TW479842U - Blockage alarm device of waste liquid discharge - Google Patents
Blockage alarm device of waste liquid dischargeInfo
- Publication number
- TW479842U TW479842U TW089214122U TW89214122U TW479842U TW 479842 U TW479842 U TW 479842U TW 089214122 U TW089214122 U TW 089214122U TW 89214122 U TW89214122 U TW 89214122U TW 479842 U TW479842 U TW 479842U
- Authority
- TW
- Taiwan
- Prior art keywords
- waste liquid
- liquid discharge
- alarm device
- blockage alarm
- blockage
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Measuring Volume Flow (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW089214122U TW479842U (en) | 2000-08-15 | 2000-08-15 | Blockage alarm device of waste liquid discharge |
US09/710,711 US6292103B1 (en) | 2000-08-15 | 2000-11-10 | Alarm system for detecting waste liquid discharge blockage |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW089214122U TW479842U (en) | 2000-08-15 | 2000-08-15 | Blockage alarm device of waste liquid discharge |
Publications (1)
Publication Number | Publication Date |
---|---|
TW479842U true TW479842U (en) | 2002-03-11 |
Family
ID=21671602
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW089214122U TW479842U (en) | 2000-08-15 | 2000-08-15 | Blockage alarm device of waste liquid discharge |
Country Status (2)
Country | Link |
---|---|
US (1) | US6292103B1 (zh) |
TW (1) | TW479842U (zh) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7336190B2 (en) * | 2006-03-06 | 2008-02-26 | Giordano Jr Joseph | Early detection and advanced warning “waste is backing up” apparatus and method |
US10398076B1 (en) * | 2018-03-23 | 2019-09-03 | Cnh Industrial Canada, Ltd. | Method and system for preventing plugging of an agricultural particulate material |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5169028A (en) * | 1991-06-25 | 1992-12-08 | Advanced Micro Devices, Inc. | Phatoresist dispensing system |
US5312039A (en) * | 1992-06-22 | 1994-05-17 | Vlsi Technology, Inc. | Electro-optic monitor for fluid spray pattern |
US5313818A (en) * | 1992-11-12 | 1994-05-24 | Vlsi Technology, Inc. | Contaminant monitor for a flowing liquid |
US5762684A (en) * | 1995-11-30 | 1998-06-09 | Dainippon Screen Mfg. Co., Ltd. | Treating liquid supplying method and apparatus |
US5905656A (en) * | 1997-04-18 | 1999-05-18 | Taiwan Semiconductor Manufacturing Co., Ltd. | Method and apparatus for dispensing a liquid |
-
2000
- 2000-08-15 TW TW089214122U patent/TW479842U/zh not_active IP Right Cessation
- 2000-11-10 US US09/710,711 patent/US6292103B1/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US6292103B1 (en) | 2001-09-18 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
GD4K | Issue of patent certificate for granted utility model filed before june 30, 2004 | ||
MK4K | Expiration of patent term of a granted utility model |