TW471704U - Ion source structure - Google Patents
Ion source structureInfo
- Publication number
- TW471704U TW471704U TW90211162U TW90211162U TW471704U TW 471704 U TW471704 U TW 471704U TW 90211162 U TW90211162 U TW 90211162U TW 90211162 U TW90211162 U TW 90211162U TW 471704 U TW471704 U TW 471704U
- Authority
- TW
- Taiwan
- Prior art keywords
- ion source
- source structure
- ion
- source
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW90211162U TW471704U (en) | 2000-05-22 | 2000-05-22 | Ion source structure |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW90211162U TW471704U (en) | 2000-05-22 | 2000-05-22 | Ion source structure |
Publications (1)
Publication Number | Publication Date |
---|---|
TW471704U true TW471704U (en) | 2002-01-01 |
Family
ID=21684988
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW90211162U TW471704U (en) | 2000-05-22 | 2000-05-22 | Ion source structure |
Country Status (1)
Country | Link |
---|---|
TW (1) | TW471704U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8281738B2 (en) | 2005-03-22 | 2012-10-09 | Applied Materials, Inc. | Cathode and counter-cathode arrangement in an ion source |
-
2000
- 2000-05-22 TW TW90211162U patent/TW471704U/en not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8281738B2 (en) | 2005-03-22 | 2012-10-09 | Applied Materials, Inc. | Cathode and counter-cathode arrangement in an ion source |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
GD4K | Issue of patent certificate for granted utility model filed before june 30, 2004 | ||
MK4K | Expiration of patent term of a granted utility model |