TW429200B - Method for forming vacuum holes on insert film in a CMP machine - Google Patents

Method for forming vacuum holes on insert film in a CMP machine

Info

Publication number
TW429200B
TW429200B TW88119903A TW88119903A TW429200B TW 429200 B TW429200 B TW 429200B TW 88119903 A TW88119903 A TW 88119903A TW 88119903 A TW88119903 A TW 88119903A TW 429200 B TW429200 B TW 429200B
Authority
TW
Taiwan
Prior art keywords
vacuum holes
cmp machine
insert film
forming vacuum
film
Prior art date
Application number
TW88119903A
Other languages
Chinese (zh)
Inventor
Sheng-Hung Jeng
Liu-Lang Shiu
Original Assignee
Asia Ic Mic Process Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asia Ic Mic Process Inc filed Critical Asia Ic Mic Process Inc
Priority to TW88119903A priority Critical patent/TW429200B/en
Application granted granted Critical
Publication of TW429200B publication Critical patent/TW429200B/en

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Abstract

This invention provides a method to form vacuum holes on an insert film in a CMP machine, wherein the formed vacuum holes match the dimension and location of the vacuum holes of a wafer carrier in the CMP machine. It uses a plate and a die to fix and position the film, and then cuts vacuum holes on it the insert film of the CMP machine using a laser machining tool with the optimal parameters of laser.
TW88119903A 1999-11-16 1999-11-16 Method for forming vacuum holes on insert film in a CMP machine TW429200B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW88119903A TW429200B (en) 1999-11-16 1999-11-16 Method for forming vacuum holes on insert film in a CMP machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW88119903A TW429200B (en) 1999-11-16 1999-11-16 Method for forming vacuum holes on insert film in a CMP machine

Publications (1)

Publication Number Publication Date
TW429200B true TW429200B (en) 2001-04-11

Family

ID=21643035

Family Applications (1)

Application Number Title Priority Date Filing Date
TW88119903A TW429200B (en) 1999-11-16 1999-11-16 Method for forming vacuum holes on insert film in a CMP machine

Country Status (1)

Country Link
TW (1) TW429200B (en)

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Legal Events

Date Code Title Description
GD4A Issue of patent certificate for granted invention patent
MM4A Annulment or lapse of patent due to non-payment of fees