44965 0 A7 B7 五、發明說明（1 ) 本發明係關於一種自動閥，係供化學工廠、半導體製 造、食品、生物科技等各種產業界之流體輸送配管之用， 進一步詳而§之，係有關於一種簡潔、流體壓力耗損少之 自動閥。 迄今’用於半導體製造等之自動閥係如第5圖所示， 具有節流閥型之構造。以下說明其構造。 40為閥本體，係於相對向之位置上形成有入口流路41 及出口流路42,且於中央部形成一可將入口流路41與出 口流路42相連通之開口部43 ,並於上部設有一具有環狀 閥座44之隔壁45。在闊本體40内係藉隔壁45將入口流 路41及出口流路42隔離，並同時形成有一使兩流路41、 42彎曲之流路。又，在環狀閥座44之外周係形成有環狀 槽46^47為隔膜，於中央部係形成有碟狀閥體48，且於 周圍形成有膜部49。 5〇為圓筒狀缸本體，側面上部係設有第i進氣口 5 1， 而於側面下部則設有第2進氣口 52，且於内部裝置有一活 塞部53，該活塞部53可作進退滑動者，和閥本體4〇 一起 夾持固定隔膜47。又，於活塞部53下方形成有閥轴部54, 和隔膜47上部連結固定。55為缸蓋體，係嵌著固定於缸 本體50上部。 但是，具有前述構造之自動閥係因作為該閥之驅動部 份之缸本體50、缸蓋體55之存在而使閥體變大，又，將 該間配管時也係於相對於配管線呈垂直方向之狀態下設置 該閥（參照第6圖），不得不破保一大的配管空間，使間於 本紙張尺度適用中國國家標準（CMS)A4规格（21Q x 297公爱） (請先閱讀背面之注意事項再填寫本頁) % i — —-----訂---------線 經濟部智慧財產局員工消費合作社印制取 -4- ΛΓ B； 經濟部智慧財產局員工消費合作社印製 五、發明說明（2 ) 半導體製造相關裝置内配管中之所佔有空間率昇高，並使 該裝置本體也隨之增大。又，因流路4卜42係呈彎曲狀態， 而使流體壓力耗損變大，無法得到所期望的Cv值。進而， 該閥之前述環狀槽46等將成為液體蓄積處，則因閥中液體 的腐敗而導致配管裝置全體有不好的影響。特別是對要求 南純度流體之半導體製造、食品、生物科技等之產業界而 言’會造成致命的影響，使產品品質低落。 本發明係有鑑於前述習知技術之問題點而所構建者， 其目的便是提供一種自動閥，其係不須像以往的自動閥般 要有寬廣的配管空間，且使閥整體更為簡潔，又與習知自 動閥相比，其Cv值為高，進一步地也可將流體流通時閥 内之液體蓄積部減少者。 本發明之自動閥係，參照用以顯示最佳實施態樣之第！ 至4圖’其特徵在於包含有：—筒狀構材]2，係於内部形 成有一具有流入口 1及流出口 2之直線流路3 ’而在外周 則係由流入口1側沿流路軸線方向依序一體形成有螺合部 4、小口徑凸緣部5、與小口徑凸緣部5接連並作自由伸縮 之伸縮軟管部6、於其外緣側周面嵌合有一密封材7且可 作則進後退之圓環狀大口禋凸緣部8、形成於流出口 2周 圍之閥體部9 ’及一與閥體部9外周緣接合且於周緣部具 有-圓環狀嵌合突部1 〇之薄骐部1 ! ; _蓋形螺帽1 5，係 固疋於筒狀構件1 2之螺合部4，於内側用以將小口徑凸緣 部5固疋於具有一與筒狀構件丨2的小口徑凸緣部5相嵌合 之奴差一 13_<_蓋體14上；筒狀本體23 .係固定於蓋體14 褒1----r---訂---------線 (鹌先閱-背面之注意事項再填寫本頁) 44965 Ο A： _____Β7_____ 五、發明說明（3 ) 一端面上，且具有一用以收容筒狀構材12之伸縮軟營部6 之收容部16,及一與收容部16鄰接設置且與茼狀構材12 之大口徑凸緣部8相嵌合而可滑動之段差部1 7，並於側面 設有第丨作動流體流通口 1 9及第2作動流體流通口 2 j , 其中該第1作動流體流通口 1 9係連通於由筒狀構件丨2之 小口徑凸緣部5、伸縮軟管部6、大口徑凸緣部8及收容部 16所包圍形成之第1環狀空間1 8;而前述第2作動流體流 通口 21則係連通於由筒狀構件12之大口徑凸緣部8、薄 膜部11、及段差部17所包圍形成之第2環狀空間20，且 以支持體27為中介而與後述之閥座體22同時夾持固定筒 狀構件12中的薄膜部11的圓環狀嵌合突部1 〇 ;及閥座體 22 ’係於一端中央部設有一凸狀閥座24，且於周圍設有多 數流路25 ’而在與前述支持體27相接觸之部位則設有嵌 合槽35 ’並於流路25下部形成有流出開口 26。 本發明之自動閥中各構件之材質並無特別限定，也可 為金屬也可為塑膠材質’但可舉氟素系樹脂為例，諸如 PTFE、PFA等為適當之材質。 圓式之簡單說明 第1圖是用以顯示本發明之自動閥之開啟狀態之縱剖 面圖β 第2圖是用以說明第1圖之自動闊之底面圖。 第3圖是用以顯示第1圖之自動閥之關閉狀態之縱剖 面圖。 (請先閱讀背面之注意事項再填寫本頁) 农----l·---訂---------線- 經濟部智慧財產局員工消費合作社印*J^ 本纸張尺度適用中國國豕標準（CMS)A4規格（·>ι〇 297公釐） B： 五、發明說明（4 ) 第4圖是用以顯示將第1圖之自動間配管後之狀態之 正面圖。 第5圖是顯示習知自動閥之復動式自動閥關閉狀態之 縱剖面圖。 經濟部智慧財產局員工消費合作社印Κ 第6 圖是用以顯示將第5 圖之自動閥配管之狀態之 面圖。 圖中元件標號說明 1 ....... ，.流入口 2...... …流出口 3 ....... ..直線流路 4...... ...螺合部 5 ....... ..小口徑凸緣部 6...... ...伸縮軟管部 7 ....... ..密封材 8...... ...大口徑凸緣部 9 ....... ..閥體部 10 .... ....嵌合突部 11...... ..薄膜部 12 .... 筒狀構件 13...... ..段差部 14 .... ----豈體 15...... ..蓋形螺帽 16 .... l .收容部 17...... ..段差部 18 .... 第1環狀空間 19...... ..第1作動流體流通口 20...... ..第2環狀空間 21...... ..第2作動流體流通口 22...... ..閥座體 23 .... ....本體 24...... ..閥座 25 ....流路 26...... ..流出開口 27 ... ....支持體 28,29 . ,..螺紋部 30,32,33,34,36 .... 0 ^ 1$^ 31...... ,..止動面 35 ... ----嵌合槽 (-"'""背面之注帝；事項再填寫本頁) 4 4965 Ο Λ7 五、發明說明（5 ) 37.… ....螺著部 40 ... •…閥本體 41·..· ....入口流路 42 ... …·出口流路 43.… ....開口部 44…, .…環狀閥座 45.... ....隔壁 46 .... ....環狀槽 47.... ....隔膜 48 .... ....閥體 49.… ....膜部 50 .... …缸本體 51，... .…第1進氣口 52 .... …第2進氣口 53.… ....活塞部 54 .... ...閥軸部 55.·.. ....缸蓋體 (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 本發明之實施形態 以下參照圖面說明本發明之實施態樣，但本發明當然 並不只限於本實施態樣。第1圖是顯示關於本發明之自動 閥之實施例-復動式自動閥’其開啟狀態之剖面圖。第2圊 是第1圖的底面圖。第3圖是顯示第1圖之自動閥的關閉 狀態之剖面圚。第4圖是顯示將第I圊之自動間配管後之 狀態之正面圖。 在圖中’ 12為PEFT製之筒狀構件，係於内部形成有 一具有流入口 1及流出口 2之直線流路3，而在外周則係 由流入口 1侧沿流路軸線方向依序一體形成有：在内周及 外周上形成有螺紋部28、29之螺合部4 ;圓環狀小口徑凸 緣部5 ;與小口徑凸緣部5連接並作自由伸縮且厚度為 0.5mm之伸縮軟管部6 ;於其外緣側周面嵌合有一 〇形環 (密封材7)且可作前進後退之圓環狀大口徑凸緣部8 ;形成 衣---— l·!訂-------- _線. 本.·Λ張&度遇用中國國家標準（CNS)A4規格⑵Qx 297公髮 Λ： 經濟郜智慧財產局員工消費合作社如 五、發明說明（6 ) 出口 2周圍之閥體部9 ;及-與閥體部9外周緣 合且於周緣部形成有一圓環狀嵌合突部10,其厚度為 ◦.3職之濤骐部"。又’在本實施態樣中伸縮軟管部6 : 只設有一 -ώττ . 疋 4 ’但因應目的也可設置多數山部。又，μ w ^ '、便4之閥座24相接之部份係呈平坦之狀態，但該 乃也可叹置圓環狀突部，只要是一在閉閥時可呈密封狀 態之構造即可’形狀並無特別限定。 1 5為PTFE製之蓋形螺帽，係與筒狀構件丨2之螺合部 4外周相螺合。Μ則為蓋體，於内側係具有一段差部13， 該段差部13係以彈性密封構件之〇形環30為中介而與小 口徑凸緣部5相嵌合。該筒狀構件12之小口徑凸緣部5 係藉使蓋形螺帽〗5栓在螺合部4外周而固定於蓋體〗4 ^ 又，在本實施例中蓋形螺帽丨5係螺著於螺合部4外周上， 也可以黏著等方式進行，只要可使小口徑凸緣部5固定於 蓋體14即可。 23為pTFE製之筒狀本體，於内部係具有一用以收容 筒狀構件12之伸縮軟管部6之收容部16，及一與收容部 16鄰接設置且與筒狀構件I]之大口徑凸緣部8相嵌合可 作滑動狀態之段差部1 7，並於收容部〗6及段差部1 7之界 面上形成有一止動面3 1。又，於側面設有第〗作動流體流 通口 19及第2作動流體流通口 2〇，其中該第1作動流體 流通口 1 9係連通於由筒狀構件1 2之小口徑凸緣部5 '伸 縮軟管部ό、大口徑凸緣部8及收容部1 6所包圍形成之第 1環狀空間1 8 ;而前述第2作動流體流通口 2 ]則係連通於 -¾ 裝-----r---訂i if I I {請乞閡-背面之注音)事項再填寫本頁--- I：] 44965 044965 0 A7 B7 V. Description of the invention (1) The present invention relates to an automatic valve, which is used for fluid transportation piping in various industries such as chemical factories, semiconductor manufacturing, food, biotechnology, etc. Further detailed and §, there are This is a simple automatic valve with less fluid pressure loss. As shown in Fig. 5, the conventional automatic valve system for semiconductor manufacturing has a throttle-type structure. The structure will be described below. 40 is a valve body, and an inlet flow path 41 and an outlet flow path 42 are formed at opposite positions, and an opening 43 is formed at the central part which can communicate the inlet flow path 41 and the outlet flow path 42. A partition wall 45 having an annular valve seat 44 is provided in the upper part. In the wide body 40, an inlet flow path 41 and an outlet flow path 42 are separated by a partition wall 45, and a flow path that bends the two flow paths 41 and 42 is formed at the same time. An annular groove 46 ^ 47 is formed on the outer periphery of the annular valve seat 44 as a diaphragm, a dish-shaped valve body 48 is formed on the central portion, and a membrane portion 49 is formed on the periphery. 50 is a cylindrical cylinder body, an i-th air inlet 51 is provided at the upper part of the side, and a second air inlet 52 is provided at the lower part of the side, and a piston part 53 is installed inside the piston part 53. The person who moves forward and backward slides the fixed diaphragm 47 together with the valve body 40. A valve shaft portion 54 is formed below the piston portion 53 and is fixed to the upper portion of the diaphragm 47. 55 is a cylinder head body, which is embedded and fixed to the upper part of the cylinder body 50. However, the automatic valve having the aforementioned structure has a larger valve body due to the existence of the cylinder body 50 and the cylinder head body 55 which are the driving parts of the valve. Moreover, the pipe is also connected to the pipeline with the When the valve is installed in a vertical direction (refer to Figure 6), a large piping space has to be broken, so that the Chinese paper standard (CMS) A4 (21Q x 297) can be used for this paper size (please read first) Note on the back, please fill out this page again)% i — —----- Order --------- Printed by the Consumers' Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs -4- ΛΓ B; Intellectual Property of the Ministry of Economic Affairs Printed by the Bureau ’s Consumer Cooperatives V. Description of the Invention (2) The occupied space ratio in the pipes of semiconductor manufacturing related devices has increased, and the device itself has also increased. In addition, because the flow path 4 and 42 are in a bent state, fluid pressure loss is increased, and a desired Cv value cannot be obtained. Furthermore, the annular groove 46 and the like of the valve will become a liquid accumulation place, and the entire piping device will be adversely affected by the deterioration of the liquid in the valve. Especially for the semiconductor manufacturing, food, biotechnology, and other industries that require South-purity fluids, it will have a fatal impact and lower product quality. The present invention was constructed in view of the problems of the aforementioned conventional technology, and its object is to provide an automatic valve, which does not require a wide piping space like the conventional automatic valves, and makes the valve more compact as a whole. Compared with the conventional automatic valve, the Cv value is higher, and the liquid accumulation portion in the valve can be reduced when the fluid is flowing. The automatic valve system of the present invention is referred to the first to show the best implementation! Figures 4 through 4 are characterized by including:-a cylindrical structure] 2, a linear flow path 3 with an inlet 1 and an outlet 2 is formed inside the system, and a flow path is formed from the inlet 1 side on the outer periphery. The axial direction is integrally formed with a screw joint portion 4, a small-diameter flange portion 5, a telescopic hose portion 6 connected to the small-diameter flange portion 5 and being freely retractable, and a sealing material is fitted on the outer peripheral side peripheral surface. 7 and a ring-shaped large mouth 禋 flange portion that can lead forward and backward, a valve body portion 9 ′ formed around the outflow port 2, and a valve body portion 9 that is engaged with the outer periphery of the valve body portion 9 and has a ring-shaped insert at the periphery. The thin projection 1 of the engaging protrusion 1 〇! _ The cap nut 15 is fastened to the screw engagement portion 4 of the cylindrical member 12 and is used to fix the small-diameter flange portion 5 on the inner side. A slave member 13 that fits into the small-diameter flange portion 5 of the cylindrical member 丨 2 on the cover 14; the cylindrical body 23 is fixed to the cover 14 褒 1 ---- r-- Order --------- line (read quail first-note on the back, then fill out this page) 44965 〇 A: _____ Β7 _____ V. Description of the invention (3) One side is provided with a cylindrical structure for receiving 12 flexible telescopic camp The receiving portion 16 of 6 and a slidable step portion 17 which is arranged adjacent to the receiving portion 16 and is slidably fitted with the large-diameter flange portion 8 of the cymbal structure 12 and is provided with a first moving fluid on the side. Port 19 and second actuating fluid flow port 2 j, wherein the first actuating fluid flow port 19 is connected to the small-diameter flange portion 5, the telescopic hose portion 6, and the large-diameter flange by the cylindrical member 2 The first annular space 18 formed by the portion 8 and the receiving portion 16 is formed; and the second actuating fluid flow opening 21 is connected to the large-diameter flange portion 8, the membrane portion 11, and the step of the cylindrical member 12. A ring-shaped fitting protrusion 1 of the second annular space 20 surrounded by the portion 17 and holding and fixing the film portion 11 in the cylindrical member 12 simultaneously with a valve seat body 22 to be described later with the support 27 as an intermediary. 〇; and the valve seat body 22 ′ is provided with a convex valve seat 24 at the center of one end, and a plurality of flow paths 25 ′ around the periphery, and a fitting groove 35 ′ at a portion in contact with the support 27. An outflow opening 26 is formed in a lower portion of the flow path 25. The material of each component in the automatic valve of the present invention is not particularly limited, and it may be a metal or a plastic material ', but a fluorine-based resin is taken as an example, and suitable materials such as PTFE and PFA are used. Brief description of the circle type. Fig. 1 is a longitudinal sectional view for showing the opened state of the automatic valve of the present invention. Fig. 2 is a bottom view for explaining the automatic widening of Fig. 1. Fig. 3 is a longitudinal sectional view showing a closed state of the automatic valve of Fig. 1; (Please read the precautions on the back before filling this page) Agriculture ---- l · --- Order --------- Line-Printed by the Consumers' Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs * J ^ This paper The scale is applicable to China National Standard (CMS) A4 specification (· > ι〇297 mm) B: V. Description of the invention (4) Figure 4 is used to show the front side of the state after piping the automatic room in Figure 1 Illustration. Fig. 5 is a longitudinal sectional view showing a closed state of a double-acting automatic valve of a conventional automatic valve. Printed by the Intellectual Property Bureau of the Ministry of Economic Affairs, Consumer Cooperatives. Figure 6 is a diagram showing the state of piping the automatic valve in Figure 5. Description of component numbers in the figure 1..., Inflow inlet 2 ...… outflow outlet 3.... Straight flow path 4 ... ... Screwed part 5 .. .. Small-diameter flange part 6... Telescopic hose part 7.... Sealing material 8.... ... Large-diameter flange portion 9 ....... .. Valve body portion 10 ...... Fitting protrusion 11 ... .. Film portion 12 ... .. cylindrical member 13 ... .. step difference 14 .... ---- Q. 15 ... .. cap nut 16 .... l receiving section 17. ..... .. stepped portion 18 .... 1st annular space 19 ... .. 1st operating fluid circulation port 20 ... .. 2nd annular space 21. ...... 2nd actuating fluid flow port 22 ... .. valve seat body 23 ...... Body 24 ... .. valve seat 25 ... .Flow path 26 ...... .. Outflow opening 27 ... .. Support body 28,29. .. Threaded part 30,32,33,34,36 .... 0 ^ 1 $ ^ 31 ......, .. stop surface 35 ... ---- fitting groove (-" '" " Note on the back; please fill in this page for more details) 4 4965 Ο Λ7 5 Explanation of the invention (5) 37..... Screwing section 40 ... • ... valve body 41... ... inlet flow path 42 ... ...... outlet flow path 43.... .. opening 44…, ..… annular valve seat 45 ........ partition 46 ........ annular groove 47 ........ diaphragm 48 ... Valve body 49....... Membrane section 50... Cylinder body 51,... 1st air inlet 52 .... 2nd air inlet 53... Ministry 54 .... ... Valve shaft 55 ... .... Cylinder head (Please read the precautions on the back before filling out this page) The Intellectual Property Bureau of the Ministry of Economic Affairs's Consumer Cooperatives printed this invention Embodiments Hereinafter, embodiments of the present invention will be described with reference to the drawings, but the present invention is not limited to the embodiments. Fig. 1 is a sectional view showing an opened state of a double-acting automatic valve according to an embodiment of the automatic valve of the present invention. Figure 2 is the bottom view of Figure 1. Fig. 3 is a sectional view showing the closed state of the automatic valve of Fig. 1; Fig. 4 is a front view showing a state after piping the first automatic chamber. In the figure, '12 is a cylindrical member made of PEFT. A linear flow path 3 with an inlet 1 and an outlet 2 is formed inside, and the outer periphery is sequentially integrated along the flow axis direction from the inlet 1 side. Formed: the inner and outer peripheries are formed with threaded portions 4 of threaded portions 28, 29; a ring-shaped small-diameter flange portion 5; and a small-diameter flange portion 5 connected and freely retractable and having a thickness of 0.5 mm Telescopic hose portion 6; a ring-shaped large-diameter flange portion 8 fitted with an O-ring (seal material 7) on the outer peripheral side peripheral surface and capable of being moved forward and backward; forming a garment ----- l ...! Order -------- _line. Ben. · Λ Zhang & degree meets China National Standard (CNS) A4 specifications ⑵Qx 297 public Λ: Economy 郜 Intellectual Property Bureau employee consumer cooperatives such as the fifth, the invention description ( 6) The valve body portion 9 around the outlet 2; and-a ring-shaped fitting protrusion 10 is formed on the peripheral edge portion of the valve body portion 9 and has a thickness of .. In addition, in this embodiment, the telescopic hose portion 6 is provided with only one-FREE ττ. 疋 4 ′, but a large number of mountain portions may be provided depending on the purpose. In addition, the part where μ w ^ 'and seat 4 of valve 4 are in a flat state, but the ring-shaped protrusion can also be placed, as long as it is a structure that can be sealed when the valve is closed. The shape is not particularly limited. 15 is a cap nut made of PTFE, which is screwed with the outer periphery of the screwing part 4 of the cylindrical member 丨 2. M is a cover body, and has a step 13 on the inner side, and the step 13 is fitted with the small-diameter flange portion 5 through the O-ring 30 of the elastic sealing member as an intermediary. The small-diameter flange portion 5 of the cylindrical member 12 is fixed to the cover body by the cap nut 5 being bolted to the outer periphery of the screwing portion 4 and the cap nut 5 in this embodiment. The screwing on the outer periphery of the screwing portion 4 may be performed by adhesion or the like, as long as the small-diameter flange portion 5 can be fixed to the cover 14. 23 is a cylindrical body made of pTFE, and has a receiving portion 16 for retracting the flexible tube portion 6 of the cylindrical member 12 inside, and a large diameter adjacent to the receiving portion 16 and the cylindrical member I]. The flange portions 8 are fitted to each other to form a stepped portion 17 in a sliding state, and a stop surface 31 is formed on an interface of the receiving portion 6 and the stepped portion 17. In addition, a side surface of the first working fluid circulation port 19 and the second working fluid circulation port 20 are provided on the side surface. The first working fluid circulation port 19 is connected to the small-diameter flange portion 5 ′ of the cylindrical member 12. The first annular space 1 8 formed by the telescopic hose portion, the large-diameter flange portion 8 and the accommodation portion 16; and the aforementioned second working fluid circulation port 2] is connected to -¾ equipment ---- -r --- order i if II {please beg-note on the back) and then fill out this page --- I:] 44965 0
五、發明說明（7 ) 由请狀構件12之大口徑凸緣部8、薄膜部i丨、段差部ι 7 及後述之支持體27所包圍形成之第2環狀空間2〇。又， 本體23之一端（圖中是位於上端）係以〇形環32為中介固 定於蓋體14上，而另一端則是以〇形環33為中介且以螺 栓及螺絲帽（未圖示）與後述之閥座體22同時固定於後述之 支持體27。又，在本實施例中係使用了 〇形環32 ' ’ 也可使用其他彈性密封材，並無特別限定。 27為PTFE製之圓環狀支持體，係與閥座體22共同挾 持筒狀構件12中薄膜部n之圓環狀嵌合突部1〇，且以彈 性禮封構件之0形環34為中介而固定於閥座體22上。 22為PTFE製之閥座體’在一端（圊中為上端）中央部上 設有凸狀間座24，且於其周圍設置3處流路25(參照第2 圖），進一步在其周圍也就是在與支持體27相接觸之部份 設置嵌合槽35，嵌著有〇形環36與筒狀構件12中薄膜部 11之圓環狀嵌合突部10。又於閥座24及流路25之下部設 置有一於内周面具有接續用螺著部37之流出開口 26。此 外，在本實施例中，與閥座24之閥體部9相接觸之部份是 形成凸狀，但這部份也可呈平坦形態’或也可在該部份上 形成圓環狀突部，只要具有—於開閥時流體壓力耗損少的 形狀，且在關閥時可密封之構造即可，其形狀並無特別限 定。 又’在本實施例中係使蓋體14、本體23、支持體27、 閥座體22以螺栓及螺帽（未圖示）鎖緊固定，但也可藉黏著 之方式固定，並無特別限定。又，也可將蓋體14及本 本紙張又度適用中國國家標準（CNS)A4規格（210 X 297公爱 (請先間讀背面之注意事項再填冩本頁) ^-----=----訂------ 經濟部智慧財產局員工湞費合作社印*1^ -10- _____B7__ 五、發明說明（8 ) 23 —體形成。 如以上說明’本發明之自動閥係成一驅動部設置於流 路周圍之構造’因此不會像習知之自動間般，與相當於驅 動部份之缸本體、缸蓋體相較下，不須使閥整體變大，而 可使整個閥形成簡潔。又，如第4圖所示，在配管時無需 像習知自動閥般*以相對於配管線而以垂直狀態設置該 閫’可沿著配管線配管，因此不需要確保寬廣的配管空間， 即使在狹窄的配管出入處也可輕易進行配管。 又’本發明之自動閥之流路係因具有直線流路，沒有 如習知之自動閥上所形成之環狀槽等液體蓄積部分，不會 引起流體的腐敗’可供應一維持高純度之流體。 由上述構成所構建成之本發明之自動閥之動作係如了 列所述。 經濟部智慧財產局員工消費合作社fp製 在第】圖之狀態下’首先將一為作動流體之壓縮空氣 由第1作動流體流通口 19擠入第1環狀空間1 8，藉該空 氣壓*使大口徑凸緣部8側周面一面和段差部17内周滑動 接觸’一面朝流出開口 26開始移動，同時使伸縮軟管部6 伸屐，而使閥體部9往閥座24接近。隨即，閥體部9壓接 於閥座24，而使該自動閥成一完全緊閉的狀態（第3圖之 狀態）。在該狀態下，該自動閥内部之流體係藉閥體部9壓 接於閥座24之部份而被完全閉封者。 另一方面，在該狀態（第3圖之狀態）下，將壓縮後之空 氣由第2作動流體流通口 21擠八第2環狀空間20，藉該 空氣壓’而使大口徑凸緣部8 —面滑動接觸於段差部！ 7 ^ Π - 449650 經濟部智慧財產局員工消費合作社印製 Λ7 B7 五、發明說明（9 ) 内周’一面開始往流入口 1侧移動，同時，使伸縮软管部 6縮回，使閥趙部9開始離開閥座24 〇然後大口徑凸緣部 8直接接觸於止動面31’使該自動閥成一全開狀態（第^圖 之狀態）。將流體通過處於該狀態之自動閥時，如圊中之箭 頭所示，該流體將毫無彎曲而可直線地通過流入口 1、直 線流路3、流出口 2、流路2 5後朝流出開口 2 6流出。因此， 附加在該自動閥之流體的壓力耗損係與習知之自動閥令流 動在彎曲流路上之流體的壓力損失相比，係顯著地降低， 且Cv值也可提高。 接著*藉「JISB 2005」之「閥之容量係數試驗方法」 對本發明之自動閥與習知之自動間（第5圈之形態）進行測 試’將各Cv值之測試結果示於下表6 口徑（英吋） 1/2 1 本發明品 5.6 μ 22 習知品 2.5 12 由這表可很明顯的了解到，本發明品之Cv值和習知品 之Cv值相比，提高約2倍。 本發明係構建成如上述構造，而使用該構造即可得到 以下的優異效果。 1.該自動閱為一簡潔之構造，可沿著配管線施行配 管’因此和習知品比較，不須寬大的配管空間，也可以配 置在錯綜複雜之配管内。尤其該自動閥在半導體製造關連 裝置内之空間佔有率降低，且該裝置本身也可小型化， 2_由於流體係呈直線狀態，流體之壓力耗損小，可得 本紙張（㈣財0园家標iMCNS)A域格⑵〇 χ观公楚） -12* (請毛閱汶背面之注意事項再填寫本頁) 衣-----r---訂--------- Λ 7 _Β：_ 五、發明說明（10 ) 到所期望之Cv值。 3.沒有習知品般之環狀槽等液體積蓄的部份，且具有 直線流路，因此流體流過時之液體蓄積少，不會在自動閥 内發生流體腐敗，可供給維持高純度之流體，特別是在要 求高純度流體之半導體製造、食品及生物科技等產業領 域，可做有效的利用。 -------------*----r---訂--------- (-.-閱JiT背面之-£意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製V. Description of the invention (7) The second annular space 20 formed by the large-diameter flange portion 8, the thin-film portion i 丨, the stepped portion ι7, and the support 27 described later, of the request-like member 12. In addition, one end of the body 23 (located at the upper end in the figure) is fixed to the cover 14 with an O-ring 32 as an intermediary, and the other end is with an O-ring 33 as an intermediary and bolts and screw caps (not shown). ) Simultaneously fixed to the support body 27 described later with the valve seat body 22 described later. In this embodiment, the O-ring 32 'is used, and other elastic sealing materials may be used, and it is not particularly limited. Reference numeral 27 is a ring-shaped support made of PTFE. The ring-shaped fitting protrusion 10 of the thin film portion n in the cylindrical member 12 is held together with the valve seat body 22, and the 0-ring 34 of the elastic gift sealing member is The intermediate body is fixed to the valve seat body 22. A valve seat body 22 made of PTFE is provided with a convex seat 24 at the center of one end (the upper end in the middle), and three flow paths 25 (see FIG. 2) are provided around the seat. That is, a fitting groove 35 is provided at a portion in contact with the support body 27, and a ring-shaped fitting protrusion 10 of an O-ring 36 and a thin film portion 11 in the cylindrical member 12 is fitted. Further, an outflow opening 26 having a connection screw portion 37 on the inner peripheral surface is provided below the valve seat 24 and the flow path 25. In addition, in this embodiment, the portion that is in contact with the valve body portion 9 of the valve seat 24 is formed in a convex shape, but this portion may be in a flat shape, or an annular protrusion may be formed on the portion. As long as the part has a shape that has less fluid pressure loss when the valve is opened and a structure that can be sealed when the valve is closed, the shape is not particularly limited. Also, in this embodiment, the cover body 14, the body 23, the support body 27, and the valve seat body 22 are locked and fixed with bolts and nuts (not shown), but they can also be fixed by means of adhesion, and there is no special limited. In addition, the cover 14 and the paper can also be applied to the Chinese National Standard (CNS) A4 specification (210 X 297 public love (please read the precautions on the back before filling in this page) ^ ----- = ---- Order ------ Stamps of Cooperatives of Employees of the Intellectual Property Bureau of the Ministry of Economic Affairs * 1 ^ -10- _____B7__ V. Description of the Invention (8) 23-Body formation. As explained above, the automatic valve system of the invention It has a structure where the driving part is arranged around the flow path, so it will not be compared with the cylinder body and cylinder head body equivalent to the driving part, as in the conventional automatic room. The valve is simple in form. As shown in FIG. 4, it is not necessary to install the valve in a vertical state with respect to the piping line as in the conventional automatic valve during piping. The piping space allows easy piping even at narrow piping entrances and exits. 'The flow path of the automatic valve of the present invention has a straight flow path, and there is no liquid accumulation portion such as the annular groove formed on the conventional automatic valve. , Will not cause fluid spoilage 'can supply a fluid with high purity The operation of the automatic valve of the present invention constructed by the above structure is as described below. In the state shown in the figure below, the employee's consumer cooperative fp of the Intellectual Property Bureau of the Ministry of Economic Affairs' first puts a compressed air as a working fluid from the first 1 Actuating the fluid flow port 19 into the first annular space 18, and by the air pressure *, the side surface of the large-diameter flange portion 8 and the inner periphery of the step portion 17 slide into contact with each other and start moving toward the outflow opening 26, At the same time, the telescopic hose portion 6 is extended, and the valve body portion 9 is approached to the valve seat 24. Then, the valve body portion 9 is crimped to the valve seat 24, so that the automatic valve is completely closed (Figure 3) In this state, the flow system inside the automatic valve is completely closed by the valve body portion 9 being crimped to the part of the valve seat 24. On the other hand, in this state (the state of FIG. 3) ), The compressed air is squeezed from the second actuating fluid flow port 21 to the eighth annular space 20, and the large-diameter flange portion 8 is brought into sliding contact with the step portion by the air pressure! 7 ^ Π- 449650 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs Λ7 B7 V. Description of Invention ( 9) The inner periphery starts to move toward the inlet 1 side, at the same time, the retractable hose portion 6 is retracted, and the valve Zhao 9 starts to leave the valve seat 24. Then the large-diameter flange portion 8 directly contacts the stop surface 31. 'Make the automatic valve in a fully open state (the state of the figure ^). When the fluid is passed through the automatic valve in this state, as shown by the arrow in the figure, the fluid will pass straight through the inlet 1 without bending. The straight flow path 3, the outlet port 2, the flow path 25 and then flow out to the outflow opening 26. Therefore, the pressure loss of the fluid added to the automatic valve is the pressure loss of the fluid flowing on the curved flow path with the conventional automatic valve Compared to this, the system is significantly reduced, and the Cv value can be increased. Then * by "JISB 2005" "valve capacity coefficient test method", test the automatic valve of the present invention and the conventional automatic valve (the shape of the fifth circle). 'The test results of each Cv value are shown in Table 6 below. Inches) 1/2 1 Inventive product 5.6 μ 22 Conventional product 2.5 12 It is clear from this table that the Cv value of the present product is about 2 times higher than that of the conventional product. The present invention is structured as described above, and the following excellent effects can be obtained by using this structure. 1. The automatic reading is a concise structure, and piping can be performed along the piping line. Therefore, compared with conventional products, it does not require a large piping space, and can also be arranged in intricate piping. In particular, the space occupancy of the automatic valve in a semiconductor manufacturing-related device is reduced, and the device itself can be miniaturized. 2_ Because the flow system is linear, the pressure loss of the fluid is small, and this paper can be obtained. Standard iMCNS) A domain grid (0 × view public Chu) -12 * (please note the details on the back of Mao Yuewen and then fill out this page) clothing ----- r --- order --------- Λ 7 _Β: _ 5. Description of the invention (10) to the desired Cv value. 3. There is no liquid volume storage part such as a conventional ring-shaped tank, and it has a straight flow path. Therefore, the liquid accumulation is small when the fluid flows, and no fluid corruption occurs in the automatic valve. It can supply a high-purity fluid, especially It can be effectively used in semiconductor manufacturing, food and biotechnology industries that require high-purity fluids. ------------- * ---- r --- Order --------- (-.- Please read the-on the back of JiT for more details and fill in this page) Economy Printed by the Ministry of Intellectual Property Bureau's Consumer Cooperative