Rate to reduce operating costs. As described above, in the process of laminating a reflective layer, a recording layer, a protective layer, a dielectric layer, and the like into a thin film on a substrate by using a thermal spraying device (especially a leaf spraying device that is widely used recently). There are various problems that must be resolved, and in the current situation, they have not been fully resolved. Printed by the Consumers' Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs To solve the problems described above, the inventor of the present invention, after reviewing the results of intensive review, focused on the growth and separation of the fall, and invented a solution. That is, the present invention provides a manufacturing apparatus for an optical storage medium in which a reflective layer, a recording layer, and a dielectric layer are laminated and laminated on a disc substrate. It is characterized in that the vacuum film forming tank of the manufacturing device is equipped with plating -7- This paper size is applicable to Chinese National Standard (CNS) A4 (210 X 297 mm) 505920 A7 ——— B7 V. Description of the invention ( 5) Lamellar structure of the metal layer. (Please read the note on the back? Matters before filling out this page.) As mentioned above, the deposits generated during the deposition process due to attachment growth will be affected by the ambient temperature rising and falling during the deposition process. Thermal shock, thermal stress, and even mechanical vibration. If the anti-sticking plate with the coating layer having the metal layered structure described in the present invention is installed in the vacuum tank, these stresses will be mitigated by the layered structure, and the attached growths on the periphery will not easily peel off and fall off. . Compared with the inherent anti-sticking plate, the tendency of foreign matter to be mixed on the substrate is significantly reduced. As a result, the yield of the film formation and the operating rate of the manufacturing apparatus can be significantly improved. DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of the present invention applied to an apparatus for manufacturing an optical storage medium will be described in detail. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs The metal coating layer of the present invention for preventing plate surface and the like in a vacuum tank has a layered structure as shown in FIG. 1. The metal suitable for the present invention preferably has a shear modulus of 6 X 1 0 P a or less. In this way, in addition to the above-mentioned layered structure, in addition to its stress relaxation properties due to its structural properties, it is also possible to make the stress relaxation effect of the attached matter better. In the present invention, in addition to the aforementioned limitation of the metal shear modulus of elasticity, the film thickness of the metal layer having a layered structure is preferably more than 10 / im. If the film thickness is less than 1 0 // m, the above-mentioned stress cannot be sufficiently absorbed, and therefore, the relaxation effect cannot be fully exerted. If it can be further used to form the layered structure with the aforementioned film thickness, 2 paper sizes are applicable to the Chinese National Standard (CNS) A4 Regulation (210 X 297 mm) -8- 505920 A7 _— B7 V. Description of the invention ( 6) More than two kinds of metal layers with different elastic coefficients, the present invention will be able to exert its stress relaxation effect more. (Please read the note on the back? Matters before filling out this page) Using a multi-layer structure can avoid the rapid concentration of stress relaxation, and the staged relaxation can reduce the reaction force caused by the adhesion stress relaxation, and it is not easy to occur. Peeling due to breakage. In addition, with regard to the aforementioned stress relaxation, the smaller the coefficient of shear elasticity of the metal, the more effective and rapid it is. Although the present invention is not particularly limited, the magnitude of these shear elasticities and the order in which they are laminated may be appropriately selected as needed. When the present invention forms a layered structure of two or more metals with different shear elastic coefficients as described above, for example, in the order of lamination formation of the base material against the plate, the shear elastic coefficient preferably starts from the mother village. Order reduction is more appropriate. In this case, because the shear elasticity coefficient of the metal layer attached to the uppermost layer is the smallest, the stress occurring on the adherend can be quickly absorbed and eliminated. For the same reason, it is possible to reduce the reaction force caused by the stress relaxation of the adherend, and peeling and falling due to breakage is not easy to occur. If the consumer cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs prints a method of gradually reducing the shear elasticity coefficient from the base material to form a metal with a different shear elasticity coefficient, it can not only disperse the stress of the attached film, but also make the peeling material Recycling becomes easier. At the same time, if metal layered structures with different shear elastic coefficients are formed into multiple layers, the first layer attached to the anti-sticking plate can be formed by using a metal layer with a relatively large shear elastic coefficient. Therefore, when preventing plate exchange, it is easy to use ballast treatment and other methods to peel off the attachments and the paper size applies the Chinese National Standard (CNS) A4 (210 X 297 mm) -9- 505920 A7 ______ B7 V. Description of the invention (7) Recycling and reducing the cost of stripping and recycling. < Please read the precautions on the back before filling this page) As stated above, "The metal layered structure implemented in the present invention is shown in Fig. 1" on the metal surface 1 of the base material of the anti-board, As if the playing cards are stacked and stacked, the scaly metal will be formed into a layered structure 2 as shown in FIG. According to the present invention, when a lamellar layer is formed on a base material, it may be formed according to need. 'It is better to blast the base material into a rough surface beforehand. From the viewpoint of adhesion, it will be more Suitable for. As for the material of the base material, generally, there are stainless steel, aluminum, aluminum alloy, and plastic ', but stainless steel and aluminum alloy are more suitable in terms of workability, stability, and cost. In addition, it is suitable that the elastic coefficient of the metal forming the layered structure is larger than that of the material formed on the substrate. Generally there are aluminum, aluminum alloys, copper, copper alloys, indium, zinc, gold, silver, rhenium, etc. From the perspective of cost, aluminum alloys and copper alloys are more suitable. In the present invention, as described above, one kind may be used or a combination of two or more kinds may be used for the lamination. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs In addition, it would be better if the shear elasticity coefficients of metals with different shear elasticity coefficients are gradually reduced from the base material and arranged. The smaller the elastic modulus of the metal layer with the layered structure, the better, but if it is too small, it will be difficult to peel using the gravel method, etc. It will take more time to recycle and damage the base material. In addition, during recycling, although there is also a method of using an acidic material to peel off, most of the dielectric on the phase change storage medium uses Z n S · S i 0 2 If the acid treatment is performed, hydrogen sulfide will be generated. It is difficult to apply the Chinese national standard (CNS) A4 specification (210 X 297 mm) to this paper size. -10-505920 A7 __.... B7 5. Description of the invention (8) Disposal will also harm the base material. (Please read the precautions on the back before filling out this page.) The method of forming the layered structure is most suitable for spray coating. The thermal spraying method used includes arc method (frac) method, plasma method (plasma method), and the like. From the viewpoint of cost and adhesion, the arc method is most suitable for the following embodiments. Examples further illustrate the present invention. (Examples 1 to 5) On a 1.2 mm thick polycarbonate substrate having a width of 0.5 / m, a depth of 35 nm, and a groove, a first protective layer, a recording layer, and a first 2 The protective layer and the reflective layer are continuously formed with a 10-second trench using a leaf-type thermal spraying device, followed by spin coating the ultraviolet curable resin to form a hard coating layer on the substrate surface. ) To make phase change discs. In this embodiment, both the first layer and the second layer are Z n S · S i 0 2 dielectric layers. Printed in Example 1 by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, the first protective layer and the second protective layer were formed into a film by using the aforementioned leaf-type spraying device. In the vacuum chamber during film formation, an anti-sticking plate * after 8-feet Fe spray coating (formed as a lamellar layer) is installed to make a disc substrate. Example 2 is implemented in a vacuum tank in which the first protective layer and the second protective layer of the aforementioned leaf-type spray coating device are formed. The thickness of the paper is 8 A / m. A4 gauge (210 X 297 mm) -11-505920 A7
五、發明說明（9 ) 噴射處理後的防著板，來製作碟片基板。 (請先閱讀背面之注意事項再填寫本頁) 實施例3 ’是在前述枚葉型噴鍍裝置的第1保護層與 第2保護層成膜的真空槽內裝設經過實施5 〇 /zm厚度 A 1噴射處理後的防著板，來製作碟片。 實施例4，是在前述枚葉型噴鍍裝置的第1保護層與 第2保護層成膜的真空槽內，從防著板起實施2 5 /zm厚 的A 1噴射處理當做第1層，再裝設經過實施同樣2 5 /i m厚的C u噴射處理（當做第2層）後的防著板來製作 碟片基板。 實施例5，是在前述枚葉型噴鍍裝置的第1保護層與 第2保護層成膜的真空槽內，從防著板起實施2 5 厚 的C u噴射處理當做第1層，再裝設經過實施同樣2 5 // m厚的A 1噴射處理（當做第2層）後的防著板來製作 碟片基板。 (比較1〜3 ) 經濟部智慧財產局員工消費合作社印製 比較例1，是在前述枚葉型噴鍍裝置的第1保護層與 第2保護層的成膜真空槽內裝上以噴砂（sand blast )將表 面處理到R a = 4 1 // m粗糙度的防著板後，再製作碟片 基板。 比較例2，是在前述枚葉型噴鍍裝置的第1保護層與 第2保護層的成膜真空槽內裝上以噴砂（sand blast )將表 面處理到粗糙度R a = 6 # m的防著板後，再製作碟片基 板0 -12- 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 505920 A7 B7 五、發明說明（ίο ) (請先閱讀背面之注意事項再填寫本頁) 比較例3，是在前述枚葉型噴鍍裝置的第1保護層與 第2保護層的成膜真空槽內裝上以噴砂（sand blast )將表 面處理到粗糙度R a = 8 μ m的防著板後’再製作碟片基 板。 利用上述實施例與比較例所製作的碟片’使用S0NY製 的缺陷率檢查裝置以每3 0分鐘3片的速率來測定碟片基 板全面的缺陷率，並將3片的缺陷率的平均做比較’其結 果如表1所示。每次，各真空槽的鍍靶（target )與防著板 都更換新品，初期缺陷率爲1〜2 x 1 〇 — 6，實施例與比 較例同等。 〔表1〕 缺陷率超過1 X 1 〇 ~5時的經過時間 實施例1 1 2小時 實施例2 2 0小時 實施例3 4 5小時 實施例4 5 0小時 實施例5 6 0小時 比較例1 6小時 比較例2 9小時 比較例3 9小時 經濟部智慧財產局員工消費合作社印製 本發明功效及優點 依照本發明，在真空槽內裝設在其表面上塗鍍有層狀 -13- 本紙張尺度適用中國國家標準（CNS)A4規袼（210 X 297公釐） 505920 A7 B7 五、發明說明（11 ) (請先閱讀背面之注意事項再填寫本頁) 構造金屬層的防著板的話，附著物的應力就很容易被緩和 ，與傳統比較之下，附著物的剝離落下會顯著的減少，因 此碟片的缺陷會下降，良品率會增高。 並且，因爲將形成此層狀構造的金屬層的剪切彈性係 數設定在6 X 1 0 1 P a以下，可以更有效的發揮應力緩 和的效果。同理，可以降低碟片的缺陷，增高良品率。 並且，因爲將形成此層狀構造的金屬層的膜厚設定在 1 0 # m以上，可以使層狀構造充分發揮應力緩和的功效 。同理，可以降低碟片的缺陷，增高良品率。 並且，因爲採用剪切彈性係數相異的2種以上的金屬 層來形成此層狀構造，應力會階段性集中在剪切彈性係數 最小的金屬層，因而會被緩和，不會產生急劇的反作用力 ，效果會更好。同理，可以降低碟片的缺陷，增高良品率 〇 經濟部智慧財產局員工消費合作社印製 並且，在將剪切彈性係數相異的2種以上的金屬層狀 構造形成時，依照剪切彈性率的大小，從母材的防著板起 漸序減小下去，亦即最上一層的剪切彈性係數最小，所以 可以有效地發揮附著物的應力緩和的效果。同理，可以降 低碟片的缺陷，增高良品率。同時，因爲將剪切彈性係數 較大的金屬層塗鍍在防著板的母材上，可以很容易地利用 噴砂法等來做剝離再生，降低剝離再生利用地成本。 圆式簡述 圖1表示在防著板上所施行的層狀構造的金屬層的槪 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -14 - 505920 A7 _B7 五、發明說明（12 ) 念的斷面圖。 圖號說明 1 母材（或防著板） 2 層狀（lamellar)金屬 (請先M讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS)A4規袼（210 X 297公釐） -15-5. Description of the invention (9) An anti-sticking plate after the spraying process to make a disc substrate. (Please read the precautions on the back before filling in this page) Example 3 'In the vacuum tank where the first protective layer and the second protective layer of the leaf-type thermal spraying device were formed, the implementation was carried out by 50 / zm The thickness A 1 is the anti-plate after spraying treatment to make a disc. In Example 4, in the vacuum chamber where the first protective layer and the second protective layer of the leaf-type spray coating device were formed, an A 1 spraying treatment with a thickness of 2 5 / zm was applied as the first layer from the blocking plate. Then, an anti-sticking plate after being subjected to the same 2 5 / im thick Cu spraying process (as the second layer) is installed to make a disc substrate. In Example 5, in a vacuum tank in which the first protective layer and the second protective layer of the leaf-type spray coating device are formed, a Cu spraying process with a thickness of 2 5 is applied as the first layer from the blocking plate, and then An anti-sticking plate after the same A 5 spraying treatment (as the second layer) with a thickness of 2 5 // m was set to make a disc substrate. (Comparisons 1 to 3) Comparative Example 1 was printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. The film forming vacuum tanks of the first and second protective layers of the leaf-type spray coating device were equipped with sandblasting ( sand blast) After the surface is treated to prevent the plate with R a = 4 1 // m roughness, a disc substrate is produced. In Comparative Example 2, the surface of the first protective layer and the second protective layer of the leaf-type thermal spraying device was formed with a sand blast in a film-forming vacuum tank with a surface roughness of R a = 6 # m. After preventing the plate, then make the disc substrate 0 -12- This paper size is applicable to the Chinese National Standard (CNS) A4 (210 X 297 mm) 505920 A7 B7 V. Description of the invention (ίο) (Please read the note on the back first Please fill in this page again.) In Comparative Example 3, the surface of the first protective layer and the second protective layer of the leaf-type thermal spraying device is formed into a vacuum blasting chamber by sand blasting to a roughness R. After a = 8 μm anti-plate, make a disc substrate. Using the discs produced in the above examples and comparative examples, a defect rate inspection device made by SONY was used to measure the overall defect rate of the disc substrate at a rate of 3 pieces every 30 minutes, and the average of the defect rates of the 3 pieces was determined. The results of the comparison are shown in Table 1. Each time, the target and the blocking plate of each vacuum tank were replaced with new ones. The initial defect rate was 1 to 2 x 1 0 to 6. The examples and the comparative examples were the same. [Table 1] Elapsed time when the defect rate exceeds 1 X 1 0 to 5 Example 1 12 hours Example 2 20 hours Example 3 4 5 hours Example 4 50 hours Example 5 60 hours Comparative Example 1 6 hours comparative example 2 9 hours comparative example 3 9 hours Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs The benefits and advantages of the present invention According to the present invention, the surface of the vacuum tank is coated with a layer of -13- This paper The dimensions are applicable to the Chinese National Standard (CNS) A4 (210 X 297 mm) 505920 A7 B7 V. Description of the invention (11) (Please read the precautions on the back before filling this page) The stress of the attachment is easily relaxed. Compared with the traditional, the peeling and falling of the attachment will be significantly reduced, so the defects of the disc will be reduced, and the yield rate will be increased. In addition, since the shear elastic coefficient of the metal layer forming the layered structure is set to 6 X 1 0 1 P a or less, the effect of stress relaxation can be exhibited more effectively. Similarly, the defects of the disc can be reduced, and the yield rate can be increased. In addition, since the film thickness of the metal layer forming the layered structure is set to 10 # m or more, the layered structure can fully exert the effect of stress relaxation. Similarly, the defects of the disc can be reduced, and the yield rate can be increased. In addition, because two or more metal layers with different shear elastic coefficients are used to form this layered structure, the stress is gradually concentrated on the metal layer with the smallest shear elastic coefficient, so it will be relaxed and no sharp reaction will occur. Force, the effect will be better. In the same way, it can reduce the defect of the disc and increase the yield rate. It is printed by the consumer cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs and when two or more metal layered structures with different shear elastic coefficients are formed, the shear elasticity is determined. The magnitude of the rate gradually decreases from the anti-plate of the base material, that is, the shear elasticity coefficient of the uppermost layer is the smallest, so the effect of stress relaxation of the attached matter can be effectively exerted. In the same way, the defects of the disc can be reduced, and the yield rate can be increased. At the same time, since a metal layer with a large shear elastic coefficient is coated on the base material of the anti-sticking plate, it can be easily peeled by sandblasting or the like to reduce the cost of peeling and recycling. Brief description of the round form Figure 1 shows the size of the paper sheet of the metal layer with a layered structure applied on the anti-plate. The Chinese paper standard (CNS) A4 (210 X 297 mm) is applicable. -14-505920 A7 _B7 V. SUMMARY OF THE INVENTION (12) A sectional view of a concept. Drawing number description 1 Base material (or anti-sticking plate) 2 Lamellar metal (please read the precautions on the back before filling out this page) Printed on the paper by the Consumers' Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs This paper applies Chinese national standards (CNS) A4 Regulations (210 X 297 mm) -15-