TW471704U - Ion source structure - Google Patents

Ion source structure

Info

Publication number
TW471704U
TW471704U TW90211162U TW90211162U TW471704U TW 471704 U TW471704 U TW 471704U TW 90211162 U TW90211162 U TW 90211162U TW 90211162 U TW90211162 U TW 90211162U TW 471704 U TW471704 U TW 471704U
Authority
TW
Taiwan
Prior art keywords
ion source
source structure
ion
source
Prior art date
Application number
TW90211162U
Other languages
Chinese (zh)
Inventor
Ming-Chung Chen
Yun-Chin Kuo
Original Assignee
Taiwan Semiconductor Mfg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taiwan Semiconductor Mfg filed Critical Taiwan Semiconductor Mfg
Priority to TW90211162U priority Critical patent/TW471704U/en
Publication of TW471704U publication Critical patent/TW471704U/en

Links

TW90211162U 2000-05-22 2000-05-22 Ion source structure TW471704U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW90211162U TW471704U (en) 2000-05-22 2000-05-22 Ion source structure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW90211162U TW471704U (en) 2000-05-22 2000-05-22 Ion source structure

Publications (1)

Publication Number Publication Date
TW471704U true TW471704U (en) 2002-01-01

Family

ID=21684988

Family Applications (1)

Application Number Title Priority Date Filing Date
TW90211162U TW471704U (en) 2000-05-22 2000-05-22 Ion source structure

Country Status (1)

Country Link
TW (1) TW471704U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8281738B2 (en) 2005-03-22 2012-10-09 Applied Materials, Inc. Cathode and counter-cathode arrangement in an ion source

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8281738B2 (en) 2005-03-22 2012-10-09 Applied Materials, Inc. Cathode and counter-cathode arrangement in an ion source

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Legal Events

Date Code Title Description
GD4K Issue of patent certificate for granted utility model filed before june 30, 2004
MK4K Expiration of patent term of a granted utility model