TW473809B - Inlet structures for introducing a particulate solids-containing and/or solids-forming gas stream to a gas processing system - Google Patents

Abstract

An inlet structure for passage of a gas stream from an upstream source of same to a downstream locus, wherein the inlet structure is constructed, arranged and operated to suppress particulate and film deposition and formation, as well as to suppress adverse hydrodynamic effects.

Description

473803 Μ B7 V. Description of the invention (1) Field of the invention The present invention relates to an inlet device for directing airflow to a downstream processing equipment, such as a downstream gas processing device. In a particular aspect, the invention relates to an anti-clogging inlet structure for directing a gas stream containing particulate solids and / or shaped solids to a gas processing system. Description of Related Techniques When processing a gas stream containing particulate solids and / or formed solids for processing, it is a common problem that particulate solids from these streams block the inlet device of the processing equipment. Particulate solids and / or shaped solids flowing through the processing equipment may deposit solids on the surface and in the channels of the inlet device. If particulate solids accumulate as the processing equipment continues to operate, the inlet device of this equipment may become occluded enough to completely block, or the accumulation of solids may not occlude the inlet of the processing unit, but may cause flow damage and increase pressure drop in the system This makes the processing equipment very inefficient for its intended purpose. Printed by the Goods and Consumers Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs ^ (Please read the notes on the back before filling this page) Generally, the particles associated with the airflow may come from various sources, including: (i) generated by the upstream and downstream processing units Particles, which come from the downstream of the inlet device with the airflow; (π)-particles formed in the system lines by the reaction gas components reacting with oxygen leaking into the pipeline; (in) due to two or more treatment exhaust gases in the airflow Particles formed in the system pipeline as a result of reactions flowing downstream to the inlet device; (iv) particles formed by (local) condensation of exhaust gas flowing downstream to the inlet device; and (v) process gas and from downstream gas processing units Particles formed by reactions such as downstream diffusion of oxygen or steam from downstream water scrubbers. In some cases, particles are formed by condensation, which may be improved by treating the condensable part of the gas stream by heating the processing line. However, even if this paper size applies the Chinese National Standard (CNS) A4 (210X297 mm) 4 473803 A7 B7 V. Description of the invention (2) There are still problems with particles from other sources. (Please read the precautions on the back before filling this page) Especially in the field of semiconductor manufacturing, the blockage of the inlet can easily occur from the following situations: (a) steam or liquid water migrates to the inlet through the capillary action, and is used as A combustion product of the downstream oxidation operation and / or water scrubbing operation of the processing gas stream, resulting in a non-uniform or uniform manner with incoming water sensitive gases such as 8 (: 13, comment ^ 00 $, 1 ^ 5, $ 丨? 4 Hydrolysis reaction; (1)) thermal decay of the incoming heat sensitive gas; and (c) the incoming gas due to condensation at the transition point of the system. The above-mentioned inlet blockage problems may need to include a plunger mechanism or other solid removal device. K keeps the inlet free of solids accumulation. However, these mechanical installations add considerable cost and labor to the system. In other cases, the blockage of the inlet may be systemic and requires regular preventive maintenance, K keeping the inlet free of solids buildup. However, such repairs require system downtime and loss of productivity at the manufacturing or processing facilities associated with the entrance. The Ministry of Economic Affairs, Central Bureau of Standards and Consumers ’Cooperatives, please take special consideration into the semiconductor processing and exhaust gas processing system, which will return steam from the downstream water scrubber to the upstream inlet device through the capillary tube, the action of steam, or liquid water. The released steam migrates backward from the scrubber inlet to the processing tool, and the normal direction of the process gas flow is reversed. Various mechanisms may be involved in the backward migration of the steam sent by the lotus. One mechanism is the mutual diffusion of gases. Avoiding the backward migration of this steam source is all practical and adds a diffusion barrier to the water scrubber inlet. Another mechanism for the backward diffusion of this steam is the so-called Richardson effect ring effect. All dry pumps cause a certain amount of pressure fluctuation in the gas flow. These pressure fluctuations cause a counter-current conveying mechanism, which is reverse to normal. The paper size applies the Chinese National Standard (CNS) A4 (210X297 mm). 5-473800 A7 B7. 5. Description of the invention (3) The direction of gas flow. . This phenomenon is the result of the boundary layer ring effect. Because of this effect, the backflow migration velocity is greatest at a small distance from the wall surface. If particulate solids accumulate with the subsequent operation of the processing equipment, the inlet device of this equipment may be blocked to the point that the κ is completely blocked. Otherwise, the accumulation of solids may not occlude the inlet of the processing unit, but it may flow and increase when the system is damaged. The pressure drop makes the processing equipment very inefficient for its intended purpose. Especially when using scrubber equipment for scrubbing airflow, such as when manufacturing semiconductor devices, the generated exhaust gas flow, the exhaust gas constituting the inflow airflow to the water scrubber, may contain or generate (by reaction or condensation) significant Microparticle contents, for example, silicon dioxide from CVD or other deposition operations, metal submicron particles. These exhaust streams can easily block the inlet of the exhaust water scrubber. Therefore, the entrance of the water scrubber needs to be manually cleaned frequently. Printed by the Central Bureau of Standards, Ministry of Economic Affairs, Consumer Cooperatives ^ (Please read the precautions on the back before filling out this page) Sensitivity to inlet clogging is the main disadvantage of today's commercial water scrubber units used in the semiconductor industry. The time required to block the inlet of the water scrubber is, in these applications, treatment-related and site-specific. Due to the blocked inlet, the average time of failure of the water scrubber is affected, among which factors include: treatment tools and tools that generate particle-containing treatment effluent from the scrubber to K, and upstream treatment of the effluent from the water scrubber to M The specific processing formula and chemical action used, and the characteristics of K and the inert gas cleaning of the pump and the processing pipeline in the system. Other processing conditions and factors are suspected to cause or affect the accumulation of particulates in the processing system, but have not been clearly defined. Please refer to Abreu, R., Troup, A. and Sahra, M., "Causes of anomalous solid formation in exhaust systems of low-pressure. This paper size applies to China National Standard (CNS) A4 (210X 297 mm) 6 473800 A7 B7 Printed by the Central Standards Bureau of the Ministry of Economic Affairs and the Industrial and Consumer Cooperatives V. Description of Invention (4) chemical vapor deposition and plasma enhanced chemical vapor deposition semiconductor processes, J * Vac. S c ί * Technol. B12 (4), J u 1 / A ug 1 994, 2763-2767 〇 In operations such as processing exhaust gas from semiconductor manufacturing operations, the exhaust gas can be subjected to oxidation treatment, thermal oxidation, or other oxidation reaction treatment. The K oxidation method can eliminate the danger of exhaust gas. Oxidation components. This kind of oxidation can significantly reduce the igniting components and toxic components in the exhaust stream, K and other components that can be harmful when released from the treatment facility to the atmosphere by oxidation. The exhaust gas may not only contain significant particulate content, such as silicon dioxide from CVD or other deposition operations. Rice particles, and these air streams may contain significant gaseous components, which may be aggressive in the processing environment and at elevated temperatures generally used for oxidation treatment. The heat exits the air flow from the oxidation treatment, and attribution This aggressive nature therefore poses a problem in terms of the solids accumulation capacity of such particulate contents that discharge the air stream. The particulate solids in such air streams may clog downstream processing equipment, such as downstream processing operations including water scrubbing. The clogging of scrubbing equipment is a major problem in this technique. This is especially the case when there is a transition from the thermal oxidation condition inherent in the combustion device to the cold and wet condition of the quench chamber. As the name implies, there is a transition zone where this transition zone exists Flow transition from self-heating combustion condition to wet quenching condition. The related problems of these oxidation / scrubbing / quenching systems include the accumulation of particles due to the backward diffusion of moisture and the occlusion of the final section, and from the wet ---- -· --— (Please read the notes on the back before filling in this page) This paper size applies to China National Standard (CNS) A4 specifications (2 10X 297 mm) 7 1 473803 A7 B7 V. Description of the invention (5) Spray in the quench zone causes sticky particles that will accumulate in the part of the quench zone directly above the wet zone. The problem is due to the lack of a permanent definition of the wet / dry interface location. Because the position of the wet / dry interface may change when the fluid dynamics of the system changes, it becomes difficult to accurately position the wet / dry interface. Factors affecting interface position include: (a) combustion exhaust gas flow rate and heat load, (b) quench spray flow rate and overflow weir flow rate, M and (c) backward mixing of quench spray or overflow weir flow, and Eddy current effect. The inability to fix the position of the wet / dry interface leads to two problems: (1) the parts that are prone to agglomeration of particles, and (2) the material corrosion of the quenched parts may occur as a result. Most alloys for combustion and quenching equipment are corrosion resistant in a specific set of conditions. Alloys that will withstand thermal oxidation conditions are generally not suitable for wet corrosion conditions and vice versa. This problem is further exacerbated by the presence of other products that may accelerate corrosion or oxidation, such as the presence of halogens, vulcanizing agents, and the like. Since the specification transition of construction materials cannot be accurately fixed, it becomes necessary to use foreign construction materials, which will be too expensive and the performance is only ordinary. People are working hard to solve this problem. No acceptable solution has been found so far, and it is printed by the Consumer Cooperatives of the Central Bureau of Standards of the Ministry of Economic Affairs (please read the precautions on the back before filling this page). There are various suggestions for the lack of solutions. It is generally necessary to use the two approaches s. The first is the use of an overflow weir, where M makes the wall wet during the transition. The second is the use of an immersion quench. Overflow weirs are best at preventing particulate accumulation, but there are three main shortcomings. Overflow weirs are only modest in preventing particulate accumulation because they still have a wet / dry interface at the point of water guidance. Overflow weirs require significant water levels to maintain a minimum wetting rate on the metal surface. In addition, the overflow weir needs to be precisely leveled to maintain a uniform falling film to protect the metal in the quenched part. This paper size applies the Chinese National Standard (CNS) A4 specification (210 × 297 mm)-8-473800 A7 B7 Printed by the Industrial and Commercial Cooperatives of the Central Bureau of Standards, Ministry of Economic Affairs ^ V. Description of invention (B) Notable is the direct connection between the increase rate of the weir water and the minimum wetting rate and the level of the equipment. These factors hinder the minimum rate of water increase in the overflow weir and constitute unacceptable limits. In fact, I found that no matter how hard I tried to level the quenching equipment, the inherent thermal stresses involved in the combustion / quenching process required the equipment to be regularly re-leveled, so that the quenching level was kept within the tolerance M. This situation necessitates unacceptable repair work. The discussion of the minimum wetting rate and level can be found in "Chemical Engineers Handbook", ed. ^ Perry & Chilton, Fifth Edition, pp, 5-57. See also "Process Heat Transfer" by Hewitt, GF et al., CRC Press 1993, pp. 539-541, M and immersion quenching can be found on page 475 of this book. SUMMARY OF THE INVENTION In a broad aspect, the present invention is directed to a gas flow for guiding, such as a particulate-containing solid and / or forming Gas flow from solids to a downstream processing unit, such as an inlet device for a gas processing system, where the structure is constructed, set, and operated to occlude (eg, from solid deposition, air decay, etc.) and adverse hydrodynamic effects, such as gas Flow flow has the smallest shunting, short circuit, etc. In one aspect, the inlet device includes a gas-permeable wall enclosing the gas flow path, and an external gas-permeable wall, K defining an annular jacket outside the annular gas storage tank. The outer ring jacket is provided with a device for passing air currents containing particulate solids and / or formed solids through the population device, for example, When a gas source container, such as a conventional pressurized cylinder, flows to a gas processing system, it guides the gas into the annular gas storage tank. In this structure, the gas supplied to the annular gas storage tank is sufficiently pressurized, K flows out through a breathable wall (please read the precautions on the back before filling this page) This paper size applies to China National Standard (CNS) A4 specifications (210X 297 mm) One 9 One 473803 A7 B7 V. Description of the invention (7 ) ", For the purpose of resisting the deposition or formation of solids on the inner surface of the breathable wall. As another variant, the inlet device described on κ may optionally include an additional means for guiding a pulsating higher pressure gas into the annular storage tank Port, which is coupled to a source of higher pressure gas, and a device for transmitting pulsation from its source to the annular storage tank. During operation, this pulsating higher pressure gas is guided in the breathable wall to complete another anti-clogging effect, Impulsively use κ to remove particles that may form or otherwise deposit on the inner surface of the breathable wall, even if lower pressure gas continues to penetrate through the wall. The mouth on the outer annular jacket can be constructed and designed In order to provide higher pressure gas flowing into the annular storage tank tangentially. Printed by Zhengong Consumer Cooperative, Central Bureau of the Ministry of Economic Affairs ^ (Please read the precautions on the back before filling this page) As another entry device for the broad description on K Variations, the breathable wall and the outer annular jacket may optionally be coupled to a downstream flow path section, including a wall enclosing the corresponding section of the gas flow path, and forming all openings with the breathable wall in between. The wall of the flow path section is bounded by an outer annular jacket to define an annular liquid storage tank therebetween, which forms a liquid overflow relationship with the cutout, so the annular liquid storage tank is filled with water or other liquid beyond the height of the wall At a certain point, the liquid flows on the wall and along the inner surface of the wall as a falling liquid film thereon. This falling liquid film thus provides a barrier or covering medium on the inner surface of the wall, M resists the deposition or formation of solids on this inner surface, and also removes any solids still deposited or formed on the inner surface of the wall with M. In the downstream flow path section of the inlet device, the outer annular jacket may be provided with a mouth or other access device, which is coupled to a liquid source by a line or conduit containing a flow control valve or other flow regulating device, such as a liquid containing Container 〇__ This paper size applies Chinese National Standard (CNS) A4 specification (21〇 × 297 mm)-10-473800 Central Standards Bureau of the Ministry of Economic Affairs and Industrial Consumers Cooperatives A7 B7 V. Description of the invention (s) in The mouthpiece of the above structure may include a unitary opening, channel, feedthrough, takeover head, or other access structure, and / or many of the same, such as a series of vertical and / or peripherally spaced access structures, in each case , Through which the fluid is transferred to the internal volume of the annular storage tanks associated with it. In another aspect, the inlet device of the present invention includes first and second substantially vertical flow channel sections, which are in series coupling relationship with each other. A substantially vertical flow channel is defined in this series coupling relationship, and the fluid flow containing particulate solids is And / or the shaped solid stream may flow from its upstream source of particulate-containing solids and / or shaped solid fluids to a downstream fluid processing system configured to accept a fluid flow into an inlet device. The first flow channel section is an upper section of the inlet device, and includes an inner gas-permeable wall, which may be formed of a porous metal, porous ceramic, porous plastic, or other suitable construction material to enclose the upper portion of the first flow channel. The porous inner wall has an upper portion bounded by an inner surface flow channel. The breathable wall is surrounded by an outer wall enveloping type, forming an open relationship with the porous inner wall. The outer wall is not porous in character, but is provided with a gas flow port. With this configuration, an inner annular volume is formed between the respective inner porous wall and the outer sealing wall. The gas flow port can be coupled to a gas source in a flow relationship, for example, by a suitable valve and control device, the gas κ is flowed into the inner ring volume at a predetermined low rate for the gas to flow from the inner ring volume into the flow channel. A high-pressure gas flow port is also provided on the outer wall of the first flow channel section to couple a high-pressure gas source into a flow relationship for this gas to intermittently flow into the inner annular volume. This high-pressure gas flow is used to clean the inner porous wall. Any particles that have been deposited on its inner surface (the flow channel bounded by the first flow channel segment). High-pressure gas • This paper is sized for China National Standard (CNS) A4 (210X297 mm). Binding (please read the precautions on the back before filling this page) 473803 A7 B7 V. Invention description (9 wide body can also use appropriate valves and control devices to give M controllable flow at the desired pressure. Second flow channel section I M is coupled in series to the first flow channel section, for the fluid containing particulate solids to flow down from the first flow channel section into the second flow channel section. The second flow channel includes an outer wall with a liquid injection port, May be coupled to a liquid source, such as water or other processing liquid. The outer wall is coupled to the first flow channel section, such as by mating flanges on the respective outer walls of the first and second flow channel sections. The second flow channel It includes an inner weir wall, which has an open relationship with the outer wall. M defines an inner annular volume therebetween, and the inner weir wall extends toward the inner porous wall of the first flow channel section, but stops at less than this inner porous wall. K provides a gap between these respective inner walls and the first and second flow channel sections to define an overflow weir. When liquid flows into the inner annular volume between the outer wall and the inner wall of the second flow channel section The guided liquid overflows through the weir and flows downward along the inner surface of the inner wall of the second flow channel section. The liquid flows down along the inner wall to wash away any particulate solids from the wall and suppress the A solid is deposited or formed on the inner wall surface of the inner wall. Printed by the Central Standards Bureau of the Ministry of Economic Affairs and Consumer Cooperatives (Please read the precautions on the back before filling out this page) The first and second flow channel sections can be flanged to each other. Including a quick release clip assembly, K adapts to each of the first and second flow channel sections of the easy-to-remove inlet device. Furthermore, the first flow channel section of the inlet device can be connected to a top inlet device to quickly separate the inlet Section, which can also be easily disassembled for cleaning and maintenance purposes. In yet another aspect, the present invention relates to a gas flow receiving structure that resists solid settling when a particulate-filled air stream containing hot and aggressive components flows through. Paper size applies to Chinese National Standard (CNS) A4 specification (210X 297 mm) -12-473803 A7 B7 V. Description of the invention (10) Volume, blockage and corrosion. More specifically, this product This aspect of the invention relates to a gas / liquid interface structure, which can be used to send a hot air stream containing particulate solids from an upstream source of the gas stream to a downstream processing unit. The gas / liquid interface structure includes: a first vertically extending inlet flow The channel member defines a first airflow flow path therein. The inlet flow channel member has an upper inlet for guiding the airflow to the airflow flow path, and a lower outlet end for the airflow flowing through the airflow flow path in the inlet flow channel member. Exhaust airflow; a second flow channel member is connected to the first flow channel member and is spaced outwardly therefrom, K defines an annular volume therebetween, and this second flow channel member extends downward to a first flow channel member The lower mouth opening end and the lower outlet end, the second flow channel member has an upper liquid-permeable portion and a lower liquid-impermeable portion defining the airflow flow path of the second flow channel member; Two flow channel members defining an enclosed inner annular volume and a liquid flow on the outer wall member Inlet for guiding the liquid into the enclosed inner annular volume between the outer wall member and the second flow channel member; Yin Fan, He Gong Consumer Cooperative, Central Standards Bureau, Ministry of Economic Affairs (please read the precautions on the back before filling this page) to pass through the outer wall The liquid guided by the liquid flow inlet on the member enters the enclosed inner annular volume and leaks through the liquid permeable portion above the second flow channel member for liquid imperviousness along the second flow channel member The inner surface of the portion flows downward, and M provides a downward flowing liquid film on this inner surface of the liquid-impermeable portion of the second flow channel member, and M resists deposition and accumulation of particulate solids thereon, and flows through the first flow The airflow of the channel member is discharged at its lower exit end for the flow through the second flow channel. The paper size is applicable to the Chinese National Standard (CNS) A4 specification (210X 297 mm) 13-473803 A7 B7 V. Description of the invention (π) Put huf 5¾ on the surface of the second surface of the mediator. The structure of the second part of the flow is connected to the contact body. The flow of the internal components of the borrow surface wall flows through the channel. The flow leaks on the surface, and the micro-resistance reaches the surface. The membrane section is thin, and the water flows down and down. The air part 0 ± the weir surface at the boundary. The membrane surface of the micro-wall of the grain surface is connected with the thin structure of the water channel to connect the middle stream and the second gas. The surface surface wall of the solid particles with the accumulation of bodily fluids is collected. The structure of the lower row-the surface of the junction surface mediator in the physical contact with the physical contact of the fluid and the gas barrier to protect the wall M film (please read the precautions on the back before filling this page) Ding Te Ι 1ΗΗ 1 species 1 is also vaporized from the monomer unit in the single-unit oxygen thermoelectricity, and the unit is washed under the water with the M and the solid body and solid particles. Micro-removal of its structural pores is more suitable as a part of body fluids that can be permeated and cleaned on the M channel to pass through the water to move through the flow. The second genus of gold scorch holes. As small as a big one Porcelain wall-to-wall micrometer porcelain is more pottery to have many holes or or, the plastic around the plastic fan and micrometer twilight said I detailed example is better to implement. Its path and the straight-line hole are made by the Central Standards Bureau of the Ministry of Economic Affairs, the Ministry of Economic Affairs, the Ministry of Economic Affairs, and the Industrial and Commercial Cooperatives. The photo is attached. According to Mingfa, this is based on one-I figure. The figure shows that this tube can be connected to the tube and coupled to the tube. The structure is connected to the port and connected to knc rc, and the connection can be used as a guide to L to source gas flow gas. The structure of the projection on the edge from the Q display is as good as the second one. It is suitable to have a K-shaped manufacturing cube. The training guide is half a source. This is the same as the trace, the heat of the group is here to prevent M flow. To the amount of energy. Enough to raise or increase the amount of condensed duct structure in the mouth. The paper size applies the Chinese National Standard (CNS) A4 specification (210X 297 mm) 14 473803 A7 B7 V. Description of the invention ( 1.2) The inlet structure 60 shown in FIG. 1 includes an inlet section 7 including an inlet flange 16. The inlet flange fits snugly with the flange 18 of the upper ring section 8, which terminates at this upper end. The inlet section may be coupled to an upstream particulate-containing solids and / or particulate-shaped solids flow generating facility 90, for example, as a semi-conductor manufacturing tool. The annular section 8 comprises an inner porous wall 6, which is an appropriate porosity that is breathable in character, and an outer solid wall 9 defining an annular inner volume 20 therebetween. The inner surface of the inner porous wall 6 thus defines a flow channel 66 in the upper annular section 8. The outer solid wall 9 is enclosed by K at its upper and lower ends with respect to the inner wall 6 by end walls 40 and 42, and M encloses the annular internal volume. The outer wall 9 is provided with a gas inlet 22, and a gas feed line 24 is connected to the gas population. The gas feed line 24 is connected at its outer end to a gas source 4. A non-return valve 14 is provided in the gas feed line '24, and M adapts the airflow into the annular internal volume 20. The feed line 24 may also be provided with other flow control devices (not shown) for selectively feeding gas to the inner and inner volumes of the ring 2 from the source 4 at a desired amount and at a desired flow rate during system operation. Within 0. It can include a device for heating gas feed line 24 to increase the ventilation. Printed by the Consumers Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs (please read the precautions on the back before filling this page). The means for heating the gas feed line 24 may include a resistance heater, a flow tracking line, a heating jacket, or any device known to those skilled in the art, and may be used to transfer thermal energy to any of the internal channels of the gas feed line 24 For other heating systems, M increases the temperature of the gas. For the purpose of illustration, the heating device used in the embodiment of Fig. 1 is constituted by a heating coil 23. A thermal jacket can also cooperate with the heating device to raise the internal temperature of the gas line 24. _The upper ring section 8 can also be equipped with an optional high-pressure gas injection port 50, and the paper size of the copy applies to the Chinese National Standard (CNS) A4 specification (21〇 × 297 mm). 1 15-473803 A7 B7 Central Standards Bureau M Industry Consumer Cooperatives Print 1i

V. Description of the invention (15) The gas flow in the gas flow channel 66 in the I I section 8 or in the lower ring section 30 is exhausted. In the illustrated spring embodiment, the tube 70 exits the airflow at a point about one-half of an inch below the upper end 46 of the weir wall. However, depending on the airflow, handling and use, please refer to II. The tube 70 may extend further below the upper end 46 of the weir wall, or may terminate above the read back III end 46 on the weir wall. Note II means I that the transfer tube 70 can be made of stainless steel with an inner diameter of about one-half to four inches, and then formed by gm. Those skilled in this art will recognize that the tube 70 can be made of various materials, various Filling-the size, various sections, and various configurations 0 co-ring flow type 9 caused by the placement of the transfer tube 70 relative to the porous wall sheet II 6 and the overflow weir II The transfer pipe and the entry point at 66 o'clock minimize the mixing of the processing gas and the water vapor from the g overflow weir II II, so that the process gas I exiting the transfer pipe 70 is ordered to form the water vapor from the white overflow weir 11 The solids response is significantly at a minimum of 9 II until there is sufficient downstream point for any II solids to cause the effect of the overflow weir II to be flushed into the downstream elimination device. I In order to determine the anti-clogging efficiency of a given inlet design within the scope of the present invention, 9-a suitable evaluation technique is the flow rate at tritrichlorosilane I -5 si P m II, the average flow rate at the nitrogen carrier gas, After a few minutes, monitor the solids accumulation and position of a particular I □ device to determine the design suitability and effects of any I □ device parameter changes. It may be desirable that M I I monitor the nature of solid growth during longer observation periods. Depending on the airflow, processing use, and conditions, its II may also be beneficial to maintain laminar axial airflow in the gas transfer tube and in the annular section between the outside of the gas transfer tube and the interior of the porous wall II. 9 M Ensure proper .. I | Cover the containment wall for discharge and inlet. The I I transfer tube 70 can also heat the M and reduce the condensed gas. Solid by Flow II This paper size applies Chinese National Standard (CNS) A4 specification (210X 297 mm)-18-473803 A7 B7 V. Description of the invention (if;) Formed on the wall of tube 70 by condensation of gas from the tube on. Suitable devices for the heating tube 70 may include resistance heaters, flow tracking lines, heating jackets, etc. This heating system is constructed and arranged to transfer thermal energy to the internal channels of the transfer tube 70, and K resists condensation. For illustrative purposes, the heating device is shown as including a heating coil 76. A thermal jacket can also cooperate with the heating device to increase the internal temperature of the transfer tube 70. A thermal jacket can be used to raise the temperature of the side wall, and M prevents the condensable processing gas from condensing in the tube. At its lower end, the lower annular section 30 can be properly joined to the casing of the water scrubber 13. The water scrubber can be constructed in a conventional manner for washing to remove particles and soluble components from the treatment stream. Alternatively, the inlet device 60 may be coupled to any other processing equipment for disposal or treatment of airflow through the inlet device from the inlet end to its discharge end. Therefore, by using the inlet device 60 to provide a gas flow path 66, the inflowing liquid gas can flow through it in the direction shown by the arrow "1" in Fig. 1 to the discharge end in the direction shown by the arrow "2" in FIG. Printed by the Central Industry Bureau of the Ministry of Economic Affairs, Consumers Cooperative (please read the precautions on the back before filling out this page). During operation, the gas containing particulate solids is borrowed from an upstream source such as a semiconductor manufacturing tool (not shown). The connection pipe is guided by K, which, as mentioned above, can be tracked by M, and K inhibits the harmful sublimation or condensation of airflow components at the inlet device. The flow enters the inlet device 60 in the direction of flow indicated by the arrow "1", passes through the inlet section 7 (or, if installed, through the transfer pipe 70) and enters the upper ring section 8. A gas, such as nitrogen, or other gas, flows from source 4 through a gas feed line 24 connected to port 22, and enters the annular internal volume 20. The guided gas flows from the annular internal volume 20 through the gas-permeable wall 6 and enters the internal gas flow passage 66. Contains particulates or particulate-forming gases, so the Chinese National Standard (CNS) A4 specifications (21 ×: 297 mm) are applied at the paper scale. 19 19473803 A7 _____B7 V. Description of the invention (m gas feed line 24 air flow in The ring-shaped internal volume 20 and the gas-permeable wall (3 o'clock, flow through the internal gas flow channel 66, and enter the water scrubber 13. In this way, the gas from the source 4 pressurizes the ring-shaped internal volume 20. This pressure guarantees The stable flow of gas passes through the porous wall and enters the internal gas flow channel 66. With this low flow rate, the stable flow of gas through the breathable wall keeps the particles in the air flow flowing through the internal gas flow channel 6 6 and leaves the inlet device Wall surface. Also, any gas that is present in the internal flow channel 66 with the gas flow also remains away from the inner wall surface of the inlet device. If desired, the gas feed line 24 can be K-tracked. If the air flow through the inlet device contains Condensed or sublimated materials deposited on the walls of the entrance structure may be expected to have such thermal tracking. Central Bureau of Standards, Ministry of Economic Affairs Printed by the industrial and consumer cooperatives (please read the precautions on the back before filling this page) At the same time, the high-pressure gas from the high-pressure gas supply source 5 can be periodically flowed through the high-pressure gas feed line 52 to the ring through the high-pressure gas injection port 50 Shape internal volume 20. For this purpose, a flow control valve (not shown) may be provided in line 52 to accommodate the pulsation guidance of high pressure gas. K In this way, high pressure gas is injected into the annular internal volume at prescribed or predetermined intervals,俾 rupture any particles accumulated on the inner surface of the breathable wall 6. The duration and time sequence of the pulsation-guided high-pressure gas can be easily determined within the skill K of this technique without undue experimentation, and M achieves the desired The wall scrub effect will prevent solids from accumulating on the breathable wall surface. If necessary, when the water scrubber used to service semiconductor manufacturing tools uses an inlet device, this high pressure injection can be interrupted during the batch cycle of the tool, with appropriate integration Operate the control device connected to the tool control system to eliminate pressure fluctuations at the tool exhaust. For this purpose, a control Valves, such as a solenoid valve, can be used with the device of the control tool assembly. The paper size is applicable to the Chinese National Standard (CNS) A4 specification (210 × 297 mm) '-2 0-473803 A7 B7 V. Description of the invention (18) When coupled. In the illustrated inlet device embodiment, the flanges 26 and 28 can be clamped to each other, K allows the upper ring section 8 to be quickly separated from the lower ring section 30. For this purpose, a Quick release clip. A gasket 10 can be formed between flanges 26 and 28 from a suitable material, such as a corrosion-resistant, high-temperature elastomer material. This elastomer gasket additionally functions as a thermal barrier, K makes the heat from the top ring The transition from the segment to the annular segment below the inlet device is minimal, a feature that is particularly important in the heat tracking embodiment of the present invention. The breathable wall 6 of the annular section above the inlet device may be formed of any suitable breathable material, such as ceramics, metals and metal alloys, and plastics. As a specific example, the wall may be formed from a Hastelloy 276 material. The outer wall 9 of the upper annular section may likewise be formed of any suitable material and may be, for example, a thin-walled stainless steel tube. Printed by the Central Bureau of Standards, Ministry of Economic Affairs, Consumer Cooperative, The annular section 30 under the entrance device may be formed of any suitable material such as a polyvinyl chloride plastic. From the water supply source 3, water is injected into the annular internal volume 32 between the outer wall 12 and the inner weir wall 11 through a line 50. Preferably, water is injected tangentially to K, and M allows the angular momentum of the water in the annular internal volume 32 to direct water to the top 46 of the weir wall 11, and the internal flow channel 66 of the inlet device along the inner weir wall. The surface spirals downward. This water flow down the inner surface of the weir wall 11 uses M to wash any particles down the flow channel 66 to the water scrubber 14 below the inlet device. As mentioned, for example, when the downstream processing unit is a combustion scrubber, the lower ring section 30 is an optional structural feature that can be omitted. From the upstream processing unit and the scrubber unit downstream of the inlet device, the pressure of the exhaust pipe is released, and the pressure drop through the inlet device can be easily determined by K. Pressure drop 21 21 (Please read the precautions on the back before filling this page) This paper size is applicable to the Chinese National Standard (CNS) A4 specification (210 × 297 mm) 473803 A7 B7 5. Description of the invention (lil) You can borrow a Phot An ohel ic meter or other appropriate pressure sensor is used to sense this pressure drop reading and can be sent to K to appropriate monitoring and control equipment to monitor for blockage at the scrubber inlet. With the inlet device according to the present invention, an interface can be provided between the water scrubber and the tool exhaust gas stream from the semiconductor manufacturing operation, which does not repeatedly block during normal processing operations. The inlet device of the present invention provides an interface with two auxiliary rib processing streams, a stable low-flow cleaning stream and a high-pressure pulsating stream. The low-flow purge flow causes a net flux of an inert gas such as nitrogen, leaving the inner surface of the upper annular section toward the centerline of the central flow channel 66. The high-pressure gas flow provides a self-cleaning capability for solid plugs. K for high-pressure gas flow eliminates any particles accumulated on the inner surface of the annular section on the inlet device of the central flow channel 66. Printed by the Central Standards Bureau of the Ministry of Economic Affairs, Consumer Cooperatives (please read the precautions on the back, and then fill out this page). Gas, entrained particles, and previously deposited particles are then a ring section below the inlet device, on the inner wall surface. Guided into the overflow, K flushes down into the water scrubber downstream of the inlet device. In this way, a direct interface between the breathable wall of the upper ring section and the weir wall of the ring section below the inlet device provides a highly efficient inlet shape that effectively makes the particulate solid Cumulative least. The inlet device of the present invention has several advantages. When applied to semiconductor manufacturing facilities, and water scrubber treatment systems for processing exhaust gas effluent from tools in semiconductor processing facilities, exhaust gas from semiconductor tools can be heated by K-linked, and it is self-draining at the inlet of the water scrubber. The air port goes all the way to the water interface. Heat tracing at the inlet pipeline can be used to conduct energy into the pipeline, thereby heating the pipeline, which transfers energy to the flowing gas stream by forced convection. The size of the paper is applicable to China National Standard (CNS) A4 (210X 297 mm) -22-473803 A7 B7 V. Description of the invention (20) (Please read the precautions on the back before filling this page) The heat-tracking gas flow line that makes the gas flow to the upper annular section, κ and the heat-tracking high-pressure gas flow line that feeds pulsating high-pressure gas to the annular volume in the annular section above the population device are heated by κ, all the way down To the overflow weir wall of the annular section below the inlet device. This flow of heated gas will keep the process gas flowing through the central flow channel of the inlet device at a temperature determined by the vapor pressure of any particulate-forming gas in the gas stream flowing from the upstream processing unit to the inlet device, otherwise Will condense or sublimate and deposit on the wall of the inlet device. Another advantage of the inlet device of the present invention is that the structure can be easily disassembled. In the event that the inlet device is blocked during operation, the structure can be easily separated as long as the clips or other fixing elements that hold the flanges of the inlet device to each other are removed. The upper ring section can therefore be removed by removing the clamps that hold the respective flanges in place and separate the individual gas feed lines feeding the upper ring section for replacement. Another advantage of the inlet device of the present invention is that it is self-cleaning in characteristics. The particles entrained in the air flow flowing from the upstream processing unit to the inlet device, or formed by chemical reactions in the inlet device, can easily be looped above the inlet structure and injected into the pulsating high pressure in the inner annular volume. The printed body of the Central Standards Bureau of the Ministry of Gas Economy-Industrial and Consumer Cooperatives is cleaned from the ventilating wall of the entrance device. The particulates removed from the inner wall surface of the annular section on the inlet device are then directed to the overflow portion of the weir wall where the particulate solids are washed to the downstream scrubber. The duration and period of the high-pressure gas pressure pulsation can be easily set to K, and M adapts to the prevailing system particle concentration and the characteristics of these solids. The effectiveness of pulsating high-pressure gas injection will depend on the characteristics of the particulate solid. The entrance structure of the present invention is therefore self-cleaning in nature, and does not use the fluid representing the previous art. The paper size applies the Chinese National Standard (CNS) A4 specification (210X 297 mm) -23-473803 A7 B7 V. Description of the invention (21 ) Scraper or plunger device of the so-called self-cleaning device of the processing system. The material specifications of the porous wall element in the annular section on the inlet device depend on the incoming process gas from the upstream processing unit. If the gas stream contains acidic components, these gases will be absorbed in the water scrubber and will be present in the water circulating in the annular section below the inlet structure to the overflow weir wall. Some weir wall water may splash on the porous inner wall of the annular section on the inlet device. The porous wall in this case is preferably selected from corrosion-resistant construction materials. A preferred metal material for this purpose is Hastelloy 276 steel, which exhibits excellent corrosion resistance under low temperature hydrated acid conditions. Another advantage of the inlet device of the present invention is that it minimizes the backflow of steam from the top of the water scrubber into the treatment pipe when the inlet device is used upstream of the water scrubber as demonstrated in this case. In order to explain this advantage, please be aware that particulates may be present in the exhaust gas flow of some semiconductor tools, such as entrained particles from a processing tool, or chemical reactants such as in the flow path M of a gas stream. The present invention minimizes or eliminates the Richards on ring effect described previously. The gas is printed on the inner surface of the circular section of the inlet device by the porous wall of the Central Standards Bureau of the Ministry of Economic Affairs, Industrial and Commercial Cooperatives (please read the precautions on the back before filling this page). Stable outflow in the upper circular section On wall surfaces, static boundary layer conditions cannot be generated. The net flux of the flowing gas comes from the gas-permeable wall, and its function “pushes” the process gas away from the wall of the central flow channel of the boundary inlet device, and avoids the existence of static boundary conditions, and avoids the Richardson ring effect. Therefore, if particles are formed due to a chemical reaction in a flowing stream, the particles thus formed cannot find a wall to agglomerate thereon. The particles will instead flow into the water scrubber with the airflow. The same is true of entrained particles. Once the particles reach the top of the inlet, the paper size applies the Chinese National Standard (CNS) A4 (210X297 mm) 1 2 4 1 473803 A7 B7 V. The description of the invention (22) will become entrained in the gas flow, because It will not have walls κ collected on it. In response to the situation where R i c h a r d s ο η annular effect is generated, the porous wall on the annular section of the population structure of the present invention utilizes K as an effective barrier layer for the exhaust gas pipeline that the steam is transferred back to the treatment system. Any backward transfer will be very slow due to the interdiffusion mechanism described above. This factor will greatly increase the average time of scrubber failure. Because of the inlet device of the present invention, the scrubber inlet and the exhaust gas line will not often be blocked. When the transfer pipe 70 is used, a loop-shaped gas shield is formed by the action of the gas flowing through the porous wall 6, thereby minimizing or eliminating the backflow of steam. Although the porous wall member of the annular section above the inlet device of the present invention has been described in this case as being composed of M metal materials, please be aware that the breathable wall may be formed of any suitable construction material. For example, the porous wall can be a porous ceramic, plastic (such as porous polyethylene, polypropylene, polytetrafluoroethylene, etc.), or can withstand the aggressive atmosphere and temperature extremes that may exist when using the inlet device of the present invention , And other materials formed by input pressure. Printed by the Central Standards Bureau of the Ministry of Economic Affairs and Consumer Cooperatives ^ (Please read the notes on the back before filling out this page) Although the present invention has been illustrated in the embodiment illustrated in Figure 1 as including the individual upper and lower rings Like sections, which are coupled to each other by, for example, flanges and associated quick release clips or other interconnecting devices, but please be aware that this entry device may be formed or formed as may be desired or necessary in the intended end use application of the present invention. As a unitary or integrated structure, the lower ring segment is optional to the upper ring segment, and may be unnecessary in some cases. _ 琨 Please refer to FIG. 2, which shows another embodiment of an anti-blocking entrance device. The size of this paper applies the Chinese National Standard (CNS) A4 (210X 297 mm) -25-473800 A7 B7 V. Description of the invention (23) The mouth 100 can be replaced by a tapered side edge 105 and covered by a solid outer wall 110 External. The outer surface of the transfer tube 1 1 2 and the inner surface of the tapered side edge 105 define an annular gas flow channel 1 15 therebetween. Conical side edge M—an inert gas and / or liquid surrounding a gas stream containing particulate solids and / or forming solids. The inert gas enters the inlet device through the feed line 120. The tapered side edges that open downward and outward have a progressively reduced cross-sectional area, which results in an increase in the speed of the inert gas and a decrease in pressure. The tapered side edge 105 is designed to produce an inert gas at a speed equal to the speed of the gas flow discharged from the transfer pipe 112. The matching of the flow speed between the gas flow and the inert gas is favorable for co-layered flow, K prevents disturbances in the gas flow, and prevents the interface between the two flows from mixing. The efficiency of the inlet is therefore enhanced by minimizing the accumulation of particulate solids during operation. Opening the tapered side edges downwards and outwards may also use K to guide liquid into the inlet structure. The outer wall 110 and the lower end (periphery of the bottom) of the tapered side edge are in a laterally spaced relationship with each other, and K defines a liquid flow channel 135 therebetween. The spray nozzles 1 2 5 can be spaced apart from one another around the inside of the inlet to disperse the liquid. The tapered side edges direct liquid to the wall surface 130. If the liquid is, for example, water, a thin film of water will be formed on the wall surface 130, and M will wash the particulate solids to the downstream scrubber of the Central Standards Bureau of the Ministry of Economic Affairs, the Consumer Cooperatives of India. (Please read the precautions on the back before filling in this Page). The material specifications of the tapered side edges depend on the inert gas and gas flow flowing through the transfer tube 112. If the gas stream contains acidic components, these gases will be present in the water circulating to the spray nozzles 1 2 5. The tapered side edge should in this case be made of a corrosion resistant material. As discussed with reference to the embodiment of Figure 1, the transfer tube, inert gas, and / or water may be heated by K to reduce condensation. FIG. 3 illustrates another embodiment of an anti-clogging inlet device 200. The outer solid wall 205 and the porous inner wall 210 define an annular internal volume therebetween. Extending the air This paper size applies the Chinese National Standard (CNS) A4 specification (210X 297 mm) ~ 2 6 473803 A7 B7 V. Description of the invention (24) The flow delivery pipe 212 can be used to guide K at the specific desired position of the inlet device. Airflow of particulate solids and / or particulate shaped solids. The transfer tube 212 is coupled to K in a gas flow receiving relationship with an upstream source, and directs and discharges the gas flow to an appropriate position in the inlet device. The inner surface of the inner porous wall 210 faces the outer surface of the transfer tube 212. The outer wall 205 is enclosed at its upper end by an end cap 2 1 5. The outer wall is provided with a water inlet 225 which can be connected to a water supply source. The end cap 215 is provided with a gas inlet 230, which guides the inert gas of the cover axially into the inlet device. The end cap 215 may instead include a porous diffuser structure, and K is dispersed axially into the inlet device. A gas chamber or tank may optionally contain an inert gas, such as nitrogen, for introduction into the inlet. In this embodiment, water is squeezed through the porous inner wall 210, K forms a thin liquid film, and K rinses the particles through the inlet device. The porous wall 210 can be formed of any suitable material, such as ceramic, metal, metal alloy, or a plastic such as polyvinyl chloride. As discussed above, the transfer tube, inert gas, and / or water may be heated by K to reduce or eliminate condensation. Printed by the Central Bureau of Standards of the Ministry of Industry and Labor Cooperatives (please read the precautions on the back before filling out this page) As another alternative embodiment of the specific structure shown in Figure 3, you can refer to the type shown in Figure 1 An overflow weir replaces the porous inner wall 2 1 0. The weir wall can be constructed, for example, as having an upper end, which is spaced apart from the upper end cover 2 1 5, and a gap defining an overflow weir is formed therebetween. FIG. 4 shows another embodiment of an anti-blocking inlet device 100. The upper annular section 305 includes an upper inner porous wall 310 and an outer upper solid wall 315 defining an upper annular inner chamber 3 2 0 therebetween. The extended airflow transfer tube 3 2 2 is circumscribed by the upper porous wall 3 1 0 and is shown coaxially with the porous wall 3 1 0. Outside the gas transfer tube, the paper size applies the Chinese National Standard (CNS) A4 specification (210 × 297 mm) -27-473803 A7 B7 V. Description of the invention (25) The inner surface of the surface and the upper porous wall define a ring shape in between Volume. The transfer tube 3 2 2 is coupled to a gas flow receiving relationship with an upstream gas source. The upper solid wall 315 includes an inlet 325, which directs an appropriate fluid into the upper inner chamber 320. The lower annular section 3 30 includes a lower inner porous wall 3 3 5 and an outer lower solid wall 3 40, and an annular inner chamber 345 is defined therebetween. The lower solid wall includes an inlet 350 to direct fluid into the lower chamber 345. In operation, the inlet structure of Fig. 4 allows inert gas to pass through the upper porous wall 310 and water to squeeze through the lower porous wall 335. The flow of the inert gas keeps the particles in the air stream away from the inner wall surface of the inlet device. A thin water film on the inner surface of the lower inner porous wall 335 removes any particles from the inlet device. Printed by the Central Standards Bureau of the Ministry of Economic Affairs of the Military Industry Cooperatives (please read the precautions on the back before filling out this page) Figure 4 shows the transfer pipe 322 above a transition site 355, between the upper section 305 and the lower section 330 The air flow is discharged. The transition portion 3 5 5 may be a portion that adjoins the upper annular section 305 and the lower annular section 330 in an abutting manner. The transition portion 355 may also include a portion separating the upper section 305 and the lower section 3 30 from the external gas delivery pipe 3 2 2. Please understand that the transfer tube can instead extend below the transition site 3 5.5 and enter the lower section. Regardless of whether the transfer pipe 322 discharges airflow in the upper section, discharges in the transition area, or discharges in the lower section, it will depend on the airflow, processing use, and conditions. As discussed above, the transfer tube, inert gas, and / or water may be heated by K to reduce or eliminate condensation. FIG. 5 is a schematic cross-sectional front view of a gas / liquid interface structure 4 1 0 according to an embodiment of the present invention. The gas / liquid interface structure 410 includes a first vertically extending inlet flow channel member 4 1 2 delimited by a cylindrical elongated wall 414. The cylindrical wall 4 1 4 is externally connected to an enclosed flow passage 418 inside the inlet flow passage member 412. Applicable to Chinese paper standard (CNS) A4 specification (210 × 297 mm) on this paper scale -28-473803 A7 B7 V. Description of the invention (26) Cylindrical wall 4 1 4 The upper end is provided with a flange extending radially outward 4 16. For joining gas / liquid interface structures to associated processing flow pipes, conduits, meters, etc. The first inlet flow channel member 412 therefore has an inlet 420 at its upper end and a corresponding outlet 4 2 2 at its lower end, so the internal volume of the open inlet and outlet end K defines a flow path including the flow channel 4 1 8 from an upstream The gas of the processing unit 58 may flow through it, as illustrated in the case of line 460 in FIG. 5. The length of the first inlet flow channel member 4 1 2 may be significantly shorter than that exemplified in FIG. 1, and the end of the outlet 422 of this flow channel member may terminate within the structure of the annular volume 430, just below the top wall 438. Alternatively, the end of the outlet 42 2 of the flow channel member may terminate at a lower vertical point within the second flow channel member 424 than illustrated in FIG. 1. The vertical downward degree of the first inlet flow channel member 412 can therefore be changed during the implementation of the present invention, and the specific length and size of the special stimulus can be easily determined without undue experimentation in order to choose a method of using the inlet device of the present invention. The specific application achieves the shape and configuration of the desired operating characteristics. Printed by the Central Standards Bureau of the Ministry of Economic Affairs and Consumer Cooperatives (please read the notes on the back before filling this page). The upstream processing unit 45 8 may, for example, include a semiconductor manufacturing tool and an associated exhaust gas processing device. The effluent treatment apparatus may include an oxidizer for oxidizing oxidizable components in the exhaust gas. Suitable oxidizers are of widely different types, and may be constituted, for example, by a thermal oxidation unit, an electrothermal oxidizer, and the like. The upstream processing unit 45 8 includes a gas generating device and a gas processing device for semiconductor manufacturing operations, and is guided to the first inlet flow channel member 4 1 2 The size of this paper is applicable to China National Standard (CNS) Α4 specification (210X 297 mm) -29-473803 A7 B7 V. Description of the invention (27) The airflow at port 42 0 may be at an elevated temperature and may contain actual concentrations, such as particulate solids in the form of sub-micron size particulates. The interface structure 410 further includes a second flow channel member 24, which is external to the first flow channel member 4 1 2 and, as shown in the figure, is in an open relationship with it, and K defines an annular volume 43 0 therebetween. The second flow passage member 424 extends downward to a lower end 468 below the lower end of the first flow passage member 412, so that the opening outlet 42 of the first flow passage member is perpendicular to the lower end 68 of the second flow passage 424. Open relationship. As discussed, the position of the outlet 422 of the first flow channel member can be widely changed vertically in the broad implementation of the present invention. The second flow channel member 424 includes an upper liquid-permeable portion 426 and a remaining liquid-impermeable portion 428, which extends from the liquid-permeable portion 426 as shown in the figure. The upper liquid-permeable portion 426 and the lower liquid-impermeable portion 428 can be formed in any suitable manner, such as by joining an upper porous cylindrical section 426 to a solid wall cylindrical section 42 8 which is initially separate and solid. The individual parts are joined to each other by brazing, welding, welding, mechanical fastener fixing, or any other suitable means by appropriate joining devices and methods. Alternatively, the second flow channel member 424 may be formed from a unitary cylindrical tubular structure printed by the Central Standards Bureau of the Ministry of Economic Affairs, Shellfish Consumer Cooperatives (please read the precautions on the back before filling this page), such as water jet cutting, Etching, sintering, micro-electro-machining, or any other suitable technique that allows the porosity or gas permeability characteristics to be passed to the upper portion of this tubular member by making the upper portion liquid-permeable in character. Preferably, the second flow channel member K is formed initially as a separate upper and lower part, which is joined together, and wherein the upper part is borrowed from a porous sintered metal material, a porous plastic material, a porous ceramic material, or It is composed of other porous materials, where the porosity is a sufficient size characteristic. As explained in more detail below, the paper size applies the Chinese National Standard (CNS) A4 specification (210X 297 mm). 30-473803 A7 B7 V. Description of the invention (IV) ) Instructions that allow liquid to pass through. The gas / liquid interface structure 410 further includes an outer wall member 434. The encapsulating type is externally connected to the second flow channel member and defines an encapsulating inner annular volume 47 0 therewith. The outer wall member 43 4 includes a cylindrical side wall 436, a top wall 43 8 and a bottom end wall 440, which collectively enclose the inner annular volume 470. The side wall 436 is provided with a liquid guide opening 442. The mouth may be provided in any suitable manner, but in the illustrated embodiment, it is constituted by a tubular mouth extension 444. Alternatively, the port may be only an opening or opening in the side wall or other liquid inlet device, so that liquid can be introduced into the inner annular volume 470 from an external liquid supply source. In the embodiment of circle 5, the liquid inlet 442 is coupled to a liquid guide line 446 containing a flow control valve 448 therein. The liquid inlet line 446 is connected to the liquid supply storage tank 450. Printed by the Shell Standard Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs (please read the precautions on the back before filling out this page). Figure 6 is a top plan view of the device shown in Figure 5, showing the tangential feed configuration for liquid transfer to Figure 6. The enveloping inner annular volume 470 of the interface structure shown. Figure 6 shows that the tubular mouth extension 444 is arranged to intersect tangentially and engages the cylindrical side wall of the outer wall member. The liquid guided in this way is wound around the porous cylindrical section (the upper portion 426 that is permeable to the liquid) and is evenly distributed around the periphery, so the liquid film produced by the leakage through the porous cylindrical section is correspondingly uniform around the periphery. Μ As explained more fully below, the cover inner wall surface 47 2. The liquid flow control valve 448 at line 446 may be coupled to a suitable controller / timer device, including a central processing unit (CPU), microprocessor, flow control panel, and / or auxiliary rib monitoring and control device, K A predetermined or otherwise selected liquid flow is provided from storage tank 450 through line 446 to liquid inlet 442. The liquid thus guided fills the inner annular volume of 47 0, and the liquid can be used in accordance with the Chinese National Standard (CNS) A4 specification (210X 297 mm) at this paper size 34 473803 A7 B7 V. Description of the invention (29) In any appropriate The processing conditions are guided by μ. To fill the particulate discharge air for processing gas streams, such as heat from semiconductor manufacturing operations, the liquid in the inner annular volume 470 may be water or other aqueous media. Due to the liquid-permeable property of the liquid-permeable portion 426 above the second flow channel member 424, the liquid from the inner annular volume 470 penetrates the upper portion 426 of the second flow channel member and is shown on the inner wall surface 432 of this upper portion as Liquid droplets 454 The discharged liquid droplets fall and coalesce with other liquid droplets due to the effect of gravity, and gather on the inner wall surface 472 of the liquid-impermeable portion under the second flow channel member, forming a downward flowing liquid Film 456. The liquid in the liquid film discharged from the open end 468 below the second flow channel member can be guided to an appropriate collection and processing device (not shown), for example, for co-processing in a downstream processing unit 464, and the gas flow in the pipeline The gas flow channel 452 from the second flow channel member in 46 2 flows to this processing unit. The downstream processing unit 464 may be a water scrubber, a reaction chamber, or other processing devices or processing areas. The gas flow from the channel 452 at line 462 undergoes further processing operations, and the final exhaust gas is discharged from the downstream processing unit at line 466. . Printed by the Central Standards Bureau of the Ministry of Economic Affairs, M Industrial Consumer Cooperative (please read the notes on the back before filling this page). The gas / liquid interface structure 410 is therefore constructed between the first and second flow channel members, and the second flow channel member. The upper liquid-permeable portion 42 6 provides an inner annular volume 430 so that the liquid leaking through the liquid-permeable upper portion can coalesce and create a falling liquid film 45 6. With this configuration, the gas flowing from the flow channel 4 18 to the flow channel 45 2 encounters the inner wall surface 472 of the lower portion of the second flow channel member, and its K-protective liquid film 456 covers it. Therefore, any paper size in the gas discharged from the open end 42 2 below the first flow channel member is applicable to the Chinese National Standard (CNS) A4 specification (21〇 × 297 mm) -32-473803 A7 B7 V. Explanation of the invention (30) Any aggressive substance will be "buffered" with respect to the inner wall surface, and M will minimize corrosion and adverse reaction effects on this inner wall surface of the second flow channel member. Moreover, the liquid is guided to the inner annular volume 470 between the second flow channel member and the outer wall member 434, and a liquid storage tank "outer cover" structure is provided. The liquid is supplied to the porous upper part M of the second flow channel member for transmission, and the liquid "leaks" downward, and M forms a protective film on the inner wall surface of the second flow channel member. This falling film on the inner surface 47 2 of the second flow channel member also entrains and transports any particles from the airflow with M. Without this liquid film, it may deposit and collect on the inner wall surface of the second flow channel member . Therefore, the falling liquid film provides a protective cutting energy to the inner wall surface of the second flow channel member, and provides an entrained medium that transports the solid particles and any other gas phase components away, otherwise it accumulates in the flow The inner wall surface of the channel member will be harmful. As another advantage of this structure illustrated in FIG. 5, the use of an upper liquid-permeable portion 426 is used to provide a structure such as a liquid overflow weir, in which the liquid from the inner annular volume 470 will only overflow Flowing through the upper end of the wall 426, printed by the Central Bureau of Standards, Ministry of Economic Affairs, the Military and Industrial Consumer Cooperatives (please read the precautions on the back before filling in this page) Flowing down while minimizing liquid use. The leakage weir structure of the present invention keeps the liquid required for operation at a very low level. Another advantage of the leakage weir structure of the present invention over the simple liquid overflow weir structure is that the latter needs to be accurately aligned with the vertical so that the overflow weir can work efficiently if designed, and the leakage weir structure can withstand Deviation from normal (vertical) orientation without losing or compromising operational design efficiency. This paper size applies to Chinese National Standard (CNS) Λ4 specification (210X297 mm) -33-473803 A7 B7

V. Description of the invention (3U In other words, the leakage weir structure of the present invention is characterized by decoupling the weir water addition rate and the structural level, κ and the minimum wetting rate from the liquid-permeable weir wall (since Establish and maintain the limit of liquid inventory for the start of liquid discharge from the overflow weir, as is the case with conventional overflow structures.) As an illustrative example of the gas / liquid interface structure of the type illustrated in Figure 5, it can be processed in This structure is used downstream of the thermal oxidizer unit of the exhaust gas of the semiconductor manufacturing operation, so the airflow entering the interface structure 4 in line 460 is at an elevated temperature and is filled with particles such as silicon dioxide, particulate metals, and the like For example, submicron-sized particles or even larger solids, K, and aggressive solids. In this embodiment, the upper portion 426 of the second flow channel member may have a thickness of about 1/1 6 inches and an average pore size of about 2 microns. It is made of sintered metal wall. The length of the first flow channel member 4.12 may be about 448 inches and a diameter of about 2.5. The corresponding second flow channel member 42 4 may have When the length is about 13.5, there is a diameter of about 4.5 inches. The outer wall member 434 can have a vertical length of about 5, 5 and a diameter of about 6 inches. Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs ^ (Please read the back Please fill in this page again.) In this system, water can be used as the liquid medium from the storage tank 450, which is introduced into the inner annular volume 470 for leakage of this liquid to the second flow channel member. The inner surface 432 of the liquid-permeable portion 1 426. The system can be operated with water at about 0.1-0.3 gallons per minute in this system. Industrial applicability can be matched with downstream processing units such as air scrubbers, purifiers, filtration Device, neutralization unit, extraction system for the components of the recovery stream, and a reaction system for processing gas relative to the composition obtained in the upstream trajectory, etc., adopting the Chinese paper standard (CNS) Α4 specification (in accordance with the present paper standard) 210X 297 mm) -34-473803 A7 B7 V. Description of the invention (32) Closed occluded sinker granular structure M Pre-installed If you do not do it, and the film is thin, it will be clear. It is said that Xiaoyao's simplest effect is to attach it to the device. The installation of the figure □ The example of human plugging prevention replaces the plaintext basis *, I is the figure 2? The illustration of the example of installing P plugging prevention instead of a plaintext basis 1 ♦, the diagram shown in Figure 3 is shown as an example of the installation of □ plugging and blocking prevention. It is a practical replacement of 1 and the figure shown in the figure according to the root figure is set as the structured surface mediator fluid / B Mafl The practical evidence of the rty of Qi shows that it is based on the flat view on the side of the distribution of the inward tangent < 111 kinds of pictures. The ring diagram is shown in the figure of the envelope with the seal inside. Figure 6 shows the illustration of the figure to the body fluid supply display ------ Γ--install-(Please read the back first Note: Please fill in this page again.) I% The paper size printed by the Employees' Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs applies to the Chinese National Standards (CNS) A4 specification (210X 297 mm) -35- 473800 A7 i ^ ^ 11 R7 — / ----- i V. Description of the invention (35) 5 ο 2 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 3 3 3 Liquid-proof and multi-gas end Water and gas prevent up and down, up and down, and down and down Inlet the first round channel pipe is inserted into the wall wall flow plug body transfer body plugging hole flow cover structure chamber mouth wall wall tube inlet area hole body delivery port plug multi-solid Inside the ring, in the upper wall of the block, in the wall wall, in the chamber, in the hole, in the body, and in the ring. Applicable to China National Standard (CNS) A4 (210 X 297 mm) 38 Correction page (Please read the notes on the back before filling Page) 473800 A7B7 V. Description of the invention (36) Printed by the Intellectual Property Bureau of the Ministry of Economic Affairs, Consumer Cooperative, 416 Radially outward flange 418 Encapsulated flow channel 420 Inlet 422 Pair I7ftf P 424 Second flow channel 426 Liquid-permeable part 428 Other liquid-impermeable part 430 Inner annular volume 432 Inner wall surface 434 Outer wall member 436 Cylindrical side wall 438 Top wall 440 Bottom end wall 442 Liquid guide P 444 Tubular mouth extension 446 Liquid guide line 448 Flow Control valve 450 Liquid supply tank 452 Gas flow channel 454 Liquid droplet 456 Downward liquid film 458 Upstream processing unit 460 Line 462 Line (please read the precautions on the back before filling this page) -------- Order · 』--- Twilight-This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) -39-Correction page 473803

A7: AJ V. Description of the invention (37) 464 Downstream processing unit 466 Pipeline 468 Lower end 470 Inner annular volume 472 Cover inner wall surface (Please read the precautions on the back before filling this page) 1 -------- Order --- Γ Printed by the Employees' Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs of China The paper size is applicable to the Chinese National Standard (CNS) A4 (210 X 297 mm) One 40-Revised Page

Claims (1)

Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs 473803 A8 B8 C8 D8 々, patent application scope 1. An inlet device for air flow from an upstream source to a downstream track, the inlet device is selected from the population device (A) and (B) The inlet device of the group: (A) —The inlet device includes: a gas-permeable wall enclosing a gas flow path, and an outer annular jacket surrounding the gas-permeable wall, K defining a ring-shaped gas storage in between Trough; and a device for flowing gas into the gas through the inlet device when the air stream containing particulate solids and / or formed solids pressures enough to cause gas to penetrate the breathable wall to resist solid deposition or form on the inner surface of the breathable wall When processing the system, the gas is introduced into the annular gas storage tank; K and (B)-the inlet device includes: a first vertically extending inlet flow channel member, an upper inlet for guiding the airflow and a lower end for discharging the airflow; The two flow passage members are connected to the first flow passage member and are in an open relationship with each other. K defines an annular volume therebetween, and the second flow passage member faces Extending to a lower end below the lower end of the first flow channel member, and the second flow channel member has an upper liquid-permeable portion and a liquid-impermeable portion below the upper liquid-permeable portion; an outer wall member Encapsulated externally connects the second flow channel member and defines an enclosed inner annular volume with it; M and a liquid flow inlet on the outer wall member for introducing liquid between the second flow channel member and the outer wall member Sealed toroidal volume. 2. —A kind of anti-blocking inlet device for guiding the airflow processing system containing particulate solids and / or formed solids. The inlet device includes: This paper size is applicable to China National Standard (CNS) Α4 specification (210 × 297 mm) (Please read first Note on the back, please fill in this page again.) Packing. Order 473803 A8 B8 C8 D8 VI. Patent application scope Packet wall air-permeable wall can be air-permeable and accessible Path fluid air tank storage gas-shaped ring 1 The boundary between the Connect the outer ring and outer K of the outer shell. Foot pressure is formed on the body of the flowing gas, or it can be penetrated. It can be formed or accumulated in the body. When inducting, the system 311 manages the body gas 1 and inserts it into the moving port. Zhi p J term \ Slot 2 Ift®, surrounded by 1¾ Qi Fantong, the special time ring is specially invited to-please introduce the inner body such as the qi 3 wall containing P1 to guide the source through the body. The pressure M is high, and the coupling and the coupling port are placed in the grooves of the device, and the storage tank is stored in a ring shape to pass to the ring. The pressure of the i 33 body pulse gas source is high from the δ Μ pulse for introduction and use as a plug. To block encircling anti-fan coupling tJ4 49. The benefits of ΜΛ · and the special external application, please also apply the external application such as the shape of the wall 4. The surrounding air and the surrounding wall gas can be included, the middle section of the area The items placed in the road under the current flow are closed by the outer wall of the mantle wall, and the permeable fluid can be cut into a mouth and cut, and the grooves of the wall and the section store one section of the body and the other is the path of the fluid. The radial flow of the radial flow and the fixed flow of the lower boundary body, the cut of the air port should be a pair of M, and the shape outside the enclosure is determined as the high β under the high degree of motion.者 The liquid on the union tank is in the second ring, and now, because of the point, it must be the first (please read the precautions on the back before filling (This page) The Central Government Bureau of the Ministry of Economic Affairs, the Consumer Cooperative Co-operative printed film, thin film, liquid quality, and the barrier to falling off the wall. One of them is to mention one side and the second one. This film is at 1S $, and the product is solid. Fan Duan or the profit zone special path Shen Shen Lu Ran applied to remove the wall inside the surface according to the 5 swimming wash. The item in the first installation P has a set outside the outer ring. □ one. Into the body, solid coupling, coupled with He Qi's tone end 1 of the installation of the person P of the item 2 of the range of Fan Li 〇 Special sources please apply for the body 6 liquid This paper size applies Chinese National Standard (CNS) A4 Specifications (210X297 mm) 2 473803 A8 B8 C8 D8 Patent application scope 33 Fluid gas forming tools and manufacturing guides are coupled to the path flow protection 3¾ Path fluid gas is installed in the path Q Item 6 Fan Li special request * If the path 0 is a dynamic shut-off flow, the flow of gas in the gas is complete, and the unit is a single-unit scrubbing water.装 装 □ 入 的 项 6 器 ^ ^ Wash the cover into the shape of burning. ί Xiang Ran 2Γ ring set and the outer cover are surrounded by the mouth and fit into the tube, and the coupling is sent to the MV. The stream is sent to the request-the flow-end application of the second air as a whole. The micro-movement mouth of the grain contains the flow into the donor to supply it to the body.-Wu Zhi "Item 9 will be included in the supply and the package is placed in the mouth. Slightly contained through-pass 33 flow resistance, tube solidification, solidified condensation, tube flow, gas transmission, solid gas item. Fan Li special please string such as a package, install the grain port, and insert it into the transmission port. The gas item entering the wall through the outer mouth can be transmitted through the gas supply device, including the package and the other device. □ Place the mouthpiece person 11 to Xiangliudiqi body body fan Gu Li shape special request or apply / D and $ body 12 solid (please read the precautions on the back before filling this page) Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs, and / or the body ’s solid particles contain excessive flow resistance, which is the section of the wall gas that will transfer the gas and solid that will be transferred to the tube. The area in the middle of the road—the flow of water flows down to form solid particles in the flow of air. It contains the tube to be sent and installed. Item 11 1-I. Section Fanli special please call if you put uhr on the lower end of the surface. The installation □ item of the person 2 Fan Li specially invited Φ If the wall contains heat and gas, it can be installed through the osmosis of the supply device. Donor body solid particles are micro-formed or the size of this paper is applicable to Chinese National Standard (CNS) A4 specification (210X297 mm) 3 473803 A8 B8 C8 D8 6. The scope of patent application includes package structure □ Into this section ΓΠ The system arrangement of the flow system is located in the vertical body, causing a large body to a second-rate body and a solid body, which are connected to each other. The solid-granular coupling is slightly closed in the channel-containing flow. The close-coupled series can be composed of fluid and solid particles which flow through the body flow; the package system is 1n ^ jw. The flow of the upper body in the receiving zone constitutes the structure. After a single reason, move to the source of the flow, and then visit the upper wall LT xi 1, s, and the ring of the volume is connected to a moving fixed flow boundary. The surface is in Table M. Wall J is transparent. The rate of inflow of the inner body into the air circulation around the through-enclosed type can be closed, and the section of the speed wall moving out can be used to prescribe M through the whole body to provide one. Installation □ After entering the inflow accumulation volume ring, the autogenous gas will be supplied with 9 # »Jidao Rongtongshan S, the flow passage in the body section of the whole body, the solid flow section of the flow zone, and the second passage in the second lane. Should move Zone Road Activating Flow V-1 'to the coupling coupling flow injection two body liquid into the first level has a lower middle to its section 丨 Zone Road mobilization includes outside the envelope (please read the precautions on the back before filling this page) Inner and outer shots and the coupling section are open, and the current flow is first connected to the outer section of the wall. 33 The second flow is in the ring. It is located in the K series of gates, and it faces the center of the weir outside the wall. The Bureau of Consumer Standards of the Bureau of the Standards printed inside the wall of the directional wall and the surface of the wall at the limit interface is penetrated. There may be a wall between the wall and the weir that should not accumulate and extend a wall. At the beginning of the flow, the volume of liquid volume was in the shape of the flow, and the ring was stopped from the inside and merged with the winter. The star penetrated 1¾ [0 动 ί 面 浐 流 流? ' Nei Ningqi, Yanhe, and the "bilateral wall" and other sections of the channel through the weir, the overflow overflow is is the fluid guide particle dispersion ΔΛν 3Μ3 He Liuren except the structure I junction wall entrance into 39 li >微 The micro-internal sections of the solid wall in the surface of the surface flowing down to the air surface are merged in the area, s Η sw «This paper size applies to the Chinese National Standard (CNS) A4 specification (210X297 mm) 4 473800 A8 B8 C8 D8 Patent application The air pressure in the range is high. Including 0. The other 0, fixed into the shape of the mouth or into the sinking surface 15 of the inner wall of the Fanbiliyan, please apply in the section outside the wall when applying for D 帋 女 帋 6 I ΊΧ Zone Daotong «source gas is the highest pressure at one mouth to the dynamic confluence couple can be clean and clean 33 streams K _, high air pressure into the volumetric ring into the fluid gas calendar high particle supply micro-permeability on the upper wall can be formed or accumulated Shen K Yuyuan Gas 1 its installation □ entry item 5 Ί Ｍ 内 fan Li Zhuan Φ As the first to the last, please ask Jia Ru Yuan air pressure a higher ο Zhongkou Qi I I above the wall section of the air II ΓΕ No. E3, F Road, Fentongtong J *, the item of flow installation P (please read the precautions on the back before filling this page)-installation. The first to the close family M, please Φ Rutong. The second part of the moving fluid body has the highest pressure, and the section outside the upper wall is installed in the passageway. The entry 5 is cleaned and supplied through the passage. The body of the carcass water-washed by the flow device is solid to the grain-shaped emblem, and the flow section containing the M-shaped end of the channel is connected to the road structure. Li Zhuan please Φ flow a first. Zhonghe's fast opening speed can be K to the section of the Datong District, 33 to the second installation Q entry 5 11 No. Fan Li, please string as 1 2 No. 1 and No. 1 Fantong Specially requested Φ If the wall is breathable, you can allow the alignment tx, the same axis, this is the same as that of the section of the road through 33 flow installation □ entry, 1T ▼ line Ministry of Economic Affairs Central Standard Bureau employee consumer cooperatives printed and shaped The affiliated Jinkongduo--I *-»species 1 is air-permeable to the wall, but can be installed in the item 5 1S. Fan Li specially asks for a variety of ceramic pottery holes, such as the molding department. The air permeability can be installed in the item 5 1 ± No. Fan Li specially asked Jia Rusu for 11 sets of special holes. Please give me a look. Ring into g, plane, r, glue, JI, round-wall, air-permeable, the items in which it can be installed, the paper size is applicable to Chinese National Standard (CNS) A4 size (210 X 297 mm) 5 473803 A8 B8 C8 D8 The scope of the patent application is the second one in the installation of the item Q 1 of the installation. Fan Li specially requested to apply for the installation of the section inside the weir and the wall outside the wall. The item 5 is the first. Wei Fanli specifically requested Shen Ruliu No.1. With the following instructions, you can make a guided tour of the manufactured body from 1 to the joint. You can install it in the section of the road. The entry item 5 1S. Fan Li specially asks if the wall in the table on the side of LT Xi is breathable. The first one is sent by the tube, and the other is sent by the tube package. The flow of the gas is vertical and the flow is vertical. The flow of the gas is piped into the tube. The gas is sent to the tube and the internal channel source passes out of the kF 0 stream. The body is solidly formed into grains. Fan Li specially please install the item (please read the precautions on the back before filling out this page). Install the first gas rET 0 in the body of the tube hh ¾S flow gas Solid shape-granules containing the internal flow of the internal flow out of the installation □ Item 8 2 Wai Fan Li Zhuan Ψ If you send out the exhaust gas, the body will be solid, forming the granules will contain Weir overflow between the subsurface gaps is delimited in the installation of the pipe. □ Entry 8 2 No. Fan Li special please string as in the pipe. Send and discharge the gas in the stream, the body solid forms micro particles, and the weir between the gaps on the surface overflows the delimitation package. The other line is the shape supply or fs / body solid particle micro installation with mouth. The 15th flow of anti-impact and anti-paradigm of the project is specifically requested to be printed by the employee ’s cooperative of the Central Standards Bureau of the Ministry of Economic Affairs, printed by the condensate of the tube, and the gas-solid permeation of the fluid flowing through the tube. 3 The y installation ^ P 范 々 入* 钟 帛 * i S 21 · The installation includes the introduction of the LO, and the supply item W 5 sets the heating addition body to form an additional installation package or / and the solid section micro-segment wall hole. Enclose the knot, and there should be so many holes in the mouth wall. The lower part of the rational section of the lower part of the body will flow all the way down to the wall flow hole body gas and one gas body. An inherent body flow cover 1 There are more holes in the wall 1 Each size of this paper applies the Chinese National Standard (CNS) A4 (210X297 mm) 6 473803 A8 B8 C8 D8 6. Application for patent scope 35. If you apply for the entry device for scope item 34, additional package Streaming stretch the tube being external to the porous wall, for discharging the particle-containing gas stream in the upper section of the forming solids. 36. The inlet device according to item 34 of the scope of patent application, further comprising an airflow transfer tube surrounded by the upper porous wall for exhausting the airflow containing the formed solids in the lower section. 37. If applied, please apply for the inlet device of item 34 of the patent scope, which additionally includes a transition part between the upper section and the lower section, and an airflow transmission pipe which discharges the contents of the transition section. Airflow of particulate solids and / or shaped solids. 38. The inlet device according to item 34 of the patent application, further comprising an axially arranged porous structure, and M guides fluid into the inlet device. 3 9. A gas / liquid interface structure for sending airflow from its upstream source to a downstream processing unit. The gas / liquid interface structure includes: a first vertically extending inlet flow channel member having an upper inlet for guiding the airflow And the lower end for discharging the airflow; printed by the Consumer Cooperatives of the Central Bureau of Standards of the Ministry of Economic Affairs (please read the precautions on the back before filling out this page). A second flow channel member is connected to the first flow channel member and interposed therebetween. Open a relationship to define an annular volume therebetween, the second flow channel member extends downward to a lower end below the lower end of the first flow channel member, and the second flow channel member has an upper liquid-permeable portion and a lower portion The liquid-permeable portion is below the upper liquid-permeable portion; an outer wall member enclosing the second flow channel member and defining an enclosed inner annular volume therewith; K and a liquid flow inlet on the outer wall member For guiding the liquid into the enveloping / inner annular volume between the second flow channel member and the outer wall member. This paper size applies Chinese National Standard (CNS) A4 specification (210X297 mm) — 7-473803 Printed by the Consumers 'Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs A8 B8 C8' D8 VI. Patent Application Scope 40. Such as patent application scope item 39 The gas / liquid interface structure, wherein the liquid permeable portion on the second flow channel member includes a porous cylindrical wall member. 41. The gas / liquid interface structure according to item 40 of the application, wherein the porous cylindrical wall member is made of a material selected from the group consisting of sintered metal materials, porous ceramic materials, and porous plastic materials. form. 42. As claimed, the gas / liquid interface structure of item 40 of the patent application, wherein the liquid permeable portion on the second flow channel member is formed of a porous sintered metal material. 43. The gas / liquid interface structure according to item 40 of the patent application, wherein the liquid-permeable portion is composed of a porous wall with an average pore size in the range of about 0.5 to 30 metric meters. 44. The gas / liquid interface structure of claim 39, wherein the first and second flow channel members are each cylindrical in nature and coaxial with each other. 45. For example, the gas / liquid interface structure of the scope of application for the patent No. 39, wherein the outer wall member of the encapsulating external flow channel member includes a cylindrical side wall, and the second flow channel member is radially spaced apart, and a top portion An end wall, a first liquid flow channel member extending through the wall, and a bottom end wall between the second flow channel member and the side wall of the outer wall member. 46. For example, the gas / liquid interface structure of claim 39, wherein the outer wall member is provided with a liquid flow inlet K for guiding liquid into the inner annular volume of the envelope between the second flow channel member and the outer wall member. And arranged for the tangential feed liquid to enter the inner annular volume of the envelope, to flow around the second (please read the precautions on the back before filling this page) • Binding and binding _ The size of this paper applies Chinese national standards (CNS ) A4 specification (210X297 mm) 8 473803 Printed by the Consumer Cooperatives of the Central Bureau of Standards of the Ministry of Economic Affairs A8 B8 C8 D8 VI. Patent application scope The liquid guided by the periphery of the liquid-permeable part above the channel member. 47. The gas / liquid interface structure according to item 39 of the scope of the patent application is structured and arranged so that the liquid velocity of the overflow weir is disconnected from the level of the structure. 48. The gas / liquid interface structure according to item 39 of the scope of patent application is constructed and arranged so that the liquid rate of the overflow weir is decoupled from the minimum wetting rate. 49. A gas / liquid interface structure for supplying air from its upstream source to a downstream processing unit, comprising first and second flow channel members defining an annular volume therebetween, and a second flow channel member extending downward to a A height lower than the lower end of the first flow channel member, and an outer wall member enclosing the second flow channel member and defining an enclosed inner annular volume therewith, and a liquid flow port on the outer wall member for guiding liquid into The enclosed inner annular volume, wherein the second flow channel member includes an upper liquid-permeable portion in fluid communication with the enclosed inner annular volume so that liquid from this volume can leak through the permeable portion, and A falling liquid film is formed on the inner surface portion of the second flow channel member as a protective liquid interface for the second flow channel member. 50. The gas / liquid interface structure of claim 49, wherein the liquid-permeable portion of the second flow channel member includes a porous cylindrical wall member. 51. The gas / liquid interface structure of claim 50, wherein the porous cylindrical wall member is M—a material selected from the group consisting of a sintered metal material, a porous ceramic material, and a porous plastic material. . 52. For example, the gas / liquid interface structure in the scope of application for patent No. 50, in which the liquid permeable portion on the second flow channel member is a porous sintering (please read the precautions on the back before filling this page) ·,? Τ ▼ The paper size of this paper is applicable to Chinese National Standard (CNS) A4 specification (210 × 297 mm) 9 473803 Employees' cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs printed A8 B8 C8 D8. 6. Formed by patent applications for metal materials. 53. The gas / liquid interface structure of claim 50, wherein the liquid-permeable portion is formed by a porous wall having an average pore size in the range of about 0.5 to 30 microns. 54. The gas / liquid interface structure of claim 49, wherein the first and second flow passage members are each cylindrical in nature and coaxial with each other. _ 55. If the gas / liquid interface structure of the 49th scope of the patent application, wherein the outer wall member of the encapsulating external flow channel member includes a cylindrical side wall, the second flow channel member is radially spaced apart, A top end wall, a first liquid flow channel member extending through the wall, and a bottom end wall between the second flow channel member and the side wall of the outer wall member. 56. For example, the gas / liquid interface structure of the 49th area of the patent application, wherein the liquid flow inlet on the outer wall member for guiding liquid into the enclosed inner annular volume between the second flow channel member and the outer wall member is constituted by M and It is arranged for the tangentially fed liquid to enter the inner annular volume of the envelope, and the guided liquid is distributed around the periphery of the liquid-permeable portion above the second flow channel member. 57. For example, the gas / liquid interface structure of the 49th scope of the application for the patent is constructed and arranged so that the liquid rate of the overflow weir is disconnected from the level of the structure and the minimum wetting rate. 58, —A system for processing semiconductor manufacturing exhaust gas, including: a semiconductor manufacturing unit that generates exhaust gas stream; an oxidation unit for oxidation processing exhaust gas stream; This paper size applies to Chinese National Standard (CNS) A4 specifications ( 210X297 mm) _ ί Λ-(Please read the precautions on the back before filling in this page)-Binding and ordering ▼ Line 473803 A8 B8 C8 D8 The scope of application for patents is used for oxygenation 0 flowing gas out of LUI 0 The junctional mediator fluid / body gas should be guided for P: Including the upper package and a structure, the passageway of the facial mediator fluid flows through the elementary element, and the vertical flow is straight. The layout of the component supply channel is 勖 1 rA first-class, and the second system flow is closed. The component is opened to the road and connected to the 'moving flow channel 2' Μ Ζ the 33. There is a certain boundary between the outer ring of the ring and the liquid, which is not transparent. If you do n’t touch the next surface, the next part is B-end body fluid. You can pass the upper part to move a part of the body. Structure On the Dok 1 pass, go to-move the extension to the second part to build the path to the body to connect the second packet (please read the precautions on the back before filling this page) -pack_ Π Inflow; volume-shaped fluid-like pieces of ring structure outside the inner wall of the envelope are enclosed in a package with a certain flow boundary, and the first and second are merged in, and the conductor fluid will supply gas out of the kF structured surface volume mesenchymal ring fluid / The inner wall of the inner package and the outer wall of the structure are connected to the structure, and the M custom gas is received from the HU to the Central Consumers Bureau of the Ministry of Economic Affairs, printed by the employee consumer cooperative. The paper size applies to Chinese national standards (CNS ) A4 size (210X 297mm) 1—I 11