TW496973B - Fiber alignment element of integrated micro ball lens - Google Patents

Abstract

The structure of fiber alignment element of the integrated micro ball lens comprises a substrate, on the proper position of which a plurality of V-shaped grooves or a plurality of wave-guides arranged in a matrix are etched. After lithography process and heating treatment, a first polymer layer and a highly transmissive second polymer layer applied to the surface of the substrate may form at least a base and a micro ball lens between the opposite V-shaped grooves or wave-guides arranged in a matrix. In each V-shaped groove, an optical fiber is provided, while the micro ball lens, the grooves and the optical fiber or optical wave-guides are covered with an upper cap. By properly arranging the micro ball lens and the grooves, it is possible to complete the alignment of the optical fibers or optical wave-guides disposed on both sides of the micro ball lens and result in a structure of fiber alignment element. Accordingly, it is possible to provide a simplified process and achieve the production of such fiber alignment element in an integrated batch manner.

Description

496973

[Field of the invention] The present invention relates to a structure of an optical fiber alignment element of an integrated microsphere lens, and in particular a method for making V-shaped grooves or optical waveguides and microspheres on optical elements in batches by using lithography and etching molding technology. The lens completes the optical path control structure of the optical fiber passive component by integrating the v-groove, the optical waveguide and the microsphere lens. [Background of the Invention] In the face of the huge bandwidth demand driven by the Internet, optical fiber communication (optical fiber communicati) can be economically and quickly, and the dilemma of insufficient frequency is insufficient, so it has become the current wired communication. The best solution for fiber optic passive components (optica 丨 fiber passive element) has been widely used in the field of optical fiber communication, optoelectronics (optoelectronics), good fiber passive components can make fiber insertion loss (lnserti 〇nl0ss) is reduced as much as possible to make the communication of the flood number clearer and ensure the stability of the network quality. Therefore, the optical fiber passive components can be said to be the basis of optical fiber communication. And the fiber connection method used for & optical fiber passive components is a kind of fused biconical taper technology, that is, two optical fibers (optical fibers) are directly aligned and fused and stretched together so that The fiber cores of the two ends of the fiber are connected together under the effect of the cohesive force. In this way, when the fiber is connected, the two ends of the fiber are usually straight, the two braided fibers are not aligned, or the fiber connection surface is uneven. As a result of power loss during fiber connection, the precision of alignment between fibers has a considerable impact on the quality loss of the fiber connection. Another method is to assemble a graded-refractive-index lens 496973 at the end of an optical fiber. 5. Description of the invention (2) A rod (gradient ex lens, GRIN lens), which guides the optical signal in the optical fiber into the GRIN lens, and places it in the GRIN lens. The traveling light is enlarged and parallelized, and finally the optical signal is focused and coupled into another optical fiber. This method is more costly and requires manual micro-assembly to achieve it. In addition, there is another method for each optical fiber. A microlens (microlens) is made at the end to focus the light to achieve the optical signal transmission function between the optical fibers. This method requires processing of the end of each fiber; another method is based on two optical fibers or optical waveguides (waveguide). A ball through

A bal (lens) lens uses a ball lens to focus the light so that the optical signal sent by the fiber at one end of the ball lens can be transmitted to the fiber at the other end. The ball lens used is a spherical shape polished by precision ceramics. Ball lens, its manufacturing process is more complicated, regardless of the use of the aforementioned GRIN lens or ceramic ball lens as an optical signal transmission component between optical fibers, all must be manually assembled using GRIN 1 ens at the end of the fiber or ceramic ball lens at the fiber The number of GRIN lenses and ball lenses required to assemble with optical fibers requires assembling the corresponding number of GRIN lenses and ball lenses. It takes more time in the manufacturing process and cannot be produced in batches (1 n ba t ch). The method of using artificial micro-assembly ball lenses between optical fibers is prone to position deviation when the center of the optical fiber is aligned with the center of the ball lens, which reduces the optical signal transmission power between the optical fibers. In addition, there is another method that uses surface micro processing (surface micr0 machm mg) technology to make a vertical lens on a substrate between the positions where the light 2 is arranged. This method is costly and the manufacturing process is more complicated. The main object of the present invention is to solve the above-mentioned defects' to avoid the defects

496973 V. Existence of the invention (3), the issue of this invention is to form a plurality of V-shaped grooves on a substrate, and the light wave microspheres penetrate the nicroball lens, so that the optical fiber or optical waveguide can be aligned with the ball-saving lens. It is not necessary to arrange the microsphere lens between optical fibers or optical waveguides by artificial micro-assembly. Another objective of the invention is that the V-grooves and microsphere lenses used in the optical waveguide and fixed fiber of the present invention are formed on the surface of the substrate by using lithography and patterning technology in conjunction with heat treatment. Therefore, the precision of the alignment of the optical fiber or the optical waveguide with the microsphere lens can be improved. 0 The improvement of the process of the present invention and the connection of the microsphere lens of the present invention can improve the overall process of forming a plurality of first polymer layers and achieving the above-mentioned engraving. The purpose is that the method of the present invention is relatively simple and has a certain degree of benefit. The integration and batch production are carried out on the V-shaped groove and the optical waveguide substrate of the present invention, and the purpose structure is that after lithography several bases, the final mirror and the photometric improvement on the side have a seat and a groove above the ball. The groove or fiber is completed, and the production efficiency of the hair can be closed. For the purpose, the array V-shaped and high light transmittance heat treatment, the shape of the microsphere transparent i to cover the appropriate alignment of the micro-optic waveguide; by this integration and the detailed explanation of the invention is in a groove or The second polymerization is added to the surface of the substrate, so that the fiber ball lens and the proper configuration can provide a sub-production of light and technology. The substrate on the substrate is formed on the surface and is properly arranged on the optical fiber. Aligning the volume, the V-shaped surface of the optical waveguide substrate is in place, and the microsphere is used as a simple element knot to be placed on the coin's coating surface to form the microsphere in the complex groove. Schema theory

496973 V. Description of the invention (4), as follows: ...: ..... II. Please refer to "Figure: 1A", which is a schematic diagram of the structure and appearance of the present invention, as shown in the figure: The present invention The structure has a silicon substrate 1 on which a plurality of V-shaped grooves 1 1 are formed in batches. The V-shaped grooves 1-1 are arranged on the surface of the substrate 1 in a parallel array. Adjacent grooves are arranged in parallel, while the opposite grooves are aligned in a straight line ... A part of the V-shaped grooves 11 is left in a certain area ', and within this area A plurality of microsphere lenses 2 are formed, wherein each microsphere lens 2 is formed between the opposite V-shaped grooves 1 1; corresponding grooves are arranged in the plurality of V-shaped grooves 1 1. The number of optical fibers 3, ^ The recessed structure of the V-shaped groove 11 allows the optical fiber 3 to be confined within the V-shaped groove 11, and the V-shaped groove 11 and the aforementioned microsphere lens 2 Appropriately configured so that the center of the optical fiber 3 erected on the opposite V-shaped groove 11 1 can be aligned with the center of the aforementioned microsphere lens 2. Please refer to "Figure 1B" and "Figure 1C", which are schematic side views of the structure of the present invention, as shown in the figure. As shown in Figure 1B, the cross section of the V-shaped groove 11 is A V-shaped recessed structure with appropriate angle, size and depth, so that the optical fiber 3 can be confined within the V-shaped groove 11 without being shifted left and right. The V-shaped groove 11 can define the optical fiber 3 proper orientation ||, with the formation of the microsphere lens 2, so that the core 3 of the optical fiber 3 1, the perspective center of the microsphere lens 2 is exactly the same point, thereby completing the alignment between the optical fibers 3; As shown in Figure 1C, after the optical fiber 3 is disposed in the V-shaped groove 11-, the optical fiber 3 and the microsphere lens ― 2 are covered with a pair of cover plates 4 corresponding to the substrate 1. With the upper cover 4 and the substrate 1, Fiber 3 is fully fixed and

Fly, Oy / 3 V. Description of the invention quot " " " A "-$ Fiber 3hu, read (sound seal, which can avoid interference from external sources when the optical fiber 3 is used for special optical signal round in the future, It affects the optical signal transmission quality. Please refer to "Figure 2A", "Figure 2B", "Figure 2C", "Figure 2ϋ", "Figure 2E", "Figure 2F", ""

"Zhuo 2G" is a schematic diagram of the manufacturing process of the present invention, as shown in the figure. Firstly, as shown in FIG. 2A, a substrate 丄 is provided first, and the substrate 丄 is composed of the industrial development institute; further, as shown in FIG. 2B, bulk micro machining is used, The silicon substrate 1 is used as a processing base material, and a lithography process is performed on the surface of the silicon substrate 1. A mask aligner or a stepper is used to process the substrate. 1. Expose at the appropriate position on the surface 'to form an array pattern on the surface of the substrate 1, and then select an appropriate etching solution to perform an anisotropic surname engraving process on the surface of the substrate, and engrav the previously exposed pattern position A three-dimensional V-shaped groove 1 1, wherein the V-shaped groove 11 has an appropriate angle 'size and depth, as shown in FIG. 2C, and is coated on the surface of the substrate 1 The first polymer layer 5 (polymer layer) composed of a photosensitive material of polyimide (P0yimi de), the coating method can use the spin coating (spm coat i mg) technology, waiting for the first polymer layer 5 After coating is completed, continue coating on the surface of the first polymer layer 5 The second polymer layer 6 is composed of polymethacrylate or polyacrylate polymer material on the cloth, and the second polymer layer 6 is composed of a photoresist containing south light transmittance. (Photoresist), and has a glass transition temperature lower than the first polymer layer 5 (giass transition)

496973 V. Description of the invention (6). Temperature, -T: §,); such as: 5 and the second aggregation layer | 6 lithography several block patterns, this pattern can be the aggregation layer 5 and the second aggregation layer As shown in the six stacks, the substrate 1 and the first row are heat-treated so that the heating temperature is higher than the Tg of the first polymer layer 5, the soft state, and the fluidity (f 1 uidity) are increased. The temperature layer 6 affects the spherical microsphere lens 27 formed by the first polymer layer 5 and the second polymer layer 6 due to the surface tension effect; as shown in FIG. 2F, the optical fiber 3 is arranged in the aforementioned V shape. The two sides of the ball lens 2 are fixed at an angle by the stone-made groove 11 and cooperate with the center of the lens 2 disposed in the V-shaped groove 11; as shown in FIG. 2G, the substrate corresponds to the optical fiber 3. 1 The structure is packaged, and the upper cover is completely fixed, and the optical fiber 3 and the optical fiber 3 can be prevented from affecting the optical signal transmission quality in the future. Please refer to the process shown in Figure 2D shown in "Figure 3". A column or a polymer layer is formed on the circle or ellipses. 5 Pass the second polymerization and the second polymerization and start to produce area balls. Shape, then 6 is cooled with the first polymerized microsphere lens 2 groove 1 1 the inner substrate 1 is shown by a fiber 3 that is not its proper size, which is covered at this position with 4 and the substrate microsphere lens 2 is transmitted, Form a complex circle on the surface of the first polymerized layer substrate 1 to make the first structure; for example, the second E and the second polymerized layer 6 enter the Tg of the combined layer 6 but the combined layer 6 is still small so that it is molten. reflow), and shrink the substrate after the second polymerization, to obtain the base formed by the second polymer layer 5 and the base 7 after molding, so that it is limited to the microisotropy. The design of V-shape and depth makes the heart just align with the microsphere, microsphere lens 2, the upper cover 4 of the groove, the whole 1, and the optical fiber 3 can be completely sealed, so that the external light source interferes, which is the invention Structure of the first embodiment

496973 V. Description of the invention (7) Schematic diagram, as shown in the figure: (Surface micro micro-machining to form a complex optical waveguide 8 series of area lenses arranged in a straight line manner 2 Ball lens aligned with V-groove fiber 3 Figure 6 is in this V The astigmatism 9 b 〇 is used to set the focusing rate of the mirror in advance. It is used in production, and the system is shown in the above 2 and the light wave structure, and the groove 11 and the optical waveguide are shown in this type of groove. At 19 a, the lithography system of the V-shaped groove described above calculates the basic mode, and its optical fiber properties are acceptable, so the cost of this invention is generally small, so it can be costly: the present invention is made by arranging arraying arrays, The lithography and the guide 8 formed in the area are formed in the optical waveguide 8 with 8 optical signals as shown in Figure 4. The 1 or optical waveguide can also use the surface micromachining method through the microsphere) technology. The optical waveguides 8 on the surface of the silicon substrate 1 are arranged in the vicinity of the opposite optical waveguides 8 to align the opposite optical waveguides 8 with a plurality of microsphere lenses 2. The microspheres are heat-treated. Creators An appropriate position on the surface of the plate 1 is shown to indicate that the structure of the present invention can also be designed to be used in combination to make the microsphere lens 2 a conductive element. In addition, as shown in FIG. 5, the formation position of the microsphere lens 2 is designed to the side of bit 8. In this way, the optical signal can be converted into a parallel light groove by the lens 2. The optical wave path and the heating plate need not be aligned. A V-shaped shadowing process can be used to reduce the light signal, which effectively reduces the guidance and microprocessing. The square v-shaped groove A has a slightly higher transmission groove and its element ruler ball lens type groove and optical assembly precision insertion microsphere penetrating element can be inch, improve design and shape, so in the waveguide size type Performing micro, and through the loss, lifting the mirror, because it is integrated with a high micro lens, it can be used with the micro ball lens and the micro ball lens in the operation of high-concentration manufacturing method and batch density,

$ 11 页 496973 V. Description of the invention (8). The stability of the c # of the present invention is integrated into the general micro optical platform system (mi cr o-op ti cal bench system), which lies in its application field, manufacturing cost and time efficiency. There can be considerable improvement. However, the above are only the preferred embodiments of the present invention. When the scope of implementation of the present invention cannot be limited, that is, all equal changes and modifications made in accordance with the scope of the patent application of the present invention shall still belong to the patent of the present invention. Covered. ❹

Ge 12 pages 496973 Brief description of the drawing. [Simplified drawing: single said: _] Figure 1A is a schematic diagram of the appearance of the structure of the invention. Figures E, 1B, and 1C are schematic side views of the structure of the present invention. Figures 2A, 2B, 2C, 2D, 2F, and 2G are the present invention. Schematic diagram of the manufacturing process FIG. 3 is a schematic diagram of the first embodiment of the structure of the present invention. FIG. 4 is a schematic diagram of a second embodiment of the structure of the present invention. FIG. 5 is a schematic diagram of a third embodiment of the structure of the present invention. Fig. 6 is a schematic diagram of a fourth embodiment of the structure of the present invention. [Illustration of Symbols in the Drawings] 1 V-shaped groove ····· • 11 2 Optical fiber · ..... —— · 3 1 Top cover ...... • 4 5 Second polymer layer · · · • · 7 6 Optical Waveguide .....-8 a parallel light · · · · • 9b Substrate ........ Microsphere lens ... Core ： The first polymer layer ···· base ............ divergent light ... 1

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Claims (1)

496973 VI. Scope of patent application --- 1. An integrated body: a micro] ball lens optical fiber alignment element structure, which is a substrate; :: ,, a plurality of grooves, which are formed in an array on the substrate At least one base, which is formed at an appropriate position between the arrayed array grooves; at least one microsphere lens, which is formed on the surface of the base, the base, and the microsphere lens It is formed by the lithography process and heat treatment between the arrayed grooves. 2 · The structure of the optical fiber alignment element of the integrated microsphere lens according to item 1 of the scope of the patent application, wherein the substrate is made of silicon. 3. The optical fiber alignment structure of the integrated microsphere lens as described in item i of the patent application, wherein the groove is formed as a v-shaped groove. 4. The light quasi-element structure of the integrated microsphere lens as described in item i of the scope of the patent application, wherein the groove formation method includes a micro-d type. W / 、 Etching side 5 · The integrated microsphere alignment element structure described in item 1 of the scope of the patent application, the base and microsphere lens materials include the right fiber pair, where the microsphere lens system is high Photoresistance of light transmittance. 6. The integrated microsphere lens as described in item 1 of the scope of patent application. "% Quasi-element structure, in which the material of the microsphere lens is composed of a polymer material including poly = optical fiber pair ester and polyacrylate. The uronic acid I is the product described in item 1 of the scope of patent application. The microsphere lens has a quasi-element structure, wherein the base material is a fiber pair material. Photosensitivity 496973 496973 VI. Scope of patent application — a plurality of light waves: and: & grooves, the optical waveguide and the ¥ grooves are formed on the substrate; 1 at least one base, the base is formed on the substrate The array is arranged at a suitable position between the light grooves; the mirror and the v-shaped lens are small; the mirror, the microsphere lens is formed on the surface of the base, and the base is arranged with light waves. Ί㈣ 由 微 # 制 程 肖 力 ° heat treatment Formed in this array type 丄 ", between the skin leading and the v-shaped groove. Type j. For example, if the scope of the patent application is 1 ^ The fiber alignment element is coated with m ^ ^ ^ K. The light of the ball lens is 16. Such as the cow's chamber ~ structure, where the substrate is made of silicon. Fiber alignment element " Λ 利 ^ circle 14 The integrated microsphere lens light and last name square structure ... The ¥ -shaped groove production method includes lithography 1 7 · If the scope of patent application is the first The optical fiber identification element structure according to item 4, wherein the optical waveguide is integrated and / or a light former of a ball lens. The first method is to use micro-machining. The fiber is aligned with the element ^ Constructing the culprit / the light of the integrated microsphere lens described in item 14 above, standing in the middle: the base and the microsphere lens contain a photoresistance Λ 1 q / from the 'microsphere lens system for high light transmittance first blocked out Ϊ Ϊ ϋ. Ϋ application 凊 patent scope No. 14 顼 wounded. The fiber is aligned with the element structure, and the base is integrated with the light material of the microsphere lens. Zhuang series includes a polyimide photosensitivity 20. For example, the scope of the patent application is the fiber pair structure, in which the light of the integrated microsphere lens is described. ^ 成 = including methacrylic acid ^ 16 I