TW429463B - Method for cleaning wafers - Google Patents

Method for cleaning wafers

Info

Publication number
TW429463B
TW429463B TW87113975A TW87113975A TW429463B TW 429463 B TW429463 B TW 429463B TW 87113975 A TW87113975 A TW 87113975A TW 87113975 A TW87113975 A TW 87113975A TW 429463 B TW429463 B TW 429463B
Authority
TW
Taiwan
Prior art keywords
wafer
cleaning
tank
megasonic
contaminants
Prior art date
Application number
TW87113975A
Other languages
English (en)
Inventor
Yi-Chang Yang
Tang Yu
Original Assignee
United Microelectronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Microelectronics Corp filed Critical United Microelectronics Corp
Priority to TW87113975A priority Critical patent/TW429463B/zh
Application granted granted Critical
Publication of TW429463B publication Critical patent/TW429463B/zh

Links

TW87113975A 1998-08-25 1998-08-25 Method for cleaning wafers TW429463B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW87113975A TW429463B (en) 1998-08-25 1998-08-25 Method for cleaning wafers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW87113975A TW429463B (en) 1998-08-25 1998-08-25 Method for cleaning wafers

Publications (1)

Publication Number Publication Date
TW429463B true TW429463B (en) 2001-04-11

Family

ID=21631136

Family Applications (1)

Application Number Title Priority Date Filing Date
TW87113975A TW429463B (en) 1998-08-25 1998-08-25 Method for cleaning wafers

Country Status (1)

Country Link
TW (1) TW429463B (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112837995A (zh) * 2020-12-28 2021-05-25 苏州恩腾半导体科技有限公司 一种晶片表面污染清洗方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112837995A (zh) * 2020-12-28 2021-05-25 苏州恩腾半导体科技有限公司 一种晶片表面污染清洗方法

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Legal Events

Date Code Title Description
GD4A Issue of patent certificate for granted invention patent
MM4A Annulment or lapse of patent due to non-payment of fees