TW429610B - Fabricating method of dynamic random access memory - Google Patents
Fabricating method of dynamic random access memoryInfo
- Publication number
- TW429610B TW429610B TW88113872A TW88113872A TW429610B TW 429610 B TW429610 B TW 429610B TW 88113872 A TW88113872 A TW 88113872A TW 88113872 A TW88113872 A TW 88113872A TW 429610 B TW429610 B TW 429610B
- Authority
- TW
- Taiwan
- Prior art keywords
- shallow trench
- substrate
- random access
- access memory
- dynamic random
- Prior art date
Links
Abstract
This invention is about a fabricating method of dynamic random access memory. After forming a shallow trench on a substrate to define an active region, an isolation structure is formed in the shallow trench. The first conduction layer is formed to globally cover the substrate and fill up the shallow trench. Part of the first conduction layer is removed and only the part located in part of the shallow trench is remained so as to form a bit line in the shallow trench. After that, the extruding portion is formed on substrate and is connected with bit line and the position, in which source/drain is to be formed, in an active region. Transistor is formed in the active region. The range of source of transistor includes substrate located under the extruding portion and source is connected with the second conduction layer. After forming a dielectric layer to globally cover the substrate, capacitor is formed on the dielectric layer, in which this capacitor passes through the dielectric layer and is connected with the transistor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW88113872A TW429610B (en) | 1999-08-13 | 1999-08-13 | Fabricating method of dynamic random access memory |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW88113872A TW429610B (en) | 1999-08-13 | 1999-08-13 | Fabricating method of dynamic random access memory |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW429610B true TW429610B (en) | 2001-04-11 |
Family
ID=21641912
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW88113872A TW429610B (en) | 1999-08-13 | 1999-08-13 | Fabricating method of dynamic random access memory |
Country Status (1)
| Country | Link |
|---|---|
| TW (1) | TW429610B (en) |
-
1999
- 1999-08-13 TW TW88113872A patent/TW429610B/en not_active IP Right Cessation
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GD4A | Issue of patent certificate for granted invention patent | ||
| MM4A | Annulment or lapse of patent due to non-payment of fees |