TW484104B - Apparatus and method for the inspection of objects - Google Patents

Apparatus and method for the inspection of objects Download PDF

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Publication number
TW484104B
TW484104B TW88113541A TW88113541A TW484104B TW 484104 B TW484104 B TW 484104B TW 88113541 A TW88113541 A TW 88113541A TW 88113541 A TW88113541 A TW 88113541A TW 484104 B TW484104 B TW 484104B
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Taiwan
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image
defect
window
interest
data
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TW88113541A
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Chinese (zh)
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Sharon Duvdevani
Tally Gilat-Bernshtein
Eyal Klingbell
Meir Mayo
Shmuel Rippa
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Orbotech Ltd
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Priority claimed from IL131282A external-priority patent/IL131282A/en
Priority claimed from IL131283A external-priority patent/IL131283A/en
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Publication of TW484104B publication Critical patent/TW484104B/en

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  • Image Processing (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

A method for inspecting objects, the method including creating a reference image for a representative object, the reference image including an at least partially vectorized first representation of boundaries within the image, acquiring an image of an object under inspection including a second representation of boundaries within the image, and comparing the second representation of boundaries to the at least partially vectorized first representation of boundaries, thereby to identify defects.

Description

484104 A7 五、發明說明( 發明範轉 本發明係關於影像處理的裝置和方法。 發明背景 用於分析影像的裝置和方法,特別是用於處理和分析的 裝置和方法有利於圖樣化物件之檢視,在相關技藝中爲 已熟知。 下列參考文獻説明影像處理的方法,可以有利於瞭 發明: ♦ 麻州Reading市AddiS0n Wesley出版社於1987年出版之 C· Gonzalez 和 P. Wintz 所撰寫 ”Digiul Image pr〇cessing,, ;以及 CRC出版社於1994年出版之John c· Russ所撰寫,,The Image Processing Handbook,,。 下列參考文獻説明邊緣偵測方法,可能有利於瞭解本發 明: D. Marr和E· Hildreth於英國科學院會刊發表之,,The〇Q of Edge Detection” ;以及 Μ· Chapron於4月11曰舉行之國際圖型識別會議所發表 之"A new chromatic edge-detector used f〇r ima O ^ segmentation” 0 下列參考文獻説明彩色影像分段方法,可能有利於瞭解 本發明:484104 A7 V. Description of the invention The invention relates to an apparatus and method for image processing. BACKGROUND OF THE INVENTION The apparatus and method for analyzing images, especially the apparatus and method for processing and analysis facilitate the inspection of patterned objects It is well-known in related arts. The following references show that image processing methods can be beneficial to the invention: ♦ C. Gonzalez and P. Wintz, AddiSon Wesley Publishing, Reading, Massachusetts, 1987, "Digiul Image prOcessing ,, and The Image Processing Handbook, by John C. Russ, published by CRC Press in 1994. The following references describe edge detection methods that may be helpful in understanding the invention: D. Marr and Published by E. Hildreth in the Proceedings of the British Academy of Sciences, "The 〇Q of Edge Detection"; and "A new chromatic edge-detector used f〇" published by the International Pattern Recognition Conference held by M. Chapron on April 11. r ima O ^ segmentation ”0 The following references describe color image segmentation methods that may be helpful in understanding the invention:

Philippe Pujas 和 Marie-Jose Aldon 於 1995 年 9 月 22 日 在西班牙San Filiu de Guixols市舉行之第7屆國際先進機 .-->|---!-------裝--- (請先閱讀背面之注意事項再本頁) 訂: .線 經濟部智慧財產局員工消費合作社印製 -4- 484104 A7 五、發明說明(2 ) 器人會議所發表之 ’’Robust Colour Image Segmentation,,;以 及The 7th International Advanced Machine held by Philippe Pujas and Marie-Jose Aldon in San Filiu de Guixols, Spain on September 22, 1995. (Please read the precautions on the back before this page) Order: Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Online Economics -4- 484104 A7 V. Description of Invention (2) "Robust Colour Image Segmentation" published by the conference of robots ,,;as well as

Lelia Shararenko,Maria Petrou 和 Josef Kittler 於國際電 機廷子工程師學會所發表之,,Automatic WatershedLelia Shararenko, Maria Petrou and Josef Kittler, International Society of Electrical Engineers, Automatic Watershed

Segmentation of Randomly Textured Colour Images··。 歸屬於Lapidot之美國專利案案號爲第4,758,888號説明 遍遊生產線檢視工作作品的方法和裝置,包含不中斷沿著 生產線之進行或是工作作品而線上檢視缺陷的方法和裝置。 歸屬於Aloni等人之美國專利案案號爲第5,586,058號和 弟5,6 1 9,4 2 9號説明檢視圖型化物件和偵測缺陷的方法和 裝置,包含檢視物件之二進制位準表示、檢視物件之灰階 位準表示’以及較佳地重新檢視物件之灰階標度表示以過 濾假警報以及將缺陷分類。 歸屬於Caspi之美國專利案案號爲第5,774,572號説明自 動視覺檢視系統’該系統運作爲以與高斯函數第二導數相 關之過濾函數捲積物件之2維數位灰階標度影像,而形成 具有正負號値的2維捲積影像。物件邊緣之位置藉由尋找 介於鄰近相反正負號値之間的零跨越而達成。 歸屬於Caspi等人之美國專利案案號爲第5,774,573號説 明視覺檢視系統’該系統使用具有與高斯函數第二導數相 關(過濾函數的物件之2維數位灰階標度影像之捲積,而 形成具有正負號値的2維捲積影像。Caspi等人之捲積可 以用二高斯差異執行,其中之一爲正而另一爲負。 PCT申請案案號爲第IL98/00393號説明使用色彩之印刷 -5 私紙張尺度適用中國國家標準(CNS)A4規格(210 X 997公多厂 M-I裝--- (請先閱讀背面之注意事項再本頁) 訂· · •線- 經濟部智慧財產局員工消費合作社印製 A7 B7 五、發明說明(3 電路板的檢視,包含色彩之使用以識別特定類型條件如使 用色彩之導電體氧化。 PCT申請案案號爲第IL98/00477號説明分析式表示影像 之方法,以致型態運作如膨脹、侵蝕以及標度量測可以在 非二進制像素上執行,較使用先前之方法爲更佳有效率。 申請人未公布之以色列專利申請案案號爲第125929號 説明物品檢視系統和方法,包含改良之影像獲取系統。 可以有利於影像分析的方法在下列發表文獻中説明: 美國紐澤西州NJ 08855 Piscataway市Rutgers大學電機 電腦工程系1998年春季客座DorinComaniciu和PeterMeer 撰寫之,,Distribution Free Decomposition of Multivariate Date"。 以上提到和整個規範之所有參考文獻之揭示以及由此引 述之文獻的揭示在此處以提及的方式併入本文中。 _ 發明總結 本發明找尋以提供用於影像處理的改良式裝置和方法。 本發明有利於結合申請人於1999年7月25日申請的以 色列專利申請案案號爲第IL 13 1092號,取名爲"Optical Inspection System'’之專利,該案之揭示在此處以提及的方 式併入本文中。 由此顯示和説明的影像處理系統之輸入,典型地包括下 列輸入的至少其中之一: a·選擇性地,感興趣領域或是區域之快照,包括一些或是 更多下列區域:由使用者預先定義之領域、圍繞存疑缺陷 -6 - [纸張尺度刺巾關家標準(CNS)A4規格(21G X 297公爱) '' 一 ^ ^-------裝--- (請先閱讀背面之注意事項再@本頁) •trDV · _線· 經濟部智慧財產局員工消費合作社印制农 1U4 A7 B7 五、發明說明( 4 經濟部智慧財產局員工消費合作社印製 的領域以及圍繞預定類型特徵之領域; b•二進制CEL資料(有時由此訂爲ncel資料π),該資料爲 辨識相當於圖形不同區域之間的界限之外圍元素的資料; c•彩色CEL資料,稱爲辨識相當於圖形不同區域之間的界 限之外圍元素的資料以及辨識CEL各側上區域類型的資料; d.型態特徵檢視觸發; e•色彩缺陷檢視觸發; f·二進制缺陷檢視觸發(有時由此訂爲”硬體缺陷”),該觸 發爲骨架上的刻痕、突起部以及CEL,其中CEL位於型態 骨架上;以及 g·使用者辨識的感興趣領域檢視觸發。 較佳地是’這些輸入本質上由影像處理單元提供,如申 請人的以色列專利申請案案號爲第IL 131〇92號之專利所 説明。 因此具有如本發明較佳具體實施例所提供之用於檢視物 件的方法’該方法包含創建代表性物件的參考影像,該參 考影像包含影像内邊界之至少部分向量化的第—表示,獲 取在檢視之下物件的影像包含影像内邊界之第二表示,以 及將邊界之第二表示與邊界之至少部分向量化的第一表示 比較,而因‘此辨識缺陷。 另卜如本發月車又佳具體實施例,該比較步驟利用〆個 使用者選擇的可變定限於介於第— ^ ^ ^ ^ 和罘二表示之間的邊界 相對應部分之可接受距離。 另外’具有如本發明較佳具體實施例所提供,用於影像 本紙張尺度顧+關家鮮 -------I-------裝--- (請先閱讀背面之注意事項再本頁) 訂. -·線· 五、發明說明(5 ) 處理的系統包含邊界識別器,運作爲產生在影像中已知元 素邊界之表示、硬體候選缺陷識別器,運作爲以硬體識別 在影像中之候選缺陷、軟體候選缺陷檢視器由硬體候選缺 陷識別器接收輸出以及以軟體使用邊界表示以識別在輸出 内的至少一假警報。較佳地是該至少一假警報爲藉由將該 邊界與參考比較而作用。 另外,如本發明較佳具體實施例,該邊界識別器包含硬 體邊界識別器,運作爲以硬體產生影像已知元素邊界之表 7JT 〇 另外,如本發明較佳具體實施例,該系統亦包含軟體候 選缺陷識別器,運作爲以軟體識別影像中之其餘候選缺陷。 亦且,如本發明較佳具體實施例,該軟體候選缺陷檢視 器亦由該軟體候選缺陷識別器接收第二輸出以及以軟體使 用邊界 < 表示以識別在第二輸出内的至少一假警報。 另外’如本發明較佳具體實施例,該硬體候選缺陷識別 备利用邊界之表示以識別至少一些候選缺陷。 另外’如本發明較佳具體實施例,該軟體候選缺陷識別 备利用邊界之表示以識別至少一些候選缺陷。 經濟部智慧財產局員工消費合作社印製 另外,具有如本發明較佳具體實施例所提供,用於影像 處理的系統包含學習次系統,運作爲定義在檢視下物件的 第一和第二領域,其中第一領域各包含至少一已知的緊要 物件元素而第二領域不包含該已知的緊要物件元素,以及 一缺陷偵測器運作爲依據已知的緊要物件元素相關的先前 知識使用第一程序以檢視第一領域,以及使用與第一程 -8 - 484104 A7 五、發明說明(6 經濟部智慧財產局員工消費合作社印製 不同的第二程序以檢視第二領域。 另外’如本發明較佳具體實施例,㈣二程序包本第二 領域的硬體檢視,運作爲識別第二領域中的候選㈣以及 包含第二領域的後序軟體檢視’只有假使在第二領域中發 現至少一候選缺陷時,運作爲分杯产 逆忭馬刀析在罘二領域中發現的該 至少一候選缺陷,以由此識別假警報。 亦且’如本發明較佳具體實施例所提供,用㈣視物件 的万法包含在檢視的第—階段中識別該至少一候選缺陷的 位置,以及對各候選缺陷而言,在 社巧位置 < 候選領域的決 定用於至少部分依據該識別步驟之輸出的外圍锔域至少大 小和形狀的檢視,以及在檢視的第二階段中,檢視各候選 領域以確認該缺陷。 另外,如本發明較佳具體實施例成。 另外,如本發明較佳具體實施例成。 另外,如本發明較佳具體實施例 在一已知位置之候選領域的大小。 另外,如本發明較佳具體實施例 該候選領域或是該候選缺陷的準則執行不同二彳^亦且,如本發明較佳具體貫施例,該第二階段包含依據 在識別步驟中識別的該至少—候選缺陷之特徵執行;同的檢視。另外如本發明較佳具體貫施例,該第二階段包含依據 該第一階段以硬體完 該第二階段以軟體完 該決定步驟包含決定 該第二階段包含依據 (請先閱讀背面之注意事項再HP:本頁) -裝 ήιτ. 線. -9- A7Segmentation of Randomly Textured Colour Images ... U.S. Patent Case No. 4,758,888, which belongs to Lapidot, describes a method and apparatus for inspecting work in a traveling production line, including a method and apparatus for inspecting defects online without interrupting progress along the production line or work. U.S. Patent No. 5,586,058 and No. 5,6 1 9, 4 2 9 belonging to Aloni et al. Describe a method and apparatus for inspecting a view-type object and detecting defects, including a binary level representation of the inspected object , View the gray level representation of the object 'and better re-view the gray scale representation of the object to filter false alarms and classify defects. U.S. Patent Case No. 5,774,572, which belongs to Caspi, describes an automatic visual inspection system. 'The system operates as a 2-dimensional digital grayscale scale image of a convolution object with a filter function related to the second derivative of the Gaussian function, forming an image with Two-dimensional convolution image of sign 値. The position of the edge of the object is achieved by looking for a zero crossing between adjacent opposite signs 値. U.S. Patent Case No. 5,774,573, belonging to Caspi et al., Describes a visual viewing system 'this system uses a convolution with a 2-dimensional digital grayscale scale image of an object that is related to the second derivative of the Gaussian function, and A two-dimensional convolution image with a sign 値 is formed. The convolution of Caspi et al. Can be performed using two Gaussian differences, one of which is positive and the other negative. PCT application No. IL98 / 00393 illustrates the use of color The printing-5 private paper size applies the Chinese National Standard (CNS) A4 specification (210 X 997 public multi-factory MI installation --- (Please read the precautions on the back before this page) Order · · • Line-Intellectual Property of the Ministry of Economic Affairs Printed by the Consumer Cooperative of the Bureau A7 B7 V. Description of the invention (3 View of the circuit board, including the use of color to identify specific types of conditions such as the oxidation of electrical conductors using color. PCT application No. IL98 / 00477 explained analytical formula The method of representing images, so that type operations such as dilation, erosion, and scaling can be performed on non-binary pixels, which is more efficient and effective than using previous methods. The listed patent application No. 125929 describes an article inspection system and method, including an improved image acquisition system. Methods that can facilitate image analysis are described in the following published literature: NJ 08855 Piscataway, Rutgers University, New Jersey, USA Computer Engineering Department, written by guest Dorin Comaniciu and Peter Meer in spring 1998, Distribution Free Decomposition of Multivariate Date ". The disclosure of all references mentioned above and the entire specification, as well as the disclosure of the documents cited thereby, are hereby mentioned in the manner mentioned. Included herein. _ SUMMARY OF THE INVENTION The present invention seeks to provide an improved device and method for image processing. The present invention facilitates the combination of the Israeli patent application No. IL 13 1092 filed by the applicant on July 25, 1999 No., named "Optical Inspection System", the disclosure of which is incorporated herein by reference. The inputs of the image processing system shown and described here typically include at least the following inputs One of them: a. Selectively, the area of interest or the speed of the area Photos, including some or more of the following areas: areas pre-defined by the user, around the suspected defects-6-[Paper size stab towel family standard (CNS) A4 specification (21G X 297 public love) '' 1 ^ ^ ------- install --- (please read the precautions on the back before @this page) • trDV · _ Line · Printed by the Consumers' Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 1U4 A7 B7 V. Description of the invention ( 4 The fields printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs and the fields around the characteristics of predetermined types; b • binary CEL data (sometimes referred to as ncel data π), which is equivalent to identifying between different areas of the figure Data of peripheral elements of the boundary; c • Color CEL data, called data identifying peripheral elements equivalent to the boundary between different areas of the figure and data identifying the type of area on each side of the CEL; d. Triggering of type feature viewing; e • Color defect inspection trigger; f · Binary defect inspection trigger (sometimes referred to as "hard defect"), which is a nick, protrusion, and CEL on the skeleton, where CEL is on the type skeleton; and g · User identification View trigger areas of interest. Preferably, these inputs are provided by the image processing unit in essence, as described in the applicant's Israeli patent application No. IL 131〇92. Therefore, there is a method for inspecting an object as provided by a preferred embodiment of the present invention. The method includes creating a reference image of a representative object, the reference image including a first representation of at least a part of a vectorized inner boundary of the image, obtained in The image of the object under review includes a second representation of the boundary within the image and a comparison of the second representation of the boundary with the first representation of at least a portion of the vectorization of the boundary due to 'this identification defect. In addition, as in this specific embodiment of the moon car, the comparison step utilizes a user-selectable variable setting to be limited to the acceptable distance of the corresponding portion of the boundary between the ^^^^^ and the second representation. . In addition, it has the same paper size as the preferred embodiment of the present invention, which is used for the image paper size Gu + Guan Jiaxian ------- I ------- install --- (Please read the back (Notes on this page) Order.-· Line · V. Description of the Invention (5) The processing system includes a boundary identifier, which operates to generate a representation of the known element boundary in the image, and a hardware candidate defect identifier, which operates to The hardware candidate defect candidate is recognized in the image, the software candidate defect viewer receives the output from the hardware candidate defect identifier, and the software uses a boundary representation to identify at least one false alarm within the output. Preferably, the at least one false alarm acts by comparing the boundary with a reference. In addition, as in the preferred embodiment of the present invention, the boundary identifier includes a hardware boundary identifier, which operates to generate a table of known element boundaries of the image in hardware. 7 In addition, as in the preferred embodiment of the present invention, the system It also includes a software candidate defect identifier, which operates to identify the remaining candidate defects in the image with software. Also, as in the preferred embodiment of the present invention, the software candidate defect viewer also receives a second output by the software candidate defect recognizer and expresses it as a software use boundary < to identify at least one false alarm in the second output. . In addition, as in the preferred embodiment of the present invention, the hardware candidate defect recognition uses a representation of a boundary to identify at least some candidate defects. In addition, as in the preferred embodiment of the present invention, the software candidate defect recognition uses a representation of a boundary to identify at least some candidate defects. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. In addition, as provided by the preferred embodiment of the present invention, the system for image processing includes a learning sub-system, which operates to define the first and second fields of objects under inspection. The first field each contains at least one known critical object element and the second field does not include the known critical object element, and a defect detector operates to use the first based on prior knowledge of known critical object elements. Procedures to review the first field, and use a second procedure different from the first process -8-484104 A7 V. Invention Description (6 Intellectual Property Bureau of the Ministry of Economic Affairs Employee Consumer Cooperatives to print a second procedure to review the second field. In addition, such as the present invention In a preferred embodiment, the second package includes hardware inspection in the second field, which operates to identify candidates in the second field and a subsequent software view that includes the second field. Only if at least one is found in the second field When candidate defects are detected, the operation is to analyze the at least one candidate defect found in the second field in order to identify false alarms. Also, as provided by the preferred embodiment of the present invention, the method for defying the object includes identifying the position of the at least one candidate defect in the first stage of the inspection, and for each candidate defect, The position < candidate field decision is used to review at least partly the size and shape of the peripheral region based on the output of the recognition step, and in the second stage of the review, review each candidate field to confirm the defect. In addition, as in this The preferred embodiment of the invention is made. In addition, the preferred embodiment of the invention is made. In addition, the preferred embodiment of the invention is the size of a candidate field in a known position. In addition, the preferred embodiment of the invention is implemented as a preferred embodiment. For example, the candidate field or the criteria for the candidate defect are implemented differently. Also, as the preferred embodiment of the present invention, the second stage includes execution based on the characteristics of the at least candidate defect identified in the identifying step; The same review. In addition, if the present invention is a preferred embodiment, the second stage includes completing the decision step in hardware and the second step in software according to the first stage. Step Inclusion Decision This second stage includes basis (Please read the precautions on the back before HP: this page)-Packing price. Thread. -9- A7

經濟部智慧財產局員工消費合作社印製 候選缺陷常駐的物件部分之功能執行不同的檢視。 另外’如本發明較佳具„施例,該第二階段包本 2選缺陷常駐的物件部分之功能之緊要程度執行不同的檢 者二==本發明較佳具體實施例所提供,具有使用 者了疋象分析功能之模組化影像處理系統,盘奸 备結合使用;該系統包含一影像處理引擎,由該掃描哭: ^將要分析之至少―影像資料串流,以及包含—引擎建構 咨作爲接收將要由影像處理引擎在影像資料上執行的 〇、一使用者可定製的影像分析功能之一序列 =像處理引擎運作爲依據饋送至該引擎建構器的序収 我各定義分析至少一通道影像資科,包含執行不同的 影像,析功能,依據由該序列定義到達該引擎建構器之現 灯足我,不僅有關參數相互不同。 亦且’如本發明較佳具體實施例所提供自動光學檢視物 少ΓΓ法’包含在第一檢視步骤中,定義用於影像處理之 夕數1興趣區域’該感興趣區域包含由使用者定義之至少 一感興趣區域以及由*學式檢視物品而自動定義之至少一 感興趣區域,並提供至與圍繞各感興趣區域之領域相關連 的影像資訊;而在第-拾闷卓 之資訊以決定物品缺 自動處理感興趣區域 另外,如本發明較佳具體實施例 域的影像小於物件之影像。 另外,如本發明較佳具體實施例 圍繞感興趣區域之領 由光學式檢視物品而Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. The function of the resident part of the candidate defect performs different inspections. In addition, 'if the present invention preferably has an embodiment, the second stage includes the selection of the function of the resident part of the defect and the degree of urgency to perform different inspections. Two == Provided by the preferred embodiment of the present invention, it has the use of A modular image processing system with artifact analysis functions is used in combination with disk preparation; the system includes an image processing engine, which scans and cries: ^ at least-image data stream to be analyzed, and contains-engine construction consulting As a receiver, one of the user-customizable image analysis functions is to be executed on the image data by the image processing engine. Sequence = The image processing engine operates as a sequence of feeds fed to the engine builder. I define and analyze at least one. The channel image resource section includes the execution of different image and analysis functions, and it is sufficient to reach the engine builder based on the sequence definition, not only the relevant parameters are different from each other. It is also 'as provided by the preferred embodiment of the present invention. The optical inspector method ΓΓ is included in the first inspection step and defines the number of regions of interest used for image processing. The region of interest includes The user-defined at least one region of interest and the at least one region of interest that are automatically defined by viewing the object in a scientific manner, and provided to the image information associated with the area surrounding each region of interest; The information is used to determine the lack of the object automatically processing the region of interest. In addition, if the image of the preferred embodiment of the present invention is smaller than the image of the object. In addition, if the preferred embodiment of the present invention surrounds the region of interest, the object is viewed optically. and

本紙張尺㈣財_ tm (CNS)A4 (2I0 x 297公釐) Μ 7 Μ--------訂----- {請先閱讀背面之注意事項再頁}This paper rule size_ tm (CNS) A4 (2I0 x 297mm) Μ 7 Μ -------- Order ----- {Please read the precautions on the back before you page}

ϋ I n I ^---- 484104 A7 B7 、發明說明(8 自動定義之感興趣區域,包含在物件上的圖形形成之候選 缺陷。 ---「17-------裝—— (請先閱讀背面之注意事項再9本頁) :外’如本發明較佳具體實施例,由光學式檢視物品而 自動疋義之感興趣區域’包含在物件上的圖形形成之預定 型態特徵。 亦且,如本發明較佳具體實施例,該提供步驟包含提供 感興趣區域有關邊界的剖析資訊至影像處理器。較佳地是 ,咸提供步驟額外包含提供感興趣區域之彩色影像至該影 像處理器。 ~ ~ 另外如本發明較佳具體貫施例,該自動處理步驟包含 應用至少一影像處理方法至由使用者定義之感興趣區域, v亥方法與應用至由光學式檢視物品而自動定義之感興趣區 域的影像處理方法不同。 •線- 亦且如本發明較佳具體貫施例,該提供步驟包含識別 感興趣區域中之缺陷類型,以及該自動處理步驟包含應用 適合於在該感興趣區域中之缺陷類型的影像處理方法。 另外,如本發明較佳具體實施例,該提供步驟包含識別 感興趣區域中之型怨特徵類型,以及該自動處理步驟包含 經濟部智慧財產局員工消費合作社印製 應用適合於在該感興趣區域中之型態特徵類型的影像處^ 方法。 亦且,如本發明較佳具體實施例,由使用者定義之至少 一感興趣區域,在軟體定義步驟中光學式檢視該物件之前 足我’由光學式檢視物品而自動定義之至少一感興趣區域 在硬體檢視步驟中執行,而該感興趣區域之各影像的自動 -11 A7 五、發明說明(g ) 處理在軟體影像處理步驟中執行。 另外,如本發明較佳且减 敎佳具姐貫施例提供用於檢視球形栅陣 列基板的方法,該六、、表4人 ,、u 4万去包含產生該球形柵陣列基板的參考 〜像I至少-特徵的模式,以及儲存該模式至記憶體中、 獲取該球形柵陣列基板的影像,以及檢視該球形柵陣列基 板的影像預定區域以本令& 、 我以夬疋该預足區域特徵是否適合於該模 式。 另外,如本發明較佳具體實施例,該特徵包括一圓。 、另外,如本發明較佳具體實施例,該圓之模式包含在預 疋位置的中心點和預定容限内的半徑。 另外如本發明幸父佳具體實施例,該模式之參數在檢視 之前至少可部分以離線模式調整。 亦且’如本發明較佳具體實施例,該特徵包含_焊墊。 圖式之簡單説明 本發明將由下列詳細説明結合附圖而加以瞭解以及認知 ,其中: 圖1A爲影像處理系統的簡化方塊圖,該圖如本發明之一 較佳具體實施例建構和運作; 圖1B爲影像處理系統的簡化方塊圖,該圖發明之另一較 佳具體貫施例建構和運作; 圖2爲圖1之裝置的簡化功能方塊圖,該裝置於使用者 選擇方案爲’’設計規則”模式; 圖3爲圖2之單元2 1 0較佳製作的簡化功能方塊圖; 圖4爲圖1之裝置的簡化功能方塊圖,該裝置於使用者 -12- $紙張尺度細中關家標準(CNS)A4規格(21(3x 297公ίΠ " —m ^ 裝--- C請先閱讀背面之注意事項再本頁) .- 線_ 經濟部智慧財產局員工消費合作社印製 484104 A7 五、發明說明(10 ) 選擇方案爲”學習”模式; 圖5爲圖4 ’’混合學習”單元之其中單一單元較佳製作的 簡化功能方塊圖; 圖6爲圖5中之3方塊之其中單一方塊較佳製作的簡化 功能方塊圖; 圖7A-7B,一起採取,形成説明提供於學習方案課程之 各視窗類型的較佳測試功能表; 圖8爲由圖5之工作多重截割管理者在學習方案課程典 型執行之較佳功能表; 圖9爲知描方案之執行圖’由此可爲,,iearn ref c〇nfig,,; 圖10爲掃描方案之執行圖,由此訂爲 "learned.ref.eg.confign ; 圖11爲掃描方案之執行圖,由此訂爲 inspect.mixed.config"; 圖12爲掃描方案之執行圖,由此訂爲 M inspect.mixed.egmain.con fig'1 ; 圖13爲掃描方案之執行圖,由此訂爲 丨丨 inspect, mixed .egside .config 丨丨; 圖 14 爲掃描方案之執行圖,由此訂爲 "inspect.mixed.eg.config" i 圖15A-15C,一起採取,形成説明提供於檢視方案課程 之各視窗類型的較佳測試功能表·, 圖1 6爲由圖12之工作多重截割管理者在檢視方案課程 典型執行之較佳功能表; -13 本紙張尺度適用中國國家標準(CNS)A4規格(210 x 297公釐) . It -裝--- (請先閱讀背面之注意事項再本頁) · ί線. 經濟部智慧財產局員工消費合作社印製 484104 A7ϋ I n I ^ ---- 484104 A7 B7 、 Explanation of the invention (8 The area of interest that is automatically defined includes candidate defects for the formation of graphics on objects. --- "17 ------- install- (Please read the notes on the back first and then this page): Outer 'As the preferred embodiment of the present invention, the area of interest is automatically defined by optically inspecting the object' contains the predetermined pattern features formed by the graphics on the object Also, as in the preferred embodiment of the present invention, the providing step includes providing analysis information about the boundary of the region of interest to the image processor. Preferably, the providing step additionally includes providing a color image of the region of interest to the image processor. Image processor. In addition, according to a preferred embodiment of the present invention, the automatic processing step includes applying at least one image processing method to an area of interest defined by a user, the vhai method, and application to optically inspecting an object. The image processing method of the region of interest that is automatically defined is different. • Line-Also as the preferred embodiment of the present invention, the providing step includes identifying the type of defect in the region of interest, and the automatic The processing step includes applying an image processing method suitable for the type of defect in the region of interest. In addition, according to a preferred embodiment of the present invention, the providing step includes identifying a type of complaint feature type in the region of interest, and the automatic processing The steps include the method of printing and applying an image processing method suitable for the type feature type in the region of interest by the Intellectual Property Bureau employee consumer cooperative of the Ministry of Economic Affairs. Also, as in the preferred embodiment of the present invention, at least a user-defined at least A region of interest, at least one region of interest that is automatically defined by optically viewing the object before the optical inspection of the object in the software definition step is performed in the hardware inspection step, and the images of the region of interest are Automatic-11 A7 V. Description of the Invention (g) Processing is performed in the software image processing step. In addition, if the present invention is better and better, the present invention provides a method for inspecting a ball grid array substrate. , Table 4, and u 40,000 to include the reference to generate the spherical grid array substrate ~ the pattern of at least-features, and to store the pattern To the memory, obtain the image of the ball grid array substrate, and view the predetermined area of the image of the ball grid array substrate with the order & I wonder whether the characteristics of the pre-footed area are suitable for this mode. In addition, as this In a preferred embodiment of the invention, the feature includes a circle. In addition, as in a preferred embodiment of the invention, the mode of the circle includes the center point of the pre-position and the radius within a predetermined tolerance. In the preferred embodiment, the parameters of this mode can be adjusted at least partially in offline mode before viewing. Also, 'as in the preferred embodiment of the present invention, this feature includes _ pads. Brief description of the drawing The present invention will be explained in detail by the following It is understood and recognized with reference to the accompanying drawings, in which: FIG. 1A is a simplified block diagram of an image processing system, which is constructed and operated as a preferred embodiment of the present invention; FIG. 1B is a simplified block diagram of an image processing system. FIG. 2 shows the construction and operation of another preferred embodiment of the invention; FIG. 2 is a simplified functional block diagram of the device of FIG. "Design rules" mode; Figure 3 is a simplified functional block diagram of the unit 2 1 0 of Figure 2; Figure 4 is a simplified functional block diagram of the device of Figure 1, which is used by the user at -12- $ paper scale Detailed Zhongguanjia Standard (CNS) A4 specification (21 (3x 297 public ίΠ " --m ^ equipment --- C, please read the precautions on the back before this page).-Line _ Employee Consumer Cooperatives, Intellectual Property Bureau, Ministry of Economic Affairs Print 484104 A7 V. Description of the invention (10) The selection scheme is the "learning" mode; Figure 5 is a simplified functional block diagram of a single unit of the "mixed learning" unit in Figure 4; Figure 6 is a block diagram of Figure 5 A simplified functional block diagram of a single block that is better made of the three blocks; Figures 7A-7B, taken together to form a better test function table that explains the types of windows provided in the study plan course; Figure 8 is a multi-tasking task from Figure 5 The best function table for the typical implementation of the cut-off manager in the learning plan course; Figure 9 is the implementation diagram of the knowledge plan, which can be, iearn ref c0nfig ,; Figure 10 is the execution plan of the scanning plan, from This is "learned.ref.eg.confign; Figure 11 The execution diagram of the scanning scheme is set to inspect.mixed.config "; Figure 12 is the execution diagram of the scanning scheme, which is set to M inspect.mixed.egmain.con fig'1; Figure 13 is the execution diagram of the scanning scheme Therefore, it is set to 丨 丨 inspect, mixed .egside.config 丨 丨; Figure 14 is the execution diagram of the scanning scheme, which is set to " inspect.mixed.eg.config " i Figure 15A-15C, taken together to form Explains the better test function table for each window type provided in the view plan course. Figure 16 is the best function list typically performed by the multi-cut manager of the work shown in Figure 12 in the view plan course; -13 This paper standard applies China National Standard (CNS) A4 Specification (210 x 297 mm). It-Packing --- (Please read the precautions on the back before this page) · Line. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 484104 A7

圖17爲報告元件之較佳資料結構圖,可以由尚在審理中 的以色列專利申靖安安, 中 甲%衣木唬為弟13 1092號之硬體影像分析 糸、,·充接收, 圖1 8爲圖1 7之標頭的較佳資料結構; 圖19爲圖i之影像處理作業系統sip之簡化執行圖 子; ☆圖20為簡化執行圖的另_例子,與圖19不同的是調適 馬適合由包括至少2同步平行處理器之電腦聯盟執行; 圖21A包含一 CEL之像素的觀念解釋; 圖21B-21D爲介於特徵和肌以及向量化線元素產生之 分析式表示之間關係的觀念解釋; 圖22A-22H爲較佳地使用於定義包含在單一記錄之邊 類型的邊緣碼之解釋; 圖23A-23H爲描繪邊緣碼値分別爲〇至9以及之格 方位的解釋; ° 圖ui爲由下列參數定義之CEL的解釋:edgec〇de=〇, first=14,last = 〇 ; 圖24爲圍繞CEL之包絡資料結構的圖像解釋; 圖25爲分別包封二連續線段之包絡的圖像解釋; 圖26爲在如本發明較佳具體實施例檢視面板上收集的 相等訊框之聚集的簡化圖像解釋; 圖27爲可能存在於視窗中之資料例子的圖像解釋; 圖28A-28B分別爲平行和非平行線之線寬量測較佳形式 的圖像解釋; -------^--------裝--- 鎗 (請先閱讀背面之注意事項再本頁) —線- 經濟部智慧財產局員工消費合作社印製 -14 - 484104 A7 B7 五、發明說明(12 ) 圖29爲介於線上和參考座垆$ 、 π ^ 压铋系統足間轉換的圖像解釋; 圖30Α爲具有包絡之向量化客、息 ― , !化夕邊形參考的圖像解釋,各 G絡與邊緣外圍以及許可之邊緣差異定限相互關連· 圖30Β爲重疊在圖取之多邊形參考上的線上Cm的圖 像解釋,具有介於線上和朱考资蚪 , 爹芩貝枓之間的芫美註册,而顯 示缺陷;Figure 17 is a better data structure diagram of the report component. It can be analyzed by the Israeli patent Shen Jing'an which is still under trial, and the hardware of the China A% Yimu Bluff as the younger brother 13 1092. Figure 1 8 is a better data structure of the header of FIG. 17; FIG. 19 is a simplified execution diagram of the image processing operating system sip of FIG. I; ☆ FIG. 20 is another example of the simplified execution diagram, which is different from FIG. 19 and is adapted Horses are suitable for execution by a computer consortium that includes at least two simultaneous parallel processors; Figure 21A contains a conceptual explanation of a CEL pixel; Figures 21B-21D are relationships between features and analytical expressions generated by muscle and vectorized line elements Explanation of concepts; Figures 22A-22H are explanations that are preferably used to define edge codes that are included in a single record's edge type; Figures 23A-23H are explanations that depict edge codes 为 0 to 9 and grid orientation respectively; ° Figures ui is the interpretation of CEL defined by the following parameters: edgec〇de = 〇, first = 14, last = 〇; Figure 24 is an image interpretation of the envelope data structure surrounding CEL; Figure 25 is an envelope that encloses two consecutive line segments respectively Image interpretation; Figure 26 is in Simplified image interpretation of aggregates of equal frames collected on the viewing panel of a preferred embodiment of the present invention; Figure 27 is an image interpretation of an example of data that may exist in a window; Figures 28A-28B are parallel and non-parallel, respectively The best form of image interpretation for line width measurement; ------- ^ -------- install --- gun (please read the precautions on the back before this page) —line- Printed by the Employees' Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs -14-484104 A7 B7 V. Description of the invention (12) Figure 29 is an image explanation of the foot-to-foot conversion of the bismuth pressure system between the online and reference seats; For the image interpretation of the vectorized object with the envelope, and the reference to the edge shape, each G frame is related to the periphery of the edge and the allowed margin difference limit. Figure 30B is a polygon reference superimposed on the figure. The image interpretation of Cm online has Amami registration between online and Zhu Kaozi, Daddy Beibei, and it shows defects;

圖30C爲重疊在圖30A之多邊形來去μ L 〜^您^參考上的線上cel的圖 像解釋’具有介於線上和參考資料> 、, 一 ,3只才十 < 間的冤吴註册,而顯 不顯像的缺陷爲假警報以及顯示其他缺陷; 圖31爲適合於在檢視視窗中微暫存參考影像以及線上 影像的較佳方法之流程圖; 訂 圖32A馬不在具有多邊形(聚合線)參考之微註册中的 CEL聚集之簡化圖像解釋; 圖32B爲依據如圖3 1之較佳方法的微註册之後以其參考 註册之CEL聚集的圖像解釋; 線 圖33爲一流程圖,顯示如本發明另一具體實施例建構以 及運作之影像處理系統的功能;以及 圖34-42爲由一般使用者介面產生之螢幕系統,用以由 如本發明之一具體實施例建構以及運作之影像處理系統定 義影像之檢視參數。 圖式之詳細説明 概要 在下列規範中,雖然爲了解釋本發明的目的,參考文獻 延伸至球狀柵陣列基板(BGA),容易認知地是本發明可應 -15- A7 B7 五、發明說明(13) 用於任何合適的圖型化物件。因此,該項目BGA如由下、 ::用,不只是單獨地限於球狀栅降列基板,而是考4 f範以及視爲參考爲包含任何合適形式的圖型化物件= p =路板基板、分層印刷電路板、導絲、平 R併合晶片封裝基板、帶狀自動焊整基板以及任何合適:; =㈣和例如可以使用 刻板金屬基板。 予I入的 ^附圖非另外指示,方形代表功能單元而圓形方 塊代表由功能單元處理之資料。 :在參考圖1A,該圖爲影像處理系統的簡化方塊圖,如 么明之一較佳具體實施例建構和運作。 、在此具體實施例中,掃描器2較佳地以光學式掃描物件* 以及產生- RGB(紅、綠、藍色)二維影像來表示物件4, 並=輸RGB影像資訊至影像處理器5。較佳地爲提供感興 趣立間領域識別器6,而影像處理器$、感興趣空間 識別器6以及線寬與㈣處理器3輸出額外之檢視觸發以 及其他倾至位於下游之SIp單元7,該單元執行不由影 =理备5提供(額外檢視功能,較佳地是檢視功能爲動 爲適應檢視觸發輸入,以致各種不同類型檢視觸 發“成與該觸發有觀之區域以最適合於檢視該觸發區域之 檢視常式加以檢視。 掃描器2較佳爲影像照明與獲取系统,如申請人並行申 ?.J t It t -Illumination for Inspecting Surfaces of hUc丨es”所説明。雖然掃描器2較佳運作爲獲取rgb光 (請先閱讀背面之注意‘ --裝 _事項再 本頁) M濟部智慧財產局員工消費合作社印制衣 ^---------^------------------------ -16- 五、發明說明(14) 影像,容易認知爲該掃描器可以運 ,例如單色灰階影像、以H 又』形式影像 之電場相關連之影像,兮帝:貝如園繞印刷電路板 踗相Μ姓、 Μ私麥疋饯與該印刷電路板上之雷 路相關的特疋電氣性質。所認知地爲本發明可和任;in 的光學或是非光學影像之影像處理相關連。 ^適 實施例’影像處理器5較佳地運作爲接收 〜像貝“科、剖析影像資訊資科爲 據存疑缺陷之偵測和下游浐一 ’、象貝科以及依 MB 2 早70巾其錄視之預定特徵 才疋供觸發。影像處理器5較 下列模組: ^餘組處理單S,包括 ⑴二進制CEL識別器8模組。二 件4邊界區域之間的邊 =制弧馬表不介於物 家遭界〈外圍元件,其中高梯度位 t 巴像較喑與較亮區域之間。二 :制⑽在下文視爲”CEL,,或是,,二進制cel.,。二進-識別器8由掃描器2接收 从u^ 收以及處理影像資料並輸出存在於 物件4足衫像的二進制CEL報告。 (Π)彩色CEL識別器1〇 〇私έ r /色CEL表示介於邊界區域物 二形中不同色彩群體之間的邊緣外圍。色彩 群組爲貫貝上同色彩之區域, 彩色c E L相料由許M自定^較佳地與材料相關連。 ”疋色右群體之間選擇的色彩群 而產生,識別何種色彩群體存在於該邊緣之各側 : 識=㈣佳爲處理由掃描器2接收之影像資料以識別在 該像資料中的不同色彩群體,相關連已知在該物件中的 484104 A7 B7 五 發明說明(15 ) 材料之色彩群體,以及輪+ 輸出存在於物件4之影像的彩色CEl 報:,以^義不同材料以及介於區域之間的邊界。 預=二恐特被識別器11。型態特徵爲可在圖形中識別之 預疋特欲。型態特薇丨# H我別4 較佳地運作爲由該掃描器2 接收-ίίΓ 至少—輸人、由二進制CEL識別器8 接收一進制CEL資訊以乃士〜令 ^貝Λ以及由衫色CEL識別器10接收彩色 特徵報i 特破識別器U處理這些輸人以及輸出型態 =報告’在下游檢视單元中觸發更進一步之檢視。較佳 少一些型態特徵與物件4中的材料相關。在驗 “見的本文中’型態特徵例如包含:導體塾片、開端、短 路、接合以及其他類似特徵。 訂 線 ^^陷識別器13。缺陷爲在圖形中可識別之預定類型 :日。缺陷識別器13運作爲由掃描器2、二進制CEL 識=器8以及彩色啦識別器1G產生之影像資料㈣至少 ,疒缺陷識別器13處理這些輸入以及輸出存疑缺陷報 游檢視單元中觸發額外檢視。較佳地是,由缺陷 =:U報告之存疑缺陷爲參考一組預定設計規則識別 = 不用將該輸入資料與參考做比較。在BGA檢 、又中K缺陷例如包括:定義導體外圍之不平, 平之預定參數、氧化、低對比彩色表面缺陷如化 子I餘物以及咼對比表面缺陷如刮痕。 (v)可選快動產生器14。當呈現時,快動產生器μ較佳 地運作爲回應由型態特徵識別器U以及缺陷識別哭13接 收_和缺陷觸發,以產生在該影像中選擇領域:快照 L_________ -18- 本紙張尺度適用中準(CNS)A4規格咖χ 297公^ 484104 A7 B7 五、發明說明(16 ) 影像。快照影像爲由該掃描器2接收之影像的部份,較佳 地產生爲圍繞由型態特徵識別器u以及缺陷識別器㈣ 收之各觸發的,感興趣視窗,。另外,快動產生器μ可以依 據由感興趣空間領域識別器6接收之觸發產生感興趣空間 領域 < 快動影像,在下文更詳細地説明。 訂 較佳地是,由快動產生器14輸出之快動影像的形狀和大 小爲動態地依據特定類型的感興趣區域回應觸發而結構。 快動產生器14較佳地運作爲輸出影像資料,容易轉換爲下 游處理之動態影像。適合使用爲影像處理器6之影像處理 器的硬體製作在申請人尚在審理中的專利申請案號爲第^ 13i092號之專利案中説明。容易認知爲上述説明圍繞存在 於影像處理器6中的影像處理功能組成。然而,影像處理 器之功能事實上可以分類爲模组,例如二進制處理、色彩 處理以及型態處理,發出如上文説明分類之功能報告。 線 濟 部 智 慧 財 產 局 員 工 消 費 合 作 社 印 製 報告可以依據硬體架構分類爲各種報告通道。因此,在 本發明具體實施例中’影像處理器5產生以二通道提 供至SIP 7之報告’其中各報告通道包括許多報告。較佳地 是’第:通,道,指定爲"快動通道”包括與由該缺陷識別器 1 3產生(彩色表面缺陷相關之缺陷資料之報告,以及包括 由該快動產生器14產生之感興趣區域快動影像之報主。第 二通道,Μ爲”CEL"通道,較佳地包括由該二進制 識別器8產生之二進制CEL報告以及稱爲缺陷報告以報土 由彩色CEL識別器1G產生之彩色CEL、由型態特徵制 姦11產生(型態特徵以及亦由缺陷識別器丨3產生之該二 -丨σ - 本紙張尺度適用中國國家標準(CNS)A4規格石1〇 X 297公 19FIG. 30C is an image explanation of the line cel superimposed on the polygon of FIG. 30A. Μ ^^^^^ Refer to the image explanation of the line cel with 'between the line and the reference material>, 1, 3, and 10 only. The defects that are not displayed are false alarms and other defects. Figure 31 is a flowchart of a better method suitable for micro-temporary storage of reference images and online images in the viewing window. Line) Simplified image interpretation of CEL aggregation in the referenced micro-registration; Figure 32B is an image interpretation of the CEL aggregated by its reference registration after micro-registration according to the preferred method of Fig. 31; line diagram 33 is a process Figures show the functions of an image processing system constructed and operated as another specific embodiment of the present invention; and Figures 34-42 are screen systems generated by a general user interface for building and constructed by a specific embodiment of the present invention and The operating image processing system defines the viewing parameters of the image. Detailed description of the drawings In the following specifications, although for the purpose of explaining the present invention, references are extended to the ball grid array substrate (BGA), it is easy to recognize that the present invention can be applied -15- A7 B7 V. Description of the invention ( 13) For any suitable graphical object. Therefore, the BGA of this project is not limited to the ball grid descending substrate alone, but is considered as a reference to include any suitable form of patterned objects = p = road board. Substrates, layered printed circuit boards, guidewires, flat R-bonded chip package substrates, tape-shaped auto-welding substrates, and any suitable: = ㈣ and, for example, a rigid metal substrate can be used. The figures shown in the figure are not otherwise indicated. The squares represent functional units and the circular squares represent data processed by the functional units. : Referring to FIG. 1A, this figure is a simplified block diagram of an image processing system, such as the construction and operation of one of the preferred embodiments. In this specific embodiment, the scanner 2 preferably represents the object 4 by optically scanning the object * and generating an RGB (red, green, blue) two-dimensional image, and outputs RGB image information to the image processor 5. It is preferable to provide a domain identifier of interest 6 and the image processor $, the space of interest identifier 6 and the line width and frame processor 3 output additional viewing triggers and other SIp units 7 located downstream, The execution of this unit is not provided by Shadow = Provision 5 (extra viewing function, preferably the viewing function is adapted to the viewing trigger input, so that various types of viewing triggers "are the areas that are relevant to the trigger to be most suitable for viewing the The inspection routine of the trigger area is used for inspection. Scanner 2 is preferably an image illumination and acquisition system, as explained by the applicant in parallel. J t It t -Illumination for Inspecting Surfaces of hUc 丨 es ". Although Scanner 2 is more Best operation is to get rgb light (please read the note on the back first-installation _ matters and then this page) M Ministry of Economic Affairs Bureau Intellectual Property Bureau employee clothing cooperatives printed clothing ^ --------- ^ ---- -------------------- -16- V. Description of the invention (14) It is easy to recognize that the scanner can operate, such as monochrome grayscale images, H The image related to the electric field of the form image, Xi Emperor: Bei Ruyuan wrapped around the printed circuit board The special electrical properties related to the surname and private property of the printed circuit board are related to the thunder path on the printed circuit board. It is recognized that the present invention can be related to the image processing of optical or non-optical images. Embodiment 'The image processor 5 is preferably operated to receive ~ Like', "analyze image information resources to detect and detect suspected defects and downstream downstream '," Like "and its video recording according to MB 2 as early as 70 The predetermined features are only available for triggering. The image processor 5 is compared with the following modules: ^ The remaining sets of processing orders S, including the ⑴ binary CEL recognizer 8 module. The edge between the two 4 boundary areas = the arc horse is not introduced The boundary of Yu Wujia (peripheral components, where the high gradient bit t bar image is between the darker and brighter areas. Two: the system is hereinafter referred to as "CEL, or ,, binary cel.,. Binary-recognition The scanner 8 receives and processes the image data from the scanner 2 and outputs a binary CEL report that exists in the image of the four-shirt image of the object. (Π) The color CEL identifier 100 〇 r / color CEL indicates that it is in the boundary area The periphery of the edges between different color groups in the object shape. The color groups are the same The color area, the color c EL material, is customized by Xu M and is better related to the material. ”The color group selected between the right color group, identifies which color group exists on each side of the edge: Recognition = ㈣Jia is to process the image data received by the scanner 2 to identify different color groups in the image data, related to 484104 A7 B7 known in the object (5) Description of the color group of the material, and Wheel + Output the color CEl report of the image existing in Object 4: to define different materials and the boundary between the regions. Pre = two terrorists were identified by the 11. The type feature is a premonition that can be identified in a figure. The type special Wei ## 我 我 别 4 preferably works as received by the scanner 2-at least-input, the binary CEL recognizer 8 receives the primary CEL information from Yers ~ Ling ^ Λ and by The shirt color CEL recognizer 10 receives the color feature report i. The special break identifier U processes these inputs and the output type = report 'triggers a further review in the downstream review unit. It is preferred that fewer form features be related to the material in the object 4. In the text of this article, "type features include, for example, conductor stubs, openings, shorts, joints, and other similar features. Alignment ^^ Detector 13. The defect is a predetermined type that can be identified in the graphic: day. The defect identifier 13 operates as image data generated by the scanner 2, the binary CEL identifier 8 and the color identifier 1G. At the very least, the defect identifier 13 processes these inputs and outputs suspected defects to trigger additional inspections in the tour inspection unit. . Preferably, the defect is identified by the defect =: U reported as a reference to a set of predetermined design rules = the input data is not compared with the reference. In the BGA inspection, the K defect includes, for example, the definition of unevenness on the periphery of the conductor. The predetermined parameters of flat, oxidation, low-contrast color surface defects, such as chemical residues of I, and tritium-contrast surface defects, such as scratches. (V) Snap action generator 14. When present, the snap action generator μ is preferred The ground operation is triggered in response to the reception by the pattern feature identifier U and the defect recognition cry 13 and the defect to generate the selected field in this image: snapshot L_________ -18- This paper is applicable in the standard (CNS) A4 size coffee 297 public ^ 484104 A7 B7 V. Description of the invention (16) image. The snapshot image is a part of the image received by the scanner 2 and is preferably generated around the type feature identifier u And the triggers received by the defect recognizer ,, the window of interest. In addition, the fast-moving generator μ can generate the space-of-interest area < fast-moving image according to the trigger received by the space-of-interest area recognizer 6 < Detailed description. It is preferred that the shape and size of the fast-moving image output by the fast-moving generator 14 is structured according to a specific type of region of interest in response to triggering. The fast-moving generator 14 preferably operates as The output image data is easy to be converted into downstream processed dynamic images. The hardware suitable for the image processor 6 as the image processor 6 is described in the applicant's pending patent application No. ^ 13i092 It is easy to recognize that the above description is composed of the image processing functions existing in the image processor 6. However, the functions of the image processor can actually be classified into modules, such as two Processing, color processing, and type processing, and issue functional reports classified as described above. The printed reports of the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs can be classified into various reporting channels based on the hardware architecture. Therefore, in the specific embodiment of the present invention "The image processor 5 generates reports provided to SIP 7 in two channels", where each report channel includes a number of reports. It is preferably "No .: channel, channel, designated as " fast-moving channel " Device 13 generates (a report of defect data related to color surface defects, and a reporter including a fast-moving image of a region of interest generated by the fast-moving generator 14. The second channel, M is a "CEL " channel, preferably Including the binary CEL report generated by the binary recognizer 8 and the color CEL generated by the color CEL recognizer 1G, called the defect report to report, and generated by the pattern feature 11 (type features and also by the defect recognizer 丨The two produced by 3-丨 σ-This paper size is applicable to China National Standard (CNS) A4 specification stone 10 × 297 male 19

進制缺陷,如刻痕和突起部。 . i 壯衣·-- (請先閱讀背面之注意事項再本頁) 口本發月之較佳具體實施例,感興趣空間領域識別器6 棱供馬疋我在一檢視物件中的反復感興趣空間領域。存在 :、物件4中的感興趣空間領域,纟中一特定類型特徵期待 主現,以及其中預先定義之常式修整爲典型執行之 型特徵。 我 、較佳地是,感興趣空間領域產生器6在缺陷檢視之前以 離線學習1式運#,在下文更詳細説明。在較佳且骨巧 ::中:該感興趣空間領域識別器6包括二模組:使 疋義 < 感興趣領域模組8以及電腦產生之感興趣領域模組 較佳地是,在學習模式中,在下文參考圖34_42經由一 般使用者介面更詳細説明,該介面爲使用者定義之感興趣 領域模組8的部分,一使用者定義檢視興趣之一般領域, 位於物件批次中將要檢視的物件4。較佳地是,該使用者 亦識別期待位於感興趣領域中的一類型結構。因此,在BQA 檢視的本文中,該使用者可以定義包括焊墊、目標、晶片 領域或是球狀的一般區域。 經濟部智慧財產局員工消費合作社印制私 在電腦產生之感興趣領域模組9中,一電腦處理器在另 具肢貫k例可以包括在SIP 7中的一邵份影像分析器2 4 ,•’學習η由使用者識別爲使用者在使用者定義之感興趣領 域模組8中定義之空間領域内感興趣結構之位置。電腦產 生之感興趣領域模組9較佳地產生規範緊密圍繞由該使用 者定義領域内各結構之局部化空間領域。因此,在BGA檢 -20- ^紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公爱) ---- 484104 A7 B7 五、發明說明(18 ) 經 濟 部 智 慧 財 產 局 員 工 消 費 合 社 印 製 視的本文中,假使該使用者定義包括焊塾的一般區 該電腦產生之感興趣領域模組定義在由使用者定丄 各焊墊的結構和位置,以及無論何時該焊塾期待定位^中 孩電腦產生之感興趣模組定義局部化感興趣領域。所^ 之圍繞使用者足義之領域各結構儲存在記憶體中,: 與該SIP 7(沒有顯示)有關,之後在檢視中存取。X 1 如本發明之-較佳具體實施例,SI”在下游之 理器5提供,以及運作爲由該影像處理器5接收影 , 並執行不由影像處理器5提供之常式。例如,Up?部二, 作以提供比較模式檢視,其中由正檢視物件4產生 資料與物件之參考資料比較。另外,SIp7部分運作以= 與依據由感興趣空間領域識別器6產生之儲存資訊相關二 預先足義規則動態調適檢視常式於影像處理器5在影 理期間偵測之特徵類型以及調適於影像處理器5在 〜 理期間偵測之缺陷類型。 較佳地是,SIP 7是以軟體爲基準的影像處理器,在 屬工作站如在linuxtm環境運行之微電腦工作站上執行 户定製的軟體影像處理常式,包括下列模組:⑴線寬和 册處理器模組3、(ii)工作縮整器和感興趣視窗產生器模 1 2以及(i i i)分析器模組1 5。 本發明之較佳具體貫施例,線寬和註册處理器模組 由一進制CEL識別器8接收二進制CE]L以及由型態特徵 別器11接收型態特徵資料,以及在下列模組中處理輸入資 讯·(1)5王册產生器模組18運作爲在轉換計算器20中執行 裝 專 客 註 識資 線 本紙張尺度適用(cns)a4規格⑽χ 297 21 484104 A7 B7 五、發明說明(19 ) ?主册轉換以症册在檢視下物里心 / 之〜像爲參考影像以及在 過剩/运漏计鼻器2 2中決定姑5、口 3 天疋特欲足王現與缺乏以決定所有 期待特徵是否呈現在检满下仏# 1 & 鈿視下物件4中;以及(ii)線寬計算器 16運作爲由轉換計算器2"妾收註册轉換資料以計算導體 之線寬以及驗證在各特別位置上之線寬爲在該位置的許可 範圍内,以及驗證介於導體之間的空間大於或是等於預定 之總體値。 ' ^ 軚,1王册產生器18和其相關轉換計算器2〇以及過剩/遺 漏計算器22之建構和運作在下文中更詳細説明。 如本發明之-較佳具體實施例,SIp 7之工作縮整器/感 興趣視窗產生器單元12較佳地由以下之各模組接收輸入 :二進制識別器8、彩色CEL識別器1()、型態特徵識別器 11、缺陷識別器13、轉換計算器2〇、過剩遺漏計算器22 以及線寬計算器16。另外,工作縮整器12接收由感興趣 玉間頃域識別器6在學習模式定義之感興趣空間領域並後 續儲存在記憶體中。 經 濟 部 智 慧 財 產 局 員 工 消 費 合 作 社 印 製 工作縮整器12運作爲產生圍繞各種檢視觸發之感興趣 視窗。檢視觸發較佳地爲由型態特徵識別器n接收之預定 類型特徵、由缺陷識別器13接收之預定類型缺陷以及由感 興趣空間領域識別器6識別之預定感興趣空間領域以及由 線寬和註册處理器3接收之預定線寬和過剩/遺漏缺陷,且 儲存在記憶體中。可選地是,各檢視觸發提供爲具有由圍 繞S觸發之快動產生器14產生之快動影像。較佳地是,兮 快動影像之形狀和大小爲依據預定規則動態地回應觸發類 22 本纸張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) Α7 經 濟 部 智 慧 財 產 局 員 工 消 費 合 作 社 印 製 五、發明說明(2〇 ) 型及/或位置。 對各檢視觸發而言,工作缩敕哭】9 、!语m、目 作知正备12較佳地產生包括動態 選擇心合適檢視工作之識別以回應接收的特 發以執行特別檢視工作,以及執行 視觸 執订所選擇工作所需要合適 的影像資訊資料。例如,纟BGA檢視的本文中, 興趣空間領域之签燁領域之封裝較佳地包括與二進制CE; D色CEL以及2間區域型態特徵日期$ m Μ 焊接領域檢視工作之識別。識別爲具有彩色表面缺陷之區 2的封裝較佳地包括彩色表面缺陷檢視工作之識別以及所 於響領域(快動影像,但是不具CEL資訊。識別爲具有刻 痕/、哭起部缺陷之區域的封裝較佳地包括合適刻痕/突起部 檢視万法之識別、所影響區域的二進制咖以及可選地 快動影像。 工作縮整器12典型地傳輸動態處理組件,包括影像和方 法資訊’以大箭頭表示至分析器單元15。動態資訊較佳地 =只依據工作縮整器12接收之缺陷、特徵和感興趣資訊動 態地傳輸影像之特定定義領域之分析器15。此,,預處理"明 顯地,低由分析器單元15所分析的影像資料量,並因此降 低計算負載,而大大地減少影像分析該物件相關之檢 間成本。 一 ^本發明之一具體實施例,該分析器單元Η較佳地包括 單元·一影像分析器模組24以及一後處理器模組26。 〜像分析器模組24較佳地運作爲接收該動態處理組件 以及藉由利用工作縮整器12所識別之方法分析在此包含 (CNS)A4 規格⑽ -23- X 297 ) (請先閱讀背面之注意事項再0本頁) ’丨裝 -\^τ. .線. 五、發明說明(21 ) ===,由工作縮整器12所識別以及由影像分 姑:A、視万法馬比較爲基準之檢視工作,其中園 、.=:見:發之影像中的區域被分析以及與參考影 。比較較佳地依據正被檢視之物件4之影像中的CEL斑且 有存疑缺陷之觸發區域相關之區域的參考影像之比較。、 孩後處理器26較佳地運作爲製作圖”之缺陷過遽器, 在下文説明。亦爲較佳地是運作爲參考由影像分析器⑷夫 足之區域的刮痕分析快照影像以包括預定類型之缺陷,其 中該存疑缺陷具有高度機率爲假缺陷。 、 SIP 7實貝上如由此説明加以作用,以及較佳地依據由感 ,、趣視自產生斋所提供之感興趣視窗提供缺陷之輸出報告 30以及物件特徵。 " 經濟部智慧財產局員工消費合作社印製 現在參考圖1B,該圖爲BGA(球狀栅陣列)基板檢視系統 的簡化功能方塊圖視,如本發明之另一較佳具體實施例建 構和運作。圖1B之該BGA檢視系統類似於參考圖丨A説明 之較佳具體實施例,然而,圖1B顯示之該BGA檢視系統 明顯地不同,顯示由3感應器或是照相機產生之輸入爲掃 描器34(相當於圖1A之掃描器2)之部分,以及不包含快動 產生器1 4。所認知地是,Bga檢視之檢視系統的參考爲 解釋目的’且任何合適的物件可以被檢視。 32 面 典 認 如所示’圖1B顯示之該檢視系統包括使用者工作站 ’掃描器34典型地產生RGB影像或是將被檢視之既定 板36之其他數爲影像以及HIP(硬體影像處理)單元38, 型地包括處理由該掃描器34產生之影像的專屬硬體。所 -24 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) A7 B7 五、 發明說明(22 ) 經濟部智慧財產局員工消費合作社印製Defects such as scores and protrusions. i Zhuangyi --- (Please read the notes on the back first, then this page) The preferred embodiment of this month, the 6-edge identifier of the space area of interest is for the stable. I repeat the sense in a viewing object. Areas of interest. Existence: The space area of interest in Object 4, a particular type of feature is expected to emerge, and the pre-defined routine trimming is a typical execution type feature. I, preferably, the space-of-interest generator 6 learns 1-style operation offline before defect inspection, which is explained in more detail below. In the better and cleverer :: medium: the space-of-interest area identifier 6 includes two modules: make sense < field-of-interest module 8 and computer-generated field-of-interest module preferably, during learning In the mode, the following is explained in more detail through a general user interface with reference to FIGS. 34_42, which is a part of the user-defined interest area module 8. A general area of user-defined view interest is located in the object batch to be viewed. Of objects 4. Preferably, the user also identifies a type of structure that is expected to be located in the area of interest. Therefore, in this article reviewed by BQA, the user can define general areas including pads, targets, wafer areas, or spheres. In the Intellectual Property Bureau Employee Consumer Cooperative of the Ministry of Economic Affairs, private computer-generated modules of areas of interest 9 are printed. A computer processor can be included in the SIP 7 image analyzer 2 4. • 'Learning η is identified by the user as the location of the structure of interest within the spatial domain defined by the user in the user-defined interest domain module 8. The computer-generated domain of interest module 9 preferably produces a specification that closely surrounds the localized space domain of each structure within the domain defined by the user. Therefore, in the BGA inspection -20- ^ paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 public love) ---- 484104 A7 B7 V. Description of the invention (18) Employees ’Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs In the printed text, if the user defines the general area including the welding pad, the computer-generated area of interest module is defined by the user to define the structure and position of each pad, and whenever the welding pad is expected to be positioned ^ Interesting modules generated by Zhongyu Computer define localized areas of interest. All the structures surrounding the user's foothold are stored in the memory, which are related to the SIP 7 (not shown), and then accessed in the view. X 1 is a preferred embodiment of the present invention, and SI ”is provided by the downstream processor 5 and operates to receive a video by the image processor 5 and execute a routine not provided by the image processor 5. For example, Up • Part two, to provide a comparison mode view, in which the data generated by the object 4 being viewed is compared with the reference data of the object. In addition, the SIp7 part operates to be related to the stored information generated by the space-of-interest domain identifier 6 based on the two prior The definition of the rules is based on the dynamic adjustment of the inspection routines for the types of features detected by the image processor 5 during the imaging process and the types of defects detected by the image processor 5 during the imaging process. Preferably, SIP 7 is based on software. The benchmark image processor executes a custom software image processing routine on a workstation such as a microcomputer workstation running in a linuxtm environment, including the following modules: ⑴ line width and processor module 3, (ii) work shrink Integrator and interested window generator module 12 and (iii) analyzer module 15. In the preferred embodiment of the present invention, the line width and registration processor module are received by a binary CEL identifier 8 CE] L and the type feature data received by the type feature detector 11 and processing of input information in the following modules: (1) The 5 book generator module 18 operates to execute the installation in the conversion calculator 20 Special guest note: The paper size is applicable (cns) a4 specifications ⑽χ 297 21 484104 A7 B7 V. Description of the invention (19)? The conversion of the main book is based on the patient's book in the examination of the heart / image ~ reference image and in the The excess / leakage count in the nose device 2 2 determines the presence and absence of the 5th and 3rd days to determine whether all the expected characteristics are present in the inspection man # 1 & contempt object 4; and ( ii) The line width calculator 16 is operated by the conversion calculator 2 to receive registration conversion data to calculate the line width of the conductor and verify that the line width at each particular location is within the allowable range of that location, and verify that it is between the conductors The space between them is greater than or equal to the predetermined total 値. ^ 軚, the construction and operation of 1 booklet generator 18 and its related conversion calculator 20 and surplus / missing calculator 22 are explained in more detail below. Invention-the preferred embodiment, the work of SIp 7 The reducer / window of interest generator unit 12 preferably receives inputs from the following modules: binary identifier 8, color CEL identifier 1 (), pattern feature identifier 11, defect identifier 13, conversion calculation Device 20, excess omission calculator 22, and line width calculator 16. In addition, the work reducer 12 receives the space area of interest defined by the interested jade field recognizer 6 in the learning mode and then stores it in the memory. . The Consumer Property Cooperative Print Job Reducer 12 of the Intellectual Property Bureau of the Ministry of Economics operates to generate interesting windows that trigger around various views. The view trigger is preferably a predetermined type of feature received by the pattern feature recognizer n, a predetermined type of defect received by the defect recognizer 13 and a predetermined space of interest area identified by the space of interest area identifier 6 and a line width and The predetermined line width and excess / missing defects received by the registration processor 3 are stored in the memory. Optionally, each view trigger is provided as a snap motion image generated by a snap motion generator 14 triggered around S. Preferably, the shape and size of the fast-moving image are dynamically responded to the trigger type according to a predetermined rule. 22 This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm). Α7 Intellectual Property Bureau staff, Ministry of Economic Affairs Printed by Consumer Cooperatives V. Invention Description (20) Type and / or Location. For each view trigger, the work shrinks.] 9,! M, and the title is prepared.12 It is better to generate the identification including the dynamic selection of the appropriate view task in response to the received special issue to perform the special view task, and to perform Appropriate image information is required for visually subscribed jobs. For example, in the text of the BGA review, the package of the signing field of the space of interest field preferably includes the identification with binary CE; D color CEL and 2 area type features date $ m Μ welding field review. The package identified as zone 2 with colored surface defects preferably includes the identification of the inspection of the colored surface defects and the area of interest (quick-motion image, but without CEL information. Areas identified as having nicks / crown defects) The package preferably includes identification of the appropriate notch / protrusion inspection method, binary cavities of the affected area, and optionally a snap-action image. The job reducer 12 typically transmits dynamic processing components, including image and method information ' It is indicated by the big arrow to the analyzer unit 15. The dynamic information is preferably = the analyzer 15 that dynamically transmits a specific defined area of the image based only on the defects, features and information of interest received by the job reducer 12. This, preprocessing " Obviously, the amount of image data analyzed by the analyzer unit 15 is low, and therefore the calculation load is reduced, thereby greatly reducing the cost of the inspection room related to the image analysis of the object. A specific embodiment of the present invention, the analysis The analyzer unit 包括 preferably includes a unit · an image analyzer module 24 and a post-processor module 26. ~ The image analyzer module 24 preferably operates to receive the Dynamic processing components and analysis by using the method identified by the job reducer 12 (CNS) A4 specifications ⑽ -23- X 297) (Please read the precautions on the back before 0 pages) '丨 装-\ ^ τ.. Line. V. Description of the invention (21) ===, identified by the work reducer 12 and imaged: A. Viewing work based on the comparison of Wanfama, among which,. =: See: The area in the image is analyzed as well as the reference image. It is better to compare the reference images based on the CEL spot in the image of the object 4 being inspected and the area related to the trigger area of the suspected defect. The post-processor 26 preferably operates as a defect-producing device, which is described below. It is also preferably operated as a reference to analyze the snapshot image of the area scratched by the image analyzer with a foot scratch to include A predetermined type of defect, in which the suspected defect has a high probability of being a false defect. SIP 7 is actually used as described here, and it is preferably provided based on the interesting window provided by the sense of interest, fun and self-generation Defect output report 30 and object features. &Quot; Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs Now refer to FIG. 1B, which is a simplified functional block diagram view of a BGA (ball grid array) substrate inspection system, as shown in the present invention. The construction and operation of another preferred embodiment. The BGA viewing system of FIG. 1B is similar to the preferred embodiment described with reference to FIG. 丨 A, however, the BGA viewing system shown in FIG. 1B is significantly different and the display is sensed by 3 The input from the camera or the camera is part of the scanner 34 (equivalent to scanner 2 in FIG. 1A), and does not include the snap action generator 14. The view is that the view system of the Bga view is The reference is for explanatory purposes' and any suitable object can be viewed. 32 It is believed that the viewing system shown in Figure 1B includes a user workstation. The scanner 34 typically produces RGB images or is intended to be viewed. The other numbers of the plate 36 are an image and a HIP (Hardware Image Processing) unit 38, which specifically includes exclusive hardware for processing the images produced by the scanner 34. Therefore, this paper standard applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) A7 B7 V. Description of the invention (22) Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs

知地疋,雖然HIP較佳地以專屬硬體製作,但HIp亦 以DSP環境或是在_般目的電腦站之 : 製作。如討論,— 飒仃之疋製軟體 … (當於圖RA影像處理器” 典型地產生下列輸出,在下文更詳細地說明: ) a·二進制CEL b·型態特徵 c·彩色CEL d•彩色缺陷 … e•環繞所選擇缺陷之RGB影像的快照 一 HIP單元38之下游爲SIp(軟體影像處理)單元,該單 疋由HIP單元38接收上述5輸入以及執行影像處理,如下 文更詳細説明。所認知地是雖然SIp較佳地以軟體製作, "可以在至少邵分可程式化環境如Dsp以及相似環境中製 乍之知出典型地包括多數影像以及缺陷報告(相當於 圖1A中的缺陷報告3〇),其可以在使用者工作站32上顯示 給使用者。 、 典型地,圖1B之系統在至少3掃描方案或是模式中運作 在下又中更詳細説明··學習模式、設計規則模式以及檢 式。”學習”模式典型地包括二子方案:,,學習混合,,和:, * A /考較佳地在處理面板批次之前的離線檢視準備步 · ¥κ中執仃。在學習模式中,在設計規則及/或檢視模式檢視 之面板有關的資訊爲該系統之輸入或是”學習”以作用爲之 後處理之參考。 如所7^,二通道輸入資料(快動資料輸入通道以及CEL _---^--------裝--- (請先閱讀背面之注音?事項再^|^本頁} Ί^τ. -線· -25 A7 經濟部智慧財產局員工消費合作社印制π 五、發明說明(23 ) 資料輸入通道)爲典型地由SIP 4〇接收。二資料輸入通道之 各通道較佳地包括二子通道:(i)快動報告子通道,由此指 疋爲π報告快動”,而彩色缺陷報告子通道,由此指定爲π報 σ Φ色缺卩曰,以及(丨丨)CEL報告子通道,由此指定爲”報告 CELn而缺陷報告子通道,由此指定爲"報告缺陷,,。這些輸 入資料通遒由HIP 3 8供應,該通道之較佳具體實施例在申 請人之上述參考的尚在審理中之以色列專利申請案中説明。 茲報告缺陷通道較佳地解多工(單元12〇)以獲得3原始資 料陣列,將在下文更詳細説明:型態特徵、硬體缺陷以及 彩色CEL。通常,該通道工作轉換器和分裂器單元8〇和 120運作爲解多工原始資料以分離由該sip 4〇所使用之輸 入貧料。解多工資料由此訂爲”SIp原始資料,,。該sip原始 資料典型地包括一些資訊陣列。各陣列爲典型地儲存在資 料結構中,由此訂爲,,資料結構陣列,,以及在下文詳細説明。 下列縮寫爲用以表現在圖1B和附圖中以簡潔形式表示 的解多工資料源: C_0 C—l、C—2 ··代表與二進制CEL有關的,,資料結構 陣列CEL”類型之資料源。各數字將資料源與較佳具體實施 例之3照相機〇、1和2中的-照相機分別相關連,該資料 源由各照相機獲得。 HD —0、HD_1、HD_2 :代表與硬體缺陷如刻痕突起 部有關的類型"資料結構陣列缺陷,,類型之資料源,爲由該 ,在二進制CEL中所發現之不平均。各數字將資料源與 較佳具體實施例之3照相機〇、i和2中的一照相機分別相 (請先閱讀背面之注意事項 再 te本頁) 裝 --線· -26- 484104 A7Knowingly, although HIP is preferably made with exclusive hardware, HIP is also made with DSP environment or in a computer station with a general purpose:. As discussed, — 飒 仃 之 疋 制 软体… (as shown in Figure RA image processor ”typically produces the following output, explained in more detail below: a. Binary CEL b. Type characteristics c. Color CEL d. Color Defects ... e • A snapshot of the RGB image surrounding the selected defect. A downstream of the HIP unit 38 is a SIp (Software Image Processing) unit. This unit receives the above 5 inputs and performs image processing by the HIP unit 38, as described in more detail below. It is recognized that although the SIp is preferably made in software, " can be produced in at least a sub-programmable environment such as Dsp and similar environments, which typically includes most images and defect reports (equivalent to the one in Figure 1A) Defect report 3), which can be displayed to the user on the user workstation 32. Typically, the system of FIG. 1B operates in at least 3 scanning schemes or modes. The following describes the learning mode and design rules in more detail. Mode and check mode. The "learning" mode typically includes two sub-programs: ,, learning mix, and :, * A / test is better prepared for offline review before processing panel batches · ¥ κ is executed. In the learning mode, the information about the panel viewed in the design rules and / or the viewing mode is the input of the system or the "learning" function is used as a reference for subsequent processing. As shown in 7 ^, two channels Input data (quick-action data input channel and CEL _--- ^ -------- install --- (Please read the phonetic on the back? Matters before ^ | ^ this page} Ί ^ τ. -Line · -25 A7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs π 5. Invention Description (23) The data input channel is typically received by SIP 40. Each channel of the two data input channels preferably includes two sub-channels: (i ) Quickly report the sub-channel, which means that 疋 is the π report fast-moving ", and the color defect report sub-channel, which is designated as π report σ Φ color deficiency, and (丨 丨) CEL report sub-channel, and thus Designated as "Report CEln and the Defect Reporting Sub-channel, thus designated as" Report Defect, ". These input materials are generally supplied by HIP 38. The preferred embodiment of this channel is in the applicant's above-mentioned reference. It is stated in the pending Israeli patent application. It is better to demultiplex (unit 12) to obtain 3 raw data arrays, which will be explained in more detail below: type characteristics, hardware defects, and color CEL. Generally, the channel works as a converter and splitter unit 80 and 120 operates as demultiplexed raw data to separate the input poor material used by the sip 40. The demultiplexed data is thus designated as "SIp raw data." The sip raw data typically includes some information arrays. Each array It is typically stored in a data structure, and is thus defined as, a data structure array, and described in detail below. The following abbreviations are used to represent the demultiplexed data source shown in a simplified form in FIG. 1B and the drawings: C_0 C-1, C-2 ····················································································································································································································································· Each number associates a data source with the -camera in 3 cameras 0, 1 and 2 of the preferred embodiment, which data source is obtained by each camera. HD —0, HD_1, HD_2: Represents the types related to hardware defects such as nicked protrusions " Data structure array defects, " The source of the type, for this reason, the unevenness found in the binary CEL. Each number refers to the data source and one of the cameras 3, 0, i, and 2 of the preferred embodiment (please read the precautions on the back first, and then te this page). --Line · -26- 484104 A7

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λ 484104 A7λ 484104 A7

五、發明說明(25 ) 中的一點而PIM服務爲PIM聚集,用以定義正檢視影像中 的位置以確定介於正檢視點與該特別位置之合適檢視規則 和方法應用之間的相關性。PIM遮罩爲由使用者描緣或是 如下文説明在檢視階段建立之區域,以及有關於特別檢視 執行順序。 如圖1B所示,SIP 40其中之一輸入爲使用者定義建構 資料180,典型地規範一特定SIP方案,例如學習、設計 規則或是檢視模式方案其中之一。 具有SIP之BGA檢視的執行方案 該SIP爲多目的彈性影像處理單元,可以容易地調適於 各種物件之檢視需要’以及在各種檢視方案之本文中運作 。爲了解釋之目的’在各種檢視方案之下,該SIp可以來 考BGA面板3 6之檢視所.説明加以運作。 較佳的掃描方案’相對於B G A檢視,以圖形表示爲執行 圖,以及不打算限於B G A檢視,而是代表合適的物件可以 使用該SIP加以檢視。各較佳的掃描方案或是模式運作爲 執行如下列之不同檢視功能: 1 ·設計規則方案,其中面板參考一組一般設計規則檢視。 在該設計規則方案中的瑗視打算提供硬體缺陷以及關於 BGA上的導體寬度之最小線寬達反以及關於BGA上的 導體之間取小空間的快速觀看(刻痕或是突起部)。設計 規則方案之執行將參考圖2和圖3加以説明。 2 ·學習方案,其中面板設計之内容和結構被學習以產生在 類似面板批次的檢視期間加以使用的參考。學習方案包 -28- 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公爱) — ^----;--------— (請先閱讀背面之注意事項再本頁) · -線 經濟部智慧財產局員工消費合作社印制衣 484104 A7 B7V. One point in the description of the invention (25) and the PIM service is a PIM aggregation, which is used to define the position in the front view image to determine the correlation between the front view point and the appropriate view rule and method application for that particular position. PIM masks are areas that are traced by the user or created during the review phase as described below, as well as the order in which special views are performed. As shown in FIG. 1B, one of the inputs of SIP 40 is user-defined construction data 180, which typically regulates a specific SIP scheme, such as one of learning, design rules, or view mode schemes. Implementation scheme of BGA inspection with SIP The SIP is a multi-purpose flexible image processing unit, which can be easily adjusted to the inspection needs of various objects' and operates in the text of various inspection schemes. For the purpose of explanation ', under various inspection schemes, the SIp can come to the inspection of the BGA panel 36 to 6 and explain the operation. Compared to B G A viewing, the preferred scanning scheme is represented graphically as an execution diagram, and is not intended to be limited to B G A viewing, but rather means that suitable objects can be viewed using the SIP. Each of the better scanning schemes or modes operates to perform different viewing functions such as the following: 1. Design rule scheme, where the panel refers to a set of general design rule views. The contempt in this design rule scheme is intended to provide a quick look at the hardware defect and the minimum line width of the conductor width on the BGA and the small space between the conductors on the BGA (notches or protrusions). The implementation of the design rule scheme will be explained with reference to Figs. 2 • Study plan, in which the content and structure of the panel design are learned to generate references that are used during the review of similar panel batches. Learning Solution Package-28- This paper size applies to China National Standard (CNS) A4 (210 X 297 public love) — ^ ----; --------— (Please read the precautions on the back before (This page) · -Clothing Production for Employee Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 484104 A7 B7

五、發明說明(26 ) 含學習參考面板之面板的一般屬性,如沿著導體各區斷 -------^--------裝--- (請先閱讀背面之注意事項再本頁) 的貫際線寬,以及學習在面板中特別感興趣領域之位置 ,如上文參考调1A所説明。學習方案之執行將參考圖 4-10而更詳細説明。 3 ·檢視方案,其中面板被檢視以參考具有已知所需屬性之 金面板而決定缺陷。檢視方案是典型用以檢視用於製造 之BGA批次以及用於處理缺陷。檢視方案之執行將參考 圖11 -1 6而更詳細説明。 乂 ό忍知到各SIP執行圖連接至圖1 b之資料輸入通道5〇和 70中的至少一個通道。通道50和7〇產生之通道資料之輸 入爲動態以及調適於各檢視方案的特別需要。在各通道5〇 和70中的資料可以較佳地以檔案格式提供以用於離線檢 視或是傳送控制協定/網際網路協定(TCP/IP)格式。建構變 數典型地在執行檢視方案之前提供以決定輸入通道5〇和 70之資料是否由file通道或是TCP/IP通道產生。 --線· 經濟部智慧財產局員工消費合作社印製 掃描方案一般由此以SIP建構檔案之本文加以説明,其 中各檔案定義在相關方案之本文中執行的檢視功能聚集。 當可應用時,包含執行路徑的建構檔案之名稱由此明訂。 下列較佳掃描方案之集合現在更詳細地説明: 一較佳SIP方案,取名爲"設計規則”(具有一建構檔案, 表示爲dr.config)現在將參考圖2加以説明。 此掃描方案打算提供快速觀看硬體缺陷以及關於A 上的導體寬度之最小線寬以及最小空間的達反,以及可以 由一檔案或是在該方案執行之前由使用者決定在線上執行 -29- 五 經 濟 部 智 慧 財 產 局 員 工 消 費 合 作 社 印 製 A7 B7 發明說明(27 ) 。此方案典型地在面板上執行, 視馬在學習万案期間使用 將在下文更詳細説明·· 典型地,該設計規則方案愛i θ 』万木而要瑕小設定時間,提供影像 和檢視面板之品質爲可足以接受 人 又而使特別面板能夠使用爲 ^面板的原始粗略指示,由此—比較參考可以建立爲用於 ^見方案中。該方案較佳地識別所有硬體(刻痕,突起部, :架上的CEL等)缺陷,所有彩色表面缺陷,在BGA面板 中的導體區域上之最小線寬違反以及bga面板中導體之 間的2小空間違反以及輸出所有該缺陷的報告。 先前提到的㈣較佳地不用與任何外部參考相關連而識 別。容易認知到假使BGA面板展現先前缺陷之主優勢時, 不適合用爲參考。然而,事實上BGA面板通過所有上述測 試時,不需要確定該面板可以用爲適合參考,以及較佳地 檢視以確定所有特徵存在,以及該特徵依據設計規範適當 地位於面板上。 如圖2所示,使用者定義之設計規則建構資料爲sip 4〇 輸入。該資料典型地包括介於導體之間所需最小距離,以 及導體之最小線寬厚度。與面板36相關之輸入影像資料由 陕動通道50和CEL通道70接收,以及解多工爲下列影像 貧況資料:各照相機彩色缺陷資料以及硬體缺陷(刻痕和突 起部)資料。 各照相機0-2之影像資料輸入的存疑缺陷由缺陷識別器 2 1 0加以識別,合適的檢視方法爲各存疑缺陷識別,被封 裝土包含存疑缺陷區域之影像資料的視窗,以及由資料結 -30- 本纸張尺度適用中國國家標準(CNS)A4規格(21〇 χ 297公釐)V. Description of the invention (26) The general properties of the panel with the learning reference panel, such as the section along the conductor ------- ^ -------- install --- (Please read the back Note on the page width), and the position of the area of special interest in the panel, as described above with reference to tune 1A. The implementation of the learning plan will be described in more detail with reference to Figure 4-10. 3. Inspection scheme, where panels are inspected to determine defects with reference to a gold panel with known required attributes. Inspection schemes are typically used to inspect BGA batches used for manufacturing and to handle defects. The implementation of the inspection scheme will be described in more detail with reference to FIGS. 11-16. It is tolerated that each SIP execution diagram is connected to at least one of the data input channels 50 and 70 in FIG. 1b. The input of channel data generated by channels 50 and 70 is dynamic and tailored to the particular needs of each viewing scheme. The data in each of the channels 50 and 70 can preferably be provided in a file format for offline inspection or transmission of a Control Protocol / Internet Protocol (TCP / IP) format. Construction variables are typically provided before executing the viewing scheme to determine whether the data for input channels 50 and 70 is generated by the file channel or the TCP / IP channel. -Printed by the Consumers' Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. The scanning scheme is generally described in this article of the SIP construction file, where each file defines the aggregation of the review functions performed in the text of the relevant scheme. When applicable, the name of the construction file containing the execution path is specified accordingly. The following collection of preferred scanning schemes is now explained in more detail: A preferred SIP scheme, named " Design Rules "(with a build file, denoted as dr.config) will now be described with reference to Figure 2. This scanning scheme It is intended to provide a quick view of hardware defects and the minimum line width and minimum space of the conductor width on A, and can be implemented online by a file or by the user before the implementation of the solution. The Intellectual Property Bureau employee consumer cooperative prints A7 B7 Invention Description (27). This solution is typically implemented on the panel, and the use of Sightma during the learning case will be explained in more detail below. Typically, this design rule scheme loves i θ ”Manmu requires a short set time, the quality of the provided image and viewing panel is sufficient to accept people, so that the special panel can be used as the original rough indication of the ^ panel, from this-a comparative reference can be established for ^ see In the scheme, this scheme can better identify all the defects of the hardware (notches, protrusions, CEL on the rack, etc.) and all colored surface defects. The minimum line width violation on the conductor area in the BGA panel and the 2 small space violations between the conductors in the bga panel and all reports of this defect are output. The previously mentioned ㈣ is preferably identified without being associated with any external reference It is easy to recognize that if the BGA panel shows the main advantages of previous defects, it is not suitable as a reference. However, when the BGA panel passes all the above tests, it is not necessary to determine that the panel can be used as a suitable reference, and it is better to check to determine All features exist, and the features are properly located on the panel according to design specifications. As shown in Figure 2, the user-defined design rule construction data is sip 40 input. This data typically includes the minimum distance required between the conductors And the minimum line width and thickness of the conductor. The input image data related to the panel 36 is received by Shaanxi Channel 50 and CEL Channel 70, and demultiplexed into the following image-poor data: color defect data for each camera and hardware defects (engraved Marks and protrusions). The suspected defects in the input of the image data of each camera 0-2 are identified by the defect identifier 2 1 0 The identification and appropriate inspection methods are the identification of each suspected defect, the window containing the image data of the suspected defect area in the packaged soil, and the data structure. -30- This paper size applies the Chinese National Standard (CNS) A4 specification (21〇χ 297 mm)

五、發明說明(28) 220操作,該視窗運作爲組裝資料方法以及置 中6貝科仔列中以處理。缺陷報告產生器230(圖1A 中的分析H 15)依據該識別方法檢視 〇假使實際缺陷發現時,則哕缺S ^ ㈢%兄吁則β缺陷報告至缺陷報告24〇中。 參考圖3,該圖爲次執行圖,解釋圖2中的缺陷識別器 2U)和資料結構儲存視窗22〇中以及之間的影像資料流程 。如所示’通道7〇產生之二進制CEL提供至缺陷偵測器 250 ,孩偵測器運作爲偵測與太有導體與介面導體之間太 ¥空間相關連的缺陷。,,太窄”缺陷之輸出提供至寬度缺陷 報告252,而報告252提供至合併程式單元254。除了報 。252以外,合併程式單几由通道5〇接收彩色表面缺陷報 口 、由通道7 0接收硬體缺陷報告以及輸入資料2 5 6。合併 程式單元254合併該報告、過濾在遮罩領域258内部發現 的報告以及輸出以缺陷資料佇列形式表示的統一資料報告 260,以佇列用於下游處理。遮罩領域258經由使用者介面 而產生。 經濟部智慧財產局員工消費合作社印製 一旦B G Α面板爲以設計規則方案檢視以及決定爲適合 作爲可能比較之檢視面板的參考時,需要執行檢視之學習 方案,其中該面板之特別結構爲學習以及儲存在記憶體中 。學習面板有關之資訊後續在檢視方案中使用,將在下文 參考圖11-16説明,作爲可能比較之檢視面板的參考以決 定缺陷之存在。 該學習方案現在參考圖4-1 0加以説明。 參考圖4,該圖顯示由使用者選擇之學習方案的簡化功 -31 - 本纸張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) ^84104 A7 B7 五、發明說明(29 ) 經濟部智慧財產局員工消費合作社印製 把方塊圖。使用者定義學習建構資料18q爲輸人,較佳地 經^般使用者介面17〇(圖1B)。面板36爲掃描並產生影 ^貝料。由各照相機產生之下列影像資料被使用:彩色咖 貨料130、134和138;二進制CEL資料刚、144和148 :硬體(刻痕和突起部)缺陷料150、154和158以及型態 特徵資料160、164和168。 一學習爲依據由各分離照相機到達之影像資料加以執行, 藉由此順序應用3執行圖: &quot;學習混合&quot;,特別之處爲包含在稱爲learnmixedc〇nfig 之建構檔案中,參考圖5 - 8加以說明; ’’學習參考”,特別之處爲包含在稱爲learn ref c〇nfig之 建構檔案中’參考圖9 -1 0加以説明; 在泫學習方案結束時,方案特定輸出資料被接收以及儲 存於該檢視方案期間使用。 典型地,各掃描方案由現FILE通道接收原始資料。該原 始資料以由該應用啓動之爪鉤程式從DMA類型資料輸入 通迢擷取。孩程式從DMA類型通道讀取資訊以及將該原始 貝料寫入至檔案中。該學習方案之後由那些檔案讀取資料 。各學習執行圖(或是方案)之較佳具體實施例現在詳細説 明。 現在參考圖5 ,該圖顯示該學習混合方案之執行圖3〇〇 。遠學習混合方案之建構爲較佳地儲存在建構檔案中。 在學習混合方案中,一視窗定義在顯示mask區特徵之特 徵的周圍。該學習混合方案之執行圖典型地使用由使用者 -32- 本紙張尺度適用中國國家標準(CNS)A4規格(210x 297公釐) (請先閱讀背面之注意事項再@本頁) 裝 訂-. ,線 484104 A7 B7 五、發明說明(3〇 ) 足義的各視窗。PIM缺陷過濾器3 i 〇之輸入檔案因此爲使 用者足義之視窗。PIM缺陷過濾器31〇輸出至缺陷處置器 3 20,該處置器運作爲產生以SIp缺陷參考以及缺陷視窗參 考視窗330形式表示的感興趣視窗,之後在檢視方案中使 用0 使用者定義之視窗可以在該學習混合方案中參考BgA 類型檢視加以定義,包括下列類型區: -目標-爲具有未定義形狀特徵之領域,該使用者期望確 定該特別形狀維持在檢視之BGa中; -球-爲以在BGA上許多圓形墊表現特徵的領域; -焊接領域-爲以在BGA上許多焊墊或是電力線表現特徵 的領域; -殳穴-爲需要沒有任何CEL型態特徵之領域; -晶片領域-爲在BGA上晶片所位處之領域。 各視窗類型所執行的功能類型定義在一定義樓案中。 圖5之執行圖接收下列解多工影像資料: a.由各照相機〇-2分別產生之彩色cel,參考數字爲130 、134 和 138 ; 經濟部智慧財產局員工消費合作社印划衣 b·由各照相機0-2分別產生之二進制cel,參考數字爲 140 、 144 和 148 ; c·由各照相機0-2分別產生之硬體缺陷,參考數字爲1 5〇 、154 和 158 ; d.由各照相機0-2分別產生之型態特徵,參考數字爲16〇 、164 和 168 0 -33· 本纸張尺度刺中關家鮮(CNS)A4規格(21Gx 297公爱1-------- 484104 A7 B7 五、發明說明(31 解^工:料楗供至執行單元“〇,該單元與各 關以及足義下列執行順序。 機有 參考圖一6 a圖爲較佳的次執行圖,解釋在各執行 裝 340中執仃的執仃順序。圖6的執行圖,與各執行 有關,處理由 '照相機來的原始資料。⑵縮整叫 依Ϊ使^者定義之視窗344封裝原始影像資訊資料至檢視 視囱,4視自疋義在工作站32(圖ιβ)之一般使用者介面中 以及傳送至工作縮整器342作爲事件服務345。各檢視視 窗包括原始影像資訊資料以及回應使用者定義之視窗344 頮土而4別,則試功能。該視窗由該工作縮整器342放入 至視窗346仵列以及由該測試管理者348從該仵列取出。 該測試管理者由該佇列爆出視窗,執行與此視窗有關的功 能以及依據該視窗的向前目的地而放入該視窗至並中之一 輸出仔列中。假使該測試管理者348能夠完成在該視窗上 的測試時,該視窗被向前傳送至統一參考佇列35〇,以及 之後在該SIP缺陷處理器32〇中結合(圖5)。 經濟部智慧財產局員工消費合作社印製 假使該測試管理者348不能夠單獨依據單一照相機所接 收的原始影像資訊而完成在該視窗上的測試時,則該視窗 被放入至未分解的 &gt;[宁列3 6 0中。 現在回轉到圖5,可以看到各該執行單元34〇之該未分 解的佇列360以合適順序放入至多重截割管理者37〇,該 管理者運作爲結合各未分解視窗與合適的視窗以產生結合 之檢視,由此可以執行該檢視工作。 多重截割管理者依據下列順序分配資訊以提供在圖8中 -34- 本紙張尺度適用中國國家標準(CNTS)A4規格(210 x 297公釐) 484104 A7 B7 五、發明說明(32 ) 詳細説明的至少—功能。 士自:=:j〈相對應未分解視窗所有的基本影像資料、无視自中,而合適功能依據其 經濟部智慧財產局員工消費合作社印製 被統 該統一視窗。 假使輸入之影像资姐h』 ^ ^ ^ ^ 枓匕括球狀之資料時,則該資料被提 供至球狀參考作列3 § 〇。々入、ά 、 、、 80 在合適的順序中,球狀量測單元 3 8 2接收该資料而量:目1】尤 ,、J在该£域中的球狀以及輸出SIp球 狀量測資料3 84至資料綠安:、次,, 貝村彳田木,茲資料指示輕微的球狀量測。 假使輸入之影像資料包括焊接領域資料時,則該資料被 提供至焊接領域參考㈣39G。在合適的順序中,遮罩萃 取器接收該資料以及由囹砝兮、日+丄 久由圍、,堯该視窗中的各不同檢視區域之資料遮罩擷取,如在A 4人、日、丄 G A 視足本文中的焊塾和電力線, 以及出稱爲聚合線參考和穩定特徵參考394。 假使輸入之資料不包括球狀或是不需要遮罩擷取時,該 資訊被提供至統一佇列398以及任何球狀量測和擷取之遮 罩。統一佇列被提供至缺陷處置器320以用於額外處理。 容易認知到該測試管理者348(圖6)之功能和次執行圖實 質上類似與單一照相機相關之原始資料於由該多重截割管 理者370相對由該多數照相機輸入接收之截割的組合執行 之功能。 在孩學習方案中之各檢視視窗執行的功能爲定義在檔案 中。圖7A-7B的表列出視窗類型以及其相對應的測試功能( 或是功能列表,當該視窗附接於複合功能時),以及提供該 功能之簡短説明。該表亦説明該功能在該視窗上的動作和 類型而被應用至 -------7-------裝--- ** (請先閱讀背面之注意事項再0本頁) 訂 -·線- -35- K纸張尺度適用中國國家標準(CNS)A4規格(21〇 X 297公爱) 484104 A7V. Description of the invention (28) 220 operations, this window operates as a method of assembling data and is placed in a 6-becque column for processing. The defect report generator 230 (analysis H 15 in FIG. 1A) is inspected according to the identification method. If an actual defect is found, the defect S ^ %% calls for a β defect report to the defect report 24. Referring to FIG. 3, this figure is a sub-execution diagram explaining the image data flow in and between the defect identifier 2U) and the data structure storage window 2220 in FIG. As shown, the binary CEL generated by the channel 70 is provided to the defect detector 250, which operates to detect defects that are too spatially related to too much conductor and interface conductor. The output of the "too-narrow" defect is provided to the width defect report 252, and the report 252 is provided to the merge program unit 254. In addition to the report .252, the merge program table receives the color surface defect report from channel 50, and from channel 70. Receive a hardware defect report and input data 2 5. 6. The merge program unit 254 merges the report, filters the reports found in the mask field 258, and outputs a unified data report 260 in the form of a queue of defect data, which is used for Downstream processing. Masking field 258 is generated through the user interface. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. Once the BG Α panel is designed to be viewed as a design rule and it is determined to be suitable as a reference for possible comparison, it needs to be implemented The learning scheme of the review, the special structure of the panel is learning and stored in memory. The information about the learning panel will be used later in the review scheme, which will be described below with reference to Figures 11-16 as a reference for possible comparison of the review panel To determine the existence of defects. The learning scheme is now explained with reference to Figure 4- 10. Figure 4. This figure shows the simplified function of the learning scheme selected by the user. -31-This paper size is applicable to the Chinese National Standard (CNS) A4 (210 X 297 mm) ^ 84104 A7 B7 V. Description of the invention (29) The block diagram is printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. The user-defined learning construction data 18q is input, preferably through a general user interface 17 (Figure 1B). Panel 36 is for scanning and generating shadows. The following image data generated by each camera are used: color coffee materials 130, 134, and 138; binary CEL materials, 144, and 148: hardware (notches and protrusions) defective materials 150, 154, and 158, and models State feature data 160, 164, and 168. A learning is performed based on the image data arriving from the separate cameras, and the execution diagram is applied by applying 3 in this order: &quot; learning mixing &quot;, which is special in that it is included in the learnmixedc The nfig construction file is described with reference to Figs. 5-8; "Learning reference" is particularly included in a construction file called learn ref c0nfig 'with reference to Figs. 9-10; At the end of the plan Program specific information is received and output to a storage scheme used during the review. Typically, each scanning scheme receives raw data from the current FILE channel. The original data is retrieved from the DMA-type data input channel by a hook program initiated by the application. The program reads the information from the DMA type channel and writes the raw material into the file. The learning program then reads information from those files. The preferred embodiments of each learning execution diagram (or scheme) will now be described in detail. Reference is now made to FIG. 5, which shows the implementation of the learning hybrid scheme in FIG. The construction of the distance learning hybrid scheme is preferably stored in a construction file. In the learning blending scheme, a window is defined around the features showing the features of the mask area. The implementation diagram of this learning blending scheme is typically used by the user -32- This paper size is applicable to the Chinese National Standard (CNS) A4 specification (210x 297 mm) (Please read the precautions on the back before @this page) Binding-. , Line 484104 A7 B7 V. Description of the invention (30) Each window of the meaning. The input file of the PIM defect filter 3 i 0 is therefore a user-friendly window. The PIM defect filter 31 is output to the defect handler 3 20, which operates to generate a view of interest expressed in the form of a SIp defect reference and a defect window reference window 330, and then uses 0 in the viewing scheme. A user-defined window can Defined with reference to the BgA type view in this learning blending scheme, including the following type areas:-Target-is an area with undefined shape features, the user desires to ensure that the particular shape is maintained in the BGa of the view;-Ball-is used to Fields where many circular pads are characteristic on BGA;-Welding fields-areas where many pads or power lines are characteristic on BGA;-Caverns-areas where there is no need for any CEL type feature;-Wafer field -The area where the chip is located on the BGA. The type of function performed by each window type is defined in a definition building case. The execution diagram of Figure 5 receives the following demultiplexed image data: a. Color cels generated by each camera 0-2, with reference numbers of 130, 134, and 138; printed and printed by employees ’cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairsb. Binary cels generated by each camera 0-2, reference numbers are 140, 144, and 148; c. Hardware defects generated by each camera 0-2, reference numbers are 150, 154, and 158; d. By each Type characteristics produced by cameras 0-2 respectively, reference numbers are 160, 164, and 168 0 -33. This paper scales Zhong Jiaxian (CNS) A4 specifications (21Gx 297 public love 1 ------ -484104 A7 B7 V. Description of the invention (31 Solution: supply of materials to the execution unit "〇, this unit and each level and the meaning of the following execution sequence. There is a reference to Figure 1-Figure 6 is a better execution Figure, explaining the execution order executed in each execution device 340. The execution diagram of Fig. 6 is related to each execution and processes the raw data from the camera. The shrinking is called the window 344 defined by the envoy to encapsulate the original The image information and data are sent to the viewing window. The 4 views are generally used at the workstation 32 (Figure ιβ). In the user interface and sent to the job reducer 342 as an event service 345. Each viewing window includes the original image information data and a user-defined window 344. The test function is different. This window is used by the job reducer. 342 is placed in the queue of window 346 and is taken out of the queue by the test manager 348. The test manager pops up a window from the queue, performs functions related to this window, and is based on the forward destination of the window. Put the window into one of the output queues. If the test manager 348 is able to complete the test on the window, the window is forwarded to the unified reference queue 35, and later in the SIP defect The processor 32 is integrated in the processor (Figure 5). If the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs prints that the test manager 348 cannot complete the test on the window based on the original image information received by a single camera, The window is placed in the undecomposed &gt; [Ninglie 3 60. Now turning to Figure 5, you can see the undecomposed queue 360 of each execution unit 34, in the proper order It is placed in the multi-cutting manager 37. The manager operates to combine each unexploded window with a suitable window to generate a combined view, so that the review can be performed. The multi-cutting manager allocates information according to the following order to Provided in Figure 8-34- This paper size is applicable to China National Standard (CNTS) A4 specification (210 x 297 mm) 484104 A7 B7 V. Description of the invention (32) At least the function specified in detail. From: =: j <Corresponding to the unexploded window, all the basic image data are ignored, and the appropriate function is based on the unified consumer window printed by the Intellectual Property Bureau Employee Consumer Cooperative of the Ministry of Economic Affairs. If the input image information h 』^ ^ ^ ^ 枓 spheroidal information, the information is provided to the spherical reference list 3 § 〇. Enter, ,,, 80 In a suitable order, the spherical measurement unit 3 8 2 receives the data and measures: head 1] especially, the spherical shape of J in the £ domain and the output SIp spherical measurement Data 3 84 to data Lv'an:, times ,, Pui Cun Sumida, here the data indicates a slight spherical measurement. If the input image data includes welding field data, the data is provided to the welding field reference ㈣39G. In the proper order, the mask extractor receives the data and captures the data masks from the different viewing areas in the window, such as in A 4 people, Japan, and Japan.丄 GA is based on the welding wire and power line in this article, as well as the reference line for aggregation and stability feature reference 394. If the input data does not include spherical shapes or mask capture is not required, the information is provided to the unified queue 398 and any masks for spherical measurement and capture. A unified queue is provided to the defect handler 320 for additional processing. It is easy to recognize that the function and sub-execution diagram of the test manager 348 (Fig. 6) is substantially similar to the original data related to a single camera performed on the combination of cuts received by the multi-cut manager 370 relative to the cuts received by the majority of camera inputs Its function. The functions performed by the viewing windows in the child learning program are defined in the file. The table in Figures 7A-7B lists the window types and their corresponding test functions (or a list of functions when the window is attached to a composite function), and provides a short description of the function. The table also describes the action and type of the function on this window and is applied to ------- 7 ------- install --- ** (Please read the precautions on the back before 0 copies (Page) Order- · Line- -35- K Paper Size Applicable to Chinese National Standard (CNS) A4 Specification (21〇X 297 Public Love) 484104 A7

回轉狀態,包含決定該視窗將送至何輸出佇列的目的地A 串。 予 統一佇列350和398傳送至寫出缺陷和產生由上而下參 考之SIP缺陷處理器工作。該由上而下參考爲終極作用爲 在檢視方案期間感興趣空間領域之參考,如參考圖丨A之戈 明。附接於各由上而下視窗之功能在與以位置爲基準的2 上而下視窗相關之各空間位置上執行。下列功能可以在由 上而下參考建立之前執行: a·條狀球只在由上而下視窗中保持圓形資料結構以定 義各圓形資料結構周圍的感興趣空間領域。 - b.條狀壓焊回轉次視窗指引,命令該工作寫入各次視窗 之不同參考視窗,該次視窗與視窗中的個別焊墊特徵有 關。 c ·條狀標戴在该由上而下視窗中不做事。 d. nop。不做事。 · 凊注意在學習階段中,邵分面板由檢視觀點在特別興趣 的時間之前爲已知,例如球狀領域、在BGA檢視應用中的 螯領域和目標領域可以被識別,〜以致各部分可以作用爲在 下文説明的該檢視方案中之額外檢視的觸發。 ‘視自由该工作縮整器3 4 2建立時,儲存在各視窗内部 之資料爲需要模式化視窗部分的資料以及執行需要以健全 檢視方法檢視視窗内容的各檢視功能。例如,在BGA檢視 中,球狀領域而言,在該領域之一列表各球狀包含中心點 和半徑被儲存。對目標領域而言,描述目標邊界之壓縮多 -36- 本纸張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) !lilMI!裝.! - I A請先閱讀背面之注意事項再本頁) 訂· --線. 經濟部智慧財產局員工消費合作社印製 A7 A7 B7 五、發明說明(34 ) 邊形被典型地儲存。 =方;;爲學習參考掃描方案之較佳執行圖 ^ ^ ^ 301 t &quot; 中運作爲定義BGA下列屬性之I考资料.在以仏視 科’料體輕微寬度和介於職上導體之間空 裝 特^料/·’ A參考物件之影像中的型態特徵集合以及 特欲减別,在該學習方案中決定爲穩定; C.咖資料,爲參考影像中的CEL位置之資料; 二特徵資料,馬參考影像中的特徵類型和位置之資料。 圖9之執行圖使用下列輸入資料: ” L型態特徵之解多工原始資料; b. CEL之解多工原始資料; c·在學習混合掃描方案中發展之聚合線參考資料, 線 圖5説明; / 去广遮罩貝肖’爲定義作用爲遮罩區,其中線寬計算 不執行,例如在BGA檢視中,&quot;目標π、,,球狀,,以及,,遮 丨,區; e.穩疋特徵參考,其中定義特徵被視爲穩定之區。 圖9之執行圖產生下列輸入學習方案之輸出·· a·頃域周圍之方形’在該方形上線寬不能被計算。該資 訊被儲存在學習線寬不合格視窗檔案中; b·線寬參考,在BGA檢視中,儲存導體寬度和介於bga -37- 本紙張尺度_巾規格⑵Q χ 297公]) 4841U4 A7 五、發明說明(35 ) 上導體之間空間; C•註册在參考特徵檔案中的參考特徵; d.CEL和型態特徵樓案中的瓜和特徵的原始參考,各 資科被索引以及包括將特徵資訊和產生 關連之參考資料。 如圖9之執行圖所示,各照相機14〇、144和148產生之 二進制CEL的解多工原始資料以及各照相機16〇、164和 168產生。之型態特徵被提供至⑽複合工作單元彻。各複 合工作單元彻與該照相機有關。相對於複合工作單元400 之執行圖將參考圖1 0加以説明。 另外’型態特徵的解多工原始資料,雖然只有其中之一 照相機產生之資訊可以被使用’較佳地各照相機之資訊被 k供至工作學習狂册單元420,該單元接收穩定特徵資料 422,該特徵具有面板36上已知和穩定位置。穩定特徵資 料在該學習混合方案中被發展。 子白5王册單凡420運作爲學習面板36(圖1B)上穩定特徵 類型和位置,以及產生參考檔案424,該檔案在該檢視方 案中使用爲決定過剩和遺漏特徵以及將該檢視面板註册爲 參考面板之參考。 另外,CEL的解多工原始資料,雖然只有其中之一照相 機產生之資訊可以被使用,較佳地各照相機之資訊被提供 至工作學習線寬單元43〇,該單元接收在該學習混合方案 中產生的聚合線資料去能遮罩資料432。聚合線資料去能 遮罩貝料432被放置在PIM中,映射表中的點和,MIM,,映 • ^ τιί — — — · · I I (請先閱讀背面之注意事項再本頁) ήιτ. 丨線. 經濟部智慧財產局員工消費合作社印製 •38- 484104 A7 ----------B7__ 五、發明說明(36 ) 射表中的某些事物,將線寬與面板36上的區域相關之參 在該學習參考方案中被檢視。 學習線寬單元430運作爲學習線寬,將線寬與面板36( 圖1B)上的位置相關連以及產生參考檔案434,該檔案在該 檢視方案中使用爲決定既定計算之線寬量測落在可接受量 測的預定範圍内之參考。 現在參考圖10,該圖爲在複合工作單元400中執行之工 作的次執行圖。該次執行圖與依據各照相機之原始影像資 料資訊執行之工作相關。’ ' 該次執行圖包括幾何參考工作單元45〇,爲依據cel和 型怨特徵之解多工原始影像資料輸入運作以計算識別CEL 和型態特徵之幾何參考,將它們與參考影像中的位置相關 連以及產生輸出參考檔案。該第一檔案爲CEL類型和位置 參考4 5 2而弟一墙案爲型態特徵類型和位置參考4 5 4。 現在參考圖1 1 -1 6 ,該圖顯示該檢視方案之執行圖,以 及説明由此應用之檢視測試。 下列之術#吾使用於續起説明中,以及有利於瞭解1 1 · 1 6。 在圖1 1之執行圖中,下列資料源被產生: R—1 :爲介於與參考之中央照相機有關之影像截割與線 上影像之間的註册轉換; E—1,IM一1 :分別爲獲取該中央照相機之型態特徵的過 剩和非法匹配。過剩匹配爲存在於線上影像但是不存在於 參考影像之型態特徵。非法匹配爲存在於線上影像之型態 特徵,但是其座標匹配於在該參考影像之不同型態特徵。 -39- 本紙張尺度適用中國國家標準(CNS)A4規格(210 x 297公釐) | :--------裝--- (請先閱讀背面之注意事項再本頁) 訂. -丨線. 經濟部智慧財產局員工消費合作社印制π A7 B7 五、發明說明(37 - 八中xx=0,1,2 :由照相機XX之座桴手% 至參考校準座標系統的轉換,由Rj演譯; n无 换丁一1% :由參考校準座mm校準絲系統的轉 換,由R—1演譯。 J丹 參考圖U,該圖爲註册和決定過剩和遺漏特徵工作Rotating state, which includes the destination A string that determines the output queue to which the window is sent. The unified queues 350 and 398 are passed to the SIP defect processor which writes defects and generates top-down references. This top-down reference is the ultimate reference for the spatial domain of interest during the review of the solution, such as the reference to Goming in Figure A. The function attached to each top-down window is performed at each spatial position related to the position-based 2 top-down window. The following functions can be performed before the top-down reference is established: a. The strip ball maintains the circular data structure only in the top-down window to define the space area of interest around each circular data structure. -b. Guidelines for the secondary window of the bar-shaped pressure welding, ordering the work to be written in different reference windows of each window, and this window is related to the characteristics of individual pads in the window. c. The bar is worn in the top-down window and does nothing. d. nop. Do nothing. · 凊 Note that during the learning phase, the Shao sub-panel is known from the inspection point of view before the time of special interest, for example, the spherical field, the chelate field and the target field in the BGA inspection application can be identified, so that each part can function Triggers for additional views in this view scheme described below. ‘At the time when the job reducer 3 4 2 was created, the data stored in each window was the data that needed to model the window part and the various viewing functions that needed to view the contents of the window in a sound viewing method. For example, in the BGA view, for spheres, one sphere in the list contains the center point and the radius are stored. For the target area, the compression that describes the boundary of the target is much -36- This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm)! LilMI! -I A Please read the precautions on the back before this page). Order ---. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 A7 B7 V. Description of Invention (34) The edges are typically stored. = Fang ;; For the best implementation of the learning scanning scheme ^ ^ ^ 301 t &quot; works as the definition of the following attributes of the BGA test data. In the Department of Vision, the material's slight width and the conductor between the job Space-packed special materials / · 'A set of morphological features in the image of the reference object and special desires to be reduced are determined to be stable in this learning plan; C. Coffee data, which is the data of the CEL position in the reference image; 2. Feature data, the feature type and position information in the horse reference image. The execution diagram of Figure 9 uses the following input data: ”Raw multiplexed raw data of L-type features; b. Raw multiplexed raw data of CEL; c. Aggregate line reference data developed in the study of hybrid scanning schemes, line diagram 5 Explanation; / De-Broadshade Beshaw 'is defined as a masked area, in which the line width calculation is not performed, for example, in the BGA view, &quot; target π ,,, spherical, and, masking area; e. Stable feature reference, where the defined feature is regarded as a stable area. The execution diagram of Figure 9 produces the following input learning program output ... a. The square around the arena 'line width on this square cannot be calculated. The information It is stored in the learning line width unqualified window file; b. Line width reference, in the BGA view, the storage conductor width is between bga -37- this paper size _ towel specification ⑵ Q χ 297 male]) 4841U4 A7 V. Invention Note (35) the space between the conductors; C • the reference feature registered in the reference feature file; d. The original reference of the melon and feature in the CEL and type feature building case, each asset is indexed and includes feature information And generate related references As shown in the execution diagram of FIG. 9, the binary CEL demultiplexed raw data generated by each of the cameras 1440, 144, and 148 and each camera 16O, 164, and 168 are generated. The type features are provided to the ⑽ compound work unit Each compound working unit is completely related to the camera. The implementation diagram of the compound working unit 400 will be described with reference to FIG. 10. In addition, the original data of the multiplexing of the type features, although only the information generated by one of the cameras It can be used. Preferably, the information of each camera is supplied to the work learning book unit 420, which receives the stable feature data 422, which has a known and stable position on the panel 36. The stable feature data is in the learning hybrid scheme Zibai 5 Wang Shudan Fan 420 operates as a stable feature type and location on the learning panel 36 (Figure 1B), and generates a reference file 424, which is used in this viewing scheme to determine excess and missing features and The viewing panel is registered as a reference for the reference panel. In addition, CEL's demultiplexed raw data, although only the information generated by one of the cameras can be used. It is used, and preferably the information of each camera is provided to the work learning line width unit 43, which receives the aggregated line data disabling mask data 432 generated in the learning blending scheme. The aggregated line data disabling mask data The material 432 is placed in the PIM, and the points in the mapping table, MIM ,, and map • ^ τιί — — · · II (please read the precautions on the back before this page) Цιτ. 丨 Line. Intellectual Property Bureau of the Ministry of Economic Affairs Printed by employee consumer cooperatives • 38- 484104 A7 ---------- B7__ V. Description of the invention (36) Some things in the table, the line width and the area on the panel 36 are involved in this Examined in the learning reference scenario. The learning line width unit 430 operates as a learning line width, correlates the line width with the position on the panel 36 (FIG. 1B), and generates a reference file 434, which is used in this viewing scheme to determine the line width measurement for a given calculation. A reference within a predetermined range of acceptable measurements. Reference is now made to FIG. 10, which is a sub-execution diagram of the work performed in the compound work unit 400. The execution map is related to the work performed based on the original image data information of each camera. '' This execution diagram includes a geometric reference work unit 45, which is based on the input of the multiplexed original image data based on the cel and type complaint features to calculate the geometric reference to identify the CEL and type features, and to position them with the reference image. Correlate and generate output reference files. The first file is the CEL type and location reference 4 5 2 and the first wall case is the type feature type and location reference 4 5 4. Reference is now made to Figures 1 1 to 16 which show an implementation diagram of the viewing scheme and illustrate the viewing tests applied thereby. The following technique # 我 is used in the continuation description, and is helpful to understand 1 1 · 1 6. In the implementation diagram of Fig. 11, the following data sources are generated: R-1: Registration conversion between the image cutting and online image related to the referenced central camera; E-1, IM-1: respectively To obtain the excess and illegal matches of the central camera's type features. Excess match is a type feature that exists in the online image but not in the reference image. Illegal match is the type feature existing in the online image, but its coordinates match the different type feature in the reference image. -39- This paper size is in accordance with China National Standard (CNS) A4 (210 x 297 mm) |: -------- install --- (Please read the precautions on the back before this page). -丨 line. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs π A7 B7 V. Description of the invention (37-Eighth xx = 0, 1, 2: Conversion from camera XX to the reference coordinate system, Interpreted by Rj; n 1% without change: converted by the reference calibration block mm calibration wire system, interpreted by R-1. J Dan refers to Figure U, which is used to register and determine excess and missing features.

、、仃圖°圖11的執行圖在圖^ A之註册產生器^ 8中的檢 視方案期間執行。 A 此執行1M于到原始影像資料,包括彩色資料⑽、 =和138;二進制啦資料14〇、_ΐ48,硬 貨料15〇、154和158;型態特徵資料16〇、164和168以 及在掃描器34中之各照相機產生的彩色缺陷%(圖ib)。 在孩解釋之具體實施例中的該註册工作單元別爲簡易 目的,運作爲註册照相機i之特徵,該照相機i爲中央照 相機。狂册工作單元5 1G由記憶體接收特徵164和參考特 徵520 ’以及運作爲產生相對照相機ι之註册轉換㈣、 相對照《 i之過剩型態特徵報告532以及相對照相機ι 之非法匹配報告5 3 4。 计异 &lt; 该轉換由轉換分裂器分裂爲3個照相機至參考校 準轉換T_0、T一 1和T—2,各照相機對一個轉換,而對介 於二校準參考座標系統之間的轉換τ一Α2Α而言,爲介於參 考資料與正檢視面板產生之線上資料之間的轉換。所有資 料源、原始影像資料和相對註册轉換之計算資料、過剩和 遺漏特徵以及非法匹配爲檢視工作單元55〇之輸入,相對 於此之執行圖詳細顯示在圖1 2中。 -40- 訂 線 本紙張國國家標準(CNS)A4規格(210^7^ A7 發明說明(38 ) 收ί:圖12,該圖爲檢視單元550之執行圖。檢視單元接 收馬截剳之輸入,各昭 干较 杆 、相機對一個輸入,如圖U顯示之執 元&quot;况日、。檢視工作單元55〇包括第一複合檢視工作單 ’依據照相機0和2提供之外板影像截割運作,以 二檢視工作單元6GG,依據照相機1提供之中央 影像截割運作。 、見,參考圖13,該圖爲顯示外板複合檢視工作單元560 〈功能的執行圖。各外板複合檢視工作單A 560包括一工 =鈿正斋早兀,相當於圖丨之工作縮整器/感興趣視窗產生 态’運作爲如參考圖12所説明接收輸入以及由上而下參考 二该由上而下參考包括例如由感興趣空間領域識別器在所 說明之學系方案期間所產生之感興趣空間領域。對各檢視 觸發而。,例如由上而下視窗或是硬體缺陷或是型態特徵 以及不在任何由上而下視窗内部的觸發,需要額外之檢視 ,工作縮整器570運作爲產生檢視視窗,該視窗識別一檢 視方法以及包含所需之影像資料以執行該方法。該檢視視 窗被放入至檢視視窗佇列572中。測試管理者58〇運作爲 由該檢視視窗佇列572取出檢視視窗以及應用該測試方法 至視窗中的影像資料。容易認知到該測試管理者依據與單 一照相機有關的資料運作。因此,特徵、區域和延伸至照 相機邊界外邵的由上而下視窗或是由至少一照相機重疊的 覆盍區域爲不可分解的,且被放入至未分解彳宁列582,而 冗全分解的缺陷被放入至缺陷仔列5 8 4。 和工作縮整器570以及測試管理者580之運作平行的有 -41 - 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) ---^---τ-------裝--- (請先閱讀背面之注意事項再本頁) - i線· 經濟部智慧財產局員工消費合作社印製 484104 A7Fig. 11 The execution diagram of Fig. 11 is executed during the inspection scheme in the registration generator of Fig. ^ A. A This is performed 1M to the original image data, including color data ⑽, =, and 138; binary data 142, _ΐ 48, hard materials 150, 154, and 158; type characteristic data 16, 164, and 168, and the scanner % Color defect produced by each of the cameras (Figure ib). The registered work unit in the specific embodiment explained by the child is for simple purpose and operates as a feature of the registered camera i, which is a central camera. The workbook 5 1G receives features 164 and reference features 520 ′ from the memory, and operates to generate registration conversions for the relative camera ι, as compared to the “excessive type feature report 532 for i and the illegal match report for relative camera 5” 4. Differentiating &lt; The conversion is split by the conversion splitter into 3 cameras to reference calibration conversions T_0, T-1 and T-2, each camera pair is a conversion, and the conversion between two calibration reference coordinate systems τ- For Α2Α, it is a conversion between reference data and online data generated by the front view panel. All data sources, original image data and calculation data of relative registration conversion, surplus and missing features, and illegal matching are the inputs of the inspection work unit 55. The execution diagrams for this are shown in Figure 12 in detail. -40- Bookmarking Paper National Standard (CNS) A4 Specification (210 ^ 7 ^ A7 Description of Invention (38) Receipt: Figure 12, this figure is an execution diagram of the viewing unit 550. The viewing unit receives the input from Ma Zheyu. Each Zhaogan compares the camera and the camera to one input, as shown in Figure U. "View Day". The inspection work unit 55 includes the first composite inspection worksheet 'based on the camera 0 and 2 to provide cutting of the outer board image The operation is based on the two viewing work units 6GG, which are cut according to the central image provided by the camera 1. See, refer to FIG. 13, which is a diagram showing the external panel composite viewing work unit 560 <function execution diagram. Each external panel composite viewing work The single A 560 includes one job = 钿 正 早早 ,, which is equivalent to the work reducer / interest window generation state of Figure 丨. It works to receive input as described with reference to Figure 12 and refer to it from top to bottom. Bottom references include, for example, the space-of-interest fields generated by the space-of-interest field identifier during the illustrated faculty scheme. Triggered on each view, such as a top-down window or a hardware defect or a type feature And not in office Triggering from the top-down window requires additional viewing. The work reducer 570 operates to generate a viewing window that identifies a viewing method and contains the required image data to execute the method. The viewing window is placed into The view window queue 572. The test manager 58 operates to take out the view window from the view window queue 572 and apply the test method to the image data in the window. It is easy to recognize that the test manager is based on data related to a single camera Therefore, the features, areas, and top-down windows extending beyond the camera's boundary or the overlay area overlapped by at least one camera are indecomposable and are placed in the undecomposed Suining column 582, which is redundant. Fully decomposed defects are placed in the defect row 5 8 4. Parallel to the operation of the work reducer 570 and the test manager 580 are -41-This paper size applies to China National Standard (CNS) A4 (210 X 297) (Mm) --- ^ --- τ ------- install --- (Please read the precautions on the back before this page)-i-line · Printed by the Employees ’Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs 484104 A7

---^---I.--------裝·-- (請先閱讀背面之注意事項再®^本頁) 二額外功能測試單元,CEL監視器單元590和側缺陷監視 备單凡595在複合工作檢視單元56〇中運作。CEL監視器 單元590運作爲接收二進制CEL以及轉換輸入以及定義將 沒有CEL區域的PIM CEL參考。CEL監視器單元590注視 CEL以確足沒有CEL位於領域内,該領域已經由piM CEL 參考指定爲沒有CEL。假使CEL發現於指定爲沒有cel 之領域内時’一缺陷報告被放入至缺陷佇列5 84中。 側缺陷監視器單元595運作爲硬體缺陷和彩色缺陷之過 滅备。PIM Main定義遮罩之領域。假使彩色缺陷或是硬體 缺陷位於由PIM Main定義之區域時,不發出缺陷報告。假 使來色缺卩曰或疋硬體缺陷位於遮罩之領域外部時,則一缺 陷報告被放入至缺陷件列5 8 4中。 .線. 必須注意地是硬體缺陷資料源典型地提供輸入至側缺陷 監視斋單7G 595和工作縮整器57〇以及開關p。典型地開 關P被關閉,所以由硬體缺陷資料源產生之資料不會到達 側缺陷監視器單元595 ,所以缺陷報告只有在硬體缺陷已 經運行由工作縮整器57〇以及測試管理者58〇提供之更進 一步檢視設施之後才被接收。假使開關p爲開啓時,則一 f重報告被發出,該報告有利於測試管理者58〇•在過濾眞 實和假缺陷之有效性的控制和測試。 抑現在參考圖14,該圖爲一執行圖顯示内板複合工作檢視 早兀600之功能,相對該中央照相機,照相機!產生之影 像資料而提供。内板複合工作檢視單元6〇〇之運作類似於 外板複合工作檢視單元560之運作,然而爲處理相對圖n 本纸張尺度翻中關家標準(CNS)A4規格⑵0 x -42- 484104 A7 B7 五、發明說明(4〇 ) 所示的線寬缺陷到達的額外資訊之運作。 線寬檢視工作單元6〗〇 供爲計f稍田万;圖1 A中的線寬計算器,提--- ^ --- I .-------- Installation --- (Please read the precautions on the back first, then ^ this page) Two additional function test units, CEL monitor unit 590 and side defect monitoring Stand-by Fan 595 operates in compound job viewing unit 56. The CEL monitor unit 590 operates to receive a binary CEL and convert inputs and define a PIM CEL reference that will have no CEL area. The CEL monitor unit 590 looks at the CEL to ensure that no CEL is located in the area, which has been designated by the piM CEL reference as no CEL. If CEL is found in the area designated as no cel ', a defect report is placed in the defect queue 5 84. The side defect monitor unit 595 operates as a backup for hardware defects and color defects. PIM Main defines the area of the mask. If color defects or hardware defects are located in the area defined by PIM Main, no defect report will be issued. If the color defect or the hardware defect is outside the masked area, a defect report is placed in the defect part 5 8 4. . Line. It must be noted that the hardware defect source typically provides input to the side defect monitoring 7G 595 and work reducer 57 and switch p. Typically the switch P is closed, so the data generated by the hardware defect data source will not reach the side defect monitor unit 595, so the defect report is only performed by the work reducer 57 and the test manager 58 after the hardware defect has been run. Further inspections of the facilities provided were not accepted. If the switch p is turned on, a repeated report is issued, which is helpful for the test manager 58 to control and test the effectiveness of filtering real and false defects. Reference is now made to FIG. 14, which is an execution diagram showing the function of the inner panel composite work view of the early 600, compared to the central camera, the camera! The resulting image information is provided. The operation of the inner panel compound work inspection unit 600 is similar to the operation of the outer panel compound work inspection unit 560. However, in order to process the relative drawings, the paper standard is translated to the Chinese Standard (CNS) A4 specification. 0x -42- 484104 A7 B7 V. Operation of additional information of line width defect arrival shown in the description of the invention (40). Line width inspection work unit 6 〖〇 The supply is counted as a few thousand dollars; the line width calculator in Figure 1 A, provided

二;:面板36(圖1B)之線上影像線寬。線寬檢 視工作…10運作爲接收線寬參考資料612,以及在説 明之具體實施例中,沪含坌:山 人H 册資料知-= 中央照相機之照相機1的註 應用亏於 L貧料,如所示。線寬檢視工作單元610 :來:二入狂册貧料至該二進制CEL資料,以及將該結果 ⑴ 杈。假使備測到線寬缺陷時,發出線寬缺陷報告 6 1 4 〇 =縮整器單元別,相當於圖1Af的工作縮整器/感 ”趣視窗產生器,運作爲接收輸人,如 明,以及一由上而下參考。必 斤況 叩「^ 4义肩/王思地疋除了由圖1 1顯示 (工作縮整器單it 57〇接收之輸入以外,並接收他輸入, 稱爲線寬缺陷報告614、中央照相機之過剩遺漏報告U 以及中央照相機之非法匹配缺陷報告IM i。 經濟部智慧財產局員工消費合作社印製 口對各檢視觸發而言,例如一由上而下視窗、硬體缺陷或 疋型怨特徵或是線寬缺陷或是過剩/遺漏或是非法匹配以 及不在任何由上而下視窗内部之觸發,需要額外檢視,工 作纟丨目整為570運作爲產生識別檢視方法之檢視視窗以及包 含所需的影像資料以執行該方法。該檢視視窗被放入至檢 視視窗佇列572中。測試管理者580運作爲由檢視視窗仲 列572取得檢視視窗以及應用該測試方法至在該視窗中的 影像資料。容易認知地是該測試管理者依據相對於單—辟 相機之資料運作。因此,特徵、缺陷和延伸至照相機邊界 43 本紙張尺度適用中國國家標準(CNS)A4規格(210 x 297公釐) 484104 A7 B7 五、發明說明(41 ) 外邵的由上而下視窗或是由至少一照相機重疊的覆蓋區域 被視爲不可分解的,且被放入至未分解佇列582,而完全 分解的缺陷被放入至缺陷彳宁列5 g 4。 和工作縮整器570以及測試管理者58〇之運作平行的有 CEL監視器和缺陷監視器單元62〇被提供。監視器單元運 作馬線寬缺陷、彩色缺陷、硬體缺陷、過剩/遺漏缺陷和非 法匹配缺陷。PIM Main定義遮罩之領域以及轉換提供於 1王册4中央照相機Tj的資訊。假使線寬缺陷、彩色缺陷II ;: The line width of the image on the panel 36 (Figure 1B). The line width inspection work ... 10 operates to receive the line width reference material 612, and in the illustrated specific example, the Han application: Shanren H book data knows-= the application of the camera 1 of the central camera is due to the lack of material, As shown. Line-width inspection work unit 610: Come: Second, enter the crazy book to the binary CEL data, and the result. If a line width defect is to be detected, a line width defect report will be issued 6 1 4 〇 = Reducer unit type, which is equivalent to the work reducer / feel "fun window generator in Figure 1Af, which operates to receive input, such as Ming , And a top-to-bottom reference. Be sure to take a look at the "^ 4 Yishou / Wang Sidi" In addition to the input shown in Figure 11 (work reducer single it 57〇, and receiving his input, called Line width defect report 614, central camera excess omission report U, and central camera illegal matching defect report IM i. The printout of the employee consumer cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, for each view trigger, such as a top-down window, Features of hardware defects or type complaints or line width defects or excess / missing or illegal matching and triggers that do not occur inside any top-down window require additional inspection. The task is to perform 570 operations to generate identification views. The view window of the method and contains the required image data to execute the method. The view window is placed in the view window queue 572. The test manager 580 operates to obtain the view view from the view window row 572. And the application of the test method to the image data in the window. It is easy to recognize that the test manager operates based on the data relative to the single camera. Therefore, the characteristics, defects, and extensions to the camera boundary 43 This paper standard is applicable to the country of China Standard (CNS) A4 specification (210 x 297 mm) 484104 A7 B7 V. Description of the invention (41) A top-down window of a foreign camera or a coverage area overlapped by at least one camera is considered indecomposable and is It is placed in the undecomposed queue 582, and the fully decomposed defect is placed in the defective queue 5g 4. The CEL monitor and the defect monitor are parallel to the operation of the work reducer 570 and the test manager 58. Unit 62 is provided. The monitor unit operates with line width defects, color defects, hardware defects, excess / missing defects, and illegal matching defects. PIM Main defines the area of the mask and the conversion is provided in 1 book 4 central camera Tj Information. If line width defect, color defect

、硬體缺陷、過剩/遺漏缺陷或是非法匹配缺陷位於由piM, Hardware defects, excess / missing defects, or illegal matching defects are located by piM

Mam足義之遮罩之領域時,則一缺陷報告被放入至缺陷佇 列584中。 必須注意地是硬體缺陷資㈣、過剩遺漏資料源E i、 非法匹配資料源IMj以及線寬資料源614各提供輸入至監 視器620和工作縮整器57〇以及包含,&quot;。典型地開 關P被關目’所以由上述資料源產生之資料不會到達監視 口口 620田被關閉時,缺陷報告只有在硬體缺陷已經運行 由工作縮整器570以及測試管理者58〇提供之更進一步檢 視 &lt; 犯 &lt; 後才被接收。假使開關p爲開啓時,則一雙重報 口被發出’该報告有利於測試管理者谓在過滤眞實和假 缺陷之有效性的控制和測試。 二压思地疋由该工作縮整器570產生之該檢視視窗可。 以爲二視窗類別的其中之一類別: ⑴由‘人參考樓案取得之預先定義(由上而下)視窗;以 本紙張尺度翻 , “ 裝--- ψ i (請先閱讀背面之注意事項再9本頁) 訂· --線· 經濟部智慧財產局員工消費合作社印制π A7 ------_B7 五、發明說明(42 ) ~(2)不在該由上而下視窗内的缺陷(硬體、過剩/遺漏、線 寬)以及特徵觸發周圍的視窗。 在本發明之較佳具體實施例中,由上而下視窗提供於健 全模式已經建立之特徵。例如,在腿檢視中,健全模式 已經建立於球狀、焊塾、目標以及空穴。較佳地是,該模 式爲動態以及能夠智慧地識別可能不準確地合於預先定義 模式之形狀,但依據一般化之檢視常式以各種方式變化。 較佳地是,檢視視窗爲提供於具有未知形狀或不是依據 -杈f預先定義之形狀的特徵。對該視窗而言,檢視爲較 佳地猎由比較一般方法而執行,直接將正檢視之面板的線 上影像中的形狀和存在於參考之相對應區域中的特徵比較 。較佳地利用邊緣外圍之比較的比較模式如下文説明般利 用0 容易認知地是藉由組合區域相關的局部化模式功能與比 較參考功能,檢視能力被一般地最佳化爲使具有預先^義 特徵之物件和不具有預先定義特徵之物件的偵測能夠作用^ 執仃於各由上而下檢視視窗類型之功能被定義和儲存在 檔案中。圖15A-15C的表列出各視窗類型以及相對應測試 功能(或是當該視窗被附接於複合功能時爲功能列表)。圖 1 5 A-1 5C的表亦依據視窗和回轉狀態説明功能之動作,包 含決定該視窗將被傳送至何輸出佇列的目的地字串。 再次參考在圖12顯示之執行圖,所有3個照相機產生之 未分解佇列582被放入至工作多重截割管理者63〇。此工 作收集具有相同識別標籤之所有未分解視窗以及組合由择 -45- 484104 A7 五、發明說明(43 ) 合截割產生之檢視視窗,執行其功能和放入缺陷至統一缺 陷佇列640中。圖1 6的表列出在該檢視方案課程中執行多 重截割管理者630的可能功能。 缺陷處置器工作單元650較佳地運作爲接收校準轉換資 料以註册於正檢視面板36(圖1B)之參考影像和線上影像之 間以及統一缺陷報告由統一缺陷佇列64〇產生。缺陷處理 器工作單7C 650輸出一列表之缺陷660,該缺陷由統一缺 陷佇列640擷取。可選地是,假使在建構檔案指導時,缺 陷工作處理器650輸出缺陷視窗之檔案,伴隨其相關資料 例如CEL、彩色CEL、型態特徵、回應視窗類型之缺陷。 该缺陷視窗之檔案有利於例如除錯缺陷處理器6 5 〇之運作。 視窗化檢視環婊 經濟部智慧財產局員工消費合作社印制π ------I.--------裝·-- * (請先閱讀背面之注意事項本頁) 容易認知地是SIP基準之影像處理假設&quot;感興趣,,發生, 由影像處理觀點來看,典型地發生在方形感興趣區域(R〇工) 或疋只有佔據在檢視下之物件的表面領域小部分之視窗。 因此’ SIP檢視包括至少一些檢視常式,該常式較佳地爲 限於感興趣領域。此方式避免必須在延伸之影像上執行複 雜的檢視方法以識別相信位於圍繞可識別檢視之檢視觸發 的感興趣區域内部之可檢視特徵。 爲了加速計算和許可更複雜影像之瞭解,較佳地3部分 影像處理被利用。 在處理的第一階段中,預先定義之感興趣空間區域例如 由上而下視窗被定義爲額外檢視觸發且儲存於離線記憶體 中。該由上而下視窗定義感興趣區域之參考影像資訊包括 -46- 484104 經濟部智慧財產局員工消費合作社印制衣 A7 B7^_______ 五、發明說明(44 ) 由上而下視窗,以及識別影像處理功能或是影像處理功能 順序,爲應用於分析與在檢視下之物件的線上影像内之由 上而下視窗相同的空間位置之感興趣區域。 在處理的第二階段中,快速”快速和壞’’、較佳地(但需要 限於)硬體基準之影像處理被用以識別額外檢視視窗以及 用以產生剖析之在檢視下之整體物件的線上影像之基本影 像資料。此剖析之基本影像資料被傳送至該Sip以用於SIP 影像處理和分析。 在處理的第三階段中,3部分影像處理執行爲較佳地執 行。第一,計算工作爲總體應用至該剖析之基本影像資料 以計算該影像有關之計算資訊例如線寬計算、過剩特徵、 过漏特徵、非法匹配特徵和註册轉換。第二,感興趣視窗 被定義在額外檢視視窗周圍例如由第二階段和部分第三階 段輸出之預定特徵和候選缺陷。第三,額外檢視視窗爲在 第一階段中建立之由上而下視窗接收以及爲位於由上而下 視窗外部之額外檢視觸發接收,額外檢視視窗被產生。 額外視自包含由上而下視窗和定義在額外檢視觸發周圍 之視窗爲動態地封裝以包括在檢視下之物件的線上影像之 感興趣區域的基本影像資料、合適影像處理功能之識別或 是需要檢視感興趣區域之順序之影像處理功能以及由影像 處理之影像處理功能所需要的任何參考資料。該影像處理 功能爲回應感興趣區域類別而較佳地選擇以提供在檢視視 窗中之區域類型的最佳影像檢視。 在先引才疋到足車又佳^構中,智慧(和資源需求)影像理 -------Μ-------裝--- * (請先閱讀背面之注意事項再本頁) &gt;11· 丨線. -47- A7 五、 發明說明(45 B7 ,:1 /δ 1Ϊ1據特別的感興趣區域而只應用至特定檢視視窗 而非應Μ整個物件±。 點ft外“見視窗檢視觸發,爲R01或是视窗的中央 •,々。如所注意地是,視窗檢視觸發可能爲 &quot;&lt;缺陷(例如過剩/遺漏或是線寬報告); t 如型態事件(在電路中的島形或是開端” 二下觸發,例如由使用者定義之預先定義之位置。 ^ , 上而下觸發可以是由使用者在球狀領域中的所 =周圍緣畫的方形R0I,或是另一方面爲預先制二斤 仃又哫明又學習方案的結果之位置。 將在觸發周圍建立的柃 6 各類型視窗觸發」:=、、之規範典型地附接於 中於H q、卜 觸發較佳地包括期望在視窗 二,R ’以及將馬視窗内部之資料執行的計算 疋義。該定義典型地制訂於特殊建構檔案中。 '〈 :旦基本影像資料在視㈣㈣裝時,該檢視視窗 處理功能依據檢視視窗以及使用視窗内部資 \ 0’ ’ S理功能產生附於該視窗之額外資料。— 些在視窗上的處理功能在下文中說明。 本發明之-較佳具體實施例的特別特徵爲可以局部 至各種視窗内部之感興趣區域的不同功能。因Λ,例: 與由上而下視窗有關之感興趣區域而t,智慧和健 板式功能可以不應用與整個影像無分別的這些功能而應^ 至感興趣區域。在由上而下視窗模式化的特徵爲特別:人 -48- 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公爱 ------I.--------裝--- c請先閱讀背面之注意事項再本頁} -J^T. .線. 經濟部智慧財產局員工消費合作社印製 A7When Mam is the masked area of righteousness, a defect report is placed in the defect queue 584. It must be noted that hardware defect resources, excess missing data sources E i, illegal matching data sources IMj, and line width data sources 614 each provide input to the monitor 620 and the work reducer 57 and include, &quot;. Typically, the switch P is closed. Therefore, the data generated by the above source will not reach the monitoring port. When the 620 field is closed, the defect report is only provided by the work reducer 570 and the test manager 58. It was accepted after further inspection of &lt; guilty &lt;. If the switch p is on, a double report is issued. This report is beneficial to the control and test of the test manager's effectiveness in filtering the actual and false defects. Secondly, the viewing window generated by the work reducer 570 may be considered. I think one of the two types of windows: ⑴ The pre-defined (top-down) windows obtained from the case of 'Human Reference Building'; on this paper scale, "Install --- ψ i (Please read the notes on the back first (Re-page 9) Order ·-· Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs π A7 ------_ B7 V. Description of the invention (42) ~ (2) are not in the top-down window Defects (hardware, excess / missing, line width) and features trigger surrounding windows. In a preferred embodiment of the present invention, top-down windows provide features that have been established in sound mode. For example, in a leg view The sound model has been established for spheres, welds, targets, and cavities. Preferably, the model is dynamic and capable of intelligently identifying shapes that may not accurately fit into a predefined pattern, but based on generalized inspection The formula varies in various ways. Preferably, the viewing window is provided for features that have an unknown shape or a shape that is not pre-defined according to -f. For this window, the viewing is better performed by a more general method Directly The shape in the online image of the panel being viewed is compared with the features existing in the corresponding region of the reference. The comparison mode that makes better use of the comparison of the periphery of the edge is explained below using 0. It is easy to recognize that it is related by combining the regions Localization mode function and comparison reference function, the viewing ability is generally optimized to enable the detection of objects with pre-defined features and objects without pre-defined features. ^ Hold on each top-down view window The functions of the type are defined and stored in the file. The table in Figure 15A-15C lists each window type and the corresponding test function (or a function list when the window is attached to a composite function). Figure 1 5 A- The table of 5C also describes the function of the function according to the window and the state of rotation, including the destination string that determines the output queue to which the window will be transmitted. Referring again to the execution diagram shown in FIG. The decomposition queue 582 is put into the job multi-cut manager 63. This job collects all undecomposed windows with the same identification label and the combination is selected by -45-4841 04 A7 V. Description of the invention (43) The inspection window generated by the combined cutting, executes its functions and puts the defects into the unified defect queue 640. The table in Figure 16 lists the multiple cutting management in the course of the viewing plan Possible functions of the user 630. The defect handler working unit 650 preferably operates to receive calibration conversion data for registration between the reference image and the online image in the front view panel 36 (FIG. 1B) and the unified defect report is organized by the unified defect queue 64 〇 Generated. The defect processor worksheet 7C 650 outputs a list of defects 660, which are retrieved by the unified defect queue 640. Optionally, if the defect work processor 650 outputs the file of the defect window when constructing the file guidance Accompanied by its related data such as CEL, color CEL, type characteristics, and defects in the type of response window. The file of the defect window facilitates the operation of the defect processor 650, for example. Window view printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. ------ I .-------- Equipment --- * (Please read the caution page on the back first) Easy to recognize The ground is the SIP-based image processing hypothesis &quot; interesting, occurs, and from the image processing point of view, typically occurs in a square area of interest (R0) or only a small part of the surface area of the object under inspection Window. So a 'SIP view includes at least some view routines, which are preferably restricted to the area of interest. This approach avoids having to perform complex viewing methods on the extended image to identify viewable features that are believed to be located within the region of interest that surrounds the view-triggered view trigger. In order to speed up the calculation and permit the understanding of more complex images, preferably 3 parts of image processing are utilized. In the first stage of processing, a predefined region of interest area, such as a top-down window, is defined as an additional view trigger and is stored in offline memory. The reference image information that defines the area of interest from the top-down window includes -46- 484104 The printed clothing A7 B7 ^ _______ of the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. 5. Description of the invention (44) The top-down window and the identification image The processing function or image processing function sequence is an area of interest that is applied to analyze the same spatial position of the top-down window in the online image of the object under review. In the second stage of processing, fast "fast and bad", preferably (but limited to) hardware-based image processing is used to identify additional viewing windows and to generate a profile of the overall objects under review. The basic image data of the online image. The basic image data of this analysis is transmitted to the Sip for SIP image processing and analysis. In the third stage of processing, 3 parts of image processing are performed better. First, calculation The task is to apply the basic image data of the analysis in general to calculate the calculation information related to the image such as line width calculation, excess features, missing features, illegal matching features, and registration conversion. Second, the window of interest is defined in the additional viewing window The surroundings are, for example, predetermined features and candidate defects output from the second stage and part of the third stage. Third, the additional viewing window is received from the top-down window created in the first stage and is an additional location outside the top-down window A view trigger is received, and an additional view window is generated. The additional view self-contained top-down window and defined in the additional view trigger The enclosing window is the basic image data of the region of interest that is dynamically packaged to include the online image of the object under review, the identification of suitable image processing functions or the image processing functions that require the order of viewing the regions of interest, and the image processing Any reference material required by the image processing function. The image processing function is preferably selected in response to the category of the area of interest to provide the best image view of the type of area in the viewing window. ^ In the construction, wisdom (and resource requirements) imaging theory ------- M ------- install --- * (Please read the precautions on the back before this page) &gt; 11 · 丨 line -47- A7 V. Description of the invention (45 B7 ,: 1 / δ 1Ϊ1 according to the special area of interest and only apply to a specific viewing window instead of the entire object ±. Point ft "See the window view trigger, R01 Or the center of the window, 々. As noted, the window view trigger may be a &quot; &lt; defect (such as excess / missing or line width reporting); t such as a type event (island in the circuit or Is the beginning "trigger twice, such as Pre-defined position defined by the user. ^, The top-down trigger can be the square R0I drawn by the user in the spherical area = the surrounding edge, or on the other hand is a pre-made two pounds. The position of the result of the learning scheme. 柃 6 various types of window triggers that will be established around the trigger ": = ,, the norm is typically attached to the middle of H q, and the trigger preferably includes the expectation in window two, R ' And the definition of the calculation performed by the data inside the Ma window. The definition is typically formulated in a special construction file. '<: Once the basic image data is visually installed, the processing function of the viewing window is based on the viewing window and the use of window internal resources \ 0 '' s processing function generates additional information attached to the window. — Some processing functions on the window are explained below. A special feature of the preferred embodiment of the present invention is the different functions that can be localized to regions of interest inside various windows. Because Λ, for example: the area of interest related to the top-down window, the smart and robust functions can be applied to the area of interest without applying these functions that are not different from the entire image. The characteristics of the top-down window pattern are special: human-48- This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 public love ------ I .------- -Installing --- c Please read the notes on the back before this page} -J ^ T. .Line. Printed by A7, Consumer Cooperatives, Intellectual Property Bureau, Ministry of Economic Affairs

、發明說明(46 ) γ八有已知可以容易表示和由合適方法檢視之特徵,例如 圓可以由中心點和半徑加以表示。 、對與非由上而下參考視窗檢視觸發有關之感興趣區域而 &amp; ’以比較爲基準的影像處理功能較佳地可以被應用。例 如以比較爲基準的影像處理功能較佳地適合於檢視特徵以 及具有形狀和大小特徵的候選缺陷爲不穩定以及不能容易 地在之前加以模式化。 如比較之一較佳方法,在該學習階段中二進制cEL被組 合以及被轉換爲包括有向元素之向量線。該有向元素代表 介於型態特徵與參考影像中的基板之間的邊緣,且儲存在 冗憶體以在檢視下之物件的線上影像之檢視期間使用。 CEL和向量化之線元素的產生代表在下文參考圖21A-21D 而更詳細説明,而CEL至向量比較功能在下文參考圖 30A-3 2B而更詳細説明。下列較佳步驟有利於瞭解視窗化 之運作。 步驟I :使用者在空間領域周圍之參考物件中定義視窗 ’典型地包括至少一單元預定模式形狀。期待在檢視之物 件如面板36(圖1B)中,由該模式定義之至少一形狀位於由 該使用者在該參考物件中定義之相對應區域的空間領域中 。一合適的模式形狀爲較佳地由離線儲存之模式化幾何形 狀館選擇。較佳地是,各模式形狀爲數學式地定義。例如 ,圓形f’球”882(圖27)如典型地在BGA上發現,可以由中心 點884和半徑定義。 步驟II :定義參考區域之屬性。例如,使用者可以設定 -49- 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) --------------裝--- (請先閱讀背面之注意事項再本頁) ▲π. --線. 經濟部智慧財產局員工消費合作社印製 A7 B7 五、 發明說明(47 ) 相對於圓形球882位置、士 ί二甘/u u ” ^ 大小和其他特徵之檢視影像的許 了差異之參數。因&amp;,中心點884可以定義爲必須位於預 疋座標之可接受距離内’而沿著圓周之各種位置的半徑‘ 乂定我爲必/貞在可接$半的預定範圍内。其他額外來數 可以被設定爲如其他特徵、形狀或是影像元素如線或是邊 緣是否爲在圍繞該模式化形狀的區域内。步驟j和步驟Η 馬較佳地在上文説明之學習階段中執行。 口步驟III :檢視物件之影像在該學習階段中取得。較佳地 疋,影像使用#由此說明的本發明之一較佳具體實施例的 裝置取得,以預先處理以產生至少一形式之基本影像資料 如CEL、彩色CEL、型態特徵以及和影像有關的其他資訊。 步驟IV :在檢視物件之線上影像中,其餘檢視區域被隔 離。其餘檢視區域之各檢視區域較佳地爲空間地相當於在 步驟II中足義之參考區域的其中之一區域或是另一方面相 當於圍繞一些形式之預定檢視觸發,如使用者在‘設定爲需 要額外檢視的缺陷或是特徵期間定義的空間區域。 經濟部智慧財產局員工消費合作社印制π 較佳地是,其餘檢視區域之各檢視區域被組裝爲額外檢 視視W中,該視窗包括儲存之形狀模式以及基本影像資料 ’識別將在該視窗上執行的至少一檢視功能以及制訂任何 使用者足義之可以由影像處理功能需要的參數。例如,假 使額外檢視區域包含球882時,該視窗較佳地包含在其餘 檢視視窗中的區域之所有CEL、任何由此發現的型態特徵 、線見處訊以及類似物。另外,該檢視視窗典型地制訂將 依據該球運作的檢視功能以及球的使用者定義參數如 -50- 484104 A7 五、發明說明(48 ) 距離所需位置的許可差異和該圓周之不同區段之半徑的許 可範圍。 因此,假使檢視視窗爲圍繞候選缺陷之區域而產生時, 功把運作爲特別識別該候選缺陷,典型地與用以識別型 態特徵之功能不同,爲包含在該額外檢視視窗中。 步驟V :與額外檢視視窗組裝的影像處理功能在該視窗 中依據基本資料執行以及依據該使用者定義之參數評估。 較佳地是,假使額外檢視視窗包含模式化形狀時,包含 在該額外檢視視窗中的基本影像資料被處理以產生代表特 徵之幾何物件。所認知地是基本影像資料爲由在與該參考 視窗相關連的空間位置中正在檢視之物件的線上影像演譯 出。例如,假使正在額外檢視視窗中檢視之特徵爲球 時,則在檢視視窗中的所有CEL可以被組合以產生代表球 圓周的線。一旦該幾何形狀被產生時,則在檢視視窗中的 孩幾何形狀與在該參考視窗中的模式比較。 所認知地是許多可能形狀的館可能被建立,不 期待所有可能形狀,特別是那些代表缺 性隨機表示。 由其特 經濟部智慧財產局員工消費合作社印製 因:二本發明之較佳具體實施例中,提供不用參考數 二:':^ 析與該幾何特徵之形狀的功 之特別位置檢視之物件的幾何形狀與期望= 生與比較幾何形狀表示而被完成,較佳地是如下 H 由產 …力-,或疋猎由在相關技藝之傳統所知 51 - χ29τΠΤ ---^---^--------裝--- (請先閱讀背面之注意事項再41^本頁) _線' 本纸張尺度賴 484104 五、發明說明(49 的位元映射表比較。 步驟VI ··報告產生爲 — 馬彳日不在扣視特徵和屬性之呈現、缺 之和位置以及是否任何的特徵爲缺陷。 g IP ϋ交佳二 考圖17 ’該圖爲由影像處理器5(圖1 A)輸入之輸 入貝枓的較佳資料結構圖,可以使用於檢視遍的本文中 。该原始資料在作用爲圖1輸入,典型地包括如圖17顯示 而組織(字70串流。典型地,該SIP通道工作轉換輸入原 始貧料爲原始資料陣列元素類型表示,其中該元素定義爲 下列其中〈_ :二進制咖、彩色瓜、快動影像、型態 特徵、缺陷、或是彩色缺陷。該資料結構陣列之結構和資 料結構陣列之各元素類型在下文中詳細説明。在本發明之 較佳具體實施例中,該原始資料如圖17所説明的資料結構 接收以及例如由圖1B顯示之資料轉換器和分裂器單元12〇 分裂和轉換爲可以包含在資料結構陣列之資料結構。 經 濟 部 智 慧 財 產 局 員 工 消 費 合 作 社 印 製 典型報告元素之標頭,説明由掃描器34(圖丨)之一照相機 接收之掃描影像之一 在圖18中解釋。如所示,該標頭 典型地指定該報告元素之類型,例如,發生在某行丫中的 事件類型、多少次(cnt)以及何照相機或是截割。 用於識別報告元素之類型的較佳類型化設計爲下列3位 元設計: 〇 —報告沒有類型 1 --報告彩色CEL缺陷 、 2 —報告缺陷 -52- 484104 A7 B7 五、發明C明(50 4 報告與邊緣一致的CEL 報告快動 經濟部智慧財產局員工消費合作社印製 、 】視爲照相機之數目,例如3照相機被用以影像化 &quot;亥面板。多數照相機和截割考量在下文討論。 車又佳SIP資料結構陣列爲一資料源,稱爲,,資料結構陣 素”。此資料結構將該資料視爲組織成線,以增加丫座 “馬順序。各線包含Q或更多資料項目(在所有训原始資 料項目中爲4位元組)之特別類型或是元素。可存取線的範 圍包括在影像中的最小線往上至在影像中的最大線。空的 貧料源在碰到下列狀況時被識別·· 最小線&gt;最大線 當資1牛源被建立時,最小線的値被設定爲G而最大線的 値被-又疋馬-1。孩資料源制定在掃描中最大線的數目,並 較佳地大於或是等於由掃描器產生之最大線的座標。- 因此,在掃描影像中的各行相當於在資料結構中制定的 行。在任何時刻’介於最小線與最大線之間的行數相當於 備女於處理之掃描影像行。 在資料結構陣列中的各元素典型地只具有一生產 少一消費者。線只可以由該生產者以及只有假使所增加 的y座標大於該資料源中的最大線時,增加至該資料源、。 當-線被增加時,介於最大線和新線(不包含該新線)之 的所有線被增加爲空線,其中各空線包含q個資料 假使該新線不是空白時,該新線以所有其元素被增如而最 大線被更新爲等於新的總數目線。資料源之生產者必 訂 線 [___— -53- 本紙張尺度適用中國國家標準(CNS)A4^T^;_297公爱_y 484104 A7 B7 五、發明說明(51 ) 定在掃描結束時,兮咨# 泣 大線。所認知地是:最::的取大線將等於在掃描中的最 也疋,瑕大線可能爲空白。 經濟部智慧財產局員工消費合作社印制农 本紙張尺度1®財i^^^CNS)A4麟(⑽— 公釐) 484104 A7 B7 五、發明說明(52 經 濟 部 智 慧 財 產 局 員 工 消 費 合 作 社 印 源執行計算。計算的結果被放入至至少一輸出資料源。一 t ί工作較佳地與資料處置無關(例如_内部緩衝器或是介 t.貝料與計算之間同步的溢流),但是依據某些資料工作。 資料處置議題典型地由該SIP管理者處理。 通道工作於處理在電腦上運行時負責SIP之連接至外部 世界,例如依據輸入資料運作以解多工該輸入資料以及轉 換該^料爲可由該SIP使用的格式。各資料通道典型地附 =至實體通道(DMA、TCP/IP或是檔案通道)。輸入通道轉 ^輸入資料爲資料源。輸出通道爲附接至資料源以及將該 源(其被更新時)寫至指定通道中。檔案通道之使用允 β午掃描不*要實際連接至DMA或是連接至TCP/IP通道就 容易模擬。輸入資料可以簡單地由包含與由DMAT尤 TCMP通迢到達之資料具有相同格式的資料之樓案注入。 處功::顯地是檢視工作,呼叫依據資科執行影像 3 ·執行圖 -既定執行圖(由此亦定爲”掃描方由 在該方案中參與之工作定義。 貝杆源 現在參考圖19,由該圖注意到-掃描方案—般可以由 此顯示之圖表示。 又J以由 道在:::方案中,該SIP連接至二輸入通道和-輸出通 /、有-DMA通道_產生資料源2以及具有 通道610產生資料源1。具有3計算單元(工作):工作i 用貧料源2而產生資料源3;工作2使用資料源i而不產 是 訂 線 和 在 使 生 本紙張尺度(⑶ 55 &gt;&lt;297^7 五、 發明說明(53) 源…3使用資料源3而產生資料源==/ιρ通道(通道⑽…工作3更新:: 4·建構檔案 執行圖和由通道、作 爲制訂在建構樓案中。的所!參數典型地 不^重新編譯或是重新鏈結就運行/不同知為万案可以 掃指万案包含在建構樓案使得擴 =軟體發展觀點來看,其中之-最花費::: 欲:型地包含資料處理和介於資料獲取與計算之間的同特 ’二而可以爲非常類似或是甚至對許乡Α〇ι(自動光學 視)應用爲相等。較佳地是,該SIP被建立,如此容易捧 工作以及容易增加資料源’爲内建模板資料源之激發: 此’馬增加_資料源或{資料源_,一合適類別之資 料源或是工作由已經存在的相對應基本類別之資料源:、 工作演繹出。盡可能較多之工作典型地因此轉換爲基本疋 別(藉由模板樣型之延伸使用)。 現在參考圖20,該圖爲二處理之執行圖。一既定執 :以典型地由至少-SIP加以處理。爲完成此工作,該 行圖可以劃分爲一些執行圖,各自在 在-中之-工作產生的資料源可以由另一 SIP::二 用/如所需,一資料源由第一 SIP寫入至TCP/IP通道而 第一 SIP由該TCP/IP通道讀出。最小串音產生介於 處理之間的短計算時間。 裝 步 加因 資 類 圖執由 由sip 線 56- 本纸張尺度適用中準(CNS)A4規格(210 X 297公釐) 484104 A7 五、發明說明(54 )Explanation of the invention (46) γ has known characteristics that can be easily expressed and viewed by appropriate methods, for example, a circle can be represented by a center point and a radius. For areas of interest related to non-top-down reference window viewing triggers, &amp; ′ comparison-based image processing functions can be better applied. For example, comparison-based image processing functions are better suited for viewing features and candidate defects with shape and size features that are unstable and cannot be easily modeled before. As a preferred method of comparison, the binary cELs are combined and converted into vector lines including directed elements during this learning phase. The directional element represents the edge between the pattern feature and the substrate in the reference image, and is stored in the memory for use during the review of the online image of the object under review. The generation of CEL and vectorized line elements is described in more detail below with reference to FIGS. 21A-21D, and the CEL-to-vector comparison function is described in more detail below with reference to FIGS. 30A-3 2B. The following best steps are helpful for understanding how windowing works. Step I: The user defines a window in a reference object around the space domain, typically including at least one unit of a predetermined pattern shape. It is expected that in the inspected object such as panel 36 (Fig. 1B), at least one shape defined by the mode is located in the spatial area of the corresponding area defined by the user in the reference object. A suitable pattern shape is preferably selected by a patterned geometric shape store that is stored offline. Preferably, each mode shape is defined mathematically. For example, a circular f'ball "882 (Figure 27) is typically found on a BGA and can be defined by the center point 884 and the radius. Step II: Define the attributes of the reference area. For example, the user can set -49- this paper The dimensions are applicable to China National Standard (CNS) A4 specifications (210 X 297 mm) -------------- install --- (Please read the precautions on the back before this page) ▲ π. --Line. Printed by A7 B7 of the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the invention (47) Relative to the round ball 882 position, Shi Ergan / uu ”^ Size and other characteristics of the inspection image make a small difference Parameters. Because of &amp;, the center point 884 can be defined as having to be located within an acceptable distance of the predetermined coordinates, and the radius of various positions along the circumference, ‘set me as must / zheng within a predetermined range of $ 0.5. Other extras can be set, such as whether other features, shapes, or image elements such as lines or edges are within the area surrounding the patterned shape. Step j and step Η are preferably performed in the learning phase described above. Step III: Obtain an image of the viewing object during this learning phase. Preferably, the image is obtained using the device of one of the preferred embodiments of the present invention described herein to pre-process to generate at least one form of basic image data such as CEL, color CEL, type features, and image-related Additional information. Step IV: In the online image of the viewing object, the remaining viewing areas are isolated. Each of the other viewing areas is preferably one of the areas which is spatially equivalent to the sufficient reference area in step II or on the other hand is equivalent to a predetermined viewing trigger around some form. Defects that require additional review or areas of space defined during the feature. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. It is preferred that each of the remaining viewing areas is assembled into an additional viewing view. The window includes the stored shape mode and basic image data. Perform at least one viewing function and formulate any user-defined parameters that can be required by the image processing function. For example, if the additional viewing area contains a ball 882, the window preferably contains all the CELs of the areas in the remaining viewing windows, any type features found therefrom, line information, and the like. In addition, the viewing window typically formulates the viewing function that will be based on the operation of the ball and user-defined parameters of the ball, such as -50-484104 A7. V. INTRODUCTION (48) Permissible differences in distance from required positions and different sections of the circle The permitted range of the radius. Therefore, if the viewing window is generated around the area of the candidate defect, the function of the function is to specifically identify the candidate defect, which is typically different from the function used to identify the type feature, and is included in the additional viewing window. Step V: The image processing function assembled with the additional viewing window is executed in the window based on the basic data and evaluated based on the user-defined parameters. Preferably, if the additional viewing window contains a patterned shape, the basic image data contained in the additional viewing window is processed to generate a geometric object representing the feature. What is recognized is that the basic image data is deduced from the online image of the object being viewed in the spatial position associated with the reference window. For example, if the feature being viewed in the additional viewing window is a ball, all CELs in the viewing window can be combined to produce a line representing the circumference of the ball. Once the geometry is generated, the child geometry in the viewing window is compared with the pattern in the reference window. It is recognized that many libraries of possible shapes may be built, and all possible shapes are not expected, especially those that represent defective random representations. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs Reason: 2. In a preferred embodiment of the present invention, an object that does not need to be referenced to analyze the special position of the shape of the geometric feature is provided. The geometry and expectations = are produced and compared by the representation of geometric shapes, preferably as follows: H is produced by productivity ... or hunting is known by tradition in the relevant art 51-χ29τΠΤ --- ^ --- ^ -------- Install --- (Please read the precautions on the back first and then 41 ^ this page) _Line 'The paper size is based on 484104 V. Description of the invention (49 bit map comparison. Step VI ·· The report is generated—Ma Liri does not deduct the presentation of features and attributes, the position of the sum and whether any features are defects. G IP ϋ 交 佳 二 考 Figure 17 'This picture is made by the image processor 5 (Figure 1 A) A diagram of the preferred data structure of the inputted input bets can be used in the text of the review. The original data is used as input in Figure 1, typically including the organization (word 70 stream as shown in Figure 17). Ground, this SIP channel works to convert input raw lean material into raw data array element Type representation, where the element is defined as <_: binary coffee, color melon, snap action image, type feature, defect, or color defect. The structure of the data structure array and each element type of the data structure array are described below. Detailed description. In a preferred embodiment of the present invention, the original data is received as shown in the data structure illustrated in FIG. 17 and is split and converted, for example, by the data converter and splitter unit 12 shown in FIG. 1B to be included in the data. The data structure of the structure array. The head of a typical report element printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, explaining that one of the scanned images received by one of the scanners 34 (Figure 丨) is explained in Figure 18. As shown The header typically specifies the type of the report element, for example, the type of event that occurred in a row, how many times (cnt), and which camera or clip. Better type to identify the type of report element Design is the following 3-bit design: 〇—Report no type 1—Report color CEL defect, 2—Report defect-52- 48410 4 A7 B7 V. Invention C (50 4 CEL report consistent with the margins CEL report Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, the number of cameras regarded as the number of cameras, for example, 3 cameras are used for imaging &quot; Hai Panel Most camera and cutting considerations are discussed below. Che Youjia ’s SIP data structure array is a data source called, data structure element. ”This data structure treats this data as a line to increase the number of“ Horse order. Each line contains a special type or element of Q or more data items (4 bytes in all training original data items). The range of accessible lines includes the smallest line in the image up to the image The largest line in. An empty lean source is identified when it encounters the following conditions: Minimum line &gt; Maximum line When the source is set up, the minimum line's 値 is set to G and the maximum line's 値 is-again 疋 -1 . The data source specifies the maximum number of lines in the scan and is preferably greater than or equal to the coordinates of the maximum lines generated by the scanner. -Therefore, each line in the scanned image is equivalent to the line specified in the data structure. The number of lines between the minimum line and the maximum line at any time is equivalent to the scanning image line prepared by the girl. Each element in the data structure array typically has only one producer and one consumer. Lines can only be added to the data source by the producer and only if the increased y-coordinate is greater than the largest line in the data source. When the-line is increased, all lines between the maximum line and the new line (excluding the new line) are added as empty lines, where each empty line contains q data. If the new line is not blank, the new line With all its elements incremented, the maximum line is updated to equal the new total number of lines. The producer of the data source must order the line [___— -53- This paper size applies to the Chinese National Standard (CNS) A4 ^ T ^; _297 Gongai_y 484104 A7 B7 V. Description of the invention (51) At the end of the scan,兮 议 # wee big line. It is recognized that: taking the largest line of :: will be equal to the maximum in the scan, and the defective line may be blank. Printed agricultural paper size 1 by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 1®Cai i ^^^ CNS) A4 Lin (⑽—mm) 484104 A7 B7 V. Description of the invention (52 Employees’ Cooperatives of the Intellectual Property Bureau of the Ministry of Economics ’print source Perform calculations. The results of the calculations are put into at least one output data source. A work is preferably independent of data disposition (for example, an internal buffer or an overflow that synchronizes between the material and the calculation), However, the work is based on certain data. The data disposal issues are typically handled by the SIP manager. The channel work is responsible for connecting SIP to the outside world when it is running on a computer, such as operating on input data to demultiplex the input data and converting The data is in a format that can be used by the SIP. Each data channel is typically attached to a physical channel (DMA, TCP / IP, or file channel). The input channel is converted to the input data as a data source. The output channel is attached to the data Source and write the source (when it is updated) to the specified channel. The use of the file channel allows β noon scans * It is easy to actually connect to the DMA or TCP / IP channel The input data can be simply injected from the building plan containing the data with the same format as the data reached by DMAT and TMP. Communication :: Obviously it is the inspection work, and calls to execute the image according to the asset department The scheduled execution map (and hence the "scanning side" is defined by the work involved in the scheme. Beiganyuan now refers to Figure 19, which is noted from the figure-the scanning scheme-which can generally be represented by this diagram. Also J The reason is in the ::: scheme, the SIP is connected to two input channels and -output channel /, -DMA channel_generating data source 2 and channel 610 to generate data source 1. With 3 computing units (work): work i uses data source 2 to generate data source 3; job 2 uses data source i instead of production to make an order and to adjust the paper size (CD 55 &gt; &lt; 297 ^ 7 V. Description of the invention (53) source ... 3 Use data source 3 to generate data source == / ιρ channel (channel ⑽ ... work 3 update :: 4: construction file execution map and the use of the channel as the formulation in the construction building case. The parameters are typically not re-created Compile or relink and run The sweeping finger case is included in the construction building case to make the expansion = software development point of view, among which-the most expensive: :: want to: include data processing and the same characteristics between data acquisition and calculation, and can be Very similar or even equivalent to Xu Xiang Αι (Automatic Optical Vision) application. Preferably, the SIP is established, so easy to work and easy to add data sources' as an inspiration for the built-in template data sources: this 'Ma increase_ data source or {data source_, a suitable type of data source or job is derived from an existing source of the corresponding basic category :, job deduction. As much work as possible is typically converted to basic Farewell (by extension of the template style). Reference is now made to Fig. 20, which is an execution diagram of the two processes. An established rule: typically handled by at least -SIP. In order to complete this work, the line graph can be divided into some execution graphs, and the data sources generated by each of the work in-can be used by another SIP :: dual purpose / if required, a data source is written by the first SIP To the TCP / IP channel and the first SIP is read by the TCP / IP channel. Minimal crosstalk results in short calculation times between processing. Installation Steps Cain Type Picture by sip line 56- This paper size is applicable to the standard (CNS) A4 (210 X 297 mm) 484104 A7 V. Description of the invention (54)

毛吾形式料-CEL =節説明較佳方法’藉由該方法資料以sip中之資 ^,。構表不於基本影像資料,相對於使料bga檢視的本 發明之較佳具體實施例。Mao Wu form material -CEL = section explains the better method ′, the information in this method is used in the sip ^ ,. The structure is not based on the basic image data, and is relative to the preferred embodiment of the present invention which enables the material to be viewed.

二進制CEL 々在下列之討論中,使用下列定義之CEL(外目元素):啦 馬像素内疋我〈單一有向線。在像素中之位置和方位計算 爲如鄰近像素上之反應強度梯度差異的函數。CEL聚集- 般定義介於由二進制影像(稱爲只包括二群體的影像)形成 之樣型内二群體之間的„,以及運作爲定義具有次像素 精確度的邊界。假使在影像内的各CEL起源於一方向時, J σ CEL之方位被定義,所以在只包括白色和黑色區域的 二進制影像中之”白色”區域,總是位於有方位或是定向cEL 之左方。 CEL计算爲d〇G(鬲斯差異)零跨越點之函數,如歸屬於 Caspi等人的美國專利案號爲第5,774,572號和第 號之專利文獻中説明,該專利在此處以提及的方式併入本 又中。其他合適的邊緣偵測技術爲在麻州Reading市 Addison Wesley出版社於1987年出版之c Gonzalez和p Wintz 所撰寫&quot;Digital Image Processing,,中説明。 在本發明中,該CEL較佳地爲RGB影像之紅色波段的樣 型邊緣計算。”白色”區域是D〇g値爲負的區域。 現在參考圖21A,該圖解釋具有CEL 720之像素71〇。 像素710例如爲將要檢視之物件4(圖1}之影像中的像素, ---,0----Μ-------裝--- (請先閱讀背面之注咅?事項再0本頁} 訂. •線- 經濟部智慧財產局員工消費合作社印製Binary CEL 々 In the following discussions, the following definitions of CEL (external element) are used: Lama pixel inner 疋 I single unidirectional line. Position and orientation in pixels are calculated as a function of the difference in response intensity gradients in neighboring pixels. CEL aggregation-generally defines „between two groups within a pattern formed by binary images (called images that include only two groups), and operates to define boundaries with sub-pixel accuracy. Suppose that each When CEL originates in one direction, the orientation of J σ CEL is defined, so the "white" region in a binary image that includes only white and black regions is always located to the left of the directional or directional cEL. CEL is calculated as d The function of zero crossing points of 〇G (Biance difference), as described in US Patent Nos. 5,774,572 and No. 5,774,572 and No. belonging to Caspi et al., Which is incorporated herein by reference in this manner. Other suitable edge detection techniques are described in "Digital Image Processing" by c Gonzalez and p Wintz, Addison Wesley Publishing, Reading, Massachusetts, 1987. In the present invention, the CEL is preferred The ground is calculated for the pattern edge of the red band of the RGB image. The "white" area is the area where D0g 値 is negative. Now referring to Fig. 21A, the figure explains the pixel 71 with CEL 720. 710 pixels For the pixels in the image of the object 4 (Figure 1) to be inspected, ---, 0 ---- M ------- install --- (Please read the note on the back first? Matters then 0 Page} Order. • Line-Printed by the Consumer Cooperatives, Intellectual Property Bureau, Ministry of Economic Affairs

nuz IX 84 4 A7 _B7_ 五、發明說明(55 ) 具有位於原點(X,Y)之一角以及位於(X+1,Y+1)之對角 。CEL 720位於像素710中。像素710外跨一 ••白色’’區域 730和一 π黑色·’區域740。如圖所示,CEL 720被向量化, 所以白色區域730位於CEL 720左方。 較佳的24位元資料結構用於表示CEL,.而使用於SIP之 CEL資料結構陣列的元素包括下列欄位: x( 1 2位元)爲CEL之X座標。請注意在影像中的各線被 群組爲資料陣列,CEL之y座標由包含CEL之CEL資料陣 列中的線制訂。 方向(1位元)和邊緣碼-(3位元)定義CEL之方位和方向。 最終或是nLn-(4位元)定義沿著像素邊緣之CEL最終端 點之位置。端點爲沿著像素邊緣之點,在該處由一 CEL相 交。 第一或是&quot;Fn-(4位元)定義沿著像素邊緣之CEL第一端點 之位置。 現在參考圖22A-22F,分別描繪相當於邊緣碼0至5之 可能CEL方位,其中該方向値爲0,而一般爲自明的。因 此,邊緣碼値0被指定爲圖22A之CEL,邊緣碼値1被指 定爲圖22B之CEL,邊緣碼値2被指定爲圖22C之CEL, 邊緣碼値3被指定爲圖22D之CEL,邊緣碼値4被指定爲 圖22E之CEL,而邊緣碼値5被指定爲圖22F之CEL。 現在參考圖22G和22H,解釋邊緣碼値6,其中方向値 爲0。當二CEL存在於像素中時,鞍形發生,如圖22H所 示。在鞍形的案例中,獨立資訊以類似圖22F之方式表示 -58- 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) (請先閱讀背面之注意事項再^^本頁) 裝 · 經濟部智慧財產局員工消費合作社印製 484104 A7 經濟部智慧財產局員工消費合作社印制π 五、發明說明(56 ) 。値爲6的邊緣碼在組合CEL的後階段雖然與値爲5的邊 緣碼不同以計算表示外圍之邊緣,邊緣碼値爲6能夠依據 鄰近像素之評估重新建立鞍形。典型地,碼値被指定爲代 表圖22A-22F之各圖情況而22H和其餘,,非法”碼値被反向 爲只是骨架事件。 現在參考圖23A-23F,分別描繪相當於邊緣碼〇至5之 可能CEL方位,其中該方向値爲i,而一般爲自明的。圖 23G和23H代表當該方向値爲i時,鞍形情況存在,而一 般爲類似於圖11G和22H,除了,,白色,,區域和,,黑色,,區域 之關係爲反向以外。 一旦邊緣碼和方向碼被定義時,CEL相對於像素邊緣之 方位為已知,且CEL的第一點和最終點亦可以被定義。第 一點是在圖22A-23H以”F”表示的點而最終點是以,,L,,表示 的點。 CEL類型I第一欄位和最終攔位較佳地表示在循環座標 系統上的第一點和最終點。此座標系統爲在圖23ι中最佳 參考。 較佳地是,CEL4各邊緣被劃分爲以4位元表示爲“a 的單元。因此,在圖23!的例子中,第一欄位値爲14而最 終攔位値爲0。 特徵邊緣之向量化表示 參考圖21B-21D,該圖解釋介於特徵與其分析式表示爲 CEL以及向量化線元素之間的關係。圖21β顯示相對 板背景760之第一和第二特徵750。圖21(:顯示包括像^ (請先閱讀背面之注意事項再本頁) 裝 訂: •線_ -59- 仰4104 A7 ------------- 五、發明說明(57 ) ---- ---------裝—— (請先閱讀背面之注意事項再θ本頁) 770聚集之映射表,其中CEL 78()在各像素μ中看見。 cel代表介於特徵750與基板76〇之間邊緣的次像素跨越 、。特徵顯示爲”黑&amp;,,區域,因爲其典型地具有才目當高係數 之反射性及展現負的D〇G。基板顯示爲,,白色,,區域,因爲 其典型地具有相當低係數之反射性及展現正的D〇(}。 現在參考圖21D,該圖顯示特徵75〇邊緣之表示(圖21B) ,其中特徵750邊緣表示邊緣向量79()。如本發明之一具 體實施例,在上文説明之學習參考方案中,單獨像素之CE]L 例如CEL780的位置和方位,爲檢視下之物件2(圖1A)的影 像計算和記綠。CEL聚集實質上在相同方向組合爲連接元 素以及轉換爲邊緣向量790,以及被儲存以在上文説明之 檢視方案中使用爲參考。 彩色CEL之表示 —線. 經濟部智慧財產局員工消費合作社印製 彩色CEL爲二進制CEL之延伸。彩色CEL與二進制CEL 不同’他們識別以及定義介於影像二不同區域之間的邊界 ,其中各區域爲具有實質上同質顏色之許多已知區域的其 中之一區域。彩色CEL指示該邊界之位置爲次像素精確度 ,以及另外指示何區域位在該CEL的各側上。彩色CEL之 資料結構一般以二進制CEL之先前説明的觀點加以瞭解。 各彩色CEL典型地包括下列欄位: x(12位元)爲CEL之X座標。請注意在影像中的各線被 群組爲資料陣列,CEL之y座標由包含CEL之CEL資料陣 列中的線制訂。 方向(1位元)和邊緣碼-(3位元)定義CEL之方位和方向。 -60- ί紙張尺度適用中S a家標準(CNS)A4規格(210 X 297公ϋ ^ ' οζ 1Χ 84 4 經濟部智慧財產局員工消費合作社印制衣 A7 _B7_五、發明說明(58 ) 最終或是ML’’-(2位元)定義沿著像素邊緣之CEL最終端 點之位置。端點爲沿著像素邊緣之點,在該處由一 CEL相 交。 第一或是f’Fn-(2位元)定義沿著像素邊緣之CEL第一端點 之位置。 材料邊緣-(4位元)定義何同質顏色或是材料群體存在於 該CEL之一側上。 請注意在該較佳24位元資料結構中,利用識別彩色群體 時,解析度被犧牲(與二進制比較)。然而這是設計選擇且 較高解析度可以利用具有較大數目之資料結構獲得。另外 ,不同意義被指定至邊緣碼=7。在此案例中,此邊緣碼7 表示色彩接合。色彩接合是分離具有不同値之材料邊緣的 二彩色CEL之像素。 型態特徵之表示 各型態特徵爲較佳地以下列欄位表示: x(12位元)爲型態特徵之X座標。請注意在影像中的各線 被群組爲資料陣列,型態特徵之y座標由包含型態特徵之 型態特徵資料陣列中的線制訂。 資料-(20位元)典型地表示下列類別之型態特徵的其中 之一: OPEN END ISLAND 3 WAY JUNCTION 4 WAY JUNCTION -61 - 本紙張尺度適用中國國家標準(CNS)A4規格(210 x 297公釐) (請先閱讀背面之注意事項再β本頁) 裝 訂_ -·線 經濟部智慧財產局員工消費合作社印製 484104 A7 B7 五、發明說明(59 ) 5 WAY JUNCTION BLOB JUNCTION PIN HOLE AN MINn CORNER AN n〇UT丨,CORNER 硬體缺陷之表示 較佳地以下列欄位表示: X (1 2位元)爲缺陷特徵之X座標。請注意在影像中的各線 被群組爲資料陣列,缺陷之Y座標由制訂缺陷之缺陷類別 資料陣列中的線制訂。 資料-(20位元)典型地表示下列類別之缺陷的其中之一: 小CEL缺陷nuz IX 84 4 A7 _B7_ 5. The invention description (55) has an angle at the origin (X, Y) and an opposite angle at (X + 1, Y + 1). CEL 720 is located in pixel 710. Pixel 710 spans a •• white ’region 730 and a π black • ′ region 740. As shown, CEL 720 is vectorized, so the white area 730 is located to the left of CEL 720. The preferred 24-bit data structure is used to represent CEL. The elements of the CEL data structure array used in SIP include the following fields: x (12 bits) is the X coordinate of CEL. Note that the lines in the image are grouped into a data array, and the y-coordinate of CEL is determined by the lines in the CEL data array containing CEL. Direction (1 bit) and edge code-(3 bits) define the orientation and direction of CEL. The final or nLn- (4-bit) defines the position of the extreme end point of the CEL along the edge of the pixel. The endpoints are points along the edge of the pixel where they intersect by a CEL. The first or &quot; Fn- (4 bits) defines the position of the first endpoint of the CEL along the edge of the pixel. Referring now to Figs. 22A-22F, the possible CEL orientations corresponding to the edge codes 0 to 5 are respectively depicted, where the direction 値 is 0 and is generally self-explanatory. Therefore, edge code 値 0 is designated as the CEL of FIG. 22A, edge code 値 1 is designated as the CEL of FIG. 22B, edge code 値 2 is designated as the CEL of FIG. 22C, and edge code 値 3 is designated as the CEL of FIG. 22D. The edge code 値 4 is designated as the CEL of FIG. 22E, and the edge code 値 5 is designated as the CEL of FIG. 22F. Referring now to FIGS. 22G and 22H, the edge code 値 6 is explained, where the direction 値 is 0. When two CELs are present in a pixel, a saddle shape occurs, as shown in Fig. 22H. In the saddle case, the independent information is expressed in a manner similar to Figure 22F. -58- This paper size is applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) (Please read the precautions on the back before ^^ this Page) Equipment · Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 484104 A7 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs π 5. Description of Invention (56). Although the edge code of 値 6 is different from the edge code of 値 5 in the later stage of combining CEL to calculate the edges representing the periphery, the edge code of 能够 6 can re-establish the saddle shape based on the evaluation of neighboring pixels. Typically, the code 値 is designated to represent the situation of each figure of FIGS. 22A-22F and 22H and the rest, the illegal “code 値” is reversed to just a skeleton event. Now referring to FIGS. 23A-23F, the equivalent of the edge codes 0 to 5 possible CEL orientations, where the direction 値 is i, and is generally self-explanatory. Figures 23G and 23H represent that when the direction 値 is i, a saddle shape exists, and is generally similar to Figures 11G and 22H, except that, The relationship between white, region, and black, and region is other than reverse. Once the edge code and direction code are defined, the orientation of the CEL relative to the pixel edge is known, and the first and final points of the CEL can also be Is defined. The first point is the point indicated by "F" in Figs. 22A-23H and the final point is the point indicated by ,, L ,,. The first column and final stop of CEL type I are preferably indicated in the loop The first point and the final point on the coordinate system. This coordinate system is the best reference in Fig. 23m. Preferably, each edge of CEL4 is divided into units represented by "a" in 4 bits. Therefore, in the example of Fig. 23 !, the first field 値 is 14 and the final field 値 is 0. Vectorized Representation of Feature Edges Referring to Figures 21B-21D, this figure explains the relationship between features and their analytical expressions as CEL and vectorized line elements. Figure 21? Shows the first and second features 750 of the plate background 760. Figure 21 (: Display includes image ^ (Please read the precautions on the back before this page) Binding: • Thread _ -59- Yang 4104 A7 ------------- V. Description of the invention (57 ) ---- --------- Install—— (Please read the precautions on the back before θ this page) Mapping table of 770 aggregation, in which CEL 78 () is seen in each pixel μ. Cel represents The sub-pixel span between the edge of the feature 750 and the substrate 76. The feature is shown as "black &amp;," because it typically has high reflectivity and exhibits negative DOG. The substrate Shown as, white,, area, because it typically has a fairly low coefficient of reflectivity and exhibits a positive D0 (}. Referring now to FIG. 21D, the figure shows a representation of a characteristic 75 ° edge (FIG. 21B), where the characteristic The 750 edge represents the edge vector 79 (). As a specific embodiment of the present invention, in the learning reference scheme described above, the CE and L of a single pixel, such as the position and orientation of CEL780, is the object 2 under review (Figure 1A ) Image calculation and record green. CEL aggregates are combined into connected elements and converted into edge vectors 790 in the same direction, and are Stored for reference in the viewing scheme explained above. The color CEL representation-line. The color CEL printed by the Employees' Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs is an extension of the binary CEL. The color CEL is different from the binary CEL. They identify and define The boundary between two different areas of the image, where each area is one of many known areas with substantially homogeneous colors. The color CEL indicates that the location of the boundary is sub-pixel accuracy, and which area is additionally indicated On each side of the CEL. The data structure of the color CEL is generally understood from the previously explained point of view of the binary CEL. Each color CEL typically includes the following fields: x (12 bits) is the X coordinate of the CEL. Please note that Each line in the image is grouped into a data array, and the y coordinate of the CEL is determined by the line in the CEL data array containing the CEL. Direction (1 bit) and edge code-(3 bits) define the orientation and direction of the CEL.- 60- ί The paper size is applicable to the Chinese standard (CNS) A4 (210 X 297) ^ 'οζ 1Χ 84 4 Printing of clothing A7 by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs The description (58) Final or ML "-(2-bit) defines the position of the final endpoint of the CEL along the edge of the pixel. The endpoint is the point along the edge of the pixel, where it is intersected by a CEL. First Or f'Fn- (2 bits) defines the position of the first end point of the CEL along the edge of the pixel. Material edge- (4 bits) defines what homogeneous color or material group exists on one side of the CEL. Note that in this preferred 24-bit data structure, resolution is sacrificed (compared to binary) when using color groups for identification. However this is a design choice and higher resolutions can be obtained with a larger number of data structures. In addition, different meanings are assigned to edge code = 7. In this case, this edge code 7 represents color bonding. Color bonding is to separate pixels of two-color CEL with edges of different materials. Representation of type features Each type feature is preferably represented by the following fields: x (12 bits) is the X coordinate of the type feature. Note that each line in the image is grouped into a data array, and the y-coordinates of the type features are formulated by the lines in the type feature data array containing the type features. Data- (20 bits) typically represents one of the following types of type characteristics: OPEN END ISLAND 3 WAY JUNCTION 4 WAY JUNCTION -61-This paper size applies to China National Standard (CNS) A4 (210 x 297 mm) (Please read the precautions on the back before β page) Binding _-· Printed by the Employees ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 484104 A7 B7 V. Description of Invention (59) 5 WAY JUNCTION BLOB JUNCTION PIN HOLE AN MINn CORNER AN n〇UT 丨, the representation of the CORNER hardware defect is preferably expressed in the following fields: X (12 bits) is the X coordinate of the defect feature. Please note that each line in the image is grouped into a data array, and the Y coordinate of the defect is determined by the line in the data array that defines the defect type of the defect. Data-(20 bits) typically represents one of the following types of defects: Small CEL defects

STRONG NICK STRONG PROT GENERAL SMALL CEL DEFECT CEL ON骨架-爲位於型態骨架上的CEL,爲由太薄的線 典型地形成之缺陷。 匹配缺陷 過剩FEATURE-爲在線上檢視方案中(例如’’檢視’’)偵測 之物件的影像之特徵,在參考中沒有匹配特徵; 非法MATCH-在線上檢視模式中偵測之特徵,該特徵與 參考中之特徵匹配,但與該參考特徵不同。例如,該線上 特徵爲JUNCTION但該參考特徵爲OPEN END ; 遺漏-在參考影像中之特徵不具有在線上檢視方案中獲 -62- 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) ------^--------裝--- (請先閱讀背面之注意事項再β本頁) 訂·- 484104 A7 經濟部智慧財產局員工消費合作社印製 五、發明說明(6〇 ) 得之物件影像的匹配特徵。 彩色缺陷之差彔 各彩色缺陷較佳地以下列欄位表示: x(12位元)爲彩色缺陷之χ座標。請注意在影像中的各線 被群組爲資料陣列’彩色缺陷之丫座標由制訂彩色缺陷之 彩色缺陷類別資料陣列中的線制訂。 办色缺陷資料(20)位元。在本發明之較佳具體實施例中 ,彩色缺陷由watchdog工作過濾,例如在圖14之監視器 620,以及直接傳送至缺陷報告。 寬度缺陷鉬奂 寬度缺陷報告由線寬檢視處理輸出。 處理偵測之線寬缺陷的資料源形式表示 提供於寬度缺陷資料結構陣列中。 單一寬度缺陷資料結構包含下列欄位: 、x(12位疋)爲彩色缺陷之χ座標。請注意在影像中的各線 j群组爲資料陣列,寬度缺陷之γ座標由制訂寬度缺陷之 寬度缺陷類別資料陣列中的線制訂。 類別(1位元)制訂寬度量測類別爲下列類別的其中之一: SPACE骨架,爲空間量測;或是 LINE骨架,爲線寬量測。 方向-(4仏元)制1丁量測方向,較佳地由、 中之一制訂: 了歹li可能万向其 未知方向, 東方方向, 該報告以包含由該 。寬度缺陷之聚集 (請先閱讀背面之注意事項再β本頁) 訂·· .線· -63- 氏張尺度相中’標準(cns)a4規格⑵⑽挪公 484104 A7STRONG NICK STRONG PROT GENERAL SMALL CEL DEFECT CEL ON Skeleton-is a CEL located on a type skeleton, a defect typically formed by a line that is too thin. Excessive matching defects FEATURE- is the feature of the image of the object detected in the online viewing scheme (such as `` view ''), there is no matching feature in the reference; illegal match- the feature detected in the online viewing mode, the feature Matches the feature in the reference, but differs from the reference feature. For example, the online feature is JUNCTION, but the reference feature is OPEN END; Omission-the feature in the reference image does not have the online viewing solution -62- This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 Mm) ------ ^ -------- install --- (Please read the precautions on the back before β page) Order ·-484104 A7 Printed by the Employees ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs V. Description of the invention (60) Matching characteristics of the object image obtained. Difference between color defects Each color defect is preferably represented by the following fields: x (12 bits) is the χ coordinate of the color defect. Please note that the lines in the image are grouped into a data array. The coordinates of the color defects are determined by the lines in the color defect type data array for color defects. Color defect data (20) bits. In a preferred embodiment of the present invention, color defects are filtered by the watchdog job, such as monitor 620 in FIG. 14, and transmitted directly to the defect report. Width Defect Molybdenum 奂 The width defect report is output by line width inspection processing. The source form representation for processing detected line width defects is provided in the array of width defect data structures. The single-width defect data structure includes the following fields:, x (12-bit 疋) is the χ coordinate of the color defect. Please note that each line j in the image is a data array, and the γ coordinate of the width defect is determined by formulating the line in the width defect type data array. Category (1 bit) The width measurement category is one of the following: SPACE skeleton for space measurement; or LINE skeleton for line width measurement. Orientation-(4 yuan) 1 measurement direction, preferably formulated by one of the following: The 歹 li may be in the unknown direction, the eastward direction, and the report includes the by. Accumulation of width defects (please read the precautions on the back and then β page) Order ······· 63- in the sigmoid scale phase ’s standard (cns) a4 specification ⑵⑽1044 A7

經濟部智慧財產局員工消費合作社印製 南方方向, 東南方方向, 西南方方向, 寬度(15位元)制訂寬度缺陷之寬度量測。 的其他主要 下列章節説明在SIP中使用之資料的其他主要形式。 快動影像之表示 各快動影像較佳地以下列欄位表示: x(8位το )爲快動影像之χ座標。請注意在影像中的各線 被群組爲資料陣列,快動影像之丫座標由制訂快動影像之 快動影像類別資料陣列中的線制訂。 r-(8位元)爲紅色RGb波段之強度。 g - (8位元)爲綠色r g B波段之強度。 b-(8位元)爲藍色RGB波段之強度。 線包絡 線包絡爲圍繞該線之包絡資料結構,以及一般利用於 CEL至向量比較功能中,在下文參考圖3〇α·32β加以説明。 、現在參考圖24,該圖解釋線包絡建構8〇〇,該建構在此 &lt;Γ爲具方位線(包絡”。線包絡爲方形,建構爲包圍該線 。線包絡800具有與線810相同之方位。線81〇至方形二 側之垂直距離以一參數表示,表示爲寬度82〇 ,而線81〇 之各端點至包絡端的距離以參數錐根寬度83〇表示。使用 於包絡足義(另-參數爲角度容限參數,該參數爲CEL至 向量比較功能之參數,確定CEL之方向接近於線的方向。 -64 - 本纸張尺度適用中國國家標準(CNS)A4規格(210 X 297^^---- (請先閱讀背面之注意事項再β本頁) 裝 •線 484104 A7Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. South direction, southeast direction, southwest direction, width (15 bits). Width measurement of width defects. The other main sections of the following sections describe the other main forms of information used in SIP. Representation of fast-moving images Each fast-moving image is preferably represented by the following fields: x (8 bits το) is the χ coordinate of the fast-moving image. Note that each line in the image is grouped into a data array, and the y-coordinates of the fast-moving image are determined by the lines in the fast-moving image category data array for the fast-moving image. r- (8 bits) is the intensity of the red RGb band. g-(8 bits) is the intensity of the green r g B band. b- (8 bits) is the intensity of the blue RGB band. Line Envelope Line Envelope is the envelope data structure that surrounds the line, and is generally used in the CEL-to-vector comparison function, which will be described below with reference to Figures 30a and 32b. Now, referring to FIG. 24, the figure explains a line envelope construction 800, where &lt; Γ is a azimuthal line (envelope). The line envelope is square and is constructed to surround the line. The line envelope 800 has the same as the line 810 Orientation. The vertical distance from the line 810 to the two sides of the square is expressed by a parameter, which is expressed as the width 82, and the distance from the end of the line 810 to the envelope end is expressed by the parameter cone root width 83. Used in envelope foot (Another parameter is the angle tolerance parameter. This parameter is a parameter from CEL to vector comparison function to determine the direction of CEL is close to the direction of the line. -64-This paper size applies to China National Standard (CNS) A4 (210 X 297 ^^ ---- (Please read the precautions on the back before β page) Installation • Cable 484104 A7

現在參考圖25,該圖顯示聚合 850簡單地爲線81〇之雙隹 &lt;線包絡。聚合線 八〇 1 &lt;來集。如圖中 ^ ^ 裝--- (請先間讀背面之注意事項再β本頁) 僅僅爲組成聚合線85〇之各 ^、,永合線包絡860 PIM 又 的所有包絡之聚集。 PIM(在映射表的點)爲資料結構和處 解在映射表的點查詢。在映# aa 泉术,有利於分 J 在吹射表的點查詢&amp; w + 的特別點位於何處之查詢,、、4別在影像中 爲依據在影像中的合適點或是區域執行。 作次疋功月匕 PIM較佳地由SIP過濾和監視器工作使用。Reference is now made to FIG. 25, which shows that the aggregation 850 is simply the double-line &lt; line envelope of line 810. Aggregation line 801 &lt; come set. As shown in the figure ^ ^ Installation --- (please read the precautions on the back first and then β this page) It is only the aggregation of all the envelopes that make up the aggregation line 850, the envelope of the Yonghe line 860 PIM. PIM (points in the mapping table) queries the data structure and processing points in the mapping table.在 映 # aa 泉 术, it is helpful to find the point of J in the blow table & where the special points of w + are located, and 4 are performed in the image based on the appropriate point or area in the image . PIM is preferably used by SIP filtering and monitor work.

MIM 較佳地爲依據簡之資料結構。增加附接不同資料項目 之額外功能至不同區域。那些資料項目可以代表例如計算 之定限。MIM之使用使得不同事件例如特徵和缺陷能: 被不同地處理而爲除事件類別以外之位置函數。 -線. 經濟部智慧財產局員工消費合作社印製 例如,計算處理量測表面缺陷叢集之領域。假使該缺陷 爲在預先定義之緊要領域内部時,則該領域之小値可以足 夠宣稱該位置爲缺陷。然而,假使該缺陷爲位於預先定義 之緊要領域外邵時,則該領域之相同値可以傳送至該MIM 過濾器,以致不宣稱該位置爲缺陷。藉由其餘例子之方式 ,假設刻痕被指示爲額外檢視觸發。刻痕具有高度或是寬 度超越預定定限之特徵。在SIP檢視中,該高度和寬度定 限可以藉由使用MIM而動態調整爲在檢視下之物件樣型 之刻痕額外檢視觸發之位置函數。容易認知地是該定限可 以爲使用者經由一般使用者介面之輸入。 -65 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) 4841U4 A7 五、發明說明(63 ) 經濟部智慧財產局員工消費合作社印製 I上而下參者 由上而下參考爲用以定義由上而下(TD)觸發。由上而下 參考觸發保持點周圍感興趣區域之影像和類別資訊,爲在 4學習方案中學習,以及導引該SIP以使用與由上而下觸 發相關的檢視功能之預定方式檢視感興趣區域。例如,焊 墊&lt;由上而下觸發將導引該SIP在圍繞該焊墊之由上而下 報口中走我之感興趣空間區域上執行一組檢視功能。 由上而下報告較佳地包括下列欄位: X-次像素(4位元):定義由上而下報告中之次像素在乂方 向的位移,在該像素内有由上而下報告被定義。 Y-次像素(4位元):定義由上而下報告中之次像素在γ方 向的位移,在該像素内有由上而下報告被定義。 索引(24位元):定義正檢視之物件的所有由上而下視窗 之陣列内的由上而下報告索引。 參考圖27,該圖爲可能存在於典型由上而下視窗中的所 選擇元素外圍之簡化圖像解釋,所代表的形狀爲:線段88〇 、圓形”球”882、指示中心點884、以及方形墊、指示 開放端888。各形狀已經由參考圖21A_2m説明之cel演 繹出。 一 4原始資料被封裝至_視窗時,爲備妥於處理。較 佳地,如下文所説明在視窗上運作之處理功能,資料位於 該視言中。 sip缺陷 SIP缺陷報告決足單一 SIP缺陷之結構。sip缺陷報告包 * 66 - 297^^· (請先閱讀背面之注意事項再0· 本頁) 裝--------訂---- •線! 484104 A7 B7 經 濟 部 智 慧 財 產 局 員 工 消 費 合 作 社 印 製 五、發明說明(64 ) 含: 缺陷位置之座標(X,γ)。 説明字串。 缺陷之列舉類別。 統一事件 統一事件爲由多數照相機演繹出的事件,以及被封裝至 統一視窗中。 各統一事件較佳地識別像素位置(X,Y),該報告依據該 位置上足義以及由下列事件類別之間選擇其中之一以制定 事件類別: 由上而下視窗 特徵 缺陷 寬度缺陷 與各統一事件有關之資料與事件類別相關,以及包括上 述相對於各事件之資料。 -仿射 、射轉換爲包含用以注册照相機於有關仿射轉換資訊之 2的資料源以及在檢視方案中註册於在檢視下之物件線上 影像與其參考影像之間。該仿射2D轉換在上文説明。 此視窗佇列爲依順序視窗之佇列以及等待由工作所執行一 ^計算之效能。視窗將用於移動介於工作之間視窗的:要 貝枓源加-佇列。視窗可以由一工作放入至該佇列,以及 ---—------— - 67 - 本紙張尺度^祕(21Q x 297·^- -------;----------- (請先閱讀背面之注意事項再0本頁) 訂-· -線 484104 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明(65 ) 在工作於視自元成工作之後放置於另一仔列中,直到被期 望與該視窗工作之另一工作爆出爲止。 註册和多數照相機之考量 如本發明之一較佳具體實施例,在圖1A具體實施例之掃 描器2和在圖1B具體實施例之掃描器34,利用多數照相 機獲取在檢視下之物件4(圖1A)或是面板34(圖1B)的影像 。多數照相機之使用籍由相對應之校準轉換使各照相機之 輸入成爲需要。該校準轉換爲一計算之仿射轉換,所以由 至少一照相機觀察之面板中的每一點由該仿射轉換映射至 該校準座標系統中的相同點。較佳地是,該校準座標系統 被設定以致在此座標系統中的單位等於大約丨5微米。在此 座標系統中的點以(Xa,Ya)表示。 當設計處理發現缺陷時,以多數照相機掃描明顯地具有 結果。例如’在不完全由任何單_照相機所見的大物件檢 視之初步步驟爲依據完全由各不同照相機所見的物件6 運作:之後’未分解成品爲統-以及被檢視。最後,由;; 相機(厘標系統產生的各成品’ Λ中被執行之—工作 爲統一校準座標系、统,以及該部分影像被訂和 校準座標系統表示之大物件。 ”、在以 如本發明之-較佳具體實施例,— 制訂光學頭之幾何:包含,例如 梃式被楗供馬 度(較佳地表示爲二極體或是像辛 二各照相機寬 機與需要轉換在-既定校準照相機中之目^:於鄰近照相 無關座標系統之校準轉換之間的心。::^ —、照相機 里唛琢統一座標系統稱 68- 參紙張尺度適用中涵格(2ϋ7公jy I,----«1-------裝--- (請先閱讀背面之注意事項再頁) 訂-· •線· A7 B7 五、 發明說明(66 ) 經濟部智慧財產局員工消費合作社印制衣 爲校準之座標系統。 較佳地是,儲存二照相機模式: …、相機板 &lt; ’馬在檢視時間之特別檢視機器的照相機杉 式校準資訊;以及 照相機模式參考,爲執行學f方案時—檢視系統之相賴 ^、居…、相機模式參考在檢視時可以或可以不與該照相 '模式相同。雙重參考之使用例如能夠在分離之檢視系絲 上執行學習和檢視方案。 · 在本發明之—較佳檢視方案中,當正檢視物件之統一影 和-參考比較時’―額外註册轉換被分別用以註册該參 考和線上[照相機/校準]影像。用於在影像之間註册之較佳 万^在知屬於Harel等人之美國專利案號爲第號 〈專利案中説明’此處以提及的方式併入本文中,通常調 適馬識㈣徵叢集以及在叢集間執行動態註册而非藉由單 獨特徵之間的註册而執行。 現在參考圖26,該圖爲類似frames 87〇之聚集的簡化圖 像解釋,例如可以在面板36上(圖1B)收集在—起以用於如 本發明之-較佳具體實施例的檢視。各訊框爲相互全等。 2和屬性較佳地只學習於單一訊框87〇,而總體座標被 改交所以各訊框可以單獨被檢視和與參考比較。 工作 又 下列章節討論由該SIP執行的工作。工作表示爲在圖19 和圖20之執行圖中的功能方塊。 ---:---Μ-------M i — (請先閱讀背面之注意事項再本頁) 訂: --線· -69- 04 IX 84 4 A7 _B7_ 五、發明說明(67 ) 輸入輸出工作 輸入輸出工作連接該SIP處理至外部世界。 輸入通道工作 輸入通道工作爲連接至FILE或是TCP/IP通道。輸入通 道工作讀取輸入之原始資料以及轉換該原始資料爲資料源 。在圖1B之較佳具體實施例中,該輸入通道工作與資料轉 換器和分裂器80與120有關。 輸出通道工作 輸出通道工作將資料源寫入至指定通道FILE或是 TCP/IP。例如,在圖2之執行圖中,該幸命出通道工作與缺 陷報告產生器230有關。 複合工作 複合工作爲管理工作與資料源聚集之工作。當一複合工 作被執行時,其決定將執行工作之順序。當有一呼叫以執 行該工作時,該選擇之工作爲任何可工作間具有最高優先 順序之工作。 量測線寬 參考圖28A-28B,該圖爲量測線寬之較佳方法的解釋。 特徵如焊墊之線寬爲較佳地參考型態骨架900加以量測。 線由二線900和9 1 0加以定義,各線以位於骨架900各側 之CEL形式聚集形成。線寬定義爲垂直於骨架900的接觸 二線910和920之線的長度。圖28A顯示具有實質上平行 邊緣的骨架之線寬量測。圖28B顯示具有非平行邊緣的骨 架之線寬量測。 -70- 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) ——^----I-------裝—— ~請先閱讀背面之注意事項再B本頁) . .線· 經濟部智慧財產局員工消費合作社印製 〜-----------§1484104 A7 五、發明說明(68 ) 線寬量測爲在上述設計規則、學f和檢視方案中之各方 式執行的工作。 較佳地是,、線寬量測輸出線寬和介於檢視之物件所有位 置線之間的空間之統計,以及假使最小線寬達反時發出錯 誤報告。典型地’線寬爲有關於線和位置,而最小空間達 反爲總體應用。 ^習線寬 線寬參考包括-組方形’各方形包圍影像領域,該領域 内所有線寬量測具有近似相同値。在線寬具有某種程度變 化的領域内,典型地不可能建立合適的線寬參考。該學習 線寬工作較佳地運作爲識別一區域,該區域内高位準線寬 變化使其實際地形成線寬參考。這些領域包圍在識別爲線 寬不能被學習之一方形領域中。 檢視線寬 檢視線寬爲量測線寬和介於在檢視下之物件的線之間的 空間。計算之寬度爲比較於參考影像中線的線寬和介於相 對應位置線之間的空間。一註册資訊轉換被用以在檢視與 參考影像個別位置之間相關連。在物件之線上影像中的計 算線寬與既定位置之線寬參考指定的線寬相對應可接受範 圍之間的任何不匹配,報告爲線寬缺陷。 註册 註册工作產生介於在檢視下物件的影像之線上座標系統 與參考座標系統之間的轉換。較佳地是,假使使用許多照 相機時,轉換爲提供於各照相機,雖然容易認知地是爲了 -71 - 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) ------J--------裝— * (請先閱讀背面之注意事項再本頁) . 線· 經濟部智慧財產局員工消費合作社印制π 五、發明說明(69)MIM is preferably based on a simple data structure. Add additional functions for attaching different data items to different areas. Those data items can represent, for example, calculation limits. The use of MIM enables different events, such as features and defects: to be handled differently as a function of position other than the event category. -Line. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. For example, calculation and processing of areas where surface defect clusters are measured. Provided that the defect is inside a pre-defined critical field, a small member of the field can suffice to declare the position as a defect. However, if the defect is located outside a pre-defined critical field, the same fields in that field can be passed to the MIM filter so that the position is not declared a defect. By the way of the rest of the examples, it is assumed that the score is indicated as an additional view trigger. The score is characterized by a height or width exceeding a predetermined limit. In the SIP view, the height and width limits can be dynamically adjusted to the position function triggered by an additional view of the score of the object pattern under view by using MIM. It is easily recognized that the limit can be input by a user through a general user interface. -65 This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 4841U4 A7 V. Description of the invention (63) Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economy I Top-down Participants are top-down Reference is used to define the top-down (TD) trigger. Top-down reference to the image and category information of the area of interest around the trigger hold point for learning in the 4 learning plan and to guide the SIP to view the area of interest in a predetermined way using the viewing function related to the top-down trigger . For example, a pad-to-bottom trigger will direct the SIP to perform a set of viewing functions on the area of the space of interest in the top-down report surrounding the pad. The top-down report preferably includes the following fields: X-subpixel (4-bit): Defines the displacement of the sub-pixel in the 乂 direction from the top-down report, in which there is a top-down report definition. Y-sub-pixel (4-bit): defines the displacement of the sub-pixel in the γ direction from the top-down report. Within this pixel, a top-down report is defined. Index (24-bit): Defines the top-down report index in an array of all top-down windows of the object being viewed. Referring to FIG. 27, this figure is a simplified image interpretation of a selected element that may exist in a typical top-down view window. The representative shapes are: line segment 88, a circle "ball" 882, an indicating center point 884, And square pads, indicating open end 888. Each shape has been deduced from cel described with reference to Figs. 21A_2m. A 4 When the original data is packaged in a window, it is ready for processing. Preferably, the processing functions that operate on the window are explained below, and the data is located in the video. sip defect The SIP defect report determines the structure of a single SIP defect. sip defect report package * 66-297 ^^ · (Please read the precautions on the back before you go to this page) Install -------- Order ---- • Line! 484104 A7 B7 Printed by the Consumer Affairs Cooperative of the Intellectual Property Agency of the Ministry of Economic Affairs 5. The description of the invention (64) Contains: the coordinates of the location of the defect (X, γ). Description string. List of defects. Unified event A unified event is an event deduced by most cameras and encapsulated into a unified window. Each unified event better identifies the pixel position (X, Y). The report is based on the meaning of the location and the choice of one of the following event categories to establish the event category: top-down window feature defect width defect and each The information related to the unified event is related to the event type, and includes the above-mentioned information relative to each event. -Affine, affine conversion to a data source containing 2 for registering the camera with information about affine conversion, and registration in the viewing scheme between the object line image under view and its reference image. This affine 2D transformation is explained above. The queue of this window is the queue of sequential windows and the performance of waiting for a calculation to be performed by the task. The viewport will be used to move between viewports: to add source-queue. Windows can be placed into the queue from a job, and ---------------67-The paper size ^ secret (21Q x 297 · ^--------; --- -------- (Please read the precautions on the back and then 0 pages) Order ----line 484104 A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of invention (65) After Yuancheng's work, it is placed in another queue until it is expected that another work with this window work is out. Registration and most camera considerations are like one of the preferred embodiments of the present invention. The scanner 2 of the example and the scanner 34 of the specific embodiment in FIG. 1B use most cameras to acquire the image of the object 4 (FIG. 1A) or the panel 34 (FIG. 1B) under review. The use of most cameras is corresponding. The calibration transformation makes the input of each camera necessary. The calibration transformation is a calculated affine transformation, so each point in the panel viewed by at least one camera is mapped by the affine transformation to the same point in the calibration coordinate system. Preferably, the calibration coordinate system is set such that a single It is equal to about 5 microns. The points in this coordinate system are represented by (Xa, Ya). When the design process finds a defect, most camera scans clearly have results. The initial steps of object inspection are based on the objects 6 which are completely seen by different cameras: afterwards 'undecomposed finished products are unified-and inspected. Finally, implemented by; cameras; each finished product produced by the calibration system' Λ —The work is to uniformly calibrate the coordinate system, and the large objects represented by this part of the image are ordered and calibrated by the coordinate system. ”In the preferred embodiment of the present invention, — Formulating the geometry of the optical head: includes, for example This type is used for horsepower (preferably expressed as a diode or a wide camera like Xin Er and a camera that needs to be converted in a predetermined calibration camera ^: between the calibration conversions of adjacent camera-independent coordinate systems Heart. :: ^ —, the camera coordinated with the unified coordinate system weighs 68- reference paper size applicable in the grid (2ϋ7 公 jy I, ---- «1 ------- install --- (please first Read the notes on the back (Re-page) Order- · • Line · A7 B7 V. Description of the Invention (66) The printed clothing of the Cooperative Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs is the coordinate system for calibration. Preferably, the two-camera mode:…, camera plate &lt; 'Special review of the camera's camera firing calibration information at the time of review; and camera mode reference, when executing the f program—the relationship of the review system ^, home ..., the camera mode reference may or may not be associated with the review The photography 'mode is the same. The use of dual references can, for example, perform learning and viewing schemes on separate viewing ties. · In the present invention-the preferred viewing scheme, when the unified shadow of the object being viewed and the -reference comparison' ―Additional registration conversions are used to register the reference and online [Camera / Calibration] images, respectively. The preferred method for registration between images is described in U.S. Patent No. Harbin et al., Which is described in the 'Patent Case', which is incorporated herein by reference, and is generally adapted to the horseshoe collection And perform dynamic registration between clusters rather than through registration between individual features. Reference is now made to FIG. 26, which is a simplified, simplified image explanation of aggregates like frames 87, which can be collected, for example, on panel 36 (FIG. 1B) for use in reviewing a preferred embodiment of the present invention. The frames are equal to each other. 2 and attributes are preferably only learned in a single frame 87 °, and the overall coordinates are changed so that each frame can be viewed individually and compared with a reference. Work The following sections discuss the work performed by this SIP. The work is shown as functional blocks in the execution diagrams of FIGS. 19 and 20. ---: --- M ------- M i — (Please read the precautions on the back before this page) Order: --line · -69- 04 IX 84 4 A7 _B7_ V. Description of the invention ( 67) I / O job I / O job connects the SIP process to the outside world. Input channel works The input channel works as a FILE or TCP / IP channel. The input channel task reads the input raw data and converts the raw data into a data source. In the preferred embodiment of FIG. 1B, the input channel works in connection with the data converters and splitters 80 and 120. Output channel work Output channel work writes the data source to the specified channel FILE or TCP / IP. For example, in the execution diagram of FIG. 2, the lucky exit channel operation is related to the defect report generator 230. Compound work Compound work is the work of management and data source aggregation. When a composite job is performed, it determines the order in which the jobs will be performed. When there is a call to perform the job, the selected job is the job with the highest priority of any workable room. Measuring Line Width Refer to Figures 28A-28B, which is an explanation of the preferred method for measuring line width. Features such as the line width of the solder pads are preferably measured with reference to the type skeleton 900. The lines are defined by two lines 900 and 9 10, and each line is formed in the form of a CEL on each side of the skeleton 900. The line width is defined as the length of the line of contacting the two lines 910 and 920 perpendicular to the skeleton 900. Figure 28A shows a line width measurement of a skeleton with substantially parallel edges. Fig. 28B shows a line width measurement of a skeletal frame with non-parallel edges. -70- This paper size is applicable to China National Standard (CNS) A4 specification (210 X 297 mm) —— ^ ---- I ------- Packing—— ~ Please read the precautions on the back before B (This page)... Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs ~ --------- §1484104 A7 V. Description of the Invention (68) The line width is measured in accordance with the above design rules, learning f and review the work performed in various ways in the scheme. Preferably, the line width measurement outputs statistics of the line width and the space between all position lines of the object being viewed, and issues an error report if the minimum line width is reversed. Typically, the 'line width' is related to the line and location, while the minimum spatial resolution is the overall application. ^ Learn the line width The line width reference includes-a group of squares' and each square surrounds the image area. All line width measurements in this area have approximately the same frame. In areas where the line width has some degree of variation, it is typically impossible to establish a suitable line width reference. The learning line width operation preferably works to identify an area in which high level line width changes make it actually form a line width reference. These fields are enclosed in a square field identified as a line width that cannot be learned. View line width The view line width is the space between the measured line width and the line of the object under review. The calculated width is compared with the line width of the line in the reference image and the space between the corresponding position lines. A registration information transformation is used to correlate the individual locations of the viewing and reference images. Any mismatch between the calculated line width in the line image of the object and the line width reference specified by the line width reference at the given location, is reported as a line width defect. Registration The registration task generates a transition between the online coordinate system and the reference coordinate system of the image of the object under review. Preferably, if many cameras are used, it is converted to be provided for each camera, although it is easily recognized as -71-This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) ---- --J -------- 装 — * (Please read the precautions on the back, and then this page). Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs π 5. Description of Invention (69)

只有一照相機容吳# I 行註册運作。彳昇’例如該中央照相機可以被用以執 參考圖29,該圖爲線上座標系統 及由參考座椤*結絲U Λ^ ^亏压k系統以 。左手座^ &lt;線上座標系統例子的圖像解釋 ^ ^ 5 〇爲一線上座標系統而右手g p # 960爲一參考座斤系姑、、 叩石于压铋系統 和位移之剛性轉釋之例子顯示只有包括轉動 爲剛性以及-般可V;、:任:是該註册轉換不需要 力又」以包括任何合週的轉換。 學習註册 - 4習註册工作建立特徵之參考,作爲註册之參考。各刑 之座標(X,γ)以及個別特徵類別爲較佳地儲存。ς 二=足義爲&quot;穩定”,意義爲他們在將檢視物件 使用= 常小界線内的常數,且註册爲較佳地 更用知.足特欲加以執行。 检農1主册 檢視註册接收輸人陣列資料結構爲輸人,以及爲仿 2知出轉換資料結構。另外,資料結構爲過剩缺陷、遺漏 缺陷和非法匹配而輸出。 ',: =檢視之物件爲較佳地至少使用與參考比較之方式加以 ’其中在檢視之前的學f方案中,參考爲相信是,,完美 物件建立。該完美之物件爲較佳地藉由掃描選擇爲特別 安又有缺陷之金板或是藉由CAM資科學習而獲得。在檢視方 木''月間,由掃描物件產生之線上影像與該完美參考比較, 以典型做成決定在線上面板上造成的錯誤是否將對參考Only one camera Rong Wu # I line registration works. For example, the central camera can be used to perform reference to FIG. 29, which is an on-line coordinate system and a reference system 椤 * 结 丝 U ^^^^ pressure k system. Left-handed ^ &lt; an image explanation of the example of the online coordinate system ^ ^ 5 is an example of the on-line coordinate system and right-handed gp # 960 is an example of the rigid translation of the reference coordinate system, vermiculite and bismuth system and displacement The display only includes the rotation as rigid and-generally V;,: Ren: Yes, the registration conversion does not require any force "to include any conversions that are convergent. Study Registration-4 references to the characteristics of the registration work as a reference for registration. The coordinates (X, γ) of each sentence and the individual feature categories are better stored. ς 2 = foot meaning is "stable", meaning that they are using the inspected objects = constants within the constant small boundary, and registered as better and more knowledgeable. Foot special wants to implement. Inspector 1 master book inspection registration The data structure of the receiving input array is input, and the data structure is converted to imitate the known data structure. In addition, the data structure is output for excess defects, missing defects, and illegal matches. Refer to the way of comparison and add 'where in the study f plan before review, the reference is to believe that, the perfect object is created. The perfect object is preferably selected by scanning as a particularly safe and defective gold plate or borrowed Obtained by CAM resources. During the inspection of the square wood, the online image generated by the scanned object is compared with the perfect reference, and it is typically made to determine whether the errors caused by the online board will be referenced.

五、 發明說明(70) 板太不同。 典型地不可能執行介於參考影像與線上面板之間的直接 比較’因爲在掃描器上之線上面板的位置可能與產生參考 影像之位置稍微不同。因此,在金面板上之既定特徵的座 ‘典型地與在線上面板上的相同特徵的座標不同。 該註册工作使用#徵以計算由線上座#系統映射至該參 考座標系統的註册轉換。 使用於BGA之檢視的較佳方法之簡要解釋如下文説明 。第一,輸入特徵爲統一至一般化特徵叢集中,嘗試克服 在BGA上的型態特徵之固有不穩定性。相同之特徵(例如 圓)例如可在一掃描中形成島形特徵以及在另一掃描中形 成二非常緊密在-起的開端特徵。二開端可以定義爲單二 一般化特徵,而一匹配規則可以被制訂爲合法匹配此一般 化特徵與該島形特徵。該組一般化特徵與該匹配規則爲^ 型地在一稱爲匹配器表之特殊建構檔案中制訂。亦可能2 該建構檔案中定義不同型態特徵之統一的統一距離爲 化特徵。 般 (請先閱讀背面之注意事項再®:本頁) -丨裝 訂-- 線· 經濟部智慧財產局員工消費合作社印製 該註册模組爲較佳地運作爲識別不在該組線上特徵中笋 現的參考特徵爲&quot;遺漏,,,以及不在該組參考特徵中發現^ 上特徵爲&quot;過剩”。該註册工作較佳地亦識別非法匹^。二 一特徵在線上座標系統中被偵測爲與參考特徵匹配時,= 法匹配發生(亦即在使用該註册轉換該參考特徵之後,咳徵被發現接近於具有非常不同類別的線上特符、此1 &amp;工符徵)。非法匹配 的典型例子爲介於連接與島形之間的匹配。 -73- 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公爱 A7 五、 B7 發明說明(71 過剩/遺漏/和非法匹配被報告爲過剩/遺漏缺陷。 昭在本發明之一較佳具體實施例中,該註册工作只有依據 、&amp;工作’邊照相機特徵爲位於該中央照相機的視 ^或中&amp;巧分裂註册轉換取得該註册資訊以及將其分裂爲3 =:貝;,一狂册資訊相對於各照相機。在另一較佳具體 :她例中’其中註册資料爲各照相機而獲得,此工作爲不 而要且琢註册工作能夠依據校準特徵工作。 、在陝動貝料封裝工作中,輸入影像資料被處理以及視窗 1建立爲包括所需區域之完全影像資料。該視窗藉由叢集 知入彩色缺陷在一起而被計算,所以各快動視窗將包含彩 色$陷之特定叢集周圍的快動資料。在快動資料被封裝至 視窗中時,亦較佳地包括彩色缺陷 出佇列中。 ^資料而建立PPM _幸 在本發明之一較佳具體實施例中 该視窗被放入至一輸 一快動影像爲選擇之 ilHIIJi — — — — — — · 11 (請先閱讀背面之注意事項再本頁) 訂! .線· 經 濟 部 智 慧 財 產 局 員 工 消 費 合 S 社 印 製 ^ fo建jl。輸入資料被處理以及包含連續快動領域之rGB 影像的一組輸出檔案被產生。 監視器^ 、監視器將輸入資料源内部資料與特定PIM比較。假使特 定類別之預定資料被發現存在如p〖M説明之内部禁止領域 時,則損壞資料被轉換爲SIP缺陷。SIP缺陷被累積在〃sip 缺陷資料結構中,該資料結構被組装爲一視窗,以及該視5. Description of the invention (70) The board is too different. It is typically impossible to perform a direct comparison between the reference image and the online panel 'because the position of the online panel on the scanner may be slightly different from the position where the reference image was generated. Therefore, the coordinates of a given feature on a gold panel are typically different from the coordinates of the same feature on a wire top panel. The registration work uses # 征 to calculate the registration conversion that is mapped from the online seat # system to the reference coordinate system. A brief explanation of the preferred method for BGA inspection is explained below. First, the input features are unified to a generalized feature cluster and try to overcome the inherent instability of the type features on the BGA. Identical features (such as circles) can, for example, form island features in one scan and two very close-in start features in another scan. The two-start can be defined as a single-two generalized feature, and a matching rule can be formulated to legally match this generalized feature with the island-shaped feature. The set of generalized features and the matching rules are formulated in a special construction file called a matcher table. It is also possible that the unified uniform distance defining different types of features in the construction file is transformed into features. General (please read the precautions on the back, then ®: this page)-丨 Binding-Line · The Intellectual Property Bureau of the Ministry of Economic Affairs's Consumer Cooperatives printed this registration module for better operation in order to identify that it is not in this group of online features The current reference feature is "missing", and the "reference feature" is not found in the set of reference features. The registration work also preferably identifies illegal matches. The 21 feature is detected in the online coordinate system. When measured to match a reference feature, a = method match occurs (that is, after using the registration to transform the reference feature, the cough sign is found to be close to an online character with a very different category, this 1 &amp; labor sign). Illegal A typical example of matching is between the connection and the island. -73- This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 Public Love A7 V. B7 Description of the invention (71 Excess / Omission / and Illegal matches are reported as excess / missing defects. In a preferred embodiment of the present invention, the registration work is only based on the &amp; work 'side camera feature is located in the center of the central camera or in &amp; The split registration conversion obtains the registration information and splits it into 3 =: Be ;, a crazy book information is relative to each camera. In another preferred specific: in her example, 'where the registration data is obtained for each camera, this work is It is necessary to consider that the registration work can be performed based on the calibration features. In the Shaanxi moving shell material packaging work, the input image data is processed and window 1 is created to include the complete image data of the required area. The window is known to color by cluster Defects are calculated together, so each snap-action window will contain snap-action data around a particular cluster of colored $ sags. When snap-action data is packaged into a window, it is also better to include a queue of color defects. ^ PPM is established based on information. Fortunately, in a preferred embodiment of the present invention, the window is put into a ilHIIJi selected as a fast moving image. — — — — — — 11 (Please read the precautions on the back before This page) Order! Printed by the Consumer Goods Agency of the Intellectual Property Bureau of the Ministry of Economic Affairs ^ fojianjl. The input data is processed and one of the rGB images containing the continuous fast motion field is processed. The output file is generated. The monitor ^, the monitor compares the internal data of the input data source with the specific PIM. If a predetermined type of predetermined data is found to exist in the internal prohibited area as described in p 〖M, the damaged data is converted into SIP defects .SIP defects are accumulated in the 〃sip defect data structure, which is assembled into a window, and the video

484104 A7 五、發明說明(72 ) 窗與其所有缺陷被放入至視窗輸出侍列中。至少一下 徵和缺陷爲較佳地由監視器加以監視··彩色缺陷、硬 陷、線寬缺陷、型態特徵。 足 工作縮整器 工作縮整器封裝特徵、CEL和缺陷爲特定視窗(方形領 域)’形成感興趣區域以用於其餘下游處理。視窗爲較佳地 制π於各由上而下事件以及各寬度缺陷、過剩/遺漏缺陷以 及硬體缺陷。 形成部分由上而下參考之由上而下視窗爲較佳地在學習 方案期間内建立’以及較佳地在CEL和特徵在由上而下視 窗㈣被封裝之前轉換爲線上座標系統(使用註册轉換)。 馬了將建立之視窗數目最小化以及還包圍所有感興趣資 訊(由上而下視窗和缺陷領域周圍之視窗),典型地使用 列設計: 所有由上而下視窗之第一封裝資料增加各封裝視窗至封 裝視窗仔列中。 考慮所有缺陷和線寬報告: y 訂 線 1 ·取不在先岫建亙之視窗内邵的第一缺陷(順序爲先增加 然後增加X座標)。 2·在選擇缺陷中央建立一視窗,封裝在此視窗内部的所有 資料以及將其增加至封裝視窗佇列中。 3.假使在先前建立之視窗内部沒有更多缺陷時-移動至步 驟1。 在封裝處理結束時,所有資料(CEL、彩色CE]L、缺陷、 -75- 本紙張尺度適財B S辦準(CNS)A4規格(2W χ撕公髮 A7 -___ B7 五、發明說明(73 ) 經濟部智慧財產局員工消費合作社印?π 特徵、寬度缺陷)被封裝至至少一視窗中,且該視窗被輸出 至視®仔列。请注意該視窗可以重疊,其中在該重疊區 域中的事件資料項目被封裝在各重疊視窗上。 星資料參者埭立 此工作取該輸入原始資料以及建立原始資料之參考,該 參考適合於監視方案中快速存取。 過滤器 此工作附接於PIM以用於過濾。我們假設該piM在參考 权準座標中足義。該工作接收彩色CEL、特徵、寬度缺陷 、缺陷和仿射傳送之輸入資料以及考慮該輸入資料源之各 疋素。第一,該元素使用該輸入仿射轉換而被轉換爲參考( 校準)座標系統。假使沒有輸入轉換被制訂時,該校準轉換 被用以轉換照相機之元素爲校準座標系統。 接著考慮該輸入資料之各元素。此元素被轉換爲參考校 準座標系統以及檢查該元素是否在ρΐΜ指定過濾器區内部 。建構檔案決定是否過濾此元素。假使該元素不被過濾時 ,被放入至輸出資料源。建構變數値典型地控制假使該元 素在指定區内部時是否該過濾或是假設該元素在指定區外 部時是否該過濾。 由視窗擷取资訊 此工作運作爲由輸入資料佇列爆出視窗以及視需要而由 該視窗擷取資料。完成時,則該視窗被放入至該輸出佇列。 產-生區域和穩定特參考 此工作由相對於資料之輸入視窗寫出輔助資料,該資料 -76- 本紙張尺度適財關家標準(CNS)A4^7ir〇 x 297 ;^T) (請先閱讀背面之注意事項再本頁) 裝 . -•線· A7 A7484104 A7 V. Description of Invention (72) The window and all its defects are put into the window output queue. At least the characteristics and defects are preferably monitored by a monitor .. Color defects, depressions, line width defects, and pattern features. The foot work reducer encapsulates the features, CEL, and defects for a specific window (square area) 'to form a region of interest for the remaining downstream processing. The window is preferably controlled from top-to-bottom events and width defects, excess / missing defects, and hardware defects. The top-down view of the forming part from top to bottom reference is preferably established during the learning program 'and preferably the CEL and features are converted to the online coordinate system before the top-down view is encapsulated (use registration Conversion). In order to minimize the number of windows created and also surround all the information of interest (top-down windows and windows around the defect area), a row design is typically used: all the first package data of the top-down window adds each package Window to package window row. Consider all defects and line width reports: y Order line 1 · Take the first defect that is not in the window of the first build (the order is first increase then X coordinate). 2. Create a window in the center of the selected defect, encapsulate all the data inside this window and add it to the queue of the package window. 3. If there are no more defects inside the previously created window-move to step 1. At the end of the packaging process, all materials (CEL, color CE) L, defects, -75- This paper size is suitable for BS Office (CNS) A4 specifications (2W χ tear public issued A7 -___ B7 V. Description of the invention (73 ) Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs? Π Features, width defects) are encapsulated into at least one window, and the window is output to the TV®. Please note that the window can overlap, where the The event data items are encapsulated in each overlapping window. The star data participant stands for this task to take the input original data and create a reference for the original data. The reference is suitable for quick access in the monitoring scheme. The filter is attached to the PIM It is used for filtering. We assume that the piM is sufficient in the reference weight coordinates. This work receives the input data of color CEL, features, width defects, defects and affine transmissions and considers the elements of the input data source. First This element is transformed into a reference (calibration) coordinate system using the input affine transformation. If no input transformation is formulated, the calibration transformation is used to transform the camera element Is the calibration coordinate system. Then consider each element of the input data. This element is converted into a reference calibration coordinate system and checks whether the element is inside the specified filter area of the phm. The construction file determines whether to filter this element. If the element is not filtered Time, it is put into the output data source. The construction variable typically controls whether the element should be filtered if it is inside the specified area, or whether it should be filtered when it is assumed that it is outside the specified area. Retrieving information from the window works To pop up the window from the input data queue and retrieve data from the window as needed. When completed, the window is put into the output queue. Production-production area and stability refer to this work by referring to the data. Enter the input window to write the auxiliary information, which is -76- This paper is suitable for financial standards (CNS) A4 ^ 7ir〇x 297; ^ T) (Please read the precautions on the back before this page) A7 A7

五、發明說明(74) 典型地包括:(a)各種類別之PIM區域和(b)所有特徵藉由在 视窗上運作之先前功能宣稱爲,,穩定”特徵。 速狀量測 此工作由輸入視窗寫出輔助資料。該資料典型地包括一 個包含在視窗中發現之所有圓上資訊的檔案,以及包括其 他二包含在面板中圓之分佈的統計樓案。 測試管理去 此工作較佳地由輸入視窗佇列爆出一視窗以及利用包含 在該視窗中的影像資訊資料執行與該視窗有關之功能。依 據該功能之輸出,如下決定將做何動作: ^ ^--------裝--- (請先閱讀背面之注意事項再®^本頁) 經濟部智慧財產局員工消費合作社印制π 表1功能產生的各回轉狀態對應之測試管理者動作 回轉碼 動作 錯誤 視窗被刪除以及工作以錯誤回轉 0Κ 視窗被刪除。工作繼續爆出次一視窗。 向前 視窗被傳送至向前佇列。 向前子視窗 在工作元成之後’主視窗之各子視窗傳送 至向前佇列, 而該原始輸入視窗爲較佳地被刪除。在本發 明之較佳具體實施例中,可以形成一子視窗,例如在壓焊 領域視窗中單獨焊墊之周圍。 較佳地是, 假使沒有功能附接於視窗時,則該回轉狀態 爲0Κ。 多重截割營理考 多重截割管理者較佳地運作爲由不同照相機接收包本未 -77-V. Description of the invention (74) Typically includes: (a) various types of PIM areas and (b) all features are declared by the previous function that operates on the window, "stable" features. Quick measurement This work is entered by input The window writes auxiliary data. The data typically includes a file containing all the information found on the circle in the window, as well as other statistical buildings including the distribution of the circles contained in the panel. Test management The input window queue pops up a window and uses the image information data contained in the window to perform the function related to the window. According to the output of the function, the following actions will be decided: ^ ^ -------- Install --- (Please read the precautions on the back first, then ^ this page) Printed by the Intellectual Property Bureau of the Ministry of Economic Affairs, Employee Consumption Cooperative, printed π Table 1 The test manager actions corresponding to each rotation state generated by the function, the rotation code action error window was deleted And the task was deleted by mistake. The window was deleted. The task continued to pop out the next window. The forward window was transmitted to the forward queue. The forward child window was after the job was completed. Each sub-window of the window is transferred to the forward queue, and the original input window is preferably deleted. In a preferred embodiment of the present invention, a sub-window can be formed, for example, welding alone in the welding field Around the pad. Preferably, if there is no function attached to the window, the state of rotation is 0K. Multi-cutting camp rationale The multi-cutting manager works better to receive packets from different cameras. -77 -

•線· 04 1X 84 4 A7 _B7_五、發明說明(75 ) 分解資料之視窗。較佳地是,該視窗位於校準座標系統中 。該多重截割管理者統一所有具有相同視窗識別號碼之視 窗以及儲存該統一視窗至記憶體中。包圍所有子視窗之該 統一視窗被建立且之後附接於統一視窗之功能被執行。依 據檢視功能之輸出,如下決定該作什麼: 表2功能產生的各回轉狀態對應之多重截割管理者動作 回轉碼 錯誤 0K 向前 向前子視窗 除以上各項之外 動作 視窗被刪除以及工作以錯誤回轉 視窗被刪除。工作繼續爆出次一視窗 視窗被傳送至向前仔列。 爲錯誤 爲錯誤 ------I! — — — -裝 i — ~請先閱讀背面之注意事項再本頁) 訂- 經濟部智慧財產局員工消費合作社印製 所認知地是,典型地假使沒有功能附接於視窗時,則該 回轉狀態爲ΌΚ。 %陷撰寫器/ 該裝置Ιϋ寫器較佳地由建構檔案接受4檔案名稱: (a) 輸出視窗檔案名稱:爲包含視窗之一檔案。’’none'’的 値指示該檔案名稱不是正確檔案名稱以及此檔案典型地不 被產生。 (b) 缺陷視窗檔案名稱:爲包含缺陷視窗之一檔案。’’none’’ 値指示該檔案名稱不是正確檔案名稱以及此檔案典型地不 被產生。 (c) 缺陷檔案參考座標:爲包含以參考校準座標表示之缺 78- 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) 線_ 484104 A7 五、發明說明(76 經 濟 部 智 慧 財 產 局 員 工 消 費 合 作 社 印 製 ==:,n°ne’,値指示該搶案名稱不是正確樓案名稱以 及此橋案典型地不被產生。 rLd)缺陷樓案線上座標:爲包含以線上座標表示之缺陷的 :二_e&quot;値指㈣㈣錢κ正韻案謂以及此 檔案典型地不被產生。 此 該缺陷撰寫器將視窗由輸入佇 下進行· 1丁列爆出視窗以及較佳地如 1.假使該視窗包含缺陷: 假使値得產生具有缺陷視窗之樓案或是輸出樓案時, 孩視苜被儲存以用於稍後處理。否則,該視窗除了缺陷 外除去其所有資料以及被儲存以用於稍後處理。 2 ·假使該視窗不包含缺陷: 假使値得產生輸出視窗時,則該視窗被儲存以用於稍 處理。 、 f掃描結束之後,所有先前儲存之視窗如下處理: 第 所有視®產生之所有缺陷被累加。在累加步驟 ’建立缺陷之二向量·· 1·包含以參考校準座標表示之缺陷的第一向量。 在各視窗内部之缺陷藉由使用較佳地存在於各視窗 Self至參考仿射轉換而被轉換爲參考座標系統以及傳送成 視冒内容至參考校準座標系統。缺陷只有在它們不是落於 由制耵在該輸入PIM資料源之該plM定義的遮罩領域中 被,加至該向量。如果沒有PIM被定義,所有缺陷加至 向量。 則 以 後 中 線 之 該 時 該 79- 本紙張尺度_ t _ 規格⑵“ 297公釣 484104 A7 經濟部智慧財產局員工消費合作社印制衣 五、發明說明(77 ) 2 ·包含以線上校準座標之缺陷的向量。 此向f藉由應用制訂爲工作輸入之該註册資訊而由第— 向f產生。請 &gt;王意當沒有輸入仿射轉換被定義時,該恆等 轉換被使用。 假使包含參考座標之一正確輸出檔案被定義時,則第一 向I被寫入至孩檔案。假使包含線上座標之一正確輸出檔 案被定義時’則第二向量被寫入至該檔案。 各該缺陷檔案包含一組線,一線相對應各缺陷。各線典 型地具有下列格式·· XY-缺陷類別-訊框索引 此處X,γ爲缺陷之座標(以參考校準或是線上校準座標系 統表示); 缺陷類別爲缺陷之列舉;以及 frame索引爲包含該缺陷之訊框的索引。 接著’假使具有正確缺陷視窗對應該取名之檔案時,則 我們將所有缺陷視窗寫入至該檔案。此情形特別有利於視 覺化缺陷視窗。 最後’假使具有正確輸出視窗對應該取名之檔案時,則 首先執行附接於該視窗之功能,之後藉由考量該功能之回 轉狀恐而決定如何進行: 80- 本紙張尺度適財K ^鮮(CNS)A4規!) f請先閱讀背面之注意事項再I®· 裝 4^1· -線· 04 11 84 4 A7 B7 五、發明說明(78 ) 回轉碼 錯誤 0K 向前 向前子視窗 除以上各項之外 表3功能產生的各回轉狀態之動作 動作 工作以錯誤回轉。所有視窗被刪除 視窗被寫入至所需檔案。 如0K案例。 在該視窗中的所有子視窗被寫入至所需檔案 如錯誤案例。 (請先閱讀背面之注意事項再本頁) 裝 經濟部智慧財產局員工消費合作社印制衣 所認知地是,假使沒有功能附接於視窗時,則該回轉狀 態典型地爲0K。 繪圖校準之CEL 該繪圖校準之CEL工作考量各輸入CEL。假使該CEL 不在制訂於建構檔案之剪輯區内部時,則其由照相機轉換 爲校準座標以及寫入至以特殊圖形格式表示之檔案中並使 該檔案適合於觀看。 此工作有利於檢查在檢視系統内的校準轉換。較佳地是 ,該工作爲所有照相機執行以及輸出檔案爲相互重疊顯示 。良好的校準轉換爲將CEL由二重疊照相機轉換之轉換, 所以在二照相機重疊區域當中,該第一照相機之CEL準確 地位於該第二照相機之CEL之上。 功能 功能爲檢視方法之封裝以用於包含在檢視視窗中的影像 資訊。功能由視窗定向工作較佳地以預定順序啓動以檢視 視窗之影像資料内容,該工作較佳地爲如上文解釋之測試 -81 - 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) 線· 484104 消 費 合 作 社 印 製 A7 五、發明說明(79 ) 管理者或是多重截割管理者。該啓動工作在視窗中應用該 功能至資料以及以特定視窗執行功能爲引數。該功能在視 窗上執行孩計算工作以及如下文回轉3回轉碼其中之一。 依據該回轉碼,該呼叫工作決定接著該作何事。 各功能較佳地由建構檔案接收該計算所需之所有參數, 以及由該視窗擷取計算所需之影像資料資訊。較佳地是, 當在既定視窗上更複雜之計算爲需要時,功能爲模組化以 及鏈結在一起。 功能較佳地回轉3可能値其中之一: OK,指示該功能繼續其計算。 錯誤,指示該功能失敗於計算(例如,因爲錯誤或是嚴 重問題),或是 向前,指示該功能繼續其計算但指示需要其餘計算以 完成計算工作。該工作之完成爲藉由將視窗向前傳送至 向前目的地以及指定額外功能至視窗而執行。該啓動工 作典型地知道如何傳送該視窗至其向前目的地以及知道 如何啓動該向前功能。 向前子視窗,指示該功能繼續其計算但指示需要其餘 計算以完成計算工作。該工作之完成爲藉由將視窗中的 所有子視窗向前傳送至向前目的地以及指定額外功能至 各子視窗而執行。該啓動工作典型地知道如何傳送該子 視窗至其向前目的地以及知道如何啓動該向前功能。 不運作(NOP)功能 此功能不做任何事,以及較佳地回轉〇Κ値。 -82- 本紙張尺度適用中國國家標準(CNS)A4規格(21〇 x 297公^ ---------------I--裝--- (請先閱讀背面之注意事項再本頁) 訂· · -線· 484104 五、發明說明(80 )• Line · 04 1X 84 4 A7 _B7_ V. Description of the invention (75) A window for disassembling data. Preferably, the window is located in a calibration coordinate system. The multiple cropping manager unifies all windows with the same window identification number and stores the unified window into memory. The unified window surrounding all child windows is created and the function attached to the unified window is performed later. Based on the output of the viewing function, decide what to do as follows: Table 2 Multiple rotations of the manager corresponding to each rotation state Action rotation code error 0K Forward subwindow In addition to the above, the action window is deleted and worked Rotate window by mistake is deleted. Work continues to pop up a second window The window is transferred to the forward row. For error is error ------ I! — — — —Install i — ~ Please read the precautions on the back before this page) Order-Printed by the Intellectual Property Bureau Employee Consumer Cooperatives of the Ministry of Economics, it is typical that If no function is attached to the window, the rotation state is ΌΚ. % Trap writer / The device 1 writer preferably accepts 4 file names from the build file: (a) Output window file name: is a file containing a window. A '' none '' indicates that the file name is not the correct file name and that the file is typically not generated. (b) Defective window file name: It is one of the files containing defective windows. '' None '' indicates that the file name is not the correct file name and that the file is typically not generated. (c) Defect file reference coordinates: Includes defects expressed in reference calibration coordinates. 78- This paper size applies Chinese National Standard (CNS) A4 specifications (210 X 297 mm). Line _484104 A7 V. Description of the invention (76 Ministry of Economic Affairs) Printed by the Intellectual Property Bureau employee consumer cooperative == :, n ° ne ', 値 indicates that the name of the robbery is not the correct name of the building case and this bridge case is typically not generated. RLd) Defective building case online coordinates: To include online The deficiencies of the coordinate representation: two_e &quot; 値 refers to Qian Qian κZheng Yun case and this file is typically not generated. This defect composer performs the window from the input 1 1 pop-up window and preferably as 1. If the window contains defects: If you can not create a case with a defective window or output a case, the child Visual clover is stored for later processing. Otherwise, the window removes all its data except for defects and is stored for later processing. 2 If the window contains no defects: If an output window cannot be generated, the window is stored for later processing. After scanning, f, all previously saved windows are processed as follows: All defects generated by the All View® are accumulated. In the accumulation step ', a second vector of defects is established ... 1. The first vector containing the defects represented by reference calibration coordinates. Defects in each window are converted into a reference coordinate system by using the Self-reference affine conversion, which is preferably present in each window, and transmitting the visual content to the reference calibration coordinate system. Defects are added to the vector only if they are not in the mask field defined by the plM in the input PIM data source. If no PIM is defined, all defects are added to the vector. Then at the time of the mid-line at that time, the 79-paper size _ t _ specifications ⑵ "297 public fishing 484104 A7 printed by employees of the Intellectual Property Bureau of the Ministry of Economic Affairs Consumer Cooperatives V. Invention Description (77) 2 · Including the online calibration coordinates The vector of defects. This direction f is generated by the first to f by applying the registration information formulated for the job input. Please> Wang Yi When no input affine transformation is defined, the identity transformation is used. If included When a correct output file with one of the reference coordinates is defined, the first direction I is written to the child file. If a correct output file containing one of the online coordinates is defined, then the second vector is written into the file. Each of these defects The file contains a set of lines, one line corresponding to each defect. Each line typically has the following format ... XY-Defect category-Frame index where X and γ are the coordinates of the defect (indicated by reference calibration or online calibration coordinate system); The defect category is an enumeration of defects; and the frame index is an index of the frame containing the defect. Then 'if the file with the correct defect window corresponds to the name, we will The defective window is written to the file. This situation is particularly beneficial for visualizing the defective window. Finally, if the file with the correct output window corresponds to the named file, the function attached to the window is executed first, and then by considering the The rotation of the function may determine how to proceed: 80- The paper size is suitable for K ^ Fresh (CNS) A4 regulations!) F Please read the precautions on the back before I® · Install 4 ^ 1 · -line · 04 11 84 4 A7 B7 V. Explanation of the invention (78) Rotation code error 0K Forward and forward sub-windows In addition to the above, the actions of each rotation state generated by the functions in Table 3 work to rotate in error. All windows are deleted and the windows are written to Required files. Such as the 0K case. All sub-windows in this window are written to the required files such as error cases. (Please read the precautions on the back before this page.) Printed by the Intellectual Property Bureau Employee Consumer Cooperatives It is recognized that if there is no function attached to the window, the rotation state is typically 0K. CEL for drawing calibration The CEL work for drawing calibration takes into consideration CEL. If the CEL is not in the formulation When constructing the inside of the editing area of a file, it is converted by the camera into calibration coordinates and written into a file represented in a special graphic format to make the file suitable for viewing. This task is useful for checking the calibration conversion in the viewing system. Preferably, this work is performed for all cameras and the output files are displayed on top of each other. A good calibration conversion is the conversion of the CEL from the two overlapping cameras, so in the overlapping area of the two cameras, the CEL of the first camera is accurately located Above the CEL of the second camera. The function is a package of a viewing method for the image information contained in the viewing window. The function is preferably started by the window orientation task in a predetermined order to view the image data content of the window. The task It is better to test as explained above -81-This paper size applies Chinese National Standard (CNS) A4 specification (210 X 297 mm) line · 484104 Printed by Consumer Cooperative A7 V. Description of Invention (79) The manager or Multiple Cut Manager. The startup task applies the function to the data in the window and uses the window-specific function as an argument. This function performs one of the calculations on the window and one of the three rotation codes described below. Based on the turn code, the call job decides what to do next. Each function preferably receives all parameters required for the calculation from the construction file, and captures image data information required for the calculation from the window. Preferably, when more complex calculations are needed on a given window, the functions are modular and linked together. The function is better to go back to 3 possible one of them: OK, instruct the function to continue its calculation. An error indicates that the function failed the calculation (for example, because of an error or a serious problem), or it indicates that the function continues its calculation but indicates that the remaining calculations are required to complete the calculation. This task is performed by transmitting the window forward to the forward destination and assigning additional functions to the window. The startup job typically knows how to send the window to its forward destination and how to activate the forward function. Forward subwindow, indicating that the function continues its calculations but indicates that the remaining calculations are required to complete the calculation. This task is performed by transmitting all child windows in the window forward to the forward destination and assigning additional functions to each child window. The startup task typically knows how to pass the child window to its forward destination and how to activate the forward function. No operation (NOP) function This function does nothing, and preferably rotates to 〇Κ 値. -82- This paper size is in accordance with Chinese National Standard (CNS) A4 specification (21〇x 297cm ^ --------------- I--install --- (Please read the Note on this page) Order · ·-line · 484104 V. Description of the invention (80)

經濟部智慧財產局員工消費合作社印制衣 複合功能 此功能較佳地執行在埭媒4火也丄 、七 j仕遷構檔案中提供之一列表功能。这 些功能以在建構檔案中制訂之順序執行。 向前功能 此功能由建構樓案獲得A义 ,1 又件向則功能之名稱以及向前目的地 以用於其餘處理。該向前说处g A , , .. ^ 月J力月匕車乂佳地接受制訂向前之特殊 異常的旗標,典型地包含: 只有在照相機内部時向前之異常,運作爲確定視窗只有 完全在照相機邊界内時向前傳送。 只有在缺陷發現時向前之異常,運作爲確定視窗只有包 含缺陷時向前傳送。 向七子視窗之異常’具有眞僞旗標以及運作爲回轉狀態 ,如此假使孩旗標爲眞時,則回轉向前傳送子視窗狀態。 否則回轉向前狀態。 假使遇到下列狀況時,視窗較佳地爲不向前傳送: 1 .在視窗中沒有缺陷,然而假設爲該視窗被設定旗標爲只 有缺陷呈現在該視窗中時才向前; 2 ·該視窗不是完全位於照相機邊界内部,然而假設爲該視 窗被設定旗標爲只有完全位於照相機邊界内部時才向前。 轉換視窗爲參考座標功能 該轉換視窗爲參考座標功能由視窗移除不可轉換之資料 項目以及將視窗座標由線上影像座標轉換爲參考座標系統。 由視窗移除不可轉換資料項目之功能 該由視窗移除不可轉換資料項目之功能較佳地移除不可 -83- 本紙張尺度適用中S S家標準(CNS)A4規格(210 X 297公爱) —^ —j.-------裝·— ~請先閲讀背面之注意事項再β本頁) 訂· -線· 11 84 4 A7 _B7__ 五、發明說明(81) 轉換影像資料,例如存在於視窗中的CEL。 監視功能 watch功能掃描視窗内之所有輸入CEL。在包圍參考視 窗之四邊形内發現的每一 CEL被報告爲一缺陷。此功能典 型地用於値得確定缺乏任何特徵之區域。例如在BGA的檢 視本文中,監視功能可以應用至在必須絕對沒有任何特徵 之由上而下視窗中定義之區域。 視窗内部缺陷過濾功能 視窗内部缺陷過濾功能爲附接於PIM資料源。該功能接 收參考校準座標之PIM。當執行時,該功能轉換輸入缺陷 爲參考校準座標系統,以及將該校準缺陷與PIM核對。假 使該缺陷發現在由PIM制訂的遮罩區内部時,則該缺陷被 過濾掉,否則被放入至缺陷之輸出列表中。 連接之元素功能 連接之元素功能由存在視窗内部之CEL建立連接之元素 ,(包含二進制CEL和彩色CEL)。所形成的連接之元素被 放置在視窗中,較佳地由該向量化器功能更進一步處理, 如下文説明。 向量化器功能 向量化器功能取得連接之元素以及藉由直線近似化各連 接之元素,所以連接之元素和直線之差異不多於由建構檔 案制訂的規定容限。 球(圓)模式化和檢視功能 較佳地使用於BGA檢視本文中之球模式化功能,一般説 -84- 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) •--—0---J----------- (請先閱讀背面之注意事項再本頁) · 經濟部智慧財產局員工消費合作社印製 484104 A7 五、發明說明(82 ) 明如下。球模式化功能爲模式化類別之典範,爲適合使用 於檢視在由上而下視窗本文的檢視下物件之線上影像。 是直連接之元素的球模式化 〜 球模式化處理在檢視視窗内部發現的連接之元素1力 能在學習階段中運作爲準備參考模式,以及在檢視階^中 決定檢視下物件之線上影像的球之特徵。假使連接之元素 不是已經存在時,則該功能由CEL產生連接之元素。檢視 視窗只應該包含球。因此,假使視窗中的連接之元素爲封 閉時’假設爲單一球’然而假使連接之元素爲開放時,假 設爲球之部分。該功能分析連接之元素以確定是否眞的爲 一球’例如藉由測試中(點然後量測沿著連接之元素的外 圍《半徑以決定是否在預定容限内。在單一連接之元素的 圓狀上的’貝訊保持在表示爲一般化圓之資料結構中。 準備球視窗以用於參考 準備球視窗以用於參考由視窗移除除了球以外的所 件。 歷參考球與線上球做比輕 將參考球與線上球做比較功能將在正檢視之物件的參 影像中的球與在線上影像中的球做比較。較佳地是,線上 球的位置和半徑和球的參考資訊比較。假使線上球且 似半徑,具有規定容限,以發 、^ ^ 艰兄在參考又規疋距離内時 ,在線上影像中的球視爲匹配在參考影像中的球。 CEL與向量比毒 CEL與向量比較功能比較由參考視窗獲得的參考向量( -85 - 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公爱__ --------------裝--- ~請先閱讀背面之注意事項再®:本頁) . ;線· 經濟部智慧財產局員工消費合作社印製 484104 A7 ---------- 五、發明說明(84 ) 候選缺陷或是眞實的缺陷。 如解釋中所見,不論推測突起部1〇7〇,所有CEL 1〇6〇 之聚集位於包絡1030所定義之區域内。因此,如本發明之 一較佳具體實施例,CEL至向量輸出在包絡1〇3〇外部CEL 10 6 0之缺陷。 在圖30C中’亦看到CEL 1080之第二聚集整個位於包絡 1030外部。在第二聚集之各CEL 1080被設定旗標爲缺陷 。容易認知地是位於包絡1〇3〇外部之CEL如CEL 1080可 以經由缺陷處置器功能過濾,而報告爲缺陷或是過遽爲不 感興趣。 該CEL至向量功能較佳地依據下列順序進行: 一檢視視窗如視窗1000爲檢查CEL之呈現以及確定在 視窗中的CEL數不超越允許包含於檢視視窗中的最大CEL 數。較佳地是,CEL數爲藉由計數各CEL的中點而計算。 所έ忍知地是該參數爲可變的以及可以回應在影像中之視窗 位置而設定或是改變。 視窗1 000檢查參考聚合線1 0 1 0之呈現。假使檢視視窗 不包含聚合線1 0 1 0時,則回轉一缺陷。 較佳地是,聚合線1010和CEL 1030、1040以及1060 聚集爲微註册。現在參考圖3 1 -32Β,該圖顯示和説明微註 册的幸父佳方法’其中圖3 1爲適合於在檢視視窗中微註册參 考影像和線上影像之較佳方法的流程圖,圖32Α爲不以多 邊形(聚合線)參考微註册的CEL 1110聚集之簡化圖像解釋 ,而圖32Β爲如該較佳方法微註册之後以其參考註册之 _ - 87 _ 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公爱) ---- ^------------裝--- (’請先閱讀背面之注意事項再β本頁) tr口,. 丨線· 經濟部智慧財產局員工消費合作社印製 A7 經濟部智慧財產局員工消費合作社印?农 五、發明說明(85 ) CEL聚集的圖像解釋。 微1主册較佳地如下文進行:. y釅1100伋於檢視視窗1120中的各CEL 111〇被檢查 ,而在圍繞參考聚合線114()之至少_包絡n則的那: CEL 1 1 1 〇被識別以及近似帶標籤; 步驟1200、·在包絡1130内的各CEL 1110爲方向而檢查 0各CEL之方向’依據檢視需求而在由建構檔案提供的角 度容限範圍内,與聚合線114〇相同,表示爲”匹配”cel 1210 ; 、步驟1300 :最小平方計#依據各匹配弧i2i〇與其鄰 近聚合線之間的距離執行’而在線上影像中之c e l i 2 i 〇聚 集相得聚合線1 140移動直到値爲最小化爲止。當該値爲最 小化時,該影像被微註册,如圖32β所見。 在微狂册之後,CEL至向量比較如下執行: 包絡1030(圖30A)被建立在參考聚合線周圍,寬度等於 建構變數的値。 後、續,CEL 1040與包絡1〇3〇比較。假使CEL 1〇4〇沒有 發現在任何包絡時,報告一缺陷。較佳地是,各包絡記錄 所有呈現在包絡1030内部之CEL 1040數和長度。假使沒 有CEL記錄在檢視視窗1 〇〇〇中的既定包絡時,指示影響之 包絡爲空白的缺陷報告於該包絡之中點。 力領域建立參考視窗 由壓焊領域建立參考視窗之功能較佳地在B GA檢視中 執行。由壓焊領域建立參考視窗之功能運作爲分析連接之 -88 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐 (請先閱讀背面之注意事項再本頁) 裝 訂: •線. 04 1X 84 4Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. This function is a better function to perform one of the list functions provided in the media 4 Huoyao and Qishishi restructuring files. These functions are performed in the order specified in the build file. Forward function This function obtains the meaning of A from the construction project, 1 the name of the forward function and the forward destination for the rest of the processing. The forward direction g A,, .. ^ Month J Liyue dagger car accepts the flag of making special anomalies forward, typically including: Anomalies forward only when inside the camera, operates as a confirmation window Only forward when fully within the camera's boundary. The anomaly is forwarded only when a defect is found, and it works to make sure that the window only transmits forward if it contains a defect. The abnormality of the seven sub-windows has a false flag and the operation is in a state of rotation, so if the child flag is 眞, the state of the child window is transmitted forward. Otherwise, it will turn forward. The window is preferably not forwarded if the following conditions are encountered: 1. There are no defects in the window, but it is assumed that the window is set to flag only if the defect is present in the window; 2 The viewport is not completely inside the camera boundary, however it is assumed that the viewport is set to be flagged to move forward only when it is completely inside the camera boundary. Transform window into reference coordinate function This transform window uses reference coordinate function to remove non-convertible data items from the window and convert window coordinates from online image coordinates to reference coordinate system. The function of removing non-convertible data items from the window The function of removing non-convertible data items from the window is better to remove the non-convertible -83- This paper size applies to the SS home standard (CNS) A4 specification (210 X 297 public love) — ^ —J .------- installation · — ~ Please read the precautions on the back before β page) Order · -line · 11 84 4 A7 _B7__ V. Description of the invention (81) Convert image data, for example The CEL that exists in the window. Watch function The watch function scans all input CEL in the window. Each CEL found within the quadrilateral surrounding the reference window is reported as a defect. This feature is typically used to identify areas that lack any features. For example, in the BGA inspection article, the monitoring function can be applied to areas defined in a top-down window that must have absolutely no features. In-window defect filtering function In-window defect filtering function is attached to the PIM data source. This function receives the PIM with reference to the calibration coordinates. When executed, this function converts the input defect into a reference calibration coordinate system and checks the calibration defect with the PIM. If the defect is found inside the mask area specified by PIM, the defect is filtered out, otherwise it is put into the output list of the defect. Linked element functions Linked element functions are established by the CEL stored in the window (including binary CEL and color CEL). The resulting connected elements are placed in a window, preferably further processed by the vectorizer function, as explained below. Vectorizer function The vectorizer function obtains the connected elements and approximates each connected element by a straight line, so the difference between the connected element and the straight line is not more than the specified tolerance established by the construction file. The ball (circle) patterning and viewing functions are preferably used in the BGA viewing ball patterning function in this article. Generally speaking -84- This paper size is applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) •- -—0 --- J ----------- (Please read the notes on the back first and then this page) · Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 484104 A7 V. Description of Invention (82) The description is as follows. The ball patterning function is a model of the patterning category, and is suitable for viewing online images of objects under the view of the text from the top-down window. It is a ball patterning of directly connected elements ~ The ball patterning processes the connected elements found inside the viewing window. 1 The force can operate in the learning phase as a reference preparation mode, and in the viewing stage, it determines the viewing of the online image of the object under review. The characteristics of the ball. If the connected element does not already exist, this function generates the connected element by CEL. The viewport should only contain balls. Therefore, if the connected elements in the window are closed, "assuming a single ball", but if the connected elements are open, the part of the ball is assumed. This function analyzes the connected elements to determine if they are a ball. For example, by testing (points and then measuring the radius along the periphery of the connected element to determine whether it is within a predetermined tolerance. The circle in a single connected element The 'beixun' in the state remains in the data structure represented as a generalized circle. Prepare the ball window for reference. Prepare the ball window for reference. Remove all but the ball from the window. Refer to the reference ball and the online ball. Compare the reference ball with the online ball. Compare the ball in the reference image of the object being viewed with the ball in the online image. Preferably, the position and radius of the online ball are compared with the reference information of the ball. If the ball on the line is similar to the radius and has a specified tolerance, the ball in the online image is regarded as the ball matching the reference image when the brother is within the reference and the distance is specified. CEL and vector comparison CEL and vector comparison function compares the reference vector obtained from the reference window (-85-This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 public love __ ------------- -Install --- ~ Please read the note on the back first Matters needing attention®: this page).; Line · Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 484104 A7 ---------- V. Description of Invention (84) Candidate defects or actual defects. It can be seen from the explanation that, regardless of the projection 1070, the aggregation of all CELs 1060 is located in the area defined by the envelope 1030. Therefore, as a preferred embodiment of the present invention, the CEL to vector output is in the envelope 1 〇30 The defect of the external CEL 10 60. In FIG. 30C, it is also seen that the second cluster of CEL 1080 is located entirely outside the envelope 1030. Each CEL 1080 in the second cluster is flagged as a defect. It is easy to recognize that A CEL such as CEL 1080, which is located outside the envelope 103, can be filtered by the defect handler function and reported as defective or too uninteresting. The CEL to vector function is preferably performed in the following order: A viewing window such as a window 1000 is to check the presentation of CEL and make sure that the number of CELs in the window does not exceed the maximum number of CELs allowed in the viewing window. Preferably, the CEL number is calculated by counting the midpoint of each CEL. Ground is variable And can be set or changed in response to the position of the window in the image. Window 1000 checks the presentation of the reference polyline 1 0 1 0. If the viewing window does not contain the poly 1 100, the defect is turned back. Better Yes, aggregation lines 1010 and CEL 1030, 1040, and 1060 are aggregated into micro-registrations. Now refer to Figures 3 1-32B, which shows and explains the good method of micro-registration. Among them, Figure 3 1 is suitable for micro-registration in the viewing window. A flowchart of the preferred method for registering reference images and online images. Figure 32A is a simplified image interpretation of CEL 1110 gathered without reference to a polygon (polyline) reference micro-registration. Its reference registration _-87 _ This paper size applies to China National Standard (CNS) A4 specification (210 X 297 public love) ---- ^ ------------ installed --- (' Please read the precautions on the back before β page) tr .. 丨 Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 Printed by the Consumer ’s Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs? Agriculture V. Description of invention (85) Interpretation of images gathered by CEL. The micro 1 master book is preferably performed as follows: y 酽 1100 draws each CEL 111 in the viewing window 1120 to be checked, and at least _envelope n surrounding the reference aggregation line 114 (): CEL 1 1 1 〇 Identified and similarly labeled; Step 1200, · Each CEL 1110 within the envelope 1130 is the direction and check 0 The direction of each CEL 'according to the viewing requirements within the angle tolerance provided by the construction file, and the aggregation line 114〇 Same, expressed as "match" cel 1210; Step 1300: Least square meter #Performed according to the distance between each matching arc i2i〇 and its neighboring aggregation line, and the cele 2 i 〇 aggregation phase in the online image is aggregated Line 1 140 moves until 値 is minimized. When the 値 is minimized, the image is micro-registered, as seen in Figure 32β. After the micromania book, the CEL-to-vector comparison is performed as follows: The envelope 1030 (Figure 30A) is established around the reference aggregation line, with a width equal to 値 of the construction variable. Later, continued, CEL 1040 was compared with envelope 1030. If CEL 1040 does not find any envelope, a defect is reported. Preferably, each envelope records the number and length of all CEL 1040 present inside the envelope 1030. If no CEL is recorded in a predetermined envelope in the viewing window 1000, a defect indicating that the affected envelope is blank is reported at the midpoint of the envelope. The function of creating a reference window in the force field is preferably performed in the B GA view. The function of establishing the reference window from the field of pressure welding is to analyze the connection. -88 This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm (please read the precautions on the back before this page). . 04 1X 84 4

五、發明說明(86 元素以及發現連接之元+县殺含‘ ^ m ^^ ^ ·、疋%馬黾力線”功能實體之部分 。使用者…建構變數’調適爲 ,以及使用於製成決定虛理φ ^ Κ伢刎、,口構 疋處理中。偵測到電力線時,朱考3 個檢視興趣之計算被執行: /可 -緊要’肖較佳地展現嚴格定義屬性如位置 -㈣Γ ί具有相對必要屬性和位置之大程度緯度區 -不穩足’爲位置不用; 不用視馬缺陷的區。不穩定區只有假 使由建構變數請求時才檢視。 建立焊整參考子視窗之功能亦較佳地運作於BGA檢視 中’以及適合於利用爲偵測檢視視窗是否包圍任何焊塾。 心力能分析在視窗中的所有連接之元素,以及識別執 之部分的那些連接之元素。緊要、非緊要純 佳地識別。 在缺乏變化地S要不穩定區之計算的建構中,同質彩色 群體之外圍(由Μ啦識別)爲型態地膨脹,在BGA檢視 (較佳具體實施例中由所有其他材料分離悍接遮罩區域。 至向量錯誤分類 /、土地,所有CEL至向量錯誤均視爲缺陷。然而,有時 CEL至向量可以指示”表面缺陷,,之呈現。表面缺陷爲呈現 在參考資料中的外部連接之元素。 現在參考圖30C。假設參考聚合線1〇1〇爲一焊墊。如較 佳具體實施例,假使CEL聚集125〇被偵測爲具有與相當= 參考影像中之所需焊墊的聚合線1〇1〇極性相反之極性時, 則指示”針孔”。極性分別爲CEL或是聚合線之方位。 •--·ι— 丨丨丨丨 111· ·丨 I (請先閱讀背面之注意事項再本頁) 訂: --線· 經濟部智慧財產局員工消費合作社印製 -89 -V. Description of the invention (86 elements and the found connection element + county killer containing '^ m ^^ ^ ·, 疋% horsepower force line' part of the functional entity. The user ... construct variable 'is adapted to, and used to determine the virtual The processing of φ ^ Κ 伢 刎, and the structure of the mouth is in progress. When the power line is detected, Zhu Kao's calculation of 3 viewing interests is performed: / 可 -critical 'Xiao preferably exhibits strictly defined attributes such as location-㈣Γ ί has Relatively necessary attributes and positions to a large degree of latitude area-instability are used for location; areas where horse defects are not considered. Unstable areas are only viewed if requested by construction variables. The function of creating a welding reference sub-window is also better Ground operation in BGA inspection 'and suitable for detecting whether the inspection window surrounds any welds. Mind can analyze all connected elements in the window, as well as identify those connected elements of the execution part. Critical, non-critical pure In the construction of the calculation of the unstable region where there is no change, the periphery of the homogeneous color group (identified by M La) is swelled in a pattern, and it is viewed in the BGA (preferably concrete). In the embodiment, all other materials are used to separate the masked areas. To vector error classification /, land, all CEL to vector errors are considered defects. However, sometimes CEL to vector can indicate "surface defects," which appear. Surfaces The defect is an element of the external connection presented in the reference material. Now refer to FIG. 30C. Assume that the reference aggregation line 1010 is a pad. As in the preferred embodiment, if the CEL aggregation 125 is detected as having an equivalent = In the reference image, if the polymer wire of the required pad 1010 has the opposite polarity, it indicates "pinhole". The polarity is CEL or the orientation of the polymer wire, respectively. •-· ι— 丨 丨 丨 丨111 · · 丨 I (Please read the precautions on the back before this page) Order: --Line Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs -89-

^4104 A7 B7 五、發明說明(87 褒處理 現在參考圖33,該圖爲如較佳且體 示結合影像後處理系統之運作,如可以^成程圖,顯 理器26(圖1A)中的工作。在圖 ^在影像後處 工作if作爲甲描繪的影像後處理器 品= :==:=,其 數在烊塾上的鍵金中的單獨二= 又,.、、而假使針孔數爲超越定限時,則開 在此具體實施例中,在物件之影像中的缺陷制 ^是小缺陷。在影像中的正規缺陷相當於在 缺陷’典型地爲不可容錯,而少數小缺陷相當於在物件見 的正規缺陷,典型地爲可容錯。在上文提供〇丨+卜 孔缺陷可視爲小缺陷,而遺漏特徵如遺漏焊塾可正缺陷。 步碟3305 :使用者制訂用於定義在影像中的缺陷之準 :丨類似於圖34_42的那些勞幕顯示允許使用者制訂缺陷 步驟3310 :假使任何類別之小缺陷爲最高可容錯 時,則對各類別之小缺陷而言,使用者制訂可以容錯之 類別小缺陷的最大數(χ)。該數目(χ)可以爲一缺陷或是多 一缺陷。實際上,特別類別之小量χ+1爲不可容錯。 步驟3315 :該影像被檢視,較佳地依據使用參考本發 圖1A-3 2B顯示和説明的至少一影像處理方法。 步驟3 3 2 0 :決定樹決定是否發現缺陷。 中 針 則 準 線 各 於 明 I - 90 - ^紙張尺度適时關家標準(CNS)A4規格⑵G χ撕公爱 484104 Α7 -___________ Β7 經濟部智慧財產局員工消費合作社印制衣 五、發明說明(88) 步驟3325 :假使沒有發現缺陷時,則該影像視爲〇κ。 步驟3330 :更進一步之決定樹接著分類該缺陷爲正規或 是小缺陷。 步驟3 3 3 5 ·假使正規缺陷呈現時,則發出缺陷。 步驟3 3 4 0 :各類別之小缺陷被計數。 步驟3345 :假使小缺陷類別的數目小於既定類別的許可 小缺陷數目時,則不發出缺陷。然而假使小缺陷類別的數 目大於該類別的許可小缺陷容錯數目時,亦即η&gt;χ時,則 缺陷報告在步驟3335回轉。 容易認知地是影像處理系統之使用者包含參考圖33説 明之小缺陷後處理器,典型地決定用於影像檢視之參數和 準則,以及相同或是分離參數可以利用於使用者制訂之感 興趣領域的檢視,以及用於單一處理器制訂之缺陷識別二 所認知地是先前提到之後處理單元説明不打算限制於先 前提到之方法,而是後處理方法可以被利用。合適的後處 理方法可以包含,例如更進一步分析圍繞候選彩色缺陷之 感興趣區域的功能,功能運作爲識別和分類由氧化和光阻 殘餘物形成的缺陷,以及可以藉由健全影像之所選擇區段 的額外影像處理加以過濾之其他合適的缺陷候選。 一艇:使用者介面 所認知地是如本發明之影像處理系統爲特別彈性化,以 及使多數檢視參數被識別和控制,參數以舉例方式而非限 制包含邊參數、校正、重複、Ιρ、顏色和光線。 檢視準則亦較佳地由使用者制訂。該參數可以包括以舉^ 4104 A7 B7 V. Description of the invention (87 褒 Processing Now refer to Figure 33. This figure is as good as showing the operation of the combined image post-processing system. If it can be converted into a process chart, the display device 26 (Figure 1A) In the figure ^ work behind the image if as the image post-processing product depicted by A =: ==: =, the number of which is the only two of the key gold on the = = again,. ,, and if the needle When the number of holes exceeds the fixed limit, in this specific embodiment, the defect system in the image of the object is a small defect. The regular defect in the image is equivalent to the defect 'typically not tolerant, and a small number of small defects. It is equivalent to the regular defect seen in the object, which is typically fault-tolerant. The holes provided above can be regarded as small defects, and missing features such as missing welds can be positive defects. Step disc 3305: User-defined The definition of defects in the image: 丨 similar to those shown in Figure 34_42 allows the user to formulate the defect step 3310: if the small defects of any category is the highest tolerance, then for the small defects of each category, use Minor faults The maximum number (χ). The number (χ) can be a defect or a defect. In fact, a small amount of +1 in a particular category is not tolerant. Step 3315: The image is viewed, preferably based on the use reference At least one image processing method shown and explained in Figures 1A-3 2B of this issue. Step 3 3 2 0: Determine the tree to determine whether a defect is found. The middle hand guideline varies from Ming to Ming. (CNS) A4 specifications ⑵G χ tear public love 484104 Α7 -___________ Β7 Printing of clothing by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the invention (88) Step 3325: If no defect is found, the image is regarded as κ. Step 3330: The further decision tree then classifies the defect as regular or small. Step 3 3 3 5 • If a regular defect is present, a defect is issued. Step 3 3 4 0: Small defects of each category are counted. Step 3345: No defect will be issued if the number of small defect classes is less than the permitted small defect number of a given class. However, if the number of small defect classes is greater than the permitted small defect tolerance number of the class, that is η &gt; χ, the defect report turns at step 3335. It is easy to recognize that the user of the image processing system includes a small defect post-processor described with reference to FIG. 33, and typically determines the parameters and criteria for image viewing, and the same or Separation parameters can be used for the user-defined view of the area of interest, and for the identification of defects identified by a single processor. The second is that the processing unit description is not intended to be limited to the previously mentioned method. Processing methods can be used. Suitable post-processing methods can include, for example, further analysis of the function of the area of interest surrounding the candidate color defect, the function operation is to identify and classify defects formed by oxidation and photoresist residues, and can be improved by sound Additional image processing of selected sections of the image to filter other suitable defect candidates. One boat: The user interface recognizes that the image processing system of the present invention is particularly flexible, and allows most viewing parameters to be identified and controlled. The parameters include, by way of example and not limitation, edge parameters, correction, repeat, Iρ, color And light. Viewing criteria are also preferably developed by the user. This parameter can include

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例方式而非限制可以包括類別、位置 空穴之由上而下視窗的内奋 目“終墊和 亦可以被提供,例如最小::力::類似物。其餘參數 J ^^線見。如本發明 較佳地與將檢視之數件上的特龍域_連。。種參數爲 現在參考圖34-42 ,哕圓金产m、人 者定義期間由影像處理二產生的之使用 發明之較佳I體實施例建立和運作。’、众子,如本 =34爲允許使用者制訂_般檢視準則的勞幕顧示。 图35馬允較用者制訂壓焊檢視準則的螢幕顯亍。 二許二用者制訂目標檢視準則的勞幕顯示。 例;。 者制訂電力線檢視準則的勞幕顯示之 子圖38_39爲允許使用者制訂球檢視準則的螢幕顯示之例 參= = 者制訂物件之影像先進檢視準則和 :本發明之一較佳具體實施例,二部分 =供於定義將檢視之物件中的感興趣區域,如:。 視之物件的圖形表示被提供,:使其中將檢 砧』1 &lt; 、 便用者具有疋指裝置典型 〜,、(協助,在檢視之特別感興趣之 類別上指定。在第二部分中,表m…w表不 興趣之區域。 參數&amp;供於被指定之特別感 此專利文件的一部份揭示包含受到版權保護的材料。該 -92 --裝 (請先閱讀背面之注意事項再!^本頁) 訂- •線- 經濟部智慧財產局員工消費合作社印製 ^4104 、發明說明(9〇 ) =權擁有,不反對由專利文件或是專利揭示的任何 :再製’局出現在專利和商標局檔案或是記 : 所有版權。 =則保留 、/斤認知地是本發明之軟體組件假使需要時可以製作在唯 謂記憶體形式(ROM)中。該軟體組件假使需要時一般可= 使用傳統技術製作在硬體及/或Dsp單元中。 所認知地是爲了明瞭性,在分開具體實施例説明的本笋 明〈各種特徵亦可以提供在單一具體實施例中。相反地: 爲了簡潔性,在單一具體實施例説明的本發明之各種特徵 亦可以分開提供或是提供在任何合適的次組合中。 將認知地是對任何熟知相關技藝之人士而言,本發明不 限於已經在上文特別顯示和説明的任何實施例。而丄,本 發明之範疇只是由接著的申請專利範圍所定義。 « — — ^• — — ^• — — — 1 — — · ^ · 11 ί請先閱讀背面之注意事項再本頁} 訂· 經濟部智慧財產局員工消費合作社印製 -93- 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐)Examples and methods are not limitative, but can include categories, location holes, top-down views of the top-down window, and "final pads" can also be provided, such as minimum :: force :: analogue. See the remaining parameters J ^^ line. The present invention is preferably related to the Tron domain on several pieces to be inspected. The parameters are the ones of the present invention, which is generated by image processing 2 during the definition period of Yuanyuan Gold M and the person with reference to Figure 34-42. The establishment and operation of the preferred embodiment. ', Zhongzi, such as this = 34 is a labor display that allows users to formulate general inspection criteria. Figure 35 Screen display of Ma Yun comparing the criteria for pressure welding inspection by the user For example, the user can set the target display criteria for the labor display. For example, the child can display the power line inspection guidelines for the child display. Figure 38_39 is an example of the screen display that allows the user to formulate the ball viewing guidelines. Advanced image review guidelines and: a preferred embodiment of the present invention, two parts = for defining the area of interest in the object to be viewed, such as: The graphical representation of the viewed object is provided, so that the anvil will be inspected 』1 &lt; It means that the device is typical ~, (assistance, specified on the category of particular interest in the review. In the second part, the table m ... w indicates the area of non-interest. Parameters &amp; are provided for the designated special feeling of this patent Part of the document reveals that the copyrighted material is included. The -92-Pack (please read the precautions on the back! ^ This page) Order-• Line-Printed by the Employees' Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs ^ 4104 2. Description of the invention (9〇) = ownership, no objection to the disclosure of patent documents or patents: reproduction's office appears in the file of the Patent and Trademark Office or records: All copyrights are reserved. The invented software component can be produced in ROM only if needed. The software component can generally be produced in hardware and / or Dsp unit using traditional technology if needed. It is recognized for clarity Various features of the present invention described in separate embodiments can also be provided in a single specific embodiment. Conversely: for the sake of simplicity, the various features of the invention described in a single specific embodiment can also be It is provided separately or in any suitable sub-combination. It will be recognized that for anyone skilled in the relevant art, the present invention is not limited to any embodiment that has been specifically shown and described above. Rather, the present invention The scope is only defined by the scope of the subsequent patent application. «— — ^ • — — ^ • — — — 1 — — · ^ · 11 ί Please read the notes on the back before this page} Printed by Consumer Cooperatives-93- This paper size applies to China National Standard (CNS) A4 (210 X 297 mm)

Claims (1)

484104 A8 B8 C8 D8484104 A8 B8 C8 D8 1· 一種用於檢視物件的方法,該方法包括: 創造代表性物件的參考影像,該參考影像包含影像内 邊界之至少部分向量化的第一表示; 獲取在檢視之下物件的影像,包括影像内邊 表示;以及 — 將邊界之第二表示與邊界之至少部分向量化的第一表 示比較,藉此辨識缺陷。 2·如申請專利範圍第1項之方法,其中該比較步驟利用_ 個使用者選擇的可變門限用於介於第一和第二表示之門 的邊界相對應郁分之可接受距離。 3· —種用於影像處理的系統,包括·· 邊界識別器,運作爲產生在影像中已知元素邊界之表 示; 硬體候選缺陷識別器,可操作以硬體識別在影像中之 候選缺陷; 軟體候選缺陷檢視器,由硬體候選缺陷識別器接收輸 出以及以軟體使用邊界表示以識別在該輸出内的至少— 假警報。 經濟部智慧財產局員工消費合作社印製 4. 如申請專利範圍第3項之系統,其中該邊界識別器包括 一硬體邊界識別器,運作爲以硬體產生影像中已知元素 邊界之表示。 5. 如申請專利範圍第3項之系統,其中該系統亦包含軟體 候選缺陷識別器,運作爲以軟體識別影像中之其他候選 缺陷。 -94- 本紙張尺度適用中國國家標準(CNS ) A4規格(210X297公釐) 6·如申請專利範圍第5項之系統,其中該軟體候選缺陷檢 視器亦由該軟體候選缺陷檢視器接收第二輸出以及以軟 随使用邊界之表示以識別在輸出内的至少一假警報。 7’如申請專利範圍第3項之系統,其中該硬體候選缺陷識 別器利用邊界之表示以識別至少一些候選缺陷。 8·如申請專利範圍帛5項之系統,其中該軟體候選缺陷識 別器利用邊界之表示以識別至少一些候選缺陷。 9· 一種用於影像處理之系統,包括: ^ 一 一學習次系統,可操作以界定在檢視下物件的第一和 第二領域,其中第一領域各包含至少一已知的緊要物件 元素而第二領域不包含該已知的緊要物件元素;以及 缺陷偵測器’運作爲依據已知的緊要物件元素相關 :先前知識使用第一程序以檢視第一領域,以及使用與 弟一裎序不同的第二程序以檢視第二領域。 經 濟 部 智 慧 財 產 局 貝 工 消 費 合 h 社 印 製 10·如申請專利_ 9項之系統,其中該第二程序包括第 二領域的硬體檢視,運作爲識別第二領域中的候選缺陷 以及包括第二領域的後序軟體檢視,只有假使在第二顧 域中發現至少-候選缺陷時,運作爲分析在第二領域中 發現的該至少一候選缺陷,以由此識別假警報。 U·—種用於檢視物件之方法,包括: 在檢視的第一階段中: 識別該至少一候選缺陷的位置;以及 對各候選缺陷而言,在該位冒 在Θ u s &lt;候選領域的決定用 於至少部分依據該識別步驟之輪 哥出的外圍領域至少大 _ -95 _ 本紙張尺度適用中家標準(CNS ) — 抑 4104 ABCD 、申請專利範圍 經濟部智慧財產局員工消費合作社印製 小和形狀的檢視;以及 在檢視的第二階段中: 檢視各候選領域以確認該缺陷。 12·如申請專利範圍第n項之方法,其中該第一階段以硬體 Jb 疋成0 13·如申請專利範圍第11項之方法,其中該第一階段以軟體 完成。 14·如申請專利範圍第丨丨項之方法,其中該決定步驟包括決 定在一已知位置之候選領域的大小。 15·如申請專利範圍第丨丨項之方法,其中該第二階段包括依 據該候選領域或是該候選缺陷的準則執行不同的檢視。 16·如申請專利範圍第丨丨項之方法,其中該第二階段包括依 據在識別步驟中識別的該至少一候選缺陷之特徵執行不 同的檢視。 17·如申請專利範圍第11項之方法,其中該第二階段包括依 據物件部分之功能執行不同的檢視。 18·如申請專利範圍第11項之方法,其中該第二階段包括依 據物件部分之功能之緊要程度執行不同的檢視。 19· 一種具有使用者可定作的影像分析功能之模組化影像處 理系統,與掃描器結合使用;該系統包括: 一影像處理引擎,由該掃描器接收將要分析之至少一 影像資料申流;以及 一引擎建構器,可操作以接收將要由影像處理引擎在 影像資料上執行的至少一使用者可定作的影像分析功能 -96- 本紙張尺度 2T^7—n 請 閱 讀 背 ιέ 5 意 事 項 再 頁 裝 訂 線 ABCD 經濟部智慧財產局員工消費合作社印製 六、申請專利範圍 之一序列定義; 纟中像處理引擎運作爲依據饋送至該引擎建構器 的序収義中之各定義分析至少―通道影像資料,包含 執行不同的杉像分析功能,依據由該序列定義到達該引 Μ構器之現行定義’不僅有關參數相互不同。 20.—種用於自動光學檢視物件之方法,包括·· 在第一檢視步驟中: 足義用於影像處理之多數感興趣區域,該咸興趣區 域包含由使用者定義之至少一感興趣區域以^由光學 式檢視物品而自動定義之至少一感興趣區域;以及 $供與圍繞各感興趣區域之影像至影像處理器; 在第二檢視步驟中: 自動處理圍繞感興趣區域之領域的各該影像以決定 物品缺陷之呈現。 21.如申請專利範圍第20項之方法,其中圍繞感興趣區域之 領域的各影像小於物件之影像。 22·如申請專利範圍第2〇項之方法,其中由光學式檢視物品 而自動足我之感興趣區域,包括在物件上形成之圖形的 候選缺陷。 23·如申請專利範圍第2〇項之方法,其中由光學式檢視物品 而自動疋義之感興趣區域,包括在物件上形成之圖形的 預定型態特徵。 24·如申叫專利範圍第2〇項之方法,其中該提供步踩額外包 括提供感興趣區域之彩色影像至該影像處理器。 -97- ^紙張尺度適用中國國家蘇Yc叫μ規格(2歐π7公董) ~1. A method for inspecting an object, the method comprising: creating a reference image of a representative object, the reference image including a first representation of at least a portion of a vectorization of an inner boundary of the image; obtaining an image of the object under inspection, including the image Inner edge representation; and-comparing the second representation of the boundary with the first representation of at least a portion of the vectorization of the boundary, thereby identifying defects. 2. The method according to item 1 of the patent application range, wherein the comparison step uses _ user-selectable variable thresholds for the acceptable distance corresponding to the depression between the boundaries of the gates of the first and second representations. 3. A system for image processing, including a boundary recognizer that operates to produce representations of known element boundaries in the image; a hardware candidate defect identifier that is operable to identify candidate defects in the image with hardware Software candidate defect viewer, which receives the output from the hardware candidate defect recognizer and represents it in software usage boundaries to identify at least-false alarms within the output. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 4. If the system of the scope of patent application No. 3, the boundary identifier includes a hardware boundary identifier, which operates to generate a representation of the boundaries of known elements in the image by hardware. 5. If the system of item 3 of the scope of patent application, the system also includes a software candidate defect identifier, which operates to identify other candidate defects in the image by software. -94- This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) 6. If the system of the scope of patent application No. 5 is applied, the software candidate defect viewer is also received second by the software candidate defect viewer The output and a soft-following boundary are used to identify at least one false alarm within the output. 7 'The system of claim 3, wherein the hardware candidate defect identifier uses a representation of a boundary to identify at least some candidate defects. 8. The system of claim 5, wherein the software candidate defect identifier uses the representation of the boundary to identify at least some candidate defects. 9. A system for image processing, including: ^ a learning sub-system operable to define a first and a second field of an object under review, wherein the first field each contains at least one known critical object element and The second field does not contain the known critical object element; and the defect detector's operation is related to the known critical object element: prior knowledge uses the first procedure to view the first field, and uses a different order than the brother The second procedure to view the second field. Printed by the Intellectual Property Bureau of the Ministry of Economic Affairs, Shelley Consumers Co., Ltd. 10 · The system for applying for patents_9, where the second program includes a hardware review of the second field, which operates to identify candidate defects in the second field and includes Subsequent software inspections in the second domain only operate if the at least one candidate defect found in the second domain is found to analyze the at least one candidate defect found in the second domain to identify false alarms. U · —A method for inspecting an object, including: In the first stage of inspection: identifying the position of the at least one candidate defect; and for each candidate defect, the position in the Θ us &lt; candidate field Decided to use at least part of the peripheral area that is based on this identification step. _ -95 _ This paper size applies the China Standard (CNS) — 4104 ABCD, patent application scope. Printed by the Consumer Property Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. Review of small and shape; and in the second phase of the review: Review each candidate area to identify the defect. 12. The method of applying for the item n of the patent scope, wherein the first stage is set to 0 by hardware Jb. 13 · The method of applying for the 11th scope of the patent scope, wherein the first stage is completed by software. 14. The method of claim 丨 丨, wherein the determining step includes determining the size of a candidate field at a known location. 15. The method according to item 丨 丨 of the patent application scope, wherein the second stage includes performing different inspections according to the criteria of the candidate field or the candidate defect. 16. The method according to item 丨 丨 of the patent application scope, wherein the second stage includes performing different inspections according to the characteristics of the at least one candidate defect identified in the identification step. 17. The method according to item 11 of the patent application scope, wherein the second stage includes performing different inspections according to the function of the object part. 18. The method according to item 11 of the patent application scope, wherein the second stage includes performing different inspections according to the criticality of the function of the object part. 19. · A modular image processing system with a user-definable image analysis function for use in conjunction with a scanner; the system includes: an image processing engine that receives at least one image data application stream to be analyzed by the scanner ; And an engine builder operable to receive at least one user-definable image analysis function to be performed on the image data by the image processing engine -96- paper size 2T ^ 7—n Please read me Matter rebinding page ABCD Printed by the Consumer Property Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs VI. One of the definitions of the scope of patent application; ―The channel image data includes performing different fir image analysis functions, and according to the current definition of reaching the M-structor from the sequence definition ', not only the relevant parameters are different from each other. 20. A method for automatically optically inspecting an object, including: In a first inspection step: sufficient for most regions of interest for image processing, the salty region of interest includes at least one region of interest defined by a user At least one region of interest that is automatically defined by optically viewing the object; and the image surrounding the region of interest to the image processor; in the second viewing step: automatically processing each region of the region surrounding the region of interest The image determines the appearance of the defect in the article. 21. The method of claim 20, wherein each image of the area surrounding the region of interest is smaller than the image of the object. 22. The method according to item 20 of the patent application scope, wherein the area of interest is automatically satisfied by optically inspecting the object, including the candidate defects of the pattern formed on the object. 23. The method of claim 20 in the scope of patent application, wherein the region of interest automatically defined by optically inspecting the object includes a predetermined pattern feature of a figure formed on the object. 24. The method as claimed in item 20 of the patent, wherein the providing step additionally includes providing a color image of the region of interest to the image processor. -97- ^ The paper size is applicable to the Chinese National Su Yc called μ specification (2 Euro π 7 male directors) ~ 4#4104 ABCD 六、申請專利乾圍 25·如申請專利範圍第20項之方法,其中該自動處理步驟包 括應用至少一影像處理方法至由使用者定義之感興趣區 域,該方法與應用至由光學式檢視物品而自動定義之感 興趣區域的影像處理方法不同。 26·如申請專利範圍第22項之方法,其中該提供步驟包括識 別感興趣區域中之缺陷類型,以及該自動處理步驟包括 應用適合於在該感興趣區域中之缺陷類型的影像處理方 法。 27. 如申叩專利範圍第23項之方法,其中該提供步驟包括識 別感興趣區域中之型態特徵類型,以及該自動處理步驟 包括應用適合於在該感興趣區域中之型態特徵類型的影 像處理方法。 ~ μ 28. 如申請專利範圍第2〇項之方法,其中由使用者定義之該 至少二士興趣區域’在軟體定義步驟以光學式檢視該物 件夂則疋我,由光學式檢視物品而自動定義之威興趣區 域在硬體檢視步驟以光學式檢視該物品而自動i義,而 2興趣區域之各影像的自動處理在軟體影像處理步驟 中執行。 29. —種用於檢視球形柵陣列基板的方法,該方法包括· 產物車列基板的參考影像之至少;徵的模 式 乂及儲存該模式至記憶體中; 抆取該球形柵陣列基板的影像;以及 視逐球形柵陣列基板的影像預 區域特徵是否適合於該模式。 ^决u預- 請 先 閲 讀 背 ιέ 之 注 意 事 項 再 b 頁 裝 經濟部智慧財產局員工消費合作社印製 -98- 丄U外 A8 B8 C8 D8 、申請專利範圍 30·如申請專利範圍第29項之方法,其中該特徵包括一圓。 31·如申請專利範圍第30項之方法,其中該圓之模式包含預 定位置的中心點預定容限内的半徑。 32·如申請專利範圍第3 i項之方法,其中該模式之參數在檢 视之前至少可部分以離線模式調整。 33·如申請專利範圍第29項之方法,其中該特徵包括一焊墊。 !.IIITI·!!裝·ί (請先閱讀背面之注意事項再本頁) 訂· •線 經濟部智慧財產局員工消費合作社印製 -99 - 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐)4 # 4104 ABCD VI. Applying for patent application 25. If the method of applying for the scope of patent application No. 20, the automatic processing step includes applying at least one image processing method to a user-defined area of interest. The method and application to The image processing method of the area of interest that is automatically defined by optically viewing the object is different. 26. The method of claim 22, wherein the providing step includes identifying a defect type in the region of interest, and the automatic processing step includes applying an image processing method suitable for the type of defect in the region of interest. 27. The method of claim 23, wherein the providing step includes identifying a type of type feature in the region of interest, and the automatic processing step includes applying a type of type feature type suitable for the region of interest. Image processing method. ~ μ 28. If the method of the scope of application for patent No. 20, wherein the at least two interest areas defined by the user 'are optically viewed at the software-defined step, then the object is automatically viewed by the optical inspection of the object automatically The defined prestige area of interest is automatically defined in the hardware inspection step by optically viewing the item, and the automatic processing of each image of the 2 area of interest is performed in the software image processing step. 29. A method for inspecting a spherical grid array substrate, the method comprising: at least a reference image of a product train substrate; a pattern of signing; and storing the pattern in a memory; obtaining an image of the spherical grid array substrate ; And whether the image pre-region feature of the ball grid array substrate is suitable for this mode. ^ Determined-Please read the precautions before proceeding. B. Page printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. -98- 外 U outside A8 B8 C8 D8. Application scope 30. If the scope of patent application item 29 Method, wherein the feature includes a circle. 31. The method of claim 30, wherein the pattern of the circle includes a radius within a predetermined tolerance of a center point of a predetermined position. 32. The method according to item 3i of the scope of patent application, wherein the parameters of the mode can be adjusted at least partially in offline mode before inspection. 33. The method of claim 29, wherein the feature includes a solder pad. ! .IIITI · !! Packing · ί (Please read the precautions on the back and then on this page) Order · • Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs -99-This paper size applies to China National Standard (CNS) A4 (210 X 297 mm)
TW88113541A 1999-08-05 1999-08-06 Apparatus and method for the inspection of objects TW484104B (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10031893B2 (en) 2012-07-18 2018-07-24 Microsoft Technology Licensing, Llc Transforming data to create layouts
CN113138529A (en) * 2021-04-23 2021-07-20 成都路维光电有限公司 Mask defect detection method and system based on AOI system
TWI819395B (en) * 2020-12-03 2023-10-21 日商Ckd股份有限公司 Substrate foreign matter inspection device and substrate foreign matter inspection method

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10031893B2 (en) 2012-07-18 2018-07-24 Microsoft Technology Licensing, Llc Transforming data to create layouts
TWI819395B (en) * 2020-12-03 2023-10-21 日商Ckd股份有限公司 Substrate foreign matter inspection device and substrate foreign matter inspection method
CN113138529A (en) * 2021-04-23 2021-07-20 成都路维光电有限公司 Mask defect detection method and system based on AOI system
CN113138529B (en) * 2021-04-23 2024-04-09 成都路维光电有限公司 Mask defect detection method and system based on AOI system

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