經濟部中央標準局員工消費合作社印製 412604 A · ___ ΙΓ 五、發明説明（1) ~ 本發明是有關於一種使用於單結晶製造裝置之種晶夹 持具及該夾持具之組合方法。 單結晶矽一般是由CZ法製造。在cz法中，複晶矽 被充填入一單結晶製造裝置的石英坩堝中，然後由設置 在石英坩堝周圍的加熱器加熱以溶解複晶矽。之後一安 裝在種晶夾持具上的種結晶浸潰在融液中。然後，種晶 夾持具和石英坩堝分別被驅動以在相同或相反方向上回 轉同時種晶夹持具被拉引以成長一有所定直徑和長度 的早結晶妙。 為了在一種晶夾持具上安裝一種結晶，如日本實開昭 56-42978號公報揭露的方法被利用。在日本實開昭56_ 42978號公報中，—結晶支持棒被插人—種結晶的截止 部，以支持種結晶。然而，在上述方法中，被拉引的單 結晶重量隨著拉引的進行而增加且集中於支持部。近年 來，單結晶尺寸變大且重量增加；因此，種結晶將因負 荷過重而斷裂。為了解決上述問題，在日本特公平5 36395 號公報中所揭露龍結晶支持治具，—有推拔(tapered) 面的楔子被應用以使種結晶確實密合，且因此楔子和種 結晶之間的接觸面積增大；因此，施於每—種結晶的單 位面積之荷重減少。又在日本實開平4_89558號公報令， 上下部均為推拔面的種結晶收容在一可被分成數個部份 的夾持構件中。夾持構件的數個部份可經由鎖緊螺絲而 組裝，以建構一可確實地支持大重量單結晶的強化構造。 然而，在應用日本特公平5_36395號公報_所揭露 ____ 5 财關家辟（CNS )域格（ (請先閱讀背面之注意事項再填{?5本頁)Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 412604 A · ___ ΙΓ 5. Description of the Invention (1) ~ The present invention relates to a seed crystal holder used in a single crystal manufacturing device and a combined method of the holder. Monocrystalline silicon is generally manufactured by the CZ method. In the cz method, polycrystalline silicon is filled into a quartz crucible of a single crystal manufacturing apparatus, and then heated by a heater provided around the quartz crucible to dissolve the polycrystalline silicon. Then, a seed crystal mounted on the seed crystal holder is immersed in the melt. Then, the seed crystal holder and the quartz crucible are respectively driven to rotate in the same or opposite directions while the seed crystal holder is pulled to grow an early crystal with a certain diameter and length. In order to mount a crystal on a crystal holder, a method disclosed in Japanese Patent Application Laid-Open No. 56-42978 is used. In Japanese Utility Model Laid-Open Publication No. 56_42978, the cut-off portion of-crystal support rod is inserted-to support the seed crystal. However, in the above method, the weight of the pulled single crystal increases as the drawing progresses and is concentrated on the supporting portion. In recent years, the size of single crystals has increased and the weight has increased; therefore, seed crystals will break due to excessive load. In order to solve the above-mentioned problem, a long crystal support jig disclosed in Japanese Patent Publication No. 5 36395, a wedge with a tapered surface is applied to make the seed crystals really close, and therefore between the wedge and the seed crystals The contact area is increased; therefore, the load per unit area applied to each crystal is reduced. Also, in Japanese Shikai Hei 4_89558, the seed crystals of which the upper and lower portions are pushed surfaces are housed in a holding member that can be divided into several parts. Several parts of the holding member can be assembled via a locking screw to construct a reinforced structure that can reliably support a large single crystal. However, in the application of Japanese Special Fair No. 5_36395 _ disclosed ____ 5 CNS domain ((Please read the precautions on the back before filling out {? 5 page)
412604 A? 五、發明説明（2) 請 先 閱 讀 背 I 事 項 再 % 本 頁 方法拉引大重量單結晶時，如果種結晶和楔子的推拔面 間的加工精度不良，種結晶和楔子兩者無法密合。隨著 單結晶重量的增加’對於種結晶的支持應該更大。為了 符合這個需求，推拔面的切割需利用高精度的加工。相 反地，如果種結晶的推拔面不能隨著單結晶重量增加而 變形，確保面接觸是困難的。又在日本實開平489558 號公報揭露的方法中，在接觸面間確保良好接觸與曰本 特公平5-36395號公報是同樣困難的。另外，鎖緊螺絲 大多用來組裝治具。因為在拉引單結晶過程中，溫度重 覆地上昇和下降，可能產生螺絲腐蝕等問題，而導致無 法分解治具的可能。 訂 有鑑於上述的缺點，本發明的目的是提供一種使用於 單結晶製造裝置之種晶夾持具及該夹持具之組合方法。 當拉引一大重量單結晶時，本發明的種晶夾持具可確實 地夹持種結晶而不會使其破斷。又本發明的種晶夾持具 可重覆使用。 坡 經濟部中央標準局負工消費合作社印裝 為了達到上述目的，依據本發明之使用於單結晶製造 裝置之種晶夾持具的第一形態，於依據法的單結晶 製造裝置中裝設種晶夾持具，該種晶夾持具包括：筒狀 外構件’在上端具備有用以連結拉引纜線或拉引軸的連 結部’且具有設在上部側面的夾持具連結銷孔及設在底 面的開口部；筒狀内構件’可被插入該筒狀外構件，具 備有設在上部側面的夾持具連結銷孔的上部，且具有插 入種結晶的大直徑部的大直徑孔及插穿該種結晶的浸潰 本紙浪尺度適用中國國家梯準（CNS ) Λ4規格（2iOX 297公赀） 經濟部中央標隼局負工消費合作社印聚 412604 Λ 7 ___ ίΓ 五、發明説明（3) — 部（ic)的小直徑孔；環狀構件，與内構件的大直徑孔底 部卡合，且於内周具備有與種結晶的推拔部作線接觸的 圓弧部；配重，在本體部的下端具有與設在該種結晶的 上端的截斷槽卡合的突出部，且在本體部具備有插入夾 持具連結銷的縱長孔；以及夾持具連結銷，連結外構件、 内構件及配重。 根據上述構成，裝填種結晶的種晶夾持具經過設置在 外構件底面的開口部而被插入内構件中。然後，種晶夾 持具的組裝可輕易地由插一夾持具連結銷通過内構件、 外構件以及配重而完成〇相反地，分解也容易。種結晶 的推拔部的全周與環狀構件線接觸。因此，荷重將不會 不規則地集中於一些特定部份。又種結晶由配重的附加 而固定在一定位置。這可防止當種結晶浸潰於融液時， 因浮力導致的種結晶的上推力D另外，種結晶的單獨回 轉可由於其與配重的卡合而被防止，因此’種結晶與種 晶夹持具一起回轉。 依據本發明之使用於單結晶製造裝置之種晶夾持具的 第二形態，於依據CZ法的單結晶製造裝置中裝設種晶 夹持具’該種晶夾持具包括：筒狀外構件，在上端具備 有用以連結拉引纜線或拉引轴的連結部，且具有設在上 部側面的夾持具連結銷孔及設在底面的開口部；筒狀内 構件’可被插入該筒狀外構件，具備有設在上部側面的 夾持具連結銷孔的上部，且具有插入配重的孔及插入種 結晶的推拔孔；配重，在本體部的下端具有與設在該種 本紙張尺度適用中國國家標率（CNS ) Λ4規格（210X297公漦} (請先閱讀背面之注^事項|填寫本頁>412604 A? V. Description of the invention (2) Please read the item I and then%. If the method on this page is used to pull heavy single crystals, if the processing precision between the seed crystal and the pushing surface of the wedge is poor, both the seed crystal and the wedge Can't close. As the weight of the single crystal increases, the support for seed crystals should be greater. In order to meet this demand, the cutting of the pushing surface needs to use high-precision machining. Conversely, if the pushing surface of the seed crystal cannot deform as the weight of the single crystal increases, it is difficult to ensure surface contact. Also, in the method disclosed in Japanese Unexamined Patent Publication No. 489558, ensuring good contact between the contact surfaces is as difficult as in Japanese Patent Publication No. 5-36395. In addition, the locking screws are mostly used to assemble the jig. Because the temperature repeatedly rises and falls in the process of pulling the single crystal, problems such as screw corrosion may occur, which may lead to the possibility that the jig cannot be decomposed. In view of the above-mentioned disadvantages, an object of the present invention is to provide a seed crystal holder used in a single crystal manufacturing apparatus and a method for combining the same. When a large amount of single crystal is pulled, the seed crystal holder of the present invention can reliably hold the seed crystal without breaking it. The seed crystal holder of the present invention can be used repeatedly. In order to achieve the above purpose, according to the first form of the seed crystal holder used in the single crystal manufacturing apparatus of the present invention, the seed crystal is installed in the single crystal manufacturing apparatus according to the method A holder including a cylindrical outer member 'having a connecting portion at an upper end for connecting a pull cable or a pull shaft', and a holder connecting pin hole provided on an upper side and a holder An opening in the bottom surface; a cylindrical inner member can be inserted into the cylindrical outer member, and includes a large-diameter hole having a large-diameter portion for inserting a seed crystal and an upper portion provided with a clamp connection pin hole provided on an upper side surface; and The scale of the paper impregnated with this kind of crystal is applicable to the Chinese National Standard of Ladder (CNS) Λ4 specification (2iOX 297 gong). The Central Standards Bureau of the Ministry of Economic Affairs, the Consumers' Cooperatives Cooperative Prints 412604 Λ 7 ___ ) — The small diameter hole of the part (ic); the ring-shaped member is engaged with the bottom of the large-diameter hole of the inner member, and is provided with an arc portion in line contact with the pushing portion of the seed crystal on the inner periphery; At the lower end of the body There is a protruding portion that engages with a truncated groove provided at the upper end of this type of crystal, and the body portion is provided with an elongated hole for inserting a clamp connecting pin; and the clamp connecting pin connects an outer member, an inner member, and a connector. weight. According to the above configuration, the seed crystal holder holding the seed crystal is inserted into the inner member through the opening provided on the bottom surface of the outer member. Then, the assembly of the seed crystal holder can be easily completed by inserting a holder connecting pin through the inner member, the outer member, and the weight. Conversely, disassembly is also easy. The entire periphery of the push-out portion of the seed crystal is in line contact with the annular member. Therefore, the load will not be irregularly concentrated on some specific parts. Another type of crystal is fixed in position by the addition of a weight. This prevents the seed crystals from being pushed up by the buoyancy force D when the seed crystals are immersed in the melt. In addition, the separate rotation of the seed crystals can be prevented due to the engagement with the counterweight. The clamps rotate together. According to the second aspect of the seed crystal holder used in the single crystal manufacturing apparatus of the present invention, a seed crystal holder is installed in the single crystal manufacturing apparatus according to the CZ method. The seed crystal holder includes a cylindrical outer member. The upper end is provided with a connection portion for connecting a pull cable or a pull shaft, and has a clamp connection pin hole provided on the upper side and an opening portion provided on the bottom surface; a cylindrical inner member 'can be inserted into the tube Shaped outer member, which is provided with an upper portion of a clamper connection pin hole provided on an upper side surface, and has a hole for inserting a counterweight and a push-out hole for inserting a seed crystal; the counterweight has a lower end of the main body part This paper size is applicable to China National Standards (CNS) Λ4 specification (210X297 male 漦) (Please read the note on the back ^ Matters | fill this page >
*1T 經濟部中央標隼局員工消費合作社印製 412604 Λ 7 -________ 立、發明説明（4) 結晶的上端的截斷槽卡合的突出部，且在本體部具備有 插入夾持具連結銷的縱長孔；以及央持具連結銷，連結 外構件、内構件及配重。 根據上述構成，種結晶與内構件彼此經由推拔面而接 觸。因此，種結晶的夾持狀態比線接觸時更安定。其他 效果與第一發明相同。 依據本發明之單結晶製造用種晶夾持具之組合方法的 第一形態，使用於該第一形態之單結晶製造用種晶夾持 具：其特徵在於：藉由插入内構件的大直徑孔的大直徑 邛伤、插穿小直徑孔的浸潰部及連接大直徑部和浸潰部 的推拔部來構成安裝在該種晶夾持具的種結晶，且在種 結晶的上端設置有截斷槽，以薄膜片捲繞推拔部，而插 入該内構件，並藉由薄膜片使推拔部抵接於環狀構件， 進而在種結晶的截斷槽與配重的突出部卡合後’將内構 件插入外構件，而使夹持具連結銷插穿設在外構件、内 構件及配重的連結銷孔，以連結該等各構件，藉以夾持 種結晶。 ' 根據上述方法，内構件的大直徑孔和小直徑孔分別限 制種結晶的大直徑部和浸潰部。因此，種結晶的軸心與 種晶夾持具的軸心一致，且因此種結晶被保持在垂直狀 態。又種結晶的推拔部接觸與内構件的大直徑孔嵌合的 環狀構件的圓弧部，且有一薄膜片介於其_。因此，線 接觸的良好狀態可被達成。又因為配重的荷重是施於種 結晶上’上述線接觸可被保持在良好狀態。另外，當種 本紙浪尺度適用中國國家標準（CNS ) Λ4規格（2l〇x2y7公梦) (請先閲讀背面之注愈事項再-填寫本頁)* 1T Printed by the Central Consumers' Bureau of the Ministry of Economic Affairs, Consumer Cooperatives 412604 Λ 7 -________ Standing, description of invention (4) The protruding part of the upper truncated groove engaging with the crystal, and the body part is provided with a pin for inserting the clamp connection pin Longitudinal holes; and central holding link pins that connect the outer, inner and counterweights. According to the above configuration, the seed crystal and the inner member are in contact with each other via the pushing surface. Therefore, the clamping state of the seed crystal is more stable than that during the line contact. Other effects are the same as those of the first invention. According to the first aspect of the method for combining seed crystal holders for single crystal manufacturing according to the present invention, the seed crystal holder for single crystal manufacturing used in the first aspect is characterized in that: by inserting a large diameter of an inner member The large-diameter sting of the hole, the impregnated part that penetrates the small-diameter hole, and the push-out part that connects the large-diameter part and the impregnated part constitute the seed crystal mounted on the seed crystal holder, and is provided at the upper end of the seed crystal There is a truncated groove, the push-pull portion is wound with a thin film sheet, and the inner member is inserted, and the push-pushed portion is abutted against the ring-shaped member by the thin film sheet, and then the truncated groove of the seed crystal is engaged with the protruding portion of the weight After the 'internal member is inserted into the external member, the clamping pin of the holder is inserted through the connecting pin holes provided in the external member, the internal member, and the weight, so as to connect these members, thereby holding the seed crystal. '' According to the above method, the large-diameter hole and the small-diameter hole of the inner member limit the large-diameter portion and the impregnated portion of the seed crystal, respectively. Therefore, the axis of the seed crystal coincides with the axis of the seed crystal holder, and therefore the seed crystal is maintained in a vertical state. Another type of crystalline push portion contacts the arc portion of the ring-shaped member that fits into the large-diameter hole of the inner member, and has a thin film interposed therebetween. Therefore, a good state of line contact can be achieved. Because the weight of the weight is applied to the seed crystal, the above-mentioned line contact can be maintained in a good state. In addition, the current paper scale is applicable to the Chinese National Standard (CNS) Λ4 specification (2l0x2y7 public dream) (Please read the notes on the back before filling out this page)
經濟部十央橾準局—工消費合作社印鞏 412604 A? 一—~~_- B' —*----------- --- 五、發明説明（5) 結晶浸潰於融液時，由浮力導致的種結晶的上推力可被 防止。另外’因為種結晶的截斷槽與配重的突出部卡合 且配重的移動由夾持具連結銷限制，種結晶總是與種晶 夾持具一起回轉。 依據本發明之單結晶製造用種晶夾持具之組合方法的 第二形態’使用於第二形態之單結晶製造用種晶夾持具； 其特徵在於：安裝在該種晶夾持具的種結晶施實推拔加 工’且在種結晶的上端設置有截斷槽，以薄膜片捲繞種 結晶的推拔部大端側’而插入内構件，並藉由薄膜片使 種結晶抵接於内構件的推拔孔，進而在種結晶的截斷槽 與配重的突出部卡合後’將内構件插入外構件，而使夾 持具連結銷插穿設在外構件、内構件及配重的連結銷孔， 以連結該等各構件，藉以夾持種結晶。 根據上述方法’種結晶與内構件的推拔孔緊密地接 觸。因此，種結晶的轴心與種晶夾持具的轴心一致，且 因此種結晶被保持在垂直狀態。又一薄膜片介於種結晶 的推拔部與内構件之間。因此，緊密接觸可被增強。又 因為配重的荷重是施於種結晶上，上述的緊密接觸可被 保持在良好狀態《另外’當種結晶浸潰於融液時，由浮 力導致的種結晶的上推力可被防止。又因為種結晶的截 斷槽與配重的突出部卡合且配重的移動由夾持具連結銷 限制’種結晶總是與種晶夹持具·一起回轉。 〔發明的實施形態及實施例〕 以下將參考圖式說明本發明的使用於單結晶製造裝置 9 本紙乐尺度適用中國國家標準（CNS ) A4規格（2丨OX 297公餐） (請先閱讀背面之注r事項再填舄本頁) 訂 -^! 412604 五、發明説明（6) —— 之種晶夾持具及該夾持具之組合方㈣實施例。如 圖和第2圖所示’―使用於第-實施例的單結晶製造裝 置之種晶夾持具ίο由一外構件u、一内構件12 ' 狀構件13、一配重14和-夾持具連結銷15構成。如第 3圖所示，種結晶i依序具有一大直徑部u、一 ib以及-直徑比大直徑部la小的浸潰部卜另外，— 截斷槽Id形成在大直徑部1&的上端。 外構件11為一上端部封閉的中空圓筒狀構件。一對 與拉引纜線下端卡合的纜線連結銷孔Ua形成在外構件 11的上端，且兩個可插入夾持具連結銷15的夹持具連 結銷孔形成在外構件11的上部周面。内構件12為_空 圓筒的形狀，且可經過形成在外構件u底部的開口部而 被插入外構件11中。種結晶丨的大直徑部丨a插入的大 直徑孔12a形成在内構件12的上部，且兩個種結晶！的 浸潰部lc插入的小直徑孔l2b、l2c形成在内構件12的 下部。一内周面以圓弧成形的環狀構件13嵌著在大直徑 孔12a底部。種結晶1的推拔部ib與環狀構件13的内 周面接觸。又兩個可插入夹持具連結銷15的夾持具連結 銷孔形成在内構件12的上部周面。另外，可將小直徑孔 12b的上端切成圓弧形以代替環狀構件〗3。 如第2圖所示，配重η包括一圓柱狀本體部1如以 及一形成在圓柱狀本體部14a下端的突出部14b。一可 插入夾持具連結銷15的縱長孔14c形成在圓柱狀本體部 14a。突出部i4b寬度為W，其可與種結晶1的大直徑 本紙張尺度適用中國國家標準（CNS ) Λ4規格（210Χ 297公麓） ί請先聞讀背面之注"'事項#-填寫本頁} ，ττ 經濟部中央標準局貝Η消費合作社印裝 412604 Λ7 Β 二 1.. I I ~ —— · - — · ,- - — . ____ 五、發明説明（7) 部la上端配合而毫無間隙（見第3圖）。寬度w的中心線 垂直於縱長孔14c的中心線。縱長孔14c的較長軸平行 於配重14的縱轴’且縱長孔14c的較短轴D1有可使夾 持具連結銷15插入而毫無間隙的尺寸。 外構件11、内構件12和環狀構件13由鉬、高純度 石墨或碳纖維強化碳等高熔點金屬製成；且配重14由鉬 等高炼點金屬製成。 在應用上述種晶失持具拉引單結晶的場合中，配重14 安裝在種結晶1上，且一薄膜片16包圍種結晶1的推拔 部lb。如第4圖所示’薄膜片16是一高純度石墨片（或 極薄布）。為了避免其在包圍種結晶1的推拔部lb時端 部重疊，薄膜片16以扇狀形成。 下列是描述利用具有上述種晶夾持具之單結晶製造裝 置拉引單結晶的方法。 (1) 種結晶的製作 種結晶通常被切成角柱形。種結晶丨可由切削其外周 成一具有大直徑部la、推拔部lb和浸潰部lc的形狀（見 第3圖）。另外，截斷槽1(1可被設置在其上端面。 經濟部中央標準局貝工消費合作社印製 (2) 種結晶的安裝 如第5圖所示，薄膜片16包圍種結晶丨的推拔部lb， 且一由石墨製的細線被用以在推拔部lb的大端部繫緊薄 膜片16。然後，種結晶被插入内構件12内。也可以顛 倒的姿勢裝配種結晶1以及由在種結晶1之上加上内構 件12使種結晶【插入内構件u。當插入種結晶i時， 本紙張尺家標率(cns ) -- Λ 412604 五、發明説明（8) 插入方向是由使截斷槽1£1的中心線與垂直於形成在内構 件12上部的夾持具連結銷孔的中心線的線共線而調整。 種結晶1的推拔部lb與環狀構件13的内周線接觸，且 有薄膜片16介於其中。又由於大直徑部la和浸潰部ic 分別插入大直徑孔12a和小直徑孔12c，種結晶i的轴 心與内構件12的軸心一致。 (3) 配重的安裝 在種結晶1插入内構件12之後，配重14放置在種結 晶1之上《此時，配重14的突出部14b被插入種結晶！ 的截斷槽id’所以他們彼此卡合。配重14施一所定荷 重在種結晶1上，以維持種結晶j的推拔部115與環狀構 件13的内周的線接觸在良好的狀態且去除當種結晶浸 潰於融液時，由浮力導致的種結晶1的上推力。 (4) 連結内構件和外構件 安裝種結晶1和配重14的内構件12被插入外構件 11據此，内構件12的轴心與外構件丨丨的軸心一致。 之後，内構件12與外構件11的夾持具連結銷孔共線， 且炎持具連結銷15被插過外構件u與内構件12的失持 具連結銷孔和配重14的縱長孔Ue魏裝種晶失持具 10由於夾持具連結銷15插過上述元件，配重14和種 晶夹持具ίο -起回轉，且因為種結曰曰曰1與配重14卡合， =可與種晶夾持具1Q—起回轉。因此，種結晶i不可 此單獨回轉。又當爽持具連結銷15被插過配重14的縱 長孔14c時’在夾持具連結銷15上下仍存有間隙。因此， 本紙張尺㈣ -----:---.-----:------訂 -------線. (#先閱讀背而之注意事項再填寫本頁) 經濟部中央標準局員工消费合作杜印製 經濟部中央榡準局貞工消費合作钍印製 412604 ' ---~___ Η· ~~ I" I-------— - ----- ___- 五、發明説明（9) 即使種結晶1的截斷槽ld上下端位置分得很開，配重14 可被上下移動而施一定的荷重在種結晶1上。 (5) 拉引纜線的卡合 繞線連結銷3被插過形成在外構件11上部的缓線 連結銷孔和拉引纜線2的末端，以使種晶夾持具1〇與拉 引缓線2卡合。 (6) 單結晶的拉引 種晶夾持具10以與一般拉引單結晶相同的方法下 降，且種結晶1的浸潰部1c浸潰在融液中。所以在浸潰 部無差排化後，一具有所定直徑的單結晶由dash neck 法成長。 在第2圖中，突出部14b的寬度你的中心線垂直於 縱長孔14c的中心線。然而，配重並不限制於此配置； 例如，匕也可以平行的方式排列在兩中心線之上。又在 第5圖中，配重14和種結晶！間的卡合由使種結晶】的 上端面與配重14的本體部的下端部抵接而達成。然而， 它也可使種結晶1的截斷槽ld的底面和配重14的突出 部14b的下面抵接而達成。 配重14可持續地在種結晶i上施一定荷重，不論在 製造種結晶1時有任何誤差。即使種結晶〖的推拔部讣 與環狀構件13存在有加工精度的問題，介於其中的薄膜 片16將作補償，以保持其線接觸在良好的狀況。又内構 件12與外構件n的連接可只由裝配而進行，而不用螺 絲。因此，種晶夹持具的組裝和分解相當容易。種晶夾 13 本紙張尺度適用中國國家標準（CNS ) Λ4規格（2!OX297公犮） -----„---：--- 、|_„----1訂^------線- (請先閱讀t面之注愈事項再填寫本頁) Λ· Η' ^12604 五、發明説明（10) ^ ------------—- 持具也可被應用在拉齡式的單結晶製造裝置上。 置的如箱第’ 一應用於第二實施例的單結晶製造裝 置=種晶夾持具2G包括—外構件21、—内構件22、一 捭且二和夾持具連結銷24。上述元件以與在種晶央 持具10中所用的相同材料所製成。 外構件21為中空圓筒狀。如應用於第—實施例的單 :晶製造裝置的種晶爽持具1〇，外構件21上端封閉且 $底面設置in部。拉⑽線2的末端藉由徵線連結 銷3與外構件21的上端卡合。兩個可插入夹持具連結銷 24的央持具連結鎖孔形成在外構件21的上部周面。 内構件22為中空圓筒的形狀。種結晶4的大直徑邻 插入的大直徑孔形成在内構件22的上部。一推拔孔形成 在内構件22的下部。又兩個可插入夾持具連結銷24的 夾持具連結銷孔形成在内構件22的上部周面。配 的形狀與第2圖所示的配重14的形狀相同。 下列是描述利用具有上述種晶夹持具之單結晶製造 置拉引單結晶的方法。 - (1) 種結晶的製作 種結晶4切成具有一全長為推拔部的外形。推拔 形狀與形成在内構件22中的推拔孔相同。另外，截斷押 4a可被设置在種結晶4的大端部的端面。 a (2) 種結晶的安裝 -薄膜片25包圍種結晶4的上部，且一由石墨 細線被用以在種結晶4的上部繫緊薄膜片25。然後， 本紙張纽ϋ财_ (請先閲讀背面之注意事項再填寫本頁 ---訂 線 經濟部中央橒準局員工消費合作社印製 412604 五、發明説明（u) ~ 結晶4被插入内構件22内。如第4圖所示的薄膜片16, 薄膜片25是高純度石墨片（或極薄布）且為扇狀。當插入 種結晶4時，插入方向是由使截斷槽牦的中心線與垂直 於形成在内構件22上料失持具連結銷孔的巾心線的線 共線而調整。種結晶4與内構件22的推拔孔線接觸，且 有薄膜片25介於其中。又由於種結晶4與内構件22的 推拔孔面接觸，且有薄膜片25介於其中，種結晶4的轴 心與内構件22的軸心一致。 (3) 配重的安裝 在種結晶4插入内構件22之後，配重23放置在種結 晶4之上。此時，配重23的突出部23a被插入種結晶* 的截斷槽4a，所以他們彼此卡合。 (4) 連結内構件和外構件 經濟部中央標準局貝工消費合作社印製 (請先聞讀背而之注#^項再4·巧本页) 線 安裝種結晶4和配重23的内構件22被插入外構件 21。在外構件21與内構件22的夾持具連結銷孔已共線 後，夾持具連結銷24被插過外構件21與内構件22的失 持具連結銷孔和配重23的縱長孔以組裝種晶·夾持具2〇。 一定的荷重施在種結晶4上。由插内構件22入外構件 21 ’使内構件22的軸心和外構件21的軸心一致。 (5) 拉引纜線的卡合 一境線連結銷3被插過形成在外構件21上部的境線 連結銷孔和拉引纜線2的末端，以使種晶夾持具2〇與拉 引境線2卡合。 (6) 单結晶的拉引 15 本紙张尺度適用中國國家標準{ CNS ) Λ4現格（210X297公韙} 經濟部中央標準局員工消費合作社印聚 412QQ4 tc ------- 五、發明説明（12) 種晶夾持具20以與一般拉引單結晶相同的方法下 降’且種結晶4的下端浸潰在融液中。所以在無差排化 後，一具有所定直徑的單結晶由dash_neck法成長。 在根據第二實施例製造單結晶的方法中，已加工成推 拔外形的種結晶4配合内構件22的推拔孔；因此，它可 被保持在極安定的狀態。將薄膜片25介於推拔面之間可 補償其加工精度。 〔發明效果〕 與習知夾持單結晶的方法比較，在本發明由cz法製 造單結晶的過程中，種結晶和種晶夾持具之間的接觸狀 態可被增進。另外，本發明種晶夾持具的構造可使種結 晶免於偏荷重；因此，安裝於種晶夾持具中的種結晶破 斷可被防止。又構成種晶夾持具的元件少且構造簡單， 因此其容易組裝和分解種晶失持具。又種晶夾持具在製 造單結晶的過程中可被重覆使用。 〔圖式簡單說明〕 第1圖是使用於第一實施例的單結晶製造裝置之種晶 夾持具的構成的縱斷面圖： 第2圖是配重的立體圖； 第3圖是使用於第一實施例的單結晶製造襞置之種結 晶的立體圖； 第4圖是薄膜片的上視圖； 第5圖是一種結晶安裝在使用於第一實施例的單結晶 製造裝置之種晶夾持具的縱斷面圖； ______ 16 本紙狀度適( CNS ) Λ娜（210X2⑽免厂—------ (請先閱讀背面之注囊事項再备寫本頁) ir ^ i.v — 線 «2604 、 Η" 五、發明说明（13 ) 第6圖是配重與種結晶卡合的其他方法的說明圖；以 及 第7圖是一種結晶安裝在使用於第二實施例的單結晶 製造裝置之種晶夾持具的縱斷面圖。 〔符號說明〕 1、4種結晶；la大直徑部；ib推拔部；lc浸潰 部；Id、4a截斷槽：2拉引纜線；1 〇、20種晶夾持具； 11、21外構件；12、22内構件；I2a大直徑孔；12b、 12c小直徑孔；13環狀構件；14、23配重：14a本體 部；14b、23a突出部；14c縱長孔；15、24夾持具連 結銷；16、25薄膜片。 -------.--.——^----ltTL-----線-, (讀先閱讀背面之注意事項再靖寫本頁) 經濟部中央標準局員工消費合作社印繁 本紙浪尺度適用中國國家椋孪（CNS ) Λ4規格（210X297公# .)Shiyang Qiaoquan Bureau of the Ministry of Economic Affairs—Industrial and Consumer Cooperatives Gong Gong 412604 A? I— ~~ _- B '— * ----------- --- 5. Description of the invention (5) Crystal immersion During the melt, the upward thrust of seed crystals caused by buoyancy can be prevented. In addition, since the truncated groove of the seed crystal is engaged with the protruding portion of the counterweight and the movement of the counterweight is restricted by the clamp pin, the seed crystal always rotates together with the seed crystal holder. According to the second aspect of the method of combining seed crystal holders for single crystal manufacturing according to the present invention, the "seed crystal holders for single crystal manufacturing used in the second aspect" are characterized in that: Seed crystals are subjected to push-pull processing, and a trough groove is provided at the upper end of the seed crystals. A thin film sheet is wound around the large end side of the push-out portion of the seed crystals, inserted into the inner member, and the seed crystals are brought into contact with the thin film sheet The push-out hole of the inner member, and after the truncated groove of the seed crystal is engaged with the protruding portion of the counterweight, the inner member is inserted into the outer member, and the connecting pin of the holder is inserted through the outer member, the inner member and the counterweight. The pin holes are connected to connect the respective members, thereby holding the seed crystals. According to the above method ', the crystal is brought into close contact with the push-out hole of the inner member. Therefore, the axis of the seed crystal coincides with the axis of the seed crystal holder, and therefore the seed crystal is maintained in a vertical state. Another thin film sheet is interposed between the pushing part of the seed crystal and the internal member. Therefore, close contact can be enhanced. Because the weight of the counterweight is applied to the seed crystal, the above-mentioned close contact can be maintained in a good state. "In addition," when the seed crystal is immersed in the melt, the upward thrust of the seed crystal caused by buoyancy can be prevented. In addition, because the truncated groove of the seed crystal is engaged with the protruding portion of the counterweight and the movement of the counterweight is restricted by the clamper connection pin, the seed crystal always rotates with the seed crystal holder. [Inventive Embodiments and Examples] The following will explain the invention used in a single crystal manufacturing device with reference to the drawings. 9 The paper scale is applicable to the Chinese National Standard (CNS) A4 specification (2 丨 OX 297 meals) (please read the back first) Note the r items to fill in this page) Order-^! 412604 V. Description of the invention (6) —— seed crystal holder and the combination of the holder ㈣ embodiment. As shown in FIG. 2, the seed crystal holder used in the single crystal manufacturing apparatus of the first embodiment is composed of an outer member u, an inner member 12, a shape member 13, a counterweight 14, and a clamp. The holder link pin 15 is configured. As shown in FIG. 3, the seed crystal i has a large-diameter portion u, a ib, and-an impregnated portion having a diameter smaller than that of the large-diameter portion la. In addition, a truncation groove Id is formed at the upper end of the large-diameter portion 1 & . The outer member 11 is a hollow cylindrical member whose upper end is closed. A pair of cable connection pin holes Ua that engage with the lower end of the pull-out cable are formed on the upper end of the outer member 11, and two clamp connection pin holes into which the clamp connection pin 15 can be inserted are formed on the upper peripheral surface of the outer member 11 . The inner member 12 has the shape of a hollow cylinder, and can be inserted into the outer member 11 through an opening formed at the bottom of the outer member u. The large-diameter portion 丨 a of the seed crystal 丨 a large-diameter hole 12a inserted is formed on the upper part of the inner member 12, and two kinds of crystals! The small-diameter holes 12b, 12c into which the impregnated portion 1c is inserted are formed in the lower portion of the inner member 12. An annular member 13 having an inner peripheral surface formed in a circular arc is fitted in the bottom of the large-diameter hole 12a. The pushing portion ib of the seed crystal 1 is in contact with the inner peripheral surface of the ring-shaped member 13. Two further clamper coupling pin holes into which the clamper coupling pin 15 can be inserted are formed on the upper peripheral surface of the inner member 12. In addition, the upper end of the small-diameter hole 12b may be cut into a circular arc shape instead of the annular member. As shown in Fig. 2, the weight η includes a cylindrical body portion 1 and a protruding portion 14b formed at the lower end of the cylindrical body portion 14a. A longitudinal hole 14c into which the clamper coupling pin 15 can be inserted is formed in the cylindrical body portion 14a. The width of the protruding part i4b is W, which can be compatible with the large diameter of seed crystal 1. The paper size is applicable to the Chinese National Standard (CNS) Λ4 specification (210 × 297 feet). Please read the note on the back first " '事 # -fill this Page}, ττ Printed by the Central Standards Bureau of the Ministry of Economic Affairs, Behr Consumer Cooperative, 412604 Λ7 ΒII 1 .. II ~ —— ·--·,--—. Clearance (see Figure 3). The center line of the width w is perpendicular to the center line of the longitudinal hole 14c. The longer axis of the elongated hole 14c is parallel to the longitudinal axis' of the counterweight 14, and the shorter axis D1 of the elongated hole 14c has a dimension that allows the holder coupling pin 15 to be inserted without a gap. The outer member 11, the inner member 12, and the ring member 13 are made of a high melting point metal such as molybdenum, high-purity graphite, or carbon fiber-reinforced carbon; and the weight 14 is made of a high-melting point metal such as molybdenum. In the case where the single crystal is pulled by using the seed crystal holder, the weight 14 is mounted on the seed crystal 1, and a thin film sheet 16 surrounds the push-out portion lb of the seed crystal 1. As shown in Fig. 4, the thin film sheet 16 is a high-purity graphite sheet (or an extremely thin cloth). In order to prevent the end portions from overlapping when surrounding the push-out portion 1b of the seed crystal 1, the film sheet 16 is formed in a fan shape. The following is a description of a method for drawing a single crystal by using the single crystal manufacturing apparatus having the above seed crystal holder. (1) Production of seed crystals Seed crystals are usually cut into angular prisms. This kind of crystal can be cut into a shape having a large-diameter portion la, a push-out portion lb, and an impregnated portion lc by cutting its periphery (see FIG. 3). In addition, the truncation groove 1 (1 may be provided on the upper end surface thereof. Printed by the Central Standards Bureau of the Ministry of Economic Affairs, Shellfish Consumer Cooperative, (2) The installation of the crystals is shown in FIG. And a thin wire made of graphite is used to fasten the thin film sheet 16 at the large end of the pushing portion lb. Then, the seed crystal is inserted into the inner member 12. The seed crystal 1 can also be assembled in an inverted posture, and Add the inner member 12 on the seed crystal 1 to insert the seed crystal [Insert the inner member u. When inserting the seed crystal i, the paper scale family standard rate (cns)-Λ 412604 V. Description of the invention (8) The insertion direction is It is adjusted by making the center line of the trough groove 1 £ 1 collinear with the line perpendicular to the center line of the clamper connection pin hole formed on the upper part of the inner member 12. The push-out portion 1b of the seed crystal 1 and the ring member 13 The inner circumference is in line with a thin film piece 16 interposed therebetween. Since the large-diameter portion la and the impregnated portion ic are inserted into the large-diameter hole 12a and the small-diameter hole 12c, respectively, the axis of the crystal i and the axis of the internal member 12 (3) After the weight is installed on the seed crystal 1, the weight 14 is placed on the seed crystal 1. "At this time, the protruding portion 14b of the weight 14 is inserted into the seed crystal! The truncated groove id 'so they are engaged with each other. The weight 14 applies a predetermined load on the seed crystal 1 to maintain the push-out portion of the seed crystal j. 115 The line contact with the inner periphery of the ring-shaped member 13 is in a good condition and the upward thrust of the seed crystal 1 caused by the buoyancy when the seed crystal is immersed in the melt is removed. (4) Connecting the inner member and the outer member The inner member 12 of the crystal 1 and the counterweight 14 is inserted into the outer member 11. Accordingly, the axial center of the inner member 12 and the outer member 丨 are aligned with each other. Thereafter, the clamp pin connecting pin of the inner member 12 and the outer member 11 is connected. In-line, and the inflammation holder connection pin 15 is inserted through the misplacer connection pin hole of the outer member u and the inner member 12 and the longitudinal hole Ue of the weight 14 due to the holder connection pin 15 is inserted through the above components, the counterweight 14 and the seed crystal holder are lifted and turned, and because the seed knot 1 is engaged with the counterweight 14, = can be rotated with the seed crystal holder 1Q. Therefore, This kind of crystal i cannot be rotated alone. When the cooler holding pin 15 is inserted through the longitudinal hole 14c of the weight 14, it is' on the holder connecting pin 15 There is still a gap underneath. Therefore, the size of this paper is -----: ---.-----: ------------------ line. (# 先 读 背 而Please pay attention to this page before filling in this page) Consumer Co-operation of the Central Bureau of Standards, Ministry of Economic Affairs, Du Printing, Central Government Bureau of the Ministry of Economic Affairs, Consumption Coordination of Industrial Labor, Printing 412604 '--- ~ ___ Η · ~~ I " I ---- ----------- ___- 5. Description of the invention (9) Even if the upper and lower ends of the trough ld of the seed crystal 1 are separated, the counterweight 14 can be moved up and down to apply a certain load to the seed crystal 1 on. (5) The engaging winding connection pin 3 of the pull-out cable is inserted through the slow-wire connection pin hole formed at the upper portion of the outer member 11 and the end of the pull-out cable 2 so that the seed crystal holder 10 and the pull-out cable Slow line 2 engages. (6) Pulling of a single crystal The seed crystal holder 10 is lowered in the same manner as that of pulling a single crystal in general, and the immersion portion 1c of the seed crystal 1 is immersed in the melt. Therefore, after the impregnated part is discharged without difference, a single crystal with a predetermined diameter is grown by the dash neck method. In the second figure, the center line of the width of the protruding portion 14b is perpendicular to the center line of the vertical hole 14c. However, the counterweight is not limited to this configuration; for example, knives can also be arranged in parallel on two centerlines. Again in Figure 5, weight 14 and seed crystals! Interlocking is achieved by contacting the upper end surface of the seed crystal with the lower end portion of the body portion of the weight 14. However, the bottom surface of the trough ld of the seed crystal 1 and the bottom surface of the protruding portion 14b of the weight 14 may be brought into contact with each other. The weight 14 can continuously apply a certain load on the seed crystal i, regardless of any error in the production of the seed crystal 1. Even if there is a problem in the processing accuracy of the pusher 讣 of the crystal and the annular member 13, the thin film 16 intervening therebetween will be compensated to keep its line contact in a good condition. Moreover, the connection of the inner member 12 and the outer member n can be performed only by assembly, without using screws. Therefore, the assembly and disassembly of the seed crystal holder are quite easy. Seed clip 13 This paper size is applicable to the Chinese National Standard (CNS) Λ4 specification (2! OX297) 犮 ----- „---: ---, | _„ ---- 1 order ^ --- --- Line- (Please read the notes on the t side before filling in this page) Λ · Η '^ 12604 V. Description of the invention (10) ^ ------------—- Holder It can also be applied to a single crystal manufacturing apparatus of the aging type. The first single-crystal manufacturing device applied to the second embodiment is the seed crystal holder 2G. The seed crystal holder 2G includes-an outer member 21,-an inner member 22, one and two members, and a clamp connection pin 24. The above-mentioned element is made of the same material as that used in the seed crystal holder 10. The outer member 21 has a hollow cylindrical shape. For example, the seed crystal holder 10 applied to the single crystal manufacturing apparatus of the first embodiment, the upper end of the outer member 21 is closed, and the bottom portion is provided with an in portion. The end of the drawn wire 2 is engaged with the upper end of the outer member 21 by a levy connecting pin 3. Two central holder connection lock holes into which the holder connection pins 24 can be inserted are formed on the upper peripheral surface of the outer member 21. The inner member 22 is in the shape of a hollow cylinder. The large-diameter adjacent to the seed crystal 4 has an inserted large-diameter hole formed on the upper portion of the inner member 22. A push-out hole is formed in the lower portion of the inner member 22. Two further clamper coupling pin holes into which the clamper coupling pin 24 can be inserted are formed on the upper peripheral surface of the inner member 22. The shape of the weight is the same as that of the weight 14 shown in FIG. The following is a description of a method for drawing a single crystal by using a single crystal manufacturing apparatus having the above seed crystal holder. -(1) Production of seed crystal The seed crystal 4 is cut into a shape having a full-length pushing portion. The pushing shape is the same as the pushing hole formed in the inner member 22. In addition, the truncated pledge 4a may be provided on the end face of the large end portion of the seed crystal 4. a (2) Installation of seed crystal-The thin film sheet 25 surrounds the upper part of the seed crystal 4, and a thin graphite wire is used to fasten the thin film sheet 25 on the upper part of the seed crystal 4. Then, this paper is __ (Please read the notes on the back before filling in this page --- Printed by the Central Consumers 'Association of the Ministry of Economy, printed by the Consumer Cooperatives of Consumers' Cooperatives 412604. 5. Description of the invention (u) ~ Crystal 4 is inserted Inside the member 22. As shown in FIG. 4, the thin film sheet 16 and the thin film sheet 25 are high-purity graphite sheets (or extremely thin cloth) and are fan-shaped. When the seed crystal 4 is inserted, the insertion direction is caused by cutting the trough. The center line is adjusted in line with the line perpendicular to the towel core line formed by the inner pin 22 on the inner member 22. The seed crystal 4 is in contact with the pushing hole line of the inner member 22, and a thin film sheet 25 is interposed therebetween. Among them, since the seed crystal 4 is in contact with the pushing hole surface of the inner member 22, and a thin film sheet 25 is interposed therebetween, the axis of the seed crystal 4 is consistent with the axis of the inner member 22. (3) The counterweight is installed at After the seed crystal 4 is inserted into the inner member 22, the weight 23 is placed on the seed crystal 4. At this time, the protruding portion 23a of the weight 23 is inserted into the cut-out groove 4a of the seed crystal *, so that they engage with each other. (4) Link Printed by the Shell and Consumer Cooperatives of the Central Standards Bureau of the Ministry of Internal and External Components (Please read first and read the note # ^ Item 4 and this page) The inner member 22 of the wire mounting seed 4 and the weight 23 is inserted into the outer member 21. After the pin holes of the clamps of the outer member 21 and the inner member 22 are aligned, the clamp The connecting pin 24 is inserted through the misalignment connecting pin hole of the outer member 21 and the inner member 22 and the longitudinal hole of the weight 23 to assemble the seed crystal and the holder 20. A certain load is applied to the seed crystal 4. Inserting the inner member 22 into the outer member 21 'aligns the axis of the inner member 22 with the axis of the outer member 21. (5) The engagement of the draw cable with a boundary line connecting pin 3 is inserted through the boundary line formed on the upper portion of the external member 21. Connect the pin hole and the end of the pull-out cable 2 so that the seed crystal holder 20 engages with the pull-out line 2. (6) Single-crystal pull-out 15 This paper is in accordance with the Chinese National Standard {CNS} 4格 （210X297 公 韪） Industrial Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs of the People's Republic of China 412QQ4 tc ------- V. Description of the invention (12) The seed crystal holder 20 is lowered in the same way as the general pull single crystal. And the lower end of the seed crystal 4 is immersed in the melt. Therefore, after the non-defective discharge, a single crystal with a predetermined diameter is grown by the dash_neck method. In the method for manufacturing a single crystal according to the second embodiment, the seed crystal 4 which has been processed into a push-out shape cooperates with the push-out hole of the inner member 22; therefore, it can be maintained in a very stable state. The machining precision can be compensated between the drawn surfaces. [Effect of the invention] Compared with the conventional method of holding single crystals, the contact between the seed crystal and the seed crystal holder in the process of manufacturing the single crystal by the cz method of the present invention The state can be improved. In addition, the structure of the seed crystal holder of the present invention can prevent the seed crystal from being biased; therefore, breakage of the seed crystal installed in the seed crystal holder can be prevented. The seed crystal holder has fewer components and has a simple structure, so it is easy to assemble and disassemble the seed crystal loss holder. Another seed crystal holder can be repeatedly used in the process of making single crystals. [Brief Description of the Drawings] Fig. 1 is a longitudinal sectional view showing the structure of a seed crystal holder used in the single crystal manufacturing apparatus of the first embodiment: Fig. 2 is a perspective view of a counterweight; Fig. 3 is used in A perspective view of a seed crystal placed in a single crystal manufacturing apparatus of the first embodiment; FIG. 4 is a top view of a thin film sheet; and FIG. 5 is a seed crystal holder mounted on a single crystal manufacturing apparatus used in the first embodiment. A longitudinal section view of the tool; ______ 16 This paper is of a suitable degree (CNS) Λona (210X2⑽free factory —------ (Please read the note on the back before writing this page) ir ^ iv — Thread « 2604, Η " V. Description of the invention (13) FIG. 6 is an explanatory diagram of other methods for engaging weights with seed crystals; and FIG. 7 is a crystal installed in a single crystal manufacturing apparatus used in the second embodiment Longitudinal section view of seed crystal holder. [Symbols] 1, 4 kinds of crystals; la large diameter part; ib push part; lc immersion part; Id, 4a truncation groove: 2 pull-out cable; 1 〇 , 20 kinds of crystal holders; 11, 21 outer members; 12, 22 inner members; I2a large diameter hole; 12b, 12c small diameter hole; 13 14, 23 counterweights: 14a body part; 14b, 23a protruding part; 14c longitudinal hole; 15, 24 clamp connection pin; 16, 25 film piece. -------.--. —— ^ ---- ltTL ----- line-, (Read the precautions on the back before writing this page) The Central Government Bureau of the Ministry of Economic Affairs, the Consumer Cooperatives, printed and printed paper, and the scale of the paper is applicable to the Chinese National Government (CNS) ) Λ4 Specifications (210X297 Male #.)