TW477465U - Protector for alignment mark - Google Patents

Protector for alignment mark

Info

Publication number
TW477465U
TW477465U TW87214138U TW87214138U TW477465U TW 477465 U TW477465 U TW 477465U TW 87214138 U TW87214138 U TW 87214138U TW 87214138 U TW87214138 U TW 87214138U TW 477465 U TW477465 U TW 477465U
Authority
TW
Taiwan
Prior art keywords
protector
alignment mark
mark
alignment
Prior art date
Application number
TW87214138U
Other languages
Chinese (zh)
Inventor
Cheng-Fang Jung
Shuang-Ming Jeng
Original Assignee
Taiwan Semiconductor Mfg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taiwan Semiconductor Mfg filed Critical Taiwan Semiconductor Mfg
Priority to TW87214138U priority Critical patent/TW477465U/en
Publication of TW477465U publication Critical patent/TW477465U/en

Links

TW87214138U 1998-08-28 1998-08-28 Protector for alignment mark TW477465U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW87214138U TW477465U (en) 1998-08-28 1998-08-28 Protector for alignment mark

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW87214138U TW477465U (en) 1998-08-28 1998-08-28 Protector for alignment mark

Publications (1)

Publication Number Publication Date
TW477465U true TW477465U (en) 2002-02-21

Family

ID=21635766

Family Applications (1)

Application Number Title Priority Date Filing Date
TW87214138U TW477465U (en) 1998-08-28 1998-08-28 Protector for alignment mark

Country Status (1)

Country Link
TW (1) TW477465U (en)

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Legal Events

Date Code Title Description
GD4K Issue of patent certificate for granted utility model filed before june 30, 2004
MK4K Expiration of patent term of a granted utility model