TW422474U - Plasma processing device - Google Patents

Plasma processing device

Info

Publication number
TW422474U
TW422474U TW87217987U TW87217987U TW422474U TW 422474 U TW422474 U TW 422474U TW 87217987 U TW87217987 U TW 87217987U TW 87217987 U TW87217987 U TW 87217987U TW 422474 U TW422474 U TW 422474U
Authority
TW
Taiwan
Prior art keywords
processing device
plasma processing
plasma
processing
Prior art date
Application number
TW87217987U
Other languages
Chinese (zh)
Inventor
Jau-Nan Hung
You-Bin Guo
Jiun-Yau Wang
Wen-Han Huang
Original Assignee
E & R Engineering Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by E & R Engineering Corp filed Critical E & R Engineering Corp
Priority to TW87217987U priority Critical patent/TW422474U/en
Publication of TW422474U publication Critical patent/TW422474U/en

Links

TW87217987U 1998-10-30 1998-10-30 Plasma processing device TW422474U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW87217987U TW422474U (en) 1998-10-30 1998-10-30 Plasma processing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW87217987U TW422474U (en) 1998-10-30 1998-10-30 Plasma processing device

Publications (1)

Publication Number Publication Date
TW422474U true TW422474U (en) 2001-02-11

Family

ID=21637248

Family Applications (1)

Application Number Title Priority Date Filing Date
TW87217987U TW422474U (en) 1998-10-30 1998-10-30 Plasma processing device

Country Status (1)

Country Link
TW (1) TW422474U (en)

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Legal Events

Date Code Title Description
GD4K Issue of patent certificate for granted utility model filed before june 30, 2004
MM4K Annulment or lapse of a utility model due to non-payment of fees