TW429577B - Method for improving the copper processing with Al pad - Google Patents

Method for improving the copper processing with Al pad

Info

Publication number
TW429577B
TW429577B TW88119281A TW88119281A TW429577B TW 429577 B TW429577 B TW 429577B TW 88119281 A TW88119281 A TW 88119281A TW 88119281 A TW88119281 A TW 88119281A TW 429577 B TW429577 B TW 429577B
Authority
TW
Taiwan
Prior art keywords
copper
barrier
pad
improving
layer
Prior art date
Application number
TW88119281A
Other languages
English (en)
Inventor
Sheng-Shiung Chen
Fang-Keng Yang
Original Assignee
Taiwan Semiconductor Mfg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taiwan Semiconductor Mfg filed Critical Taiwan Semiconductor Mfg
Priority to TW88119281A priority Critical patent/TW429577B/zh
Application granted granted Critical
Publication of TW429577B publication Critical patent/TW429577B/zh

Links

Landscapes

  • Wire Bonding (AREA)
TW88119281A 1999-11-05 1999-11-05 Method for improving the copper processing with Al pad TW429577B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW88119281A TW429577B (en) 1999-11-05 1999-11-05 Method for improving the copper processing with Al pad

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW88119281A TW429577B (en) 1999-11-05 1999-11-05 Method for improving the copper processing with Al pad

Publications (1)

Publication Number Publication Date
TW429577B true TW429577B (en) 2001-04-11

Family

ID=21642903

Family Applications (1)

Application Number Title Priority Date Filing Date
TW88119281A TW429577B (en) 1999-11-05 1999-11-05 Method for improving the copper processing with Al pad

Country Status (1)

Country Link
TW (1) TW429577B (zh)

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Legal Events

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GD4A Issue of patent certificate for granted invention patent
MK4A Expiration of patent term of an invention patent