TW428304B - Manufacturing method of metal capacitor - Google Patents

Manufacturing method of metal capacitor

Info

Publication number
TW428304B
TW428304B TW88109493A TW88109493A TW428304B TW 428304 B TW428304 B TW 428304B TW 88109493 A TW88109493 A TW 88109493A TW 88109493 A TW88109493 A TW 88109493A TW 428304 B TW428304 B TW 428304B
Authority
TW
Taiwan
Prior art keywords
layer
lower electrode
electrode plate
metal
oxide layer
Prior art date
Application number
TW88109493A
Other languages
Chinese (zh)
Inventor
Jen-Bin Lin
Jen-Huei Jung
Yu-Ru Liou
Original Assignee
United Microelectronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Microelectronics Corp filed Critical United Microelectronics Corp
Priority to TW88109493A priority Critical patent/TW428304B/en
Application granted granted Critical
Publication of TW428304B publication Critical patent/TW428304B/en

Links

Abstract

The present invention provides a manufacturing method of metal capacitor, which comprises: firstly forming both the lower electrode plate of a capacitor and a metal lead on the inter-layer dielectric (ILD), wherein there are several gaps between the metal lead and the lower electrode plate; then, filling these gaps with oxide; then, covering an oxide layer on the ILD and patterning the oxide layer so that the patterned oxide layer is referred to a top capping oxide layer, which has an opening for exposing the portion of the lower electrode plate to be used as the portion of the lower electrode plate adjacent to the upper electrode plate and the position of capacitor dielectric thin layer; then, sequentially forming capacitor dielectric thin layer and metal layer on the top capping oxide and the lower electrode layer in which the metal layer is used to fill the opening and cover the top capping oxide layer.
TW88109493A 1999-06-08 1999-06-08 Manufacturing method of metal capacitor TW428304B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW88109493A TW428304B (en) 1999-06-08 1999-06-08 Manufacturing method of metal capacitor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW88109493A TW428304B (en) 1999-06-08 1999-06-08 Manufacturing method of metal capacitor

Publications (1)

Publication Number Publication Date
TW428304B true TW428304B (en) 2001-04-01

Family

ID=21641023

Family Applications (1)

Application Number Title Priority Date Filing Date
TW88109493A TW428304B (en) 1999-06-08 1999-06-08 Manufacturing method of metal capacitor

Country Status (1)

Country Link
TW (1) TW428304B (en)

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Legal Events

Date Code Title Description
GD4A Issue of patent certificate for granted invention patent
MK4A Expiration of patent term of an invention patent