TW416532U - Energy integrating controller of exposure machine - Google Patents

Energy integrating controller of exposure machine

Info

Publication number
TW416532U
TW416532U TW85204475U TW85204475U TW416532U TW 416532 U TW416532 U TW 416532U TW 85204475 U TW85204475 U TW 85204475U TW 85204475 U TW85204475 U TW 85204475U TW 416532 U TW416532 U TW 416532U
Authority
TW
Taiwan
Prior art keywords
exposure machine
energy integrating
integrating controller
controller
energy
Prior art date
Application number
TW85204475U
Other languages
Chinese (zh)
Inventor
Mau-Sheng Liang
Original Assignee
C Sun Mfg Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by C Sun Mfg Ltd filed Critical C Sun Mfg Ltd
Priority to TW85204475U priority Critical patent/TW416532U/en
Publication of TW416532U publication Critical patent/TW416532U/en

Links

TW85204475U 1996-03-26 1996-03-26 Energy integrating controller of exposure machine TW416532U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW85204475U TW416532U (en) 1996-03-26 1996-03-26 Energy integrating controller of exposure machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW85204475U TW416532U (en) 1996-03-26 1996-03-26 Energy integrating controller of exposure machine

Publications (1)

Publication Number Publication Date
TW416532U true TW416532U (en) 2000-12-21

Family

ID=21625755

Family Applications (1)

Application Number Title Priority Date Filing Date
TW85204475U TW416532U (en) 1996-03-26 1996-03-26 Energy integrating controller of exposure machine

Country Status (1)

Country Link
TW (1) TW416532U (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108181869A (en) * 2017-09-21 2018-06-19 东莞市多普光电设备有限公司 A kind of Internet of Things exposure machine
US10401736B2 (en) 2017-03-01 2019-09-03 SCREEN Holdings Co., Ltd. Exposure device, substrate processing apparatus, exposure method of substrate and substrate processing method
US10444636B2 (en) 2017-03-01 2019-10-15 SCREEN Holdings Co., Ltd. Exposure device substrate processing apparatus, exposure method of substrate and substrate processing method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10401736B2 (en) 2017-03-01 2019-09-03 SCREEN Holdings Co., Ltd. Exposure device, substrate processing apparatus, exposure method of substrate and substrate processing method
US10444636B2 (en) 2017-03-01 2019-10-15 SCREEN Holdings Co., Ltd. Exposure device substrate processing apparatus, exposure method of substrate and substrate processing method
CN108181869A (en) * 2017-09-21 2018-06-19 东莞市多普光电设备有限公司 A kind of Internet of Things exposure machine

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Legal Events

Date Code Title Description
GD4K Issue of patent certificate for granted utility model filed before june 30, 2004
MK4K Expiration of patent term of a granted utility model