TW476095B - Light source mask of photolithography area and the manufacturing method thereof - Google Patents

Abstract

The present invention is a light source mask of photolithography area and the manufacturing method thereof, mainly by disposing the object of the light source mask to be plated into a liquid chamber filled with yellow agent, so that the periphery of glass tube of the light source mask is uniformly coated with the yellow agent, thereby a photolithography area in the wavelength range between 500 nm to 580 nm can be created, light below 500 nm can be absorbed in the photolithography area and the effect of ultraviolet light can be blocked. It can be applied in the illumination of clean room of highly photosensitive semiconductor, and also has the effect of environmental protection, power-saving and insect-expellent.

Description

476095 V. Description of the invention (1) [Field of the invention] The present invention relates to a light source cover with a yellow light zone and a method for manufacturing the same, especially for lighting in a semiconductor factory, that is, adding a yellow agent to the outside of the light source cover. An innovative inventor that prevents the penetration of ultraviolet rays and has a mosquito repellent effect. [Background of the invention] As shown in the first figure, the structure of a general fluorescent tube 1 a is that the inner wall of the glass tube 10 a is coated with a fluorescent substance 15 a, and the filament 1 is provided with a filament 1 at both ends. 1 a, the filament 1 1 a has a double-wound or triple-wound electrode, and the filament 1 1 a is coated with an electron emitting substance; however, ', the fluorescent lamp 1 a is convenient for easy discharge, that is, The tube is sealed with a pressure of 2. 3 3 torr of argon (or a mixture of noble gases) and an appropriate amount of mercury; further, the operating principle of the fluorescent lamp 1 a is that when the lamp is turned on (started), the electrode (cathode) passes a current Preheating, the electrode releases a wealth of hot electrons 1 2 a into the tube. The hot electrons 1 2 a are guided to the electrode (anode) on the other side and start to discharge. 2 a will be stimulated with the mercury electrons 1 3 a in the tube to generate ultraviolet light 1 4 a (253. 7nml); and the ultraviolet light 1 4 a will excite the coated fluorescent substance 1 5 a and convert it into visible light 1 6 a. In addition, as shown in the second figure, the wave-length range of visible light is between 380 nm to 760 nm (yellow light has a wavelength of 500 nm to 580 nm), and the wavelength below 380 nm is an ultraviolet line. However, because ultraviolet rays can cause changes in the photosensitive materials of the semiconductor industry, in general semiconductor industry or IC factories and other places with photosensitive materials, lighting equipment is placed outside the glass tube 1 a of the fluorescent lamp 1 a

Page 4 476095 V. Description of the invention (2) Plus—a layer of yellow PE film 2 a is based on 5 and the yellow PE film 2 a can block light with a wavelength below 50 0 nm, so as to avoid the wavelength 50 0 nm The following photosensitive materials change, and the yellow PE film 2 a has a protective effect, that is, when the lamp is accidentally damaged, the glass fragments and the fluorescent powder in the tube will not splash around and pollute the environment. However, the yellow PE film 2 a will It will cause discoloration or deterioration with the influence of time or temperature, and the yellow PE film 2 a is non-recyclable, and is not environmentally friendly. Based on the above, we can see that the above-mentioned conventional light lamps are lacking in actual use. Those who have a deficiency of 5 and need to be improved. The reason is that the inventor feels that the above-mentioned defects can be improved. J has been engaged in related professional development and production and marketing for many years. 9 Several verbal systems and implementations 5 can effectively improve the above-mentioned shortcomings 5 and develop an innovative light source cover with a yellow light zone and an innovative product of its manufacturing method. [Objective of the invention] The main feature of the present invention is that it can Provide a light source cover with a yellow light zone and a manufacturing method thereof. Mostly, a yellow agent formed by an organic polymer is used to coat the periphery of a glass lamp. 俾 The yellow light zone can be uniformly generated and can be absorbed below 50 Onra. The light source 5 further blocks the influence caused by ultraviolet rays, and has environmental protection Λ power saving and mosquito repellent effects. [Inventive features] —-In order to achieve the above-mentioned g5, the present invention provides a light source cover with a yellow light area. And its manufacturing method, the light source cover system includes a glass tube of a light lamp, a light source, and coating on the glass tube The yellow toner 9 wherein the light emitting source may be a cold-light source (which temperature is 100. C below) 5 and the yellow

476095 V. Description of the invention (3) The toner is a yellow and transparent viscous liquid. The viscous liquid has the following components and weight percentages: _ Epoxy Silanolate (GPTMS) Epoxy Resin (E-1 14) Iso Propanol (IPA) Propanol nitrate [Zr (0Pr) 4] Yellow dye Ethyl acetate Sodium hydroxide Chlorinated ethanol (EtOH) Pure water _ 28 · 0 ～ 13 · 0 ～ 0 · 1 ～ 1 · 0 ～ 11 0 to 0 6 to 0 2 to 0 1 to 0 01 to 14 0 to 5 0 to 52. 0 19.0 0. 2 1. 6 15. 0 0. 8 0. 4 0. 3 0. 05 18. 0 13.0 In addition, the weight percentage of this # accounted for slightly liquid vehicle composition is as follows: epoxy silanolate (GPTMS) epoxy resin (E-1 14) isopropyl alcohol (IPA) nitrate propanol False [Zr (0Pr) 4] Yellow dye ethyl acetate argon oxidized sodium chloride sodium 40.0 17.0 0.15 1. .3 14 · .0 0. 7 0. 3 0. 2 0.03

476095 V. Description of the invention (4) EtOH 17.0 The rest is I water. Also, by the liquid tank containing the viscous liquid, the parts to be plated of the light source cover are placed in the liquid tank, etc. Quickly pull up the plated part and place the plated part in an oven, and then dry it to form a hardened agglomerate, and then complete the light source cover with a yellow light zone and a product of a manufacturing method thereof. [Explanation of the Example] In order for your review committee to further understand the features and technical contents of the present invention, please refer to the following detailed description of the present invention and the accompanying drawings, but the attached drawings are provided for reference and explanation only, and are not intended to be used for Those who limit the present invention Λ Please refer to the third to fifth figures. The present invention provides a light source cover with a yellow light region and a manufacturing method thereof. The light source cover system may be a fluorescent tube 1, a fluorescent light bulb 2, General window glass 3 and other light-transmitting structures, where:-* The fluorescent tube 1 (as shown in the third picture) includes a glass tube 10 and a yellow agent 1 1 applied on the periphery of the glass tube 10, and The glass tube 10 has components capable of emitting a light source (the light source can also be a cold light source 12 and its heating temperature is below 100 ° C), and these components can generate ultraviolet rays, but the external line Because it is blocked by the yellow agent 1 1 outside the broken glass I1 0, it blocks ultraviolet rays with a wavelength below 500 nm, so that only the light source with a wavelength above 500 nm is transparent, and the yellow agent is a yellow transparent organic Polymer The system consists of the following components:

Page 7 476095 V. Description of the invention (5) Ingredients_Weight (Kg) Epoxy silanolate (GPTMS) 16. 0 Epoxy resin (E-1 14) 6. 8 Isopropyl alcohol (IPA) 0. 06 Nitric acid 0.52 Propanol 鍅 C Zr (0Pr) 4] 5. 60 Yellow dye 0 · 28 Ethyl acetate 0. 12 Sodium oxide 0 · 08 Sodium chloride · 01 Ethanol (EtOH) 6. 8 Pure water was added to The epoxy silanolate (CGPTMS) of all 40Kg can be purchased from Shinbon Shin-Etsu Chemical Industry Co., Ltd .; epoxy resin (E-1 1 4) can be purchased from Nanbao Resin Chemical Factory Co., Ltd., which can be used as hardening Agent. Furthermore, the fluorescent light bulb 2 (as shown in the fourth figure) includes a glass tube 20 and a yellow agent 2 1 applied on the periphery of the glass tube 20. However, the fluorescent light bulb 2 is different from the foregoing in shape only -The fluorescent tube 10, so the rest will not be described in detail; In addition, the window glass 3 (as shown in the fifth figure) includes a glass plate 30 and the glass plate 30 coated on the periphery of the glass plate 30. Yellow agent 3 1, however, the window glass 3 can prevent ultraviolet rays from sunlight, and can be installed in the room

476095 V. Description of the Invention (6)-The doors and windows of the house can also be applied to the windows of the car. Please also refer to the sixth figure, the present invention provides a light source cover with a yellow light zone and a method for manufacturing the same. The steps are as follows: (1) First, according to the components of the yellow agent, it is formulated into a yellow color. (2) Put the viscous liquid into a liquid tank, which is equipped with power supply plating equipment; (3) Put the plating parts of the light source cover into the liquid tank, the temperature of which is 20 ~ 50. C); (4) Furthermore, the plated part should be pulled up at a constant speed, so that the thick drilling liquid adhered to the plated part has a thickness of 1 / zm ~ 1 0 / z in and a viscosity of 2 0 ~ 8 0 cp (millipoise), the thickness is controlled by time and speed, that is, thickness is inversely proportional to time, and proportional to viscosity; (5) Finally, the plating is placed in the oven to control it The temperature is below 100 ~ 160 ° C, and the viscous liquid on the surface of the plated part is dried and hardened; (6) the final package is formed. Therefore, the light source with a yellow light region and the cover and the manufacturing method thereof according to the present invention have the following advantages: (1) It has a light source that blocks the wavelength below 500 nm to prevent the penetration of ultraviolet rays To avoid the occurrence of photosensitive materials with a wavelength below 500 nm

Page 9 476095 V. Description of the invention (7) changes, so it can be suitable for the lighting of high-sensitivity semiconductor clean room. (2) The yellow agent around the glass tube is a coating of organic polymer, which is recyclable and therefore environmentally friendly. (3) The yellow light area produced by the light source cover has a mosquito repellent effect, so the mosquito repellent lamp made can replace the general electric mosquito coils, mosquito coils or mosquito nets, and also has lighting and mosquito repellents. The dual purpose effect. (4) It can be suitable for temperatures below 200 ° C, and can achieve the effect of no discoloration and deterioration. In summary, the present invention is highly industrially applicable and fully meets the requirements for the application for an invention patent. The application was made in accordance with the Patent Law. Please check and approve the patent in this case to protect the rights of the inventor. However, the above are only the preferred and feasible embodiments of the present invention, and the patent scope of the present invention is not limited by this. Therefore, any equivalent technical changes made by using the description and drawings of the present invention are included in the same reason. Within the scope of the invention, Chen Ming was together.

Page 10 476095 Schematic description of the first picture: the structure of the conventional fluorescent lamp. Figure 2: Schematic diagram of fluorescent lamps used in conventional semiconductor factories. The third diagram: The first embodiment of the light source cover with a yellow light zone according to the present invention. The fourth diagram: The second embodiment of the light source cover with a yellow light zone according to the present invention. The fifth picture Schematic diagram of the third embodiment of the light source cover in the light area. FIG. 6 • Flow chart of manufacturing steps of the light source cover with yellow light area in the present invention. [Illustration of Drawing No.] C acquaintance] • 1 a light lamp 1 0 a glass tube 1 1 a filament 1 2 a thermo electron -1 3 a mercury electron 1 4 a ultraviolet 1 5 a fluorescent substance 1 6 a visible light C The present invention • 1 light tube 1 0 glass 1 1 yellow tincture-agent 1 2 cold light source 2 light lamp cannon 2 0 glass tube 2 1 yellow agent 3. ~ Window glass 476095 yellow agent diagram simple illustration 3 0 glass Board ϋΒ Page 12

Claims (1)

ΤΠΤΧΓ 476095 Dazheng _ Factory 2μs 6. Application scope 1. A light source cover with a yellow light zone, including glass for daylight lamps, a cold light source in the glass tube, and a yellow agent applied to the glass tube. 2. The light source cover with a yellow light area as described in item 1 of the scope of the patent application, wherein the yellow agent is composed of epoxy stone alkoxide, epoxy resin, isopropyl nitric acid, propanol, yellow dye, and ethyl acetate. Purpose, sodium hydroxide, ethanol and pure water. 3. A method for manufacturing a light source cover with a yellow light zone, the steps are as follows: (1) First, according to the composition of the yellow agent, prepare a viscous liquid and place the viscous liquid in a liquid tank; (2) The plated part of the light source cover is placed in the liquid of the step (1); (3) Furthermore, the plated part of the step (2) is started at a constant speed, and (4) Finally, the aforementioned (3) The plated part in the step is placed in an oven, and is dried and hardened. 4. The method for manufacturing a light source cover with a yellow light zone as described in item 3 of the scope of patent application, wherein the temperature in the step (2) of the liquid tank is 20 ° C ° 5, as described in item 3 of the scope of patent application A method for manufacturing a light source cover with a yellow light zone, wherein the viscosity of the plated part adhered in step (3) is l // m ~ 10 // m and the viscosity is 20 ~ 80 cp. 6. The method for manufacturing a light source cover with a yellow light area as described in item 3 of the scope of the patent application, wherein the temperature in the step (4) of the oven is controlled by a tube, an outer body, alcohol, and chlorine: liquid, body tank type Pull the body of the body ~ 5 0 body of the liquid thickness of the body 100 476095 Page 14