TW483439U - Deposition device for depositing on vertically mounted substrates - Google Patents

Deposition device for depositing on vertically mounted substrates

Info

Publication number
TW483439U
TW483439U TW090210113U TW90210113U TW483439U TW 483439 U TW483439 U TW 483439U TW 090210113 U TW090210113 U TW 090210113U TW 90210113 U TW90210113 U TW 90210113U TW 483439 U TW483439 U TW 483439U
Authority
TW
Taiwan
Prior art keywords
depositing
vertically mounted
deposition device
mounted substrates
substrates
Prior art date
Application number
TW090210113U
Other languages
Chinese (zh)
Inventor
Shr-Yau Suen
Original Assignee
Helix Technology Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Helix Technology Inc filed Critical Helix Technology Inc
Priority to TW090210113U priority Critical patent/TW483439U/en
Publication of TW483439U publication Critical patent/TW483439U/en

Links

TW090210113U 2001-06-15 2001-06-15 Deposition device for depositing on vertically mounted substrates TW483439U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW090210113U TW483439U (en) 2001-06-15 2001-06-15 Deposition device for depositing on vertically mounted substrates

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW090210113U TW483439U (en) 2001-06-15 2001-06-15 Deposition device for depositing on vertically mounted substrates

Publications (1)

Publication Number Publication Date
TW483439U true TW483439U (en) 2002-04-11

Family

ID=21684639

Family Applications (1)

Application Number Title Priority Date Filing Date
TW090210113U TW483439U (en) 2001-06-15 2001-06-15 Deposition device for depositing on vertically mounted substrates

Country Status (1)

Country Link
TW (1) TW483439U (en)

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Legal Events

Date Code Title Description
GD4K Issue of patent certificate for granted utility model filed before june 30, 2004
MM4K Annulment or lapse of a utility model due to non-payment of fees