TW462926B - Bubble jet print head with bubble driven elastic membrane - Google Patents

Abstract

Provided is a bubble jet print head with bubble driven elastic membrane including an dielectic layer base, a heating layer, a cooling layer, a bubble head board and an elastic membrane. The heating layer is formed on the dielectic layer base and has a resistance to transfer electricity energy to thermal energy. The cooling layer is formed on the heating layer and has insulation and heat conduction. The bubble head board is formed on the top of the cooling layer and has a bubble head. It forms the working liquid room in the area of the top of the resistance corresponding to the cooling layer that is filled with working liquid. It forms the ink room in the bubble head board that is filled with inks. The elastic membrane forms between the cooling layer and the bubble head board for departing the working liquid room and the ink room which includes a polymer adhesive layer formed on the cooling layer, a shelter metal layer formed on the polymer adhesive layer and a protection layer formed on the shelter metal layer.

Description

4 62 92 t V. Description of the invention (1) Especially about-aerospore drive [Field of the invention] The present invention relates to an inkjet print head with an elastic film. [Description of Conventional Technology] Figure 1 is a schematic diagram of a conventional bubble-driven inkjet print head. Considering Figure 1, a conventional bubble-driven inkjet print head includes: 2. A reference heating layer 2 'is formed on the substrate 1 and has a resistance 3; a dielectric substrate 1; is formed on the substrate 1; a nozzle plate 5 is formed on the dielectric layer 4, the layer 4 1 is formed with a nozzle 6, and a The ink chamber 7 is formed in the dielectric layer 4 between the heating layer 2 and the nozzle plate 5 in the middle, and is filled with ink therebetween, and the gamma water channel 8 communicates with an external ink cartridge. For example, when a voltage pulse is applied to the resistor 3, the resistor 3 will vaporize the ink near the resistor 3, and bubbles will be generated in the ink chamber 7, so that the bubbles will increase the pressure in the ink chamber 7 *, The ink erupts from the spray. Later, when the voltage pulse disappears, the bubble will disappear. The voltage pulse 'through the control input resistor 3 can be repeatedly fed into this, the action of water. Dingpin outlet: I Γ The shortcomings of the bubble-driven inkjet print head is 1; heating the ink to vaporize it's necessary to choose a special product with stable and stable bi-level conductivity and low chemical activity. Ingredients for inks with lower 1s: a considerable impact on the resistance

Large components will cause damage to the resistance, making the resistance "also reduced ..." due to the generation and disappearance of bubbles and ink 2 J

III. Page 4 4 62;: 5. Description of the invention (2) Relevant ’Therefore, after resistance heating the ink, it is necessary to & In addition to the tb, the ink can: t quickly dissipate heat to the outside of the nozzle plate, thereby reducing the print quality month. Residue after ejection U.S. Patent No. 4,480,259 discloses a bubble-jet inkjet print head. Referring to FIG. 2 'The inkjet print head includes a, Ij film 11; a heating layer 12, which is formed on a substrate 丨 丨, has an' electricity \ ΐ3 ', an elastic film 1 4 which is formed on the heating element 1 2 On the other hand, a working liquid chamber 15 is formed between the π 丄 seat and the heating element 12 to fill the working liquid; a dielectric layer 16 is formed on the elastic film 14 and an ink chamber 17 is formed in the middle; a flat plate 18 ′ is formed on the dielectric layer 16 with a nozzle 19 formed in the middle. When a voltage pulse is applied to the resistor 13, the resistor 13 generates a “pump”, and the working liquid near the resistance 13 is vaporized, and in the working liquid chamber 15 Air bubbles are generated. The pressure in the working liquid chamber 15 is increased due to the generation of air bubbles, which causes the elastic film 14 to deform outwardly, thereby transmitting a pressure wave to the ink in the ink chamber 17 and ejecting the ink from the nozzle 19. When the voltage pulse disappears, the 'bubble will disappear. In this way, the ink can be ejected repeatedly by controlling the voltage pulse of the input resistance. The main characteristics of the conventional bubble-driven elastic film inkjet print head are:疋 不The ink is directly heated, but a selected working liquid is heated, so that traditional inks and working liquids that do not cause damage to the resistance can be used. However, the invention does not solve other problems, including the problem of heat dissipation, and ink The problem is that it remains on the outside of the nozzle plate. In addition, the working fluids are connected to each other through the channels to form a sealed working fluid channel system. 'When the working fluid in a working fluid chamber generates air bubbles,

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V. Description of the invention (3) Because the working fluid and other working body materials are not strong enough to have a liquid-free chamber, the pressure is high and the gas withstands high-frequency compressibility. The inkjet action pressure wave has ink action. This has no impermeability energy that can be transmitted to the outside, and the film is transparent, and its [Invention Summary] print head: its elastic film, which exudes a kind of bubble-driven elastic film that is psychedelic and capable of withstanding high thermal vaporization. Frequency of inkjet action 'Another night body of the present invention is impermeable. Ink-jet print head, which has $ ′ is a kind of bubble-driven elastic film to improve print quality. The good heat dissipation effect can speed up the working frequency and another invention proposes a bubble-driven elastic film that will not remain on the inkjet print head-inkjet printhead, whose ink injection side, measures To improve print quality.喑 ^ !! The other purpose is to propose a complex of bubble-driven elastic film =, when printing, the pressure wave of the working liquid chamber will not be transmitted to "it is connected to the working liquid chamber, thereby improving printing Quality, will not cause wrong printing action due to the transmission of pressure wave of working fluid. In order to achieve the above purpose, the bubble-driven printing of the present invention: head-dielectric layer substrate:-heating layer, with resistance at the bottom to transfer electrical energy Transformed into thermal energy; a heat dissipation layer is formed on the mouth heat layer; a working fluid chamber is located in the heat dissipation layer, corresponding to the area above the resistor, and the interior is filled with the working fluid:-nozzle plate, formed on

Page 6 4 62 V. Description of the invention (4) The top of the heat-dissipating layer “has a nozzle and contacts the outside-ink chamber” is formed in the nozzle plate, 1 :: evening: surface; the surface around the water chamber is the nozzle plate, the charging There is i water, the ink is formed between the heat radiation layer and the nozzle plate, and the film is 4 to. When a voltage pulse is applied to the resistance of the heating layer, = bubbles are generated. Due to the production of air bubbles: The elastic film produced in the working liquid chamber deforms outwards, so that it is larger. / ± β. ^, Which leads to the force wave to the ink in the ink chamber. *. ^ / 齓 Controlled input resistance The voltage pulse can repeatedly inject and eject ink. q, according to the embodiment of the invention of J, the elasticity is thin enough to withstand high-frequency outfitting, and the liquid has impermeability = inking action ', and it has a good solid state for high-temperature vaporization. The heat sink around the liquid chamber has a fast working frequency and improves print quality. According to the embodiment of the present invention, the inner surface of the "state" spray plate is full. The flat surface of the nozzle has good thirstability, and two: = no "wettability. For example, the ink does not remain after spraying; it is outside the mouth of the ink P meter to improve printing quality. Value: According to the embodiment of the invention, the working liquid has good liquid resistance: when the working liquid The dust force wave of the chamber will not be transmitted to the working fluid chamber which is connected by the dagger, which will cause erroneous printing action. 4 62; V. Description of the invention ¢ 5) Brief description of the drawing Figure 1 is a schematic diagram showing the conventional Bubble-driven inkjet print head. Ink-print drive drive drive drive drive structure 0 Figure 2 is a schematic meter head. Figure 3 is a schematic inkjet elastic film Figure 4 is a schematic elastic film inkjet Figure 5 is An inkjet of a schematic elastic film Fig. 6 is an inkjet of a schematic elastic film Fig. 7 is not intended-an inkjet of an elastic film, showing a conventional bubble-driven ejection of an elastic film, showing a bubble according to a preferred embodiment of the present invention The print head shows the structure of the heat dissipation layer in the bubble print head according to the preferred embodiment of the present invention. The print head shows the structure of the nozzle plate in the bubble print head according to the preferred embodiment of the present invention. The structure of the elastic film in the bubble print head according to the preferred embodiment of the present invention, shows the structure of the working liquid channel system in the bubble print head according to the preferred embodiment of the present invention. Symbol description 1 ~ substrate 2 ~ heating layer 3 ~ resistance 4 ~ dielectric layer 5 ~ nozzle plate

Page 8 4 62 92 6 V. Description of the invention (6) 6 ~ Nozzle 7 ~ Ink chamber 8 ~ Ink channel 11 ~ Base 1 2 ~ Heating element 1 3 ~ Resistor 1 4 ~ Elastic film 1 5 ~ Working liquid chamber 1 6 ~ Dielectric layer 1 7 ~ Ink chamber 1 8 ~ Nozzle plate 1 9 ~ Nozzle 2 1 ~ Base 2 2 ~ Heating layer 2 3 ~ Resistor 24 ~ Heat dissipation layer 2 4 1 ~ Polycrystalline silicon dielectric layer 2 4 2 ~ Road layer 243 ~ Brass layer 244 ~ Chrome layer 2 4 5 ~ Polycrystalline silicon dielectric layer 2 5 ~ Working fluid chamber

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2 8 ~ Ink chamber 2 9 · 'Elastic film 291 ~ Polymer adhesive layer 2 92 ~ Barrier metal layer 2 9 3 -Protective layer 30 ~ Working liquid channel 31 ~ Ink channel [Detailed description of the drawing] The following will refer to related The rule of illustration is as follows: The inkjet print head of the bubble-driven elastic diaphragm according to the preferred embodiment of the present invention will be described with a description. ec is private: I intend to show an inkjet print head unit of a bubble-driven elastic diaphragm according to a preferred embodiment of the present invention, which includes: a dielectric layer substrate 21, a heating layer 22, formed in the dielectric The electrical layer substrate 21 is provided with a resistor 23 to convert electric energy into thermal energy. A heat dissipation layer 24 is formed on the heat layer 22. A working liquid chamber 25 is located in the heat dissipation layer 24 and corresponds to a region above the resistor 23. Filled with working liquid; a nozzle plate 26 is formed above the heat dissipation layer 24, and has a nozzle 27, and the surface contacting the outside is an external surface; an ink chamber 28 is formed in the nozzle plate 26, and the inside is filled with ink, ink The surface around the chamber 28 is the inner surface of the nozzle plate 26; and an elastic film 29 is formed between the heat dissipation layer 24 and the nozzle plate 26 to separate the working liquid chamber 25 and the ink chamber 28. When a voltage pulse is applied to the resistance 23, the resistance 23 will generate heat, so that the working liquid near the resistance 23 is instantly vaporized in a few microseconds, and it is working.

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Bubbles of the working liquid are generated in the liquid chamber 25. Due to the generation of air bubbles, increasing the pressure in the liquid chamber 25 'causes the elastic film 29 to deform outwardly, so that a pressure wave is transmitted to the ink in the ink chamber 28, so that the ink is ejected from it. Afterwards, when the voltage pulse disappears, the bubble will disappear. Such as

Through the voltage pulse of the control input resistor 23, the operation of spraying mist or mist can be repeatedly performed. The I heating layer 22 may be made of a conductive material such as aluminum, and may have a thickness of about 1, 5 to 2 m '. Its function is to apply a voltage pulse to the resistor 23. The resistor 23 may be made of polycrystalline silicon, having a thickness of about 0.6 microns, and a resistance value of about 25 to 35 ohms. Each working liquid chamber 25 has a working liquid channel 30, which is in communication with the working liquid chamber 25 of the other printhead Zhuo Yuan. In this way, the working liquid chamber and working liquid channel of each print head unit form a closed working Liquid channel system. The working liquid should be stable at high temperatures and have appropriate physical properties to maintain the normal operation of the inkjet head. For example, in this embodiment, the working liquid is still stable at 300 to 350 degrees Celsius, Does not decompose or change its chemical structure, and has a resistance value greater than 108 ohms; when subjected to a voltage below 21 volts, the working liquid should not dissociate; the boiling point of the working liquid should be Celsius under normal pressure. 0 to 150 degrees, and 250 to 350 degrees under saturation pressure. From the above, the working liquid can be a mixed liquid. One of the mixed liquids has a boiling point of 90 to 110 degrees Celsius and a high saturated vapor pressure, and the other has a higher boiling point and has good thermal conductivity. In summary, the working liquid can be selected from xylene, xylene, heptane, ethylene glycol and ethanol.

4 6292 6 V. Description of the invention (9) Each ink chamber 28 has an ink passage 31 which communicates with an external ink container 'to supply ink to the ink chamber 2 8. FIG. 4 is a schematic diagram showing the structure of the heat dissipation layer 24. The heat dissipation layer 24 may be composed of various metals, such as' in this embodiment, 'a polycrystalline silicon dielectric layer 241, a chromium layer 242, a brass layer 243,', a complex layer 244, and a polycrystalline silicon dielectric layer 245, of which chromium layer 242 ^ has the role of adhesion, chromium layer 244 has both the role of adhesion and protection. The total thickness of the metal layers 242, 243, and 244 should be more than one-half of the total thickness of the heat-dissipating layer 24, that is, more than one-half of the height of the working liquid chamber 25, in order to achieve a good heat-dissipating effect and improve inkjet Work efficiency. Fig. 5 is a schematic diagram showing the structure of the nozzle plate 26, which has two layers on the outer surface and a wetting layer on the inner surface so that the ink does not remain on the outside of the inkjet print head after the ink is ejected, thereby improving the printing quality. For example, in this embodiment, the flat plate 26 may be composed of a recording. Cover the inner surface of the nozzle plate 26 'U' and the peripheral area of i28 'with a layer of Π θ with a thickness of about 2 to 3 micrometers: plus m to the ink. The wet layer can be covered by the outer surface of polyimide 26. -Layer thickness of about 2 to 3 micro: r: λ 'to increase moisture resistance to ink' The moisture-resistant layer may be composed of polytetrafluoroethylene. The compound Γ is shown as a layer H, meaning that it shows the structure of the elastic film 29, which includes a poly-double-entry point mold 9, a barrier metal layer 292 ′, and a protective layer 2 93. The 91 and the protective layer 293 may be made of polyimide for adhering the elastic film 29 in the ink jet shell, and a barrier metal layer 292 for protecting the same. The barrier metal layer may be composed of chromium, which is strong enough to withstand high

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The frequency of inkjet operation can block the gaseous working liquid from penetrating through the elastic film 29. Fig. 7 is a schematic diagram showing the connection relationship between the inkjet printer body chamber 25 and the working fluid channel 30 gate early working fluid κ, and the heart. The working liquid chamber 25 of each inkjet print head soap το and the working pannel · sondan working and body channels 30 are connected to each other to form a sealed working liquid channel. ^ ^ The liquid resistance value Rr of the working liquid channel can be obtained by the following formula:

R ^ xJTb + K where = 1 is the length of the working liquid channel 30 'h is the height of the working liquid channel 30 carrying surface, b is the width of the working liquid channel 30 section, and κ is a coefficient, which depends on the working liquid channel 30 The number of bends and the degree of bending. If the number of f-curves of the working liquid channel 30 is larger, the κ value is larger, and 7 is a-coefficient, whose unit is length, and it depends on the viscosity of the working liquid and the heating of the working liquid. The wettability of the layer 22 can be obtained by the following formula: where is the viscosity of the working fluid, and V is the flow velocity of the working fluid. 'B and h are the same as above' are the width and the degree of cross section of the working fluid channel 30. If the working liquid channel 3 is designed according to the properties of the working liquid, so that the liquid resistance value Rr of the working liquid in the working liquid channel 30 is greater than 2, the working liquid chamber 25 of an inkjet print head is caused by the vaporization of the working liquid. Generated pressure

Page 〖3 46292 6 + * · ·-V. Description of the invention (11) The wave will not pass through the working liquid chamber 25 of the sealed work head, so, however, in the bending situation of the liquid passage 30 through the invention ， The flow velocity and viscosity of the working liquid are set between 0.001 and 〇1, the effect. Therefore, it is recommended to design the working fluid numerically. The foregoing descriptions are preferred by way of example and not limitation. Equivalent changes and modifications should be implemented. The liquid channel system is passed to the adjacent inkjet print to avoid erroneous printing. In the experiments made by the inventors, if the coefficient K is set to about 6 according to the work, and the coefficient 7 is set according to the working liquid channel 30, the geometric shape of the body channel 30 which can avoid erroneous printing actions can be more ensured according to the above embodiment. . However, the above content should only be included within the scope of the patent application which does not exceed the spirit of the present invention.

Claims (1)

46292 6 ~ A kind of bubble-driven elastic film nozzle ink contains: a print head unit, which includes a dielectric layer substrate; a heating layer formed on the dielectric layer substrate, and the electric energy is converted into thermal energy, and has a resistance to dissipate heat The layer 'is formed on the heating layer; the middle' corresponds to above and above the resistor, and has a nozzle, and the working fluid chamber is located in the area of the heat dissipation layer 'and is filled with the working fluid inside; a nozzle plate is formed on the heat dissipation The surface where the layer contacts the outside is the outer surface; an ink chamber is formed in the nozzle plate, and the inside is filled with ink =, the surface around the water chamber is the inner surface of the nozzle plate; and an elastic film is formed in the The heat-dissipating layer and the nozzle plate are used to separate the working liquid chamber and the ink chamber, and the elastic sheet includes a polymer adhesive layer formed on the heat-dissipating layer and a barrier formed on the polymer adhesive layer. A metal layer, and a protective layer formed on the barrier metal layer. 2 'The inkjet print head unit of the bubble-driven elastic film according to item 1 of the scope of the patent application, wherein: the dielectric layer substrate includes a stone substrate ^ 3, according to the bubble-driven elastic film of item 1 of the scope of patent application An inkjet print head unit, wherein: the heating layer comprises aluminum. 4. The inkjet print head unit of the bubble-driven elastic film according to item 1 of the scope of patent application, where: Page 15 4 6292 6 6. Scope of patent application This resistor contains polycrystalline silicon. 5. The inkjet print head unit of the bubble-driven elastic film according to item 1 of the patent application scope, wherein: the heat dissipation layer comprises a polycrystalline silicon layer, a metal layer and a polycrystalline silicon layer in order. 6. The inkjet print head unit of the bubble-driven elastic film according to item 5 of the scope of the patent application, wherein: the metal layer comprises a chrome layer, a brass layer, and an inscription layer in order. 7. The inkjet print head unit of the bubble-driven elastic film according to item 5 of the patent application scope, wherein: the thickness of the metal layer is greater than half of the height of the working liquid chamber. 8. The inkjet print head unit of the bubble-driven elastic film according to item 1 of the scope of patent application, wherein: the working liquid contains at least one selected from the group consisting of xylene, toluene, heptane, ethylene glycol and ethanol substance. 9. The inkjet print head unit of the bubble-driven elastic film according to item 1 of the patent application scope, wherein: the nozzle plate includes nickel. 10. The inkjet print head unit of the bubble-driven elastic film according to item 1 of the scope of patent application, further comprising:-a wetting layer formed on the inner surface of the nozzle plate, so that the ink is on the inner surface of the nozzle plate It has good wettability; and-a moisture-resistant layer is formed on the outer surface of the nozzle plate, so that the ink has poor wettability to the outer surface of the nozzle plate. Page 16 Ink heads should be wet 12. Ink heads should be resistant 13. Ink heads should be gathered 14. Ink heads should be screen 15. Ink heads should be guaranteed 16. Several on-demand head units —In the bubble flooding process, the application unit, the wet-layer application unit, the wet-layer application unit, the compound adhesion application unit, the barrier metal application unit, and the protective cover Liquid dynamic elasticity is the strongest bubble driving force in the 10th area of the liquid patent. Among them: The dynamic elasticity of the 4 臈 spray contains a polyimide layer. :: Spraying of bubble-driven elastic film in the range of item 10 ^ T *, containing a Teflon layer. The spray layer of the bubble-driven elastic film of item 1 in the g range includes a polyimide layer. The spray layer of the bubble-driven elastic film of the K range item 1 includes a chromium layer. The spray of the bubble-driven elastic film of the K range item 1 contains a polyimide layer. Inkjet printing range of bubble-driven elastic film No. 1: ® »# ^ Inkjet printing channel system including the bubble-driven elastic thin film enveloping item 1 is formed in the heat-dissipating layer and communicates with the inkjet printing of the film The geometry design of the working liquid chamber of the meter head unit meets the following relationships: 46292 β_ Six. The scope of patent application where 1 is the length of the working liquid channel, h is the height of the cross section of the working liquid channel, b is the width of the cross section of the working liquid channel, and K is a coefficient that depends on the degree of bending and the number of bending of the working liquid channel. 77 is a coefficient, its unit is meter, and can be obtained by the following formula: b 64 v η = —χ-h V where 2; is the viscosity of the working fluid, and V is the flow velocity of the working fluid. 17. The inkjet print head of the bubble-driven elastic film according to item 16 of the patent application scope, wherein: the coefficient K is 6 or more. 18. The bubble-driven elastic film is sprayed according to item 16 of the scope of patent application. 'Ink printing head, where: coefficient? The range of 7 is from 0. 0 0 0 1 to 0. 0 1. Page 18