TW451095B - Automated chip/phasar holder - Google Patents

Automated chip/phasar holder Download PDF

Info

Publication number
TW451095B
TW451095B TW89113456A TW89113456A TW451095B TW 451095 B TW451095 B TW 451095B TW 89113456 A TW89113456 A TW 89113456A TW 89113456 A TW89113456 A TW 89113456A TW 451095 B TW451095 B TW 451095B
Authority
TW
Taiwan
Prior art keywords
alignment
axis
adjustable
optical
axis direction
Prior art date
Application number
TW89113456A
Other languages
Chinese (zh)
Inventor
Yong Tian
Original Assignee
Corning Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from EP99401673A external-priority patent/EP1067417A1/en
Application filed by Corning Inc filed Critical Corning Inc
Application granted granted Critical
Publication of TW451095B publication Critical patent/TW451095B/en

Links

Landscapes

  • Optical Couplings Of Light Guides (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)

Abstract

An automated optical chip holder for use in a pigtailing system precisely positions an optical chip at a predetermined location in three-dimensional space to align to align the optical chip within the pigtailing system. An adjustable chuck assembly is driven by a stepper motor under PLC control to position optical chip. After alignment, the optical chip is clamped by the adjustable chuck assembly during the pigtailing process to prevent the optical chip from moving out of alignment. This significantly reduces the occurrence of glue-joint failure and misalignment due to retraction stress. The clamp is fabricated using soft resilient materials at the point of contact with the chip. Thus, uniform pressure is exerted on the chip, micro-vibrations are absorbed, damage to the chip is reduced, and the necessity of precision motion control of the chuck assembly is avoided. The design of the automated chip holder allows the optical chip to be loaded and the pigtailed chip to be automatically unloaded using minimal operator involvement. The automated chip holder also accommodates different sized optical chips without altering the size of the chuck assembly holding the device.

Description

451 095 A7 ___ B7 五、發明説明(/) 發明領域: 本發明係關於光纖尾瓣之光學晶片固定器,特別是自 動光學晶片固定器,其裝置光學晶片以及卸除光纖尾瓣之 光學晶片於自動化大量光纖尾瓣系統中。 發明背景: 光纖必需在處理光纖尾瓣過程中精確地以及堅固地對 準於集體光學晶片波導。否則傳播通過所形成裝置之光線. 訊號受到衰減以及產生其他光學損耗而嚴重地惡化。除此 ’依靠廣泛使用人工之處理過程為不需要的。由效率觀點, 最需要光學晶片,精確對準,尾瓣處理,以及卸除之整個光 纖尾瓣處理過程為自動化以及為重現性。 經濟部中央標準局員工消費合作社印製 一項所考慮方法包含使用真空夾頭。通常光學晶片放 置於具有空氧灰塵之夾頭台階表面上,其與封閉空間連通 。在封閉空間中空氣施以真空抽除以及產生之真空力量將 光學晶片固定靠在台階表面上。不過,該方式具有數項缺 點。首先,真空夾頭有傾向使空氣產生變動,其將產生小的 振動’因而擾動光學晶片。因而,光學晶片穩定性在黏膠固 化過程中無法保持。更重要地,在黏膠固化過程中退縮應 力將促使光學晶片波導無法對準光纖或整組光纖陣列。因 而,裝置具有較低可靠性以及所產生之光學損耗為相當高 。該方法另外一項缺點在於高度依賴人工。操作員需要人 工地裝置光學晶片以及卸除光纖尾瓣光學晶片。由於其為 非常精密操作,成功地達成光纖尾瓣處理過程主要決定^ 操作者之經驗。 ' .本紙張尺度適用中國國家標準(CNS ) A4規格(210X297公釐) 451095 A7 -- -B7五、發明説明(工) 經濟部中央標準戽員工消費合作社印掣 在所考慮另外-項方法中,使用滑動構件以固定光學 晶片於適當位置。使用光學晶片基板表面作為支禮參考位 置。雖然光學裝置穩定制改善,所形成晶>!厚度色散將 傾向負面地影響處理触之重現性。類似先前所說明之方 法’該方法需要操作員人工地裝置光學晶片以及卸除光纖 尾瓣化光學晶丨。由於此為非常精密操作以及達成光纖尾 瓣處理過程決定於操作者之經驗。 因而對於未自動化晶片固定器存在精密地,堅固地,以 及重現性地定位以及解光學⑼於光纖尾辦統中之需 求。除此,未自動化晶片固定器存在最少人工自動地裝置 光學晶片以及卸除域觸化光學⑸之需求,其適合大 量製造光纖尾瓣之光學裝.置。 發明大要: 本發明解決先前所說明傳統系統存在之間題β本發明 自動化晶片S1定ϋ自動地裝置以及精確地放置光學晶片於 預先決定位置處υ朗錄雜材鑛錢尾瓣失於 適當位置’其二維空間地固定晶片。彈性夾住材料對夾頭 平台堅硬表面之不規則性提供補償以促使施加於晶片上壓 力分佈更加均勻。g]而微小振動實質地減柄及晶片避免 受到損害,導致製造量得到改善。除此,搞材料之彈性在 定位以及_麵愤軸馳件相當祕位置調整提供 補償。在光纖尾瓣化後,光纖尾瓣化之晶片以介入最少人 工而自動化地卸除。晶片固定器配合不同形狀以及大小之 •光學晶片。 3 Ψ fn- m ^^1 nn I J-— (請先閎讀背面之注意事項再填寫本頁) 訂451 095 A7 ___ B7 V. Description of the invention (/) Field of the invention: The present invention relates to an optical chip holder for an optical fiber tail lobe, especially an automatic optical chip holder. The device includes an optical chip and an optical chip for removing the optical fiber tail lobe. Automated in a large number of fiber tail lobe systems. BACKGROUND OF THE INVENTION Optical fibers must be accurately and robustly aligned with collective optical wafer waveguides in the processing of fiber tail lobes. Otherwise, the light transmitted through the formed device will be severely deteriorated due to attenuation and other optical losses. In addition, it is unnecessary to rely on extensive manual labor. From an efficiency point of view, optical wafers, precise alignment, tail lobe processing, and removal of the entire fiber tail lobe process are most automated and reproducible. Printed by the Consumer Standards Cooperative of the Central Bureau of Standards of the Ministry of Economics One method considered involves the use of vacuum chucks. Optical wafers are usually placed on the chuck stepped surface with air oxygen dust, which communicates with the enclosed space. The vacuum is applied to the air in the enclosed space and the generated vacuum force holds the optical wafer against the surface of the step. However, this approach has several drawbacks. First, the vacuum chuck has a tendency to fluctuate the air, which will generate small vibrations' and thus disturb the optical wafer. Therefore, the stability of the optical wafer cannot be maintained during the curing of the adhesive. More importantly, the shrinkage stress during the curing of the adhesive will cause the optical wafer waveguide to fail to align the fiber or the entire fiber array. Therefore, the device has lower reliability and the resulting optical loss is quite high. Another disadvantage of this method is that it is highly manual. Operators need to manually install the optics and remove the fiber tail lobe optics. Because it is a very precise operation, the success of the fiber tail lobe processing process is mainly determined by the operator's experience. '. This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) 451095 A7--B7 V. Description of the invention (Industrial) Central Standard of the Ministry of Economy 戽 Employee Consumer Cooperatives printed in the other method considered , Use a sliding member to fix the optical chip in place. Use the surface of the optical wafer substrate as a gift reference position. Although the stability of the optical device is improved, the formed crystal >! Thickness dispersion will tend to negatively affect the reproducibility of the process. Similar to the previously described method ', this method requires the operator to manually set up the optical wafer and remove the fiber tail lobe optical crystal. Because this is a very precise operation and the process of achieving the fiber tail lobe is determined by the operator's experience. Therefore, there is a need for precise, rugged, and reproducible positioning and decoupling of unautomated wafer holders in fiber optic tail systems. In addition, there is a need for a non-automated wafer holder to manually and automatically install optical wafers and remove the field-contacted optical chirps, which are suitable for a large number of optical devices for manufacturing optical fiber tail lobes. Summary of the invention: The present invention solves the problem of the conventional system described previously. Β The automatic wafer S1 of the present invention fixes the automatic device and accurately places the optical wafer at a predetermined position. The tail lobe of the miscellaneous material is not suitable. The position 'fixes the wafer in its two-dimensional space. The elastic clamping material compensates for irregularities in the hard surface of the chuck platform to promote a more uniform pressure distribution on the wafer. g], and the small vibrations substantially reduce the shank and the wafer to avoid damage, which leads to an improvement in manufacturing volume. In addition, the elasticity of the material provides compensation in positioning and in the position adjustment of the shaft. After the fiber tail lobe is formed, the fiber tail lobe is automatically removed with minimal manual intervention. Wafer holders are compatible with different shapes and sizes of optical wafers. 3 Ψ fn- m ^^ 1 nn I J-— (Please read the precautions on the back before filling this page) Order

^51095 A7 五、發明説明(3 ) 羥濟部中夬樣準局員工消費合作社印製 本發明一項為自動化晶片固定器以定位光學晶片於光 纖尾瓣系統中。光學晶片具有對齊邊緣以及對齊表面。自 動化晶片固定器藉由具有X,y,Z轴直角座標系統將光學晶 片定位於三度空間中。自動化晶片固定器包含:支撐底座, 其具有平行於X軸之滑動軌條;對齊構件固定至支撐底座以 界定對準位置於三度空間中;可調整夾頭組件可滑動地位 於滑動執條上以移動光學裝置於裝置交換位置與對準位置 之間,可調整夾頭組件在X軸方向為可移動以及在2軸方向 為可調整以反應X轴方向力量;以及驅動組件連接至可調整 夾頭組件以施加X轴方向力量至可調整夾頭組件。 另外一方面,本發明包含一種方法以定位光學裝置於 自動化晶片固定器之光纖尾瓣系統中。光學裝置包含對齊 邊緣以及對齊表面。自動化晶片固定器包含具有滑動軌條 之支撐底座,對齊構件固定至支撐底座以界定出對準位置 於三度空間中,其由具有x,y,z軸直角座標系統表示。定位 方法包含下列步驟:提供可調整夾頭組件可滑動地位於滑 動轨條上以移動光學裝置於裝置交換位置與對準位置之間 ,可調整夾頭组件在X軸方向為可移動的以及在Z軸方向為 可調整的以反應X轴力量;以及施加X軸力量將光學裝置由 裝置之交換位置移動至對準位置。 人們了解先前之一般說明以及下列詳細說明只作為本 發明之範例性以及作為提供一個架構或概要以了解申請專 利範圍所包含本發明之原理及特性。附圖提供作為更進一 步了解本發明,以及在此加入構成本發明說明書之一部份 本紙張尺度適用中國國家橾隼(cm〉A4規格(210X297公釐) I- ^^1 I— H - I - g-n *n — (請先閲讀背面之注意事項再填寫本頁) 1T_^ 51095 A7 V. Description of the invention (3) Printed by the Consumers' Cooperative of the China Prototype Bureau of the Ministry of Hydrogenation This invention is an automated wafer holder for positioning an optical wafer in an optical fiber tail lobe system. The optical wafer has an aligned edge and an aligned surface. The automatic wafer holder positions the optical wafer in a three-dimensional space by using X, y, and Z-axis right-angle coordinate systems. The automated wafer holder includes: a support base having a sliding rail parallel to the X-axis; an alignment member is fixed to the support base to define an alignment position in a three-degree space; an adjustable chuck assembly is slidably located on the slide bar By moving the optical device between the device exchange position and the alignment position, the adjustable chuck assembly is movable in the X-axis direction and adjustable in the 2-axis direction to reflect the force in the X-axis direction; and the driving component is connected to the adjustable clamp The head assembly applies an X-axis force to the adjustable chuck assembly. In another aspect, the invention includes a method for positioning an optical device in a fiber optic tail lobe system of an automated wafer holder. The optics include aligned edges and aligned surfaces. The automated wafer holder includes a support base with a sliding rail, and an alignment member is fixed to the support base to define an alignment position in a three-degree space, which is represented by a system having x, y, and z-axis right-angle coordinates. The positioning method includes the following steps: providing an adjustable chuck assembly slidably located on the slide rail to move the optical device between the device exchange position and the alignment position; the adjustable chuck assembly is movable in the X-axis direction and between The Z-axis direction is adjustable to reflect the X-axis force; and the X-axis force is applied to move the optical device from the device exchange position to the alignment position. It is understood that the previous general description and the following detailed description are provided merely as examples of the invention and as a framework or summary for understanding the principles and features of the invention encompassed by the scope of the claimed patent. The drawings are provided as a further understanding of the present invention, and are added here to form a part of the description of the present invention. The paper size is applicable to the Chinese national standard (cm> A4 specification (210X297 mm) I-^^ 1 I- H-I -gn * n — (Please read the notes on the back before filling this page) 1T_

、發明説明(十) 經濟.邱中央標準局員工消費合作社印製 。附圖列舉ώ本發财騎實施m縣說明作為解 釋本發明之原理及操作。 , 附圖簡單說明: f 一圖(圖1)為本發明自動化晶月固定器側面端視圖; 第二圖(圖2)為本發明自動化晶片固定器後面端視圖; 第三圖(圖3)為詳細圖,其顯示出在對準過程中施加艺 方向之均勻力量; 第四圖(圖4)為本發明對齊構件之詳細圖; 第五圖(圖5)為本發明可調整夾頭組件側視詳細圖; 第六圖(圖6)為詳細圖,其顯示出在對準過程中施加X 方向之均勻力量; 第七圖(圖7)為本發明可調整夾頭組件後側端視詳細 圖; 第八圖C圖8)為本發明自動化晶片固定器裝置交換位 置之詳細圖; 第九圖(圖9)為本發明自動化晶片固定器之對準位置 詳細圖。 附圖元件符號說明: 晶片固定器10;支撐底座12;滑動軌條14;軌條導引 16;對齊構件20;x軸參考位置22;表面區域24;柱構件 26;懸臂構件28;停止塊構件30;停止塊垂片32;固定裝 置34;夾頭組件40;轉移構件42;停止塊邊緣44;傾斜表 面46, 48;調整平台50;載台構件52;嵌合構件54;停止 塊邊緣56;馬達60;旋轉螺絲62;可程式邏輯控制器(PLC) 本紙張尺度適用中國國家標準(CNS ) A4規格(210X297公釐) 7 (請先閲讀背面之注項再填寫本頁)Description of invention (ten) Economy. Printed by Qiu Central Bureau of Standards Consumer Cooperatives. The drawings enumerate the implementation of the county for the explanation of the principle and operation of the present invention. Brief description of the drawings: f A figure (Figure 1) is a side end view of the automatic crystal moon holder of the present invention; a second figure (Figure 2) is a rear end view of the automatic wafer holder of the present invention; a third figure (Figure 3) Is a detailed diagram showing a uniform force applied in the direction of alignment during the alignment process; the fourth diagram (FIG. 4) is a detailed diagram of the alignment member of the present invention; the fifth diagram (FIG. 5) is an adjustable chuck assembly of the present invention Detailed view from the side; Figure 6 (Figure 6) is a detailed view showing the application of uniform force in the X direction during the alignment process; Figure 7 (Figure 7) is a rear end view of the adjustable chuck assembly of the present invention Detailed drawings; Figures 8 (C, 8) are detailed drawings of the swap positions of the automatic wafer holder device of the present invention; Figure 9 (Figure 9) is a detailed view of the alignment positions of the automatic wafer holder of the present invention. Description of the symbols of the drawing elements: wafer holder 10; support base 12; sliding rail 14; rail guide 16; alignment member 20; x-axis reference position 22; surface area 24; column member 26; cantilever member 28; stop block Member 30; stopper tab 32; fixture 34; chuck assembly 40; transfer member 42; stopper edge 44; inclined surfaces 46, 48; adjustment platform 50; stage member 52; fitting member 54; stopper edge 56; Motor 60; Rotating Screw 62; Programmable Logic Controller (PLC) This paper size applies to China National Standard (CNS) A4 (210X297 mm) 7 (Please read the note on the back before filling this page)

經濟部中央標準局負工消費合作社印製 451095 A7 五、發明説明(y ) 64;光學晶片1〇〇;對齊邊緣1〇2;對齊表面.1〇4丨凹口 22〇; 支臂280, 282;開放區域284;轉移構件邊緣420;載台邊 緣520;楔形物522;彈性墊片524;傾斜表面526,528。 .詳細說明: 現在針對本發明優先實施例詳細說明,其一個範例列 舉於附圖中。儘可能地,在所有附圖中相同參考數字表示 相同或類似的元件。本發明一個範例性自動化晶片固定器 顯示於圖1中,以參考數字1〇表示。 本發明晶片固定器10包含可調整夾頭組件4〇,其移動 光學晶片100到達三度空間中一個精確位置。光學晶片 位於彈性墊片上以及相鄰彈性楔形物以保護晶片並不在夾 住過程中受到損壞。在光纖尾瓣處理過程中彈性材料施加 均勻的夾住力量作用於水平以及垂直方向。此為吸收微振 動之重要特性,其將消除由於收縮應力所導致之晶片不對 準。使用彈性材料存在其他優點。夾頭逐漸移動無法如同 具有堅硬非彈性表面一樣之精確度。假如非彈性夾頭施加 太大力量於晶片上,其將損及晶片。因而,移動控制系統必 需使用較為嚴格之誤差以避免該損壞。另外一方面,彈性 材料範圍較廣以及在夾住時配合較為不精確之增量移動。 因而能夠避免需要較為精確移動之控制以及減小相關之費 用。彈性楔形物能夠為可交換的使夾頭組件40能夠配合不 同大小以及形狀之光學晶片。 如先前所說明,自動化晶片固定器10定位於三度空間 中精確之位置。在三度空間中移動針對相互差值X軸,y軸 本紙張尺度適用中國國家標準(CNS ) A4规格(210X297公釐) (請先閲讀背面之注意事項再填寫本頁)Printed by the Central Bureau of Standards of the Ministry of Economic Affairs and Consumer Cooperatives 451095 A7 V. Description of the Invention (y) 64; Optical wafer 100; Aligned edge 102; Aligned surface 1.04 Notch 22o; Arm 280, 282; open area 284; transfer member edge 420; stage edge 520; wedge 522; elastic washer 524; inclined surface 526,528. Detailed description: A detailed description will now be given of the preferred embodiment of the present invention, an example of which is listed in the accompanying drawings. Wherever possible, the same reference numbers will be used throughout the drawings to refer to the same or like parts. An exemplary automated wafer holder of the present invention is shown in FIG. 1 and designated by reference numeral 10. The wafer holder 10 of the present invention includes an adjustable chuck assembly 40, which moves the optical wafer 100 to a precise position in a three-degree space. The optical wafer is located on an elastic gasket and adjacent elastic wedges to protect the wafer from damage during clamping. During the processing of the fiber tail lobe, the elastic material applies a uniform clamping force to the horizontal and vertical directions. This is an important feature for absorbing microvibrations, which will eliminate wafer misalignment due to shrinkage stress. There are other advantages to using elastic materials. The gradual movement of the chuck cannot be as precise as having a hard, inelastic surface. If the non-resilient chuck exerts too much force on the wafer, it will damage the wafer. Therefore, the mobile control system must use stricter errors to avoid this damage. On the other hand, the elastic material has a wide range and it can be used for inaccurate incremental movement during clamping. It is thus possible to avoid the need for more precise movement control and reduce the associated costs. The elastic wedges can be interchangeable to enable the collet assembly 40 to fit different sizes and shapes of optical wafers. As explained previously, the automated wafer holder 10 is positioned at a precise position in a three-degree space. Move in three degrees space for mutual difference X axis, y axis This paper size applies Chinese National Standard (CNS) A4 specification (210X297 mm) (Please read the precautions on the back before filling this page)

4 51 0 9 B A7 經濟部中央棵準局貝工消費合作社印聚 五、發明説明(¢7 及Z轴直角座標系統說明。自動化晶片固定器1〇長度對應 於X軸,寬度對應於y軸,以及高度對應於2軸。 如實施例所說明,以及描繪於圖1中,自動化晶片固定 器10包含支撐底座12,其功能為自動化晶片固定器之底 座。支樓底座12包含滑動執條14,其為凸出部份以使用作 為導引可調整夾頭組件40於沿著X軸之方向。對齊構件29 連接至支#底座12以及界定出三度空間中光學晶片之 對準位置。可調整夾頭組件40可滑動位於支撐底座12上以 及運載光學晶片100於裝置交換位置以及對準位置之間。 可調整夾頭組件40包含沿著X軸方向移動之轉移構件42,以 及可調整平台50,其沿著z轴調整光學晶片1〇〇位置。裝置 父換位置與對準位置將詳細說明於底下。旋轉螺絲62連接 至可調整炎頭組件40。旋轉螺絲62利用螺絲轉動促使可調 整央頭組件40沿著X軸任何方向移動。步進馬達6〇連接至 可旋轉螺絲62以及以相反方向為順時針或逆時針方向轉動 。可程式邏輯控制器(PLC)64連接至步進馬達62。自動化 固定器10操作順序載於PLC 64上。 依據本發明,對齊構件20可更進一步包含柱構件邡,其 固定至支撐底座12以平行於z軸方向延伸。_構件26連接' 至懸臂構件28以及平行於支撐底座12。可調整調整構件加 放置於懸臂構件28上而與柱構件26相隔。空間為可變化以 配合自動化之各種晶片尺寸。位於停止塊構件加與挺構件 26間空間中之懸臂構件28表面區域24為相當於對齊表面之 z轴對準參考位査。柱表面22提供X軸對準參考位置以對準 本紙張尺度適用中國國家操準(CNS ) A4規格(210X297公楚) (請先閱讀背面之注意事項再填寫本頁) 訂_ 451095 經濟部中央榡準局負工消費合作社印製 A7 B7 五、發明説明(1 ) 光學晶片100之對齊邊緣102。 如圖2所說明,本發明自動化晶片固定器丨〇後部端視圖 包含懸臂構件28,其為形成開放區域284之支臂280及282。 可調整停止塊構件30包含停止塊垂片,其在z軸方向向下延 伸進入敞開區域284内。可調整平台50包含嵌合構件在2方 向向上延伸。光學晶片1〇〇在沿著2軸向上移動時藉由可調 整平台50被夾住而靠在表面24上,對齊表面1〇4定位為z軸 對準。在夾住過程中彈性墊片524支撐光學晶片1〇〇以及在 z軸方向產生均勻夾住力量。彈性墊片524對可調整平台中 表面之不規則提供補償,否則將產生不均勻之壓力分佈。 注意嵌合構件54以及停止塊垂片32鎖定將防止可調整平台 50在特定情況下移動。 如圖3所示,由彈性墊片524施加均勻夾住力量,該力量 約等於100公克/mm。均勻力量係指在彈性墊片524與光學 晶片10 0間每一接觸點處藉由彈性墊片524施加線性力量之 大小為相等的。 圖4為本發明在X軸及y軸所形成平面中對齊構件20之 詳細圖。懸臂構件28之支臂280及282連接至柱構件26以形 成具有ϋ型開孔區域284。可調整停止塊30放置於支臂280 及282上以及沿著X軸為可調整的以配合任何尺寸之光學晶 片。可調整停止塊30位置藉由固定裝置34對特定尺寸光學 裝置加以固定。固定裝置34可為任何已知適當形式,例如 為緊靠於支臂280之螺絲。圖4亦描繪出停止塊垂片32,其 鎖定嵌合構件54。在X軸對準中,對齊邊緣102當轉移構件 私紙張尺度適用中國國家榇準(CNS ) Α4规格(210X297公釐) 1〇 (請先聞讀背面之注意事項再填寫本頁)4 51 0 9 B A7 Printed by the Central Co-operation Bureau Shellfish Consumer Cooperative of the Ministry of Economic Affairs 5. Description of the invention (¢ 7 and Z-axis right-angle coordinate system description. The length of the automated wafer holder 10 corresponds to the X-axis and the width corresponds to the y-axis , And the height corresponds to 2 axes. As illustrated in the embodiment, and depicted in FIG. 1, the automated wafer holder 10 includes a support base 12, which functions as a base for the automated wafer holder. The base 12 of the building includes a slide bar 14 It is a protruding part for use as a guide to adjust the chuck assembly 40 in the direction along the X axis. The alignment member 29 is connected to the support #base 12 and defines the alignment position of the optical chip in the three-degree space. The adjustable chuck assembly 40 is slidably located on the support base 12 and carries the optical wafer 100 between the device exchange position and the alignment position. The adjustable chuck assembly 40 includes a transfer member 42 moving along the X-axis direction, and an adjustable platform 50, which adjusts the optical wafer 100 position along the z axis. The device's parental change position and alignment position will be described in detail below. The rotation screw 62 is connected to the adjustable inflammation head assembly 40. The rotation screw 62 uses The wire rotation causes the adjustable central head assembly 40 to move in any direction along the X axis. The stepper motor 60 is connected to the rotatable screw 62 and rotates clockwise or counterclockwise in the opposite direction. Programmable logic controller (PLC) 64 Connected to the stepper motor 62. The operating sequence of the automatic holder 10 is carried on the PLC 64. According to the present invention, the alignment member 20 may further include a column member 邡, which is fixed to the support base 12 to extend parallel to the z-axis direction. 26 is connected to the cantilever member 28 and is parallel to the support base 12. An adjustable adjustment member is placed on the cantilever member 28 to be separated from the column member 26. The space is a variety of wafer sizes that can be changed to accommodate automation. The stop block member plus and The surface area 24 of the cantilever member 28 in the space between the stiffener members 26 is the z-axis alignment reference position equivalent to the alignment surface. The column surface 22 provides the X-axis alignment reference position to align with this paper standard. ) A4 size (210X297 Gongchu) (Please read the notes on the back before filling out this page) Order _ 451095 Printed by A7 B7, Central Consumers ’Bureau, Ministry of Economic Affairs Description of the invention (1) Alignment edge 102 of the optical wafer 100. As illustrated in FIG. 2, the rear end view of the automated wafer holder of the present invention includes a cantilever member 28, which is an arm 280 and 282 forming an open area 284. May The adjustment stop block member 30 includes a stop block tab extending downward in the z-axis direction into the open area 284. The adjustable platform 50 includes a fitting member extending upward in two directions. The optical wafer 100 is in two axial directions. During the movement, the adjustable platform 50 is clamped against the surface 24, and the alignment surface 104 is positioned as the z-axis alignment. During the clamping process, the elastic pad 524 supports the optical wafer 100 and the z-axis direction Generates uniform clamping force. The elastic gasket 524 compensates for irregularities in the surface of the adjustable platform, otherwise an uneven pressure distribution will be produced. Note that the locking of the fitting member 54 and the stopper tab 32 will prevent the adjustable platform 50 from moving under certain conditions. As shown in Fig. 3, a uniform clamping force is applied by the elastic washer 524, and the force is approximately equal to 100 g / mm. Uniform force means that the magnitude of the linear force exerted by the elastic pad 524 at each contact point between the elastic pad 524 and the optical wafer 100 is equal. Fig. 4 is a detailed view of the alignment member 20 in the plane formed by the X-axis and the y-axis of the present invention. The arms 280 and 282 of the cantilever member 28 are connected to the pillar member 26 to form a region 284 having a ϋ-shaped opening. The adjustable stop block 30 is placed on the arms 280 and 282 and is adjustable along the X axis to fit any size optical wafer. The position of the adjustable stop block 30 is fixed by a fixing device 34 to a specific size optical device. The fixture 34 may be of any known suitable form, such as a screw abutting against the arm 280. FIG. 4 also depicts a stopper tab 32 which locks the fitting member 54. In the X-axis alignment, the alignment edge 102 is used as the transfer member. The private paper size is applicable to the China National Standard (CNS) Α4 specification (210X297 mm) 1〇 (Please read the precautions on the back before filling this page)

451D9S A7 B7 五、發明説明(名) 42朝X軸方向前進時藉由彈性楔形物522彈性地緊靠在柱表 面22上。為了減小光學晶片丨⑻與义軸參考軸22間之磨擦力 量以及確保參考位置之精確性,凹口 220形成於柱構件26中 。因而,光學晶片100與X軸參考位置22間之接觸點減小為 較小之範圍。 圖5為本發明可調整夾頭組件之侧視詳細圖。依據本 發明,可調整央頭組件40能夠更進一步包含轉移構件42以 及可調整平台50。轉移構件42放置於支撐底座12以及連接 至旋轉螺絲62。轉移構件藉由轉動螺絲62沿著X軸任一方 向移動。轉移構件42包含轉移傾斜表面46及48以支撐可調 整平台50。傾斜表面46以及48進行微細拋光以及塗覆鐵氟 龍以減小磨擦係數》提供轉移停止塊邊緣44以限制可調整 平台50之移動。 經濟部中央標準局員工消費合作社印製 如圖5所示,可調整平台50放置於轉移構件42上。可調 整平台50為可移動的以及並不藉由任何連接器或黏接劑連 接至轉移構件42。可調整平台只藉由重力以及磨擦力而保 持位於轉移構件42上位置,以及能夠自由地在拋光傾斜表 面46及48表面上滑動。可調整平台50包含載台構件52,舌 片構件構件54,以及平台停止塊邊緣56。載台構件52裝置 彈性楔形物522,如先前所說明,其在夾住以及對準過程中 在X方向產生均勻之力量。光學晶片10放置於彈性墊片524 上。載台形成傾斜表面526以及528,其相當於轉移傾斜表 面46及48。傾斜表面526以及528加以拋光以及塗覆鐵氟隆 。光學晶片沿著z轴之位置在傾斜表面46以及48上藉由滑 本紙張尺度適用中國國家擦準(CNS > A4規格(210X297公釐)451D9S A7 B7 V. Description of the Invention (Name) 42 As it advances in the X-axis direction, it elastically abuts on the column surface 22 by the elastic wedge 522. In order to reduce the amount of friction between the optical wafer 义 and the reference axis 22 of the sense axis and to ensure the accuracy of the reference position, a notch 220 is formed in the pillar member 26. Therefore, the contact point between the optical wafer 100 and the X-axis reference position 22 is reduced to a smaller range. FIG. 5 is a detailed side view of an adjustable chuck assembly according to the present invention. According to the present invention, the adjustable central head assembly 40 can further include a transfer member 42 and an adjustable platform 50. The transfer member 42 is placed on the support base 12 and is connected to a rotation screw 62. The transfer member is moved in either direction of the X axis by turning the screw 62. The transfer member 42 includes transfer inclined surfaces 46 and 48 to support the adjustable platform 50. The inclined surfaces 46 and 48 are finely polished and coated with Teflon to reduce the coefficient of friction. A transfer stop block edge 44 is provided to limit the movement of the adjustable platform 50. Printed by the Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs As shown in FIG. 5, the adjustable platform 50 is placed on the transfer member 42. The adjustable platform 50 is movable and is not connected to the transfer member 42 by any connector or adhesive. The adjustable platform is kept in position on the transfer member 42 only by gravity and frictional force, and is able to slide freely on the polished inclined surfaces 46 and 48 surfaces. The adjustable platform 50 includes a stage member 52, a tongue member member 54, and a platform stop block edge 56. The stage member 52 is provided with an elastic wedge 522, which, as previously explained, generates a uniform force in the X direction during clamping and alignment. The optical wafer 10 is placed on the elastic spacer 524. The stage forms inclined surfaces 526 and 528, which correspond to the transfer inclined surfaces 46 and 48. The inclined surfaces 526 and 528 are polished and coated with Teflon. The optical chip slides on the inclined surfaces 46 and 48 along the z-axis. The paper size is applicable to the Chinese national standard (CNS > A4 size (210X297 mm)).

(I(I

45109S A7 B7 五、發明説明(q ) 動傾斜表面而加以調整。如先前所說明,嵌合構件54防止 可調整平台50沿著X軸移動,當嵌合構件54鎖定可調整停止 塊構件30之停止塊垂片32。平台停止邊緣利用轉移停止邊 緣44鎖定以防止可調整平台50完全地滑離轉移構件42。 如圖6所描繪以及說明,由彈性楔形物所施加均勻夾住 力里大约等於40公克/mm。z軸方向力量與X軸方向力量間 之比值約為5:2。不過,X轴方力量至少為1〇公克/mm。再次 地,"均勾力量"係指由彈性楔形物522所施加線性力量在弹 性楔形物522與光學晶片100間之接觸任何點處為相等的。 彈性楔形物522能夠對任何平台52任何不規則表面作補償, 否則其將對光學晶片100上產生不均勻的壓力分佈。 經濟部中央橾準局員工消費合作社印製 圖7為本發明可調整炎頭组件4〇後端詳細圖。轉移構 件42具有軌條導引16形成於底部表面中。軌條導引丨6與支 撐底座12滑移軌條14相匹配。停止邊緣構件56固定於轉移 構件42上使得傾斜表面526以及528靠在傾斜表面46及48上 。該設計去除沿著y軸夾頭組件40之移動。光學晶片放 置於彈性墊片524上。如圖所示,彈性墊片524插入於沿著 載台構件52邊緣所形成溝槽中以及在z軸方向產生均勻夾 住力量。在一項實施例中,在可調整平台5〇放置於轉移構 件42上前载台構件52上光學晶片1 〇〇位置為預先決定的以 及加以固定以產生y軸對準。因而光學晶片1〇〇以及可調整 平台50整個單元降低至轉移構件42上。在另外一個實施例 中,可調整平.台50在裝置光學晶片1〇〇前放置於轉移構件42 上。在該實施例中,真空夾頭運載光學晶片1〇〇至可調整平 本紙張尺度適用中國國家標準(CNS > A4規格(210X297公釐) 4510S| Α7 Β7 經濟部中央標準局負工消費合作社印製 五、發明説明(p) 台50以及將光學晶片100放置於預先決定位置處之可調整 平台50上。因而,在任何一個實施例中當裝置進入自動固 定器時光學晶片100自動地對準於y軸。 現在針對圖8及9說明自動化晶片固定器1〇之操作。圖 8為本發明自動化晶片固定器1〇裝置交換位置中夾頭組件 40之詳細圖。可調整夾頭組件40放置於X軸上相鄰於支撐 底座12端部壁板18—個位置處。在該位置處裝置光學晶片 100以及光纖麵合益由自動化晶片固定器卸除β如上述 所說明,在裝置過程中達成y軸之對準。對齊邊_1〇2藉由 適當地選擇彈性楔形物522大小對準於載台邊緣520。載台 邊緣520對準於轉移構件邊緣420以產生可調整彈性平台 與懸臂構件28間X軸之距離。一旦完成裝置,可調整平台5〇 能夠向前滑動於轉移構件42上持續到平台停止塊邊緣%與 轉移停止塊邊緣44接觸時。此將提高對齊表面1Q4與表面 24, z軸對準參考位置間之X軸距離。必需存在足夠距離使 嵌合構件54當轉移構件42以X軸方向向前移動時通過可調 整停止塊構件30之停止塊垂片32。 圖9為本發明自動化晶片固定器1〇之對準位置詳細圖 。依據光學晶片100大小及厚度,在PLC 64控制情況下步進 馬達60驅動轉移構件42由裝置可交換位置至χ轴對準位置 。一旦轉移構件42到達X軸該位置,對齊邊緣1〇2緊壓靠在χ 軸對準參考位置22,以及可調整平台印在义軸方向移動將停 止。在該情況下,χ軸均勻力量藉由彈性楔形物522施加於 光學晶片100相對邊緣上。由於可調整平台5〇無法在χ轴方45109S A7 B7 V. Description of the invention (q) Adjust the inclined surface. As explained previously, the fitting member 54 prevents the adjustable platform 50 from moving along the X axis, and when the fitting member 54 locks the adjustable stop block piece 30 of the adjustable stop block member 30. The platform stop edge is locked with the transfer stop edge 44 to prevent the adjustable platform 50 from completely sliding off the transfer member 42. As depicted and illustrated in Figure 6, the uniform clamping force exerted by the elastic wedge is approximately equal to 40 grams / mm. The ratio between the z-axis force and the x-axis force is approximately 5: 2. However, the X-axis force is at least 10 g / mm. Again, "equal hooking force" means that the linear force exerted by the elastic wedge 522 is equal at any point of contact between the elastic wedge 522 and the optical wafer 100. The elastic wedge 522 can compensate for any irregular surface of any platform 52, otherwise it will generate an uneven pressure distribution on the optical wafer 100. Printed by the Employees' Cooperatives of the Central Bureau of Standards, Ministry of Economic Affairs Figure 7 is a detailed diagram of the rear end of the adjustable Yantou component 40 of the present invention. The transfer member 42 has a rail guide 16 formed in the bottom surface. The rail guide 6 is matched with the support base 12 sliding rail 14. The stop edge member 56 is fixed to the transfer member 42 such that the inclined surfaces 526 and 528 abut against the inclined surfaces 46 and 48. This design eliminates the movement of the collet assembly 40 along the y-axis. The optical wafer is placed on the elastic spacer 524. As shown, the elastic washer 524 is inserted into a groove formed along the edge of the stage member 52 and generates a uniform clamping force in the z-axis direction. In one embodiment, the position of the optical wafer 1000 on the front stage member 52 on which the adjustable platform 50 is placed on the transfer member 42 is predetermined and fixed to produce a y-axis alignment. Thus, the entire unit of the optical wafer 100 and the adjustable platform 50 is lowered onto the transfer member 42. In another embodiment, the adjustable stage 50 is placed on the transfer member 42 before the device optical wafer 100. In this embodiment, the vacuum chuck carries the optical wafer 100 to the adjustable plain paper size and applies the Chinese national standard (CNS > A4 size (210X297 mm) 4510S | Α7 Β7 Central Office of Standards, Ministry of Economic Affairs and Consumer Cooperatives Printing 5. Description of the invention (p) The stage 50 and the optical wafer 100 are placed on an adjustable platform 50 at a predetermined position. Therefore, in any of the embodiments, the optical wafer 100 is automatically aligned when the device enters the automatic holder. Aligned on the y-axis. The operation of the automated wafer holder 10 is now described with reference to FIGS. 8 and 9. FIG. 8 is a detailed diagram of the chuck assembly 40 in the automatic wafer holder 10 device exchange position of the present invention. Placed on the X-axis at a position adjacent to the end wall plate 18 of the support base 12. At this position, the optical wafer 100 and the optical fiber surface are removed by the automated wafer holder β, as described above, during the installation process. Alignment of the y-axis is achieved. The alignment edge 101 is aligned with the stage edge 520 by appropriately selecting the size of the elastic wedge 522. The stage edge 520 is aligned with the edge 420 of the transfer member to produce Adjust the X-axis distance between the elastic platform and the cantilever member 28. Once the device is completed, the adjustable platform 50 can slide forward on the transfer member 42 until the edge of the platform stop block% contacts the edge of the transfer stop block 44. This will increase The X-axis distance between the alignment surface 1Q4 and the surface 24, z-axis alignment reference position. There must be sufficient distance for the fitting member 54 to pass through the adjustable stop block member 30 when the transfer member 42 moves forward in the X-axis direction. Tab 32. Fig. 9 is a detailed view of the alignment position of the automatic wafer holder 10 of the present invention. According to the size and thickness of the optical wafer 100, under the control of PLC 64, the stepping motor 60 drives the transfer member 42 from the device exchangeable position to χ-axis alignment position. Once the transfer member 42 reaches this position on the X-axis, the alignment edge 10 is pressed against the χ-axis alignment reference position 22, and the movement of the adjustable platform imprint in the direction of the sense axis will stop. In this case The uniform force of the χ axis is applied to the opposite edge of the optical wafer 100 by the elastic wedge 522. Because the adjustable platform 50 cannot be positioned on the χ axis

(请先閲讀背面之注意事項再填寫本頁) 訂 -I d I . -I I 1 _ 13 451 0 9 § A7 B7 2 11 五、發明説明(ti 經濟部中央標準局員工消費合作社印製 向移動,傾斜表面46及48在傾斜表面526及528下滑動,迫使 *T調整平台5〇在z軸上朝上地對著z軸對準參考位置表面24 移動。接著,欲合構件54鎖定停止塊垂片32以及對齊表面 104被夾住靠在表面24上《當光學晶片100彈性地夾住時, 步進馬達60停止供應電源以及可旋轉螺絲62停止轉動。由 彈性楔形物522施加於光學晶片1〇〇上之均勻力量以及彈性 墊片528由可調整螺絲62加以保持,其固定於適當位置處持 續到完成光纖尾瓣之處理過程。 在完成光纖尾瓣後,光纖尾瓣化之光學晶片向後移動 至裝置可交換位置,如圖8所示。步進馬達6〇再施加電源以 及開始以相反方向轉動可旋轉螺絲促使轉移構件42沿著χ 軸縮回。轉移構件42沿著X軸以相反方向移動,嵌合構件54 緊壓靠在停止塊垂片32以防止可調整平台50沿著X軸移動 。傾斜表面46及48在傾斜表面526及528下滑動以及可調整 在ζ方向朝著支撐底座12移動。一旦嵌合構件54由停止塊 垂片32卸除,可調整夾頭組件40朝著裝置交換位置移動。 一旦光纖尾瓣化晶片與未處理之晶片交換,重複上述所說 明之處理過程。 熟知此技術者能夠對本發明作出許多變化及改變,但 是其並不會脫離本發明之精神與範圍。下列申請專利範圍 將含蓋這些變化及改變。 本紙蒗尺度適用中國國家標準(CNS ) A4規格(210X297公釐) (請先閲讀背面之注意事項再填寫本買) 訂(Please read the notes on the back before filling this page) Order -I d I. -II 1 _ 13 451 0 9 § A7 B7 2 11 V. Description of the invention The inclined surfaces 46 and 48 slide under the inclined surfaces 526 and 528, forcing the * T adjustment platform 50 to move upward in the z-axis toward the z-axis alignment reference surface 24. Then, the locking member 54 locks the stop block The tab 32 and the alignment surface 104 are clamped against the surface 24. When the optical wafer 100 is elastically clamped, the stepping motor 60 stops supplying power and the rotatable screw 62 stops rotating. The elastic wedge 522 is applied to the optical wafer The uniform force on 100 and the elastic gasket 528 are maintained by the adjustable screw 62, which is fixed in place until the processing of the fiber tail lobe is completed. After the fiber tail lobe is completed, the fiber tail lobe is turned into an optical chip Move back to the device exchangeable position, as shown in Figure 8. The stepper motor 60 then applies power and starts turning the rotatable screw in the opposite direction to cause the transfer member 42 to retract along the x-axis. The transfer member 42 follows the x-axis to Moving in the opposite direction, the fitting member 54 is pressed against the stopper tab 32 to prevent the adjustable platform 50 from moving along the X axis. The inclined surfaces 46 and 48 slide under the inclined surfaces 526 and 528 and can be adjusted toward the z direction The support base 12 moves. Once the fitting member 54 is removed by the stopper tab 32, the adjustable chuck assembly 40 is moved toward the device exchange position. Once the fiber tail lobe wafer is exchanged with the unprocessed wafer, repeat the above description Processing process. Those skilled in the art can make many changes and changes to the present invention, but they will not depart from the spirit and scope of the present invention. The following patent application scope will cover these changes and changes. The paper standard is applicable to the Chinese National Standard (CNS ) A4 size (210X297mm) (Please read the precautions on the back before filling in this purchase) Order

Claims (1)

AS B8 CS D8 六、申請專利範園 1. 一種自動化晶片固定器,以在光纖尾瓣中定位光學晶片, §亥光學晶片具有對齊邊緣以及對齊表面,其中該自動化晶 片固定器將光學晶片定位於具有X軸,y軸,2:軸直角座標系 統之三度空間中,自動化晶片固定器包含: 支撐底座,其具有與X軸平行之滑動軌條; 對齊構件,其相對地固定於支撐底座以三度空間中界定 出對準位置; 可調整夾頭組件,可滑動地位於滑動軌條上以移動光學 .晶片於裝置交換位置與對準位置之間,該可調整夾頭組件 在X軸方向為可移動的以及在Z軸方向為可調整的以反應χ 軸方向之力量;以及 驅動單元,其連接至可調整夾頭組件以施加χ軸力量至可 調整夾頭組件。 2. 依據中請專利範圍第1項之自動化晶片固定器,其中驅動 單元更進一步包含: 可旋轉螺絲元件,其連接至可調整夾驗件,其中該可調 整螺絲元件藉由旋轉而施加χ軸之力量; 經濟部中央梯準局負工消費合作社印农 步進馬違,其連接至可旋轉螺絲元件以轉動螺絲元件,其 中步進馬達麵時針《料方向為可獅的;以及 可程式化邏輯控制器,其連接至步進馬達以控制步進馬 達。 3·依據f請專利範圍第1項之自動化晶片时器,其中對齊 構件更進一步包含: X軸對準參初,其躺料齊之雜鮮於难參考位AS B8 CS D8 VI. Patent Application Fanyuan 1. An automated wafer holder to position the optical wafer in the fiber tail lobe, § The optical wafer has an aligned edge and an aligned surface, where the automated wafer holder positions the optical wafer at With X axis, y axis, 2: In the third degree space of the axis right-angle coordinate system, the automatic wafer holder includes: a support base having a sliding rail parallel to the X axis; an alignment member which is relatively fixed to the support base to The alignment position is defined in the three-degree space; the adjustable chuck assembly is slidably located on the sliding rail to move the optics. The wafer is between the device exchange position and the alignment position. The adjustable chuck assembly is in the X-axis direction Is movable and adjustable in the Z-axis direction to reflect the force in the χ-axis direction; and a drive unit connected to the adjustable chuck assembly to apply the χ-axis force to the adjustable chuck assembly. 2. The automatic wafer holder according to item 1 of the patent scope, wherein the driving unit further includes: a rotatable screw element connected to the adjustable clamping test piece, wherein the adjustable screw element applies the χ axis by rotating The power of the Central Ladder Bureau of the Ministry of Economic Affairs, the Consumers' Cooperative Consumer Cooperative, is a stepping horse, which is connected to a rotatable screw element to turn the screw element. A logic controller connected to a stepper motor to control the stepper motor. 3. The automatic chip timing device according to item 1 of the patent scope, in which the alignment component further includes: X-axis alignment reference, the material of which lays together is difficult to refer to 申請專利範園 A8 Β8 C8 D8 4 經濟部中央橾準局貝工诮费合作社印製 置將光學晶片對準幹X軸參考位置;以及 X軸對準參考位置,其藉由將對齊之表面對準於2抽參考位 置將光f晶片對準於Z軸參考位置。 4·依據申請專利範圍第1項之自動化晶片固定器,其中對齊 構件更進一步包含: 柱構件,其固定於支撐底座以及在平行於z軸方向延伸, 其中X軸對準參考位置至少為柱構件之表面; 懸臂樑構件,其固定於樑構件及在平行於支撐底座方向 延伸’其中Z轴對準參考位置為懸臂樑構件之表面區域;及 可調整停止塊,其可移動地連接至該懸臂樑構件,其中Z 轴對準參考位置位於可調整停止塊構件與柱構件之間。 5. 依據申請專利範圍第1項之自動化晶片固定器,其中可調 整夾頭組件藉由將對齊邊緣對準於x轴對準參考位置以及 對齊表面與z軸對準參考位置對齊而產生對準。 6. 依據申請專利範圍第5項之自動化晶片固定器,其中可調 整停止塊構件包含停止垂片以防止可調整夾頭組件在X軸 方向移動而在對準位置。 7. 依據申請專利範圍第4項之自動化晶片固定器,其中可調 整夹頭組件更進一步包含: 轉移構件位於滑動執條上以及可操作地連接至驅動單元 以及在X軸方向為可移動以反應X軸方向之力量;以及 固定光學晶片之可調整平台,該可調整平台位於轉移構 件上以及在Z軸方向為可調整的以反應轉移構件在X軸方向 之移動;其中可調整平台以及光學晶片在裝置可交換位置 C請先閱讀嘴兩之注事項再填寫本頁〕 ------訂------^-----^--- 泰紙張从適用t國國家標準(CNS )八4麟(训㈣祕着) 5 4 B8 C8 •D8六、申請專利範圍 5 經濟部中央棣準局貝工消費合作社印製 處以整個單元地I輩於可調整夾頭組件巾及由其中卸除。 8. 依據申請專利範圍第7項之自動化晶片固定器,其中轉移 構件更進一步包含: 第一傾斜表面以支撐可調整平台; 驅動螺絲在X軸方向移動轉移構件;以及對準於可調整平 台之第一邊緣於裝置交換位置中。 9. 依據申請專利範圍第4項之自動化晶片固定器,其中可調 整平台更進一步包含: 載台構件,其具有載台以固定光學晶片,對準邊緣以及第 二傾斜表面相對於第一傾斜表面,其中對準邊緣,對準於第 一導引邊緣於交換位置中;以及 嵌合構件連接至載台構件,在對準位置中與可調整停止 塊連結。 10. 依據申請專利範圍第9項之自動化晶片固定器,其中在乂 軸方向觉轉移構件移動朝向對準位置促使對齊邊緣靠在χ 軸對準參考位置上導致第二傾斜表面滑動於第一傾斜表面 上及因而在ζ軸方向移動對齊表面朝向ζ軸對準參考位置。 11 ‘依據申請專利範圍第9項之自動化晶片固定器,其中在X 軸方向受轉移構件移動朝向交換位置迫使嵌合構件靠在可 調整停止塊齡上促使帛二傾面義於帛-傾斜表面 上以及因而在ζ軸方向移動載台構件朝向支撐底座持續到 嵌合構件由可調整停止構件解除啣接。 12.依據申請專利範圍第9項之自動化晶片固定器,其中載 台構件更進一步包含: 本紙張从通用中國國( 2iqx29_ ^ ------:----- (請先聞讀背面之注f項再填寫本頁) 訂— ‘線 45ί 〇9s AS B8 C8 D8 、申請專利範圍 經濟部中央標準局員工消費合作社印製 彈性楔形物放置於載台平面上位於嵌合構件以及光學晶 片之間,其中該彈性楔形物以均勻的力量緊壓對齊邊緣靠 在X軸對準位置;以及 ' 彈性墊放置於載台表面上以彈性地支撐光學晶片,其中 該彈性墊以均句的力量緊壓對齊表面而靠在Z軸對準^考 位置。 13.伕據申請專利範圍第9項之自動化晶片固定器,其中選 擇彈性楔形物以配合光學晶片之大小與形狀。 Η依據申請專利範圍第7項之自動化晶片固定器,其中當 可調整平台以及光學晶片裝置於可調整夾頭組件内藉由放 置可調整平台於轉移構件上時,產生y軸對準。 15·依據申請專利範圍第7項之自動化晶片固定器,其中可 調整夾頭組件更進一步包含: 彈性楔形物以X轴方向均勻力量緊壓對齊邊緣靠在對齊 構件上;以及彈性墊以z轴方向均勻力量緊壓對齊表面靠在 對齊構件上。 16. —種自動化將光學晶片定位於光纖尾瓣系統中之方法, 該系統具有自動化晶片固定器,該光學晶片具有對齊邊緣 以及對齊表面,其中該自動化晶片固定器包含:支撐底座, 其具有滑動軌條;對齊構件,其固定相對於支撐底座在具有 X轴,y軸,與2軸直角座標系統之三度空間中界定出光學晶 片對準位置;該自動地將光學晶片定位方法包含下列步驟: 提供可調舰雜件放置於滑動轉_條上以移動光 學晶片於裝置交換位置與對準位置之間,該可調整夾頭组 本紙張纽適用中困國家標车(Μ ) Μ规路(2l〇X^^j-y (請先閲讀背面之注意事項再填寫本頁〕 訂---- 17451 Dig A8 BB C8 D8 六、申請專利範園 經濟部中央標率局貝工消費合作社印製 件在X軸方向為可移.動的以及在Z軸方向為可調整的以反應 X軸方向之力量; 施加5軸力量以移動光學晶片由裝置交換位置至對準位 置;以及 將光纖尾瓣連接至光學晶片。 17. 依據申請專利範圍第16項之方法,其中提供可調整夾頭 組件步驟更進一步包含: 提供轉移構件位於滑動轨條上以及可操作地連接至驅動 .單元以及在X軸方向為可移動以反應X軸方向之力量;以及 提供可調整平台以固定光學晶片,該可調整平台位於轉 移構件上以及在Z軸方向為可調整的以反應轉移構件在义軸 方向之移動;其中可調整平台以及光學晶片在裝置可交換 位置處以整個單元地裴置於可調整夾頭組件中以及可由其 中卸除。 18. 依據申請專利範圍第i 7項之方法,其中對齊構件更進一 步包含柱構件,其具有X軸對準參考位置;懸臂樑構件,其固 定於柱構件以及具有z軸對準參考位置;以及可調整停止塊 構件連接至該懸臂樑構件,其在對準過程中鎖定可調整平 台。 19. 依據申請專利範圍第18項之方法,其中施加X軸力量更 進一步包含下列步驟: 緊壓對齊邊緣靠在X軸對準參考位置以產生X軸對準,其 中緊壓步驟促使可調整平台滑動於轉移構件上以及在z軸 方向移動朝向z軸對準參考位置;以及 (请先閲讀背面之注$項再填寫本頁) 訂--- 0.. 本紙張纽邮(2丨 45, 0f替 經濟部中央標丰局貝工消費合作社印製 、申請專利範圍 緊壓對齊表面靠在Z軸對準參考位置以產生2軸對準,其 中當X軸對準以及2軸對準產生作用時即產生位置對準。 20.依據申請專利範圍第is項之方法,其中更進一步包含由 對準位置移動光纖尾瓣裝置至裝置交換位置。 21·依據申請專利範圍第2〇項之方法,其中由對準位置移動 光纖尾瓣裝置至裝置交換位置之步驟包含下列步驟: 緊壓可調整平台靠在可調整停止塊構件因而促使可調整 平台滑動於轉移構件上以及在z軸方向移動朝向支撐底座 持續到可調整平台由可調整停止構件解除;以及 共同地在X軸方向移動轉移構件以及可調整平台朝向裝 置之交換位置。 22.依據申請專利範圍第項之方法,其中更進一步包含下 列步驟: 在交換位置藉由提高可調整平台離開轉移構件卸除光纖 尾瓣化光學晶片;以及 在裝置交換位置時藉由放置可調整平台於轉移構件上以 裝置第二光學晶片。 (請先閲讀背面之注意事項再填寫本頁) 訂 線 卷紙張尺度適用中國國家揉準(CNS ) A4規格(Apply for a patent Fanyuan A8 Β8 C8 D8 4 Printed by the Central Ministry of Economic Affairs, Central Bureau of Standards and Technology, Cooperatives, and aligns the optical chip with the dry X-axis reference position; and the X-axis aligns the reference position by aligning the aligned surface with Align the optical f-chip with the Z-axis reference position at the 2 drawing reference position. 4. The automatic wafer holder according to item 1 of the patent application scope, wherein the alignment member further includes: a column member fixed to the support base and extending parallel to the z-axis direction, wherein the X-axis alignment reference position is at least a column member The surface of the cantilever beam member, which is fixed to the beam member and extends in a direction parallel to the support base, where the Z-axis alignment reference position is the surface area of the cantilever beam member; and an adjustable stop block which is movably connected to the cantilever Beam member with the Z-axis alignment reference position between the adjustable stop block member and the column member. 5. The automated wafer holder according to item 1 of the patent application scope, wherein the adjustable chuck assembly is aligned by aligning the alignment edge to the x-axis alignment reference position and the alignment surface to the z-axis alignment reference position. . 6. The automated wafer holder according to item 5 of the patent application, wherein the adjustable stop block member includes a stop tab to prevent the adjustable chuck assembly from moving in the X-axis direction and in the aligned position. 7. The automatic wafer holder according to item 4 of the patent application scope, wherein the adjustable chuck assembly further comprises: a transfer member located on the slide bar and operatively connected to the drive unit and movable in the X-axis direction to respond Force in the X-axis direction; and an adjustable platform that fixes the optical chip, the adjustable platform is located on the transfer member and is adjustable in the Z-axis direction to reflect the movement of the transfer member in the X-axis direction; among which the platform and the optical chip can be adjusted At the interchangeable position of the device, please read the notes of the mouth two before filling in this page] ------ Order -------- ^ ----- ^ --- Thai paper from the applicable national standards (CNS) Eight 4 Lins (Execution Secret) 5 4 B8 C8 • D8 VI. Application for patents 5 The Printing Office of the Central Consumers' Bureau of the Ministry of Economic Affairs of the Bayer Consumer Cooperative Co. uses the entire unit to adjust the chuck assembly towel and Remove from it. 8. The automated wafer holder according to item 7 of the scope of patent application, wherein the transfer member further includes: a first inclined surface to support the adjustable platform; a driving screw moving the transfer member in the X-axis direction; and alignment with the adjustable platform The first edge is in the device exchange position. 9. The automated wafer holder according to item 4 of the patent application scope, wherein the adjustable platform further includes: a stage member having a stage to fix the optical wafer, an alignment edge, and a second inclined surface relative to the first inclined surface Wherein the alignment edge is aligned with the first guide edge in the exchange position; and the fitting member is connected to the stage member and is connected with the adjustable stop block in the alignment position. 10. The automated wafer holder according to item 9 of the scope of patent application, wherein the movement of the sense transfer member in the Z axis direction toward the alignment position causes the alignment edge to lean against the χ axis alignment reference position causing the second inclined surface to slide to the first inclination The alignment surface is moved on the surface and thus in the z-axis direction toward the z-axis to align the reference position. 11 'The automated wafer holder according to item 9 of the scope of patent application, wherein the transfer member moves in the X-axis direction toward the exchange position, forcing the fitting member to lean on the adjustable stop block age, which promotes the 帛 -tilt surface to mean 帛 -inclined surface The stage member is moved upward and thus in the z-axis direction toward the support base until the fitting member is disengaged by the adjustable stop member. 12. The automatic wafer holder according to item 9 of the scope of patent application, wherein the stage member further includes: This paper is from General China (2iqx29_ ^ ------: ----- (Please read the back first Note f item, please fill in this page again) Order — 'Line 45ί 〇9s AS B8 C8 D8, patent application scope, Central Standards Bureau, Ministry of Economic Affairs, Consumer Consumption Cooperative, printed elastic wedges, placed on the plane of the stage, located on the fitting member and optical chip Between, wherein the elastic wedge presses the alignment edge against the X-axis alignment position with a uniform force; and the 'elastic pad is placed on the surface of the stage to elastically support the optical chip, wherein the elastic pad uses uniform force Press the alignment surface tightly against the Z-axis alignment test position. 13. 伕 According to the automatic wafer holder of item 9 of the patent application scope, the elastic wedge is selected to match the size and shape of the optical wafer. Η According to the patent application scope The automated wafer holder of item 7, wherein when the adjustable platform and the optical wafer device are placed in the adjustable chuck assembly by placing the adjustable platform on the transfer member, a y-axis pair is generated 15. The automatic wafer holder according to item 7 of the scope of patent application, wherein the adjustable chuck assembly further includes: an elastic wedge presses the alignment edge against the alignment member with a uniform force in the X axis direction; and the elastic pad is z Uniform force in the axial direction presses the alignment surface against the alignment member. 16. A method for automatically positioning an optical wafer in a fiber tail lobe system having an automated wafer holder, the optical wafer having an alignment edge and an alignment surface, The automated wafer holder includes: a support base with a sliding rail; and an alignment member that fixes an optical wafer pair in a three-degree space with an X-axis, a y-axis, and a 2-axis rectangular coordinate system relative to the support base. The method for automatically positioning an optical chip includes the following steps: Provide an adjustable ship miscellaneous part on a sliding rotary bar to move the optical chip between the device exchange position and the alignment position. The adjustable chuck assembly Paper New Zealand is applicable to the national standard vehicles (Μ) Μ regulatory road (2l0X ^^ jy (Please read the precautions on the back before filling Page] Order ---- 17451 Dig A8 BB C8 D8 VI. Apply for a patent Fanyuan Economic Bureau Central Standards Bureau Shellfish Consumer Cooperatives printed parts can be moved in the X axis direction. It can be adjusted in the moving and Z axis direction. To reflect the force in the X-axis direction; to apply a 5-axis force to move the optical chip from the device exchange position to the alignment position; and to connect the optical fiber tail lobe to the optical chip. 17. The method according to item 16 of the scope of patent application, which provides The step of the adjustable chuck assembly further includes: providing a transfer member on the slide rail and operatively connected to the drive. The unit and being movable in the X-axis direction to reflect the force in the X-axis direction; and providing an adjustable platform to be fixed Optical wafer, the adjustable platform is located on the transfer member and is adjustable in the Z-axis direction to reflect the movement of the transfer member in the sense axis direction; wherein the adjustable platform and the optical wafer are placed on the entire unit at the exchangeable position of the device. In and out of the adjustable collet assembly. 18. The method according to item i 7 of the patent application scope, wherein the alignment member further comprises a column member having an X-axis alignment reference position; a cantilever beam member fixed to the column member and having a z-axis alignment reference position; and An adjustable stop block member is connected to the cantilever member, which locks the adjustable platform during alignment. 19. The method according to item 18 of the patent application scope, wherein applying the X-axis force further includes the following steps: pressing the alignment edge against the X-axis alignment reference position to generate the X-axis alignment, wherein the pressing step promotes the adjustable platform Slide on the transfer member and move in the z-axis direction towards the z-axis to align the reference position; and (please read the note on the back before filling this page) Order --- 0 .. This paper New Post (2 丨 45, 0f Printed for the Beijiao Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs, and applied for patents. Press the alignment surface against the Z-axis alignment reference position to generate 2-axis alignment, where the X-axis alignment and the 2-axis alignment have effects Position alignment occurs immediately. 20. The method according to item is in the scope of the patent application, which further includes moving the fiber tail lobe device from the alignment position to the device exchange position. 21. According to the method in scope 20 of the patent application, The steps of moving the fiber optic tail lobe device from the alignment position to the device exchange position include the following steps: Squeezing the adjustable platform against the adjustable stop block member thereby urging the adjustable platform to slide over the transfer member And moving in the z-axis direction toward the support base until the adjustable platform is released by the adjustable stop member; and collectively moving the transfer member in the x-axis direction and the adjustable platform's switching position toward the device. The method further includes the following steps: removing the optical fiber tail lobe by moving the adjustable platform away from the transfer member at the exchange position; and placing the adjustable platform on the transfer member to set the second position when the device is switched. Optical chip. (Please read the precautions on the back before filling in this page.) The size of the paper for the thread guide is applicable to China National Standard (CNS) A4 (
TW89113456A 1999-07-05 2000-07-04 Automated chip/phasar holder TW451095B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP99401673A EP1067417A1 (en) 1999-04-26 1999-07-05 Automated Optical Chip Holder in a Pigtailing System

Publications (1)

Publication Number Publication Date
TW451095B true TW451095B (en) 2001-08-21

Family

ID=8242040

Family Applications (1)

Application Number Title Priority Date Filing Date
TW89113456A TW451095B (en) 1999-07-05 2000-07-04 Automated chip/phasar holder

Country Status (4)

Country Link
JP (1) JP2003520352A (en)
CN (1) CN1360706A (en)
CA (1) CA2378380A1 (en)
TW (1) TW451095B (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100403323C (en) * 2005-12-20 2008-07-16 华为技术有限公司 System and method for determining disc fiber position on optic module PCB with tail fiber
CN101697024B (en) * 2009-10-23 2011-06-08 东南大学 Single-lens multi-angle high-magnification photonic chip coupling and packaging device
JP5757040B2 (en) * 2010-12-13 2015-07-29 住友電工デバイス・イノベーション株式会社 Optical module alignment method
CN106933257B (en) * 2017-03-15 2023-10-13 广西中科阿尔法科技有限公司 Positioning mechanism of chip intelligent inspection machine
CN109279318B (en) * 2018-08-22 2020-10-27 蒋若何 Transfer transition table for conveying assembly line

Also Published As

Publication number Publication date
CN1360706A (en) 2002-07-24
CA2378380A1 (en) 2001-01-18
JP2003520352A (en) 2003-07-02

Similar Documents

Publication Publication Date Title
TW403690B (en) A method and apparatus for chemical mechanical polishing
US5926594A (en) System and method for aligning and attaching optical fibers to optical waveguides, and products obtained thereby
TW200940291A (en) Line drawing device and method
TW477008B (en) Substrate processing apparatus and method
WO2001097260A3 (en) Holder for a substrate cassette and device provided with such a holder
TW451095B (en) Automated chip/phasar holder
US5345323A (en) Techniques for polishing optical fiber ends
JP2003089538A (en) Breaking device and breaking method for brittle material substrate
US6271658B1 (en) Universal Docking System
CN112234013A (en) Different-size wafer bonding positioning device, bonding body and preparation method thereof
JPH0897133A (en) Sample holder
US6290401B1 (en) Automated chip/phaser holder
EP0881538B1 (en) Means for supporting a mask
TW473618B (en) A fibre aligning structure
JP3349572B2 (en) Thin plate fixing device
TWI233150B (en) Correction method of curved mask and exposure device having correction mechanism of the same
JP3340151B2 (en) Wafer mounting device
US20070019310A1 (en) Facet mirrors and a method for producing mirror facets
CN110252905B (en) Bending device of chip pin
CN208368480U (en) Wafer side stamp reading code stores all-in-one machine
JPH0610690B2 (en) Optical device package
JP3708984B2 (en) Fixing device for workpiece
TW543135B (en) Wafer alignment device
JPH08167553A (en) Work fixing device
CA2010480C (en) Method and apparatus for facilitating loading of a panel processing machine and positioning of artwork on a work surface thereon

Legal Events

Date Code Title Description
GD4A Issue of patent certificate for granted invention patent
MM4A Annulment or lapse of patent due to non-payment of fees