486402 A7 B7 經濟部智慧財產局員工消費合作社印制衣 五、發明說明(ί ) 〈本發明之槪要〉 本發明係關於一種藉由高能量密度的雷射束來加熱至 少二個元件之方法，以便於接合或分離該等元件。 本發明尤其是關於一種雷射接合方法，其用來接合各 種以塑膠製成、或者是塑膠與其他材料製成的工件；該方 法係使面對雷射光源之上方的工件包含有一種可使雷射束 穿透的材料，而第二個工件包含有一種能被雷射束吸收的 材料，使得該二個工件鄰接的接觸表面融化並且在後續的 冷卻期間因爲壓力而互相連接在一起；一個被排置於雷射 光源與工件之間的光罩係被連接，以便連接該等工件，尤 其是接觸表面的一個接合區域；前述之光罩的結構係大於 施加的雷射束之波長；該雷射光源係被設定至該接觸表面 ’且該設定方式係爲形成一種簾幕狀的雷射束且在接觸表 面上產生一條直線，並且該雷射束與光罩係相對地移動。 本發明亦關於一種實行該方法的裝置。 該方法係被描述於待審定中的歐洲專利申請案第 99101816.9號中。該用於微細構造元件之接合光罩的方法 ，需要該雷射束以及該要被接合之工件係具有非常快的運 動速率。爲了要達到必須的融化溫度，亦需要該雷射輻射 具有一個非常高的能量密度。然而，目前可獲得的半導體 之雷射兩極真空管系列只能達到一個60瓦〜80瓦的最大 輸出。然而，輸出在千瓦（kw)範圍之內的兩極真空管堆 疊之雷射束，其亦可藉由一種合適的光學排置來形成一直 線。尤其是爲了在小結構的情況中盡可能達到一個精確發 4 (請先閱讀背面之注意事項再填寫本頁)486402 A7 B7 Printed clothing by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs V. Description of the invention () 〈Summary of the invention〉 The invention relates to a method for heating at least two elements by a laser beam with high energy density To facilitate joining or disconnecting these components. In particular, the present invention relates to a laser joining method for joining various workpieces made of plastic, or plastic and other materials; the method enables a workpiece above the laser light source to include a The material penetrated by the laser beam, and the second workpiece contains a material that can be absorbed by the laser beam, so that the adjacent contact surfaces of the two workpieces melt and are connected to each other due to pressure during subsequent cooling; one The photomask arranged between the laser light source and the workpiece is connected in order to connect the workpieces, especially a joint area of the contact surface; the structure of the aforementioned photomask is larger than the wavelength of the applied laser beam; the The laser light source is set to the contact surface ′, and the setting method is to form a curtain-shaped laser beam and generate a straight line on the contact surface, and the laser beam moves relative to the mask system. The invention also relates to a device for carrying out the method. This method is described in pending European Patent Application No. 99101816.9. The method for bonding photomasks for finely structured components requires the laser beam and the workpiece to be bonded to have a very fast motion rate. In order to reach the necessary melting temperature, the laser radiation also needs to have a very high energy density. However, currently available semiconductor diode vacuum tube series can only reach a maximum output of 60 to 80 watts. However, a laser beam with a two-pole vacuum tube stack outputting in the kilowatt (kw) range can also be formed into a straight line by a suitable optical arrangement. Especially in order to achieve an accurate hair 4 in the case of small structures (please read the precautions on the back before filling this page)
--------訂---------^ IAWI 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 經濟部智慧財產局員工消費合作社印製 486402 A7 B7 五、發明說明（7 ) 射，並且排除任何不需要的陰影效果，該雷射束係有利地 被導引以與接觸表面的接合區域垂直。因爲如此的設計# 爲以兩極真空管堆疊形式之雷射，該雷射束以一角度照射 在該光罩上。因爲會產生不精確’如此的角度對於光蕈揆 合方法係爲不可接受的。 要在一個貨架上安置或移除例如表面固定裝置（SNiP )半導體元件，歐洲專利申請案第9912103 1 · 1號（亦爲 待審定中的）描述一種藉由以其佈線路徑或者是在一個印 刷電路板中的雷射束用來加熱如此之元件的方法。該接合 的發生係藉由一種焊料，或是僅僅加熱各自欲被接合的部 件而不需要使周焊料，即所謂的微接合（microjoining) ° 根據此方法，一種無法被雷射束滲透的材料之光罩係被棑 置於雷射光源與元件之間，且該要被接合的區域係被從前 述的光罩上移除。所有的加熱部位接著係藉由一個或晏數 個雷射束而被個別地或同時地輻射，使得該元件的加熱部 位被加熱並接合、或分開。尤其是可以選擇一種直線形的 雷射束來相對地移動元件以及貨架。然而以此方法，元件 加熱的發生通常較藉由上述之雷射接合方法慢，其必須的 能量密度之供應也可能成爲一個問題。 因此本發明的目的是提出一種能提供足夠的能量密度 ，來達到以接合或分開至少二個元件爲目的選擇，其中該 等元件可由相同或不同材料，包括合金、塑膠、陶磁、以 及有機或是無機物質等製成。尤其本發明之目的是要提供 在鄰接一平面的物體接合地帶中之部位的高品質的區域揆 5 本紙張尺度適用中國國豕標準（CNS)A4規格（210 X 297公爱） --------------------^---------^ (請先閱讀背面之注意亊頊存填窵本買〕 486402 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（>7 ) 合，其係至少有一個物體是由塑膠製成’並且該接合地帶 已被良好的界定。 根據本發明，此目的係藉由一種具有申請專利範圍第 1項與第2項之特徵的方法而達成。該方法進一步有利的 實施例係包含於附屬的申請專利範圍中。再者，此目的係 藉由一種具有申請專利範圍第6項之特徵的裝置而達成。 該裝置更進一步有利的實施例係被提供於相關附屬的申請 專利範圍中。 因此，欲在接合區域中產生高能量密度’至少二個兩 極真空管的雷射束係被結合在一起，且後續地，其藉著一 個光學變焦的配置，係產生不同的雷射線長度。·例如，此 係包含有一個可被以輻射方向移動之圓柱透鏡，以便能夠 改變至該光罩的距離。該雷射束與該等元件之間的相對運 動可以藉由不是移動雷射束（例如藉著一個可移動的偏光 鏡），就是藉由在一個X-Y座標桌上移動該等元件來達 成。 根據一個較佳的實施例，一個垂直地對準該光罩表面 的第一雷射束被至少一個配置爲垂直該第一雷射束之第二 雷射束結合，以如此之第二雷射束經由一光束分離器所發 生的結合或是混合，且所產生的雷射束被導引至光罩。爲 此效果，係使用一個界定良好的雷射束分離器垂直照射在 第一雷射束上；其中，該分離器對一雷射束係爲高度可穿 透的，並且對各別的第二雷射束係爲高度反射的。較佳地 ，雷射束不是具有不同的波長，就是具有相同的波長但使 6 (請先閱讀背面之注意事項再填寫本頁) --------訂---------^ 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公爱） 486402 A7 經濟部智慧財產局員工消費合作社印製 ___B7_____ 五、發明說明（\ ) 用不同的偏振。以此方法以及其相關的裝置’目前係可達 到200 - 300瓦的結果。 根據另一個較佳的實施例，數個雷射束係藉由一個透 鏡而互相平行地被集中於接合區域上。爲此效果，該等雷 射光源係被排置爲互相接近（接近1釐米的間隔）。如果 在焦點線之焦距夠長的話，這個接近的設計也可以限制角 度的問題。以此配置，目前係可達到200瓦的輸出。 這個方法以及裝置因而能夠將塑膠平板、模製品部件 或金屬箔片接合在一起，或者是將其接合至其他的材料， 例如金屬、合金、塑膠、陶磁、半導體材料、有機或無機 物質，其係以如此發生在短暫週期時間的接合並有高質量 之提供；或者是精確地接合至表面接合精細結構之工件的 欲接合地帶，而不會破壞其結構；雖然個別的雷射束輸出 並不足夠，其不只是提供足夠的能量密度，而且能夠改變 其線長度。以如此方法，係能夠達到高度的彈性。 〈附圖之簡略說明〉 以下，本發明係藉由結合附圖的實施例來做更加詳細 的說明，如以下： 圖1係爲以一個範例方式表示的示意說明圖’其爲一 個具有二個雷射光源互相垂直排列的配置； 圖2係爲根據圖1之配置的示意說明圖’其具有垂直 於一個第一雷射光源之數個平行的雷射光源；以及 圖3係顯示另一個設計的示意說明圖，該雷射光源的 設計具有平行的半導體雷射。 7 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） --------------------訂--------··線 (請先閱讀背面之注意事項再填寫本頁) 486402 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（$ ) 〈元件符號說明〉 Γ 1，， 22，2，， 2，” 3 4 5 6 7 8 9 10 10’10，， 10”， 12 13 13? 14’ 14，， 14，，， 雷射光源 雷射光源 雷射束 雷射束 雷射束 雷射束 光罩 塑膠平板 塑膠平板 接合區域 接觸地帶/接觸表面 雷射譜線 開孔 光束分離器 光束分離器 光束分離器 光束分離器 圓柱透鏡 表面 準直器透鏡 雷射光源 雷射光源 雷射光源 8 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） (請先閱讀背面之注意事項再填寫本頁) 486402 經濟部智慧財產局員工消費合作社印製 A7 _____ Β7 五、發明說明（b ) 15’ 聚光透鏡 〈較佳實施例之詳細說明〉 圖1顯示一個用於塑膠平板4、5之平面焊接配置的範 例，該等塑膠平板4、5係藉著一個雷射束2與光罩3，僅 焊接其一個特定的接合區域6。因此，該配置也可被裝配 來用於接合或是分開元件（貨架上的SMD等等）。該配置 係包含有一個以直線配置的第一雷射光源Γ，例如一個或 者是數個半導體雷射（兩極真空管雷射），其具有從前述 之半導體雷射發射之雷射輻射源，該雷射輻射源係由一個 準直器透鏡13’直接準直。該第一雷射光源1’的配置係使 得雷射束2以一種雷射簾幕的方式，垂直地穿過光罩3的 開孔9而進入在二個塑膠板件4、5之間接觸地帶7之接合 區域6。在此之前，該雷射束2,通過穿越一個光束分離器 1〇 ’其對於雷射束2’係爲高度可穿透的。從相對於該第一 個雷射束2’垂直地配置的雷射光源1”，一個亦藉由一個準 直器透鏡13”準直之對應的雷射束2”係通過至光束分離器 1〇，在此該雷射束2”照射在一個對於雷射束2”高度反射之 '表面13上，因此將該雷射束2”與另外的雷射束2,結合而 形成雷射束2。該雷射束2’的波長係與雷射束2”的波長不 同。在另一個選擇之中，該等雷射束2’、2”的波長係爲相 同的，但是其偏振爲不同的。在這個範圍內，係有數個雷 射束被與雷射光源1”平行地排置，使其能夠增加能量密度 ，前述的該等雷射束係被配置爲與光束分離器10,- 10，，， 連接，如槪略地顯示於圖2中。其波長或者是偏振的狀況 9 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） --------------------訂---------^ IAW1I (請先閱讀背面之注意事項再填寫本頁) 486402 經濟部智慧財產局員工消費合作社印製 A7 B7 五、發明說明（Ί ) 係相應地施加。 後續的ί ’該@射束2係照射在一個能夠在輻射方向上 被移動的圓柱透鏡12上，以便產生不同的線長度。線長度 係以虛線表示。 該極爲有效的雷射譜線8係輻射於接觸表面7上。如 本方法所需的’塑膠平板4係依據能容許雷射輻射的傳送 來建構’而塑膠平板5係爲能吸收雷射輻射。該雷射束2 係連續地相對於光罩3，或者是塑膠平板4、5移動，使得 直接位於雷射譜線8下方的接合區域6之塑膠平板4、5呈 現一種熔合狀態並且接著在冷卻後被固化。 圖3圖示地顯示一個實施例，其包含有數個互相平行 排置的雷射光源14’一 14’，’，使得產生的雷射束2’一 2’’’彼 此互相鄰近緊靠地準直，以便避免任何的所有可能之角度 錯誤。雷射光源的間隔接近1釐米，但爲了避免角度錯誤 ，所使用之雷射光源的數目被限制到一個平行的雷射束2” 一 2’’’最大厚度接近5釐米。該等平行的雷射束2”一 2’’’係 藉由一個聚光透鏡15’而被準直至該接觸表面7上。 以上敘述之所需的相對運動要不是藉由移動塑膠平板 4、5，就是藉由移動雷射束2而產生。這些可以例如另外 使用一個偏光鏡而瞭解，且該偏光鏡係可被移動進入圓柱 體透鏡或者是聚光鏡前面的光束路徑。 10 ^紙張尺度適用中國國冢¥準（CNS)A4規格（210 X 297公釐） -------------AW · I-----訂--------·線 (請先閱讀背面之注意事項再填寫本頁)-------- Order --------- ^ IAWI This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 486402 A7 B7 V. Description of the invention (7) The laser beam is advantageously guided so as to be perpendicular to the joint area of the contact surface, and excludes any unwanted shadow effects. Because such a design # is a laser in the form of a two-pole vacuum tube stack, the laser beam strikes the mask at an angle. Because it will produce an inaccurate angle, such an angle is unacceptable for the photo-muscle coupling method. To place or remove, for example, a surface mount device (SNiP) semiconductor component on a shelf, European Patent Application No. 9912103 1 · 1 (also pending) describes a method of using a wiring path or printing A laser beam in a circuit board is a method used to heat such components. The joining occurs by a solder or by heating only the parts to be joined without the need for peripheral solder, so-called microjoining ° According to this method, a material that cannot be penetrated by the laser beam The photomask is placed between the laser light source and the component, and the area to be bonded is removed from the aforementioned photomask. All heating sites are then individually or simultaneously irradiated by one or several laser beams, so that the heating sites of the element are heated and joined, or separated. In particular, a linear laser beam can be selected to move the components and shelves relatively. However, in this method, the heating of the component usually occurs more slowly than by the above-mentioned laser bonding method, and the necessary energy density supply may also become a problem. Therefore, the object of the present invention is to provide a method that can provide sufficient energy density to achieve the purpose of joining or separating at least two components, wherein the components may be the same or different materials, including alloys, plastics, ceramics, and organic or Made of inorganic substances. In particular, the purpose of the present invention is to provide a high-quality area in the area where objects adjoining a flat surface. 5 This paper size is applicable to China National Standard (CNS) A4 (210 X 297 public love) ---- ---------------- ^ --------- ^ (Please read the note on the back first, fill in the copy and buy it) 486402 A7 B7 Intellectual Property Bureau, Ministry of Economic Affairs Printed by Employee Consumer Cooperatives 5. Invention Description (> 7), at least one object is made of plastic 'and the joint zone has been well defined. According to the invention, this object is achieved by an application The method is achieved by the features of the first and second patent scope. Further advantageous embodiments of this method are included in the scope of the attached patent application. Furthermore, this object is achieved by a method having the sixth scope of the patent application scope. A further advantageous embodiment of the device is provided in the scope of the relevant attached patent application. Therefore, a laser beam system which is intended to generate a high energy density in the junction area of at least two bipolar vacuum tubes is combined Together, and subsequently, by An optical zoom configuration produces different laser beam lengths. For example, this system contains a cylindrical lens that can be moved in the direction of the radiation so that the distance to the mask can be changed. The laser beam and the elements The relative movement between them can be achieved either by moving the laser beam (for example by a movable polarizer) or by moving the elements on an XY coordinate table. According to a preferred embodiment, a A first laser beam vertically aligned with the surface of the mask is combined by at least one second laser beam configured to be perpendicular to the first laser beam, so that the second laser beam occurs through a beam splitter. The laser beam is combined or mixed, and the generated laser beam is guided to the photomask. To this effect, a well-defined laser beam splitter is used to illuminate the first laser beam vertically; One laser beam system is highly transmissive and highly reflective to each second laser beam system. Preferably, the laser beams either have different wavelengths or have the same wavelength but make 6 ( Please first Read the notes on the reverse side and fill out this page) -------- Order --------- ^ This paper size applies to China National Standard (CNS) A4 (210 X 297 public love) 486402 A7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs _B7_____ 5. The invention description (\) uses different polarizations. This method and its related devices' currently can achieve results of 200-300 watts. According to another preferred In the embodiment, a plurality of laser beams are focused on the joint area in parallel with each other through a lens. For this effect, the laser light sources are arranged close to each other (close to a distance of 1 cm). If the focal length of the focal line is long enough, this close design can also limit the angle problem. With this configuration, the current output can reach 200 watts. This method and device can thus join plastic flat plates, molded parts or metal foils together, or to other materials such as metals, alloys, plastics, ceramics, semiconductor materials, organic or inorganic materials, In this way, the joints that occur at short cycle times are provided with high quality; or the zones to be joined precisely to the surface-joined fine-structured workpieces without destroying their structure; although individual laser beam outputs are not sufficient Not only does it provide enough energy density, but it can also change its line length. In this way, the system can achieve a high degree of elasticity. <Brief description of the drawings> In the following, the present invention is described in more detail by way of embodiments in conjunction with the drawings, such as the following: FIG. 1 is a schematic explanatory diagram shown by way of example. A configuration in which the laser light sources are arranged perpendicular to each other; FIG. 2 is a schematic illustration of the configuration according to FIG. 1 'which has a plurality of parallel laser light sources perpendicular to a first laser light source; and FIG. 3 shows another design The schematic illustration of the laser light source has a parallel semiconductor laser. 7 This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) -------------------- Order -------- · · Line (Please read the precautions on the back before filling this page) 486402 A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the invention ($) <Description of component symbols> Γ 1, 22, 2, 2, 2 ， "3 4 5 6 7 8 9 10 10'10 ， ， 10" ， 12 13 13? 14 '14 ， 14 ，，， Laser light source Laser light source Laser beam Laser beam Laser beam Laser beam light Cover plastic plate plastic plate joint area contact zone / contact surface laser spectrum opening hole beam splitter beam splitter beam splitter beam splitter cylindrical lens surface collimator lens laser light source laser light source laser light source 8 paper sizes Applicable to China National Standard (CNS) A4 specification (210 X 297 mm) (Please read the precautions on the back before filling this page) 486402 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 _____ Β7 V. Description of Invention (b) 15 'condenser lens (detailed description of the preferred embodiment) Figure 1 shows a plastic lens Fan of the flat configuration of welded plates 4, those based plastic plates 4,5 by a particular laser beam 2 a joining region of the mask 3, which is only a weld 6. Therefore, this configuration can also be assembled for joining or separating components (SMD on the shelf, etc.). This configuration includes a first laser light source Γ arranged in a straight line, such as one or several semiconductor lasers (bipolar vacuum tube lasers), which has a laser radiation source emitted from the aforementioned semiconductor laser. The laser The radiation source is directly collimated by a collimator lens 13 '. The configuration of the first laser light source 1 ′ is such that the laser beam 2 passes through the opening 9 of the photomask 3 in a manner of a laser curtain and enters into contact between the two plastic plates 4 and 5. The joint area 6 of the zone 7. Prior to this, the laser beam 2 was highly permeable to the laser beam 2 'by passing through a beam splitter 10'. From the laser light source 1 "arranged perpendicularly to the first laser beam 2 ', one corresponding laser beam 2" collimated by a collimator lens 13 "is passed to the beam splitter 1o. Here, the laser beam 2 "is irradiated on a surface 13 that is highly reflective to the laser beam 2", so the laser beam 2 "is combined with another laser beam 2 to form the laser beam 2. The wavelength of the laser beam 2 'is different from the wavelength of the laser beam 2 ". In another option, the wavelengths of the laser beams 2', 2" are the same, but their polarizations are different. Within this range, several laser beams are arranged in parallel with the laser light source 1 "so that it can increase the energy density. The aforementioned laser beams are configured to be separated from the beam splitters 10, -10, The connection is shown in Figure 2. Its wavelength or polarization is shown in Figure 2. 9 This paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm) --------- ----------- Order --------- ^ IAW1I (Please read the notes on the back before filling out this page) 486402 Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 5 The description of the invention (Ί) is applied accordingly. The subsequent 该 '@ 射束 2 is irradiated on a cylindrical lens 12 which can be moved in the direction of radiation in order to produce different line lengths. The line lengths are indicated by dashed lines The extremely effective laser line 8 is radiated on the contact surface 7. As required by this method, the 'plastic flat plate 4 is constructed according to the transmission of laser radiation is allowed' and the plastic flat plate 5 is capable of absorbing the laser Radiation. The laser beam 2 is continuously moved relative to the photomask 3, or the plastic plates 4, 5 so that The plastic plates 4, 5 connected to the bonding area 6 below the laser line 8 assume a fused state and then solidify after cooling. Fig. 3 schematically shows an embodiment comprising a number of mines arranged parallel to each other The light sources 14'-14 ',' cause the generated laser beams 2'-2 '' 'to be collimated close to each other in order to avoid any possible angular errors. The spacing of the laser light sources is close to 1 cm However, in order to avoid wrong angles, the number of laser light sources used is limited to a parallel laser beam 2 "-2 '" with a maximum thickness close to 5 cm. The parallel laser beams 2 "-2 '" are collimated up to the contact surface 7 by a condenser lens 15'. The required relative motion described above is not by moving the plastic plate 4, 5, which is generated by moving the laser beam 2. These can be understood, for example, by using an additional polarizer, and the polarizer system can be moved into the cylindrical lens or the beam path in front of the condenser. 10 ^ Paper dimensions apply to China National Tomb ¥ quasi (CNS) A4 specification (210 X 297 mm) ------------- AW · I ----- Order -------- · Line (please (Read the notes on the back before filling out this page)