TW432105B - Slurry formulation for selective CMP of low-k organic spin-on-glass dielectric thin films - Google Patents

Abstract

Slurry formulation for CMP of organic-based low SOG was development. SOG this films with varying amount of organic content are subject to polish experiments using silica-and zirconia-based slurries with a variety of additives. The results indicate that, as the amount of organic content in SOG increases, CMP polish rate drops with silica-based KOH-added slurry. On the other hand, zirconia-based slurry could result in higher polish rate for both SOG (> 400 nm/min) and thermal oxide and adjustment in polish selectivity ranging from 1.2 to 9.1 can be achieved by adding various amount of tetra-alkyl substitute ammonium hydroxide.

Description

TW M432105U1

1 · · · Substrate 2 · · · Conductive electrode sensing block 3 · · · Lead 4 · · · Decorative protective layer 5 · · · Decorative layer 6 · · · Capacitive touch panel induction card

Figure 1 M432105 V. Description of new type: Year ^ 101. 1. ί ο [Technical field to which the new type belongs] This new type is related to a Thunderbolt " V, Li-style panel induction card, which acts on a capacitive touch Control the screen.疋 cai said [prior art] the password card, magic playing cards, game cards and access control card materials on the market, whether the paper thief is the second material to the second to let the capacitive touch screen induction touch, there are-some cards printed None of them can be read by the magnetic head, but it is not identifiable on the capacitive touch screen. Or: two MV cards are used as information identification cards, which are embedded with ^ PID ag 疋 门 肷 KM1J Japanese film. This kind of card also needs a special _ picking head, and can not be recognized or read by the capacitive _ panel; another-a way to allow the handheld device to read is a stone horse and a handheld device with a high popularity in the market Devices such as iph〇ne _ and other mobile phones or tablets and e-books Keduo _ Capacitive Touch Panel 1 and the convenience of carrying these ^ sub-products is also quite high, if you can not increase the hardware county ' Ke Qi these handheld devices come as card readers Lang, to make life more convenient. In addition, some consumers will store important personal data in handheld devices. 'Data confidentiality is especially important.' The patented capacitive panel induction card can be used as a password card. Those who must use the password card to unlock it. The screen can display important confidential information. Such security measures can give users more peace of mind when using these devices. M432105 [New content] Year h τ 'The purpose of this new model, namely, in Zheng Zheng-from & L_0: Dagger House or read _ _ battle, capacity _ screen identified ~ donate eight β, put the card in On the capacitive touch panel, it is easy to read the identification code of the card with 5 soft ages. The new type of capacitive touch panel inductive card acts on a capacitive touch screen and includes a substrate and a conductive electrode layer. The conductive electrode layer has a plurality of conductive sensing blocks and a plurality of conductive electrodes.

The sensing blocks are connected together in series via conductive lines. When the touch panel inductive card is close to the capacitive touch surface, the 'touch panel can sense the positions of a plurality of conductive sensing blocks'. By boring and touching the isthmus, you can output Wei Pei's input code. In this way, the capacitor pick-up and control device can perform various traces, such as displaying specific photos, playing cards, business cards, word cards, language learning cards, password card access cards, sound effects, music, and so on. The effect of the new model: the capacitive touch screen on a mobile phone, tablet or e-book is used as a card reader. In the environment with a capacitive touch screen, a card reader can be used. Can improve the convenience, entertainment and confidentiality of input. [Embodiment] The foregoing and other technical contents, features, and effects of the present invention will be clearly presented in the following detailed description of a preferred embodiment with reference to the drawings. Referring to FIG. 1, FIG. 2 and FIG. 3, a first preferred embodiment of the Xinli capacitive touch panel sensor card 6 acts on a capacitive touch screen 8. The capacitive touch panel sensor card 6 includes a substrate 1, a plurality of conductive electrode sensing blocks 2 and a 4 M432105 "repaired f years Λ 日 * 上士 i〇LJ. Io without any conductive electrode sensing Press the upper part of the relative position of block 2 and ^ 8 in the capacitive touch table can sense all the positions of the plurality of conductive electrodes to sense the block 2. After receiving the information of these positions, you can execute the display and store it in the device in advance. The photos or videos in the memory are called out for 'entertainment, learning, or confidentiality.

This embodiment is made of a non-transparent substrate i, a conductive electrode sensing block 2, a wire 3, and the like. Of course, the substrate 1 may also be formed of a transparent substrate such as glass or plastic. The material can be made into a transparent tape or a protective film, which can be affixed to a game card card credit card photo or a product. Referring to FIG. 5 'the second embodiment of the new type of capacitive touch panel sensor card 6, the conductive electrode sensing block 2 and the lead 3 are exposed to the outermost side, depending on the use case = material properties, any protective decorative layer 5 can be listed. The capacitive touch bismuth can still sense the position of the conductive electrode sensing block 2. Referring to FIG. 6, the first capacitive touch panel sensor card 6 of the new type === ## She, Mei Mei-S, I read Figure 7, the example of the new type, according to the use situation and material characteristics; A plurality of conductive electrode sensing blocks 2 and a decorative protective layer 4 are implemented. Material 1 ~ = See Fig. 8 'The new capacitive touch panel sensor' Decoration layer 5 can be changed into many different patterns. "Fifth Implementation The disclosure of the above-mentioned embodiment is used to explain this creation, not 5

Repair Month '1 〇 Dagger. In order to limit this creation, so the replacement of equivalent components is still in the category. The year ioi 丄 should belong to this creative text '′ to enable those skilled in the art to understand that this creative practice has complied with the provisions of the Patent Law, and proposes that the males specifically described above can achieve the aforementioned purpose and benefit the application. [Brief description of the figure] Figure 1 is a schematic illustration of a three-dimensional knife, illustrating the first-best embodiment of the new type-capacitive touch panel inductive card; Figure 2 is a three-dimensional view illustrating the new type-capacitive touch panel The third preferred embodiment of the induction card with the capacitive phase-controlled screen; Figure 3 is a diagram of the arrangement of the three types of arrangement of the block diagram of the conductive electrical general block, which is better, and Figure 4 is a vertical axis. "Lai bribery money" embodiment of the multimedia display state after the induction card of the capacitive control panel; Figure 5 is an exploded schematic diagram illustrating the second embodiment of the novel-capacitive touch-sensing card; Figure 6-exploded Schematic 'illustrates the third embodiment of the present invention—a capacitive touch panel inductive card; FIG. 7 is an exploded view illustrating the fourth embodiment of the present invention—a capacitive touch panel inductive card; FIG. 8 is a schematic view Illustrate the fifth embodiment of the new type-capacitive touch panel induction card; M432105 [Description of main component symbols] (This creative part) Substrate 1 Conductive electrode induction block 2 Wire 3 Decorative protective layer 4 Decorative layer 5 Capacitive touch Finger proximity card panel 6 7 8 capacitive touch screen

Manual (This manual format, ~ ※ Application number χηΛ Please do not change arbitrarily, ※ Please do not fill in the note) (2006.01) 1 Application: ※ Received classification +, New name: (Chinese / English) Capacitive touch panel sensor Card, Chinese New Abstract: η · Month £ 101. X. Ethno-electric Valley touch panel sensor card, which acts on a capacitive touch screen, including: substrate,-touch sensing layer. The wire can be loaded with a wire to protect the conductive material. The sensing layer has a patterned conductive sensing surface close to the touch screen. The touch panel sensor card can be placed on the capacitive touch screen as a function of input. By touching, the position of the conductive block of the sensing layer changes, so that the capacitive touch screen can sense a variety of input. age. Touching software software can issue a variety of products, such as password cards, magic playing cards, game cards, word cards, language learning cards, and access control cards. °° 13 III. Abstract in English: M432105

6. Scope of patent application: 1. A capacitive touch panel induction card, acting on a capacitive touch screen, comprising: a plurality of conductive electrode sensing blocks, the plurality of conductive electrode sensing blocks are connected to a substrate ;and

A plurality of or one wire, the wire is used to connect each of the conductive electrode sensing blocks 0 2. According to the capacitive touch panel sensor card described in the first item of the patent application scope, it further includes a protective or decorative layer, the protective layer Alternatively, a decorative layer is formed on the outer surface of the plurality of conductive electrode sensing blocks and wires to protect or decorate the conductive sensing electrodes and wires. 3. The capacitive touch panel inductive card according to item 1 of the scope of patent application, wherein the conductive electrode sensing block may be conductive transparent glue, indium tin oxide (ITO), indium zinc oxide ( Indium Zinc Oxide '· IZO), chromium (chrome; CR), chromium oxide (Chrome Oxide), zinc oxide (Zn0), titanium oxide (TiO), silver wire (Ag Fiber), conductive polymer, one of them and this And other combinations. 4 According to the capacitive touch panel sensor card described in the first item of the patent application system, wherein the substrate can be a transparent plastic sheet or a film or glass, etc., and a conductive electrode made of a transparent conductive material can be used. Forms products such as transparent capacitive touch screen sensing tape or protective film. 8 According to the capacitive touch control panel inductive card u described in the patent application, 'The substrate can be covered with a variety of customs to provide applications for different occasions', such as magic playing cards, credit cards, language learning cards, exhaustion Card, game card, or access card. According to the capacitive touch panel inductive card described in the first patent application, the plurality of crocodile electric electrode sensing blocks may be _, rounded, square, rectangular, or irregular in shape. According to the capacitive control panel induction card described in item 1 of the patent application, the material of the wire may be the same as the material of the conductive electrode sensing block or the material of the wire is greater than the conductive resistance of the conductive electrode sensing block. Made of different materials with lower values. According to the capacitive touch panel inductive card described in item i of the patent application scope, wherein the conductive electrode inductive block includes an inductive surface, and the area of the inductive surface is more than 4 mm 2 (ca 2). According to the capacitive touch panel sensor card described in item 1 of the scope of the patent application, wherein one or more sensing electrodes or contacts can be added to a specific position of the substrate for fingers to approach, touch, or ground The use of a short circuit can increase the sensing strength of the capacitive touch screen.

Claims (1)

M43.2105 ^ 432105 Section 5 ® Oblique Number 6 ® ^ 432105 M432105 % M432105 4. Designated Representative Map: (1) The designated representative map in this case is: (1). (II) Brief description of the component symbols in this representative picture: Substrate 1 Conductive electrode sensing block 2 • Lead 3 'Decorative protective layer 4 φ Decorative layer 5 Capacitive touch panel sensor card 6