TW483294B - Laminate for pattern formation - Google Patents

Abstract

The present invention provides a laminate for pattern formation characterized by being made through successively laminating on the surface of a substrate a negative type or positive type visible light-sensitive resin coating film layer (A), an visible light-transmitting sheet layer (B) and an visible light-shading, energy rays-sensitive coating film layer (C).

Description

5. Description of the invention (The present invention relates to a laminated body for forming a pattern, a manufacturing method thereof, and a method for forming a pattern using the laminated body. So far, the lithographic printing technology using exposure has been applied to, for example, a circuit board, a display board , Etching, etc. to form patterns on plastics, inorganics, etc. As a method for forming patterns, it is known to coat an insulating or conductive light-sensitive resin composition on the surface of a substrate to form an insulating or conductive The coating is irradiated with electron beam or visible light through the intermediate of the photomask, and then the insulating or conductive photosensitive coating film layer is developed to obtain the desired pattern. However, this method is because of insulation or conductivity In order to solve the above problems, the inventors have found out that the above problems can be solved by using the coating film and the specific photosensitive coating film. The present invention solves this problem and completes the present invention. Therefore, according to the present invention, a laminated body for forming a pattern is provided, which is characterized in that By continuously laminating a negative or positive visible light-sensitive resin coating film layer (A), a visible light-transmitting sheet layer (B), and a coating sensitive to energy rays by shielding visible light The film layer (C) is formed. Then, the laminated body for forming a pattern of the present invention, a method for preparing the same, and a method for forming a pattern using the laminated body are described in more detail. The substrate used in the laminated body of the present invention is not particularly limited, It has so far been used to form patterns can be used by analogy, it can be listed, such as electrical insulation glass-epoxy board; such as polyethylene terephthalate sheet, polyimide paper size applicable. China National Standard (CNS) A4 (210 x 297 mm)

Please read the precautions on the back first and then fill in the page of this book. I Order the printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. 5. Description of the invention (2) Plastic sheet or plastic sheet such as sheet; A plastic plate or sheet of film, which is a metal foil such as copper, aluminum, etc., or a metal such as copper, nickel, silver, etc., or a method such as indium oxide A tin (ITO) is a representative conductive oxide and other compounds to form a conductive coating film; a plastic plate provided with a through-hole portion and the above-mentioned conductive coating film is formed on the surface and various portions of the through-hole; Plastic sheets; metal plates such as copper plates; copper perforated printed circuit substrates that have been patterned. The negative or positive visible light-sensitive resin coating film layer (A) used in the laminate of the present invention is not particularly limited. If it is a negative coating film layer (A-1), it is It is dissolved or diffused in the developing solution and removed, and the part of the coating film layer exposed to visible light is left as a photoresist coating film and is not dissolved or diffused in the developing solution; or if it is a positive type coating film layer (A-2), The parts that are not irradiated with visible light are left as photoresist coatings and are not removed by dissolution or diffusion in the developing solution, while the parts exposed to visible light by the coating film layer are decomposed by visible light and dissolved or diffused in the developing solution. It is removed and has such a characteristic of visible light sensitivity. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, a resin composition that can be used to form a negative visible light-sensitive resin coating film layer (A-1), such as a resin containing visible light curable resin, a light radiation polymerization initiator and light A resin composition for forming a coating film, such as a sensitizer. Used as the above-mentioned visible light curable resin, for example, a visible light curable resin having a light-sensitive unsaturated group, which is a resin that can be cured by crosslinking by visible light irradiation, and has sufficient ionizable groups (anionizable resins) Base or cationizable base), dissolve in alkali developing solution or acid developing solution -4- The paper size is applicable to China National Standard (CNS) A4 specification (210 X 297 mm) 483294 A7 -------- --- V. Description of the invention (3) or diffusion resin. As the light-sensitive unsaturated group which can be contained in the visible light curable resin, there can be listed, for example, acrylfluorenyl, methacrylfluorenyl, vinyl, styrene, allyl, and the like. As an ionizable group, there can be listed, for example, an anionizable group 5 represented by a carboxyl group, and the content of the carboxyl group is usually preferably in the range of about 10-700 mgKOH / g, especially about 20-600 mgK .OH / g, as the acid base of the resin. As a cationizable amine group, it can be regarded as a representative, and the content of the amine group is usually about 20-650, especially about 30-600 mg, and can be the amine hydrazone of the resin. As the anionizable visible light curable resin, there can be listed, for example, a carboxyl group-containing resin (polycarboxylic acid resin) in which unsaturated groups and carboxyl groups are reacted with unsaturated monomers such as glycidyl (meth) acrylate. Ester is introduced in response. As a cationizable visible light curable resin, it can be listed. For example, a hydroxyl group-containing and tertiary amine group-containing resin and a reaction product of a hydroxyl group-containing unsaturated compound and a diisocyanate compound are subjected to an addition reaction. And made i. As the above-mentioned anionizable and cationizable visible light curable resin, it is described in Japanese Laid-Open Patent Publication No. 223751/1991 (= US Patent No. 5,045,434), and its reference is hereby substituted in detail. Instructions. As a listable initiator of light radiation, for example, aromatic carbonyl compounds such as benzophenone, benzoin methyl ether, benzoin isopropyl ether, benzyl PIJJ ketone, thioxanthone, anthraquinone, etc. ; Paper sizes such as acetophenone, acetophenone, and α-hydroxyisobutyl paper are in accordance with Chinese National Standard (CNS) A4 (210 X 297 mm) (Please read the notes on the back to write this page)

Packing -------- Order --------- line L Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economy 483294 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economy A7 B7 V. Description of the invention (4 ) Benzene, α, α Dichloro-4-phenoxyethylbenzene, 1-Ethyl-1-cyclohexylacetophenone, diethylacetophenone, and other ethylbenzene; such as benzene peroxide , Tert-butyl peroxy-2-ethylhexanoate, tert-butyl hydroperoxide, di-tert-isophthalic acid di-tertiary-butyl ester, 3,3'4,4 'tetra (tertiary Butylperoxycarbonyl) Organic peroxides such as benzophenone; Diphenyl halide salts such as bromide diphenyl iodide and diphenyl chloride iodide; carbon tetrabromide, chloroform, triiodomethane, etc. Organic halides such as 3-phenyl-5-isoxazolone, 2,4,6-tris (trichloromethyl) -1,3,5-triazine, benzoanthrone, etc. Polycyclic compounds; such as 2,2 · -azo (2,4-dimethylvaleronitrile, 2,2'-azo-bisisobutyronitrile, 1,2-azobis (cyclohexane-1- Nitrile), 2,2'-azobis (2-methylbutyronitrile), and other azo compounds; iron-propadiene complexes (see EP-Α- 1 5 23 77); (See Japanese Laid-Open Patent Publication No. 2211 10/1988); bisimidazole-type compounds; N-aryl-glycidyl-type compounds; acridine-type compounds; aromatic ketone / aromatic amine combinations; Peroxyketals (see Japanese Patent Publication No. 321 895/1 994), etc. Among the various light radiation polymerization initiators listed above, di-peroxy isophthalic acid di-tertiary-butyl ester is preferably used , 3,3 ', 4,4'-tetrakis (tertiary butyl peroxycarbon) benzophenone, iron-propadiene complex or titanocene compound, which is used in cross-linking or polymerization, Usually highly active. Commercially available products that can be listed, for example, Irgacure651 (manufactured by Ciba Geigy, trade name, acetonitrile-type photo-radiation polymerization initiator), Irgacure 184 (manufactured by Ciba Geigy, trade name, acetophenone) Light Radiation Polymerization Initiator), Irgacure907 (manufactured by Ciba Geigy, trade name, amine-type benzene type light radiation polymerization initiator), Irgacure369 (manufactured by Ciba Geigy, -6- this, this, and Zhang scales apply Chinese national standards ( CNS) A4 size (210 X 297 mm ▼ installed ---- (Please read the precautions on the back before filling Page) Order --------- Marriage_ 483294 Printed by A7, __B7____, Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the invention (5) Trade name, amine alkylbenzene type light radiation polymerization initiator ), LucirinTPO (manufactured by BASF, trade name, 2,4,6_trimethylphenylphosphonium diphenylphosphine oxide), Kayacure DETX-S (manufactured by Nippon Kayaku CO. Ltd., trade name, thiogol-type compound ), CGI-784 (manufactured by Ciba Geigy, trade name titanium complex) and the like. It can be used alone or in a combination of two or more. The proportion of the light radiation polymerization initiator per 100 parts by weight of the visible light curable resin is usually within a range of 0.2 to 25 parts by weight, preferably 0.2 to 10 parts by weight. As the photosensitizer, a photosensitizing dye is known, and it may be specifically listed, for example, thiaquinol type, glutathione type, ketone type, T hi operpy 1 ium salt type, alkali phenethyl type, Cyanine type, 3-substituted coumarin type, 3,4-substituted coumarin type, cyanine type, acridine type, thiazine type, phenothiazine type, anthracene type, hexabenzobenzene type, Benzoanthracene type, perylene type, ketocoumarin type, fumarine type, borate type, etc. It may be used alone or in a combination of two or more. As a light-sensitive dye of borate type; those who can be reminded are, for example, Japanese Laid-Open Patent Publication No. 241 338/1 993, Japanese Laid-Open Patent Publication No. 5685/1995 (= US Patent No. 5,498,641), and Japanese Laid-Open Patent Publication No. No. 225474/1995 (= US Patent No. 5,498,641), etc., such a formulation ratio of the photosensitizer may be about 0.1-20% by weight (solid content) in the resin composition forming the coating film. It is preferably in the range of about 0.2-10% by weight. For the resin composition forming the visible light-sensitive resin coating film layer (A-1); a saturated resin may be blended if necessary. The saturated resin is used to control the solubility of the resin composition (for alkaline developing solution of photoresist coating film, please read the note on the back first)

The thread size of this paper is applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) called 3294 A7 _______ Β7 _________ V. Description of the invention (6) Solubility; or for example, for the removal of the strong alkali solution of the light-cured coating film Solubility) and contains, for example, polyester resin, alkyd resin, (meth) acrylic resin, vinyl resin, epoxy resin, phenol resin, natural resin, synthetic rubber, silicone resin, fluororesin, polyurethane resin Wait. These resins may be used alone or in a combination of two or more. The resin composition can be dissolved or diffused in a solvent such as an organic solvent, water, or a mixture thereof, and applied to the surface of a substrate. As the organic solvent, for example, ketones, esters, ethers, cellosolves, aromatic hydrocarbons, alcohols *, halogenated hydrocarbons, and the like can be listed. ’The resin composition dissolved or diffused in the solvent can be applied by methods such as rollers: roll coater, spin coater, curtain roll coater, spray coating, electrostatic coating, dip coating, screen printing, spin coating and the like. The formed coating film is then allowed to stand as necessary, and then dried at a temperature of, for example, about 50 to about 130 ° C to obtain a negative visible light-sensitive resin coating film layer (A-1). • An aqueous negative visible light-sensitive resin composition obtained by dissolving or diffusing the above-mentioned negative visible light-sensitive resin composition. Water dissolution or water diffusion of the negative visible light sensitive resin composition can be performed by neutralizing an anionizable group (such as a carboxyl group) in a visible light curable resin with an alkali (neutralizing agent); or using an acid (neutralizing agent) ) Neutralize cationizable groups (such as amine groups) in visible light curable resin compositions. In addition to the above, a visible-light curable resin composition which can be developed with water is known as a negative visible-light-sensitive resin composition. As such a substance, it is possible to list, for example, an aqueous resin made by introducing an unsaturated group and an ion-forming group that are settable under visible light to a linear phenol type epoxy resin. The paper size of this water-based tree applies to the national standard of China (CNS) A4 (210 X 297 mm) '(Please read the precautions on the back before filling this page) Prayer

Order --------- Line I Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 483294 A7 B7___ V. Description of the Invention (7) The grease printed by the Consumers’ Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs may be obtained, for example, by joining (Meth) acrylic novolac epoxy resin has a part of epoxy groups to have photopolymerizable properties, and at least other parts of the epoxy group react with, for example, a tertiary amine compound to form a water-soluble Iron base of sex. The portion of the aqueous resin thus obtained exposed to visible light is cured to become water-insoluble5, while the portion not exposed to visible light is developed by water and removed. Furthermore, after water development, the coating film can be made hydrophobic by heating (for example, 10-30 minutes at about 140-200 ° C) to volatilize the ionizable groups remaining in the cured coating film. Therefore, a coating film can be formed, which has excellent resistance without hydrophilic groups (carboxyl group, amine group, etc.) or its salts (salts formed with a developing solution). The coating film can be developed by the above-mentioned alkali and is acidic. A resistive coating film formed from a developable light-sensitive composition. In addition, in addition to the novolac epoxy resin, an aqueous polymer may also be used. It is obtained from the same situation as described above, and reacts (meth) acrylic acid and, for example, a tertiary amine with an epoxy-containing group. The unsaturated monomers that can be polymerized by radicals are, for example, glycidyl (meth) acrylate, 3,4-epoxycyclohexyl alkyl (meth) acrylate, vinyl glycidyl ether, and the like. Homopolymer; or one or more of these monomers and another unsaturated monomer which can be radically polymerizable (eg, alkyl (meth) acrylate or naphthenate having 1 to 24 carbon atoms, available Free-radically polymerized unsaturated aromatic compounds, etc.) on copolymers. For the development of the negative visible light-sensitive resin coating film layer (A-1), if the negative visible light-sensitive resin composition forming the coating film layer is anionizable, use an alkaline developing solution; if it is cationic Transformers use an acidic developing solution. If the resin itself is water-soluble (for example, the above-mentioned iron salt-based resin winter paper size applies Chinese National Standard (CNS) A4 specification (210 X 297 mm) 483294 A7 B7 5. Invention description (8))) Water develops. The negative visible light-sensitive resin coating layer (A-1) itself may be conductive or insulating. Therefore, a conductive material (known conductive pigments such as various metals, one or more alloys and oxides thereof such as silver, copper, iron, Manganese, nickel, aluminum, cobalt, chromium, lead, zinc, bismuth, ITO (indium tin oxide), etc .; insulation materials such as surface coating or vapor deposition of such conductive materials) or insulation materials (plastic fine powder, insulation Inorganic powder, etc.) in order to produce the electrical conductivity or insulation of the coating film. The insulating coating film is preferably one whose last coating film usually has a volume intrinsic resistance exceeding 109Ω · cm (ohm · cm), especially in the range of 101 () Ω · cm-1018 Ω · cm Inside. On the other hand, the conductive coating film is preferably a coating film formed at the end which generally has a volume internal resistance of less than 109 Ω · cm, especially in the range of 1 Ω · cm-108Q · cm. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. On the other hand, as a resin composition forming a positive visible light-sensitive resin coating layer (A-1), a resin composition containing, for example, a photoacid generator component and a resin component can be used A composition that forms a coating film with a photosensitizer. As the resin component, a coating film-forming resin can be used, and its physical properties such as polarity and molecular weight are changed due to the decomposition of the resin component, which is caused by the acid generated by the photoacid generator component due to the irradiation of visible light. As a result, It exhibits solubility to a developing solution such as an aqueous or alkaline developing solution, an aqueous developing solution, an organic solvent developing solution, and the like. In addition, resins other than the resin composition are used for adjusting the solubility of the developing solution, and can be used as needed. -10- & Zhang scale applies Chinese National Standard (CNS) A4 specification (210 X 297 mm) A7

1. Description of the invention (9) As the resin component used in the positive visible light-sensitive resin composition, it can be listed as a representative, for example, containing a sulfonate bond as an intermediate and a quinonediazidesulfonic acid bonded to such as A composition employed by basic trees such as acrylic resins having ion-forming groups (see Japanese Laid-Open Patent Publication No. 206293/1986, Japanese Laid-Open Patent Publication No. 1 33449/1 995 (= US Patent No. 5,624,78 No. 1), etc. ), That is, a composition that is sensitive to actinic energy rays with naphthoquinonediazide, and the photodecomposition of quinonediazide group with visible light, and the reaction of indenecarboxylic acid by enone; A chemical energy ray-sensitive composition uses a mechanism that is a cross-linked coating film that is heated insoluble in an alkali developing solution or an acid developing solution, and is exposed to visible light and is exposed to a photoacid generator due to visible light. The generated acid cuts off the cross-linked structure, which is printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs to become soluble in an alkali developing solution or an acid developing solution (see Japanese Laid-Open Patent Publication No. 295064/1994), published in Japan Patent Publication No. 308733/1 994, Japanese Laid-Open Patent Publication No. 313134/1 994 (= US Patent Nos. 5,527,656 and 5,702,872), Japanese Laid-Open Patent Publication No. 3 1 3 1 36/1 994 (= US Patent Nos. 5,527,656 and 5,702,872), Japanese Laid-Open Patent Publication No. 146552/1995, etc. As the above-mentioned positive visible light-sensitive resin, it is contained in the above-mentioned bulletins, and its contents are deemed to be described in detail herein. The photoacid generator is A compound that produces an acid when exposed to light, and the acid produced catalyzes the decomposition of the resin. Compounds that are known to be useful and can be specifically listed, such as, for example, salt, ammonium, scale, iodine, selenium, Iron-compound diene complex, ruthenium-propadiene complex, silanol-metal chelate complex, triazine compound, diazonaphthoquinone compound, sulfonate, sulfonium sulfonate-11- This paper size applies to China National Standard (CNS) A4 specification (210 X 297 mm) ^ 294i, description of invention (A7 B7 imide esters, halogen compounds, etc. printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs, etc.) , -Yu Japanese Patent Publication No. 1 46552/1 995 and Japanese Patent Publication No. 23737 1/1 999 can also be used. These photoacid generator components can be in the form of a mixture with the above resin or bonded to the resin. In itself, the compounding ratio of the photoacid generator component is preferably about 0.1 to about 40 parts by weight per 100 parts by weight of the resin component, particularly in the range of about 0.2 to about 20 parts by weight. As light sensitive Known light-sensitive dyes for agents, which can be used and specifically listed, for example, thioxanthan type, glutton type, ketone type, Thiopirilium salt type, acidic styryl type, Cyanine type, ^ substituted coumarin type, 3,4-substituted coumarin type, cyanine type, acridine type, thiazine type, phenothiazine type, anthracene type, hexabenzobenzene type, benzene Benzoanthracene type, perylene type, ketocoumarin type, fumarine type, borate type, etc. It can be used alone or in a combination of two or more. As a borate-type light-sensitive dye that can be listed, it is listed in Japanese Laid-open Patent Publication No. 24 1 338/1 993, and Japanese Laid-Open Patent Publication No. 5685/1995 (= US Patent No. 5,498,641). ), Japanese Published Patent Publication No. 225474-1 / 995 (= US Patent No. 5,498,641), etc. The proportion of such a photosensitizer is about 20% by weight, preferably about 0.2 to 10% by weight (solid content) of the above-mentioned coating film-forming resin composition. The resin composition can be applied to the surface of a substrate by dissolving or diffusing in an organic solvent, water, or a mixture thereof, for example. Examples of the organic solvent include ketones, esters, ethers, cellulolytic agents, aromatic hydrocarbons, alcohols, and halogenated hydrocarbons. -12- The size of this paper applies to the Chinese National Standard (CNS) A4 (210 X 297 mm). Please read the notes on the back first before j

f Binding page I-III order, 'Good m 483294 A7 B7 V. Description of the invention (19 The resin composition which is dissolved or diffused in the solvent can be used, for example, roller, roll coater, spin coater, curtain roll coater, Apply by spraying, electrostatic coating, dip coating, silk indigo, spin coating, etc. Then, after forming the coating film as required, leave it at a temperature of about 50 to about 13 ° C to obtain a positive type. Thick light = sensitive resin coating film layer (A-2). An aqueous positive visible light-sensitive resin composition can be obtained by dissolving or diffusing in the positive visible light-sensitive resin composition described above. The water-soluble or water-diffusing effect of the visible light-sensitive resin composition of the type can be performed by neutralizing an anionizable group (such as a carboxyl group) in the resin with a base (neutralizing agent), or neutralizing the acid (neutralizing agent) with A cationizable group (such as an amine group) in the resin. Development of the positive visible light-sensitive resin coating film layer. If the positive visible light-sensitive resin composition forming the coating film layer is an anionizable, use an alkali Developing solution; if it can be cationized, Use an acid to develop the solution. Assuming that the resin itself is water-soluble (such as iron-based resins), water development can be performed. The consumer cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs printed a positive visible-sensitive resin coating layer (A -2) itself may be conductive or insulating. Therefore, if necessary, a conductive material (known conductive pigments, for example, various metals, more than one alloy thereof, and the like) may be blended in the visible-sensitive resin composition. Oxides, such as silver, copper, iron, manganese, nickel, aluminum, cobalt, chromium, lead, zinc, bismuth, ITO, etc., coated or vapor-deposited with conductive materials on the surface of insulating materials, or insulating materials (plastics Fine powder, insulating inorganic powder, etc.), in order to make the coating film conductive or insulating. The insulating coating film is preferably such that the volume inherent resistance of the final coating film usually exceeds -13- This paper applies Chinese national standards ( CNS) A4 specification (210 X 297 mm) A7 ^ _____ B7______ S. Invention description (12) 109Ω · cm, especially in the range of 1 (ν ° Ω · cm-1018Q · cm. On the other hand, the conductive coating film Compare In order to make the volume inherent resistance of the final coating film generally smaller than 109Ω · cm, especially in the range of 1Ω · cm-108Q · cm. Among the above-mentioned negative or positive visible light-sensitive resin coating film layers (A), The thickness is not strictly limited, but may be appropriately selected according to the purpose of the final laminated body, etc., and is preferably generally in the range of about 1 micrometer to about 5 micrometers, especially about 2 micrometers to about 500 micrometers. In the present invention The visible light transmitting sheet (B) used in the laminated body can be a known product without any particular limitation on its material, as long as the resin sheet transmits at least about 90% of the visible light irradiated, preferably about 99% or more. Available sheets Constituent polymers such as polyethylene glycol terephthalate, polyvinyl chloride, polyvinyl acetate, polyvinyl butyral, cellulose type, polyurethane, polyacrylate, aramide , Capt on, polymethylpentene, polyethylene, polypropylene, etc. Especially polyethylene glycol terephthalate tablets are preferred. The thickness of the sheet layer (B) is preferably usually in the range of about 10 m to about 5 m, especially in the range of about 15 m to about 500 m. The coating film layer (C) used in the laminated body of the present invention to shield visible light and is sensitive to energy rays is formed on the surface of the sheet layer (B) and becomes the uppermost layer. The surface of the upper layer of the film layer (C) is irradiated to the laminated body of the present invention, and then developed to form a pattern in the coating film layer (C), and then visible light is irradiated from the surface of the patterned coating film layer (C), corresponding to the coating film. The positive or negative pattern of the pattern formed in layer (C) is because the coating layer (C) blocks (absorbs and / or reflects) visible light, and the visible light-sensitive tree-14- This paper scale Applicable to China National Standard (CNS) A4 specification (210 X 297 mm) (Please read the precautions on the back first and write this page)

Printed by the Employees 'Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 483294 A7 B7 Printed by the Employees' Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the invention (13) The grease coating layer (A) is on the bottom layer. • Energy ray-sensitive coating film layer (C) is a layer that shields (absorbs and / or reflects) the visible light rays irradiated from the upper surface of the coating film layer (C), and plays a role to prevent the coating from being irradiated by visible light. The lower layer of the film layer (A) prevents the substantial change (curing or decomposing); at the same time, because the coating film layer (C) itself is affected by the photochemical energy in processing solutions such as water, organic solvents, alkalis, and acids It becomes fallable or diffusible when irradiated by radiation, and can form a pattern on the coating film layer, or because the coating film layer (C) itself is in a processing solution such as water, organic solvents, alkalis, acids, etc. In addition, it becomes non-soluble or non-diffusible when irradiated with actinic energy rays, and can form the same pattern required for the coating film layer (A). As the energy-ray-sensitive coating film layer (C), a product containing a substance that absorbs visible light can be used, for example, a visible light absorber, a colorant (coloring pigment, coloring dye, etc.), and a material equal to the coating film layer. Specific examples of the visible light absorbers mentioned above can be listed, for example, benzophenone types such as 2,4-dihydroxybenzophenone and 2-hydroxy-4-methoxybenzophenone; such as 2- (2 · -Hydroxy-5-methylphenyl) benzotriazole and other benzotriazole types; grass anilide type; cyanoacrylate type and other visible light absorbers; and contained in Bedneret et al., Far be + Lacke, 89, 840 (1983); HJ Hbller et al., Pure and Applied Chem., 30, 1 45 (1972); Ibid, 36, 141 (1973); A. Valet, Farbet + Lacke, 96, 1 89 (1 990 ) And other products. Can be listed as the above colorants, for example, such as titanium oxide, zinc white, lead white, basic lead sulfate, lead sulfate, zinc barium white, zinc sulfide, antimony white, etc.- (Please read the note on the back first Matters written on this page) Miscellaneous paper size applicable to China National Standard (CNS) A4 (210 X 297 mm) 483294 A7 B7 V. Description of the invention (M) White pigments; such as carbon black, acetylene black, lamp black, bone Carbon, graphite, iron black, female black and other black pigments; such as naphthalene yellow S, Hansa yellow 10G, permanent yellow, permanent orange and other orange pigments; such as iron oxide red, lead red, permanent red, quinac Red pigments such as pyridine-type red pigments; purple pigments such as cobalt violet purple pigments, manganese violet, fast violet B, methyl lake violet, etc .; such as ultramarine blue, Prussian blue, cobalt blue, sky blue, phthalocyanine blue, fast Blue pigments such as sky blue; green pigments such as chrome green and phthalocyanine green. As the above-mentioned materials, for example, barium oxide powder, barium sulfate powder, barium carbonate, gypsum, clay, silica, white carbon, diatomite, talc, magnesium carbonate, alumina white, mica powder, etc. . The proportion of the visible light absorber, colorant, and material used can be appropriately selected according to the intensity of the visible light to be irradiated, the thickness of the energy ray-sensitive coating layer (C), but usually the visible light absorber can be the coating layer (C) 0.01% to 50% by weight, preferably in the range of 0.02% to 30% by weight; for colorants and binders, 0.5% to 90% by weight of the coating layer (C), preferably It is 1% to 50% by weight. As the energy ray-sensitive coating film layer (C) that shields visible light, a reflective agent (a sheet-like metallic pigment, etc.) that reflects visible light can also be used. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs as the above-mentioned reflectors, for example, such as (flake) aluminum powder, bronze powder, copper powder, tin powder, lead powder, zinc powder, iron phosphide, pearl The metallic powder is coated with metallic powder pigments such as mica powder, mica-like iron oxide, and metallic gloss pigments. · The proportion of the reflecting agent used can be appropriately selected according to the intensity of the visible light to be irradiated, the thickness of the energy ray-sensitive coating layer (C), etc., but can generally be determined according to • -16- This paper size applies to Chinese national standards (CNS ) A4 specification (210 X 297 public love) 483294 Real A7 — _ B7______ 5. Description of the invention (15) It should be 0.5% to 90% by weight of the coating layer (C), preferably 1% to 50% by weight Within range. • The above visible light absorbers and reflectors can be used in combination. The resin forming the energy ray-sensitive coating film layer (C) may be a negative type or a positive type, and the visible light irradiated may be any visible light, various visible light, electron beams, or heat rays. As a negative-type or positive-type visible light-sensitive product, a product similar to the resin composition can be used to form the aforementioned coating film layer (A). In addition, as a negative-type and a positive-type visible-sensitive product, the aforementioned resin composition can be used to form the coating film layer (A). Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A heat ray-sensitive resin-coated composition is a composition containing a resin crosslinked or decomposed by heat rays such as infrared rays. As the resin composition, known products that can be used can be listed, for example, a combination of a hydroxyl-containing resin / amine-based resin, a combination of a hydroxyl-containing resin / block isocyanate, and a melamine resin , Silicone resin or acrylic resin) which contains hydrolyzable groups (such as alkoxysilyl, hydroxysilyl); epoxy resin / phenol resin combination, epoxy resin / carboxylic acid (anhydride) combination , Epoxy resin / polyamine compound, unsaturated resin / radical polymerization catalyst (such as peroxide) combination, olefin unsaturated compounds containing carboxyl group and / or hydroxyl group and ether bond. Furthermore, a thermal acid generator (for example, the same as the photoacid generator described above) can be blended and used as a positive type. The resin composition forming the energy-ray-sensitive coating film layer (C) can be dissolved or diffused in, for example, an organic solvent, water, or a mixture thereof, and applied to the surface of the sheet layer (B). -17- This paper size is in accordance with Chinese National Standard (CNS) A4 (210 X 297 mm) ^ " 483294 A7 ____ B7 " " '— — 一 · ________ 5. Description of the invention (16) as the above organic Solvents can be listed, for example, ketones, esters, ethers, cellulose, aromatic hydrocarbons, alcohols, halogenated hydrocarbons, etc., and the coating of the resin composition can be performed, for example, with a roller, Roll coater, spin coater, curtain roll coater, spraying, electrostatic coating, dip coating, silk screen, spin coating and other methods. After standing as required, and drying at a temperature of, for example, about 50 to about 130 ° C, an energy-ray-sensitive coating film layer (C) can be obtained. The thickness of the energy ray-sensitive coating film layer (C) is preferably generally in the range of about 1 micrometer to about 500 micrometers, particularly about 2 micrometers to about 100 micrometers. A surface coating may be provided on the surface of the energy ray-sensitive coating film layer (C) of the laminated body thus formed. The top coat prevents the passivation of free radicals caused by exposure to radiation by intercepting the oxygen in the air, and smoothly performs the curing of the photosensitive material due to the exposure to radiation. The surface coatings printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs can be formed on resin families such as polyester, acrylic resin, polyethylene, and polyvinyl chloride resins such as polyethylene glycol terephthalate. (Thickness about 1 to about 70 microns) cover the surface of the laminate; or use materials such as polyvinyl alcohol, partially saponified polyvinyl acetate, polyvinyl alcohol / vinyl acetate copolymer, partially saponified polyvinyl acetate / Vinyl acetate copolymer, polyethylene. Pyrrolidone, hydroacoustic polysaccharide polymer such as Pullulan, acrylic resin, polyester resin, vinyl resin, epoxy resin, etc. Aqueous resin or aqueous solution of water-based resin or water-diffusion liquid is applied (dry film thickness: about 0.5 to about 5 microns). The laminated body for forming a pattern according to the present invention can be produced by, for example, any one of the following methods 1 to 4. -18- This paper size is in accordance with China National Standard (CNS) A4 (210 X 297 mm) 483294 A7 B7_ V. Description of the invention (17) 1. A negative or positive visible light-sensitive resin formed on the surface of the substrate Coating film layer (A), and then forming a visible light-transmitting sheet layer (B), and another method of laminating an energy ray-sensitive coating film layer (C) that shields visible light: The coating film layer (A) can be formed The resin composition is coated or laminated on the surface of the substrate; or a coating film made from the resin composition is adhered to the substrate through a layer of a photosensitive or heat-sensitive adhesive (adhesive) to form a film. Coating film layer (A). The sheet layer (B) can be laminated on the surface of the coating film layer (A) by thermal lamination; or the layer can be pasted to the coating film through an intermediary of a 'pressure-sensitive or heat-sensitive adhesive (adhesive) layer. Layer (A). In addition, the energy ray-sensitive coating film layer (C) may be laminated on the surface of the sheet layer (B) by coating or laminating a resin composition to form an energy ray-sensitive coating film layer (C); or It is formed by laminating the film of the resin composition to the sheet layer (B) through a light-sensitive or heat-sensitive adhesive (adhesive) layer as an intermediary. 2 · A kind of negative or positive visible light-sensitive resin coating film layer (A) is formed on the surface of the substrate, and then a pre-formed 2-layer laminate is formed, including a visible light-transmitting sheet layer (B) and a Method for shielding the visible ray energy ray-sensitive coating film layer (C) on the surface of the coating film (A) and bringing the surface of the film layer (B) side into contact with the coating film layer: Staff of the Intellectual Property Bureau of the Ministry of Economic Affairs The consumer cooperative print coat layer (A) can be formed on the surface of the substrate in the same manner as in the above method 1. The two-layer laminate provided on the coating layer (A) can be obtained by coating or laminating a resin composition on the sheet layer (B) to form an energy-ray-sensitive coating layer (C); or via A light-sensitive or heat-sensitive adhesive (adhesive) layer is used as an intermediary to adhere the film made from the resin composition. In addition, the lamination of the layer (B) side surface of the laminate and the coating film layer (A) can be performed, for example, in the thermal lamination method-19- This paper size is applicable to China National Standard (CNS) A4 (210 X 297) (B) B7 5. Description of the invention (18) Or a method of using a pressure-sensitive or heat-sensitive adhesive (adhesive) layer. 3.-A pre-formed 3-layer laminate laminated on the surface of the substrate, which is a negative or positive visible light-sensitive resin coating layer (A), a visible light-transmitting sheet (B), and a masking visible light The energy-ray-sensitive coating film layer (C) is a method for bringing the side surface of the coating film layer (A) into contact with the substrate surface: The negative or positive visible light-sensitive resin coating film layer (A), visible light -Transmissive sheet layer (B) and energy rays that shield visible light-Sensitive coating film layer (C) The three-layer laminated body can be produced, for example, by applying a resin composition to form a coating film layer (A) to a sheet layer ( The surface of B) is then dried as required, and then the tree-moon composition is applied to form a coating film layer (C) on the other surface of the sheet layer (B) (coating the coating film layer (A) and the coating film layer ( C) The order can be interchanged). In addition, the lamination of the coating layer (A) side of the three-layer laminate on the surface of the substrate can be performed by, for example, a thermal lamination method. 4. A pre-formed 2-layer laminate is laminated on the surface of a substrate, comprising a negative or positive visible light-sensitive resin coating film layer (A) and a visible light-transmitting sheet layer (B), so that the coating film The surface of the layer (A) is in contact with the surface of the substrate; then, an energy ray-sensitive coating film layer (C) that shields visible light is formed on the surface of the sheet (B) side of the obtained 3-layer laminate as described above: Ministry of Economic Affairs The Intellectual Property Bureau employee consumer cooperative prints a two-layer laminate of both a negative or positive visible light-sensitive resin coating film layer (A) and a visible light-transmitting sheet layer (B), which can be obtained, for example, from coating The resin composition forms a coating film layer (A) onto one surface of the sheet layer (B). The lamination of the coating layer (A) side of the two-layer laminated body to the surface of the substrate can be carried out by, for example, a method of thermal lamination. In addition, the coating film layer (C) can be formed by coating or laminating a resin composition to form the coating film layer; -20- This paper size is applicable to China National Standard (CNS) A4 (210 X 297) (Mm) 483294 Printed by A7 _B7 printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the invention (19) or a coating film made of the resin composition, through a light-sensitive or heat-sensitive adhesive (adhesive) The layers act as intermediaries. The use of the layered body of the present invention as described above to form a pattern can be performed, for example, in a method including the following steps: (i) irradiating photochemical energy rays to the layered body through a mask intermediary or directly according to a pattern, the energy-ray-sensitive coating of the layered body On the film layer (C), (ii) After the development of the coating film layer (C), remove the irradiated or unirradiated parts of the energy ray-sensitive coating film layer (C), so as to form a coating film of a photoresist pattern, (iii) Then, after irradiating the entire surface with visible light, (iv) remove the visible light-transmitting sheet (B) and the energy-ray-sensitive coating layer from the visible-sensitive resin coating layer (A) of the laminate (C) Exposing the visible light-sensitive resin coating film layer (A), (v) Then, the coating film layer (A) is developed with a developing solution. As a light source for irradiating actinic energy rays, it can be listed, for example, ultra-high tension, high pressure, medium tension and low tension mercury lamps, chemical lamps, carbon arc lamps, xenon lamps, metal halide lamps, tungsten lamps, etc. , Or laser (the number in brackets indicates the wavelength of the vibration-curve), such as hydrogen laser (488 nm), YAG-SHG laser (532 nm), UV laser (35 1-364 nm) . As the heat ray source, it can be listed, for example, a semiconductor laser (830 nm), a YAG laser (1.06 microns), infrared light, and the like. Light sources that have been used so far as visible light irradiation sources, such as ultra-high tension, high pressure, medium tension or low tension mercury lamps, chemical lamps, carbon arc lamps, xenon lamps, metal halide lamps, fluorescent lamps, tungsten lamps, the sun Light, etc., these rays first pass through a UV light cut filter; and have -21- in the visible light range This paper size applies Chinese National Standard (CNS) A4 specification (210 X 297 mm) " (Please read the back Notes? Matters are on this page)

Order ·. -Line · 483294 A7 B7 1. Description of the invention (M) Various lasers with oscillation range. For the development of the coating film layer (A) and the coating film layer (C), if the coating film is anionic, shellfish [J use an alkali developing solution; if it is cationic, use an acid developing solution. Depending on the nature of the coating film, development with organic solvents or water is also possible. The development can be carried out by spraying or immersing the developing solution at a temperature of about 10 to about 8 (TC, more than about 15 to about 5 (TC), after about 10 seconds to about 60 minutes, preferably about 30 seconds to about 30 minutes. As Alkali developing solution can be listed, for example, monomethylamine, dimethylamine, trimethylamine, monoethylamine, diethylamine, triethylamine, monoisopropylamine, diisopropyl Methylamine, triisopropylamine, monobutylamine, dibutylamine, monoethanolamine, diethanolamine, triethanolamine, dimethylaminoethanol, diethylaminoethanol, ammonia, caustic soda, caustic potassium, Various aqueous solutions of sodium metasilicate, potassium metasilicate, potassium carbonate, tetraethylammonium hydroxide, etc. As the acidic developing solution, for example, formic acid, crotonic acid, acetic acid, propionic acid, lactic acid, hydrochloric acid, Aqueous solutions of sulfuric acid, nitric acid, phosphoric acid, etc. Listed as organic solvents, such as hexane, heptane, octane, xylene, dichloromethane, chloroform, carbon tetrachloride, trichloroethylene, etc. Hydrocarbon solvents; alcohols such as methanol, ethanol, propanol, butanol; such as diethyl ether, dipropyl ether, Ethers such as ethers, ethyl vinyl ethers, dioxane, propylene oxide, tetrahydrofuran, cellosolve, methyl cellosolve, butyl cellosolve, methylcarbitol, diethylene glycol methyl ethyl ether, etc .; such as Ketones such as acetone, methyl ethyl ketone, methyl isobutyl ketone, isophorone, cyclohexanone, etc .; such as methyl acetate, ethyl acetate, propyl acetate, butyl acetate, etc .; such as -22 -This paper size is in accordance with Chinese National Standard (CNS) A4 (210 X 297 mm) (Please read the precautions on the back before I R___ This page: Line · Printed by the Intellectual Property Bureau of the Ministry of Economic Affairs and Consumer Cooperatives 483294 A7 I_ _B7 _ 5. Description of the invention (21) other types such as chlordine, formamidine, N, N′-diethylformamide, etc. The laminated body for forming a pattern according to the present invention can be applied to form, for example, the surface of a substrate Patterns, such as black array patterns, patterns for color filters, patterns for covering electronic parts (coating films for soldering), patterns for ceramics or phosphors, and grid patterns for display panels Grains, etc .; or insulating substrates, such as plastic substrates for wiring, The assembled plastic substrate, etc., or the conductive pattern provided thereon. The present invention is described in more detail in each embodiment. Unless otherwise specified, parts and% are based on weight. Energy ray-sensitive piece silk Preparation of finished product (a): 100 parts (solid content) of visible light curable resin (resin solid content: 55%, propylene glycol monomethyl ether organic solvent, resin acid: 50 mg KOH), employee consumption of Intellectual Property Bureau, Ministry of Economic Affairs Cooperative printed gram, number average molecular weight is about 20,000), which is produced from 24 parts of glycidyl methacrylate and 60 parts of acrylic resin (resin acid 1.55 mg KOH / g, methyl methacrylate / butyl acrylate Ester / acrylic acid = 40/40/20 weight ratio) as a resin (polymer binder) curable with energy rays, 28 parts of photoradical polymerization initiator (Irgacure907, trade name, manufactured by Ciba-Geigy, B Benzene-type compound), 10-spectrum radical polymerization initiator (DETX-S, trade name, manufactured by Nippon Kayaku Co., Ltd., thioxanthan-type compound), and 10 parts of ultraviolet light absorber (Tinuvin326, trade name , Ciba Specialty Chemical Manufactured by s, benzotrifluorene sitting type), compounded to obtain composition (a) (solid content 15%). The visible light-sensitive resin composition (b) is prepared by using 100 parts (solid content) of visible light curable resin (resin solid content-23). This paper size is applicable to China National Standard (CNS) A4 (210 X 297). (Mm) 483294 A7 _B7_ 5. Description of the invention (22) 55%, propylene glycol monomethyl ether organic solvent, resin acid 50 mg KOH / g, number average molecular weight is about 20,000), which is produced from 24 parts of methyl Glycidyl acrylate reacts with 60 parts of acrylic resin (resin acid 155 mg KOH / g, methyl methacrylate / butyl acrylate / acrylic acid = 40/40/20 weight ratio) and is made into visible light curable resin (Polymer binder), 56 parts of photo-radical polymerization initiator (CGI-784, trade name, manufactured by Ciba-Geigy, tricene compound), etc., and 1 part of phthalate Blue green, 50 parts of gypsum and 20 parts of epoxy resin (• Epikoto828, trade name, manufactured by Yuka Shell Epoxy Co., Ltd., bisphenol A type liquid epoxy resin) are dissolved in diethylene glycol dimethyl ether solvent and The composition (b) was obtained (solid content: 30%). Example 1 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs (1) on a copper foil (200x200x1 · 1 mm) with a rod coating to coat the visible light-sensitive composition (b), and initially dried at 80 ° C It took 10 minutes to form a visible light-sensitive resin coating film layer (I), which was about 30 microns thick. Then, a polyethylene glycol terephthalate sheet (38 m) was adhered to the formed coating film to obtain a sheet layer (Π). Then apply the energy ray-sensitive composition (a) on the surface of the sheet layer (Π) with a roller, so that the thickness of the dried film is 6 microns, and dry for 10 minutes to form an energy ray-sensitive coating film layer ( m). (2) The coating film layer (m) is then directly exposed to ultraviolet light laser irradiation (5mj / cm2 (mJ / cm2)) according to the pattern. Then, it was immersed in an alkali developing solution (aqueous sodium carbonate solution, 0.25%) at 25 ° C for 60 seconds to remove the film layer (III) at the exposed portion. (3) Then irradiate the entire coating film with argon ion laser (300m j / cm2). Table 24-This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) 483294 Employees of Intellectual Property Bureau, Ministry of Economic Affairs Printed by the Consumer Cooperative A7 __B7____ 23 V. Description of the invention (). (4) The energy ray-sensitive coating film layer (m) and the sheet layer (π) are then peeled off from the visible-sensitive resin coating film layer (I) to obtain a copper foil and a visible-sensitive resin coating film layer ( I) laminated body. (5) Then immerse the laminated body in a 0.75% aqueous solution of sodium carbonate at 25 ° C for 60 seconds to remove the uncured (unexposed area) visible light-sensitive resin coating film layer (I). The obtained pattern texture is: line shape (pattern width) / space pattern = 100 microns / 20 microns and is good. Example 2 The same treatment as in Example 1 was performed, but a laminated product having an energy ray-sensitive coating film layer (m) and a sheet layer (π) laminated in advance to a visible-sensitive resin coating film layer (I )on. The pattern of the obtained pattern was good in line shape (pattern width) / space = 100 μm / 20 μm. Example 3 The same treatment as in Example 1 was performed, but the products of the visible light-sensitive resin coating film layer (I) and the sheet layer (Π) were laminated in advance, and then laminated onto the substrate, and then energy ray-sensitivity was formed. Coating film layer (III). The pattern of the obtained pattern was good in line shape (pattern width) / interval = 100 micrometers / 20 micrometers. Example 4 The same treatment as in Example 1 was performed, but the visible light-sensitive resin coating film layer (I), sheet layer (Π) and energy ray-sensitive coating film layer (m) were laminated in advance to On the substrate. The pattern of the obtained pattern was good in line shape (pattern width) / interval = 100 micrometers / 20 micrometers. -25- This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) " ^ (Please read the precautions on the back before this page)

· 483294 A7 B7 V. Explanation of the invention (24) Comparative Example 1 As in Example 1, the formation and development of the laminated body are the same as those in Example 1, but the coating film layer (m) does not contain a visible light absorbent. As a result, all the obtained films were defective due to poor residual line properties and space analysis properties. Comparative Example 2 As in Example 2, the laminated body was formed and developed in the same manner as in Example 2, but the coating film layer (m) did not contain a visible light absorbent. As a result, all the obtained films were defective due to poor residual line properties and space analysis properties. Comparative Example 3 As in Example 3, the laminated body was formed and developed in the same manner as in Example 4, but the coating film layer (BI) did not contain a visible light absorbent. As a result, all the obtained films were defective due to poor residual line properties and space analysis properties. Comparative Example 4 As in Example 4, the laminated body was formed and developed in the same manner as in Example 4, but the coating film layer (II) did not contain a visible light absorbent. As a result, all the obtained films were defective due to poor residual line properties and space analysis properties. (Please read the note on the back? Matters before this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs -26- This paper size applies to China National Standard (CNS) A4 (210 X 297 mm)

Claims (1)

483294 Printed by A8, B8, C8, D8, Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 6. Application for patent scope 1. A laminated body for forming a pattern, which is characterized by continuously stacking a negative or positive visible light on the surface of a substrate -A sensitive resin coating film layer (A), a visible light transmission sheet (B), and an energy ray that shields visible light-a sensitive coating film layer (C) to manufacture. 2. The laminated body according to item 1 of the patent application scope, wherein the visible light-sensitive resin coating film layer (A) is a negative visible light-sensitive resin coating film layer (A-1), which is formed from a coating The resin composition of the film contains a visible light curable resin, a photo-radical polymerization initiator, and a photosensitizer. 3. The laminated body according to item 2 of the scope of patent application, wherein the visible light curable resin is a resin having a light-sensitive unsaturated group capable of being cured by crosslinking by irradiation with visible light; and sufficient ionizable groups to Dissolve or diffuse the resin in an alkali or acid developing solution. 4. The laminated body according to item 2 in the scope of patent application, wherein the photo-radical polymerization initiator is selected from the group consisting of di-tert-isophthalic acid di-tertiary-butyl ester, 3, 3 \ 4, 4'-tetra (Tertiary-butylperoxycarbonyl) benzophenone, iron-propadiene complex and titanocene compound. 5. The laminated body according to item 2 of the scope of patent application, which contains the photo-radical polymerization initiator in the range of 0.1-25 parts by weight per 100 parts by weight of the visible light curable resin. 6. The laminated body according to item 2 of the patent application range, wherein the photosensitizer contained in the resin composition forming the coating film is in the range of 0.1 to 20% by weight (solid content). 7 · If the laminated body in the first scope of the patent application, visible light-sensitivity _____- 27-——___ _ This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) (Please read first Note on the back, please fill out this page again) Φ .. · 483294 8888 ABCD Printed by the Consumers' Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 6. Patent application scope The resin coating layer (A) contains a water-based resin and is made by introducing a visible light. Cured unsaturated groups and an ion-formation are based on linear fluorene-based epoxy resins. 8. The laminated body according to item 1 of the scope of patent application, wherein the visible-sensitivity .. resin coating film layer (A) is a positive visible-sensitive resin coating film layer (A-2), formed from a coating film The formed resin composition contains a photoacid generator component, a resin component, and a photosensitizer. 9. The laminated body according to item 8 of the scope of patent application, wherein the resin component is a base resin made by bonding sulfonium diazidesulfonic acid to an ion-forming group through a sulfonate bond. 10. The laminated body according to item 8 of the scope of patent application, wherein the photoacid generator component is contained within a range of 0.1 to 40 parts by weight per 100% by weight of the resin component. 1 1. The laminated body according to item 8 of the scope of patent application, the photosensitizer component is based on the resin composition forming the coating film, and contains 0.1-20% by weight (solid content). 12. The laminated body according to item 1 of the patent application scope, wherein the visible light-sensitive resin coating film layer (A) is conductive or insulating. 13. The laminated body according to item 1 of the scope of patent application, wherein the visible light-sensitive resin coating film layer (A) has a thickness of about 1 micrometer to about 5 millimeters. 14. The laminated body according to item 1 of the patent application scope, wherein the visible light-transmitting sheet layer (B) contains a resin sheet that transmits at least about 90% of the visible light that is irradiated. 15. The laminated body according to item 1 of the scope of patent application, wherein the visible-transmissive sheet (B) contains a polyethylene glycol terephthalate sheet. ________ __no-Paper size applies to Chinese National Standard (CNS) A4 (210 X 297 297) H ϋ III ϋ Is — — — — · IIIIIII one-port, IIIIIIII — — — — — — — — — — — — — — — — — — — — — I- (Please read the notes on the back before filling out this page) 483294 A8 B8 C8 D8 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 6. Scope of patent application 1 6 · If the scope of patent application is the first The laminated body of the item, wherein the visible-transmissive 'sheet layer (B) has a thickness of about 10 micrometers to about 5 millimeters. 17. The laminated body according to item 丨 of the patent application scope, wherein the energy ray-sensitive coating film layer (C) contains a visible light absorber, a colorant, a material, a metal powder pigment or a metal gloss pigment. 18. The laminated body according to item 1 of the scope of patent application, wherein the energy ray-sensitive and sexual coating film layer (C) contains a negative resin composition, which is irradiated with energy rays, such as water, organic solvents, alkali or It becomes soluble or diffusible in a treatment solution such as an acid. 1 9 · The laminated body according to item 1 of the scope of patent application, wherein the energy ray-sensitive coating film layer (C) contains a positive resin composition, which is actinic energy ray. After irradiation, in water, organic solvents, alkali Or become insoluble or non-diffusible in acid. 20. The laminated body according to item 1 of the patent application range, wherein the energy ray-sensitive coating film layer (C) has a thickness of about 1 micrometer to about 500 micrometers. If the laminated body of the first patent application scope, there is another coating on the energy ray-sensitive coating film layer (C). 22. A method for preparing a laminated body for pattern formation as described in the first patent application scope, which is characterized by forming a negative or positive visible light-sensitive resin coating film layer (A) on the surface of a substrate, and then forming a Visible light-transmissive sheet (B) and continue to laminate an energy ray-sensitive coating film layer (C) that shields visible light. 23 · —A method for preparing a laminated body for pattern formation as described in item 1 of the scope of patent application, which is characterized by forming a negative or positive visible light-sensitive-29-Bu paper standard applicable to China National Standard (CNS) A4 (21〇x 297 mm) (Please read the notes on the back before filling in this page) *-line · 483294 Printed by A8 B8 C8 D8, Employee Consumer Cooperative of Intellectual Property Bureau of the Ministry of Economy Layer (A) is on the surface of the substrate, and then a pre-formed 2-layer laminate is formed, which includes a visible light-transmitting sheet (B) and an energy ray-sensitive coating layer (C) that blocks visible light. On the surface of the coating film layer (A), the surface on the side of the sheet layer (B) is brought into contact with the coating film layer (A). 24. A method for preparing a laminated body for forming a pattern as described in the first patent application scope, characterized in that a pre-formed 3-layer laminated body is laminated on the surface of the substrate, including a negative or positive visible light-sensitivity A resin coating film layer (A), a visible light-transmitting sheet layer (B), and an energy ray-sensitive coating film layer (C) that shields visible light, so that the side surface of the coating film layer (A) is in contact with the surface of the substrate. 25. A method for preparing a laminated body for pattern formation as described in the first patent application scope, which is characterized in that a pre-formed 2-layer laminated body is laminated on the surface of the substrate, including a negative or positive visible light-sensitive A flexible resin coating film layer (A) and a visible light-transmitting sheet layer (B), contact the surface of the coating film layer (A) side with the surface of the substrate, and then form an energy ray-sensitive coating film layer that shields visible light (C) On the surface of the sheet (B) side of the obtained 3-layer laminate. 26. A method for forming a pattern, including the following steps: (i) irradiate actinic energy rays according to a figure, through a masking medium, or directly in the laminated body for forming a pattern as described in the first patent application scope On the surface of the radiation-sensitive coating film layer (C); (ii) through the development of the coating film layer (C), removing the energy-ray-sensitive coating film layer (C) in the irradiated or unirradiated area and Form a kind of photoresist -___- 30 · _______ This paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm) (Please read the precautions on the back before filling this page) # Order ------ --- line 丨 «483294 A8 B8 C8 D8 VI. Patent application pattern coating film; (iii) Then, after irradiating visible light on the entire surface, (iv) visible light-sensitive resin coating film layer from the laminated body ( A), remove the visible light-transmitting sheet (B) and the energy ray-sensitive coating film layer (C), expose the visible light-sensitive resin coating film layer (A), and then (V) develop the coating film with a developing solution Layer (A). ---- I ----------------- Order ---------- line-- ▲ (Please read the notes on the back before filling this page) Economy Printed by the Ministry of Intellectual Property Bureau's Consumer Cooperatives _-31-This paper size applies to China National Standard (CNS) A4 (210 X 297 mm)