TW492246B - Automatic intelligent recording system and method for monitoring broken wafer image - Google Patents

Abstract

An automatic intelligent recording system and method for monitoring broken wafer image are provided. The invention primarily provides multiple camera systems capable of simultaneously monitoring the grinding state of wafer, multiple image transmitters for transmitting the taken image signals of the camera systems, multiple image receivers for combining the received captured images in the same screen, and a personal computer (PC) capable of receiving the transmitted image signals from the multiple image receivers over the input terminal of the internal image catching card, and receiving the signal of wafer in and out the grinding equipment from signal transmission device and signal of broken wafer. It enables the engineer to conveniently make decisions, diagnostics, real cause verification or engineering improvement management.

Description

492246 V. Description of the invention (1) The present invention provides an intelligent recording system and method for monitoring wafer fragment image monitoring. The use of photographic devices and personal computers can facilitate the judgment, consultation, and authenticity of related engineering personnel. For verification or engineering improvement management. As the wafer factory has a bright future, the production capacity is constantly expanding, the number of equipment has also increased sharply, and machine automation is the world's trend. However, in this case, personnel technical training is becoming more and more cumbersome and the machine exceptions that occur infrequently, such as Fragments or malfunctions are often difficult to cope with, such as long-term on-site monitoring. Therefore, although the CMP Ebara machine has good stability, there are still unknown reasons for fragmentation and dropping. In order to effectively verify the reasons for its fragmentation and dropout, the expedient is nothing more than monitoring the machine, but it is usually recorded by human guards or video recorders. The efficiency is very poor and it is not beneficial to be circulated and discussed by multiple parties. Both are very laborious. 〆 Therefore, the main purpose of the present invention is to provide an intelligent wafer chip automatic monitoring system and method for fragment image monitoring to facilitate relevant engineering personnel's judgment, consultation, cause verification or engineering improvement management. A secondary objective of the present invention is to provide an intelligent recording system and method for monitoring wafer fragment images with intelligent, only recording the wafer grinding motion images and the first two wafer grinding motion images, which is very cheap and beneficial for fragmentation. Cause analysis, and does not take up too much hard disk space. In order to make your reviewers better understand the objective features and functions of the present invention, I would like to provide a detailed description of the present invention with the preferred embodiments and the accompanying drawings. The description is as follows:

4 ^ 2246 V. Description of the invention (2) Yuan breaks the best example of the present invention. The photographic system of various intelligent crystal machines has multiple cameras, such as a ccd camera or a video recording camera. Look at the condition of the wafer grinding; then send it to the two multi-image signal to—multi-camera image transmitter (12) simultaneous multi-camera recording because the recorded image has been digitized and filmed: r; image signal to-personal = Department: ί: In / round out 瑝 ... η also receives the crystals transmitted from the grinding device (the grinding device set ΓΓ) to enter and leave the research department: the signal when set the roar and fragment; "b and See Figure 2 for a whole monitor. Set i: ~ ge = Image⑻ 三 ㈣ 'on a personal computer (PC). First empty the three slots. (Riji Wu enters the grinding device (22) and grinds Install the Jin gland, the mountain, the sun, and the signal to the personal computer, and the computer will send a private order to multiple photography devices to start capturing images and enter the Image (3) file (23). Epistar continues Proceed to the research ": all exist in this. ^ ^ 疋 The main grinding site, leave the grinding room after the research waste is finished; enter from the wafer to Until leaving the grinding room, the position has been monitored by photography, and the image signals taken during the period are ~

Image (3), Image (2), and Image (l) in order. I'm going to receive a new image, Ima.ge (2) will move the image message to ▲

Imaged) The image signal of Mmage (3) will be transferred to the team. The newly captured image signal will be stored in Image (3).

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V. Description of the invention (3) ------------ ~~ Photograph of the wafer grinding process is taken to search for the μ μ. A. Photo ~ Placed on the personal computer to receive the grinding device, the wafer breaks the moon or the day 7L leaves the grinding The signal was stopped when the signal was placed on the surface of the μ outside. Therefore, when the wafer is broken (2, 4, Dan / &. 9A1, J-shirt wearing system will maintain this state and stop shipping; (,), so that the staff to the Image⑴, Image (2) and It is easy to analyze the original crystal breakage by analyzing the stored image of IT 彳 2. After removing the difficulties, continue to grind. On the other hand, if the grinding process is smooth and no fragments are generated, make sure that the wafer leaves the grinding device ( 2 5 Save Image (l) to Image (2) and save Image (3) to

Image (2), and empty 1mage (3) (26), and repeat the whole process until the end of the batch of wafer grinding. Looking at Figure 3 again, it is a process of capturing, merging, and storing wafer images. Its main steps include: (2) (3) (4) (1) Intercepting an image signal with multiple cameras (3丨); send the image signal to an image receiver (32); the remote receiver receives the image signal (3 3); the side receiver combines the images captured at the same time on the same day (3 4 into the grinding room (storage Whether the instruction is

ON (5) Confirm whether the wafer enters (35); (6) If the wafer enters the grinding chamber, use a personal computer (pc) to take a card and digitize the captured image (3 6); a file camera. As for confirmation

Image (3) (37) Among them, the camera in step (5) can be taken by CCD (7) The digitized captured image is stored in a case number set in the pC5 89118413 V. Description of the invention (4) The correction year, month, and day H 丨 supplementary method can be confirmed by the input / described in step (4) and the signal transmitted from the rear rhyme% / output port. ㉛μ 店 骤 ^ ~ like intercepting the system to maintain and stop the morals, in order to be broken by the master, you can get the job by g Shishi 1 Dingzhi stupid horses to confirm the shell to verify 'and eliminate the problem, so live, you can Resume normal grinding procedure. The figure ^ shows that the above-mentioned processing procedure can be calculated in more ways &functions; as long as the machine in steps (3) to (7) of the above process is combined into a control card, it can make the whole The system is simplified. Refer to Figure 5 again to change the signal of the input / output port (1 / 0P ^ ort) of the present invention to the signal of a thief entering the room or the sound of a thief to install the system of the present invention. In the home, the purpose of automatic surveillance and registration of the family anti-robbers can be achieved. The principle and steps are exactly the same as those described above, so I will not repeat them here. The above is about the intelligent wafer chip image monitoring A detailed description of the embodiments and modified types of the present invention of the automatic recording system and method, but there may be many alternative structures for the content disclosed by the present invention in this 7-member domain.

11 Cameras 12 Multi-camera image transmitter 13 Multi-camera image receiver 14 Same day and night 15 Input / output port

Page 7 492246 Brief description of the drawings Figure 1: It is a schematic diagram of the actual connection of the hardware of the present invention. FIG. 2 is a flowchart of the intelligent wafer chip image monitoring automatic recording system and method of the present invention. Fig. 3: It is a flowchart of interception, merger and storage of the whole wafer monitoring image of the present invention. FIG. 4 is a schematic diagram of the process of intercepting, merging and storing the wafer monitoring image by the IC design method and the control card of the present invention. FIG. 5 is a flowchart of an automatic surveillance and record keeping system for home anti-theft derived and improved from the present invention.

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Claims (1)

----— 6. Scope of patent application ^ ## Kinds of intelligent wafer chip fragments & post " ^ "Like the monitoring system, it mainly constructs a multi-machine image transmitter, the condition during grinding, · 1 Multi-camera image receiving: The image signal of the image captured by ^ set, after receiving = by the photography transmitter; send-personal electricity (CPc), 1 images taken are combined on the same day ^ Receive more than 5 Hai The image of J f transmitted by the image receiver, intercept the card's wheeler termination number. When the signal and fragmentation of Rifan enters and leaves the grinding device; the signal transmission wheel 2 of the photographic device is transmitted. The monitoring system of item 1 is a CCD camera. The monitoring system of item 1 of the patent claim / six τ < speaking device is input / output · 崞 (I / 〇 〇rt). 3 4 · A smart wafer chip image monitoring method, the main steps include: 糸 (1) first 'empty Image (l), Image (2) and Image (3) in a personal computer (PC); ( 2) Confirm whether the wafer enters the grinding device. If not, repeat this step until it is determined that the wafer enters the grinding unit. Grinding device; (3) Multiple photography devices begin to capture images and store the images in lmage (3) file;. (4) Confirm whether a wafer fragment warning is turned on, and if so, ~ image capture system maintains and Stop 'if the wafer fragment alert is not turned on' then continue on page 9 492246 6. Steps for applying for patent scope; (5) The multiple photographing devices continue to capture images and confirm whether the wafer is separated from the grinding device. If not, return to step (4) until the date is determined. Yuan left the grinding device; (6) Store 1 leg 86 (1) to 1_§6 (2), save 1111 叩 6 (3) to Image (2), and clear lmage (3) ; Sub (7) repeat the steps (2) to (6) until the batch of wafers is finished. Step (5) in the tool 6 steps 7 steps 8 steps 9 steps • If the monitoring method of the patent application item 4 is used, the camera used is a CC] D camera. The monitoring method of item 4 of the scope of patent application, where (2) ^ is a crystal entry signal sent from k input ^ / output 槔 to confirm. ^ For the monitoring method of item 4 in the scope of the patent application, the (4) ^ / 1 / one of the wafer fragmentation signals sent from the round book to confirm. r :: Please check the monitoring method of item 4 of the profit range, of which (5) such as the application of one of the wafers sent from the port to confirm the exit signal. Confirm the monitoring method of item 4 of the profit range, Among them (4) ^. After the lambda taking system is maintained and stopped, it can be checked by the staff. If the patent application is filed, go back to step (1). For the monitoring method around item 9, check with the staff. 11 · (1) (2) storage method, the main method of which is to intercept an image signal and send it to the image receiver; 492246 VI. Patent application scope (3) The receiver receives the image signal; (4) The receiver combines the images captured at the same time on the same screen; (5) Confirms whether the wafer enters the grinding chamber (whether the storage instruction is π ΟΝπ) ; (6) If the wafer enters the grinding room, use the intercept card in a personal computer (PC) to digitize the captured image; (7) Store the digitized captured image in one of the settings in the PC (8) File Image (3). 12. If the storage method of item 11 in the scope of patent application, the photography device is a CCD camera. 13 · —A control card is a combination of functional circuits controlling steps (3) to (7) of the storage method such as item 11 of the scope of patent application. Page 11