TW428304B - Manufacturing method of metal capacitor - Google Patents
Manufacturing method of metal capacitorInfo
- Publication number
- TW428304B TW428304B TW88109493A TW88109493A TW428304B TW 428304 B TW428304 B TW 428304B TW 88109493 A TW88109493 A TW 88109493A TW 88109493 A TW88109493 A TW 88109493A TW 428304 B TW428304 B TW 428304B
- Authority
- TW
- Taiwan
- Prior art keywords
- layer
- lower electrode
- electrode plate
- metal
- oxide layer
- Prior art date
Links
Abstract
The present invention provides a manufacturing method of metal capacitor, which comprises: firstly forming both the lower electrode plate of a capacitor and a metal lead on the inter-layer dielectric (ILD), wherein there are several gaps between the metal lead and the lower electrode plate; then, filling these gaps with oxide; then, covering an oxide layer on the ILD and patterning the oxide layer so that the patterned oxide layer is referred to a top capping oxide layer, which has an opening for exposing the portion of the lower electrode plate to be used as the portion of the lower electrode plate adjacent to the upper electrode plate and the position of capacitor dielectric thin layer; then, sequentially forming capacitor dielectric thin layer and metal layer on the top capping oxide and the lower electrode layer in which the metal layer is used to fill the opening and cover the top capping oxide layer.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW88109493A TW428304B (en) | 1999-06-08 | 1999-06-08 | Manufacturing method of metal capacitor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW88109493A TW428304B (en) | 1999-06-08 | 1999-06-08 | Manufacturing method of metal capacitor |
Publications (1)
Publication Number | Publication Date |
---|---|
TW428304B true TW428304B (en) | 2001-04-01 |
Family
ID=21641023
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW88109493A TW428304B (en) | 1999-06-08 | 1999-06-08 | Manufacturing method of metal capacitor |
Country Status (1)
Country | Link |
---|---|
TW (1) | TW428304B (en) |
-
1999
- 1999-06-08 TW TW88109493A patent/TW428304B/en not_active IP Right Cessation
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
GD4A | Issue of patent certificate for granted invention patent | ||
MK4A | Expiration of patent term of an invention patent |