TW495700B - Method to integrate the measured data in the statistical process control system - Google Patents

Abstract

A method to integrate the measured data in the statistical process control system is disclosed, which is used to improve the display mode of the control system, so that the replacing frequency of the control map can be reduced to improve the integration of data information. The measured data information is normalized by formula computation. After appropriate normalization of data, plural production information can be integrated together in a single control map. If the production information which needs to be controlled in separated maps can be displayed together, the number of control maps can be greatly reduced, and the control system can obtain the uninterrupted information message according to the production sequence for controlling the process continuously. Thus, the process records are not separated and are more complete. In addition, the continuous information display will make the online detection and control more efficient. Furthermore, the control method can integrate the measured information of different processes, plural batches and various products together, so as to simplify the map handling procedure effectively.

Description

495700 V. Description of the invention α) 5-1 Field of the invention The present invention relates to a method for applying statistical program control (p: ocess controlj SPC) data to deteriorate and integrate it. 5-2 Background of the Invention · Yield is used, and production is the best way to measure these quantities. However, the processing will make the management party equipped with good sets, additions or missing items, so it can improve the state of the inter-procedure operation. Its scale leads to the process. In addition, the rate is not good. Effective regulatory control on production projects. The production yield is good, so the scope and size can be changed to the batch change diagram. Therefore, the comparison of the operating conditions of the manufacturing method of the manufacturing process product and the main variety of the main product are the major differences. The purpose of the control is = Drawing, only, and the middle% of the graphic measurement also simplified the number significantly higher, the function of the process control of the production of production data can not be used to provide a process bit. Because the measured data are scattered according to the diagram, it is too cumbersome. The effectiveness of control procedures should be more systematic. And the management of information and control process has a fixed rate. The manufacturing process cannot be linked when different batch specifications are included in the process control batch specification. If the process detection can develop data display times or multiple steps, the simplification of the instructions required as the process steps are not suitable can be applied to the integrated circuit manufacturing process. , Especially the production of multiple batches of integrated circuits. Since the production cost of such circuits is accumulated by the number of executions, any process variations and regulations are detected in time to avoid the consumption of subsequent processes. In addition, the system

Page 4 495700

The deviation of the existing control system between processes or batches still needs to be improved. Continuity is integrated in the orderly control system to improve the number of records displayed in the tube 0, and thus mislead the detection process. In view of this, the method for measuring data provided by the present invention, the stability of the system is too frequent, it is easier to produce Therefore, the data display has a special feature that can improve the data display during the statistical process and achieve the effect of timely detection. 3 The purpose and summary of the invention: In view of the above-mentioned many shortcomings, the replacement frequency of the map clearly shows the process data (manufacturing specifications The above formulas of various scales are based on the above formulas, and they are calculated differently based on the origin, and are shifted up and down. The embodiment is a background of the invention with a value of 1 < , And to improve the integration of the data, use the following formula to add regular data-the specifications of the target and the range of the measurement can be normalized after the measurement, the data after the control nose is based on the standard, according to the proportion (the above and Different from the traditional SPC, the control restriction has been a unified method of data display mode, which is used for subtraction. In one embodiment, it is normalized:) / (specification range) fixed value. The use of the value often coincides with the origin on the same control chart, which becomes the difference between the measured value and the specification standard value and the specification range. The official drawing has different states, and the absolute value is less regulated. . Proportion of difference according to rules

495700 V. Description of the invention (3) In another embodiment of the present invention, the data display is improved by a simplified formula: supply—kind of improvement (installation data—specification target) The origin of this drawing is still The specifications of each specification are marked with & ― Offset. As far as the current technology is concerned, each method of the sub-micron manufacturing process can be used to achieve the same picture in a reasonable range. u This can be based on the formula of intermediary. According to the book, it is clear that the production materials that previously needed to be controlled by separate maps can now be combined. Production order :: official! The number of maps has been greatly reduced 'and the control system can be regenerated. For example, it ’s data information and continuous control of the process. Not only does the private record not be scattered, @ JL # ¥ m indicates that the online detection and control will be more efficient. Furthermore, the measurement data of different programs, most batches, and various products can be integrated to effectively simplify the process of graphic processing. 5 1 4 Schematic illustrations ... and reveal the content of the present invention can be explained through the following embodiments and related diagrams

Figure

The formed tube pattern is not in accordance with the present invention-Example 'normalization of the third A, the fourth A shows a pass that is used as a macro] for polycrystalline layers, and its continuous recording of polycrystalline layers Production of a stepper. The fourth panel B shows the control hi formed according to ′. Another embodiment of the month, the fourth figure is normalized. The fifth figure shows the process of integrating measurement data according to the present invention. The representative symbols of the main part are: 1 0 data collection 20 data collection 3 0 device control

4 0 process control 5 0 process control 6 0 data processing 7 0 data storage 8 0 statistical program control 9 0 network connection 82 process data 84 control conditions 86 selection of shared control diagram 88 data normalization, 劁 — 9 2 regulatory rules Make a control map and calculate the necessary statistical values. 94 Screeners who do not comply with the control rules. 96 Send an abnormal notification. 3 Store the target of the specification. 302 Collect the parameter measurement data. 3 〇 3 # Deterioration parameter measurement data. 3 4 Process detection 5-5 Invention Detailed description: The present invention can be applied to a multi-batch or multi-step integrated circuit production program. The statistical program control (SPC) of this type of process requires particularly effective online measurement and simplified display detection.

495700 V. Description of the invention (6) The connection β & diagram is a commonly used data receiving process architecture, and this architecture can be counted; ^ i data sequence required by the control system. Processes on the production line ^ are collected by collection devices (for example, box 10 and box 20), each receiving ^ ^ ^ = connecting several production machines. These collected data are then transmitted through the device control system, system (box 30), process control unit Zishang # 4 () and box 50) and data processing system (box 6G) on the network 90 (II) On the 2nd, the data processing system and the data bank on the network 90 contain the specification data stored in advance. The specification data should preferably include the specifications of # Iί ^ π At least one regulatory range, and: = limit and lower specification limit. The regulatory range is the limit minus the regulatory limit. ^ It can be calculated, such as the upper limit of the specification: or 9 ° up and down the server. (方 _), with ϊ = ί :; ΞΓ S ^ c Feeder provides the function of detecting data and data, a picture of the private bank of the shore shows the SPC flow of the present invention: Shen Yi 84), select the applicable Control chart (box 86). Two (squares, degrees, and sizes are classified. The difference in scale is in the process of the present invention: the way of transformation and the need for graphic processing. The following: two: as usual

There are two types of sub-micron processes. Most of the sub-micron processes use one type of control chart to display the large-scale data. Another type of control chart is used (this type is general, and its: J page 9 V. Invention description (7) m You can also choose to use a control map of this kind of control once in the business :). However, the traditional spc requires a variety of features, which is much more complicated than the present invention. Select the control graph, once, 3, ^^ Λ to normalize, normalize the number; = according to the 5 Jing-Dao calculation procedures and add the necessary statistical values. This number: $: Enter the official drawing order, and then calculate the statistical value of the tube. The calculation is performed on: the data input of the drawing and 9 "to manage the process data: 88: J down to control rules (Fang 袼 94), concurrent $ ^ Re-teachers, those who do not comply with the control rules (Fang Yiqi, Yi Qi, abnormal notification (box 96). In a consistent embodiment, the present invention uses the following formula to add straightness and consistency to each other ^ Yi Yun Data `` Specification target) / (Specification range) (1) The specification ranges are all specific values. The thickness of the furnace tube is to produce lofl5 150,000 ± 150 '3000 1 300 ^ 4000, 400 for its production and ⑽00, 5 〇 ° micro-equivalent specifications. The third graph shown in Figure A is the difference between the range of ft, ft Γ and even the poor material. It can be observed in the graph that due to the specification I, the process cannot be continuously controlled by this graph. = ，,., Normalized with numerical values = 0 篦 A A Gang / You can integrate the official system on the same control chart, the result of the third chart B. According to formula (1), after the normalization, two two A: The point becomes the specification target of each specification, and the calculated data] According to the difference between the measured value and the specification target, the origin is taken as the (8) Example (The difference value and the range of specifications are different from the traditional SPC control chart with different tubes = up and down shifts. And different restrictions have been regularized, and its absolute 2 The control force of this embodiment is a value of 1. However, if the process is measured at the sub-micron scale, it will provide a more consistent method for the sub-micron process. [Another embodiment is explicitly proposed to improve the Data display (manufacturing data-specification) (using a stepper to produce polycrystalline layer macros 0.01, 0.28 ± 0.03, 0.29 ± 〇025 cases' 0.26 ± 0.03, 0.37 ± 0.025, 〇.38 ± 〇〇3. Soil 0.01, 0.365 sigma. The fourth Abiis-aa one and 0.42 ± 0. 25 micron isotactic f. The four A diagrams are not produced. I noticed that we need to make continuous battles on the process with this diagram. Integrating data from the diagram into the same diagram control can be adopted, s 1 疋 impossible. The result of normalization of diagram A is required. The standard specification is marked, and the calculated data origin is still the difference between the specifications, which is based on the origin; its measured value The specifications of the sub-micron process of the specification target. As the current technology, the regulatory restrictions on each specification are extremely limited, so the trial will be committed to the same plan in the joint mining, so to simplify the public contract gp It is possible to clearly display the A type in the target range in ^ ^ to perform the function of one picture detection. The form of the specification S recognizes the outline of the data integration of the present invention, which is linked to the core of the production machine: with silver :: (square Grid 3 ° ". Then use 叼 s to save electricity and collect the parameters from the Internet. Collect parameters 5. Invention description (9), measurement data (box 302), measurement data (box 303), and process Regulatory limit ratio. By using the above-mentioned embodiment, the materials are combined and displayed, so that the tubes can be controlled in accordance with the production order. In this way, continuous data show that this control method can integrate different materials effectively. Secondly, the value is fair. After that, it is said that this parameter is normalized. This parameter ::: Original system: The production of capital controlled by the system (Square_) is first; the production capital is controlled by a knife. At this time, the control system and the material information are used to continuously record the program. The J-process records not only do not distract the maps, but the detection and control on the f-line is more efficient. Furthermore, the procedures for the batch processing of various batches and various products for measurement and intermediation. Defining the present invention: f :: 3 = the preferred embodiment and 6 is not intended to limit the surname 4 ΠΓ patent patent, and all other without departing from the scope of G disclosed in the present invention. ^ Effective changes or modifications should be included in the application below

Claims (1)

495700 VI. Application for Patent Scope l-A method of storing and storing data in a data bank that integrates measurement data, including at least: using at least one link to the ": road transmission" to collect parameter measurements. J. machine The control of the station is performed by numerical calculation, when the bear servant J, the normalized number; the quantitative measurement data; and the execution of statistical program control. ： Compared with process control to limit the brain comparison through the network, 2 · If the method of applying for the scope of the first item of the patent #, ΐ contains the parameter measurement data minus the specification; 述 ": Stated numerical value operation range. Π Realized, and then divide the w specifications 3. If the method of the scope of patent application 1 item, μ calculation includes the value of the parameter reduced by the standard value of the specification target 4. If the method of scope of the patent application method, more Contains a reason that the normalized data does not comply with the process control limit. A ', 5. If the method of the patent application scope item i, the value of the bean pair contains the value 1. The middle and upper 11 & The method of item 1 of the patent scope, in which the above-mentioned specifications have a special value. Page 13 495700 VI. Scope of patent application 7 · If the Fang Shi and / or specifications of the first scope of patent application are limited to the data bank. 8 · If you apply for the 7th square of the scope of the patent application, 9 long the standard object to get an upper limit range H specification lower limit to get the lower limit range. 9 · If the party h in the scope of patent application for item 8 is larger than the specification target, the specification is deaf I 0 · If the party in the scope of patent application for item 8 is smaller than the specification target, the regulation II · if applying Item 8 of the patent range 9 In this upper limit range and the lower limit range 1 2. If the application of the patent range item 丨, note the measurement of most processes. '1 3 · If the number of patent application scope item 丨 measurement for a lot of batches. 1 4 · If you apply for item J in the scope of the patent, measure the number of products. 'It also includes storing an upper specification limit, and further including subtracting the upper limit of the specification, and subtracting the upper limit from the specification target', where the above-mentioned parameter measurement range is equivalent to the upper limit range. ′ When the above parameter quantity range is equivalent to the lower limit range. 'Wherein the above-mentioned regulation ranges are relative averages. Tian ‘where the above-mentioned process measurement includes‘ where the above-mentioned process measurement includes ‘where the above-mentioned process measurement includes ^ / uu A method that integrates at least one integrated circuit manufacturing process 0 B includes at least: the comparison of the measurement specifications of each process is stored in the test line; the transmission of the road is a control circuit connected to a production machine # , 迗, collect parameter measurement data; electric 驷, hunting and netting the above: two :: 丄 normalize the parameter measurement data and the numerical display minus the specification target, and then divide by a series with #detect Measure the normalized data and perform the statistical program control. , # Lu system limit comparison, the above regulation range is 1 -6 special ;: the method of the patent scope item 15 'wherein the above-mentioned process measurement package among which the above-mentioned process measurement package 17. If the scope of patent application item 15 The method includes measurement of a plurality of batches. 18 · If the method of item 15 of the scope of patent application includes the quantity for most products, | J. 19 · Method A method of integrating at least at least: a process measurement data of an integrated circuit process to store the specifications of each process in a data bank; 6. The control computer of the patent application scope of the production machine, through the network through numerical calculation, Yingneng #% # The system is the number of the parameter 洌 1 summer test data, the numerical calculation 乂 Murray state data minus The target of the specification; Detect the normalized data and control it by performing statistical procedures. /, I% official system limit comparison The specification range is the process measurement package 20. If the method in the 19th scope of the patent application is applied, a specific value is repeated. /, T 21 · If the method of the scope of the patent application] [9], i includes the measurement of a plurality of batches. /, 2 2 · As applied for in Patent Application No. 19, it includes the measurement of most products. 23. The above-mentioned process measurement package 23. The system is used to integrate at least / ,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,, and ability, and the data from, the measurement systems from the Λ system, at least: A process-data receiving device is used to collect and stake the process data of the circuit machine. The data-receiving device is connected to; m product and i are inversely connected to a network, and a process control server connected to the network. According to the number of manufacturing processes received by the device for the data receiving device, the official server is controlled by the servo control system. The process control server includes at least: Execute statistical procedures, page 16, 495700. 6. A patent application scope, a computing device to normalize the processing device. Process data; and a display device for displaying the normalized data and at least one specification range for process detection. 24. If the system of the scope of patent application is No. 23, the above network is connected to the production information system. 25. If the system of claim 23 is applied for, the normalization of the process data is obtained by subtracting a first specification target from the process data and dividing it by a specification range. 26. If the system of claim 23 is applied for, the process data normalization is obtained by subtracting a second specification from the process data. 27. If the system of the scope of patent application No. 23, wherein the above specification range is a specific value. 28. If the system of claim 23 is applied for, the above-mentioned process includes a plurality of batches of processes. 29. The system of claim 23, wherein the above-mentioned manufacturing process includes the manufacturing process of a plurality of products.