經消部中央桴"局貝工消贽合作社印製 ? ο 2 9 Λ ; Γ~----- Η 7 I ， II I I，j- . .Ji. . .一 — _ _ 五、發明説明（丨) -- 相關申請案交叉參考 本申請案係1996年12月16曰共同申請，尚在審理中之 美國專利申請案第08/767,071號之—部分繼續申請案申 請。 ’、 揭露之背景 1·發明領域 本發明係關於半導體晶圓處理系統，且更特別地，關 於用以在一熱控制環境中蝕刻半導體晶圓之系統。 2 ·背景技藝敘述 進行半導體晶圓乾式蝕刻的一半導體晶圓處理系統， 典型地在一處理腔室中完成該蝕刻。該腔室係含有一晶圓 支架之一真空密封殼罩，該支架係在該蝕刻流程中，用以 於該腔室中將一晶圓裝載於一穩定位置。用以電漿增強該 蝕刻流程，一電漿係藉由在該腔室中充填一反應氣體，且 對该反應氣體施加用以產生電漿之一大致射頻場而被產生 在該腔室中。該射頻場係藉由導體線圈而被產生，該等線 圈外接該腔室之外緣，像一陰極一樣被定位在該腔室中。 此等線圈形成由一高功率射頻信號驅動之一天線，以在該 腔室中產生一實質的磁場。該陰極亦係由一射頻信號驅 動，其在該腔室中產生一實質的電場。該磁場與電場與該 反應氣體作用以在該腔室中形成電漿。該天線係被定位在 該腔室之外部上一位置，以確保該電漿係被均勻地產生於 被蝕刻之該晶圓表面上。 為減少當該電漿在啟閉間循環時該腔室所遭受之溫度 (CNS ) Λ视枯（2丨 ---：------裝------訂------/ 4470 2 9 經滅部中次埤局另工消費合作社印敦 kl 五、發明説明（2 ) 變化’該圓頂係典型地被用一.輕射熱燈源加熱至約8 〇。匚。 該輻射源通常係複數個安裝於該腔室外側之高功率燈。該 等燈係被安裝在該圓頂上一陣列中。典型地，一反射鏡總 成係被定位緊貼該等燈以聚焦該輻射能於該圓頂表面上。 為在電漿循環期間（亦即，當該電漿存在以及不存在的期 間）保持該圓頂溫度於大約801，一風扇被緊貼該圓頂安 裝’以提供一連續的室溫空氣流橫越該圓頂，且因此當該 電漿被提供時，保持該圓頂於一定溫度。然而，此一冷卻 技術並非極為有效，且該圓頂溫度隨該環境室溫而定，可 能起伏至40°C。該腔室表面的大量熱增減，造成該腔室延 伸與收縮，致使塗覆在該腔室壁與圓頂上之材料在該蝕刻 流程期間剝離並掉落至該被處理的晶圓上。該等微污染粒 子造成該晶圓無法使用。 因此，在此技藝中存在對於在該電漿循環期間，保持 該圓頂溫度至少在一預設額定溫度的±5 °C之内的一種圓 頂溫度控制裝置之需求。 發明摘要 與該習知技藝伴生的這些缺點，藉由本發明之一閉迴 路圓頂溫度控制裝置而被克服。該裝置含有一中央配置、 高風量之風扇、一熱交換腔室、以及包封該風扇與該熱交 換腔室兩者以形成一閉迴路空氣流環流系統之一殼罩。該 閉迴路系統空氣在該殼罩内環流，以穩定一半導體晶圓處 理系統之圓頂的溫度。為促進最適宜的空氣流遍及該圓 頂，該裝置含有一空氣流定向器. _ -5- __ 本紙張尺度適用中國國家樘羋（CNS ) Λ4叱枯（) ------ n - - - - -- 1^1 J1-·、^^1 I -- m -__I---- T· I _ I . . I :1--- ，-=a/V (誚1間讀背而之注息¥項/}功，,,:J本Ή ) 4 了 η 2 9 Λ7 ]\Ί 五、 發明説明（ 在本發明一第一實施例中，該風扇吹送空氣由一燈總 成上方朝下穿經由該燈陣列總成界定之一中央孔口。該風 扇亦吹送空氣穿過該燈陣列總成的周邊，且穿越含有空氣 定向喷嘴的一環向陣列之一渦流產生器（一空氣流定向器 之—實施例）。此等喷嘴導引該空氣流朝向該圓頂以一環 形型式產生一空氣渦流或旋流，在該圓頂之頂部附近渦 動。正如該空氣渦動經過該圓頂，該空氣流出該圓頂之邊 緣’進入其中有多個裝載傳熱液體之管以冷卻或加熱該氣 體的一熱交換腔室。該空氣流經在一風扇護罩上之該熱交 換腔室並且回到該風扇，該風扇再度推送該空氣向下穿過 該等燈以及該圓頂之上部。照此，一閉迴路圓頂溫度控制 裝置被製出。 在本發明一第二實施例中，一軸向流動風扇組件由一 燈總成之上吹送空氣穿經由該燈總成界定之一中央孔口。 該空氣流流經一空氣流定向器，其含有靜止的空氣定向葉 片（亦即導葉片）之一環繞陣列。該等葉片導引該空氣流沿 一軸向途徑朝向該圓頂，以提供空氣之一均勻喷流衝激於 該圓頂上，迅速地向外流動在該圓頂之頂上。正如該等空 氣流經過該圓頂’該空氣流出該圓頂之邊緣，進入其中有 多個裝載傳熱液體之翼管以冷卻或加熱該氣體的一熱交換 腔室等管子。該空氣流經該熱交換腔室，如同該等空氣流 回到該風扇’該風扇再度推送該空氣向下朝向該圓頂之上 央部份。一連串位於該風扇之上的上層導葉片亦係被用來 防止來自該軸向風扇空氣之逆流。 本紙張尺度適用中國國家標嗥（)以圯枯（ ---.H-----,Jr^--- - - n τ-----I_ >κ "4-:°»ν (詞t間讀背而之注"卞項作奶$本石〔) -6- 4 4 702 9 Λ' 五、發明説明（ - 使用本發明之一閉迴路裝置，該圓頂溫度可被保持至 約在一 80°C額定溫度的± 5°C。藉調整被供應至該燈的能 量，該溫度可被進一步控制，以升高或降低該額定溫度。 該燈的控制係藉由聚焦於該圓頂之表面上的一紅外線感測 器之助15該感測器信號係透過一回饋迴路之一傳統軟體工 具被處理。該回饋迴路利用一預設溫度值，測得溫度被拿 來與該溫度比較。該閉迴路系統控制供應至該紅外線燈陣 列之電流，以造成該測得溫度等同於該預設溫度值。 圖示簡要說明 藉由連同附圖考察後續的詳述，本發明之教示可被輕 易的瞭解，其中： -1° 第1圖係描繪本發明之一部份戴面透視圖； 第2圖係描續本發明之一橫裁面圖； 第3圖係描繪一噴嘴環之一透視圖； 第4圖係描繪一喷嘴之一透視圖； 第5圖係描繪第4圖中所繪該噴嘴沿線5巧之一戴面 圖； 經滴部中央lfrt,局妇工消费合作社印裝 第6圖係描繪本發明之電路示意圖： 第7圖係描繪用以控制該圓頂溫度之一程序的軟體工 具流程圖； 第8圖係描緣該冷卻液流經過本發明裝置之一示意圖. 第圖係描繪本發明一第二實施例之一部份截面爆炸 圓； 第10圖梅繪本發明一第二實施例之一橫截面圖； )( 210 x 44702 9 Λ7 ________ ΙΓ 五、發明説明（5 ) 第11圖描繪隔板之一透視圖； 第12圖描繪一燈總成之一爆炸透視圖 第13圖描繪一下導葉之透視圖； 第14圖描繪一下導葉片之透視圊； 第15圖描緣一風扇罩之透視圖，· 第16圖描繪一上導葉之一頂視平面圖； 第17圖描繪該上導葉之一側視圖； *裝 第18圖描繪該等冷卻管之一透視圖；以及 第19圖描繪併入本發明裝置中之一終端偵測器的橫裁 面圖。 為促進瞭解’當可能的’標示該等圖中共用相同的元 件相同的標號被使用。 發明詳述 經碘郎中央桴枣局員工消费合作杜印裝 第1圖係描繪本發明之一閉迴路圓頂溫度控制裝置i 〇〇 的一部份載面透視圖。該裝置1〇〇係被安裝在一電聚蝕刻 反應腔室的一傳統陶瓷圓頂102之上。該圓頂1〇2係由一感 應耦合線圈104(例如一天線）所外接，其係傳統地由射頻 月b源所驅動’以在該腔室中產生一磁性電漿場。無論電装 是否存在於該反應腔室令，本發明維持該圓頂之表面於一 相對地恆溫 具體地說，本發明第一實施例之該裝置1 〇〇包含一風 扇1〇6、一紅外線感測器1〇8、一燈總成11〇、一噴嘴總成 、1 2 一熱父換腔至114、以及.一風扇護罩116。更明破地 說5亥裝置具有實質上圓柱型且被以一連接器總成122連 — ------------ -- 8 - 本紙張尺度適用中國國家椋準（CNS ) Λ4Α',彳M 210x ?扪,:,> 片) .........Printed by the Central Government of the Ministry of Economic Affairs " Bei Beigong Consumer Cooperatives? Ο 2 9 Λ; Γ ~ ----- Η 7 I ， II II, j-. .Ji... 一 — _ _ V. Invention Explanation (丨)-Cross-Reference to Related Applications This application is a joint application on December 16, 1996. The pending U.S. Patent Application No. 08 / 767,071-Part of the continued application. Background of the Disclosure 1. Field of the Invention The present invention relates to a semiconductor wafer processing system, and more particularly, to a system for etching a semiconductor wafer in a thermally controlled environment. 2. Description of Background Art A semiconductor wafer processing system for performing dry etching of a semiconductor wafer, typically performing the etching in a processing chamber. The chamber contains a vacuum-sealed cover of a wafer holder, which is used in the etching process to load a wafer in a stable position in the chamber. A plasma is used to enhance the etching process. A plasma is generated in the chamber by filling a reactive gas in the chamber and applying a rough radio frequency field to the plasma to generate the plasma. The RF field is generated by a conductor coil, which is connected to the outer edge of the chamber and is positioned in the chamber like a cathode. These coils form an antenna driven by a high-power RF signal to generate a substantial magnetic field in the cavity. The cathode is also driven by a radio frequency signal, which generates a substantial electric field in the chamber. The magnetic and electric fields interact with the reactive gas to form a plasma in the chamber. The antenna system is positioned at a position outside the chamber to ensure that the plasma system is uniformly generated on the surface of the wafer being etched. In order to reduce the temperature (CNS) that the chamber is subjected to when the plasma circulates between the open and close rooms (2S) ------------------------------- -/ 4470 2 9 The Ministry of Economic Affairs, Japan, Japan, Japan, Japan, Japan, Japan, Japan, Japan, Japan, Japan, Japan, Japan, Japan, Japan, etc. V. Invention Description (2) Variations' The dome is typically heated to about 80% by a light source.匚. The radiation source is usually a plurality of high-power lamps installed outside the cavity. The lamps are installed in an array on the dome. Typically, a mirror assembly is positioned close to the lamps. To focus the radiant energy on the surface of the dome. To maintain the temperature of the dome at about 801 during the plasma cycle (ie, when the plasma is present and absent), a fan is pressed against the dome Installed 'to provide a continuous flow of room temperature air across the dome, and therefore keep the dome at a certain temperature when the plasma is provided. However, this cooling technique is not very effective and the dome temperature Depending on the ambient room temperature, it may fluctuate to 40 ° C. A large amount of heat increase or decrease on the surface of the chamber causes the chamber to expand and contract, resulting in coating The materials on the chamber walls and the dome are peeled off and dropped onto the processed wafer during the etching process. The micro-polluted particles make the wafer unusable. Therefore, in this technique, there are The need for a dome temperature control device that maintains the dome temperature at least within a preset rated temperature of ± 5 ° C during the plasma cycle. Summary of the Invention These shortcomings associated with the conventional art, by means of the present invention It is overcome by a closed-loop dome temperature control device. The device contains a centrally disposed, high-air volume fan, a heat exchange chamber, and encloses both the fan and the heat exchange chamber to form a closed-loop air flow. One of the casings of the circulation system. The closed-loop system air circulates inside the casing to stabilize the temperature of the dome of a semiconductor wafer processing system. In order to promote the most suitable air flow through the dome, the device contains an air Flow directional device. _ -5- __ This paper size is applicable to Chinese national 樘 芈 (CNS) Λ4 叱 () ------ n-----1 ^ 1 J1- ·, ^^ 1 I- -m -__ I ---- T · I _ I.. I: 1 ---,-= a / V ( One reads the interest and reads the term ¥ term /} work ,,,: J 本 Ή) 4 η 2 9 Λ7] \ Ί 5. Description of the invention (In a first embodiment of the present invention, the fan blows air from A lamp assembly passes downward through a central aperture defined by the lamp array assembly. The fan also blows air through the periphery of the lamp array assembly and through a vortex generated by a circular array containing air-oriented nozzles (An embodiment of an airflow director). These nozzles direct the airflow toward the dome to generate an air vortex or swirl in a circular pattern, vortexing near the top of the dome. Just as the air vortex Passing through the dome, the air flows out of the edge of the dome and enters a heat exchange chamber having a plurality of tubes carrying a heat transfer liquid therein to cool or heat the gas. The air flows through the heat exchange chamber on a fan shroud and returns to the fan, which again pushes the air down through the lamps and above the dome. As such, a closed-loop dome temperature control device was produced. In a second embodiment of the present invention, an axial flow fan assembly blows air from a lamp assembly through a central aperture defined by the lamp assembly. The airflow passes through an airflow director, which contains one of the stationary air-oriented blades (i.e., guide vanes) surrounding the array. The blades direct the air flow in an axial direction toward the dome to provide a uniform jet of air impinging on the dome, which flows rapidly outwardly on top of the dome. Just as the air flow passes through the dome ', the air flows out of the edge of the dome, and enters into a plurality of wing tubes containing a heat transfer liquid therein to cool or heat the gas, such as a heat exchange chamber. The air flows through the heat exchange chamber as if the air returned to the fan ', and the fan again pushes the air downward toward the upper central portion of the dome. A series of upper guide vanes above the fan are also used to prevent backflow of air from the axial fan. This paper size is applicable to the Chinese national standard) () to wither (---. H -----, Jr ^ -----n τ ----- I_ > κ " 4-: ° » ν (Notes between the words t and back " 卞 Item as milk $ 本 石 〔) -6- 4 4 702 9 Λ '5. Description of the invention (-Using a closed loop device of the invention, the temperature of the dome can be Is maintained to about ± 5 ° C of a rated temperature of 80 ° C. By adjusting the energy supplied to the lamp, the temperature can be further controlled to increase or decrease the rated temperature. The control of the lamp is by An infrared sensor focused on the surface of the dome. The sensor signal is processed by a conventional software tool in a feedback loop. The feedback loop uses a preset temperature value and the measured temperature is taken. Compare it with the temperature. The closed-loop system controls the current supplied to the infrared lamp array, so that the measured temperature is equal to the preset temperature value. The diagram is briefly explained. The teachings of the invention can be easily understood, among which: -1 ° Figure 1 is a perspective view of a part of the present invention; Figure 2 is a continuation of the present invention A cross-sectional view; Figure 3 depicts a perspective view of a nozzle ring; Figure 4 depicts a perspective view of a nozzle; Figure 5 depicts one of the nozzles along the line depicted in Figure 4 Wearing a face map; printed by the central department of the department, printed by the Bureau of Women's Workers' Cooperatives. Figure 6 is a schematic diagram depicting the circuit of the present invention: Figure 7 is a flowchart of a software tool used to control the temperature of the dome; Fig. 8 is a schematic drawing of the flow of the cooling fluid passing through one of the devices of the present invention. Fig. 8 is a partial explosion circle of a second embodiment of the present invention; Fig. 10 is a horizontal view of a second embodiment of the present invention. Sectional view;) (210 x 44702 9 Λ7 ________ ΙΓ V. Description of the invention (5) Figure 11 depicts a perspective view of a partition; Figure 12 depicts an exploded perspective view of a lamp assembly; Figure 13 depicts a guide vane Fig. 14 depicts a perspective view of a guide vane; Fig. 15 depicts a perspective view of a fan cover; Fig. 16 depicts a top plan view of one of the upper guide vanes; and Fig. 17 depicts the upper guide vane One side view; * Figure 18 depicts a perspective view of one of these cooling pipes; And Figure 19 depicts a cross-sectional view of one of the terminal detectors incorporated in the device of the present invention. To facilitate the understanding of the 'when possible' labeling, these drawings share the same elements with the same reference numerals. DETAILED DESCRIPTION OF THE INVENTION The first figure of the consumer cooperation of the Iodang Central Central Jujube Bureau Du Yinzhuang is a partial perspective view depicting a closed-loop dome temperature control device i 00 of the present invention. The device 100 is installed in a The polysilicon etching reaction chamber is above a traditional ceramic dome 102. The dome 102 is externally connected by an inductive coupling coil 104 (such as an antenna), which is traditionally driven by a radio frequency source. A magnetic plasma field is generated in the chamber. Regardless of whether Denso is present in the reaction chamber or not, the present invention maintains the surface of the dome at a relatively constant temperature. Specifically, the device 100 of the first embodiment of the present invention includes a fan 106 and an infrared sensor. Detector 108, a lamp assembly 110, a nozzle assembly, a hot-swap cavity 114 to 114, and a fan shield 116. More plainly, the device has a substantially cylindrical shape and is connected by a connector assembly of 122. -------------8-This paper standard is applicable to China National Standards (CNS) ) Λ4Α ', 彳 M 210x? 扪,:, > pieces) .........
經沭部中央標光局贺工消費合作社印製 Λ7 ____ _____ Η 7 五、發明説明（6 ) ............... 接至該反應腔室的環形邊緣12〇之一外殼體118 ^該裝置亦 含有一圓柱型内殼體丨24，其具有較該外殼體n 8略小的半 控。該等内殼體與外殼體係關於穿過該陶瓷圓頂以及反應 腔室之一中央軸而共軸的。該等内殼體與外殼體係在一小 間距隔開的關係中以界定其間之一空間丨26。一熱交換器 線圈128被安裝在該空間126中，致使該外殼體、内殼體以 及線圈形成該熱交換腔室Π4或熱交換器通道。 —風扇罩蓋130被安裝在該外殼體之頂緣上，其為該 整個裝置形成一閉迴路環狀系統，亦即，環流在該裝置中 之空氣不會被由該裴置排出。一風扇護罩丨16係被安裝至 該内殼體124之一頂緣132。該風扇護罩Π6含有一中央孔 1 36 ’該風扇1 〇6即係被安裝於該處。由此，該風扇1〇6推 送空氣經該熱交換腔室114、經介於該風扇罩蓋丨3 〇以及該 風扇護罩116之一空間（空氣通道n 7)，並且進入該令央孔 136以被推送經該風扇1 〇6。 該燈總成110係在該裝置1〇〇中，被置中地安裝於恰在 該風扇之下。該燈總成1 1〇係藉由該喷嘴總成112保持在適 當位置。該噴嘴總成112係被固定至該内殼體124之内表面 並以朝向該裝置100中心之一角度向内延伸。該喷嘴總成 含有一中央孔138。該燈總成11〇係被安裝在界定該中央孔 138之一邊緣丨4〇上。該燈總成1 1〇包括一燈反射鏡ι42、一 燈冷卻平板144、以及一燈安裝平板146。為求簡化，該等 燈本身並未示於第1圖中。為對該燈總成提供冷卻，該冷 卻液在穿經該熱交換器線圈1 28後，被導引經該燈冷卻平 _______』- 本紙张尺度適用中國國家標準（CNS ) ( 2102们Α尨厂… .....一一 -Hi n .^1 - ----I n I *n f[ T _ _ _ 1 i^i 7K --°y (^11,4¾背而之注念#項再硝"-'-:';本3) 44702 9 A' 1Γ 五、發明説明（7 ) •装 板144中之管道。該燈總成大致係以此技藝中眾所周知的 方式架構及運作。該燈反射鏡142、該燈冷卻平板144、以 及該燈安裝平板146界定一中央孔148，其可使來自該風扇 106之空氣通過而朝向該圓頂1 〇2之中央。換言之，空氣沿 該裝置100之中央軸流過。沿該中央轴被安裝之該紅外線 感測器108具有一安裝部150連接至該燈安裝平板146且延 伸入該中央孔148。被定位於該圓頂上之該紅外線感測器 將感測在該表面上半徑大約1.8吋之一區域。這提供該圓 頂之表面溫度的一精綠指示。 該喷嘴總成112在約該總成之周邊，含有複數個孔 152。在該等孔152之每一孔中，一空氣定向喷嘴i 54被定 位。每一噴嘴具有一軸’其使流經該喷嘴之空氣指向一方 向，該方向係切於與該裝置100的中央轴共轴之一環，該 環具有一 3至4吋之半徑。因此，空氣由該風扇！ 〇6向下流 經该裝置之中央孔148及138 ’而且經每一該等喷嘴154， 恰在該陶瓷圓頂102上形成一渦流或旋流。所以，此旋流 使空氣移動橫越該圓頂而朝向其邊界12〇,且有效地冷卻 該圓頂°該空氣’如同其流過該圓頂1〇2之上，隨後經孔156 排出該圓頂之環形邊界120，進入該熱交換腔室U4且經由 通道11 7再回到該風扇106 ^因此，該空氣係在一閉迴路流 程中，環流在該圓頂102上，經該熱交換腔室】14且回至該 風扇1 06。 進一步言’溫度控制係藉由被連接至控制燈強度之一 回饋迴路的該紅外線感測器〗08而被提供。此一回饋迴路 ---- -10- 本紙張尺度適用中國國家樘丰（CXS ) ( 2】〇ϋ^ ) ~---一~——. 經滅部中央標準爲Η工消费合作杜印繁 1 44702 9 Λ7 ______—________ Η 7 五、發明説明（8 ) …> — ' 之一例’將連同第6及7圖於後敘述。 第2圖係描繪該閉迴路、圓頂溫度控制裝置〗〇〇之一橫 截面圖，顯不該空氣流如複數個箭頭經過該裝置之途徑。 該風扇106以大約315立方英尺/分，推送空氣經介於該風 扇護罩116與該風扇罩蓋丨3〇間之通道丨丨？。作為說明地， 該風扇係由EBM公司所製一後彎自動化葉輪風扇。沒有 反向壓力’此一風扇可以710立方英尺/分推進空氣。該空 氣被加壓向下經該裝置之中央孔148及138，而且經該等空 氣定向喷嘴154。正如空氣流經該等喷嘴，該等有角度的 喷嘴產生一離心的空氣流於該圓頂102上。該空氣隨後流 至該熱交換腔室114，基於該風扇106之負壓上升經過該腔 室114。為達成該空氣有效地冷卻，該等冷卻線圈由一冷 卻液供應器199(例如一冰箱或熱交換器）提供乙二醇，該 供應器保持該冷卻液在大約1 0°C。該冷卻液被提供在40至 60磅/平方英吋，以達約〇,4至0.6加侖/分之流速。該冷卻 液流經該裝置之一示意圖，示於下文第8圖中。 為提供更進一步之冷卻，該冷卻液亦係被導引經該燈 總成110。特別地，該冷卻液流經該燈總成之該冷卻平板 144。用於該燈總成之冷卻液供應器可自該等圓頂熱交換 器線圈冷卻液供應器獨立。適當地’該冷卻液可被導引經 該天線線圈。該等天線線圈係可被耦接至該冷卻液供應器 之中空管子。 一旦冷卻，該風扇推送該空氣上升進入介於該風扇護 罩116與該風扇罩蓋130間之該空氣通道U7再度推送該冷 ___ ______________- ——__ 本紙張尺度適用中國國家榡續-(CNS )从叱& ( 210x247.公女） ^---^----襄1-----^-------^ (誚1閱讀背而之注意事項再續朽本資) 五、發明説明（9 ) 空氣向下至該燈總成110上’且經該等喷嘴1 5 4以完成一閉 迴路空氣流流程。此一離心空氣流模式形成一渦流於該圓 頂上’其推送空氣由該圓頂之内部或中央部份，至該圓頂 之外側部份’產生更大、且更均勻的空氣流於該圓頂表面 上。此一空氣渦流較若該空氣僅係單純地由該風扇導引向 下至該圓頂之該表面上更加冷卻該圓頂表面。 第3圖係該喷嘴總成112之一透視圖。該喷嘴總成n 2 含有一喷嘴環300以及複數個噴嘴154。該喷嘴環300含有 用以安裝至該内殼體内表面之一垂直部302、用以支持該 燈總成且界定該中央孔138之一水平部304、以及用以居中 連結該垂直部302與該水平部304之一傾斜部3〇6。該傾斜 部係由垂直向内傾斜在約45。。該等垂直與水平部3〇2與 304含有複數個安裝孔308與對齊切口 3 1〇。該傾斜部3〇6喷 嘴環300含有形成於約該傾斜部3〇6邊緣之一環中的複數個 孔152(例如二十六孔）。每一孔保持一喷嘴154於一特定方 向中’將被連同第4及5圖詳述於後 經逆部中决標碑局员^消费合作社印取 第4圖係描繪該噴嘴154之一透視圖以及第5圖係描繪 第4圖中一喷嘴154沿線5_5之一橫截面圖。為求最佳地瞭 解本發明，讀者應同時參考第4及5圖。該喷嘴154具有用 以安裝抵住一喷嘴環孔之一凸緣。由該凸緣4〇〇延伸之一 圓柱噴嘴部402。該噴嘴係以相對於該喷嘴之一中央軸5〇2 於一角度500形成。照此，該喷嘴關於該中央軸5〇2之取向， 決定該空氣流經過該噴嘴之角度。該喷嘴4〇4之弧形排氣 部份界定一排氣孔406。 _________ -12- 本紙張尺度適用中國國 ( CNS Τλ4^^Τ2!077ν7：Λ Γ一 ' - ^4702 9 at Η7 五、發明説明（10 ) 該等嗔嘴154係大致定向在該環中，致使其由與該裝 置之中心對齊偏移1至5度。此對齊係藉一對齊平面4〇8達 成。每一對齊平面Btt連一相鄰確認平面，一旦組裝，所有 該等喷嘴皆被適當地排列。照此，延伸經該喷嘴之中央排 氣孔406之该軸500係切於恰位在該圓頂之上並具有一 3至4 吋半徑的一環。因此，同時的經過所有三十六個噴嘴之空 氣流形成在該圓頂上之該空氣渦流。 該裝置以實行一些用以防止傷害或損壞該硬體之安全 連結器為特色。例如在第2圖中，一空氣流感測器2〇〇係被 提供，萬 風扇失效時，用以觸發該射頻電源以及該等 加熱燈之斷路。該感測器係被安裝至該殼體總成，且含有 一電子的空氣流開關’其開啟該迴路可減少空氣流。此外， 有兩個過熱感測器202及204設置於該燈總成110上，萬一 該圓頂過熱時’用以觸發該射頻電源以及該燈電源之斷 路。再者’有一感測該風扇罩蓋、該射頻電纜以及該等控 制電缆之連結開關2 0 6，致使該罩蓋或該等電瘦之一的移 除將觸發該射頻電源、燈電源以及供應至該靜電失盤之高 經淖部中决#"局員工消費合竹社印緊 電壓的斷路，其中在電化學處理期間該夾盤夾持有一晶圓 於該触刻腔室中。 第6圖描繪包括在本發明之閉迴路圓頂溫度控制裝置 中的一電路之一示意圖。該電子線路包括用於—燈陣列11〇 之燈驅動器6〇〇、該風扇1 〇6、該紅外線溫度感測器1 、 以及用以控制至該風扇與至該燈驅動器電源之複數個繼電 器604。由感測器6】2控制的一些連結器6〇6被用來控制該 ------— -13- 本紙弦尺度適用中國國家核皁（CNS ) Λ祕---------------- -------Printed by the Hebei Consumer Cooperative of the Central Standard Light Bureau of the Ministry of Economics Λ7 ____ _____ Η 7 V. Description of the Invention (6) ............... Connected to the annular edge of the reaction chamber 12 〇One outer casing 118 ^ The device also contains a cylindrical inner casing 24, which has a slightly smaller half-control than the outer casing n8. The inner and outer shell systems are coaxial with respect to a central axis passing through the ceramic dome and a reaction chamber. The inner shell and outer shell systems are in a small spaced relationship to define a space therebetween. A heat exchanger coil 128 is installed in the space 126, so that the outer case, the inner case, and the coil form the heat exchange chamber Π4 or the heat exchanger passage. -The fan cover 130 is mounted on the top edge of the outer casing, which forms a closed loop ring system for the entire device, that is, the air circulating in the device will not be exhausted by the device. A fan shield 16 is mounted to a top edge 132 of the inner case 124. The fan cover Π6 contains a central hole 1 36 ′, and the fan 106 is installed there. As a result, the fan 106 pushes air through the heat exchange chamber 114, through a space (air passage n 7) between the fan cover 116 and the fan shroud 116, and enters the center hole 136 to be pushed through the fan 106. The lamp assembly 110 is housed in the device 100 and is centrally mounted just below the fan. The lamp assembly 110 is held in place by the nozzle assembly 112. The nozzle assembly 112 is fixed to the inner surface of the inner casing 124 and extends inwardly at an angle toward the center of the device 100. The nozzle assembly includes a central hole 138. The lamp assembly 110 is mounted on an edge 4o defining one of the central holes 138. The lamp assembly 110 includes a lamp reflector 42, a lamp cooling plate 144, and a lamp mounting plate 146. For simplicity, the lamps themselves are not shown in Figure 1. In order to provide cooling for the lamp assembly, after passing through the heat exchanger coil 1 28, the coolant is guided through the lamp cooling level _______ "-This paper size applies to Chinese National Standards (CNS) (2102mens A尨 厂 ... ..... 一一 -Hi n. ^ 1----- I n I * nf [T _ _ _ 1 i ^ i 7K-° y (^ 11,4¾ # 项 再 NO " -'-: '; Ben 3) 44702 9 A' 1Γ 5. Description of the invention (7) • The pipe in the mounting plate 144. The lamp assembly is roughly structured in a manner well known in the art and Operation. The lamp reflector 142, the lamp cooling plate 144, and the lamp mounting plate 146 define a central hole 148 that allows air from the fan 106 to pass toward the center of the dome 102. In other words, air Flowing along the central axis of the device 100. The infrared sensor 108 mounted along the central axis has a mounting portion 150 connected to the lamp mounting plate 146 and extending into the central hole 148. It is positioned on the dome The infrared sensor will sense an area of approximately 1.8 inches in radius on the surface. This provides a fine green indication of the surface temperature of the dome. The nozzle assembly 112 Around the periphery of the assembly, there are a plurality of holes 152. In each of these holes 152, an air directional nozzle i 54 is positioned. Each nozzle has a shaft 'which directs the air flowing through the nozzle in a direction This direction is cut on a ring that is coaxial with the central axis of the device 100. The ring has a radius of 3 to 4 inches. Therefore, the air is passed by the fan! 〇6 flows down through the central holes 148 and 138 of the device And through each of these nozzles 154, a vortex or swirl is formed on the ceramic dome 102. Therefore, the swirl moves the air across the dome toward its boundary 120, and effectively cools the circle At the top, the air is like it flows over the dome 102, and then exits the dome's annular boundary 120 through the hole 156, enters the heat exchange chamber U4, and returns to the fan 106 through the passage 11 ^ Therefore, the air is circulated on the dome 102 in a closed loop process, passes through the heat exchange chamber] 14 and returns to the fan 106. Further, the 'temperature control system is connected to control the intensity of the lamp by One of the feedback sensors of the infrared sensor is provided. 08 Feedback loop ---- -10- This paper size is applicable to China National Fengfeng (CXS) (2) 〇ϋ ^) ~ --- ~ 44702 9 Λ7 ______—________ Η 7 V. Description of the invention (8)… > — 'An example' will be described later together with Figures 6 and 7. Figure 2 depicts the closed loop, dome temperature control device. A cross-sectional view showing the path of the air flow through the device as a plurality of arrows. The fan 106 pushes air at about 315 cubic feet per minute through a passage between the fan guard 116 and the fan cover 丨 30? . By way of illustration, the fan is a backward-curved automatic impeller fan made by EBM. No Back Pressure 'This fan can propel 710 cubic feet per minute of air. The air is pressurized downward through the central holes 148 and 138 of the device, and through the air directional nozzles 154. Just as air flows through the nozzles, the angled nozzles produce a centrifugal air flow over the dome 102. The air then flows to the heat exchange chamber 114, and rises through the chamber 114 based on the negative pressure of the fan 106. To achieve effective cooling of the air, the cooling coils are supplied with glycol by a coolant supplier 199, such as a refrigerator or heat exchanger, which keeps the coolant at about 10 ° C. The coolant is provided at a flow rate of 40 to 60 pounds per square inch at a flow rate of about 0.4 to 0.6 gallons per minute. A schematic diagram of the flow of the coolant through the device is shown in Figure 8 below. To provide further cooling, the coolant is also directed through the lamp assembly 110. Specifically, the cooling fluid flows through the cooling plate 144 of the lamp assembly. The coolant supply for the lamp assembly may be independent of the dome heat exchanger coil coolant supply. Suitably 'the coolant can be directed through the antenna coil. The antenna coil systems can be coupled to a hollow tube of the coolant supply. Once cooled, the fan pushes the air up into the air channel U7 between the fan shield 116 and the fan cover 130 to push the cold again. ___ ______________ ——__ This paper standard is applicable to China. CNS) From 叱 & (210x247.Male and female) ^ --- ^ ---- XIANG 1 ----- ^ ------- ^ (诮 1Read the back-notes and repeat them again (5) Description of the invention (9) The air goes down to the lamp assembly 110 'and passes through the nozzles 154 to complete a closed loop air flow process. This centrifugal air flow pattern forms a vortex on the dome 'its pushing air from the inner or central part of the dome to the outer part of the dome' produces a larger and more uniform air flow in the circle On the top surface. This air vortex cools the surface of the dome more than if the air was simply directed down by the fan to the surface of the dome. Figure 3 is a perspective view of the nozzle assembly 112. The nozzle assembly n 2 includes a nozzle ring 300 and a plurality of nozzles 154. The nozzle ring 300 includes a vertical portion 302 for mounting to the inner surface of the inner casing, a horizontal portion 304 for supporting the lamp assembly and defining the central hole 138, and a central connection between the vertical portion 302 and One of the horizontal portions 304 is an inclined portion 306. The inclined portion is inclined at about 45 from the vertical inward. . The vertical and horizontal portions 302 and 304 include a plurality of mounting holes 308 and alignment cutouts 3 10. The inclined portion 306 nozzle ring 300 includes a plurality of holes 152 (e.g., twenty-six holes) formed in a ring about one edge of the inclined portion 306. Each hole holds a nozzle 154 in a specific direction 'will be detailed together with Figures 4 and 5 in the posterior bureau of the Ministry of Economics and Industry. ^ Printed by the Consumer Cooperative. Figure 4 depicts a perspective of the nozzle 154 5 and FIG. 5 are cross-sectional views of a nozzle 154 in FIG. 4 taken along line 5_5. To best understand the present invention, the reader should refer to Figures 4 and 5 at the same time. The nozzle 154 has a flange for mounting against a nozzle ring hole. One of the cylindrical nozzle portions 402 extending from the flange 400. The nozzle is formed at an angle 500 with respect to a central axis 502 of the nozzle. As such, the orientation of the nozzle about the central axis 502 determines the angle at which the air flow passes through the nozzle. The arc-shaped exhaust portion of the nozzle 400 defines an exhaust hole 406. _________ -12- This paper size applies to China (CNS Τλ4 ^^ Τ2! 077ν7: Λ Γ 一 '-^ 4702 9 at Η7 V. Description of the invention (10) The mouthpieces 154 are roughly oriented in the ring, so that It is offset by 1 to 5 degrees from the center of the device. This alignment is achieved by an alignment plane 408. Each alignment plane Btt is connected to an adjacent confirmation plane. Once assembled, all such nozzles are properly As such, the shaft 500, which extends through the central exhaust hole 406 of the nozzle, is cut in a ring that is just above the dome and has a radius of 3 to 4 inches. Therefore, all 36 The air flow from the nozzles forms the air vortex on the dome. The device features a safety connector that prevents injury or damage to the hardware. For example, in Figure 2, an air flu detector 2 〇 is provided, when the fan fails, it is used to trigger the radio frequency power supply and the heating lamps to be disconnected. The sensor is installed to the housing assembly and contains an electronic air flow switch 'It turns on the The circuit reduces air flow. In addition, there are two The overheating sensors 202 and 204 are disposed on the lamp assembly 110. In the event that the dome is overheated, 'it is used to trigger the RF power supply and the lamp power supply to be disconnected. Furthermore,' there is a sensing cover for the fan, the RF Cables and the connecting switches of the control cables 2 06, so that the removal of the cover or one of the electrical thinners will trigger the RF power supply, lamp power supply, and the high-level economical decision of the static disk. # " Bureau employees consume a closed circuit printed by Hezhu, where the chuck holds a wafer in the engraving chamber during electrochemical processing. Figure 6 depicts the closed-circuit circle included in the present invention. A schematic diagram of one of the circuits in the top temperature control device. The electronic circuit includes a lamp driver 600 for the lamp array 110, the fan 106, the infrared temperature sensor 1, and control for the The fan and a plurality of relays 604 to the power source of the lamp driver. Some connectors 606 controlled by the sensor 6] 2 are used to control the -------- -13- This paper string scale is applicable to China National Nuclear Soap (CNS) Λ Secret ---------------- -------
Q λ a '7 η 五、發明説明（u ) Ϊ I 、1Τ 等繼電器604，其中該等感測器612係感測空氣流、過熱以 及各式連結開關。該等連結器606驅動該等繼電器604進入 一閉路位置，致使電源被施加至該風扇106與該燈驅動器 600。更特別地’ 3 1, 208伏特交流電壓被施加至配電給該 六個燈（L1至L6)的該燈驅動器600。兩個燈串連地被連接 至每一相位’例如一三角形排列。當以208伏特交流電壓 跨過每一對燈，該陣列產生約1,600瓦之能量。被施加至 該等燈之該電壓，係藉由該燈驅動器而被控制，致使該燈 強度為可控制的。若一感測器12顯示一空氣流的問題、一 過熱位置或一連結器破裂，該連結器606切斷來自該等繼 電器604之電源。隨之，該等繼電器切至一通常地開路位 置，切斷來自該燈驅動器600以及風扇1 06之電源。從而， 該圓頂熱控制裝置被去活化。 為控制該圓頂溫度，一類比至數位轉換器608被用來 轉換來自該紅外線溫度感測器1 08之類比信號為一數位信 號，其中該數位信號係被施加至一電腦6 10»該電腦610分 析該溫度感測器信號，以產生一燈驅動器控制電壓（途徑 614)。此電壓係由該電腦以一數位信號形式產生，且在一 數位至類比轉換器616中，被由數位至類比轉換並隨後送 至該燈驅動器600。此電壓形成該燈驅動器設定點，為響 應此電壓，致使該燈驅動器將改變該燈陣列之強度以達一 特定溫度，如該溫度感測器所量測。 該電腦610係一般目的用電腦含有一中央處理位元618 及一記憶體620。當執行一軟體程式時，該一般目的電腦 __________- 14- ___ 本紙張尺度適爪中國國家掠率（CNS )八4圯& ( 公;(;，) 4470 2 9 Λ： ]Γ 經"•部中次標準貝工消费合竹社印紫 五、發明説明（12 ) 變成一特殊目的裝置，其完成該軟體程式之該等步驟。被 以該電腦執行之一程式’係作為產生該燈驅動器設定點電 壓之一程序，亦即一溫度控制程序。 第7圖描繪軟體提供方法且由該電腦執行的該溫度控 制程序700之一流程圖。程序700開始於步驟702並繼續至 步驟704。在步驟704該程序建立一溫度設定點。此數值係 典型地由一使用者經一鍵盤鍵入。在步驟7〇6，該程序量 測該圓頂溫度，例如讀取由該A/D轉換器產生之該數位化 溫度量測結果。在步驟708 ’該測得溫度與該設定點溫度 比較’以產生一誤差值。此誤差值被用在步驟71〇,以產 生一燈藤動器控制電壓，其將使該測得溫度更接近該設定 點溫度。在步驟7 12 ’該程序質疑該程序是否應繼續。若 該疑問係肯定答覆該程序回到步驟706，繼續該溫度控制 流程。然而’若該疑問係否定答覆，該程序終止於步驟7 14。 第8圖描繪該冷卻液流經本發明裝置之一示意圖。該 冷卻液供應器199係被耦接至一流入分配崎管8〇〇流出分配 崎管802。該流入分配崎管800分配該冷卻液流至該熱交換 器線圈128、該等天線線圈1 〇4(最恰當的）以及該燈冷卻平 板144。自該等冷卻元件流來之該冷卻液被耦接至崎管 802，並且最終回到該冷卻液供應器199。 雖然以上敘述揭露一冷卻液流，本發明可利用一被加 熱的傳熱液體’其可升高該空氣以及該圓頂之溫度。照此， 本發明應被廣泛地理解為含括在該閉迴路系統中該空氣加 熱與冷卻兩者。 ____-15- 本紙張疋度適用中國國家榡隼（CNS ) /\4叱怙（) ' ...... n 1 I -II I - - I - n - - ^^1 T. 、-=lfl 讀背而之注&事項存續巧本Π ) 470 2 9 Λ7 ______ Η* 五、發明説明（13 ) 在本發明一第二實施例中，本發明裝置侷限該空氣流 至一轴向途徑或朝下層流of空氣由該風扇至該圓頂anij 該等空氣流均勻地在該外表面圓頂上，朝向該熱交換腔 室。此結構最大化了該圓頂材料的該對流冷卻。 ，裝_ 第9圖描綠本發明第二實施例之該閉迴路圓頂溫度控 制裝置900的一替換實施例之一部份截面爆炸圖第〗〇圖 描繪該閉迴路之一已組裝的橫截面視圖，圓頂溫度控制裝 置900顯不該空氣流途徑如同複數個箭頭經過該裝置。為 求最佳地瞭解本發明，讀者應同時參考第9及1 〇圖^ 該裝置900係被安裝在一電漿蝕刻反應腔室的一傳統 陶瓷圓頂93 8之上。如同前述實施例，該圓頂93 8係由一感 應線圈940(例如一天線）所外接，該天線之尺寸係由感應 線圈支架902控制。該線圈係傳統地由射頻能源所驅動， 以在該腔室中產生一磁性電漿場，以進行該蝕刻流程。無 論電漿是否存在，本發明維持該圓頂之表面於一相對地恆 溫0 更特別地，該裝置900包含一軸向風扇組件9〇4、一紅 外線感測器906、一燈總成908、一熱交換腔室91〇、以及 一隔板912。該裝置具有實質上圓柱型且被以一連接器總 成939連接至該蝕刻反應腔室的環形邊緣（未示出）之一外 殼體914。本發明為協助升起和對齊該圓頂，一對握柄Μ# 藉由複數個架子926被連結至該外殼體之外表面。該裝置 亦含有一圓柱型内殼體916，其具有較該外殼體914略小的 半杈。該等内殼體與外殼體係關於穿過該裝置之一中央軸 ___- 16- 本紙俵尺度適用中國國家樣隼（CNS ) AAfyjtTi 21〇κ2^Ί^ ------------------Q λ a '7 η 5. Description of the invention (u) Ϊ I, 1T and other relays 604, where the sensors 612 are used to sense air flow, overheating, and various connected switches. The connectors 606 drive the relays 604 into a closed circuit position, causing power to be applied to the fan 106 and the lamp driver 600. More specifically, a '3, 208 volt AC voltage is applied to the lamp driver 600 which distributes the six lamps (L1 to L6). Two lamps are connected in series to each phase 'e.g. a triangular arrangement. When crossing each pair of lamps at 208 volts AC, the array produces approximately 1,600 watts of energy. The voltage applied to the lamps is controlled by the lamp driver, so that the intensity of the lamp is controllable. If a sensor 12 indicates a problem with air flow, an overheated position, or a connector is broken, the connector 606 cuts off power from the relays 604. Accordingly, the relays are switched to a normally open position, cutting off the power from the lamp driver 600 and the fan 106. Thereby, the dome thermal control device is deactivated. To control the temperature of the dome, an analog-to-digital converter 608 is used to convert the analog signal from the infrared temperature sensor 108 to a digital signal, wherein the digital signal is applied to a computer 6 10 »the computer 610 analyzes the temperature sensor signal to generate a lamp driver control voltage (path 614). This voltage is generated by the computer in the form of a digital signal, and in a digital-to-analog converter 616, it is digital-to-analog converted and then sent to the lamp driver 600. This voltage forms the set point of the lamp driver. In response to this voltage, the lamp driver will change the intensity of the lamp array to a specific temperature, as measured by the temperature sensor. The computer 610 is a general purpose computer including a central processing bit 618 and a memory 620. When executing a software program, the general purpose computer __________- 14- ___ This paper is suitable for Chinese National Scanning Rate (CNS) 8 4 圯 &(公;(;,) 4470 2 9 Λ:] Γ 经 " • Ministry-level standard shellfish consumer Hezhushe printed purple 5. Invention description (12) turns into a special purpose device, which completes the steps of the software program. A program executed by the computer is used to generate the A program of the set point voltage of the lamp driver, that is, a temperature control program. FIG. 7 depicts a flowchart of the temperature control program 700 provided by the software and executed by the computer. The program 700 starts at step 702 and continues to step 704 In step 704, the program establishes a temperature set point. This value is typically entered by a user via a keyboard. In step 706, the program measures the dome temperature, for example, reads the conversion by the A / D The digitized temperature measurement result generated by the controller. In step 708, 'the measured temperature is compared with the set point temperature' to generate an error value. This error value is used in step 71, to generate a lamp ratchet control Voltage, which will make this measurement The temperature must be closer to the set point temperature. At step 7 12 'The program questions whether the program should continue. If the question is answered affirmatively, the program returns to step 706 to continue the temperature control process. However,' if the question is a negative answer The procedure ends at steps 7 to 14. Figure 8 depicts a schematic diagram of the coolant flowing through a device of the invention. The coolant supply 199 is coupled to an inflow distribution pipe 800 and an outflow distribution pipe 802. The The inflow distribution pipe 800 distributes the coolant flow to the heat exchanger coil 128, the antenna coils 104 (the most appropriate), and the lamp cooling plate 144. The coolant flow from the cooling elements is coupled It connects to the saki tube 802 and finally returns to the coolant supply 199. Although the above description discloses a coolant flow, the present invention can utilize a heated heat transfer liquid 'which can raise the temperature of the air and the dome .Accordingly, the present invention should be widely understood as including both the heating and cooling of the air in the closed loop system. ____- 15- The paper is suitable for China National Standards (CNS) / \ 4 叱 怙 ( ) '... n 1 I -II I--I-n--^^ 1 T. 、-= lfl Read the back note & the continuity of the matter Ⅱ) 470 2 9 Λ7 ______ Η * V. Description of the invention (13) In a second embodiment of the present invention, the device of the present invention limits the air flow to an axial path or downward laminar flow of air from the fan to the dome anij. The air flows are evenly on the outer surface dome, facing the Heat exchange chamber. This structure maximizes the convective cooling of the dome material. Figure 9 depicts a partial cross-section exploded view of an alternative embodiment of the closed-loop dome temperature control device 900 of the second embodiment of the present invention. Figure 0 depicts an assembled horizontal cross-section of one of the closed-loop circuits. In cross-sectional view, the dome temperature control device 900 shows that the air flow path passes through the device as if a plurality of arrows pass through the device. For the best understanding of the present invention, the reader should refer to Figures 9 and 10 at the same time. The device 900 is mounted on a conventional ceramic dome 93.8 in a plasma etching reaction chamber. As in the previous embodiment, the dome 938 is externally connected by an induction coil 940 (e.g., an antenna), and the size of the antenna is controlled by the induction coil support 902. The coil is traditionally driven by a radio frequency energy source to generate a magnetic plasma field in the chamber to perform the etching process. Regardless of the presence or absence of plasma, the present invention maintains the surface of the dome at a relatively constant temperature. More specifically, the device 900 includes an axial fan assembly 904, an infrared sensor 906, a lamp assembly 908, A heat exchange chamber 91 and a partition plate 912. The device has an outer casing 914 that is substantially cylindrical in shape and is connected to a circular edge (not shown) of the etch reaction chamber by a connector assembly 939. To assist in raising and aligning the dome, a pair of handles M # are attached to the outer surface of the housing by a plurality of shelves 926. The device also includes a cylindrical inner housing 916 having a half branch slightly smaller than the outer housing 914. The inner shell and outer shell system pass through one of the central axes of the device ___- 16- The standard of this paper is applicable to China National Sample (CNS) AAfyjtTi 21〇κ2 ^ Ί ^ ---------- --------
A 經潢部中决桿卑局’‘Μ工消费合竹社印繁 ο 2 9 Λ? ________Η，； ____ _____ 五、發明説明（14 ) 而共軸的。該等内殼體與外殼體係在一小間距隔開的關係 中以界定其間之一空間918。在該空間918中被安裝複數個 有散熱片的熱交換器管920，致使該外殼體、内殼體以及 管子形成該熱交換腔室9 10。該翼管總成提供較大的表面 區域’以使更充分地在該腔室中該空氣之對流冷卻或加熱 成為可能。 一風扇罩蓋942被安裝在該外殼體之頂緣上，其為該 整個裝置形成一閉迴路環狀系統，亦即，環流在該裝置中 之空氣不會被由該裝置排出。在該殼罩中，本發明之其他 元件係被安裝至一被固定至該外殼體9 14内表面的安裝環 922。該等元件係依照下列次序被堆疊於該安裝環922上： 該隔板912支撐在該安裝環922上、一燈組件908被固定至 該隔板912、以及該風扇組件904被固定至該燈總成904。 在此裝置中’該風扇組件904推送空氣經該熱交換腔室910 並進入風扇組件904以引起空氣拍向地流經該燈總成9〇8與 隔板912。 該風扇組件904由該腔室910以約350立方英尺/分推送 空氣。該風扇組件904含有一風扇934(馬達934Α、安裝架 934Β以及扇葉934C)、一上導葉930、一風扇罩931以及一 下導葉932 °例如說，該風扇係由Kooltronics Inc.所製之 一轴向流風扇。當沒有反壓，此一風扇可以8〇〇立方英尺/ 分推送空氣於零吋汞柱。該風扇迫使空氣向下經過由該丁 導葉932以及該燈總成908所界定之一中央孔928。該下導 葉含有複數片空氣定向導葉片936,其導引該風扇之空氣 ________-17- _ 本紙張尺度適用中國國家標讀-(CNS )/\叫.格（2丨) " n· m ____!____13^r____ _ _ τ - - - ----求 、-b's <計l間¾背而之注念肀项再填艿本·Ώ ) a 4 7 0 2 9 a? H7 五、發明説明（15 ) .装- -° 流由一線性且徑向速度進入一軸向向下方向。該下導葉932 根據以下第13及14圖被詳細揭露。該空氣，因與該圓頂938 之中心衝激，隨後均勻地徑向朝外流至該圓頂938之頂表 面上，並進入該熱交換腔室910。該空氣流導向系統均勻 地分配該空氣流藉此使該圓頂冷卻效率最大化。基於由該 風扇934產生之負壓，該空氣上升經過該腔室91〇。為達成 充分的冷卻（或加熱），該等翼管（根據以下第18圖詳述）係 由一液體供應器944提供傳熱液體（例如水）^通常該液體 僅係一具有大致2 2 °C溫度的水之穩定流，以冷卻該空氣和 圓頂。重要地’本發明具有以傳熱液體溫度高達35 X；，以 保持一持續的圓頂溫度之能力。該冷卻液被以約〇. 4至〇 6 加侖/分之一流速被供應。普遍地，本發明第一實施例中， 一獨立熱交換器供應調節溫度的傳熱液體至該圓頂溫度控 制單元，在這方面，本發明之第二實施例略去此要件。 經消部中央if枣局只X,消f合竹社印裝 為提供該系統進一步冷卻，該傳熱液體亦被導引經該 燈總成908，如同根據第丨2圖將被詳述者。通常，該冷卻 液流經在該燈總成908中之一冷卻罩952。由此，該等燈946 之基座被保持在一相對低溫。為該裝置之簡單的組裝與拆 卸，該傳熱液體經由「快拆」裝配被提供至該燈總成’以 及電源被經由纜線裝置上之易拆連接件供應至該等燈。 一旦冷卻’該風扇934由該熱交換腔室91〇柚出該空 氣，並迫使該空氣經過該下導葉932以及該燈總成908之中 心以完成一閉迴路空氣流途徑。該上導葉阻止來自該軸向 風扇葉片之反向空氣流干擾該有效循環的空氣流形式。誃 本紙乐尺度適用中國國家榡準（cns ) ί;;—. 經漪部中次打聲局另Η消費合竹社印裝 44702 9 Λ7 H? 五、發明説明（16 ) 空氣流系統產生一不變的空氣通道至該圊頂之中心，並隨 後放射狀層流至該圓頂之外側部份，產生更大、且更均句 的空氣流於該圓頂表面上 已顯示但並未形成本發明之一部件的一額外元件是該 射頻導件948(亦即，一射頻饋入裝置），其由位於該罩蓋942 中之一匹配線路耗合射頻能量至該線圈940。該饋入裝置 94 8係沿部件949被完整屏蔽’亦即’在該隔板9丨2之外側、 用以防止相鄰電氣元件上電氣雜訊之該部件。在該隔板912 中之該饋入裝置之該部件951，通常係一未屏蔽導件。重 要地’纜線裝置、電路以及感測器皆由該射頻能量場被完 整地屏蔽，以防止系統控制電路上之電子干擾。該風扇_ 燈-隔板總成作用如同一射頻屏蔽，其限制來自該天線線 圈之該射頻輻射至該風扇-燈-隔板總成内之空間。因此， 射頻干擾該電子電路被實質的降低。 第11圖描繪該隔板912之一透視圖。該隔板912具有一 下安裝凸緣1100、一上安裝凸緣11 〇2以及一傾斜壁部11 〇4 連接該上安裝凸緣1102至該下安裝凸緣11〇〇 ^該隔板912 界定一中央孔1112，空氣流經該孔朝向該園頂。該下安裝 凸緣1100含有複數個安裝伸出部1106,用以固定該隔板912 至該安裝環（第9圖之922)，通常藉由使用螺絲針。類似地， 該上安裝凸緣1102含有複數個安裝伸出部丨丨丨8用以固定該 隔板9 12至該燈總成（第9圖之908)，通常藉由使用螵絲釘。 該隔板912之該傾斜部1104由該下安裝凸緣丨丨〇2向内延 伸’以相對於水平大約5 5度之一角度至該上安裝凸緣 _ ___-19- 本紙張尺度適用中國國家搮準（CNS ) Λ4ί.Π ( 210χϋ >' \ . ---------裝------訂------ (""閱讀背而之注"事項乃硪寫本頁) 經Μ部屮决標卑局負工消资合竹社印哭 “70 2 9 Λ7 Η" .五、發明説明（17 ) 11 04。沿該傾斜部1 104至約一半，係一感測器安裝1108。 該感測器安裝含有一安裝孔洞1 11 〇，其相對於水平約係5 8 度角。在有安裝經該隔板912之感測器的情況下，該紅外 線感測器感測該圓頂之表面上半徑約1 · 8吋之一區域°這 提供該圓頂表面溫度之一正確指示供該溫度控制電子裝置 之用。該隔板912亦含有一凹口 1114及一孔1116’其協助 將該射頻導件經該隔板9 12輸至該線圈。 第12圖描繪該燈總成908之一爆炸透視圊。該燈總成 908係藉由複數個由該安裝凸緣丨2〇6凸出之伸出部1202被 固定至該隔板。該燈總成具有兩個主要元件（除該電氣線 路及該等未示出的球形頭之外）。該第一元件係該基座1208 以及該第二元件係該罩蓋1210。該基座1208係由一實心銘 塊被銳軋，以為該複數個球形頭（在第1 〇圖之該截面圖中， 示為950)、該中央空氣流孔丨21 2、一冷卻液通道12 14、以 及複數個球形頭插口 1216形成一反射器。該反射器之該等 側面係傾斜在約60度，且該等表面係鍍金的，以增強反射。 该罩蓋12 10含有插口 1218，其符合在該基座1208中之該等 插口 1216。為組裝該燈總成，該罩蓋丨2 1〇係被定位在該基 座1208之上，該等插口被對齊，且該罩蓋與基座彼此are braised。由此，該罩蓋12 1〇與通道丨2 14形成一導管（亦即 第10圖中之冷卻液罩951)以傳送冷卻液經該燈總成9〇8。 較佳地，有六個球形頭插口規律地分佈在相對該總成之中 心約一 7.5吋之半徑。該反射器輪廓如同球形頭的佈署有 效的傳送該紅外光能以均勻地加熱該圓頂。 _______-20- 本紙張尺度適用中國國家枒苹（CNS ) Λ4^#, ( ΖΙΟχπϋϊ '一'· ---------— ---;------裝------訂------/, ^70 2 9 Λ· 1Γ 18 五、發明説明（ 閲讀汴而之注&事項4"寫本頁 第13至17圖描繪該風扇總成904之不同元件的細部透 視圖。為求最佳地瞭解本發明，讀者應同時參考第13至18 圖。 如上述根據第9和10圖，該風扇總成904含有一風扇 934(馬達、扇葉與安裝架）、一上導葉930以及一下導葉 932。該等上導葉及下導葉藉由一風扇罩931彼此分隔開 的。 該下導葉93 2(第13圖中所示）界定一中央孔1300，當該 下導葉932係被固定在該燈總成頂上，該孔丨3 〇〇係與該燈 總成之中央空氣流孔對齊。該導葉932含有複數個導葉片 93 6(其中之一被示出），被定位在約該導葉93 2之内週緣。 每一該等葉片936皆被彎成用以進行該空氣流動控制，其 保持一軸向空氣流經過該中央孔丨3 〇〇且均勻地分配該空氣 至該圊頂表面。大體上’該下導葉932集中該空氣流由該 風扇至該圓頂之中央上。所以，此軸向空氣流放射狀地移 動越過該圓頂’朝向該圓頂的邊緣，並且對流地冷卻該整 個圓頂。 經淨.部中决桴卑局”：^工消費合竹杜印裝A. The Ministry of Economic Affairs and the Ministry of Economic Affairs ’‘ M Workers ’Consumption Co., Ltd. Yinfan ο 2 9 Λ? ________ Η, ____ _____ 5. Description of the invention (14) and coaxial. The inner and outer shell systems are in a closely spaced relationship to define a space 918 therebetween. A plurality of finned heat exchanger tubes 920 are installed in the space 918, so that the outer casing, the inner casing and the tubes form the heat exchange chamber 9 10. The wing tube assembly provides a larger surface area ' to make it possible to more fully convectively cool or heat the air in the chamber. A fan cover 942 is mounted on the top edge of the outer casing, which forms a closed loop ring system for the entire device, that is, the air circulating in the device will not be discharged by the device. In the housing, other elements of the present invention are mounted to a mounting ring 922 which is fixed to the inner surface of the outer casing 914. The components are stacked on the mounting ring 922 in the following order: the partition 912 is supported on the mounting ring 922, a lamp assembly 908 is fixed to the partition 912, and the fan assembly 904 is fixed to the lamp Assembly 904. In this device, the fan assembly 904 pushes air through the heat exchange chamber 910 and into the fan assembly 904 to cause the air to flow through the lamp assembly 908 and the partition plate 912. The fan assembly 904 pushes air from the chamber 910 at about 350 cubic feet per minute. The fan assembly 904 includes a fan 934 (motor 934A, mounting bracket 934B, and fan blade 934C), an upper guide vane 930, a fan cover 931, and a lower guide vane 932 °. For example, the fan is manufactured by Kooltronics Inc. An axial flow fan. When there is no back pressure, this fan can push air to zero inches of mercury at 800 cubic feet per minute. The fan forces air down through a central hole 928 defined by the vane 932 and the lamp assembly 908. The lower guide vane contains a plurality of air guide vanes 936, which guide the air of the fan ________- 17- _ This paper size is applicable to Chinese national standards-(CNS) / \ 叫. 格 （2 丨) " n · M ____! ____ 13 ^ r ____ _ _ τ------- Ask, -b's < Count between the two notes and fill in the transcript.)) A 4 7 0 2 9 a? H7 V. Description of the invention (15). Installation--° flow from a linear and radial velocity into an axial downward direction. The lower guide vane 932 is disclosed in detail according to FIGS. 13 and 14 below. The air, impinging on the center of the dome 938, then flows radially outward uniformly onto the top surface of the dome 938 and enters the heat exchange chamber 910. The airflow directing system evenly distributes the airflow thereby maximizing the cooling efficiency of the dome. Based on the negative pressure generated by the fan 934, the air rises through the chamber 91o. In order to achieve sufficient cooling (or heating), the wing tubes (detailed in accordance with Figure 18 below) are provided by a liquid supplier 944 with a heat transfer liquid (such as water) ^ Usually the liquid is only one with approximately 2 2 ° A steady flow of water at a temperature of C to cool the air and the dome. Importantly, the present invention has the ability to maintain a continuous dome temperature with a heat transfer liquid temperature of up to 35 ° C. The coolant is supplied at a flow rate of about 0.4 to 06 gallons per minute. Generally, in the first embodiment of the present invention, an independent heat exchanger supplies a temperature-adjusting heat transfer liquid to the dome temperature control unit. In this regard, the second embodiment of the present invention omits this requirement. If the central bureau of the Ministry of Economic Affairs and the Jujube Bureau is only X, it is printed to provide the system for further cooling. The heat transfer liquid is also guided through the lamp assembly 908, as will be described in detail according to Figure 2 . Typically, the coolant flows through one of the cooling hoods 952 in the lamp assembly 908. As a result, the base of the lamps 946 is maintained at a relatively low temperature. For simple assembly and disassembly of the device, the heat transfer liquid is provided to the lamp assembly 'via a "quick-release" assembly, and power is supplied to the lamps via a detachable connection on the cable device. Once cooled, the fan 934 exits the air from the heat exchange chamber 910 and forces the air through the lower guide vane 932 and the center of the lamp assembly 908 to complete a closed loop air flow path. The upper guide vane prevents the reverse air flow from the axial fan blade from interfering with the effectively circulating air flow pattern. The paper music scale is applicable to the Chinese National Standards (cns) ί ;;-. The Ministry of Economics and Intermediate Sound Bureau of the People's Republic of China also prints on the consumer Hezhu Society 44702 9 Λ7 H? 5. Description of the invention (16) The air flow system produces a Unchanged air passages to the center of the apex, and then radial laminar flow to the outer part of the dome, creating a larger and more uniform air flow on the surface of the dome has been shown but not formed An additional component of a component of the present invention is the radio frequency guide 948 (ie, a radio frequency feeding device), which consumes radio frequency energy to the coil 940 by a matching line located in the cover 942. The feeding device 94 8 is completely shielded along the component 949, that is, the component on the outside of the partition 9 丨 2 to prevent electrical noise on adjacent electrical components. The part 951 of the feeding device in the partition 912 is usually an unshielded guide. Important ground cables, circuits, and sensors are completely shielded by the RF energy field to prevent electronic interference on the system control circuit. The fan_lamp-baffle assembly functions as the same RF shield, which limits the radio frequency radiation from the antenna coil to the space inside the fan-lamp-baffle assembly. Therefore, the radio frequency interference of the electronic circuit is substantially reduced. Figure 11 depicts a perspective view of one of the partitions 912. The partition plate 912 has a lower mounting flange 1100, an upper mounting flange 1 0 2 and an inclined wall portion 11 0 4 connecting the upper mounting flange 1102 to the lower mounting flange 1 100. The partition 912 defines a A central hole 1112 through which air flows towards the top of the garden. The lower mounting flange 1100 includes a plurality of mounting protrusions 1106 for fixing the partition plate 912 to the mounting ring (922 in FIG. 9), usually by using a screw pin. Similarly, the upper mounting flange 1102 includes a plurality of mounting protrusions 8 for fixing the partition 9 12 to the lamp assembly (908 in FIG. 9), usually by using a screw. The inclined portion 1104 of the partition plate 912 extends inward from the lower mounting flange 丨 丨 2 to the upper mounting flange at an angle of about 55 degrees relative to the horizontal _ __19- This paper size applies to China National Standards (CNS) Λ4ί.Π (210χϋ > '\. --------- Installation ------ Order ------ (" " Read the back note " (The matter is not written on this page) After the Ministry of M ’s decision on bidding, the Bureau of Work and Consumer Affairs, Hezhu Society printed "70 2 9 Λ7 Η". V. Description of the invention (17) 11 04. Along the slope 1 104 to About half, it is a sensor installation 1108. The sensor installation contains a mounting hole 1 1 10, which is about 58 degrees with respect to the horizontal. In the case of the sensor installed through the partition 912 The infrared sensor senses an area of a radius of about 1.8 inches on the surface of the dome. This provides a correct indication of the temperature of the surface of the dome for the temperature control electronics. The partition 912 also contains A notch 1114 and a hole 1116 'assist in feeding the RF guide to the coil through the partition 9 12. Figure 12 depicts an explosion perspective of the lamp assembly 908. The lamp assembly 908 is provided by plural A projection 1202 protruding from the mounting flange 206 is fixed to the partition. The lamp assembly has two main elements (except the electrical wiring and the ball heads not shown). The first element is the base 1208 and the second element is the cover 1210. The base 1208 is sharp-rolled from a solid block to consider the plurality of spherical heads (the cross-sectional view in FIG. 10). (Shown as 950), the central air flow hole 21, a coolant channel 12 14 and a plurality of spherical head sockets 1216 form a reflector. The sides of the reflector are inclined at about 60 degrees, and The surfaces are gold-plated to enhance reflection. The cover 12 10 contains sockets 1218, which conform to the sockets 1216 in the base 1208. To assemble the lamp assembly, the cover 2 10 is Positioned above the base 1208, the sockets are aligned, and the cover and the base are braised to each other. As a result, the cover 12 1 0 and the channel 丨 2 14 form a conduit (that is, Figure 10) The cooling liquid cover 951) is used to transfer the cooling liquid through the lamp assembly 908. Preferably, there are six spherical head sockets. It is distributed in a radius of about 7.5 inches relative to the center of the assembly. The outline of the reflector is like the deployment of a spherical head to effectively transmit the infrared light energy to evenly heat the dome. _______- 20- This paper size applies to China Ping Ping (CNS) Λ4 ^ #, (IZIOχπϋϊ '一' · ----------- ---; -------- install ------ order ------ // , ^ 70 2 9 Λ · 1Γ 18 V. Description of the invention (read the note & item 4 " on pages 13 to 17 of this page depict detailed perspective views of the different components of the fan assembly 904. For the best understanding of the invention, the reader should refer to Figures 13 to 18 at the same time. As described above according to FIGS. 9 and 10, the fan assembly 904 includes a fan 934 (motor, fan blade and mounting bracket), an upper guide vane 930, and a lower guide vane 932. The upper and lower guide vanes are separated from each other by a fan cover 931. The lower guide vane 93 2 (shown in FIG. 13) defines a central hole 1300. When the lower guide vane 932 is fixed on the top of the lamp assembly, the hole 丨 300 and the center of the lamp assembly Air flow holes are aligned. The guide vane 932 contains a plurality of guide vanes 93 6 (one of which is shown), and is positioned about the inner periphery of the guide vane 93 2. Each of the blades 936 is bent to perform the air flow control, which maintains an axial air flow through the central hole 300 and uniformly distributes the air to the top surface of the cymbal. Substantially 'the lower guide vane 932 focuses the air flow from the fan to the center of the dome. So, this axial air flow moves radially over the edge of the dome ' toward the dome, and convectively cools the entire dome. Jingjing. The Ministry and the Central Committee of the Ministry of Justice and Humble Bureau ": ^ Industrial consumption and bamboo printing
.I I - I -I 更特別地’該導葉932含有一葉片安裝環丨3 〇2以及複 數葉片936。該葉片安裝環1 302係由一實心鋁塊被銑軋出 含有用以安裝至該燈總成上表面之一垂直部13〇4、用以支 樓該風扇罩931並界定該中央孔13〇〇之一安裝凸緣1306 ' 以及用以居中連結該垂直部13〇4與該凸緣13〇6之一傾斜部 1308。該傾斜部i308係由垂直向内傾斜在约4^ 。該風扇 罩、導葉環以及燈殼體係以適當尺寸以給予該最大空氣流 本紙张尺度相中_家標準（CNS) ( 經溁部中央桴"局K工消费合作社印鉍 Λ7 !! 五、發明説明（19 ) 至該圓頂表面。該垂直部1304與該凸緣1306含有複數個安 裝孔，以分別地連接該導葉932至該風扇罩以及該燈總成。 該傾斜部1308含有複數個葉片安裝孔1310(例如九個孔）， 形成且規律地分佈在約該傾斜部1308之内邊緣。每一孔維 持一葉片936於詳述如後之一特定排列方向中。 如第14圖所示，每一葉片936具有由其邊緣14 04延伸 之一銷釘1400用以定位該葉片至該安裝環1302上。該銷釘 1400係被壓入配合該等安裝孔1310 ^每一葉片係以該燈總 成孔936半徑的10%之一曲率半徑1402成形。該曲率對更 改來自一放射狀方向之該空氣流速方向至一圓錐線流，以 均勻覆蓋該圓頂表面是重要的。當固定至安裝環1302時， 一邊緣1404緊鄰傾斜表面1308。由此，該等葉片在該導葉 936之中央孔丨300附近之定向以及曲率，保持該軸向空氣 流朝向該圓頂。 該下導葉93 2係被固定至該風扇罩931，如第15圖中所 示。該罩93 1係一圓柱1 500，其界定一中央孔j 5〇2。該圓 柱1500之上緣與下緣末端是外圍安裝凸緣15〇4與15〇6。該 等凸緣具有安裝孔以便於固定該等上導葉與下導葉至該 罩。此外，該風扇安裝架（未示出）係被固定至上&緣15〇6, 以維持該風扇在該罩中位於一中央位置。 第16圖係描繪該上導葉93〇之一頂部平面圖，以及第J 7 圖描繪該上導葉930之一側面平面圖。該上導葉93〇係一金 屬衝切薄板，含有外切一中央孔16〇2的複數個導葉片 16〇〇。特別地，該導葉930含有一安裝環16〇4，其具有複 ______________ 22- 、張尺度適用中國國挛樣準（CNS } Λ4^t'] ----------- I j I I -1— ^^1 I -I I 1^1 —^ i --- ^^1 I I I X. . 1^1 - _ n __ Js 4 〇2 9 Λ7 Η 7 五、發明説明（2〇 ) 數由其向内延伸之葉片1600(例如八片）。該安裝環含有一 模式之安裝孔1606，用以固定該上導葉930至該罩931。該 等導葉片延伸切於該安裝環1604之内緣"每一葉片1600係 約1.75吋寬，且以一 25度±15%之角度向下彎向該風扇《 3玄專葉片延伸於一相對於該風扇旋轉方向之方向中。該上 導葉930減少了否則會發生在該閉迴路冷卻系統中之該回 流。由此’藉由減少該回流，該上導葉顯然增大朝向該圓 頂之該空氣流。 第18圖描繪該等盤曲管920之一透視圖，其可冷卻流 經該冷卻腔室之空氣。該等管子92〇具有一 〇 375吋内徑且 被配置為複數個環形迴路丨8〇〇n(其中η係一大於或等於1之 整數）’該迴路啟始於一進入崎管18〇2並終止於進入一排 出崎管1 804。該等等管子通常被焊接至該等崎管。每一管 子含有具複數個由該導管表面延伸的放射狀導熱翼片之一 導熱導官。照此，該翼管提供一相當大的表面區域，由該 空氣流過該等管子致使一相當大量的熱可被移除。 經漭部中史桴"·局κ μ消费合竹社印製.I I-I -I More specifically, the guide vane 932 contains a blade mounting ring 3002 and a plurality of vanes 936. The blade mounting ring 1 302 is milled from a solid aluminum block and includes a vertical portion 1304 for mounting to the upper surface of the lamp assembly, for supporting the fan cover 931, and defining the central hole 13. One of the mounting flanges 1306 ′ and one of the inclined portions 1308 are used to centrally connect the vertical portion 1304 and the flange 1306. The inclined portion i308 is inclined from the vertical inward direction at about 4 ^. The fan cover, the guide vane ring and the lamp housing are appropriately sized to give the maximum air flow in this paper. Home Standard (CNS) (Ministry of Economic Affairs " Bureau of Industry and Commerce Consumer Cooperative Co., Ltd., India Bi 7 !! 5 Description of the invention (19) to the surface of the dome. The vertical portion 1304 and the flange 1306 contain a plurality of mounting holes to connect the guide vane 932 to the fan cover and the lamp assembly respectively. The inclined portion 1308 contains A plurality of blade mounting holes 1310 (for example, nine holes) are formed and regularly distributed around the inner edge of the inclined portion 1308. Each hole maintains a blade 936 in a specific arrangement direction as described in detail below. As the 14th As shown in the figure, each blade 936 has a pin 1400 extending from its edge 14 04 to position the blade on the mounting ring 1302. The pin 1400 is press-fitted to the mounting holes 1310. The lamp assembly hole has a curvature radius of 1402, which is 10% of the radius of the 936. The curvature is important to change the direction of the air velocity from a radial direction to a conical flow to uniformly cover the surface of the dome. When fixed To the mounting ring 1302, one The edge 1404 is adjacent to the inclined surface 1308. Thus, the orientation and curvature of the blades near the central hole 300 of the guide vane 936 keeps the axial air flow toward the dome. The lower guide vane 93 2 is fixed to The fan cover 931 is shown in Fig. 15. The cover 93 1 is a cylinder 1 500 which defines a central hole j 502. The upper and lower ends of the cylinder 1500 are peripheral mounting flanges 15. 4 and 1506. The flanges have mounting holes to facilitate fixing the upper and lower guide vanes to the cover. In addition, the fan mounting bracket (not shown) is fixed to the upper & edge 1506 To maintain the fan in a central position in the cover. Figure 16 depicts a top plan view of one of the upper guide blades 93, and figure J 7 depicts a side plan view of one of the upper guide blades 930. The upper guide blade The 93 ° series is a metal die-cut sheet containing a plurality of guide vanes 1600 which are cut out of a central hole 1602. In particular, the guide vane 930 contains a mounting ring 1604, which has a plurality of The Zhang scale is applicable to the Chinese national standard (CNS} Λ4 ^ t '] ----------- I j II -1— ^^ 1 I -II 1 ^ 1 — ^ i- -^^ 1 III X.. 1 ^ 1-_ n __ Js 4 〇2 9 Λ7 Η 7 V. Description of the invention (2) Number of blades 1600 (such as eight pieces) extending inward. This mounting ring contains A pattern of mounting holes 1606 is used to fix the upper guide blade 930 to the cover 931. The guide blades extend to cut the inner edge of the mounting ring 1604 " each blade 1600 is about 1.75 inches wide and a 25 An angle of ± 15% is bent downward toward the fan, and the blades extend in a direction relative to the direction of rotation of the fan. The upper guide vane 930 reduces the backflow that would otherwise occur in the closed loop cooling system. Thus' by reducing the backflow, the upper vane obviously increases the air flow towards the dome. Figure 18 depicts a perspective view of one of the coiled tubes 920 that cools the air flowing through the cooling chamber. The tubes 920 have an inner diameter of 10375 inches and are configured as a plurality of loop circuits. 8000n (where η is an integer greater than or equal to 1). It terminates at 1804 when entering a discharge tube. Such tubes are usually welded to such tubes. Each tube contains one of a plurality of radial thermally conductive fins extending from the surface of the catheter. As such, the wing tube provides a considerable surface area, and a significant amount of heat can be removed by the air flowing through the tubes.漭 部 中 史 桴 " · Bureau κ μ Consumption Printed by Hezhu Company
如同本發明之第一實施例，本發明之第二實施例亦以 實行一些用以防止傷害或損壞該硬體之安全連結器為特 色。例如，在第10圖中一空氣流光電感測器962係被提供， 萬一風扇失效時，用以觸發該射頻電源以及該等加熱燈 之斷路。此外，有兩個過熱感測器964及966設置於該燈總 成908上，萬一該圓頂溫度控制系統過熱時，用以觸發該 射頻電源以及該燈電源之斷路Q 再者，至少有一個（且通常有三個）感測該風扇罩蓋942 _______ -23- 本紙張尺度適用中國國家《讀—（CNS ) 210X2^ f厂 ----- ----*-- 五、發明説明（21 ) 被移除或不S設置之連結開關960。因此，該罩蓋的移除 或不當設置將觸發该射頻電源、燈電源以及供應至該靜電 夾盤之高電壓的斷路，其中該失盤夾持有一晶圓於該蝕刻 腔室中。所有該等連結器開關係被定位在離開該射頻天線 一段距離，且設置於該風扇·燈-隔板總成外側，致使該射 頻場不會干擾該等連結器開關或該等開關之相關電路的運 作。本發明第二實施例之該電路大致類似於第6圖之該示 意圖11 使用本發明第一或第二實施例之一的裝置，該圓頂係 被設計成被保持在約65至80。(：之正常溫度± 1 〇 的一溫 度。然而’貫驗上使用本發明之裴置，以約達12〇〇瓦之能 量移除，圓頂溫度被保持在± 51。 經Μ部中央疗冷局消费合作社印製 第1 9圖描緣併用於本發明之裝置的—終端價測器19 〇 〇 之一橫截面圖。通常，終端债測器係被用於偵測在該反應 腔至1914中進行之一流程的進度。被描繪之該終端摘測器 1900係專門耦合至位於接近該圓頂938最高點之一透明 窗。例如’該窗係對可見光且/或紫外光透明的。該價測 器1902經一光纖導體1904，連結至該溫度控制裝置9〇〇外 部°該導體〗904流經該隔板912、該内殼體9 16及該外殼體 之一孔。一導體固定件1906被安裝至該殼體914外 部，以提供該導體1904—密封環境。 運作中’一雷射光東i 9〇8(或其他量測信號源）被耦合 至該光纖導體，該光透經該偵測器19〇〇。該偵測器使該光 準·直’且導引該光束朝向藉由在該反應腔室1914中之一晶 _____ -24- 本紙張尺度適用中國國-- 4470 2 9 Λ7 H7 ... -.-. -.. - _________, 五、發明説明（22 ) 圓支架1912支撐的一晶圓1910。該光束由該晶圓表面反射 且傳送回經該偵測器1 900至該導體1 904。最終地，該反射 光束被與該透射光束比較，以確定流程狀況。此種形式終 端積測器被揭露於共同賦予的美國專利申請案序號 -------’ 1997年10月6曰申請（代理人記錄號2077)且於此 併入參考。 為將此種形式終端偵測器併用於本發明中，該隔板必 須在由該圓頂隔開一段距離支推該燈總成，以致能該偵測 器被中置安裝於該圓頂上。此一中央安裝配置，為該偵測 器提供一最適宜的視界。此外，該等燈必須被由該偵測器 附近隔開，致使該偵測器不會干擾該腔室環境之均勻加 熱。該光學饋入裝置’例如導艘〖904與固定件1906，通常 係由介電材質所製以防止干擾由該天線線圈94〇所產生該 等射頻場。此外，介電材質之使用提供一安全特色，以防 止危險的射頻衝激，或基於充電該光學系統而起燃。 雖然不同的實施例包括本發明已經在此詳盡顯示與敘 述之教示，熟於此可技者輕易地想出許多其他不同的實施 例，其仍包括於此等教示。 -—_____________ - 25 - 本紙張尺度適用中國國家樣隼（CNS ) ----^------裝------訂------" (閱讀背而之.江&>七項孙硪·νί本71二 4470 2 9 A7 B7 ^ jc. 五、發明說明（23 ) 經濟部智慧財產局員Η消費合作社印製 元件標號對照表 100 閉回路圓頂溫度控制裝置 102 傳統陶瓷圓頂 104 感應耦合線圈 106 風扇 108 紅外線感測器 110 燈總成 112 喷嘴總成 1 14 熱交換腔室 1-16 護照 117 通道 118 .外殼體 120 環形邊緣 122 連接器總成 124 圓柱型内殼體 126 空間 128 熱交換器線圈 130 風扇罩蓋 132 頂緣 136， 138中央孔 140 邊緣 142 燈反射鏡 144 燈冷卻平板 146 燈安全平板 148 中央孔 150 安裝部 152 ' 156孔 154 喷嘴 199 冷卻供應器 200 空氣流感測器 202 ' 204熱感測器 206 連接開關 300 喷嘴環 302 垂直部 304 水平部 306 傾斜部 400 凸緣 402 圓柱喷嘴部 404 喷嘴 406 排氣孔 500 角度 502 中央軸 600 燈驅動器 604 繼電器 606 連結器 608 類比至數位轉換器 610 電腦 612 感測器 614 途徑（燈驅動器 控制電 壓） 615 數位至類比轉換器 -26- 本紙張尺度適用中國國家標準（CNS)A4規格（210x297公釐） 1 .哀----— — — I 訂-----I J ! * I <請先閱讀背面之沒意事項再填寫本頁) 447〇29 b； 五、發明說明（24 ) 經濟部智慧財產局員工消費合作社印製 618 中 央 處 理 位 元 620 記 憶 體 700 溫 度 控 制程 序 704 程 序 建 立 一 溫度 設定點 706 程 序 量 測 圓 頂溫 .度 708 測 得 溫 度 與 設定 點溫度 比較以產生- -誤差值 710 產 生 一 燈 驅 動器 控制電, 堅而使測得溫度更接 近 設 定 點 溫 度 712 程 序 質 疑 程 序是 .否應繼 續 714 結 束 800 流 入 分 配 崎 管 802 流 出 分 配 崎 管 900 圓 頂 溫 度 控 制裝 置 902 感 應 線 圈 支 架 904 轴 向 風 扇 組 件 906 紅 外 線 感 測 器 908 燈 總 成 910 熱 交 換 腔 室 912 隔 板 914 外 殼 體 916 圓 柱 型 内 殼 體 918 空 間 920 有 散 熱 片 的 熱交換器 管 922 安 裝 環 924 握 柄 926 架 子 928 中 央 孔 930 上 導 葉 931 風 扇 罩 932 下 導 葉 934 風 扇 9 34A 馬 達 934B 安 裝 架 934C 扇 葉 936 空 氣 定 向 導 葉片 938 傳 統 陶 瓷 圓 頂 940 感 應 線 圈 942 風 扇 覃 蓋 944 液 體 供 應 器 946 燈 948 饋 入 裝 置 949、 951 郎- 件 950 球 形 頭 -27- (請先閱讀背面之注意事項再填寫本頁) 訂---------線— 本纸張尺度適用中國i家標準（CNS)A4規格（210 X 297公釐） 4470 2 9 A7 B7 五、發明說明（25) 經濟部智慧財產局員工消費合作社印製 952 冷卻罩 960 連結開關 962 空氣流光電感測 器 964、 9 66 過熱感測器 1100 下安裝凸緣 1102 上安裝凸緣 1104 傾斜壁部 1106 安裝伸出部 1108 感測器安裝 1110 安裝孔洞 1112 中央孔 1114 凹α 1116 孔 1202 伸出部 1206 安裝凸缘 1208 基座 1210 罩蓋 1212 中央空氣流孔 1214 冷卻液通道 1216 球形頭插口 1218 插口 1300 中央孔 1302 葉片安裝環 1304 垂直部 1306 安裝凸緣 1308 傾斜部 1310 葉片安裝孔 1400 銷釘 1402 曲率半徑 1404 邊緣 1500 圓柱 1502 中央iL 1504 、1 5 0 6外圍安裝凸緣 1600 導葉月 1602 中央孑L 1604 安裝環 1606 安裝孔 1 800n 環形迴路 1802 進入崎管 1804 排出崎管 1900 終端偵測器 1902 偵測器 1904 光纖導體 1906 導體固定件 1908 雷射光束 1910 晶圓 1912 晶圓支架 1914 反應腔室 -28- n I H ί « ^ - It - - - - n n-*-reJI - -. - n (t I· _ I I {諳先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐）Like the first embodiment of the present invention, the second embodiment of the present invention is also characterized by implementing safety connectors to prevent injury or damage to the hardware. For example, in Figure 10, an air flow photo sensor 962 is provided, which is used to trigger the RF power supply and the heating lamps to be disconnected in the event of a fan failure. In addition, there are two overheating sensors 964 and 966 installed on the lamp assembly 908. In case the dome temperature control system overheats, it is used to trigger the RF power and the circuit breaker of the lamp power. One (and usually three) sensing the fan cover 942 _______ -23- This paper size is applicable to China's national "Read — (CNS) 210X2 ^ f factory ----- ---- *-V. Description of the invention (21) The link switch 960 is removed or not set. Therefore, the removal or improper setting of the cover will trigger the high-voltage disconnection of the RF power source, the lamp power source, and the electrostatic chuck, wherein the missing disc holds a wafer in the etching chamber. All of these connector openings are located at a distance from the RF antenna and are located outside the fan · lamp-partition assembly, so that the RF field will not interfere with the connector switches or related circuits of the switches Operation. The circuit of the second embodiment of the present invention is substantially similar to the illustration 11 of FIG. 6. Using the device of one of the first or second embodiments of the present invention, the dome is designed to be held at about 65 to 80. (: A normal temperature of ± 10 °. However, the Pei Zhi of the present invention was used throughout, and was removed with an energy of about 12,000 watts, and the dome temperature was maintained at ± 51. After the central treatment of the M department The Consumer Bureau of Cold Printing printed a cross-sectional view of one of the terminal price detectors, which is depicted in Figure 19 and used in the device of the present invention. Generally, the terminal debt detector is used to detect the reaction chamber to The progress of one of the processes performed in 1914. The terminal picker 1900 depicted is specifically coupled to a transparent window located near the highest point of the dome 938. For example, 'The window is transparent to visible light and / or ultraviolet light. The price tester 1902 is connected to the temperature control device 900 through an optical fiber conductor 1904. The conductor 904 flows through the partition 912, the inner casing 9 16 and a hole in the outer casing. A conductor is fixed A piece 1906 is mounted to the outside of the housing 914 to provide the conductor 1904—a sealed environment. In operation, a laser light east 908 (or other measurement signal source) is coupled to the fiber optic conductor, and the light is transmitted through The detector 1900. The detector collimates the light and guides the light The beam is directed by a crystal in the reaction chamber 1914. _____ -24- This paper size is applicable to China-4470 2 9 Λ7 H7 ... -.-.-..-_________, V. Description of the invention ( 22) A wafer 1910 supported by a round support 1912. The beam is reflected from the surface of the wafer and transmitted back through the detector 1 900 to the conductor 1 904. Finally, the reflected beam is compared with the transmitted beam to Determine the status of the process. This type of terminal accumulator is disclosed in the commonly assigned US patent application serial number -------- 'application dated October 6, 1997 (agent record number 2077) and incorporated herein by reference In order to use this type of terminal detector in the present invention, the partition must support the lamp assembly at a distance separated by the dome, so that the detector can be installed centrally on the dome This central installation configuration provides the detector with an optimal view. In addition, the lamps must be separated from the vicinity of the detector so that the detector will not interfere with the uniform heating of the chamber environment. The optical feed-in device, such as the guide vessel 904 and the fixing member 1906, is usually made of a dielectric material. Quality to prevent interference with the RF fields generated by the antenna coil 94. In addition, the use of dielectric materials provides a safety feature to prevent dangerous RF surges or ignition based on charging the optical system. Although Different embodiments include the teachings of the present invention that have been shown and described in detail here. Those skilled in the art can easily come up with many other different embodiments, which are still included in these teachings.--_____________-25-This paper Standards apply to China's national sample (CNS) ---- ^ ------ installation ------ order ------ " (Read it in reverse. Jiang & > Heptathlon grandson硪 · νί Ben 71 2 4470 2 9 A7 B7 ^ jc. V. Description of the invention (23) Member of the Intellectual Property Bureau of the Ministry of Economic Affairs and Consumer Cooperatives printed component labeling comparison table 100 Closed-loop dome temperature control device 102 Traditional ceramic dome 104 Induction Coupling coil 106 Fan 108 Infrared sensor 110 Light assembly 112 Nozzle assembly 1 14 Heat exchange chamber 1-16 Passport 117 Passage 118. Outer housing 120 Ring edge 122 Connector assembly 124 Cylindrical inner housing 126 Space 128 Heat exchanger coil 130 fan cover 132 Top edge 136, 138 Central hole 140 Edge 142 Light reflector 144 Light cooling plate 146 Light safety plate 148 Center hole 150 Mounting portion 152 '156 hole 154 Nozzle 199 Cooling supply 200 Air flu detector 202' 204 Thermal sensor 206 Connection switch 300 Nozzle ring 302 Vertical portion 304 Horizontal portion 306 Inclined portion 400 Flange 402 Cylindrical nozzle portion 404 Nozzle 406 Vent hole 500 Angle 502 Central axis 600 Light driver 604 Relay 606 Connector 608 Analog to digital converter 610 Computer 612 Sensor 614 path (lamp driver control voltage) 615 Digital-to-analog converter-26- This paper size applies the Chinese National Standard (CNS) A4 specification (210x297 mm) 1. Regrets ---- — — — I Order- ---- IJ! * I < Please read the unintentional matter on the back before filling in this page) 447〇29 b; 5. Description of the invention (24) Printed by the Intellectual Property Bureau Staff Consumer Cooperative of the Ministry of Economic Affairs 618 Central processing bit 620 memory 700 temperature control program 704 program establishes a temperature set point 706 program measures dome temperature 708 The measured temperature is compared with the set point temperature to produce an error value. 710 Generates a lamp driver control power, so that the measured temperature is closer to the set point temperature. 712 The program questions the procedure. Should it continue? 714 End 800 Flow into the distribution tube 802 Outflow distribution tube 900 Dome temperature control device 902 Induction coil bracket 904 Axial fan assembly 906 Infrared sensor 908 Light assembly 910 Heat exchange chamber 912 Partition 914 Outer housing 916 Cylindrical inner housing 918 Space 920 Yes Heat exchanger tube of heat sink 922 Mounting ring 924 Handle 926 Shelf 928 Central hole 930 Upper guide vane 931 Fan cover 932 Lower guide vane 934 Fan 9 34A Motor 934B Mounting bracket 934C Fan blade 936 Air guide vane 938 Traditional ceramic dome 940 Induction coil 942 Fan Qin cover 944 Liquid supply 946 Light 948 Feeder 949, 951 Lang-Piece 950 Spherical Head -27- (Please read the precautions on the back before filling this page) Order --------- Line — This paper size applies to China Standard (CNS) A4 (210 X 297 mm) 4470 2 9 A7 B7 V. Description of the invention (25) Printed by the Intellectual Property Bureau of the Ministry of Economic Affairs, Consumer Cooperative, 952 Cooling hood 960 Link switch 962 Air flow optical sensor 964, 9 66 Overheating sensor 1100 Installation Flange 1102 Mounting flange 1104 Inclined wall 1106 Mounting protrusion 1108 Sensor mounting 1110 Mounting hole 1112 Center hole 1114 Concave 1116 hole 1202 Extension 1206 Mounting flange 1208 Base 1210 Cover 1212 Central air flow Hole 1214 Coolant channel 1216 Spherical head socket 1218 Socket 1300 Central hole 1302 Blade mounting ring 1304 Vertical portion 1306 Mounting flange 1308 Inclined portion 1310 Blade mounting hole 1400 Pin 1402 Curvature radius 1404 Edge 1500 Cylinder 1502 Central iL 1504, 1 5 0 6 Peripheral mounting flange 1600 Guide vane 1602 Central 孑 L 1604 Mounting ring 1606 Mounting hole 1 800n Ring circuit 1802 Entering the tube 1804 Discharging the tube 190 0 Terminal detector 1902 Detector 1904 Fiber optic conductor 1906 Conductor fixture 1908 Laser beam 1910 Wafer 1912 Wafer holder 1914 Reaction chamber-28- n IH «^-It----n n-*- reJI--.-n (t I · _ II {谙 Please read the notes on the back before filling this page) This paper size applies to China National Standard (CNS) A4 (210 X 297 mm)