TW495772B - Soft magnetic alloy powder for electromagnetic wave absorbing sheet, electromagnetic wave absorbing sheet, and method for manufacturing them - Google Patents

Abstract

The object of the present invention is to provide a soft magnetic alloy powder for an electromagnetic wave absorbing sheet, which has a sufficiently large magnetic loss term (μr"") even in a high-frequency band, and which is excellent in the electromagnetic wave absorbing performance in a high-frequency band of over 100 MHz, and an electromagnetic wave absorbing sheet and a method for manufacturing them. Soft magnetic alloy powder for a flat electromagnetic wave absorbing sheet, which has a magnetic loss term (μr""), is improved drastically within a specific composition range in a Fe-Si alloy or a Fe-Ni alloy, and the electromagnetic wave absorbing characteristics excellent in the high-frequency band are delivered by optimizing conditions such as particle size, thickness and aspect ratio according to an alloy within the above composition range.

Description

495772

The electromagnetic wave absorption of noise generated by the living system is soft magnetic. In the winter, magnetic waves are used to absorb the magnetic waves. Its manufacturing has rapidly become a positive influence in recent years as a leakage. Out. Ming, the system to absorb especially 4 under-sheet method. From Jt, with the development and development of others, electricity is unnecessary for this source to use electricity as the cause of such electrons, or it has always been necessary to stop unnecessary materials and related to the internal electronic parts that can be simply installed in action. In the high-frequency range above 100MHz, and the widespread use of iron-clad personal computers and mobile phones for this sheet, the electromagnetic wave barriers caused by the malfunction of electronic equipment caused by them have become countermeasures such as electromagnetic wave barriers. Magnetic wave absorbers Such as covering, anti-electromagnetic wave absorbers, electromagnetic alloy powders of various electronic devices with unnecessary electrical receiving properties and electromagnetic waves of information equipment, or giving the human body the possibility that the above-mentioned electromagnetic wave absorbers are complicated by the structure of the electromagnetic wave, which must be complicated. It is thin and for the reason, usually it is a mixture of rubber or powder, formed into a sheet, and the electromagnetic waves generated by electronic equipment, information, and other high-frequency regions are absorbed by these electromagnetic waves as Fe ~ Al-Si alloys. (Sendust responds to the equipment's small size, thinness, or flexibility for complex shapes. Therefore Yueyue specializes in the use of organic binders and soft magnetic materials. Equipment, as the frequency of the CPU clock speed increases, the frequency also increases, so there is a strong demand for products with excellent collection performance. Proponents include: for example, water atomized powder of 'iron-silicon-aluminum magnetic alloy'

495772, description of the invention (2) flattening with a grinder, etc., after mixing the resin, molding &# 壮 ^ flat powder and polyurethane are flattened, the powder is mixed with 'gum' The powder is made into a flat electromagnetic wave absorber by a grinder or the like (a roll is applied to form a sheet, however, the above-mentioned proposal is used as ί / m \ 'δ7⑴), etc. The wave absorber, because In the high-frequency region, the magnetic permeability of the complex magnetic powder is small, and it cannot satisfy the missing term (/ ^ ”) performance in recent years. The disclosure of the electromagnetic wave absorptive invention of the skin domain is to provide a magnetic loss term (#r) in the high frequency domain, which is a well-known problem, even in the above high frequency domain. The electromagnetic wave absorptivity ^ = is large, especially for ίοΟΜίζ soft magnetic alloy powder, electromagnetic wave b II, the inventors of electromagnetic wave absorbing sheets, etc., have not achieved the above = sheet f 'and its manufacturing methods. In Fe-Si based alloys Or the results of deliberate research in Fe, Ni-based alloys, and found that the magnetic loss term can be greatly increased (the specific composition range is made by the alloy sentence corresponding to the composition range, the inventor, etc., etc. The conditions were optimized, and it was found that the thickness of the bracket and the aspect ratio characteristics were flat, and it was known that the flat #: or the excellent electromagnetic wave absorbing alloy powder can be produced. The flat electromagnetic wave absorbing sheet is soft The magnetic properties are further combined with a um and -w binding agent, 1 mixed, formed into a sheet :: shaped alloy powder added with the flexibility of organic shapes in response to complex shapes, which can be obtained thinly and with a depth that can be understood in two frequency domains. excellent Different electromagnetic

495772 V. Description of the invention (3)

The S-wave absorption = performance electromagnetic wave absorbing sheet, and completed the present invention. ^ Invention 'is a soft magnetic alloy powder for electromagnetic wave absorbing sheet. Its special feature is that the thickness d is 0 · 0 1 // m ~ 0 · 6 // m, aspect ratio (length 1 / thickness d) / Is a soft magnetic alloy in a flat shape with a saturation magnetization of 1 · 2τ or more and an e-N soil-based soft magnetic alloy having a flat shape of 10 to 500. The composition of the soft magnetic alloy of the present invention is characterized in that the Fe-Si system is made of Si3 wt% to 9 wt% of the remaining unavoidable impurities; the Fe-Ni system is made of Ni36 wt. $%, The residue of Fe and unavoidable impurities. Basin U: 'is an electromagnetic wave absorbing sheet, which is characterized in that two, two, i, s have soft magnetic alloy powder for electromagnetic wave absorbing sheets, and can be Fe-Sl series alloy powder of the above composition = alone Composition 耠 古 ％ # n. 77 + en 1 糸 alloy powder powder is made of suitable powder, or composite powder of Fe_Sl series alloy powder and alloy and field ratio. The present invention relates to a method for manufacturing electromagnetic wave absorption.

The average composition of the Fe-M series is 、. The preparation process of the Fe-Si series or the above is prepared; the soft magnetic alloy powder d of the fish m λ _ is two-wide rule == mechanical processing, and the thickness is made. Made of 500 flat alloy powder) = (, length and thickness d) is 10 ~ and proposes that: before the machining, it is combined with the above composition, and also-machined. In the end, it is a commercial powder, and a grinder and the present invention are an electromagnetic wave absorption feature characterized by the 'system contains: For the method created by the above method = potential method', that is, the previous series of alloy powder or Fe_NlJ = alloy powder, Also ___ a cup of Yang Mo, or Fe-Si series

\\ 312 \ 2d-code \ 90-09 \ 90] 16199 ptd page 6 which 772 5. Description of the invention (4) Compound powder in which alloy powder and Fe-N i-based alloy powder are mixed at an appropriate ratio, and an organic binder is used. A process of mixing; and a process of processing the mixture into a sheet. Best Mode The present invention is characterized by using soft magnetic alloy powders for Si-Fe based and Ni ~ Fe based electromagnetic wave absorbing sheets in a specific composition range specified below. In addition, the present invention obtains a soft magnetic alloy powder having excellent electromagnetic wave absorption performance in a high frequency region by optimizing particle diameter, thickness, aspect ratio, and other conditions according to alloys having a composition range, and electromagnetic waves using the powder Absorbent sheet. . In order to maintain the electromagnetic wave absorption characteristics at high frequencies, the saturation magnetic flux density Bs and the resistance value are preferably larger, but if the Si is less than 3% by weight, due to the precipitation of the heterogeneous phase (7 phases), while the magnetic permeability # decreases, , The resistance value also becomes smaller, which is not the reason: and 'If Si exceeds 9% by weight, due to the heterophase (Fe3Si phase), you will begin to precipitate, and the magnetic permeability # and the saturation magnetic flux density Bs will decrease. In the present invention, when Si is 3 to 9% by weight, only I ^ 'valley (bCC phase) exists, and a high saturation magnetic flux density Bs disk resistance value' can be obtained while maintaining excellent high frequency characteristics. N i-F e ^ m The right Νι is less than 36% by weight. Due to the creation of 66 energy π, χ wk, the position of k: turn into an uneasy state, and the saturation magnetic flux density is dense: not female. If Ni exceeds 49, Cao Yong. /, Head, the reason that the mountain is low, it is not added, and the decrease of the magnetic permeability 3, 1 is due to the coercive force He will increase slowly 丨 + low V magnetic permeability #, nor is it.

Out of 5772 5. Description of the invention (5) J Chang 'is magnetically = the law of magnetic induction via an alternating magnetic field from the outside of a magnetic body'. As the magnetic flux changes, the eddy current is G at the center of the magnetic body and at the end. The formation of the thirst of thirst: the magnetic flux density of the reading ridge at the end becomes (tum dagger. The magnetic flux density of the stone body is attenuated from the surface to the depth of resistance, f = frequency, P permeability). ί. This depth 'is called "epidermal depth". As a result, minus 2 is thinner than this epidermis, and it is impossible to reduce the magnetic loss by eddy current to 2: 二. For example, lowering the frequency :: (: ,, ；; quot; r, lower, so that the high electromagnetic wave absorption in the high frequency range, two Γ Q // rπ) becomes unavailable. Twisting moon dagger: In the present invention, the thickness of the soft magnetic alloy powder is 0 to 200. That is, if it exceeds 0.6, the occurrence of eddy current ^ is an electromagnetic wave absorption performance in the ancient frequency domain, which may decrease. The same as "m", the magnetic permeability is reduced. In addition, in the flat powder with a thickness of… Erguang, 'manufacturing' will inevitably contain a thickness of more than 0.00: or less than 0.01 _ of the flat There is no particular problem as long as the powder is contained to such an extent that it does not affect the temple. In the present invention, if the aspect ratio (length i / thickness xd) of the soft magnetic alloy powder is less than 10, it cannot pass through. The magnetic permeability of the shape of the alloy powder gives a large magnetic permeability, which is not desirable. The larger the aspect ratio, the greater the aspect ratio of the alloy powder filled in the sheet during the magnetization, the influence of the antimagnetic field inside the alloy powder. Smaller, it is better. However, the aspect ratio is larger than

W312 \ 2d-code \ 90-09 \ 90116199.ptd Page 8 / / 2 Description of the invention (6): 50000 'thin thin plate-like alloy powder or easy to bend' or easy: bright; and the size ratio is more Good range. In addition: Although the size ratio of the spirit is limited to 10 ~ 500, it can also contain those who cannot meet this condition if it is inevitable. In the door 3, there is a right-dried soft magnetic coupling. In the state of 48 Å, there are "Tt and magnetization. The electromagnetic wave absorption for the purpose of obtaining high frequency in the form of a flat alloy powder method: = 2T ' In the present invention, if the soft magnetic alloy powder has η m or more than 4 0 " m, the head of the scholar Λ ten spoons of grain D5〇 less than 1 〇 " thickness d is 0 〇1 ~ 〇6 After mechanical processing of the following process, it is difficult to make 勹 υ. Υι ◦ 6 and the aspect ratio is “” = = excellent electromagnetic wave absorption characteristics in the frequency domain: method to obtain the average particle diameter D, jealousy / 1 η _ Ma Suowu. In particular, flattening is the same; the force of two is 5, it takes time to process the y shell, which is not a welcome. The soft magnetic alloy powder not mentioned above is used: cold method, usually Melting, dazzling Jingde, Zhi, and Ben. ^ Known business methods, spherical powder and shape made by rollers = ^ Yes, using atomized powder, for the sake of comparison ;: ok It is easy to produce a flat plate with excellent characteristics for flattening soft magnetic alloy powder (Stamp mill, etc.) In particular, the attritor γ mill has a short time Flattening, so it's better. Easy to apply & gold powder in the present invention, soft magnetic alloy powder required for electromagnetic 1 = add organic binder to sheet shape. Soft magnetic, final ^ =, then mix Processing Q gold uncle, for example, can respond to the high purpose

Fifth invention description (7) Frequency in the frequency domain, use. Separate powder of powder, a ^ Fe; Sl-based alloy powder or Fe-Ni-based alloy mixed in an appropriate ratio = 1 糸 alloy powder and Fe-Ni-based alloy powder also It can be used to contain Fe ~ Si " -into. In addition, as an electromagnetic wave absorbing sheet, a layer of powder appropriately accumulates a layer of 5 gold per minute and a layer containing Fe—Ni-based alloy. In the present invention, you reach the date and time as the day of the month. Cannengren 3: Use chlorinated polyethylene resins ::: organic powders of gold-bonded organic powders, polyvinyl chloride, vinyl formate resins, polyester ethylene-butadiene rubbers, etc. & In addition to acrylonitrile-butadiene rubber and benzene organic binder, it is better to cover 1 plastic resin. Again, except for the agent. The amount of addition is based on the organic plasticity, and a small amount of various plastics can be added. The shape and characteristics of the head and the sheet are not limited to the wettability of the above-mentioned organic binder, but also a coupling agent such as a flat metal powder of the Zr type. Coupling: 系 Ti, Si, and A1 can be added, and the electromagnetic wave produced can be increased. When added, it can improve the formability, as well. Because of the corrosion resistance of the material, it is a well-known mixing machine (,, e ☆ ^, etc.), which is a flat alloy powder and an organic binder. The powder can be mixed with a pressure kneader and a mixer. , Using daggers, and dongji) for mixing and kneading. Formed into sheet material by forming machines such as rollers = extrusion machines, calendering rollers, hybrid applications, shapes, characteristics, etc. The thickness of the sheet can correspond to the ^ 4 »F weekly and consistent implementation examples of the sheet. Example 1

4yy / 72 V. Description of the invention (8) " Manufacture 1 out of r., Fei °° -X (X = 1.5, 3.0, 4 · 5, ", 7.5,

Bs, ’volume resistance! :) alloy. The saturation magnetic flux density, resistivity, and constituent phases of this alloy are shown in Table 1. It is clear from the low that the saturation magnetic flux density decreases with increasing Si and the product resistivity increases with increasing Si. In addition, the s 3 01 meeting began to precipitate.

Example j Table 1 SixFel produced by the two weaving. . "X = 1 5 3 0 6.9. / °), the alloy formed by water atomization was used to obtain the fu M # ^ D% Π from the ball of m, and the average particle size D5 ( ) Is a powder using a grinder I. The alloy powder is mixed with isopropanol, and the afternoon machine is rotated at a speed of 200 rpm X for 5 hours. After that, the alloy Zhihe knife is dried to make a flat alloy, and then the flat alloy powder is added as follows: ° Polyethylene resin and a small amount of plastic can be combined to make the powder into: Becomes 60% by volume

495772 V. Description of the invention (9) After mixing and forming with a mixing roller, an electromagnetic wave absorbing sheet is produced. The electromagnetic wave absorption characteristics of the obtained electromagnetic wave absorbing sheet of 1 MHz to 10 GHz are shown in Figs. 1 and 2. The real number part # r 'of the complex specific permeability in FIG. 1 and the imaginary part // rn of the complex specific permeability in FIG. 2 are shown on the vertical axis, and the horizontal axis represents the frequency. In the figure, the line a of the present invention and the state of 6.0% Si-Fe in the present invention, S i-F e, are indicated by a thin line c. For the measurement, the sample is in the form of an electromagnetic wave absorbing sheet (toroidal), and a 500MHz terminal coil (endc 〇i 1) is used to measure the impedance of the analyzer (HP-4 2 9 1 A). in,

Analyzer, HP-8720D) to obtain the S parameter Niclolson-Ross, and the Weir method to obtain It can be clearly understood from Fig. 1 and Fig. 2 that, in Si, the condition of 3.0% Si-Fe which is 0% at 100MHz can be improved. In the medium and rough condition, with the thick line b, the 9.0% of the present invention is added to work below the toroidal volume, and the sample is inserted to form a test fixture, which is obtained by resistance. For 500 MHz or more, the network analyzer (N etw rk number, from this S parameter, the permeability ratio # r, # r) is determined by the complex number. The amount is higher in the range of 3.0 to 9 wt%. Absorption characteristics of electromagnetic waves in the frequency domain

Comparative Example 1 Except for using a spherical alloy powder having a composition of SyAlJe84 (wt%) and an average particle diameter of 17 which was prepared by a water atomization method, the rest was £. It was produced in the same manner as in Example 2. The electromagnetic wave absorbing sheet of the comparative example.

495772 V. Description of the invention (10) Electromagnetic wave absorption characteristics of 1 M H Z ~ 1 〇 G Η Z. The results are shown in Figs. 1 and 2. In the figure, the case of 1 · 5% S i _Fe of the comparative example is a thick line d, and the case of 10 · 5% S i-F e of the comparative example is a thin line e. F e ϋ — a 1 of the comparative example The situation is indicated by the thick line in f. It can be clearly understood from FIG. 1 and FIG. 2 that the sheet of the comparative example has a sharp decrease in electromagnetic wave absorption characteristics in the high frequency region, and the sheet of the present invention maintains excellent electromagnetic wave absorption characteristics in the high frequency region. . Example 3

The alloy made of Si6Fe94 prepared in Example 1 was used to perform water atomization to prepare spherical alloy colors with average particle diameters D5G of 8 // m, 1 8 // m, and 50 #m. Each spherical alloy powder was formed into a sheet shape by the same process as in Example 2 to produce an electromagnetic wave absorbing sheet. The imaginary part of the electromagnetic wave absorption characteristics of the obtained electromagnetic wave absorption sheet at 100 MHz, 50 MHz, and 1 GHz / z r ”) is shown in Table 2. Hard number ratio guide Table 2

As can be clearly seen in Table 2, the alloy powder exhibits excellent electromagnetic wave absorption characteristics, while D is; 5 ° is 18 °, and the electromagnetic wave absorption characteristics are reduced. μ is 8, 50 "丨

Throughout Example 4, a gold alloy having an average particle diameter d5Q of 18 SleFe94 was prepared using a manganese product made in Example 1 and a spherical alloy powder made of a water atomizer gold powder was not used. The obtained combined treatment, that is, the aspect ratio of the alloy powder: in the state of 1: was prepared in the same manner as in Example 2: formed into a sheet shape (comparative example); and Example 2 The same process was followed by grinding and flattened alloy powder (alloy powder thickness was 0.5 5 // m, aspect ratio = 丨 〇〇), and it was formed into a sheet by the same process as in Example 2. Timber-like (example).

The electromagnetic wave absorption characteristics of the obtained electromagnetic wave absorbing sheet from 1 MHz to 10 GHz are shown in Fig. 3. In FIG. 3, the thick line A is the complex specific permeability of the present invention from r ′, the medium thick line β is the complex specific permeability of the comparative example // r, and the thin line c is the unitary number of the complex specific permeability of the present invention. Part #r '', and the extremely thin line D is the imaginary part of the complex specific permeability of the comparative example // r ”. The measurement is performed in the same manner as in Example 2. As can be seen from FIG. 3, the vertical and horizontal dimensions are used. The electromagnetic wave absorbing sheet of flat alloy powder having a ratio of 100 is different from the electromagnetic wave absorbing sheet of spherical mouth-shaped Meng alloy powder having an aspect ratio of j, which has "different electromagnetic wave absorption characteristics". &Amp; Example 5 m alloys with a composition of NixFe⑽-χ (χ = 32 '36, 42, 45, 49, 52 are produced. The alloy's initial magnetic permeability, saturation magnetic flux density, 1 magnetic force, and volume resistivity are shown in the table. 3 ° It is clear from Table 3 that the initial magnetic permeability ㈣1 is about 45% by weight.

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495772 V. Description of invention (12) is the largest. The saturation magnetic flux density increases as the amount of Ni increases. Conversely, the coercivity and volume resistivity decrease as the amount of Ni increases. Table 3 Coercive force. £ c (A / m) _ one volume resistivity (Ω · rn) 13 —7. 0 〇X1 〇 * '-^ i ^ · 5 8 —6. 3 3x1 〇 * 7 6 5 ^ ^ 5. OOxlO " 7 2 3.87 —4 · 33xl0-7 69 3. 6 3 X 1 〇 '' ----------- 3. 2 6 X 1 〇'7 Example 6 Use according to Example 5 The prepared NixFei.x (x = 32, 36, 42, 45, 49, 52% by weight) alloy was water atomized to obtain a spherical alloy powder having an average particle size of 17 # m. This alloy powder was mixed with isolactone, and was ground with a mill at a rotation speed of 200 rpm x 5 hours, and then the alloy powder was separated and dried to produce a flat alloy powder. Then, a chlorinated vinyl resin as an organic binder and a small amount of a plasticizer were added to the flat alloy powder to make the powder 60% by volume, and then mixed and shaped by a mixing roller to produce an electromagnetic wave absorbing sheet. material. The electromagnetic wave absorptivity of the obtained electromagnetic wave absorbing sheet from 1 MHz to 10 GHz is shown in Figs. 4 and 5. The real part I · ′ of the complex specific permeability in FIG. 4 and the imaginary part # of the complex specific permeability in FIG. 5 # Γ "

495772 5. Description of the invention (13) The axis represents frequency. The measurement was carried out in the same manner as in Example 2, and was also determined by the method of absorbing electromagnetic waves of the sheet of Comparative Example 1. Reference. The chargeability is shown. In the figure, the case of 36% Ni-Fe of the present invention, and the case of 42% Ni-Fe of the first invention, are indicated by the thick line h (but the second line § indicates that the line] 1). In the case of 49_: 146 of the invention, the thin line / the thick line in Figure _5 and the thin line in Figure _5), 愔, 'No (but shown in Figure 5, Comparative Example 52) of the 32% Ni-Fe of the comparative example % Ni-Fe case, detailed

The case of Fe-Si-M is indicated by a medium-thick line. The values of, and M indicate that the comparison example = 4 and FIG. 5 clearly show that the sensitivity is in the range of 36 to 49% by weight, and in particular, it can improve the electromagnetic wave absorption characteristics in the high frequency range above 100 MHz. Moreover, compared with the comparative example (Si-Al-Fe alloy), it turns out that it is excellent in the magnetic-wave absorption characteristic in a high frequency range. Example 7 < 1 Spherical alloy powder having an average particle diameter of 1V, 17 / zm, and 50 # m was prepared by water atomization using the alloy made of Nije58 prepared in Example 5. Each spherical alloy powder was formed into a sheet shape by the same process as in Example 6 to prepare an electromagnetic wave absorbing sheet. The electromagnetic wave absorption characteristics of the obtained electromagnetic wave absorbing sheet at 100 MHz, 50 MHz, and 1 GHz (the imaginary part of the complex specific permeability // r ,,) are shown in Table 4. Table 4

No. Dso (β να) complex ratio rotation, imaginary part of magnetic permeability β r〃 10 ΟΜΗζ 500MHz 1GHz Comparative Example 1 8 1. 8 4. 0 4.3 Example 2 17 3.0 6. 5 7.0 Comparative Example 3 5 0 2. 0 4. 2 -4. 5

\\ 312 \ 2d-code \ 90-09 \ 90116199.ptd Page 16 495772 V. Description of the invention (14) The average particle diameter is D5. If it is 1 7 // m and if 50 is 8 // m, 50 " m, it can be understood from Table 4 that the alloy powder exhibits excellent electromagnetic wave absorption characteristics, while D electromagnetic wave absorption characteristics decrease. Using the old method made in Example 5, prepare an alloy of 彳 & D 7 58 kg, and apply water mist to dry it. 卞 Angle: ^ Spherical human gold with a pile diameter Dm of 1 8 // m The powder is not ground by a grinder, that is, mouth, Y2. The obtained state T with a B-inch ratio of 1 was made into a longitudinal shape ^ = sheet-like (comparative example); and an alloy powder (alloy powder) that was subjected to grinding treatment and flattened in the same process as in Example 6. The thickness is 0.5 # m, and the aspect ratio is 100), and it is formed into a sheet shape by the same process as in Example 6 (Example). The electromagnetic wave absorption characteristics of the obtained electromagnetic wave absorbing sheet from 1 MHz to 10 GHz are shown in Fig. 6. In FIG. 6, the thick solid line E is the complex specific permeability of the present invention from r ', the medium thick line ρ is the complex specific permeability of the comparative example // r', and the thin line g is the imaginary number of the complex specific permeability of the present invention. The part μ r ′, and the extremely thin line Η are the imaginary part μ r of the complex specific permeability of the comparative example. The measurement is performed in the same manner as in Example 6. As can be clearly understood from FIG. 6. The electromagnetic wave absorption sheet of a flat alloy powder having a size ratio of 100 has better electromagnetic wave absorption characteristics than the electromagnetic wave absorption sheet using a spherical alloy powder having an aspect ratio of 1.

\\ 312 \ 2d-code \ 90-09 \ 90116199.ptd Page 17 495772 V. Description of the invention (15) Different. Example 9 For a mixture of the alloy formed by using Si6Fe94 prepared in Example 2 and powder mixed with an organic binder, a pair of flat alloy powders used for the alloy formed by Ni42Fe58 produced in Example 6 was used. ^ ♦ After mixing the right and right mixture, mix them to AR Λ q Μ ^ σ is 50% by volume, mix with a mixing roller, and shape to make electromagnetic and κ night absorption Sheet. The Φ obstructed wave absorption characteristics of the obtained electromagnetic wave absorbing sheet from 1 MHz to 10 GHz are shown in Fig. 7. In FIG. 7, the solid line M is represented by all the complex ratios of the complex ratio ^ ^ 全部 ¥, and the solid line N is represented by the imaginary part of the complex ratio permeability. The measurement is performed in the same manner as in Example 2. It can be clearly understood from FIG. 7 that electromagnetic and skin absorption of soft magnetic alloy powder containing a mixture of an alloy made of SieFe94 and an alloy made of Ni '42 058 is shown in FIG. 1 and FIG. 2. As shown by solid line b, "〆 ~ alloy H formed, compared with the case, the radio wave absorption characteristics at 1MΗζ ~ 100MΗZ are reduced, but the radio wave absorption characteristics near 100MHz ~ 400MHz have J interference. high. Industrial Possibility According to the present invention, even in the high frequency range, the magnetic loss term (# r ") is large. In particular, the electromagnetic wave absorption in the high frequency range above 100 MHz is excellent. Use soft magnetic alloy powder, which provides f energy. From Feng Ke, according to the present invention, by adding a mixture to the soft magnetic alloy powder, kneading and forming into a sheet shape, it can provide both

495772 V. Description of the invention (16) A complex-shaped electromagnetic wave absorbing sheet that is flexible and has excellent electromagnetic wave absorption performance in the high frequency range. «

BII \\ 312 \ 2d-code \ 90-09 \ 90116199.ptd Page 19 495772 Brief Description of Drawings Figure 1 shows the electromagnetic wave absorption performance (frequency of MHz and (Relationship between complex ratio permeability and r '). FIG. 2 is a graph showing the electromagnetic wave absorption performance (the relationship between the frequency of MHz and the imaginary number part / z rn of the complex specific permeability) of the electromagnetic wave absorbing sheet according to the present invention in Example 2. FIG. -Figure 3 is a graph showing the electromagnetic wave absorption performance (relationship between frequency MHz and complex specific permeability // r 'and its imaginary number part // rπ) of the electromagnetic wave absorbing sheet according to the present invention in Example 4. Fig. 4 is a graph showing the electromagnetic wave absorption performance (relationship between frequency MHz and complex specific permeability // r ') of the electromagnetic wave absorbing sheet according to the present invention in Example 6. Fig. 5 is a graph showing the electromagnetic wave absorption performance (the relationship between the frequency of MHz and the imaginary number part of the complex specific permeability // rn) of the electromagnetic wave absorbing sheet according to the present invention in Example 6. Fig. 6 is a graph showing the electromagnetic wave absorption performance (relationship between frequency MHz and complex specific permeability // r 'and its imaginary number part // rπ) of the electromagnetic wave absorbing sheet according to the present invention in Example 8. Fig. 7 is a graph showing the electromagnetic wave absorption performance (relationship between frequency MHz and complex specific permeability // r 'and its imaginary part # r' ') of the electromagnetic wave absorbing sheet according to the present invention in Example 9.

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Claims (1)

495772 6. Scope of patent application1. A soft magnetic alloy powder for electromagnetic wave absorbing sheet, which is a soft magnetic alloy powder made of any of si or Ni with Fe and unavoidable impurities. Its thickness d is 0.01 // The aspect ratio (length / thickness d) of m ~ 'is a flat shape of 10 ~ 500, and the saturation magnetization Is is 1.2T or more. 2. The soft magnetic alloy powder for an electromagnetic wave absorbing sheet according to item 1 of the patent application scope, wherein the composition of the soft magnetic alloy is Si 3% to 9% by weight, and the rest is Fe and unavoidable impurities. 3. The soft magnetic alloy powder for electromagnetic wave absorbing sheet according to item 1 of the patent application scope, wherein the composition of the soft magnetic alloy is 36% to 49% by weight of Ni, and the rest is Fe and inevitable impurities. 4 · An electromagnetic wave absorbing weight% to 9% by weight, its alloy powder, and the impurities avoided by Ni are 0.001 Mm to 0.6 // m flat shape, and saturated 5 ·-An electromagnetic wave absorbing Fe And unavoidable miscellaneous 0 · 01 // η ～ 0.6 // m, flat, and saturated magnetic magnetic alloy powder. Soft magnetic alloy powder for sheet material, which is a composite powder consisting of 36% by weight to 49% by weight of Si 3 with Fe and unavoidable impurities in the rest, and Fe and Fe alloy magnetic powder The thickness d and the aspect ratio (length 1 / thickness d) are 10 to 50, and the magnetization Is is 1.2 T or more. = Sheet, which is a soft magnetic alloy powder made of any of Si or Ni. Its thickness 4 is the longitudinal dimension ratio (length 1 / thickness d) of 10 ~ 5. For 1.2 or more electromagnetic wave absorbing sheets 6. If the Leibei magnetic wave absorbing sheet of item 5 of the patent application scope, the composition of 苴 Φ and 钋 magnetic alloy powder is: &Amp; me Eighty 邰 is Fe's, and is formed by impurities, or Ni 36% to 49% by weight, 495772 VI. Scope of patent application The rest is composed of Fe and unavoidable impurities. 7 · An electromagnetic wave absorbing sheet comprising: 3% to 9% by weight of si, the rest of which is made of soft magnetic alloy powder made of Fe and inevitable impurities, and 36% by weight to 4 9% Wt%, the rest is a composite powder of soft magnetic alloy powder made of Fe and unavoidable impurities; its thickness d is 0.0. 丨 "~ 0.6 / zm, the aspect ratio (length 丨 / thickness d) is Soft magnetic gold powder for electromagnetic wave absorbing sheets with a flat m of 1 ～ 500 and saturated magnetization Is of 1.2 T or more. 5 8 · —A kind of soft magnetic alloy powder for electromagnetic wave absorbing sheets, which contains: The method is to prepare one of Si or Ni and Fe and the unavoidable heterogeneous average particle diameter of soft magnetic alloy powder of 10 / zm ~ 40 // m. Thickness ::, in ～ 〇 · 6 // m, aspect ratio (length 丨 / thickness d), 1 ～～ :: alloy powder manufacturing process. 00 flat shape 9 · Such as the electromagnetic wave of the eighth patent application Method for producing gold-absorbing powder, wherein the soft magnetic alloy material for the soft magnetic alloy material has a total amount of% to 9% by weight The remaining parts are Fe and unavoidable impurities. Si 3 weighs 10. · As described in the patent claim No. 8 of the electromagnetic wave D and the method of manufacturing gold powder, in which the soft magnetic alloy ^ material has a soft magnetic content of% ~ 49% by weight, the rest is heart and unavoidable impurities. Ni36 weighs 11. A soft magnetic alloy for electromagnetic wave absorbing sheet f. Method, which contains: 77% by manufacturer ~ 9% by weight, the rest is Fe $ 495772 , Aspect ratio (length " thick sound 1 thickness d is the process of gold powder. Also flattened from 10 to 500 1 2 · Shi Shenqing patent scope of the 8th or u-shaped alloy powder manufacturing method, = Soft magnetic powder for skin absorption sheet, which is an atomized powder. For medium> alloy powder before machining and electromagnetic wave absorption sheet with 14 ^ applied to the alloy powder such as item 8 or U of the patent application range A method for manufacturing soft magnetic 〇 Meng Meng, wherein the machining is a grinder. 1 4. A method for manufacturing an electromagnetic wave absorbing sheet, containing one of Si or Ni and Fe and unavoidable The thickness of the soft magnetic alloy powder formed by impurities (! Is 〇. 〇1 # „^ 0.6, the aspect ratio (length 1 / thickness d) is flat and the saturation magnetization is Is It is a process of mixing soft magnetic alloy powder for electromagnetic wave absorbing sheets with a size of 1.2 or more, using an organic binder; and a process of processing the mixture into a sheet. Method for manufacturing absorbent sheet, wherein composition of soft magnetic alloy powder It is a composition consisting of 3% by weight to 9% by weight of Si, the remainder being composed of Fe and unavoidable impurities, or a composition consisting of 36% by weight to 49% by weight, and the remainder being composed of Fe and unavoidable impurities. 1 6 -A method for manufacturing an electromagnetic wave absorbing sheet, including: \\ 312 \ 2d-code \ 90-09 \ 90116199.ptd Page 23 495772 6. The scope of patent application is for soft magnetic alloy powder made of Si3% -9% by weight, the rest is Fe and unavoidable impurities The composite powder with a soft magnetic alloy powder made of 36% by weight to 49% by weight of Ni and the rest of Fe and unavoidable impurities has a thickness d of 0.01 // m to 0.6 // m, an aspect ratio (length 1 / Thickness d) is a flat shape of 10 ~ 500, and a soft magnetic alloy powder for an electromagnetic wave absorbing sheet with a saturated magnetization Is of 1.2 T or more, a process of mixing with an organic binder; and processing the mixture into a sheet State of the process. # Φ C: \ 2D-CODE \ 90-09 \ 90116199.ptd Page 24