495596 Λ7 五、發明說明（ •i 【發明之應用範疇】 本發明是關於一種微閥致動器，特別是關於一具有真空腔之 λ 微閥致動器。 【發明之背景】 在微流體導引系統中，微泵浦及微閥在近十年中成為重要之 課題。已有多種利用矽及玻璃基板微加工技術製成之微泵浦及微 閥發表。這些微泵浦及微閥技術通常是利用氣動式（pneumatic)， 熱氣動式（thermal-pneumatic)，壓電式（piezoeiectric)，熱電式 (thermal-electric)，形狀記憶合金（shape memory alloy)或其他 致動裝置達成。雖然在目前已發表之微泵浦及微閥已能提優異 合用之功能，但因這些微泵浦及微閥均涉及特殊的製作技術，故 仍無法整合在複雜之微流體系統中，提供應用。不久之前，parafin 致動閥及親水膠(hydrogel)致動閥均已開發成功，對於實現較複雜 之微流體平台提供幫助。 然而在微小生化分析系統中，所需使用之微泵浦及微閥必須 是尺寸微小且能與分析系統之元件共同整合在同一晶片上之裝 置。以對細胞樣本進行DNA分析之晶片為例，一個分析系統中可 能需要使用10-100個微泵浦及微閥’用以致動及控制測試樣本流 本紙張尺度適用中國國家標準（CNS)A4規格（210 x 297公釐） (請先閱讀背面之注意事項再填寫本頁) -裝··-------訂---------編 A7495596 Λ7 5. Description of the invention (• i [Application scope of the invention] The present invention relates to a micro-valve actuator, in particular to a lambda micro-valve actuator with a vacuum cavity. [Background of the Invention] In the induction system, micro-pumps and micro-valves have become important topics in the past ten years. A variety of micro-pumps and micro-valves made using silicon and glass substrate micro-processing technology have been published. These micro-pump and micro-valve technologies This is usually achieved using pneumatic, thermal-pneumatic, piezoeiectric, thermal-electric, shape memory alloy or other actuating devices. Although in The micro-pumps and micro-valves that have been published have been able to provide excellent combined functions, but because these micro-pumps and micro-valves all involve special manufacturing techniques, they still cannot be integrated in complex micro-fluidic systems to provide applications. Soon Previously, both parafin actuated valves and hydrogel actuated valves have been successfully developed to help achieve more complex microfluidic platforms. However, in micro-biochemical analysis systems, The micropump and microvalve used must be devices that are small in size and can be integrated on the same wafer with the components of the analysis system. Taking a wafer for DNA analysis of cell samples as an example, 10-100 may be used in an analysis system A micro-pump and a micro-valve are used to actuate and control the test sample flow. The paper size is applicable to China National Standard (CNS) A4 (210 x 297 mm) (Please read the precautions on the back before filling this page)- · --------- Order --------- Edit A7
495596 五、發明說明（> ) 體進行各種輸送、混合、量測及化學反應，才能完成所需之DNA 樣本萃取，DNA放大及DNA分析等操作。至目前為止並無任何 存世之裝置可以提供上述微流體樣本處理之致動功能。495596 V. Description of the invention (>) The body needs to be transported, mixed, measured, and chemically reacted in order to complete the required DNA sample extraction, DNA amplification, and DNA analysis operations. So far, no surviving device can provide the above-mentioned actuation function of microfluidic sample processing.
Anderson等人在2000年提出一種利用外界氣流源、外界螺管 以及將微鰭片閥及管道製作在同一塑膠分析匣中形成的分析裝 置。在其所揭示之系統原型中，可以進行DNA樣本萃取、活體外 轉植及雜交等實驗。其成果見於「Microfluidic Biochemical Analysis System」，Proceedings of Transducers，97，the 9th InternationalAnderson et al. (2000) proposed an analysis device using an external airflow source, an external solenoid, and a microfin valve and pipe made in the same plastic analysis box. In the disclosed system prototype, experiments such as DNA sample extraction, in vitro transplantation, and hybridization can be performed. The results are shown in "Microfluidic Biochemical Analysis System", Proceedings of Transducers, 97, the 9th International
Conference on Solid-State Sensors and Actuators, Chicago, June 16-19，1997，477-480 及「A Miniature Integrated Device for Automated Multistep Genetic Assays」，Nucleic Acids Research，2000 Vol28N 12，e60 〇 不久之前，Mathies等人利用上述技術製成可以同時進行聚合 酶連鎖反應（polymerase chain reaction-PCR)及其後之毛細電泳分 析（capillary electrophoresis analysis)之裝置（見「Microfabrication Technology for Chemical and Biochemical Microprocessors」，A. van den Berg (ed·)，Micro Total Analysis Systems 2000, 217-220)。在分 析樣本避免遭到污染之考慮下，在例如醫療診斷等應用上，拋棄 4 本紙張尺度適用中國國家標準（CNS)A4規格（2]0 X 297公釐） I I * ·---裝·-------訂 *-------- (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 495596 經濟部智慧財產局員工消費合作社印制衣 A7 B7 五、發明說明（3 ) 式分析裝置極為適用。而在這種情形下，分析裝置之製作成本必 需控制到極低，才能符合需要。 i-STAT公司在邇近曾經推出一種拋棄式分析裝置，在其上可 以進行血氣相（blood gases)之分析以及其他離子之分析。該i-STAT 分析裝置利用外界物理壓力將晶片上所設置之流體小囊擠破，而 將測試樣本推送至離子選擇（i〇n_seleetive)偵測器（見i-STAT Corporation Product Literature，1998 )。Kodak 公司也曾利用相同方 法，而研發出一種以PCR方式進行愛滋病檢驗之可拋棄式塑膠泡 囊（見 Findlay 等人，Clinical Chemistry，39,1927,1933 ( 1933))。 在完成PCR之後，使用一個外界轉輪推送該pcr產物，而進行混 合、清洗及將添加劑標示入一檢測區，在此檢測該PCR放大產物。 在此系統中，其複雜度因為使用之壓力產生機制而降低，因此可 以提高系統製作簡易度。 拋棄式單次型以微系統技術製作之閥件，最近已有研究將之 應用在診療用途。Guerin等人曾經發表一種微型單次型（不能再 度使用）閥件，利用將一粘著層熔化，同時將一流體媒介之壓力 施用至該點者層而致動該閥件（見「A Miniature One-Shot Valve」， Proceeding of ΠΕΕΕ conference on Micro-Electro-Mechanical 5 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） --------------Aw --------訂--------1 Aw. (請先閱讀背面之注意事項再填寫本頁) 495596 Λ7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（ψ )Conference on Solid-State Sensors and Actuators, Chicago, June 16-19, 1997, 477-480 and "A Miniature Integrated Device for Automated Multistep Genetic Assays", Nucleic Acids Research, 2000 Vol28N 12, e60. Not long ago, Mathies et al. A device capable of performing polymerase chain reaction-PCR and subsequent capillary electrophoresis analysis (see "Microfabrication Technology for Chemical and Biochemical Microprocessors", A. van den Berg (ed.), Micro Total Analysis Systems 2000, 217-220). Considering the analysis of samples to avoid contamination, in the application of medical diagnosis, for example, discard 4 paper sizes to apply Chinese National Standard (CNS) A4 specifications (2) 0 X 297 mm. II * · --- install · ------- Order * -------- (Please read the notes on the back before filling out this page) Printed by the Employees 'Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 495596 Printed by the Employees' Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs Garment A7 B7 V. Description of the invention (3) The analytical device is very suitable. In this case, the manufacturing cost of the analysis device must be controlled to be extremely low to meet the needs. i-STAT has recently introduced a disposable analysis device that can perform analysis of blood gases and other ions. The i-STAT analysis device uses external physical pressure to squeeze the fluid capsules set on the wafer, and pushes the test sample to the ion selective detector (see i-STAT Corporation Product Literature, 1998). Kodak has used the same method to develop a disposable plastic vesicle for AIDS testing by PCR (see Findlay et al., Clinical Chemistry, 39, 1927, 1933 (1933)). After PCR is completed, the PCR product is pushed using an external wheel to perform mixing, cleaning, and marking the additives into a detection area, where the PCR amplification product is detected. In this system, its complexity is reduced because of the pressure generation mechanism used, so the system can be made easier. Disposable single-type valves made of micro-system technology have been recently researched and applied to diagnostic applications. Guerin et al. Have published a miniature single-shot (cannot be reused) valve that uses an adhesive layer to melt while applying the pressure of a fluid medium to the point to actuate the valve (see "A Miniature One-Shot Valve ", Proceeding of ΠΕΕΕ conference on Micro-Electro-Mechanical 5 This paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm) -------------- Aw -------- Order -------- 1 Aw. (Please read the notes on the back before filling this page) 495596 Λ7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs Explanation (ψ)
Systems，MEMS ’98, 425-428)。在這件發明中，如果所施加之壓力 足夠，可以突破粘著層，則該流體將通過該閥。 另一種單次型閥件係由Madoii等人發表在其美國專利第 5,368,704號，名稱為微電化學閥及其方法（Micr〇_electr〇chemiealSystems, MEMS '98, 425-428). In this invention, if the pressure applied is sufficient to break through the adhesive layer, the fluid will pass through the valve. Another one-time type valve is published by Madoii et al. In its U.S. Patent No. 5,368,704, entitled Microelectrochemical Valve and Method (Micr〇_electr〇chemieal
Valves and Method)。在該發明中，閥件是透過一金屬薄膜之電化 學熔解而啟動。 在上述習用技術中’往往需要使用外界空氣供應及sden〇id 闊，使得整個微流體系統變動複雜。因此目前確有必要提供一種 可以簡化微流體系統，使其具有更高可攜性（p〇rtaWe)之運作平 台。 同時目前也有必要提供一種微閥致動器，以提供一致動源， 且該致動器並可直接裝設在所使用之裝置内。 【發明之目的】 本發明之目的乃在提供一種單次型之微閥致動器。 本發明之目的也在提供一種易於製作，成本低廉之微闊致動 器 本發明之目的也在提供一種具有一真空腔之微閥致動器。 本發明之目的也在提供一種微閥模組，其中該微閥致動源係 I裝--------訂--------- (請先閱讀背面之注意事項再填寫本頁) 495596 A7 -—--- B7______ 發明說明（$ ) 直接製作於該裝置本體内。 本發明之目的也在提供一種新穎的微閥模組之製法，該模組 包括一真空腔致動器，用以致動其微闕功能。/ 【發明之簡述】 本發明揭示一種簡化的微閥致動器，具有一封閉之真空腔。 該真空腔之驅動力係利用供應一電流至一薄膜加熱器，而弱化並 在一大氣壓差下穿透一封閉該真空腔之薄膜，使該真空腔中之真 空釋放於外，而予啟動。將本發明之微闊致動器使用於一微流體 管道系統時，因而產生之壓力差使該微流體管道接近該真空腔之 段落產生變形，而變更其内流體之流動。在本發明一較佳實施例 中，該真空腔可以利用一石夕、玻璃或塑膠基板，將一薄膜以真空 封裝該真空腔而製得。該薄膜可以包括一金屬製不透氣薄膜。將 真空腔之釋放手段包括將一薄膜金屬加熱器以微加工製作於該薄 膜。將具有上述文件之組件裝置至一具有一微管道系統之基板上 即成。本發明之微閥致動器可適用於一微流體平台，用以改變其 内微流體之流動方式。 上述及其他本發明之目的及優點，可由以下詳細說明並參照 下列圖式而更形清楚。 7 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） (請先閱讀背面之注意事項再填寫本頁) --------訂----- 0 A7Valves and Method). In this invention, the valve member is activated by electrochemical melting of a metal film. In the above-mentioned conventional technologies, it is often necessary to use the external air supply and sdenoid, which complicates the change of the entire microfluidic system. Therefore, it is really necessary to provide an operation platform that can simplify the microfluidic system and make it more portable (PortaWe). At the same time, it is also necessary to provide a micro-valve actuator to provide a uniform source of motion, and the actuator can be directly installed in the device used. [Objective of the Invention] The object of the present invention is to provide a single-time type microvalve actuator. The object of the present invention is also to provide a micro-wide actuator which is easy to manufacture and low in cost. The object of the present invention is also to provide a micro-valve actuator having a vacuum chamber. The purpose of the present invention is also to provide a microvalve module, in which the microvalve actuation source is installed -------- order --------- (Please read the precautions on the back before (Fill in this page) 495596 A7 ------ B7______ Description of invention ($) is made directly in the body of the device. The object of the present invention is also to provide a novel method for manufacturing a microvalve module. The module includes a vacuum chamber actuator for actuating its micro-pull function. / [Brief Description of the Invention] The present invention discloses a simplified micro-valve actuator having a closed vacuum chamber. The driving force of the vacuum chamber is to supply a current to a thin film heater, weaken it and penetrate a film closing the vacuum chamber under a large pressure difference, so that the vacuum in the vacuum chamber is released and activated. When the micro-wide actuator of the present invention is used in a micro-fluidic pipeline system, the pressure difference thus generated deforms the section where the micro-fluidic pipeline approaches the vacuum chamber, and changes the fluid flow therein. In a preferred embodiment of the present invention, the vacuum chamber can be made by using a stone, glass, or plastic substrate to vacuum-pack a vacuum chamber with the film. The film may include a metal air-impermeable film. The means for releasing the vacuum chamber includes micro-machining a thin-film metal heater into the thin film. The device with the above documents is mounted on a substrate with a micro-pipe system. The microvalve actuator of the present invention can be applied to a microfluidic platform to change the microfluidic flow mode therein. The above and other objects and advantages of the present invention will be made clearer by the following detailed description and with reference to the following drawings. 7 This paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm) (Please read the precautions on the back before filling this page) -------- Order ----- 0 A7
【圖式之說明】 第1圖表示本發明微閥致動器一實施例在致動前之截面圖； 第2圖表示其頂面圖； 第3圖表示其致動後之截面圖。 【發明之詳細說明】 本發明提供一種簡化的微閥致動器。本發明之微閥致動器包 括一個密封之真空腔，用以在該真空腔内之真空釋放於外時，使 一微流體通道内之閥件附近之管道壁產生變形。該真空腔之致動 力係利用一釋放手段予以活動，啟動方式包括提供一電流至一位 於一封閉該真空腔之薄膜上之薄膜加熱器。該電流可以弱化，並 在大氣壓差下破壞該薄膜，而將該真空腔中之真空釋放於外。 本發明之微閥致動器可以應用於一微流體管道系統中，利用 釋放真空所產生之壓力差，作為該微體管道系統之微闊之敢動力。 以下為本發明微閥致動器實施例之詳細說明。說明中係舉使 用本發明微閥致動器之微流體管道系統為例。 第1圖顯示本發明微閥致動器致動前之截面圖。第2圖則顯 示其頂面圖。第3圖為其致動後之截面圖。 8 本紙張尺度適用中國國^^YCNS ) M規格（21QX 297公釐） "" '' (請先閱讀背面之注意事項再填寫本頁) 訂 經濟部智慧財產局員工消費合作社印製 495596 五、發明說明（*/ ) 如圖所示，本發明之微閥致動器可以使用在一個具有常開闕 之流體通道中，用以啟動該常開閥，而予封閉。在第〗、2圖中， 該微流體通道具有一下基板（20)及一上基板（21)，一製作在該 上基板（21)内之微流體通道（22)，一個位於該下基板内，並位 於該微流體通道（22)下方之真空腔（23)，一個密封該真空腔（23) 之薄膜（24)及一個位於該真空腔（23)上方之排氣通道（27)， 以該薄膜（24)及該薄膜電阻（Μ)而與該真空腔（Μ)隔離。 經濟部智慧財產局員工消費合作社印製 如第1圖所示，該上基板（21)内置一微流體通道（22)及 該排氣通道（27)。該真空腔（23)則位於該底板（2〇)内，並由 該排氣通道（27)下方處延伸至該微流體通道（22)下方。該微 流體通道（22)具有一閥塊（26)，而形成截流區（28)。在此區 域下方之真空腔（23)則具有擴大之截面積，並因其中之真空而 形成一凹陷。換言之，於該擴大面積之部份，該部份真空腔（23) 上方之薄膜（24)因為壓力差之影響向下凹陷，使得該截流區（28) 附近之微管道形成導通（見第1圖）。因此，在此情形下，流體可 以沿第2圖箭頭方向流經該微通道（22)之截流區（28)。 該薄膜電阻（25)係置於該真空腔（23)與該排氣通道（27) 之間’當對該薄膜電阻（25)施以電流，以將該致動器致動之後， 本紙張尺度適用中國國家標準（CNS)A4規格（21〇 X 297公釐） 經濟部智慧財產局員工消費合作社印制衣 49559() 、 -A7 一^ ' -------- B7 ’ 五、發明說明（分） I#膜（24)將因高溫而、_(見第3圖），而細在該真空腔⑼ 内之真空槪，空氣自魏通道⑼進人真鎌⑼。結絲 該/專膜（24)政起至平面位置而阻斷該微通道（22) g該閥塊（26) 乃形成阻斷該主流體通道（a)之截流區（28)。 如上所述’本發明之微閥致動器，基本上包括一個微通道及 一個薄膜密封之真空腔，而在該薄膜上方則設置一加熱器。在製 作本發明微閥致動器時，係可分成兩部分進行。其中，該上基板 (21)係包括一微通道（a)，而該下基板（2〇)則包括該真空腔 (23)。在製作上基板（21)時可預先製備一微通道（22)及一個 排氣通道（27)，後者係作為釋放出來之真空之通道。在製作該下 基板（20)時則製備一真空腔（23)，以一薄膜（24)加以密封， 並在該真空腔（23)及薄膜（24)上方製備一薄膜電阻（25)。在 該微通道（22)中，有一段落是利用一塊閥塊（26)將其阻斷， 形成一闕ς 該上基板（21)及下基板（20)可以使用玻璃、矽或塑膠材 質，在其中以微加工技藝製作個別之微流體通道及各種適用之腔 體。該薄膜（24)可為一金屬化多元體薄膜，最好是一壓感玻璃 紙（cellophane)膠帶。而該薄膜電阻（25)則可利用微加工製成 10 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） --------；—--------訂--------- (請先閱讀背面之注意事項再填寫本頁) 495596 A7 B7 五、發明説明（彳） 之銀薄膜電阻，用以提供大約2Ω之電阻，以作為加熱器使用，而 溶解該薄膜（24)。兩片基板（20) (21)及其中介層利用真空封 裝技藝粘合，以在該下基板（20)内形成真空腔（23)。在封裝時， 可以利用hot wax melt方式進行。在上述說明中，為方便起見，該 真空腔（23)係於該下基板（20)内，但是否製作在下基板中， 並非本發明之限制。其後，將該所得之組件抽真空，即可製成本 發明之微閥致動器。 在致動之前，先將試液注入微通道（22)内。由於真空腔（23 ) 具有一擴大之區域，位於該微通道截流區（28)之下方，結果因 真空之效應，使該薄膜（24)下陷，形成一空隙（29)，而位在微 通道内之閥塊（26)下方，使試液可由該空隙（29)中沿第2圖 箭頭所示方向流過。對該薄膜電阻（25)施以例如3V之電壓，可 使該薄膜（24)溶解而破裂，結果使該真空腔（23)内之真空釋 放於外，導致薄膜（24)變形，直到壓力達到平衡，而阻斷該微 通道（22)内流體之流動。 本發明之微閥致動器適合應用在一微流體平台中，用以產生 一驅動力以供包括試液之移送、量測、混合及閥動等作用。 【發明之效果】 11 本紙張尺度適用中國國家標準（CNS ) Α4規格（210Χ；Ζ97公羡） (請先閲讀背面之注意事項再填寫本頁) 訂 經濟部智慧財產局員工消費合作社印製 495596 A7 B7 五、發明説明（丨〇 本發明揭示-種微閥裝置之致動機構，其致動力來自一微小 真空腔之單次真鎌放。其致動是施加_電流於_加熱器， 使其生熱、溶解，破壞-薄膜，而釋放該薄膜所密封之真空腔而 產生。由於本發明之致動器及閥均可製備在一平面製程下，因此 可以輕易製得高度複雜之微流齡統’此種功能為制技術，無 法將驅動器及閥件製備在一積體化平面製程中者，所望塵莫及。 本發明之微閥致動器可以製備在一含有微流體系統之晶片 上。由於將致動器製作在晶片本身，只要利用電氣信號，即可進 行微流體系統中，流體流動之控制。既然所有閥件均可製備於一 裝置中，此種適應性功能大大降低了裝置操作元件之複雜度 此許多微流體系統應用均可形成可攜式架構。 以上是對本發明微閥致動器實施例之說明，習於斯藝之人士 不難由上述之說明，明瞭本發明之精神進而作出不同的延伸與 化’唯只要不超出本發明之精神，均應包含於其申請專利範圍内 因 變 I ί ^^衣丨丨 (請先閱讀背面之注意事項再填寫本頁) 、11[Explanation of the drawing] Fig. 1 shows a cross-sectional view of an embodiment of the microvalve actuator before actuation of the present invention; Fig. 2 shows a top view thereof; and Fig. 3 shows a cross-sectional view thereof after actuation. [Detailed description of the invention] The present invention provides a simplified microvalve actuator. The micro-valve actuator of the present invention includes a sealed vacuum chamber for deforming a pipe wall near a valve member in a micro-fluid channel when the vacuum in the vacuum chamber is released to the outside. The actuating force of the vacuum chamber is activated by a release means. The starting method includes supplying a current to a thin film heater on a film enclosing the vacuum chamber. The current can be weakened and the film is destroyed at atmospheric pressure, and the vacuum in the vacuum chamber is released. The microvalve actuator of the present invention can be applied to a microfluidic pipeline system, and the pressure difference generated by releasing the vacuum is used as the micro-bold motive power of the microbody pipeline system. The following is a detailed description of embodiments of the microvalve actuator of the present invention. In the description, the microfluidic pipeline system using the microvalve actuator of the present invention is taken as an example. Figure 1 shows a cross-sectional view of the microvalve actuator before actuation according to the present invention. Figure 2 shows the top view. Figure 3 is a sectional view after actuation. 8 This paper size applies to China ^^ YCNS) M specification (21QX 297 mm) " " '' (Please read the precautions on the back before filling this page) Order printed by the Intellectual Property Bureau of the Ministry of Economic Affairs Consumer Cooperatives 495596 V. Description of the invention (* /) As shown in the figure, the micro-valve actuator of the present invention can be used in a fluid channel with a normally open valve to activate the normally open valve and be closed. In the first and second figures, the microfluidic channel has a lower substrate (20) and an upper substrate (21), a microfluidic channel (22) fabricated in the upper substrate (21), and one located in the lower substrate. And a vacuum cavity (23) below the microfluidic channel (22), a film (24) sealing the vacuum cavity (23), and an exhaust channel (27) above the vacuum cavity (23), The thin film (24) and the thin film resistor (M) are isolated from the vacuum chamber (M). Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs As shown in Figure 1, the upper substrate (21) has a built-in microfluidic channel (22) and the exhaust channel (27). The vacuum chamber (23) is located in the bottom plate (20), and extends from below the exhaust channel (27) to below the microfluidic channel (22). The microfluidic channel (22) has a valve block (26) to form a shutoff region (28). The vacuum cavity (23) below this area has an enlarged cross-sectional area and a depression is formed due to the vacuum therein. In other words, at the part of the enlarged area, the thin film (24) above the vacuum cavity (23) is recessed downward due to the influence of the pressure difference, so that the micro-channels near the interception area (28) form conduction (see section 1). Figure). Therefore, in this case, the fluid can flow through the shutoff region (28) of the microchannel (22) in the direction of the arrow in FIG. The thin film resistor (25) is placed between the vacuum chamber (23) and the exhaust channel (27). When a current is applied to the thin film resistor (25) to actuate the actuator, the paper Standards are applicable to China National Standard (CNS) A4 specifications (21 × 297 mm). Printed clothing 49559 () by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs, -A7 1 ^ '-------- B7' V. Description of the invention (points) The I # film (24) will be _ (see Figure 3) due to the high temperature, and the vacuum inside the vacuum chamber ⑼ will be drawn into the real sickle from the Wei channel. Filament The membrane (24) is raised to a flat position to block the microchannel (22) g. The valve block (26) forms a shutoff region (28) that blocks the main fluid channel (a). As described above, the micro-valve actuator of the present invention basically includes a micro-channel and a thin film sealed vacuum chamber, and a heater is provided above the thin film. When the microvalve actuator of the present invention is manufactured, it can be performed in two parts. The upper substrate (21) includes a microchannel (a), and the lower substrate (20) includes the vacuum chamber (23). When making the upper substrate (21), a microchannel (22) and an exhaust channel (27) can be prepared in advance, and the latter is used as a channel for releasing the vacuum. When the lower substrate (20) is manufactured, a vacuum cavity (23) is prepared, sealed with a thin film (24), and a thin film resistor (25) is prepared above the vacuum cavity (23) and the thin film (24). In the microchannel (22), there is a paragraph that is blocked by a valve block (26) to form a 阙 ς. The upper substrate (21) and the lower substrate (20) can be made of glass, silicon or plastic. Among them, individual microfluidic channels and various applicable cavities are produced by micromachining techniques. The film (24) may be a metallized multi-layer film, preferably a cellophane tape. The thin film resistor (25) can be made into 10 papers by micromachining, which is applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) --------; ------- --Order --------- (Please read the notes on the back before filling this page) 495596 A7 B7 V. Description of the invention (彳) The silver thin film resistor is used to provide a resistance of about 2Ω as A heater is used to dissolve the film (24). The two substrates (20) (21) and their interposers are bonded using a vacuum packaging technique to form a vacuum cavity (23) in the lower substrate (20). When encapsulating, it can be performed by hot wax melt. In the above description, for convenience, the vacuum chamber (23) is inside the lower substrate (20), but whether it is fabricated in the lower substrate is not a limitation of the present invention. Thereafter, the obtained assembly is evacuated to form a microvalve actuator of the present invention. Before actuation, the test solution is injected into the microchannel (22). Since the vacuum cavity (23) has an enlarged area, which is located below the microchannel interception area (28), the vacuum effect causes the film (24) to sink and form a void (29), which is located in the microchannel. Under the inner valve block (26), the test solution can flow through the gap (29) in the direction shown by the arrow in Figure 2. Applying a voltage of, for example, 3V to the film resistor (25) can dissolve and rupture the film (24). As a result, the vacuum in the vacuum chamber (23) is released to the outside, causing the film (24) to deform until the pressure reaches Equilibrate and block the flow of fluid in the microchannel (22). The microvalve actuator of the present invention is suitable for use in a microfluidic platform to generate a driving force for functions including transfer, measurement, mixing, and valve actuation of a test solution. [Effects of the invention] 11 This paper size applies the Chinese National Standard (CNS) A4 specification (210 ×; Z97 public envy) (Please read the precautions on the back before filling this page) Order printed by the Ministry of Economic Affairs Intellectual Property Bureau employee consumer cooperative A7 B7 V. Description of the invention (This invention discloses an actuating mechanism of a micro-valve device, the actuating force of which is from a single true sickle release of a tiny vacuum cavity. The actuation is to apply a _current to a heater, so that It generates heat, dissolves, and destroys the film, and releases the vacuum cavity sealed by the film. Since the actuator and the valve of the present invention can be prepared in a planar process, highly complex microfluidics can be easily produced. This kind of function is a manufacturing technology, and it is impossible to prepare actuators and valves in an integrated planar process. The microvalve actuator of the present invention can be prepared on a wafer containing a microfluidic system. Because the actuator is fabricated on the wafer itself, as long as the electrical signal is used, the fluid flow can be controlled in the microfluidic system. Since all valves can be prepared in one device, this kind of The adaptive function greatly reduces the complexity of the operating elements of the device. Many microfluidic system applications can form a portable architecture. The above is an explanation of the embodiment of the microvalve actuator of the present invention. It is clear that the spirit of the present invention is understood to be further extended and changed. As long as it does not exceed the spirit of the present invention, it should be included in the scope of its patent application. I ^ ^^ 丨 (Please read the precautions on the back first (Fill in this page again), 11
經 濟 部 智 慧 財 產 局 員 工 消 費 合 作 社 印 製 本紙張尺度適用中 .H ί -I · 12 495596 :…一―的，崎 .................... ； ,〆.’，、 丁‘ 1 *:: 一丨 民國具霄 五、發明說明（/ /) 經濟部智慧財產局員工消費合作杜印製 【元件符號說明】 (20) 下基板 (21) 上基板 (22) 微流體通道 (23) 真空腔 (24) 薄膜 (25) 薄膜電阻 (26) 閥塊 (27) 排氣通道 _I (28) 截流區 丨 (29) 1 空隙 —.—--------·裝---------訂-------—^__w. (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐）Printed on paper for employees' cooperatives in the Intellectual Property Bureau of the Ministry of Economic Affairs. H ί -I · 12 495596: ... One of-Saki ... ;, 〆. ',, Ding' 1 * :: I 丨 Guo Xiaowu 5. Invention Description (//) Intellectual Property Bureau, Ministry of Economic Affairs, Consumer Consumption Du Print [Element Symbol Description] (20) Lower Substrate (21) Upper substrate (22) Microfluidic channel (23) Vacuum chamber (24) Membrane (25) Membrane resistor (26) Valve block (27) Exhaust channel_I (28) Closure area 丨 (29) 1 Gap —.—- ------- · Installation --------- Order ----------- ^ __ w. (Please read the precautions on the back before filling this page) This paper size applies to Chinese national standards (CNS) A4 size (210 X 297 mm)