經濟部中央標準局員工消費合作社印製 4 3 ? 4 λ ^ 0673TWF.DOC/Frank/002 Α7 ____Β7 五、發明説明（丨） 本發明是有關於一種顯示器結構及其製造方法，且特 別是有關於一種可導掉產生之二次電子產生的場效發射平 面顯示器之面板結構及其製造方法，並可提高顯示器的亮 度。 在資訊和電子工業的領域中，重量輕、厚度薄的顯示 器已成爲未來發展的重點，其應用例如是使用在筆記型電 腦中。目前最常使用的是液晶顯示器（Liquid Crystal Display)，但是由於液晶顯示器中的液晶映像點（Pixel)開 與關的光反應時間較長，且其亮度（Luminosity)也較低， 因此，其他的顯示器技術也不斷的在硏發之中。 近來，已硏發出一種場效發射平面顯示器（Field Emission Display)，具有映像點開與關的光反應時間較短 及可增加亮度的特性，且同時具有薄的外型及低的耗電 量。習知的一種場效發射平面顯示器如第1圖所示，包括 一底板（Baseplate)lO 和一面板（Faceplate)ll。底板 10 爲一絕緣體，且在底板10上有一列電極（Row Electrode)〗〗 ， 在列電極 12 上有數個 發射端 （Emitter Tips)13，且每一個發射端13均被絕緣層14隔開。在絕緣 層14上有數個行電極（Column Electrode)15 ’行電極15 和列電極12互相垂直，並在行電極〗5間留有開口 16 ’以 露出發射端13。面板10上有陽極（Anode)17、18和19， 上述陽極的材料例如是氧化銦錫（Indium Tin px^e)，且 在陽極17、18和19上均塗佈一磷光物質(^i/，例如是碟。 在陽極（Anode)17、18和19之間爲黑基質（Black Ma 3 本紙張义度適用中國國家標準（CNS ) A4規格（210X297公釐） (請先閱讀背面之注意事項再填寫本頁) 經濟部中央標隼局員工消費合作杜印製 4. 3 U3 9 , 0673TWF.DOC/Frank/002 A7 ____B7 五、發明説明（孓） trix)21，黑基質21例如是碳（Carbon)。 當電子22從發射端13射出後，會被吸引至被活化 (Activated)的陽極17 ' 18或19。如第1圖所示，由於陽 極17的供給電壓較陽極18和19高，因此由發||端射出的 電子22均被吸引至陽極Π。當電子22撞擊到磷時，會· --—— 產生光，達到顯示的目的。 上述習知的場效發射平面顯示器中，當高能量的電子 撞擊到磷表面時，部分鱗表面的電子被激發而脫離磷表 面，產生二次電子（Secondary Electrons)。這些二次電子 會堆積在磷表面造成遮蔽的作用，使得陽極的位能降低， 造成磷的發光效率下降，而降低顯示器的亮度。所以，如 何導掉二次電子成爲很重要的問題。 因此，本發明得主要目的就是在提供一種場效發射平 面顯示器之面板與其製造方法，藉由在面板上形成一導電 的黑基質，以導掉產生在磷表面的二次電子，增加顯示器 亮度。並利用可導電的黑基質和氧化銦錫相連接，以降 低氧化銦錫的阻値。 根據本發明上述的目的，提出一種場效發射平面顯示 器之面板結構，其包括： 一玻璃，當作基底； 複數個陽極，置於該玻璃上； 複數個磷光物質，覆蓋大部份的該些陽極，並覆蓋部 份的該玻璃；以及 一黑基質層，形成在該些陽極之間，並覆蓋部分該些 4 本紙張尺度適用t國國家標準（CNS M4規格（21〇X297公釐） (請先閱讀背面之注意事項再填寫本頁) 訂 經濟部中央標準局貝工消費合作社印聚 432439 0673TWF,DOC/Frank/002 A7 B7 五、發明説明（> ) 磷光物質。 根據本發明上述的目的，提出一種場效發射平面顯示 器之面板的製造方法，包括下列步驟： 提供一玻璃板； 在該玻璃板上形成一氧化銦錫層； 定義該氧化銦錫層形成一第一陽極、一第二陽極及一 第三陽極； 在該第一陽極上形成一第一磷光物質； 在該第二陽極上形成一第二磷光物質； 在該第三陽極上形成一第三磷光物質； 形成一黑基質層；以及 定義該黑基質層，暴露出部份第一磷光物質、部份第 二磷光物質與部份第三磷光物質。 爲讓本發明之上述和其他目的、特徵、和優點能更明 顯易懂，下文特舉一較佳實施例，並配合所附圖式，作詳 Iffl說明如下： 圖式之簡單說明： 第1圖是習知的一種場效發射平面顯示器結構的剖面 示意圖； 第2至4圖是根據本發明一較佳實施例，一種場效發射 平面顯示器面板的製造流程剖面圖；以及 第5圖是根據本發明一較佳實施例，一種場效發射平 面顯示器結構的剖面示意圖。 實施例 5 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） (請先閱讀背面之注意事項再填寫本頁) 4 ank/002 A7 B7 經濟部中央標隼局員工消費合作杜印繁 五、發明説明（f ) 請參照第2至4圖，其繪示依照本發明一較佳實施例的 一種場效發射平面顯示器之面板的製造流程剖面圖。首 先，請參照第2圖，提供一基底25，例如是一種透明的玻 璃板’玻璃板的厚度約在1-1 〇 mi之間。在基底25上形成一 層氧化銦錫層26，接著在預定的位置定義出數個陽極，例· 如是利用光罩或網印的方式，之後利用濕蝕刻將未定義的 氧化銦錫層26去除，得到陽極27、28及29，所使用得濕 蝕刻液例如是鹽酸和硝酸的混合液。 上述陽極形成之後，必須在陽極27、28及29上分別 形成紅、綠、藍的磷光物質。請參照第3圖，利用聚乙烯 醇（Polyvinyl Aicohol)光阻，經過沈積 '曝光和顯影以形 成所想要的映像點顏色。其步驟分爲三次，分別使用含有 紅、綠及藍色磷光物質的聚乙烯醇，磷光物質例如是磷， 而在陽極27、28及29之上分別形成形成所要紅3G、綠 31、藍32三色的映像點，且紅30、綠31、藍32三色的磷 先物質有部份與基底25相接觸。 接著’請參照第4圖，形成一黑基質層41，其厚度約 在ΗΓι-10細，黑基質層41爲一可導電的金屬層或是金屬 與金屬氧化物的組合，例如是鉻和氧化鉻的組合，並利用 蒸鍍（Evaporation)的方式形成。利用微影和蝕刻定義黑基 質層41的位置，使黑基質層41形成在基底25表面，並暴 露出部份紅30、綠31、藍32三色的磷光物質，完成本發 明的一種場效發射平面顯示器之面板。 依照本發明一較佳實施例所形成的場效發射平面顯示 本纸張尺度適用中國國家標準（CNS ) Α4規格（210X297公釐） (請先聞讀背面之注意事項存填寫本頁)Printed by the Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 4 3? 4 λ ^ 0673TWF.DOC / Frank / 002 Α7 ____ Β7 V. Description of the Invention (丨) The present invention relates to a display structure and a manufacturing method thereof, and in particular The panel structure of a field-effect flat display capable of guiding the generated secondary electrons and a manufacturing method thereof can increase the brightness of the display. In the field of the information and electronics industry, light weight and thin displays have become the focus of future development, and their applications are, for example, used in notebook computers. Currently, the most commonly used is a liquid crystal display (Liquid Crystal Display), but because the liquid crystal display point (Pixel) in the liquid crystal display has a longer light response time and its brightness (Luminosity) is low, so other Display technology is also constantly evolving. Recently, a field emission display (Field Emission Display) has been developed, which has the characteristics of a short photo response time when the image points are turned on and off and can increase brightness, and also has a thin profile and low power consumption. A conventional field effect emission flat display is shown in FIG. 1 and includes a base plate 10 and a face plate 11. The bottom plate 10 is an insulator, and there is a row of electrodes on the bottom plate 10. There are several emitter tips 13 on the column electrode 12, and each of the emitter ends 13 is separated by an insulating layer 14. On the insulating layer 14, there are several row electrodes 15 ', the row electrodes 15 and the column electrodes 12 are perpendicular to each other, and an opening 16' is left between the row electrodes 5 to expose the emitting end 13. The panel 10 has anodes 17, 18, and 19, and the material of the anode is, for example, indium tin oxide (Indium Tin px ^ e), and a phosphorescent substance (^ i / , Such as a dish. Between the anode (Anode) 17, 18, and 19 is a black matrix (Black Ma 3 This paper applies the Chinese National Standard (CNS) A4 specification (210X297 mm) (please read the precautions on the back first) (Fill in this page again.) Consumption cooperation by the Central Bureau of Standards of the Ministry of Economic Affairs, printed by the staff. 4.3 U3 9, 0673TWF.DOC / Frank / 002 A7 ____B7 V. Description of the invention (孓) trix) 21, the black matrix 21 is, for example, carbon ( Carbon). When the electrons 22 are emitted from the emitting terminal 13, they will be attracted to the activated anode 17 '18 or 19. As shown in Fig. 1, because the supply voltage of the anode 17 is higher than that of the anodes 18 and 19, Therefore, the electrons 22 emitted from the || end are all attracted to the anode Π. When the electrons 22 strike the phosphorus, they will produce light to achieve the purpose of display. In the conventional field-effect flat display, When high-energy electrons hit the phosphorous surface, some of the electrons on the surface of the scale are excited and detach from the phosphorous surface The secondary electrons are generated. These secondary electrons will accumulate on the surface of phosphorus and cause a shielding effect, which will reduce the potential of the anode, reduce the luminous efficiency of the phosphor, and reduce the brightness of the display. Secondary electrons become a very important issue. Therefore, the main object of the present invention is to provide a panel of a field-effect flat display and a method for manufacturing the same, by forming a conductive black matrix on the panel to guide away the phosphorous generated on the surface of the phosphor. The secondary electrons increase the brightness of the display. The conductive black matrix is connected to the indium tin oxide to reduce the resistance of indium tin oxide. According to the above-mentioned object of the present invention, a panel structure of a field-effect flat display is provided. It includes: a glass as a substrate; a plurality of anodes placed on the glass; a plurality of phosphorescent substances covering most of the anodes and covering a part of the glass; and a black matrix layer formed on the Between these anodes, and covering some of these 4 paper sizes are applicable to national standards (CNS M4 specifications (21 × 297 mm) (Please read the precautions on the back before filling out this page) Order the Printing and Printing Service of the Central Standards Bureau of the Ministry of Economic Affairs, Shellfish Consumer Cooperative, 432439 0673TWF, DOC / Frank / 002 A7 B7 V. Description of the invention (>) Phosphorescent substances. To provide a method for manufacturing a panel of a field-effect flat display, the method includes the following steps: providing a glass plate; forming an indium tin oxide layer on the glass plate; defining the indium tin oxide layer to form a first anode, a A second anode and a third anode; forming a first phosphorescent substance on the first anode; forming a second phosphorescent substance on the second anode; forming a third phosphorescent substance on the third anode; forming a A black matrix layer; and defining the black matrix layer, exposing part of the first phosphorescent substance, part of the second phosphorescent substance, and part of the third phosphorescent substance. In order to make the above and other objects, features, and advantages of the present invention more comprehensible, a preferred embodiment is given below, and in conjunction with the accompanying drawings, the detailed description of Iffl is as follows: Brief description of the drawings: Section 1 2 is a schematic cross-sectional view of a conventional field-effect flat-panel display structure; FIGS. 2 to 4 are cross-sectional views of a manufacturing process of a field-effect flat-panel display panel according to a preferred embodiment of the present invention; and FIG. A preferred embodiment of the present invention is a schematic cross-sectional view of a field-effect flat-panel display structure. Example 5 This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) (Please read the notes on the back before filling out this page) 4 ank / 002 A7 B7 Consumption Cooperation of Employees, Central Bureau of Standards, Ministry of Economic Affairs 5. Description of the Invention (f) Please refer to FIGS. 2 to 4, which are cross-sectional views showing a manufacturing process of a panel of a field-effect flat display according to a preferred embodiment of the present invention. First, please refer to FIG. 2 to provide a substrate 25, such as a transparent glass plate. The thickness of the glass plate is about 1-1 mil. A layer of indium tin oxide layer 26 is formed on the substrate 25, and then several anodes are defined at predetermined positions. For example, if a mask or screen printing method is used, and then the undefined indium tin oxide layer 26 is removed by wet etching, The anodes 27, 28, and 29 were obtained, and the wet etching solution used was, for example, a mixed solution of hydrochloric acid and nitric acid. After the anode is formed, red, green, and blue phosphorescent substances must be formed on the anodes 27, 28, and 29, respectively. Please refer to Figure 3, using a polyvinyl alcohol (Polyvinyl Aicohol) photoresist, through deposition 'exposure and development to form the desired image point color. The steps are divided into three steps. Polyvinyl alcohol containing red, green, and blue phosphorescent substances is used. The phosphorescent substances are, for example, phosphorous. On the anodes 27, 28, and 29, respectively, the desired red 3G, green 31, and blue 32 are formed. Three-color image points, and the phosphorous precursor materials of three colors of red 30, green 31, and blue 32 are in contact with the substrate 25. Next, please refer to FIG. 4 to form a black matrix layer 41 having a thickness of about 10 μm. The black matrix layer 41 is a conductive metal layer or a combination of a metal and a metal oxide, such as chromium and oxide. The combination of chromium is formed by evaporation. The position of the black matrix layer 41 is defined by lithography and etching, so that the black matrix layer 41 is formed on the surface of the substrate 25, and a part of the phosphorescent substances of red 30, green 31, and blue 32 is exposed, and a field effect of the present invention is completed. Panel for launch flat display. Field effect emission plane display formed in accordance with a preferred embodiment of the present invention The paper size is applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm) (Please read the precautions on the back and fill in this page)
』1T 經濟部中央標隼局員工消费合作社印袋 432^39 0673TWF.DO C/Frank/Ο Ο 2 A7 __ ___B7 五、發明説明（C ) 器如第5圖所示。包括一顯示器的面板51及底板52。面板 51爲一顯示器的表面，使影像能呈現在面板51上；底板52 爲一顯示器的背面，負責放射帶有能量的電子至面板51。 面板51與底板52相互平行。 面板51以一玻璃53爲基底，在玻璃53上有數個陽極 54、55與56,以接受底板52所發射的電子，上述陽極54、 55及56的材料例如是氧化銦錫，一種透明且導電的材料。 在陽極54、55及56上均形成有磷光物質，磷光物質由不 同的磷組成，而能發出紅、綠 '藍三色光，這些紅57、綠 58及藍59三色的磷光物質依序陳列在大部份的陽極54、 55與56之上，並覆蓋部份的玻璃53 〇黑基質60_形_成在陽 極與陽極之間，並和陽極相連接形成一橫向曼場，其並覆 蓋部份0^紅57、綠58、藍59三色的磷光物質，黑基胃6.0 例如是..由鉻、鋁、鉬、鎳或鎢金屬或上述金屬與其金屬氧 化物的混合物所組成，弈紂導_且不透光。 底板52上有行電極61與列電極62.，行電極61與列電 極62互相垂直，且兩者以絕緣層63隔離。列電極62間形 成有數個開口，以露出連結在行電極61上的發射端64。 當電子65從發射端64射出後，會被吸引至被活化的陽 極54、55或56。在第5圖中，陽極5彳的塔給電壓::¾攝極 55和56/¾，·因此電子65被吸引至_陽殛54。當電子65撞擊 到紅色磷光物質57時，會激發紅色磷光物質57表面的電 子，使部份表面的電子被激發而脫離紅色碟光物質57表 面，而產生二次電子。由於可導電的黑基質6(}可在紅色磷 7 本紙伕尺度適用中國國家標準（CNS ) A4规格（2】〇χ 297公楚 > {請先Μ·讀背面之注意事項再填寫本頁) 訂 合 I . έ·' 432439 0673TWF.D〇C/Frank/002 A7 B7 五、發明説明（έ 光物質57表面形成一橫向電場’可將產生在紅色磷光物質 57表面所形成的二次電子導掉’避免產生遮蔽效應’以增 加顯示器亮度。另外，紅色？1¾¾ 如第5圖箭頭66所示’可增加聚光的 效果。此外，由於黑基質60和氧化銦錫所形成的陽極54、' 55及56相接觸，可降低陽極54、55及56的線電阻。 依照如上陳述之本發明的一較佳實施例，熟知此技藝 者可瞭解，應用本發明的場效發射平面顯示器具有下列優 點： 1. 可利用導電的黑基質導掉磷表面的二次電子，以增 加磷的發光效率，提高顯示器亮度。 2. 可降低氧化銦錫的線電阻値。 3. 可產生聚光的效果。 雖然本發明已以一較佳實施例揭露如上，然其並非用 以限定本發明，任何熟習此技藝者，在不脫離本發明之精 浩申和範圍內，當可作些許之更動與潤飾，因此本發明之保 護範圍當視後附之申請專利範圍所界定者爲準。 (請先閱讀背面之注意事項再填寫本I ) 、1Τ 經濟部中央標隼局員工消f合作社印製』1T Printed bags of the Consumer Cooperatives of the Central Bureau of Standards of the Ministry of Economic Affairs 432 ^ 39 0673TWF.DO C / Frank / Ο 2 0 A7 __ ___B7 5. The description of the invention (C) is shown in Figure 5. The panel 51 and the bottom plate 52 include a display. The panel 51 is a surface of a display so that an image can be presented on the panel 51. The bottom plate 52 is a back of a display and is responsible for radiating electrons with energy to the panel 51. The face plate 51 and the bottom plate 52 are parallel to each other. The panel 51 is based on a glass 53. On the glass 53, there are several anodes 54, 55, and 56 to receive electrons emitted from the base plate 52. The materials of the anodes 54, 55, and 56 are, for example, indium tin oxide, which is transparent and conductive. s material. Phosphorescent substances are formed on the anodes 54, 55, and 56. Phosphorescent substances are composed of different phosphors, and can emit red, green, and blue lights. These red, green 58, and blue 59 phosphorescent materials are sequentially displayed. Above most of the anodes 54, 55 and 56, and covering a part of the glass 53, a black matrix 60 is formed between the anode and the anode, and is connected to the anode to form a transverse Mann field, which covers Some 0 ^ red 57, green 58 and blue 59 phosphorescent substances, black base stomach 6.0, for example, is composed of chromium, aluminum, molybdenum, nickel or tungsten metal or a mixture of the above metals and their metal oxides. It is guide and opaque. The bottom plate 52 has row electrodes 61 and column electrodes 62. The row electrodes 61 and the column electrodes 62 are perpendicular to each other, and the two are separated by an insulating layer 63. A plurality of openings are formed between the column electrodes 62 to expose the emission terminals 64 connected to the row electrodes 61. When the electron 65 is emitted from the emission terminal 64, it will be attracted to the activated anode 54, 55 or 56. In Fig. 5, the tower of anode 5 彳 gives voltages: ¾ camera 55 and 56 / ¾, so electron 65 is attracted to _ 阳 殛 54. When the electron 65 hits the red phosphorescent substance 57, the electrons on the surface of the red phosphorescent substance 57 are excited, so that part of the surface electrons are excited and detached from the surface of the red disk-like substance 57 to generate secondary electrons. Since the conductive black matrix 6 () can be used in the red phosphorus 7 standard of this paper, the Chinese National Standard (CNS) A4 specifications (2) 〇χ 297 公 楚 > {Please read the precautions on the back before filling this page ) Contract I. 432439 0673TWF.D0C / Frank / 002 A7 B7 V. Description of the invention (The horizontal electric field formed on the surface of the light substance 57 can generate secondary electrons formed on the surface of the red phosphorescent substance 57 In order to increase the brightness of the display, avoid "shading effect". In addition, red? 1¾¾ as shown by arrow 66 in Fig. 5 can increase the effect of condensing. In addition, the anode 54 formed by the black matrix 60 and indium tin oxide, '55 and 56 contact can reduce the line resistance of the anodes 54, 55 and 56. According to a preferred embodiment of the present invention as stated above, those skilled in the art can understand that the field emission flat display using the present invention has the following Advantages: 1. The conductive black matrix can be used to conduct the secondary electrons on the phosphorous surface to increase the luminous efficiency of phosphorous and improve the brightness of the display. 2. The line resistance of indium tin oxide can be reduced. 3. The light-concentrating effect can be produced Although this hair The above has been disclosed with a preferred embodiment, but it is not intended to limit the present invention. Any person skilled in the art can make some modifications and retouches without departing from the spirit and scope of the present invention. Therefore, the present invention The scope of protection shall be determined by the scope of the attached patent application. (Please read the notes on the back before filling in this I), 1T printed by the staff of the Central Bureau of Standards of the Ministry of Economy
S 本纸張尺度適用中國國家標举（CNS ) A4規格（公釐）S This paper size applies to China National Standards (CNS) A4 specifications (mm)