TW409037B - Smock for cleanroom - Google Patents

Smock for cleanroom Download PDF

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Publication number
TW409037B
TW409037B TW087112575A TW87112575A TW409037B TW 409037 B TW409037 B TW 409037B TW 087112575 A TW087112575 A TW 087112575A TW 87112575 A TW87112575 A TW 87112575A TW 409037 B TW409037 B TW 409037B
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TW
Taiwan
Prior art keywords
clean room
dustproof clothing
patent application
cleanroom
release
Prior art date
Application number
TW087112575A
Other languages
Chinese (zh)
Inventor
Youn-Soo Han
Hyeug-Ki Kim
Hyun-Joon Kim
Seung-Un Kim
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Samsung Electronics Co Ltd
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Publication date
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Publication of TW409037B publication Critical patent/TW409037B/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J23/00Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00
    • B01J23/70Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of the iron group metals or copper
    • B01J23/76Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of the iron group metals or copper combined with metals, oxides or hydroxides provided for in groups B01J23/02 - B01J23/36
    • B01J23/78Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of the iron group metals or copper combined with metals, oxides or hydroxides provided for in groups B01J23/02 - B01J23/36 with alkali- or alkaline earth metals
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J23/00Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00
    • B01J23/70Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of the iron group metals or copper
    • B01J23/76Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of the iron group metals or copper combined with metals, oxides or hydroxides provided for in groups B01J23/02 - B01J23/36
    • B01J23/825Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of the iron group metals or copper combined with metals, oxides or hydroxides provided for in groups B01J23/02 - B01J23/36 with gallium, indium or thallium
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00Carbon; Compounds thereof
    • C01B32/05Preparation or purification of carbon not covered by groups C01B32/15, C01B32/20, C01B32/25, C01B32/30

Abstract

There is provided a cleanroom smock which is used in a cleanroom for preventing the processing objects from being contaminated or damaged due to the particles, the cleanroom smock comprising: a upper part forming the upper side of the cleanroom smock and covering the upper body; a lower part forming the lower side of the cleanroom smock and covering the lower body, wherein the upper part and the lower part are integrally formed; an air passage for flowing air connecting the upper part and the lower part inside the smock; and a discharge part for discharging the inner air with located on a certain side of the lower part.

Description

4〇9〇aT 五、發明説明(1 ) . 本發明有關於一種清淨室防塵服,更詳言之,係有關 於一種用以防止清淨室及產生於人體雜物之加工物件的污 染之清淨室防塵服。 近來’高純淨生產環境用以製造高科技產品之需求曰 益增加,以達到精蜂、清淨,及無菌之清淨室環境,且改 善產品品質。 此生產環境分為幾種類型,例如生物清淨室BCR(Bio Clean Room),用以防止生物污染,如藥物、食物、遺傳 工程等’及工業清淨室ICR(Industrial Clean Room),用以 防止於半導體裝置、電子、精密機器、新材質等之雜物所 造成的污染。 尤其係用於高科技工業之清淨室,例如半導趙裝置製 造程序,係將清淨空氣通過其上過濾器注入其内,以連續 移除雜質’且被注入空氣所形成之下層流將雜質導引至格 柵墊下側而將雜質釋出。 除此之外’如上所述’用於清淨室之物體,以及清淨 室本身,皆為重要元件,以保持清淨室環境之清淨。 用於清淨室之防塵服,如操作者之制服,可防止人體 上之雜質帶入清淨室中,藉以降低因雜質對物件造成之污 染及危害。 用於製造清淨室防塵服之材質需考慮穿著舒適、雜質 過濾效率、減少雜質產生等。一般清淨室防塵服製造係注 重防止人體上之雜質’且因此常忽略操作者之舒適性,而 選擇具有高雜質過遽效率及低雜質產生之材質。 -4- 本紙乐尺度这則’酬幻n (Tns ) Λ4規格(2!〇X297公楚) ~ —---— (請先聞讀背而-注意事項再填寫本頁)〇〇〇〇〇T 5. Description of the invention (1). The present invention relates to a clean room dustproof clothing, and more specifically, it relates to a cleanliness for preventing the clean room and the processing objects generated from human debris. Room dust suit. Recently, the demand for a high-purity production environment for manufacturing high-tech products has been increasing to achieve a bee, clean, and sterile clean room environment, and to improve product quality. This production environment is divided into several types, such as the BCR (Bio Clean Room) to prevent biological pollution, such as drugs, food, genetic engineering, etc., and the industrial clean room ICR (Industrial Clean Room) to prevent Pollution caused by sundries such as semiconductor devices, electronics, precision equipment, and new materials. It is especially used in the clean room of high-tech industry, such as the manufacturing process of the semiconducting Zhao device. The clean air is injected into it through the filter above it to continuously remove impurities', and the lower laminar flow formed by the injected air guides the impurities. Lead to the underside of the grille mat to release impurities. In addition, the objects used in the clean room, as described above, and the clean room itself are important components to keep the clean room environment clean. The dustproof clothing used in the clean room, such as the operator's uniform, can prevent impurities on the human body from being brought into the clean room, thereby reducing the pollution and hazards caused by the impurities to the objects. The materials used in the manufacture of clean room dust clothing need to consider wearing comfort, filtering efficiency of impurities, and reducing the generation of impurities. Generally, the manufacture of dust-proof clothing in clean rooms pays attention to the prevention of impurities on the human body, and therefore the operator's comfort is often neglected, and materials with high impurity efficiency and low impurity generation are selected. -4- This paper music scale this ‘reward n (Tns) Λ4 specification (2! 〇X297 公 楚) ~ ------ (please read the back first-notes before filling out this page)

11T ^! 經濟部中决標卑局負-χ消费合作社印焚 —_ ab] 五、發明説明(2 ) ~ 習用清淨室防塵服說明於第1圖。 該習用清淨室防塵服i〇包括一上部12以罩蓋腰部以 上之上半身’及一下部14以罩蓋腰部以下之下半身。 該上部12及下部14 一般係_體成型,且一腰帶構件 16如用以縮緊於操作者腰部上之彈性腰帶,懸掛於一普 通腰帶環18,其考慮操作者穿著舒適性及活動性。 除此之外,一開口部20形成於該上部12上,以使操 作者可谷易穿上該防塵服。該上部丨2之一頸線部22及一 腰線部24,及該下部14之一踝線部26係開放的,且該 頸線部22、腰線部24及踝線部26呈緊縮狀態以防止空 氣及雜質於操作期間帶入防塵室中。 該清淨室防塵服I 〇之形成材質係可防止空氣過濾通 過防塵服之内侧及外側,其藉選擇高密度之材質,且據 此’該防塵服内部之壓力係高於外部,此係為操作者之活 動性。 , 除此之外’該防塵服之上部12内部壓力係高於下部 14内’因該上部12及下部14係藉該腰帶構件i6(如彈性 腰帶)所分離,且藉更頻繁之活動該操作者之上半身維持 較下半身為高之壓力。 該防塵服内部之空氣藉該防塵服内部與外部之壓力 差’或該上部12與下部14内之壓力差,尤其通過該上部 12、頸線部22、腰線部24,或開口部20之拉鍊,及該防 塵服之開缝,而將相混合之雜質送出。 物件通常玫置於操作者之上側,且如上所述,其係置 本紙張尺度適W中國K家樣??((’NS ) Λ4規格(2i〇x297公楚> (諳先開讀背面之注意事項再填寫本頁)11T ^! In the Ministry of Economic Affairs, the final bid is negative-χ Consumer Cooperative Co., Ltd. —_ ab] V. Description of the invention (2) ~ The dustproof clothing of the conventional clean room is shown in Figure 1. The conventional clean room dustproof garment i0 includes an upper portion 12 to cover the upper half of the waist and an upper body 'and a lower portion 14 to cover the lower half of the lower body. The upper portion 12 and the lower portion 14 are generally formed in a single body, and a belt member 16 is suspended from a general belt ring 18, such as an elastic belt for tightening the operator's waist, which considers the operator's wearing comfort and mobility. In addition, an opening portion 20 is formed on the upper portion 12 so that the operator can easily put on the dustproof clothing. A neckline portion 22 and a waistline portion 24 of the upper portion 2 and an ankle line portion 26 of the lower portion 14 are open, and the neckline portion 22, waistline portion 24 and ankle line portion 26 are in a contracted state To prevent air and impurities from being brought into the dustproof room during operation. The clean room dustproof clothing I 〇 is formed to prevent air from passing through the inside and outside of the dustproof clothing. It chooses a high-density material based on this, and according to this, the pressure inside the dustproof clothing is higher than the outside, which is an operation. The activity of the person. In addition, 'the internal pressure of the upper part 12 of the dustproof clothing is higher than that of the lower part 14' because the upper part 12 and the lower part 14 are separated by the belt member i6 (such as an elastic belt), and the operation is performed by more frequent activities The upper body maintains pressure higher than the lower body. The air inside the dustproof clothing is based on the pressure difference between the inside and the outside of the dustproof clothing or the pressure difference between the upper portion 12 and the lower portion 14, especially through the upper portion 12, the neckline portion 22, the waistline portion 24, or the opening portion 20. The zipper, and the slit of the dustproof clothing, send out the mixed impurities. The object is usually placed on the upper side of the operator, and as mentioned above, its arrangement is suitable for the Chinese K family? ((’NS) Λ4 specification (2i0x297)> (谙 Please read the precautions on the back before filling in this page)

*1T — 40她7 Βτ五、發明説明(3 ) 恕浇部中央榡羋局兵二消於合作社印則衣 於雜質中,這些雜質將與空氣釋出,以致於物件受到雜質 較少之污染或危害。 . 1 除此之外’因該清淨室防塵服之内部壓力高於外部, 經常會產生靜電’且該清淨室防塵服被膨脹且會増加身體 與該防塵服外表面之間的摩擦。具有電極性之雜質暫時附 著於該防塵服上’如此導致物件之污染及危害。 本發明在於提供一種清淨室防塵服,可藉將由操作者 身體上所產生 < 雜質導引釋出,以防^加工物件受到污染 或危害,其可消除習知所產生之缺失及限制。 本發明之另一目的在提供一種清淨室防塵服,藉防止 該清淨室防塵服因壓力差而產生膨脹,及抑止因内部摩擦 產生之靜電,來防止具電極性之雜質對加工物件造成污染 或危害。 為說明達到本發明目的之優點之實施,—防塵服係供 於具向下空氣流之清淨室内工作之操作者所使用,該防 麈服(以下稱為清淨室防塵服)包括一形成該清淨室防塵服 下側且罩覆下身之下部;—形成該清淨室防塵服上側且罩 覆上身之上部,其中該上部及下部—體成型;—氣道,以 使流動之空氣於該防塵服内部連接該上部及下部;及一釋 出部’設置於該下部之特定侧上,以將該㈣空氣釋出。 該氣道係一固定一腰帶構件之腰帶環,該腰帶環呈 管狀’以連接該上部及下部之内部,且—插人管進—步裝 設於該腰帶環内且具―較長度及—特定形狀,以防止該 腰帶環内部折曲而使空氣停止流動。 (諳先閱讀背面θ注意事項再填寫本頁}* 1T — 40 her 7 Βτ V. Description of the invention (3) The central government bureau of the Ministry of Pouring and Dispelling is printed in the seal of the cooperative, and these impurities will be released with the air, so that the object will be less polluted by impurities. Or harm. 1 In addition to this, “the internal pressure of the clean room dustproof clothing is higher than the external pressure, which often generates static electricity” and the cleanroom dustproof clothing is inflated and increases friction between the body and the outer surface of the dustproof clothing. Impurities with an electrical polarity are temporarily attached to the dustproof clothing ', thus causing contamination and hazards of the object. The present invention is to provide a clean room dustproof clothing, which can be released by introducing < impurities generated on the body of an operator to prevent the processed objects from being contaminated or harmed, which can eliminate the lack and limitation caused by the knowledge. Another object of the present invention is to provide a clean room dustproof clothing, by preventing the cleanroom dustproof clothing from expanding due to the pressure difference, and suppressing the static electricity generated by internal friction, to prevent the impurities with electrode polarity from contaminating the processed objects or harm. In order to illustrate the implementation of the advantages of the present invention, the dustproof clothing is intended for use by operators working in clean rooms with downward airflow. The dustproof clothing (hereinafter referred to as cleanroom dustproof clothing) includes a cleanroom The lower side of the room dust suit covers the lower part of the lower body;-forming the upper side of the clean room dust suit and covers the upper part of the upper body, wherein the upper and lower parts are formed in one body;-air passages so that flowing air is connected inside the dust suit The upper and lower portions; and a release portion 'are provided on a specific side of the lower portion to release the radon air. The airway is a belt loop that fixes a belt member, the belt loop is tubular to connect the upper and lower interiors, and-inserted into the tube-is installed in the belt loop and has a-longer length and-specific Shape to prevent the inside of the belt loop from bending and stop the flow of air. (谙 Read the θ notes on the back before filling in this page)

A7 B7 4〇a〇»7 且 五、發明説明(4 ) 同時’該釋出«設於人體膝蓋及㈣之間處, 缝設有-過魏,以防止雜質跑出該清淨室防塵料’ 吾人應知前述概略說明及以下詳細說明係作為舉例並 解釋且提供本發明申請專利範圍進一步解釋。 ]亚 於圖式中: 第1圖顯示一種習用清淨室防塵服; 第2圖顯示本發明一較佳實施例之清淨室防塵服. 第3圖係第2圖中所示於防塵服之腰部上所钟 道之剖視圖;及 氣 第4圖顯示第2圖中防塵服一側上之釋出部分的放大 圊。 (請先閱-讀背面之注^Ι|Κ項再填寫本頁) 經滴部中"'標枣局兵-'消费合作、社印^ 習知元件標號如下: 10.. .習用清淨室防塵服 14.. .下部 18.. .腰帶環 20.. .開口部 24.. .腰線部 本發明元件標號如下: 30.. .清淨室防塵服 34.. .下部 38.. .氣道 42.. .插管 茲將本發明配合圖式詳 較佳實施例。 12·..上部 W...腰帶構件 22…頸線部 26…踝線部 32…上部 36…腰帶構件 4〇…皮帶環 44…釋出部 細說明於後,其顯示本發明 之A7 B7 4〇a〇 »7 and V. Description of the invention (4) At the same time, 'The release« is placed between the knee and the cymbal of the human body, and the -over-wei is sewn to prevent impurities from running out of the clean room dust material' I should know that the foregoing brief description and the following detailed description are examples and explanations, and provide further explanation of the scope of patent application of the present invention. ] In the drawings: Figure 1 shows a conventional clean room dustproof clothing; Figure 2 shows a clean room dustproof clothing of a preferred embodiment of the present invention. Figure 3 shows the waist of the dustproof clothing shown in Figure 2 A cross-sectional view of the bell tower of the upper house; and Figure 4 shows an enlarged part of the release portion on the side of the dustproof clothing in Figure 2. (Please read-read the note on the back ^ Ι | Κ before filling out this page) In the drop-down section " 'standard jujube bureau-'consumer cooperation, social printing ^ Known components are labeled as follows: 10 ... Room dustproof clothing 14 .. Lower part 18. Belt belt loop 20. Opening 24. Waistline part The components of the present invention are numbered as follows: 30. Clean room dustproof clothing 34 .. Lower part 38 .. Airway 42. The intubation is described in detail with reference to the preferred embodiments of the present invention in conjunction with the drawings. 12 ... upper part ... belt member 22 ... neckline section 26 ... ankle line section 32 ... upper section 36 ... belt member 40 ... belt loop 44 ... release section will be described in detail later, which shows the invention

*1T 本紙張尺度通川中國囤家掠_中((’NS ) Λ4規格(210X297公釐) 經濟部中决標準局負工消汾合作社印鬏 4090^u A7 __^___B7 五、發明説明(5 _) 第2,3及4圖分別表示本發明一較佳實施例之清淨 室防,服之前視,剖視及側視圖,且與習用相同之元件不 再詳細說明。 本發明之清淨室防塵服30,如第2圖所示,包括一用 以罩覆腰部以上之上半身的上部32’及—用以罩覆腰部 以下之下半身的下部34,其中該上部32及下部34係一 體成型。- 除此之外’該清淨室防塵服30包括一腰帶構件36, 例如緊壓該防塵服之腰部之彈性腰帶,以增加活動性及舒 適感,以及至少一氣道38,以容許空氣流於上部32與下 部34之間於該腰帶構件36中間。 數個氣道38係沿著人體腰部,藉成形一皮帶環4〇以 固定該腰帶構件36,且該皮帶環40呈管狀,以容許空氣 通過該上部32内部與該下部34内部之間。 除此之外,如上所述,一插管42具有特定長度及特 定形狀,且裝設於該皮帶環40内部,以防止操作者活動 時折曲。 同時,如第4圖所示,广釋出部44裝設於該下部34 上,以容許空氣藉壓力自該上部32及下部34内側釋出。 該釋出部44附著有一濾紙,以過濾混有雜質之空 氣,且防止雜質進入。 除此之外’該釋出部44係自該下部34之下緣向上設 置約1〇〇至120mm’以防止折曲,亦即,其係放置於腳 踝上方,且成形以罩覆腳踝。 本錄尺度剌+ $ KI ^:财.(>NS ) Λ4規格(21DX297公楚)、 (請先閱讀背面之注意事項再填寫本頁) 訂 -Ί. Α7 Β7 五、發明説明(6 ) ' 除此之外,該釋出部44之濾紙寬度約為35至 45mm ’且該遽紙之材質必須減少產生雜質,肖止靜電產 生,且過濾通過清淨室防塵服之空氣。 同時,該釋出部44係藉該下部34特定部分切割形成 一具特定尺寸之孔,且該過渡紙覆蓋於該切割部上。 當操作者穿著該清淨室防塵服3〇時,該清淨室防塵 服30之内部壓力係較外部為高。 該清淨室防塵服30之上部内側之壓力係高於下部内 側,且該上部32内之空氣經由該氣道38移至該下部 34,而具有自人體產生之雜質,以致於該上部32及下部 34内侧之壓力保持相等。 除此之外,該下部34之壓力高於該清淨室防塵服3〇 外侧,且内部空氣係經由形成於該下部34特定部位上之 該釋出部44被釋出,以致於可保持該清淨室防塵服之内 側及外侧壓力相等。 • 同時,該釋出部44包括-過滤紙以過遽出雜質,且 因活動而自人體產生之一些雜質可藉該過遽紙過滤。一些 雜質藉空氣被釋出,且藉由於該清淨室内侧下游空氣流過 形成於該清淨室下側上之格柵墊,而釋出於該清淨室外。 因此,該清淨室防塵服内部壓力幾乎與外部相等,且 雜質不會通過縫邊,並且靜電可因減少膨脹而降低。 因此,根據本發明,該清淨室防塵服内部之空氣係通 過該氣道及形成於該下部上釋出部釋出,且該清淨室防塵 服内部之雜質可防止跑出,藉以防止雜質對物件之 I------- 本紙浓尺度进用中國1¾家標卑(C,NS ) Λ4現格(2】〇χ297公釐) f請先Ki.讀背面-vii意事項再填寫本頁} 丁* 1T This paper is scaled by Tongchuan China Storehouse_China (('NS) Λ4 size (210X297 mm), Ministry of Economic Affairs, China Standards and Standards Bureau, Consumer Works Cooperative, Fen Cooperative, India 4090 ^ u A7 __ ^ ___ B7 V. Description of the invention ( 5 _) Figures 2, 3 and 4 show the clean room defense of a preferred embodiment of the present invention, taken from the front, cross-section, and side views, and the same elements as conventional ones will not be described in detail. The clean room of the present invention The dustproof clothing 30, as shown in FIG. 2, includes an upper portion 32 'for covering the upper body above the waist and a lower portion 34 for covering the lower body below the waist, wherein the upper portion 32 and the lower portion 34 are integrally formed. -In addition to this, the clean room dustproof clothing 30 includes a belt member 36, such as an elastic waistband that presses the waist of the dustproof clothing to increase mobility and comfort, and at least one air duct 38 to allow air to flow above Between the 32 and the lower portion 34 is in the middle of the belt member 36. A plurality of air channels 38 are formed along the waist of the human body by forming a belt loop 40 to fix the belt member 36, and the belt loop 40 is tubular to allow air to pass through the belt Between the inside of the upper portion 32 and the inside of the lower portion 34 In addition, as described above, a cannula 42 has a specific length and a specific shape, and is installed inside the belt loop 40 to prevent the operator from flexing when moving. At the same time, as shown in FIG. 4, the wide release The outlet portion 44 is installed on the lower portion 34 to allow air to be released from the inside of the upper portion 32 and the lower portion 34 by pressure. The release portion 44 is attached with a filter paper to filter the air mixed with impurities and prevent the impurities from entering. In addition, 'the release portion 44 is set from about 100 to 120 mm upward from the lower edge of the lower portion 34' to prevent bending, that is, it is placed above the ankle and is shaped to cover the ankle. Scale 剌 + $ KI ^: Choi. (≫ NS) Λ4 specification (21DX297), (Please read the precautions on the back before filling this page) Order-Ί. Α7 Β7 V. Description of the invention (6) 'Except In addition, the width of the filter paper of the release portion 44 is about 35 to 45 mm ', and the material of the paper must reduce the generation of impurities, stop the generation of static electricity, and filter the air passing through the dustproof clothing in the clean room. At the same time, the release portion 44 is formed by cutting a specific portion of the lower portion 34 into a hole of a specific size, and The transition paper covers the cutting part. When the operator wears the clean room dustproof clothing 30, the internal pressure of the clean room dustproof clothing 30 is higher than the outside. The pressure on the inner side of the upper part of the cleanroom dustproof clothing 30 is high. Inside the lower part, and the air in the upper part 32 moves to the lower part 34 through the air passage 38, and has impurities generated from the human body, so that the pressure inside the upper part 32 and the lower part 34 remains equal. In addition, the lower part The pressure of 34 is higher than the outside of the clean room dustproof clothing 30, and the internal air is released through the release portion 44 formed on a specific part of the lower portion 34, so that the inside and outside of the clean room dustproof clothing can be maintained The pressure is equal. • At the same time, the release portion 44 includes a filter paper to filter out impurities, and some impurities generated from the human body due to activities can be filtered by the filter paper. Some impurities are released by the air, and are released from the clean room by the downstream air flowing from the clean room side through the grill mat formed on the lower side of the clean room. Therefore, the internal pressure of the clean room dustproof clothing is almost equal to the external pressure, and impurities do not pass through the seam, and static electricity can be reduced by reducing expansion. Therefore, according to the present invention, the air inside the clean room dustproof clothing is released through the air duct and the release portion formed on the lower part, and the impurities inside the cleanroom dustproof clothing can be prevented from running out, thereby preventing the impurities from affecting the objects. I ------- This paper has been used in China. 1¾ Chinese standard (C, NS) Λ4 is present (2) 0 × 297 mm. F Please read Ki. Read the notice on the back-vii and then fill out this page} Ding

• i I I If A7 B7 409037 五、發明説明(7 ) 危害。 除此之外’因該清淨室防塵服之壓力所造成的膨脹及 靜電亦可防止’以致於可防止具電極性之雜質的干擾,且 可防止雜質對物件之污染及危害。 其他優點及修飾由熟悉此技藝人士將可達成。因此, 本發明之範疇並不侷限於在此所述之細節及對應裝置。據 此’其應涵蓋不脫離本發明精神或範圍所作之變更修飾及 等效變化》 IT. - - Hr - - I - - - -- J."I I (請先閱讀背面之注意事項再填寫本頁} 丁 經濟部中央標本局只工消f告作社印製 0· 本紙張尺度適用中國K象標彳((,NS ) Λ4規格(2IOX297公爱)• i I I If A7 B7 409037 V. Description of the invention (7) Harm. In addition, 'the expansion and static electricity caused by the pressure of the clean room dustproof clothing can also be prevented', so as to prevent the interference of polar impurities and the pollution and harm of objects by the impurities. Other advantages and modifications will be achieved by those skilled in the art. Therefore, the scope of the present invention is not limited to the details and corresponding devices described herein. According to this 'it should cover changes and modifications and equivalent changes without departing from the spirit or scope of the present invention' IT.--Hr--I----J. " II (Please read the precautions on the back before filling This page} Ding Central Bureau of Herbarium, Ministry of Economic Affairs, only printed by Gaozuoshe 0 · This paper size is applicable to the Chinese K icon (彳, (NS) Λ4 specification (2IOX297 public love)

Claims (1)

mm A8 B8 C8 D8 申請專利範圍 經濟部中央標隼局員工消費合作社印製 L —種可供在一具下游空氣流之清淨室工作的操作者使 用之清淨室防塵服,包括: 上部’其形成該清淨室防塵服之上側且罩覆上身; 下部’其形成該清淨室防塵服之下側且罩覆下身, 其中該上部及下部一體成型; —氣道,以使流動之空氣於該防塵服内部連接該上部 及下部;及 ~釋出部’設置於該下部之特定側上,以將該内部空 氣釋出。 2·如申請專利範圍第1項之清淨室防塵服,其中該氣道 係一固定一腰帶構件之腰帶環,該腰帶環呈管狀,以 連接該上部及下部之内部。 3.如申請專利範圍第2項之清淨室防塵服,其中一插入 管裝設於該腰帶環内且具一特定長度及一特定形狀。 4_如申請專利範圍第1項之清淨室防塵服,其中該釋出 部裝設於人體膝蓋及腳踝之間處c 5·如申請專利範圍第4項之清淨室防塵服,其中該釋出 部形成自該下部之下緣邊向上1〇〇至l2〇mm。 6.如申請專利範圍第5項之清淨室防塵服,其中該釋出 部具有一過濾紙,以防止雜質跑出該清淨室防塵服 外。 7,如申請專利範圍第6項之清淨室防塵服’其中該過濾 紙附著於該釋出部上,而具一特定寬度以覆蓋操作者 之腳踝。 請 先 Μ #? 之 注 意 事 項 再 智 訂 11- 本紙張从適用中關家標準(CNS )从胁(2iQx297公羡) ABCD 4090.»? ..4 心、. 六、申請專利範圍 8.如申請專利範圍第6項之清淨室防塵服,其中該過濾 紙附著於該釋出部上,以覆蓋一形成於該下部特定部 上之孔。 ^—^1 —ϋ p. I* 3 、v5 (請先"•讀背反之注意事項再填寫本頁) 經濟部t央標準局員工消費合作社印製 -12- 本紙滚尺度適用中國國家標準(CNS) A4規格(210X297公釐)mm A8 B8 C8 D8 Patent Application Scope Printed by the Consumers 'Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs — A cleanroom dustproof clothing for operators working in a cleanroom with downstream airflow, including: Upper' its formation The upper side of the clean room dust suit covers the upper body; the lower part, which forms the lower side of the clean room dust suit and covers the lower body, wherein the upper and lower parts are integrally formed;-an air passage so that the flowing air is inside the dust suit The upper and lower portions are connected; and ~ a release portion 'is provided on a specific side of the lower portion to release the internal air. 2. The clean room dustproof clothing according to item 1 of the patent application scope, wherein the airway is a belt loop fixed with a belt member, and the belt loop is tubular to connect the upper and lower interiors. 3. For the clean room dustproof clothing according to item 2 of the scope of patent application, an insertion tube is installed in the belt loop and has a specific length and a specific shape. 4_ If the clean room dustproof clothing of item 1 of the patent application scope, where the release part is installed between the human knee and ankle c 5 · If the cleanroom dustproof clothing item of the patent application area 4, the release The portion is formed from 100 to 120 mm upward from the lower edge of the lower portion. 6. The clean room dustproof clothing according to item 5 of the patent application scope, wherein the release portion has a filter paper to prevent impurities from running out of the cleanroom dustproof clothing. 7. The clean room dustproof clothing according to item 6 of the patent application, wherein the filter paper is attached to the release portion and has a specific width to cover the ankle of the operator. Please take note of the M #? Before ordering 11- This paper is from the application of the Zhongguan Family Standard (CNS) from the threat (2iQx297 public envy) ABCD 4090. »? .. 4 Heart,. Six, the scope of patent application 8. Such as The dustproof clothing of clean room in the scope of application for patent No. 6 wherein the filter paper is attached to the release portion to cover a hole formed in the lower specific portion. ^ — ^ 1 —ϋ p. I * 3, v5 (please read " • Read the reverse notes before filling out this page) Printed by the Consumers' Cooperatives of the Central Bureau of Standards of the Ministry of Economic Affairs -12- The rolling standards of this paper apply Chinese national standards (CNS) A4 size (210X297 mm)
TW087112575A 1997-12-11 1998-07-30 Smock for cleanroom TW409037B (en)

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KR1019970067719A KR100251294B1 (en) 1997-12-11 1997-12-11 Preparation of carbon microfiber by using transition metal particle supported on alkaline earth metal oxide

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US7572427B2 (en) 2001-07-03 2009-08-11 Facultes Universitaires Notre-Dame De La Paix Catalyst supports and carbon nanotubes produced thereon
KR100407805B1 (en) * 2001-07-20 2003-11-28 재단법인 포항산업과학연구원 Metal catalysts for production of carbon nano fiber/nano tube and preparation method of the same
KR100763226B1 (en) * 2006-02-17 2007-10-04 삼성전자주식회사 Photocatalyst materials manufacturing method of transition metal ion added and 10? mean particle diameter sized metal oxide having semiconductor characteristic, material manufactured thereby, and filter, fan filter unit and clean room system having the same material
US8038908B2 (en) * 2007-11-30 2011-10-18 Toray Industries, Inc. Carbon nanotube assembly and process for producing the same
KR100991012B1 (en) 2008-07-14 2010-10-29 한국화학연구원 Catalyst for synthesizing filamentous carbons at low temperature and preparation methods thereof
KR101007184B1 (en) * 2008-10-17 2011-01-12 제일모직주식회사 Supported Catalyst for Synthesizing Carbon Nanotubes, Method for Preparing thereof and Carbon Nanotube Using the Same
KR101380619B1 (en) * 2010-12-30 2014-04-11 제일모직주식회사 Supported Catalyst for Synthesizing Carbon Nanotubes and Method for Preparing thereof
CN114904542A (en) * 2022-04-25 2022-08-16 中国科学院青岛生物能源与过程研究所 Composite catalyst for catalyzing and degrading polyester/polycarbonate plastics and preparation method and application thereof

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