TW400431B - Intracavity laser spectroscopy for detection of gas contaminants - Google Patents

Abstract

A gas detection system (10) for detecting the presence of gaseous species in a gas sample containing corrosive gas using a method for detecting the presence of gaseous species in a gas sample containing corrosive gas, the method comprising the steps of: (a) selecting a spectral region wherein (i) said gaseous species has at least one absorption feature and (ii) said corrosive gas has essentially no interfering absorption features; (b) providing a laser (500) comprising a laser cavity (5) and a gain medium (507) which resides therein, said gain medium (507) outputting light having a wavelength distribution at least a portion of which is in said selected spectral region; (c) providing a gas sample cell (406) having windows (404, 405) which are transparent to light in said selected spectral region such that a beam of light can pass through said gas sample cell (406); (d) inserting said gas sample cell (406) in said laser (500) such that light output from said gain medium (507) passes through said gas sample prior to exiting said laser cavity (5); (e) inserting said gas sample containing said corrosive gas in said gas sample cell (406) such that light output from said gain medium (507) passes through said gas sample, said gas sample sealed within said gas sample cell (406) such that said corrosive gas does not react with said laser (500); and (f) directing said light output from said gain medium (507) after exiting said laser cavity (5) to a detector assembly (700) for determining the presence and/or concentration of said gaseous species in said gas sample; said system (10) comprising: (a) said laser cavity (5); (b) said gain medium (507) which resides therein, said gain medium (507) outputting light having a wavelength distribution at least a portion of which is in said spectral region; (c) said gas sample cell (406) which is contained in said laser (500); (d) conduits (408, 409) for inserting said gas sample containing said corrosive gas in said gas sample cell (406); and (e) said detector assembly (700) for determining the presence and/or concentration of said gaseous species in said gas sample, said light output from said laser (500) being directed to said detector assembly (700).

Description

V. Description of the invention (A7, B7, your ancient book, Mao, Daguang, Guangxi, there are detections of impurities in gas, more specifically, gaseous molecules, atoms, free circles-LS) for laser detection of radon and / or ions When high sensitivity is used for high-quality semiconductor materials in the microelectronics health industry (eg, Shi Xi thin film), it is well known that impurities must be controlled. Inadequate impurity control, as is well known and known, can lead to important results as the final products typically cannot be used for their intended purpose. Generally, in the production process of the Shixi film, the starting material essentially contains a gas, which can be bulky (for example, hydrogen or argon), and a specialtyr (for example, hydrogen chloride, evolutionary hydrogen, ...) is designed «The successful operation of the production equipment for the Radiation Guide Material is completely dependent on the purity of the starting gas and the gas processing ability to maintain the purity of the gas during the transmission of the gas to the process and the material processing. The purity of the starting gas Appropriate control (ie, 'monitoring and prevention of high levels of impurities that may be contained in such gases) is necessary. Knife atoms, free radicals, and ionic species appear in the preparation of semiconductor materials (eg, chemical Vapor deposition or cvd〃) and the bulky and special gases used in processing (doping and etching), they will be regarded as "contaminants'. These impurities will make the manufactured The first step in controlling and / or eliminating these impurities is the degradation of the quality of semiconductor materials or the efficiency of the preparation of semiconductor materials. Home Standard (CNS) A4 (210x297 mm) Read the precautions on the back before filling out this page) 丨 0 Pack-'1— Order r ------ i — Shellfish Consumption of the Central Standards Bureau of the Ministry of Economic Affairs Printed by the cooperative -4 Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs A7 ~~~ ____ _._ B7 V. Description of the Invention (2) — Detect these impurities in the bulky and special radon gas used as the starting material. Although this is generally recognized, the methods implemented so far are generally inappropriate. This is mainly due to the situation caused by the continuous increase in superficially developed competitive industry standards. In particular, with the The size of the electronic device is reduced and the performance specifications are strengthened, and the gas and purity requirements (ie, the absence of micro-impurities) are improved. In the context of this, it will be clear that several measurement benchmarks are related to the detection effectiveness. Important: (1) Absolute detection sensitivity is usually described as the total number of gas molecules in the sample (that is, the number of impurity molecules or parts per million of 0 + 6 background molecules); (2) species Selectivity or measurement The ability to measure concentrations in the presence of another species; (3) the ability to obtain a desired signal-to-noise ratio measurement speed; (4) the ability to monitor impurities in non-reactive and reactive gases, and (5) capable of Linearity and dynamic range of the measured gas concentration. Current conventional devices for impurity detection (eg, water) include a variety of measurement techniques. For example, current conventional devices for water vapor detection use V electrical and electrochemical Science, direct absorption spectroscopy, and atmospheric pressure are ionizing mass spectrometry (APIMS) techniques. However, none of these methods can properly provide these needs. In particular, direct absorption spectroscopy is usually performed by passing light from external sources through The passage and measurement of the sample are related to the reduction in light intensity caused by the absorption of molecules, atoms, free radicals, and / or ions in the sample. The detection sensitivity is mainly determined by the subtraction of two large numbers (the light intensity from an external source before passing the sample and the original paper size after leaving the sample are applicable to the Chinese National Standard (CNS) A4 specification (· 210 × 297 (Mm) (Please read the notes on the back before filling in this page) Order Λ Printed by Shellfish Consumer Cooperative, Central Standards Bureau, Ministry of Economic Affairs, A7 ^ ----- B7 V. Description of Invention (3)-Strength). Delays limit detection sensitivity to the point that direct absorption systems are often considered low sensitivity methodologies.

I In the context of the present invention, laser spectroscopy, especially intracavity laser radiofrequency 4 (ILS), is disclosed as a detector used to detect gas species (impurities) at very high sensitivity levels ( Sensors) ^ Regarding this application, laser spectroscopy offers significant advantages over conventional methods, especially water vapor detection, and gas type (impurity) detection. In the conventional application of lasers as the detection of gas species (impurities), a laser-generated wheel ray system is used to excite a gas sample outside the laser, which can generate a second signal (eg, ionization or fluorescence Or, the intensity of the laser after it has passed through a gas sample, normalized to its initial intensity 'can be measured (ie, absorbed). About-ten years ago, another detection methodology, intracavity laser spectroscopy, was For the first time, the laser itself was used as a detector, see, for example, 59 Journal Of Chemical Physics, published by G. Atkinson, A. Laufer, M. Kurylo on July 1, 1973 Detection of Free Radicals by an Intracavity Dye Laser

Technique " —text. Intracavity laser spectroscopy (ILS) combines conventional absorption spectroscopy with high detection sensitivity that is often associated with other laser technologies like laser-induced fluorescence (LIF) and multi-photon ionization (MPI) spectroscopy The advantages. ILS is based on the intra-cavity loss found in a multimode, homogeneously widened laser cavity of an optical resonator that is associated with absorption in a gas species (eg, 'atoms, molecules, free radicals, or ions). These absorption losses in the cavity are in accordance with the Chinese National Standard (CNS) Λ4 specification (210 × 297 mm) at the size of this paper. (Please read the notes on the back before filling in this page) Order-6- A7 __ B7 V. Description of the invention (4) ^ ~~-The gain generated in the radiation device (ie, the gain medium), Mode lasers compete with normal mode dynamics. Typically, research systems are dominated by the use of dye lasers because their multi-mode characteristics meet the conditions required for effective mode competition and their wide adjustable spectrum provides access to the spectrum of many different gas species. Some ILS experiments have been performed on multi-mode, adjustable error solid-state f-radiation devices, such as color_heart and titanium: sapphire; £ «> * D. Gilmore, P Cvijin, G. Atkinson ^ Optics C〇 As proposed in mmunications 77 (199〇) 385_89, intracavity Absorption Spectroscopy With a Titanium: Sapphire Laser. ILS has also been successfully used to detect stable and known species under experimental conditions. Among them, the requirement for tritium detection sensitivity has excluded absorption spectrum as a preferred method. For example, ILS has been used to detect gas samples in environmental tests such as cryogenic cooling chambers, plasma discharge, photolysis and pyrolysis reduction, and ultrasonic jet infiltration. 11 ^ has been used to obtain quantitative absorption information (eg, line strength and collision widening coefficient) through analysis of the shape of the absorption line. Some of these are described by G. Atkinson in SPIE Conf ·, Soc. Opt. Eng. Proposed in 1637 (1992), 'Intracavity Laser Spectroscopy', however, 'the conventional method of performing ILS, although suitable for use in a laboratory environment', is unacceptable in a commercial environment. The constraints of business facts' are as concisely recorded as above, essentially this kind of detector is conveniently sized, relatively cheap, and reliable. The experimental model cannot meet these requirements at all. This paper size applies to China National Standard (CNS) Λ4 specification (210X297 mm) --------- oil— (Please read the precautions on the back before filling this page) Order

J Economy, which printed by the Central Standards Bureau Shellfish Consumer Cooperative: HM 心心 飘 Γ —...... -7- Printed by the Central Standards Bureau of the Ministry of Economy—Industrial Consumer Cooperatives A7 __B7 V. Description of Invention (5) In addition, in commercial environments where ILS testing can be applied, the gas sample will be contained in a non-ideal environment. In particular, in the case of the industrial production method, the gas sample is usually contained in a corrosive gas. For example, in the manufacture of semiconductor components, the ability to detect the presence of impurities (like water vapor) in the presence of corrosive gases (like hydrogen gas) can be particularly useful. The feasibility of using the ILS technology with Cf: YAG laser to detect small amounts of water vapor in a nitrogen-protected atmosphere is described in D. Gi] m We, P. Cvijin, G. Atkinson in Optics Communicatións Introcavity Laser Spectr〇sc〇py proposed in 1〇3 (i993) 370-74

1-38-1.55 Spectral Region Using a Multimode Cr4 +: YAG Laser ', inside. The experimental device used is based on the proof of the computing characteristics, but for commercial implementation as considered by the present invention =, for example, for the detection of water vapor in corrosive gases such as hydrogen chloride (HC1), then not ideal. According to the various features of the present invention, the present invention provides a user who has the advantages of the absorption technology but has a dramatic increase in detection sensitivity. That is, it is quite simple, and the detection system can be commercially implemented. The cost of detection is to detect the types of gases in reactive and non-reactive samples, especially in pure samples. In this regard, the present invention provides a method and apparatus for the long-term sensitivity detection of impurities in reactive and non-reactive samples, particularly in the case of corrupted gas systems in commercial environments. According to the present invention, a paper ruler for detecting gas samples in a gas sample A money rule _ house standard (CNS) M specification (21 {) χ_ϋ ^ ~ · ~~~--8-(Please read first Note on the back again • Fill out this page} -3 -----------------, I __ V. Description of invention (6) A7 B7 Off-line consumption by the Central Standards Bureau of the Ministry of Economic Affairs Co-operative printed gas detection lines are provided. The detection system includes: (a) a laser cavity;; (b) an ion-doped crystal; outer neighbors: a pumped laser, the pumped laser The emitter is positioned at the output end of the laser cavity Dream II, which has an optically excited crystal of the doped ion, which in turn produces an output beam leaving the laser cavity; and exposes the container system. Used to contain the gas in the laser cavity, 'before leaving the laser cavity, the output beam of the ion-doped crystal passes through the gas sample. -A method for the appearance of gas species in a gas sample is provided. The method includes the following steps: ⑷ Select a spectral range 'where (0 gas species has at least Absorptive characteristics and sacrificial pure gases have no absorptive characteristics; 本 Provides a laser, which includes a laser cavity and a gain medium located in it, the output of the gain medium has a wavelength distribution chirp At least a part of the wavelength distribution is within the selected spectral range; (C) Provide-a gas sample tank having a transparent window for a button in the selected spectral range so that A beam of light can pass through the gas sample tank; (d) insert the gas sample tank into the laser so that the output light from the gain medium passes through the gas sample before leaving the laser cavity; (e) A gas sample containing a corrosive gas is inserted into the gas sample tank so that the output light from the S-increasing medium passes through the gas sample. The size of this paper applies to the Chinese National Standard (CNS) A4 specification (2 丨 0X297 mm) ( Please read the precautions on the back # -Fill this page first) ~ Γτ Equipment 丨 ------ Order ------ 1 ^ .-------m —I fmm · -9-

Printed by Shellfish Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 5. Description of the invention (7) The gas sample is sealed in the gas sample tank so that the corrosive gas does not react with the laser; and I · '(f) is leaving the After the laser cavity, the output beam of the gain medium is directed to a detector assembly to determine the appearance and / or concentration of the type of gas in the gas sample. The ILS gas detection system of the present invention preferably includes a pumping laser used to provide the optical excitation required for operating the ILS laser, and a multi-mode ILS laser operating in the wavelength range. An interesting kind of absorption, a gas sample tank, which is placed in the optical resonator cavity of the ILS laser, which can contain corrosive gases and can be used to split the spectrum of the wheel of the ILS laser. A wavelength dispersion spectrometer, a detector capable of measuring the intensity of the decomposed wavelength output by the ILS laser, and an electronic circuit that can read the signal from the detector and convert it into a signal that can be processed by a computer. Electronic signal. The ILS gas detection system may also include a chopping, pulse modulation, or modulation assembly designed to periodically interrupt the intensity of the pumping laser beam and the output from the ILS laser. According to various features of the present invention, impurities are optically detected by using ILS technology at a concentration of i billion parts per billion (ppb) and extending to a concentration of less than a hundred parts per billion (ppt). . In corrosive gases, concentrations at j million knife rate (ppm) and extending to a level below 1 ppb can be detected. For the detection of water vapor in HC1, an ion-doped crystal device and a solid-state laser operating in the 1300nm to 150nm spectral range are best used as detectors. Contains gaseous impurities (for example, this paper size applies Chinese National Standard (CNS) A4 specification (210X297 mm) < .Please read the precautions on the back before filling in this page) I. ~ 7 丨 IT _----- ------ -10- V. Description of the invention (8) A7 B7 Printed by the Shellfish Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs, water vapor) and corrosive gases (for example, HC1) gas samples are placed The collector's optical resonator cavity is inside (between the reflective surface or the mirror) and on the 'active device' side. A laser device having Cr4 +: YAG & Cr4 +: LuAG is described here, but other gain media like other ion-doped crystals with multiple longitudinal and lateral cavity modes can also be used. Other laser systems can also be used. For example, a solid-state laser with a pump diode laser, one of an ion-doped crystal device, can be optically configured to provide ILS detection. Preferred exemplary embodiments of the present invention will be described below with reference to the drawings, in which the same reference numerals denote the same elements. Unless otherwise noted, the drawings referred to in this description should be understood not to scale. S Figures 1A and 1B are schematic block diagrams of the impurity detector system of the present invention; Figure 1A shows the basic configuration, and Figure 1B shows the structure implemented in the exemplary embodiment shown in Figure 2 Figure 2, Figure 3 is a more detailed schematic perspective view of the model of the impurity detector system of the present invention; Figures 3 A to 3C include a simple laser fan recognition _ Tumen J Yu ~ set by It is not intended and the accompanying graphical spectrum wheel obtained from these devices; Figure 4 is a schematic perspective view of the ils room including the components of the room riding in Figure 2. Some components seem to be partially removed. Is shown; Figure 5 is a perspective view of a model ILS laser crystal holder and scattered dual heat gains useful in the impurity detector system shown in Figure · Figure 6 is a plant of a beam forming device ^ < Enlarged three-dimensional view of the extreme example {7; equipment-TI (please read the French and Italian matters on the back to fill out this page first), 17 'y This paper size applies Chinese national standard 4 *. (Liyang) eight 4 Specifications (210 \ 297 Gongchu A7 A7 V. Description of the invention (9) Consumers' Cooperatives, Central Standards Bureau, Ministry of Economic Affairs System B7 'This device includes a chopper element that can be advantageously used in the impurity detector system shown in Figure 2; Figure 7 depicts a typical water absorption spectrum shown in the gaseous and ^^ 丨 gas Graphs at a wavelength of 1433-1440 ¾ microns; Figure 8 depicts a graph showing the absorption of ILS water in N2 and HC1 gas at a wavelength of 1420-1434 nanometers; Figure 9 depicts a graph showing expansion by osmotic tube / volume A graph of water absorption intensity versus water concentration as measured by technology; and Figure 10 depicts a graph showing water absorption intensity versus water concentration in the range of 1420-1430 nm as measured by an in-line purifier. Reference will now be made in detail to the present invention Specific embodiment of the present invention, which depicts the best mode currently considered by the inventors for the implementation of the present invention. Other embodiments are also briefly described as appropriate. As mentioned earlier, the subject matter of the present invention is particularly suitable for use in semiconductors. The manufacture of components, and therefore, the preferred exemplary embodiment of the present invention will be described in connection with the manufacture of semiconductor components. However, Feng would like to confirm that the description does not It is intended to limit the use or applicability of the present invention, and merely describes a more fortunate exemplary embodiment of the present invention. In this regard, the present invention is particularly suitable for the detection of impurities. The impurities used herein refer to the possibility of Molecules, atoms, free radicals, and ionic species that appear in gaseous materials, like the gaseous materials used in the manufacture of second films, that is, oil absorption lines. Alternatively, the term impurity can also refer to the gaseous material itself. 'For example, when the detector system of the present invention is used to determine whether the e-path (for example, HC1 official road) has sufficiently excluded gaseous materials, the paper size applies the Chinese National Standard (CNS) A4 specification (210 ^ 75 ^ 7 "Please read the notes on the back before completing this page)

-12- V. Description of the invention (10) A7 B7 Member of the Central Standards Bureau of the Ministry of Economic Affairs, Consumer Cooperation, printed ri [_Mk · —ΊΜ, -—- According to a preferred embodiment of the present invention and shown in Figure 1A A gas (impurity) detection system 10 suitably includes a pumping laser system A, an ILS laser and associated chamber B, a spectrometer c, and a detector and associated electronics (eg, computer, digital electronics) Study, etc.) D. More specifically, referring also to Figures 1B and 2, the pumping laser system 8 suitably includes a pumping laser 100, a beam-shaping optical assembly 2000, and a beam modulation assembly 300, The laser and chamber B suitably contain a chamber 400 and an ils laser 5000; the spectrometer C suitably contains a photodetector assembly 600; and the detector D appropriately Contains-detector assembly and-computer system 8⑼. As will be described more fully herein, the 'gas detection system 1G advantageously detects the kind of gas (impurity) contained in the -gas sample. In general, the pumping laser system A pumps the ILS laser, preferably at or near a critical level, so that the laser beam passes through the gas sample, thereby causing the spectrum of the gas sample to be obtained. This spectrum is properly detected through the detector / computer system. 'The detector / computer system', during operation, causes the presence and concentration of gas that may be contained in the gas sample to exceed the type (impurity). Reliable and accurate measurement at high sensitivity levels. Please also refer to the figure below. In order to more fully explain the scientific principle used in the second embodiment of the present invention, the general principle of intracavity laser spectroscopy is shown as an example. As is well known, in the simplest terms, a laser can be described as containing a gain medium, a shirt :: learning gain system is generated, and a resonator is composed of several pieces. Optical loss can occur in the laser cavity (such as single school (please read the precautions on the back before filling in this page)

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(Resonator printed by the Shellfish Consumer Cooperative of the Central Bureau of Guidance, Ministry of Economic Affairs) in optical components and gain media. Please refer to FIG. 3A in particular, a laser device in its simplest form can be schematically depicted as including a 1 gain medium 1A 'corresponding mirrors 2A and 3A are placed around the gain medium λ 1A俾 forms a laser cavity 5. Mirrors 2A and 3A are typically coated with a highly reflective surface over a wide spectral range. For example, the mirror coated on the mirror 2A may be completely reflected, and the mirror coated on the mirror 3A may be partially reflected, thereby allowing some light to escape from the laser cavity 5. The spatial area where the gain medium 1 a is placed between the reflections 2A and 3A of the surface forms the laser resonator or cavity, and in the context of the present invention is called a so-called "Intraluminal area <intracavjty region)". The intensity (I) of the laser output can be determined by the wavelength range and the reflectivity of the resonator elements (for example, mirrors 2A and 3A). The gain medium 1A operates (again) in this wavelength range. In general, this output is broad and has no sharp, special spectral appearance, as shown in the graph of I vs. wavelength (again) in Figure 38 of Figure 38. By selecting different optical elements to form the laser cavity 5 '芎 laser, the spectral output of the laser cavity can be changed or "tuned". For example, please refer to FIG. 3B for a tuned resonance. The cavity may include a diffraction grating 2B which replaces the highly reflective mirror 2A shown in Figure 3A. As shown in the figure, the laser device therefore includes a diffraction grating 2b, a mirror 3B, and The gain medium 1B is positioned between the diffraction grating chirp and the mirrors 3, B. Generally, the result of the spectral output from this adjusted laser is narrowed and appears as if the gain medium 1A and the The wavelength in the original spectral output of the laser formed by mirrors 28 and 38 (Figure 3A). --------- J--Ί. (Read the precautions on the back before filling (This page) Order ------- n ---- .ί-ί I II-ϊ

-14- cmlf fe Printed by the Consumer Standards Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs

V. Description of the invention (I2) The schematic diagram of the intensity (I) vs. wavelength (λ) of the output of the field and 's change is plotted in Figure 3B. The laser wheel can also be changed by placing gas molecules, atoms, free radicals, and / or ions in the ground or excited state in the optical resonator (eg, cavity). Please refer to FIG. 3C, a laser configured in this manner may include a high-reflection mirror 2 (:, an angle-damped mirror 3C with a gain medium ⑴, and a cavity placed therebetween. Absorber 4. In the extended case, the intra-cavity absorber 4 may contain such gas species (for example, samples containing impurities). The effect of such intra-cavity gas species on the laser output cannot be observed. For example, this kind of The diagram of the device pair is shown in Fig. 3C. Fig. 3C contains the spectrum and absorption spectrum of the gas species contained in the intracavity absorber 4. The different absorption characteristics depicted in Fig. 3C are the species in the mouth. Loss is generated, and the laser gain must be opposed to the loss of the types in the cavity. Therefore, the absorption spectrum of the types in the cavity can be presented in the light output of the laser. In particular, in the stronger cavity The absorption characteristics effectively reduce the laser output intensity at the wavelengths that effectively counteract the gain characteristics of the resonator. As a result, instead of a rather smooth continuous output, as shown in Figure 3A, As in The laser output of a structure like that shown in Figure 3c can be observed. The decrease in intensity (I), as shown in Figure 3C, is due to the 'i.e.' caused by the absorption of species in these gas cavities The stronger the absorption characteristics, the greater the decrease in laser output intensity. According to the present invention, the absorption spectrum obtained from the intra-cavity laser measurement using an intra-cavity absorber can be used for these gas types High-sensitivity paper size (297 mm) (Please read the precautions on the back before filling this page)

, TT -15-Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs A7 _ _ B7 V. Description of the invention (13) Degree detection. It has been found that each gas species can be uniquely identified by its corresponding absorption spectrum (signature) and therefore can be used to identify those gas species (impurities) with certainty. The inventor of the present case found that the appearance of the absorption type (gas element) in the laser resonator before and / or during the competition between gain and loss leads to enhanced detection sensitivity through the use of ILS, between gain and loss The competitive system occurs naturally as the laser system approaches a critical value. Given the fact that the loss associated with the intra-cavity absorber becomes part of the competition between gain and loss within the laser, even a small absorption associated with a weak absorption transfer and / or a minimum absorber concentration The rate is dramatically amplified during this gain / loss competition. As a result, the competition is clearly presented at the output of the ils signal (see Figure 3C). Therefore, using these principles, ILS can be used to detect weak absorption and / or minimal absorber concentrations. The IL S detection is clearly different from other spectroscopic methods using lasers. The output of a laser used for spectroscopy as described above typically causes a second occurrence of one of the gas species to be monitored thereafter. Alternatively, the output of a laser can provide a means for displaying the characteristics of the gas through the absorption of a selected wavelength in the output of the laser by the type of gas. In any case, the operation of the laser is separate from the type of gas being measured and is not affected by the type of gas being measured. For ILS testing, however, the operation of the laser is directly affected by the type of gas. In this form, the ILS laser 500 itself acts as a detector. In particular, the output from the ILS laser 500, when it leaves the laser cavity 5, contains spectral information about the type of gas. The paper size of this model applies to the Chinese National Standard (CNS) A4 specification (210X 297 mm) (please read the precautions on the back before you write the book) -Q Pack-n H-I-i \-In- -· -16- five

Printed by the Consumer Cooperatives of the Central Bureau of Standards of the Ministry of Economic Affairs

A7 ----- -B7 invention description (The operation is called ILS detection and the ILS laser 500 is unique. Accordingly, the ILS laser 500 is different from the conventional laser and has non-driver knowledge All operating characteristics of the laser. For example, the absorption types that cause the loss are deliberately introduced into the laser cavity 5 of the ILS laser 500. These absorption types are consistent with the operation of the ILS laser 500 and Change its output. And 'unlike lasers used in conventional applications, the ILS laser 500 operates above but close to a critical value (for example, within 10% of the limit power). However, Operation near the critical value often results in unstable output of the Z8 laser 5000. According to this, additional techniques directed at stabilizing the output of the ILS laser 500 will be required. Instead, the conventional laser Typically operating at considerably higher thresholds, increasing the output to its maximum. However, increasing the output to its maximum is not the purpose of the ILS laser 500. Therefore, laser devices that are inefficient and / or do not produce high output power ' When such laser devices are detrimental to many other laser applications, It can be used for ILS detection. The purpose of the ILS laser 500 is not to generate light, but to monitor the loss in the laser cavity 5. As described above, the mode competition in the laser cavity 5 results in the This loss in the ILS laser 500 is detected with enhanced sensitivity. Since the ILS detection has an increased sensitivity that cannot be achieved with conventional optical spectrum technology, it comes from a background gas with weak absorption and / or minimal absorber concentration Interference can be important, even if such interference is negligible under conventional spectrum technology. The detection of gas through ILS can be achieved by using different laser systems. (Like the one used here Similarly, the laser system includes ILS. The paper size is applicable to the Chinese National Standard (CNS) A4 specification (2 丨 0X 297 mm) (Please read the precautions on the back before filling in this page). Τ -17- 5. Invention Note (15) A7 B7 The Laser Standard 500 printed by the Central Laboratories of the Ministry of Economic Affairs and the Consumers Cooperatives of Laser and Pumped Laser Benefits 100.) These laser systems each share several common characteristics required for extremely high detection sensitivity. Skill Has three such characteristics that have been stigmatized. First, the laser systems exhibit multi-mode operation close to the threshold of the laser generating ^ Second, the laser systems provide a The types of gases or impurities (ie, molecules, atoms, free radicals, and / or ions) have a substantially broad operating wavelength width. Third, these laser systems maintain a stable intensity and wavelength. What will be perceived is The different IL S laser systems with different physical and optical characteristics meet the above-listed standards for extremely high detection sensitivity. The different physical and optical characteristics of the laser system can also provide information about how the measurement is completed. Experimental conditions (e.g. data to obtain different advantages over time samples. In addition, these different physical and optical properties can affect one or more of the following: ⑴ the type of gas or impurities that can be detected (ie, molecules, atoms, free radicals, and / or ions); (2) each gas type The corresponding indifference that can be determined; and (3) the actual type of the sample that can be tested. Examples of the latter include the total pressure of the sample, the sample size, and the environment in which the sample is contained. &quot; Faced with the background of these general principles, in the context of the present invention, the inventor of the present case has invented a commercially viable impurity sensing system, which is provided in a gas sample that may contain a residual gas Enhanced detection of impurities (ie, gases that react with components containing ILS lasers). Referring now to Figures 1A and 2, according to a preferred embodiment of the present invention,-the gas detection system 1 () suitably includes a laser driver_ and-contains an ILS laser 50. The ms room assembly is complete. Light I (please read the notes on the back # · fill this page first) Ding-One · 1 1— I. ^^ 1 n Hi This paper size is applicable to China National Standard (CNS) A4 (210X297)

, I-I ----111 1--I— -1 I -18-Printed by the Economic and Central Bureau of Standards, Shellfish Consumer Cooperative A7 ________B7 V. Description of the invention (16) Assembly 600 and-Detector / The computer system, 800 series is suitably optically connected to the output from the ILS laser || 5GG, so the absorption spectrum system is properly operated, thereby enabling the appearance and / or high concentration of gas species (㈣) Sensitivity detection. The ILS laser 500 operates in a wavelength range or a spectral range suitable for the detection of impurities contained in a gas sample (e.g., a spa gas). Within this spectral range, a characteristic absorption spectrum can be obtained. Since the gas phase spectroscopy system is widely studied, a large and directly useful science system exists, which shows how the gas species system can be uniquely identified. It will be noticed that ILS detection can be used to monitor a gas species (eg, water vapor) in the presence of corrosive gases (eg, hydrogen chloride) by selecting an appropriate spectral window. Inside the spectral window. In particular, a spectral range must be determined, in which the impurity or gas species has at least one absorption characteristic and (ii) the corrosive gas has essentially no interference absorption characteristics. Since the interference absorption characteristics represent overlapping absorption characteristics that are used to identify the absorption characteristics of the gas species, thereby causing a compromise in the detection selectivity between the gas species and the corrosive gas. Many of these spectral windows (where corrosive gases are not absorbed or have very weak absorption) exist within the absorption range of the gas species. Because the absorption by the residual gas is extremely weak (if measurable) within these spectral windows, the ILS sensor 100 operating at these wavelengths can be used to detect the type of gas without interference. Finding the wavelength range in which such a spectral window exists (to avoid interfering with spectral signals) will require significant effort. In particular, the enhanced detection of ILS detection for measuring the absorption in gas This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) -19- -----------} Pack 11 / • V (Please read the precautions on the back before filling in this page)

1T— ~ H -α_ A7 A7 Printed by the Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 5. Description of the invention (π) Sensitivity means that even interference from background gas with weak absorption and / or minimal absorber concentration will be important ; Even though such interference is 'negligible' under conventional spectrum technology. In addition, the operation of the ILS laser 500 in a specific spectral range where a particular spectral characteristic exists may require considerable effort. Nevertheless, the unique spectral identification of a particular gas species can be routinely required. Therefore, selectivity in the type of gas detected can be achieved. However, the existence of these spectral windows is only apparent with hyperspectral resolution. Therefore, sufficient spectral resolution will be required to separate the absorption features that occur close to each other. It is further noticed that the wavelength position and width of a particular spectral window depend directly on the particular gas type and the particular corrosive gas. For example, for the detection of water vapor in hydrogen chloride (Ηα), a spectral range is selected from a wavelength range between approximately 142 ° and the measured milli㈣㈣. Alternatively, a spectral range may be selected from a wavelength range between approximately 1433 and 1440 nm. According to this', the ILS laser 500 must output a light having a wavelength distribution, at least-part of which is within the selected spectral range. In order to drive the ILS laser 500, the gas detection system 10 needs a pumping source which transmits axial rays with sufficient power and in an appropriate wavelength range. The ILS laser may be at a threshold value of the ILS laser ③ or slightly higher than this. The ILS laser is optically excited below the laser-like threshold. In this regard, it is important that the ILS laser 500 operates so that the gain in the laser device exceeds all the optical losses, including those related to the gain and mirror. ^ This paper standard applies to China National Standards Interpretation (CMS) Α4 size (210x297) --------- 0 Pack! 1 · (Please read the notes on the back to fill in this page first) ~ · --Order ---------- · II _ -20- A7 B7 V. Description of the invention (18) Non-mirror cavity The loss associated with an optical element is related to the absorption of any kind of gas in the cavity of the optical resonator. Moreover, it is best that the laser 500 operates in multiple vertical drops, that is, across a wide wavelength range. Typically, one of the desirable bandwidths where laser action occurs is between about 2nm and about 15nm. Although the ILS laser 500 can also operate in more than one transverse resonator mode, this is not required. According to a preferred exemplary embodiment of the present invention, the laser driver includes an optical pumping laser 100. Suitably, the optical parameters (eg, average power density, peak power density, spread, and beam diameter) of the pumped laser 100 are advantageously matched to the optical requirements of the ILS laser 500. As will be noticed, to do so requires deciding how many photons can be transmitted within a certain volume and within a certain distance from the pumping laser 100 at a given distance. Generally, according to the present invention, these decisions are made according to well-known theorems and mass equations such that the pumping laser 100 is appropriately selected to favorably match the optical characteristics of the ILS laser 500. Printed by the Central Bureau of Standards, Ministry of Economic Affairs, Shellfish Consumer Cooperative, although other drives can be used in the context of the present invention, it is best that a pumping laser 100 is based on its operating wavelength and its optical parameters Was chosen so that it could be used alone to excite the ILS laser 500. As described in detail below, in the case where the pumping laser 100 cannot individually drive (pump) the ILS laser 500, the beam variation optics, like the beam shaping device 200, can be used. Examples of beam-changing optics include diffraction optics, refractive optics, gradient indexing optics with refractive index changes axially, gradient indexing optics with refractive index changes radially, micro-optics, and combinations thereof. -21-(Please read the precautions on the back before filling this page) This paper size applies to China National Standard (CNS) A4 (210X 297 mm)

Printed by the Consumers 'Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs. 5. Description of the Invention (19) However,' the radiation from those lasers 100 is appropriate to the pumping requirements of the ILS gain medium contained in the ILS laser 500 (eg , Mode Gu Ji) in the case of 'such beam changes are not needed for optical systems. According to an exemplary embodiment of the present invention, the pumping laser j 〇〇 includes a laser operating at a wavelength; Ip '(in this case, it is a solid-state crystal laser, that is, a TEM (〇〇 lateral mode structure, has an output power greater than about 2.8. Watts, Nd: YAG operating at about 1064nm). Suitably, the beam e transmitted from the pumping laser 100 has a linear polarization and can be rotated perpendicularly to the plane of transmission. At best, the spread of the output beam (beam E) from the pumping laser 100 is about less than 0.5 mrad and shows a beam diameter that is large 'about less than 5 μm. A specific and better pumping laser 100 is from Canada.

Model T20_1054C for Physics of Mountain View. As will be explained more fully below, the use of such a pump laser 100 typically requires the use of a beamforming optical assembly 200. It should be noticed that the drive 100 may include any suitable optical pumping source that will properly excite the ILS laser 50, whether it is coherent or non-coupling, continuous or pulsed. As a result, even in accordance with the previously described preferred embodiment, the pumping laser 100 operates in a conventional manner and emits radiation throughout a desired frequency band and having a desired bandwidth. For example, the pumping laser 100 may include a diode laser. ; 'Using a diode laser as the pumping laser 100 typically requires the use of a beam-shaping optical assembly 200. Dimensions of this paper size ^ 7 ^ 5) Μ specifications (Please read the precautions on the back before filling in this page)

, 1T

J A7 ____B7 V. Description of the invention (2G) Please continue to refer to Figure 2. In the simplest case, the ILS laser 500 includes a mirror between the corresponding mirrors 501, 50, 5 and 5 The entire optical path; the optical resonator cavity formed by the diameter length. However, in those cases where the system 10 is used to detect gases (impurities) within the sample that do not chemically react with components of the laser itself (eg, gain media or crystals, mirrors, mechanical devices, and the like) The resonator cavity can be formed by the area between the mirrors 501, 503 and 505. In this case, the area of the gas sample (ie, the area where the gas sample exists) contains the area between the mirrors 501, 503, 505 (except the laser crystal 507). However, for gas samples containing corrosive gases, that is, gases that chemically react with one or more laser components, it may be desirable to separate the gas sample area from the components (e.g., gain media, mirrors 'and many more). According to a preferred embodiment of the present invention, a separate sample system 400a may be advantageously used to isolate the sample from the laser components. Printed by the Consumer Cooperative of the Central Standards Bureau of the Ministry of Economics Please refer to Figures 2 and 4. According to this preferred feature of the present invention, the sample system 400A preferably includes a gas sample tank body 406, the gas sample tank body 406 The system is suitably held in a gas sample cell holder 407. The corresponding slot windows 404 and 405 are suitably mounted on the distal end of the gas sample tank body 406 and provide optical access to the sample within the body of the tank. The windows 404 and 405 also properly seal the slot body 406. As will be described in more detail below, the area where the system 400A is appropriately placed is astigmatically compensated. To compensate for this astigmatism, the windows 404 and 405 are not `` active '' optical elements, which obviously change and disturb the ILS laser beam. The paper size of the paper applies the Chinese National Standard (CNS) A4 specification. (210X297 mm) -23-

Printed by the Shellfish Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 5. Description of Invention (21), except for transmission. An input duct 408 and an output duct 409 are operatively connected to the gas tank body 406. &quot; As shown in Fig. 4, the connection pipes 408 and 409 are advantageously used to ensure the efficient and effective delivery of gas samples to and from the gas (impurity) sample tank system 400A. According to this, the gas detection system of the present invention can continuously monitor the flowing gas under variable air pressure, including high pressure. In particular, the use of the gas sample cell body 406 is advantageous when measuring a gas having a pressure different from atmospheric pressure (ie, higher or lower) or having the pressure of the ILS laser designed to generate a laser At the same time, the operation of the ils laser 500 was enabled. Without this kind of gas sample tank body 406, it is difficult to achieve laser generation when monitoring a gas having a pressure different from that of the ILS laser 500. Therefore, the gas sample tank body 406 is A gas sample having a pressure in excess of atmospheric pressure or the ILS laser is designed to generate the pressure of the laser allows the ILS laser to operate stably at 500. Alternatively, the gas sample may have a pressure that is less than atmospheric pressure or the ILS laser 500 is designed to generate a pressure that is less than the pressure of the laser (e.g., when a vacuum is present in the gas sample cell body 406). In addition, the gas sample tank body 406 enables stable operation of the ILS laser 500 when a gas sample having a fluctuating pressure is used. Suitably, the slot body 406 comprises a stainless steel body having a size suitably in the range of 10 to 90 micrometers (mm). In a preferred feature of one of the features of the present invention, the 'Sample System 400a' forms an opening (i.e., an opening in the body 406) having an approximately flea leaf diameter. The best is that the opening in the body 40 and the center of the gas sample tank body 406 is applicable to the paper size of the Chinese National Standard (CNS) Α4 specification (210X 297). (Please read the precautions on the back first and fill in (This page) ~ Install I --- ^ ---!-Order -------. -24- A7 B7 V. Description of Invention (22). Most preferably, the diameter of the opening in the groove body 406 is appropriately selected to be larger than the diameter of the incident beam so that the optical: chemical alignment of the gas sample system 400A can be easily obtained. The thicknesses of the windows 404, 405 are appropriately selected to avoid interference effects that would interfere with the quality of the ILS absorption spectrum obtained by the operation of the gas detection system 10. Based on this feature, the materials used in forming the windows 404, 405 are optimally selected to minimize absorption losses in the range in which the ILS laser 500 operates, such as in the range of 1350 to 1550 nanometers (nm) Like. For example, windows 404, 405 may be formed from an optically compatible material, such as Infrasil ™, available from Research Electro Optics of Boulder, CO, which is extremely light-repellent. The windows 404, 405 are properly positioned at a Brewster's angle, which further minimizes reflection losses from the surface of such windows. Printed by the Ministry of Economic Affairs * Standard Consumer Work Cooperatives When so configured, the gas sample tank 406 appropriately allows the beam to pass through the gas sample to be analyzed. The couplers 408,409 with a tube attached are appropriately selected to provide easy adjustments, such as can be required to realign and / or align the windows in the ILS laser device 500 without changing the threshold pumping conditions. 404,405. The resonator cavity, in the case where the system 400A is used, is suitably formed by the physical length between the mirrors 501, 503, 505 (including the laser crystal 507 and the area included between the windows 404, 405 and the windows 404 and 405 itself contains the sample system 400A). However, in those cases where the sample does not chemically react with the laser components, the sample slot is nominally formed by the physical regions between the mirrors 501, 503, and 505 (except for the laser crystal 507 outer). What will be noticed is that any gas in the room 400 to be detected is -25-(Please read the precautions on the back before filling this page) This paper size applies the Chinese National Standard (CNS) Α4 specification (210X 297 (Mm) A7 printed by the Shellfish Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs ^ _____ B7 V. Description of the invention (23) The body (impurity) must be properly removed or eliminated so that it is compatible with the gas sample contained in the system 400A The amount of those gases (impurities) or the absorption spectra of the samples obtained through the use of the gas detection system are accurate. According to a preferred feature of the present invention, the chamber 400 is advantageously a sealed container capable of washing the gas (impurity) to be detected or being evacuated to remove the gas (impurity) to be detected, Or the degree of the gas (impurity) therein can be reduced to a level lower than that to be detected in the sample system 400A. As described more fully below, continuous removal of impurities can be achieved by, for example, the &quot; suck &quot; method.

Please refer to FIGS. 2 and 4. According to a preferred embodiment of the present invention, ILS to 400 (except the sample system 400a) suitably include a container base 401 and a connectable top cover 41. . The corresponding windows 402, 403 are appropriately positioned in the wall of the body 401 in an appropriate form and at a position related to the optical resonator cavity formed therein. The container base 401 and the top cover 41 are suitably made of stainless steel or aluminum. The top cover 410 is advantageously locked to the body 401 in accordance with any conventional technique suitable for allowing evacuation, washing and / or further removal of impurities therein. For example, a gap filler 410a or other suitable device with a sealing strategy (for example, mechanical aids, metal seals, adhesives, and the like, all of which are not shown) can be used for such applications. It is desirable that the base 401 and the top cover 41 are effectively sealed in a form that cannot be easily opened before being sent to the user. For the purpose of washing or evacuating the chamber 400, it is used for vacuum pumping and / or washing. One input tube 411 and one paper size for vacuum pumping and / or cleaning are applicable to China National Standard (CNS) A4 specifications (2 丨 0X29 &quot;? mm) (Please read the notes on the back before filling in (This page) • -ο Binding-Staple

Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 5. Description of the Invention (24) The outlet 412 system was set up. The windows 402, 403 are appropriately placed in the wall of the container 401, thereby providing optical access to the ILS chamber 400. Preferably, the window 402 system is suitably provided with an anti-reflective (AR) coating of about 1000 to 1 100 nm ', preferably about 1064 nm. On the other hand, the window 403 is preferably constituted by an optical window without an eight-foot coating. The window 402 is appropriately designed to provide a maximum transmission at a wavelength λp 'in this case of 1064 nm. Similarly, the window 403 is appropriately immersed to provide the maximum transmission over the operating wavelength range of the ILS laser 500 (e.g., '1350 nm to about 1550 nm). More specifically, reducing the gas (impurities) in the chamber 400 (except for the sample system 400A) to an acceptable level may suitably include washing or emptying the sealable container 401 with the top cover 410 so that the gas ( Impurities) are below the level to be detected in a gas sample in the sample system. What will be noticed is when the ratio between (1) the concentration of the gas in the chamber and (2) the concentration of the gas in the body of the gas sample OO tank and (1) the length of the cavity ( That is, when the ratio between the mirror 501 and the mirror 505) and (2) the length of the ILS laser beam passing through the groove body is equal, the loss caused by the gas in the chamber 400 will be This is comparable to the loss caused by the gas in the gas sample cell body 406. In these cases where the impurities consist of water vapor, the water level in the chamber 400 must be reduced below those contained in the sample. According to the present invention, detection levels of less than 10 ppt (lppb in corrosive gas) are available. Although any method currently known or later conceived to remove impurities (eg, water) from the chamber 400 (except for the sample system 40oa), this paper size is applicable to the Chinese National Cricket (CNS) A4 specification ( 210X 297 mm) (Please read the notes on the back first and fill in this page)

-27-

V. Description of the invention (25) ~ Printed by the Consumer Cooperatives of the Central Bureau of Standards of the Ministry of Economic Affairs is sufficient to be applied in the context of the present invention. However, it is best that the chamber 400 is properly sealed and inert gas, such as Nitrogen was pumped into it. ’In some cases, the department must further evacuate the chamber 400 俾 to create a vacuum that removes all impurities contained in it. Moreover, 'the chamber 400 is useful for heating during evacuation. If the chamber 400 is cooled while continuously being evacuated, the application of heating or &quot; baking &quot; may cause a higher degree of vacuum to be achieved. According to yet another feature of the present invention, 'aspiratory A getter (not shown) can be advantageously used with the chamber 400 to provide further elimination of the water within the chamber. As will be noticed by those skilled in the art, An aspirator (for example, a molecular foam material) capable of continuously absorbing water can be used to reduce the level of water (impurities) to below the concentration of water to be detected in the gas sample tank 406 (for example, less (At 10 ppt). The gas sample is properly connected to system 400A by connecting a gas line to connectors 408,409 and supplying the gas to sample system 400A. As briefly described above, ILS The sensor 500 suitably optically detects the kind of gas (impurity, for example, water vapor) contained in a gas sample placed in the chamber 400. According to the present invention, the ILS laser 500 suitably includes a One crystal holder 508 The crystal (gain medium) 507 in the crystal. The crystal 507 is appropriately installed in the crystal holder 50.8, so that the crystal 507 is also optimally placed with respect to the incident beam. As described previously, the The incident beam is appropriately shaped by the operation of the pumping laser 100 or through the use of the beam forming device 200 so that the incident beam jf is a Chinese paper standard (CNS) A4 specification ( 210X297 mm) -28-Please read the precautions on the back before filling in this page) Pack. -1 · I, i iw ml ^ nv \ 1!--1 B ^^^^ 1 ϋ ^ ϋ — «If — I ip Printed by the Consumer Standards Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs A7 ^ ____ B7 5. The invention is appropriately matched to the mold volume of the ILS gain medium (for example, crystal 507). Generally, the ILS laser 500 series Are appropriately configured so that the laser beam in the region within the cavity is substantially parallel (ie, astigmatically compensated) in the region where the beam is introduced into the gas sample, for example, The image is included in the system 400-like. Although different optical configurations can be used for this purpose, These mirror configurations have been found to be particularly advantageous. This configuration allows accurate astigmatism compensation of the ILS laser beam, thereby allowing compensation with τ * to pump the ILS laser at a laser threshold The prior conditions for the generation of a device 5a and a laser beam, which is substantially parallel when introduced into the gas sample, as if contained in the system 400A. According to the invention With this feature, the corresponding windows 50, 50, and a folding mirror 503 are suitably used for this purpose. The mirror 501 is preferably composed of an optical mirror with an AR coating, and its system It is optimally set at about the middle position of p, for example, between about 1000 and j 100 nm, and most preferably 64 nm. The mirror 501 also has a coating, which effectively provides a reflectance of about ρ 9.8% to about ιη% in the desired spectral range for the operation of the ILS laser 500 (for example, about 1350 to about 1550 nmp is appropriate Ground, the mirror 501 is composed of a concave mirror. For example, the mirror 501 may have a radius of curvature (ROC) of about 10 centimeters (cm) and a diameter of about 1.0 to about 1 30 cm. Preferably, the mirror 503 It is composed of a folding mirror, which is similarly configured as the mirror 501 and has a similar reflective coating. According to a preferred feature of the present invention, the mirror 503 has a structure suitable for the desired spectral range (for example, (Approximately 1350 to 1550nm) to achieve a reflectance of about 99.8% to about 100%. It is best that the mirror 505 is composed of a flat mirror (roow. Please refer to the second paper standard applicable to Chinese national standards ( CNS) A4 specification (210X297mm) (Please read the notes on the back to fill out this page first) • Jo · ^ —I .------ Order ----- •-----29-

As shown in the figure, the side of the mirror 505 facing the mirror 50.3 is advantageously provided with a reflective coating in the desired spectral range of the ILS laser 500, for example, between 1350 and about 1550mn. between. The other side of the mirror 5105 is properly uncoated. It is preferable that the surfaces of the 'mirror 505' form an angle of about 0.5 to about 3.0 degrees with each other appropriately, and most preferably about 10 degrees. The inventors of the present case found that wedge-forming these surfaces in this liter formula tends to minimize unwanted reflections that cause interference effects. Mounts 502, 504, and 506 allow mechanical adjustment of optically aligned ILS cavities to within 400. For example, the inventor of the present case found that the efficiency of the ILS laser 500 was aligned with mirrors 501 and 505 to about 0. The beam angle of incidence is straight and the mirrors 503 are aligned with approximately 12.5. In the laser configuration where the beam incident angle is linear, the system is maximized. Printed by the Consumer Cooperatives of the Central Bureau of Standards of the Ministry of Economic Affairs -II1 m 1 --- 11 I----I 5 '.. &quot; V 1 (Please read the precautions on the back before filling this page) Order due to mirrors 501,503, With proper design, placement, and configuration of the 505 and 505, the beam currents are substantially parallel (ie, collhmated) in the area between the mirrors 503 and 505. As a result, the sample system 400A ^ iLS laser 5000 could be inserted into the cavity region without significantly detrimental performance. However, it will be observed that the distance between any reflective surfaces (eg, mirrors and windows) within the ILS laser must not be such that any interference occurs within the ILS laser degree. If the distance between the reflective surfaces is an integer equal to the wavelength that can be compared to the wavelength at which the ILS laser crystal 507 operates, an interference pattern is generated. As mentioned above, the ILS laser crystal 507 is preferably in a paper standard suitable for the detection of impurities contained in the gas sample (for example, 'water vapor'). The national standard (CNS) A4 is applicable. Specifications (2ωχ2974 &gt; Lu) -30- Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs A7 ____B7___ V. Description of Invention (28) In this wavelength range, a characteristic absorption spectrum can be obtained. As previously mentioned, the 'laser crystal 507 typically exhibits the characteristics of a multi-mode laser system 1. It will be noticed that the mode spacing of the output of the laser crystal 507 is required to be small enough to accurately represent the absorption characteristics of the gas sample. The light generated by the laser crystal 507 typically has a mode interval of about 450 million megahertz (MHz) to 550 MHz, preferably about 500 MHz, thereby ensuring accurate spectral reproduction of the absorption band. Although any crystal can be used in the context of the present invention, a Cr4 +: YAG biter Cr4 +: mine (Lu) AG laser crystal system is most suitable for use in the present invention (for example, for the detection of water vapor in HC1 In terms of). In addition, other matrix materials of Cr4 + ions can be used and other ions doped into these matrix crystals can be replaced. The inventors of the present case have found that the low gain efficiency of the Cr0 system in a garnet hst (e.g., YAG or LuAG) can be successfully operated as one using a length of about 0 to 30 Inm and a diameter of 5 mm Laser of crystal. Most preferably, the doping concentration in such a packing matrix material is in the range of about 0.10% to 0-30%. A specific Xingfujia laser gain medium 507 includes a Cr4 +: YAG or Cr4 + · LuAG crystal, which is cut in the form of Brewster's angle to minimize reflection losses. More specifically, a Cr4 +: yag crystal cut at a Brewster's angle with a crystal length of about 23 to 27 mm with a doping content of about 0.015% (for example, η is about 1.82 and ΘB is about 61.2. Crystal Refractive Index) has been found to be particularly advantageous in the context of the gas detection system 10 of the present invention. Can be appropriately used in other laser crystals of the present invention. 507 This paper size is applicable to the Chinese National Standard (CNS) A4 specification (2! 0X 297 mm). -GT equipment-(Please read the note on the back first Please fill in this page for matters) —7 II-ITI— II. .- ° • 1 1 1 ^ 1 1 — ^ 1. -31-Α7 __Β7 V. Description of Invention (29) The example is as follows: Cr: Tm: Ho : YAG, Cr4 +: YSO, Cr4 +: YAG,

Cr4 +: YSAG, Er: GSGG, Er3 +: YLF, Er3 +: Yb3 +: glass,

Ho3-: YSGG 'Ho3 +: Tm3 +: LuAG' Tm3 +: Ho3 +: YLF 'Tm3 +: Ho3 +: YAG, Tm3 +: Ca Y SOAP, Tm3 +: YLF, Tm3 +: Tb3 +: YLF, Tm3 +: Glass, Tm3 +: Ca La SOAP, Tm3 + : Y〇S, Tm3 +: YSGG, Tm3 +: YAG, Yb3 +: YAG, Cr: olivine, Er: Yb: glass, c〇2 +: MgF2, Cr: ZnSe, Cr2 +: ZnS / ZnSe / ZnTe, Ti3 +: A1203, and Ni2 +:

BaLiF3 〇 Affordable laser theft crystal 5 0 7 ′ Although there is an improvement in efficiency, there is still a considerable loss. These losses are converted into thermal energy. According to the present invention, the crystal 507 is properly installed in a form that allows the thermal energy: efficiency to be so removed during operation. However, it should be noticed that when the efficiency of the laser crystal 507 is maintained as new crystals are developed, the need or requirement for the thermal energy removal device will be reduced and very ^ this 'on a certain side' Such losses will be so small that the need to remove the thermal energy will be eliminated. However, using the currently available crystal 5 () 7, the laser system% preferably includes a heat dissipation system 500A. The Central Standards Bureau of the Ministry of Economic Affairs, Zhengong Consumer Cooperative Co., Ltd. Please continue to refer to Figure 2 and cooperate with Figure 5. The cooling system muscle is connected to the mounting member 508 and the crystal 507 (in Figure 5). As shown in Figure 5, the holder preferably includes a two-part holder that is appropriately configured to mechanically hold the laser crystal 507. The thermal system 500A preferably includes a copper Mass cooling bridge 51 °,-thermoelectric cooling circuit 511. In addition,-electrical temperature ㈣ interface ^ ° in the wall of the main body 401 of the chamber 400 (see Figure 4). And bridge 51 〇 Ben Ma Ni towel -32 -V. Description of the invention (30

-The women's clothing 508, the cooler 509, and the sensor 5m are used to properly align the crystal 507 with other optical elements including the ILS laser 500, and enable the thermal characteristics of the crystal control. mV 1ί ml nn Printed by the Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs According to a preferred feature of the present invention, the heat dissipation system 500A is in direct contact with the crystal 507. The thermal energy generated by the normal operation of the optically excited crystal 507 caused by the beam F is effectively conducted away from the crystal 507, thereby maintaining a fairly constant operating crystal temperature. Preferably, the crystal holder 508 comprises copper / aluminum operatively connected to a cooler 509 and a heat sink bridge 510. Suitably, the heat dissipation bridge 51o includes a copper heat sink located within the body 400m of the chamber 400 so that excessive thermal energy is conducted away from the crystal 507. The sensor 511 measures the temperature of the holder 508, the cooler 509, the bridge 510, and the crystal so that the optimal operating temperature is maintained. According to this feature of the present invention, thermal management of the crystal 507 is obtained, thereby eliminating the need for a coolant that would unnecessarily drag and complicate the operation of the gas detection system 10. The ILS laser system 500 is configured so that the angle (0) between the beam current of the exciter crystal 507 and the reflected beam current from the mirror 503 is about 20. To 30 ° 'is preferably from about 23. To 27. , And the best is about 25. . This beam (beam H) is directed to the sample system 400A. After passing through the sample system 400A, the output beam G from the ILS laser 500 is directed toward the optical analyzer assembly 600. As shown in FIG. 2, such a direction can be obtained by using a folding mirror 601 which is appropriately mounted on a mirror mount 602. Mirror 601 preferably includes a flat mirror that includes a coating (e.g., 1350 to 1550 nm) that is highly reflective in the desired spectral range of operation of ILS laser 500. This paper uses the Chinese National Standard (CNS) A4 specification (210X297 mm) -33-Please read the notes on the back before filling in this page) / l \ I------------ Pack one;-^ it ---- Order -----

What will be noticed by the Central Standards Bureau of the Ministry of Economic Affairs of the Bayer Consumer Cooperative Printing is that the turn-out from the ILS laser 500 can be transmitted to a remote location alternately through a fiber optic cable for spectral analysis. In particular, the beam G can be connected to an optical fiber or a bundle of optical fibers. The output of the ILS laser 500, after passing through the type of gas, is thereby sent to the optical analyzer assembly 600 located at the remote location. Under appropriate conditions, the fiber optic transmission has been shown not to distort the spectral data. Please continue to refer to Figure 2. The optical analyzer assembly 600 includes a dispersion grating 'these dispersion grating systems are designed to spectrally decompose a coherent beam, especially' the impurities in the sample to be detected Absorption spectrum. Suitably, the spectral dispersion of the spectrometer 600 is large enough to clearly decompose the absorption characteristics of the impurity, thereby enabling the identification of each impurity's characteristics, and the numerical determination of the concentration of the impurity. Although any known or later proposed spectrometer can be used in accordance with the present invention, it is best that the spectrometer 600 includes two diffraction grating assemblies 600A and 600B, the two diffraction grating assemblies 600. A and 600B operate with an optical beam expansion device 600C and a focusing lens assembly 600D. The optical beam expansion device 600C preferably includes lenses 603 and 605 which are appropriately mounted in the gas detection system 10 via the use of mounts 604 and 606. The lens 603 preferably contains a negative lens and the lens 605 preferably contains an alignment lens; each lens preferably has an AR coating which is centered on the impurities in the sample to be detected Near the absorption spectrum, for example, between about 100 nm and 1500 nm, the best is 1400 nm. Diffraction grating assemblies 600A and 600B appropriately include the corresponding diffraction gratings 607 and 609 mounted on the corresponding diffraction grating mounting pieces 608 and 610. This paper size is applicable to the Chinese National Standard (CNS) A4 specification (210X 297 mm) (Central) -34- C Please read the note on the back first to complete this page), ιτ V. Description of the invention (printed by A7 B7 32, Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs. If it will be noticed, the installation parts 608,610 allow Harmonization and adjustment of the diffraction gratings 607,609 within the optical analyzer assembly 600. The focusing lens assembly 600D preferably includes a lens 611, and the lens 6 ji contains a wavelength at which the ILS laser 500 operates Ar coating, such as' between about 100 nm and 1500 nm, preferably 1400 nm. The lens 611 focuses the output of the spectrometer 600 onto the multi-channel array detector 70. The spectral range in which the ILS laser 500 operates is It is generated by the optical interferometer assembly 600 and is spatial. The ground traverses a plane where the multi-channel array detector 701 is properly fixed on a mounting piece 702. It is required to operate and read from The multipath detection An electronic board 703 of the information control and timing electronics of 701 is operatively connected to it. As a result, the entire light s diffusion absorption of a specific impurity identified by the use of the gas detection system 10 is required. The light source can be obtained. The position and relative intensity of the specific absorption characteristics of the impurity can be used to uniquely identify the gas (impurity) to be detected and numerically determine the amount of the gas (impurity). The detector 701 may include, for example, an InGaAs multiplexed array detector having 256 pixels with 100 # m intervals. The light detected by the multiplexed detector 701 is preferably tied to each detector element (pixel). The signal is converted into an electronic signal, and the signal is then transferred to an analog-to-digital (A / D) converter 801 via the electronic board 703. The converter 801 is appropriately connected via a BNC connector and a shielded cable 704. The connection is such that the accurate transfer of information is guaranteed. As long as the data is so converted, it is sent to a computer 802, which can be appropriately programmed to convert the electronics Signal cost paper size applies to Chinese National Standard (CNS) A4 specification (210X297). (Please read the precautions on the back before filling this page)

-35- Printed by the Consumer Cooperatives of the Central Bureau of Standards of the Ministry of Economic Affairs A7 B7 V. Description of the invention (33) Spectral information ', that is, a spectral characteristic that identifies a specific gas (impurity) and the concentration of a gas (impurity). 'Alternatively, the output of the ILS laser 500 through the type of gas to be monitored can be directed to an optical interferometer assembly 600 having at least one dispersion optic capable of being scanned for wavelengths The element is inside it (for example, diffractive meter grids 607 and 609). The output of the optical interferometer assembly 600 can be directed to a single detector. The optical characteristics of the gas species in the laser cavity 5 are obtained by scanning the diffuse optical element, and the light transmitted through the optical analyzer assembly 600 is detected by being placed in the single path. One of the appropriate slits (for example, a 'slit'). The intensity of the light transmitted through the optical analyzer assembly 600, that is, the output of the optical analyzer assembly 600, is recorded when the scattering optical element is scanned. Now referring to FIG. 2, as described earlier, once the pumping of the laser benefit 100 causes the ILS laser to operate at or near its threshold level, the gas detection system 10 detects the operation of the ILS laser 500. Spectrally decomposed regions. In the case where the optical characteristics of the driver 100 are appropriately matched to those of the ILS laser 5000, no additional change in the output of the driver 1000 is required. However, after being transferred from the driver 100 to the gain medium (

That is, the volume of the pumped radiation of crystal 507) is inappropriately matched with the volume of optically excited energy in the gain medium of the ILS laser 500, the beam variation system 200 can be Examples of optics used to facilitate this volume in conjunction with beam change optics include diffraction optics, refractive optics, refractive indexing, gradient indexing optics that change axially, refractive indexing, and radial indexing. This paper's dimensions are subject to Chinese national standards ( CNS) Α4 specification (210 × 297 mm) -------- 0111 {Please read the precautions on the back before filling this page)

1T -36-A7 B7 V. Description of the invention (34) Gradient indexing optics, micro optics, and combinations thereof. In its simplest form, the beam variation system 200 preferably includes an optical telescope that is effective at focusing the photon density required to the correct position and volume of the gain medium of the ILS laser 500. The radiation transmitted to the ILS laser 500 is maximized. In particular, the beam variation system 200 is used to change the pumping radiation of the driver 100 to meet the requirements of the ILS laser 500. According to the present invention, the beam variation system 200 may include a beam expansion telescope. In particular, the pumping laser 100 includes the preferred spectral physical diode pumped solid state laser and the ILS crystal 507 includes a Cr4 +: YAG or a Cr4 +: LuAG crystal. In this case, the beam expansion of the pumped laser output may be necessary. Printed by the Consumer Standards Cooperative of the Central Bureau of Standards of the Ministry of Economics As shown in Figure 6, the system 200 suitably includes a column of lenses and an adjustable slot. In particular, a frame body 201 is provided, which appropriately includes corresponding upright walls, and the corresponding variable slit devices 202 and 20j are appropriately provided in the corresponding upright walls. Although any suitable device for changing the output of the laser 100 (eg, beam E) into or out of the slot through which the system 200 passes may be used, suitably devices 202 and 205 include conventional slot changing devices . The system 200 also preferably includes a focusing lens 203 and an alignment lens 204. Preferably, the lens 203 includes a focusing lens and the lens 204 preferably includes an alignment lens. The lenses 203, 204 each have an AR coating at a wavelength; Ip, for example, at about 1000 to 110 nm, The optimum is about 1064nm. As shown in Figure 6 -37- (Please read the precautions on the back before filling out this page) This paper size applies the Chinese National Standard (CNS) A4 specification (210X 297 mm)

5. Description of the invention (35) As shown, the lenses 203 and 205 are appropriately connected to the frame body, allowing them to be aligned in the beam E correspondingly. Please continue to refer to Figure 2. In some applications, the incident beam system must be properly focused to the laser gain medium within the ILS laser 500 (for example, an ion-doped crystal or Glass) in 507. According to the preferred feature of the present invention'-? The focal lens 206 can be advantageously mounted in a laser lens mount 207 so that the focusing lens system is appropriately positioned within the path of the beam f. According to a specific preferred feature of the present invention, the focusing lens 206 is a field-fitting-optical focusing lens having a ten-centre position positioned at a wavelength; the AR coating of lp, for example, at about 1,000. And uOOnm and optimally 1064nm coating. The focusing lens 206 can be appropriately configured to display a plano-convex or convex-convex configuration. As will be apparent to those skilled in the art, the quality of the quantitative information that can be obtained through the use of the gas detection system 10, at least one injury, depends on the stable operation of the ILS laser 500. The stability of each shot 500 in the context of the present invention is directly dependent on how the reproducible ILS laser device 500 reaches a critical value. It is desirable that the pumping laser 100 is properly held, and that the pumping of the ILs laser 500 is performed only near a critical value at which the maximum sensitivity can be obtained. However, not all drives can operate reliably in a continuous mode. In addition, continuous operation tends to require considerable effort to maintain the amplitude and wavelength stability of the ILS laser 500, which can have a negative impact on cost and thereby have a negative impact on the commercial viability of the gas detection system. . As another option for the continuous operation of the ILS laser 500, according to this paper, the Chinese National Standard (CNS) A4 specification (210X25 »7 mm) is applied to the long scale. Mm nn fm · (Please read the precautions on the back first to fill in (This page) Printed by the Consumer Standards Cooperative of the Central Bureau of Standards of the Ministry of Justice ^ Ji J -------- Order ----------- 38- A7 B7 V. Consumption by the Central Bureau of Standards of the Ministry of Economy The cooperative prints a mechanical operation chopper, an acousto-optic modulator, and an optical shutter similarly, but the system can be achieved. Alternatively, the output intensity of the pumped laser 100 may be adjusted without a second chopping * output current (beam current E). In particular, if the pumping laser 100 includes a diode laser, the power supplied to the diode laser pumping laser can be adjusted. Alternatively, the laser generated by the ILS laser 500 can be obtained. The required voltage above and below. Because of this, the ILS laser 500 will be turned on and off. Although any known or later proposed intermittent mode or pulse is the preferred embodiment of the invention description (36), the IL3 laser is operated in overnight pulse mode, or in an intermittent mode &quot;. As used herein, the terms pulse mode ^ and &quot; intermittent mode &quot; refer to a laser 500 for reproducible exposure to ILs (i.e., ion-doped crystal 507) to pump radiation so that The laser will be turned on and the M method. The subtraction is equivalent to causing the pumped light ray to alternate between zero intensity and-fixed intensity values at a fixed frequency and a fixed (usually symmetrical) duty cycle. In contrast, generating a pulse is equivalent to enabling the pumping radiation to alternate between zero intensity and non-zero intensity (which is not necessarily fixed) within a duty cycle that will change and is typically disproportionate. (Alternatively, the pumping radiation can be modulated so that the intensity of the pumping beam does not reach zero intensity but alternately at least two times that make the ILS laser 500 alternately above and below the critical value. The intensity level changes alternately.) Through operation in the intermittent mode or pulse mode, the stable operation of the ILS laser 500, consistent with quantitative spectrum and concentration measurements, can be obtained in a commercially viable form. The intensity modulation (for example, interruption) is used, and it is caused by this. 0Γ Install 丨 -------- Order ------- Q ^. (Please read the precautions on the back first (Fill in this page again) -39- A7 B7 V. Description of the Invention (37) The form of the punching mode can be used according to the present invention, and these modes are advantageously obtained through the use of the modulation assembly 300. According to this feature of the present invention, the beam E is periodically prevented from reaching the ILS laser 500 by turning a modulator 301 that periodically blocks and transmits the pumped laser beam. In particular, in Fig. 6, the modulator 301 includes a mechanical chopper. The mechanical chopper 30 is properly placed so that the beam E is modulated before it reaches the ILS laser 500. Although the modulator 300 can be advantageously placed before or after the beam change system 2000, according to a preferred embodiment of the present invention, the chopper system is appropriately placed in the beam change system 200. Within focus. Alternatively, the chopper 3o can be placed in front of the pumping laser 100. As depicted in FIG. 2, the chopper 3001 is appropriately installed in a frame 201 of the beam current changing device 200. Printed by the Central Bureau of Standards, Ministry of Economic Affairs, Shellfish Consumer Cooperatives *) It should be noticed that the chopper 301 can be replaced by any device that periodically blocks or modifies the pumping laser beam, such as machinery Or electro-optic. As described above, according to the present invention, the intensity of the pumping radiation emitted from the pumping laser 100 must be reduced only to a level below that required for the 1LS laser 500 to reach a critical value, and therefore, it is not necessary Reached zero. However, it is further noticed that during each modulation cycle, the total optical pumping energy (ie, integral intensity) transmitted by the pumping laser 100 to the ILS laser 500 must remain constant . For pulse mode or intermittent mode, the output of the ILS laser 500 containing the absorption information may be sampled periodically. Please refer to FIG. 2 again. According to the preferred embodiment of the present invention, the modulation assembly 300 includes a modulator 301 (provided with appropriate electronic circuit components) and a modulator 30 with a suitable paper Standards apply to Chinese National Standards (CNS) Λ4 specifications (210X 297 mm (--40) printed by Staff Consumer Cooperatives, Central Bureau of Standards, Ministry of Economic Affairs

Light example A7 B7 i, description of the invention (38: current electronic circuit components). The modulator 301 advantageously modulates the intensity of the output beam E from the pumping laser 100 and the lens 203, and the modulator 304 appropriately modulates the output beam of the ILS laser 500 leaving the chamber 400, This periodically samples the rotation of the ILS laser. Suitably, modulator 3o alternately blocks the pumping beam E to the ILS laser 500 gain medium (eg, crystal 507), while modulator 304 alternately blocks the ILS laser beam leaving the chamber 400 The stream arrives at the optical analyzer assembly 600 and the detector assembly. The chopper 3 01 is properly turned between an on and off position. The chopper 301 is suitably driven by a chopper driver connected to the chopper via the use of one or more appropriate electrical connections 302. When the driver 303 rotates the chopper 301 to the open position, the beam current reaches the ILS laser 500, thereby placing the ILS laser above a threshold value at which the laser operates. The ILS laser theft 500 continues to operate until the driver 303 rotates the chopper 301 to the off position, and then the chopper 300 effectively blocks the pumping beam E to the ILS laser 500. The output of the ILS laser 5 'exiting the chamber 400 is appropriately directed to the modulator 304. According to different features of the invention, the modulator class includes a one-voice modulator. It should be perceived, however, that other available devices, such as other mechanically operated choppers or even-shutter systems can be used appropriately for this purpose. As discussed above, quantitative information is to be extracted from the open beam of the U laser 5. The modulator 300 periodically samples the impurities (for example, the type of gas) contained in the specific sample. The output of the M laser that absorbs the data. (It will be noticed that the detector assembly 7000 can be turned on or off alternately without the use of a modulator. Periodically, take this paper-size towel and make it ^ T ^ NS) A4 size ((please first (Read the notes on the back and then fill out this page)

-41-Printed by the Central Industry Bureau of the Ministry of Economic Affairs, I Industrial Consumer Cooperative A7 _______B7 V. Description of Invention (39) The output of the ILS laser 500, as will be discussed more fully below. ) Although certain forms of modulation are variable, the use of modulation enables the generation of reproducible and effective optical path lengths within the laser 8. In other words, by changing the generation time (tg), that is, the time period during which mode competition in the ILS laser is allowed to occur, the effective absorption path length in the cavity resonator can be Controlled and selected to achieve the best quantitative application of the ILS gas detector 10. Advantageously, the modulation of the output of the laser 100 is advantageously synchronized with the modulation assembly 304 so that quantitative information from the ILS laser 500 can be extracted in an analysis time format. By passing the pumping beam E through the chopper 3 01, the pumping wheel ray e is efficiently transmitted to the ILS laser 500 intermittently. Intermittently transmitting radiation alternately causes the ILS laser 500 to be above and below the threshold. After the generation time, tg, elapses after the ILs Laser 500 reaches its critical value, the output of the ILS laser is biased by the modulator 304 to enter the optical analyzer assembly 600 and the detector assembly 〇〇〇 for testing. However, the output beam G of the ILS laser 500 is only biased to the optical 4 instrument assembly 600 and the detector assembly 700-a short time interval determined by the synchronization of the modulation assembly 30 i and 304. The synchronization of the modulators 301 and 304 ensures that the radiation from the ILS laser 500 is sampled within a well-defined time interval (tg). Synchronization of the modulator can be achieved by a number of conventional methods, such as, for example, through the electronics of a digital circuit (not shown) operated by a computer 802 operatively connected to the gas detection system. Controlled. Typically, the synchronization of the modulators 301 and 304 will be suitable to produce approximately less than about 3,000 to 5,000 microseconds. This paper size applies the Chinese National Standard (CNS) to the present standard (2 丨 〇χ 297)- -------- CD &quot; (Please read the notes on the back first # Fill this page) —M * Ji II ―I,》 -42- Printed by Zhengong Consumer Cooperative, Central Bureau of Standards, Ministry of Economic Affairs A7 ____B7 5. The invention description (4〇) (#ec) production time (tg), more preferably less than about 10 to 10 (^ ", and most preferably less than about 1 #ec. The synchronous generation The modulation assembly has a capacity of 300. The output from the laser 100 is continuously passed when the modulator 300 is turned off. When the output of the laser 100 is not changed, The time interval between the modulation assembly 300 interruption and when the modulator 304 is turned on is determined by and. The generation time 'tg' is under the condition that the modulator 300 is not used. The output of the pumping laser 100 can be pulsed and can be changed. As described above, making the pulse is equivalent to causing the pumping radiation to be at zero intensity during a duty cycle that can be changed Change to non-zero intensity value 'thereby making the ILS laser 500 alternately above and below the critical value. Accordingly, the ILS laser theft 500 is closed and opened. The 11: 8 laser The duration of the 500 laser generation can be changed by changing the duty cycle of the output of the pumping laser. In particular, the duration of the pumping laser pumping the ILS laser to a critical value According to this, the generation time (tg), that is, the time period within which the intra-cavity mode competition within the ILS laser is allowed to occur, is changed. In this case, the detector assembly 700 is still The ILS laser beam output material that continues to operate and leaves the room -400 is continuously reaching the photodetector assembly and the detector assembly. However, as described above, during each modulation cycle The total optical pumping energy or integral intensity transmitted by the pumping laser 100 to the ILS laser 500 must remain fixed, even if the duration of the light output from the ILS laser is changed. It must be fixed Total optical pumping energy, the intensity level of the pumping beam is at tg For each of the different modulation papers that have been changed, the paper rule ΑίδΛΙ national standard 4 *-(CNS specification (210X297)) 'II--1-«---I -'I-I-/ rlv ^ ( Please read the precautions on the back before filling this page) Ί --- Μ I Order 4 -43- Printed by A7 ^^^-___ B7 $ 、 发明 测 （4〇 ' ~~~-The period is adjusted accordingly. According to this, the intensity of the pumping beam current and the laser diode pumping laser 100 pumping the ILS laser 500 to a critical value ^ are changed 俾Provide different generation times. The pulse of the pumping laser 100 can be achieved by externally controlling the transmission of the pumping beam with a chirp pulse. Alternatively, if the pumping laser 100 is a diode laser, the output intensity of the diode laser pumping laser can be adjusted by changing the power supplied to the diode laser. (As described above, the power supplied to the diode laser pumped laser 100 can be modulated, and alternately obtained just above and below what is required to cause the ILS laser 500 to generate a laser ^ Voltage.) According to this, the gas detection system 10 of the present invention may include any of the following configurations, each of which enables the generation time to be changed: (1) The rotation of the pumping laser 100 can Chopped by an external chopper (eg, chopper 301) and the transmission of the detector 700 at the output from the ILS laser 500 to the detector is subject to a pulse generator (eg, a modulation Under the control of the transformer 304) can be continuously actuated to enable periodic sampling; (2) the output of the pumping laser 100 can be chopped by an external chopper (eg, chopper 301) and the The detector 700 can be agitated on and off to enable periodic sampling from the wheel of the ILS laser 500; (3) The output of the pumped laser 100 can be enabled by an external pulse generator Becomes a pulse and the detector 700 can be continuously operated, the output of the ILS laser 500 and the gas The duration of the interaction between the body types is caused by the nn nn n ^ i from the pumping laser that caused the ILS laser to produce lasers. (-Please read the precautions on the back before reading (Fill in this page) .-- __ I--| {II »11 D;, τ .1 This paper size is applicable to the Chinese storehouse standard (CNS) Λ4 specification (210X297 mm) -44- A7 B7 V. Description of the invention (42) Controlled by the duration of the rush; () In the case where the pumping laser 100 is a diode laser, the output of the unipolar laser is changed by changing the power supplied to the diode laser. The pulse can be made and the detector 700 can be continuously operated. The duration of the interaction between the output of the ILS laser 500 and the type of gas is from the diode that causes the ILS laser to generate a laser. The duration of the pulse of the laser is controlled; (5) In the case where the pumping laser 100 is a diode laser, the output of the polar laser is supplied to the diode laser by changing The power of the emitter can be cut and the detector 700 can be continuously operated to The transmission from the ILS laser 500 to the detector is controlled by a pulse generator (eg, the modulator 304) to enable periodic sampling; and (6) the pumping laser 100 is a diode In the case of a laser, the output of the monopole laser can be chopped by changing the power supplied to the diode laser and the detector 700 can be activated by being turned on and off. Periodic sampling of the output from the ILS laser 500. In the above embodiment of the gas detection system 10 of the present invention, the ILS laser 500 has a laser cavity formed by a three-sided mirror (ie, mirrors 501, 503, and 505), wherein The mirror 503 is a folding mirror. As mentioned above, this configuration of the three-sided mirror is designed to provide an astigmatic compensation or a substantially parallel beam in the area between the mirrors 503 and 505. Alternatively, the gas detection system 10 of the present invention may include an ILS laser 500 having a simplified laser cavity 5. In such another embodiment of the invention, the laser cavity 5 is not designed to provide astigmatism compensation. more

-45-Description of the invention (43) Α7 Β7 Economy, the Central Bureau of Standards, Consumer Cooperative Cooperatives, exactly 5 brothers, the laser cavity 5 can be formed between the two mirrors, and there is a The substantially linear configuration of discrete compensation. However, the linear cavity design used by such an alternative embodiment of the invention enables the gas detection system 10 to be constructed to be substantially smaller and simpler. Therefore, compared with the embodiments described above, the gas detection method of the present invention is more economical and easier to operate. In addition, this alternative embodiment of the present invention based on a linear laser cavity can be constructed to be more robust or mechanically stable for practical applications. The linear laser cavity system 'represents a laser cavity 5 which is equivalent to a laser cavity formed between only two mirrors. In its simplest form, a linear laser cavity comprises a laser cavity 5 formed between a first mirror and a second mirror. What will be perceived is that any number of additional mirrors that are planar can be included to manipulate the travel of a beam from the first mirror to the second mirror (ie, change the path). However, these additional mirrors include the beam shape unchanged in the laser cavity 5 (providing that the large distance between the first mirror and the second mirror is not changed). According to this, the inclusion of an extra-flat mirror in the laser cavity of a laser does not affect the operation of the laser, but only changes the form in which the laser is physically configured. Therefore, the laser cavity 5 'formed between the first mirror and a second mirror has an additional plane mirror therebetween, and the laser is formed separately between the first mirror and the second mirror. The cavities are equivalent; removing these additional plane mirrors does not change the shape of the beam nor the operation of the field emitter. However, the use of these additional plane mirrors can be used to mount a laser cavity 5 to—with space restrictions # in the package. • Θ 装 ί (Please read the notes on the back before filling this page) • I— 11--. -------Order —---- j, i HI (^ 1 · · Therefore this kind of By using the gas detection system 10 to detect the paper rule including this paper, S? ^ 7cNS) A4 specification (2! 〇Χ297 ^ ΐ7 ~--46- Printed by Aigong Consumer Cooperative, Central Bureau of Standards, Ministry of Economic Affairs Explanation of the invention (44) A device for the appearance and concentration of impurities in a gas sample of a corrosive gas has been disclosed. According to a preferred embodiment of the present invention, a high-sensitivity detection method is also disclosed here. The method is appropriate The ground includes the following steps: reducing the gas (heterogeneous substance) in the sample chamber 400 to an acceptable level; pumping the sample of the gas to be detected in the sample system 400A at or near a critical value to pump an ILS laser The sensor 500 is preferably periodically sampled from the ILS laser 500 by the modulation assembly 300. The optical sensor assembly 600- and the detector assembly 700 are measured at this position. The absorption spectrum of the gas (impurity) in the sample, and analysis of the absorption spectrum, identify the type of gas (impurity), and And the computer / software system 800 is used to determine its concentration in the sample. The method for detecting the occurrence of gas species in a gas sample containing corrosive gases requires a spectral range to be selected, wherein the radon gas species has at least An absorption feature and (ii) the corrosive gas does not have an interference absorption feature in nature. (As mentioned above, an interference absorption feature is equivalent to an absorption feature that overlaps the absorption feature used to identify the type of gas, so that Detection selectivity with corrosive gases is compromised.) According to the method of the present invention, a laser system comprising a laser cavity 5 and a gain medium 507 outputting light with a wavelength distribution is provided, At least part of the wavelength distribution is within the selected spectral range. The ILS laser 500 is contained in a sample chamber 400. A gas sample tank 406 with windows 400 and 405 is also provided The windows 404 and 405 are transparent in the selected spectral range so that a beam of light can pass through the gas sample slot. The gas sample slot 406 is inserted in the ILS Within the laser 500 so that the output light from the gain medium 507 passes through the gas sample before leaving the laser cavity 5 The paper size applies the Chinese National Standard (CNS) A4 specification (210X 297 mm) (Please read the (Please fill in this page again)

-47- A7 Printed by the Shellfish Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs ___V. Description of Invention (45) — '^ ~ product. The gas (impurities) in the sample chamber 400 is reduced to an acceptable level. A sample of the gas to be detected is placed in the gas sample cell 406. The ILS laser 500 is fed at or near a critical value and the optical output from the ILS laser 500 is sampled periodically, preferably through a 300-cycle variable assembly. The absorption spectrum of the gas (impurities) in the sample was measured with a photometer 600 and a detector assembly 700. The absorption spectrum is analyzed to identify the type of gas (impurity) and the computer / software system 800 is used to determine its concentration in the sample. More specifically, 'reducing the gas (impurities) in the chamber 400 (except for the gas sample tank 406) to an acceptable level may suitably include washing or emptying the sealable container 401 with the top cover 410 so that Degree of gas (impurity) 疋. Below the gas sample in the gas sample tank 406 to be detected. As mentioned earlier, other devices for reducing the level of gas (impurities) can be used 'provided that they can reduce the level of gas (impurities) to an acceptable level. Preferably, the container base 401 is sealed to the top cover 41 and the impurities contained therein are effectively removed (or reduced to an acceptable level). It is desirable that the base 401 and the top cover 410 are effectively sealed in a form that cannot be easily unsealed before being transferred to a user. A sample is properly connected to the gas sample tank 406 by connecting a gas line to the connectors 408, 409, and supplying the gas into the gas sample tank (for example, when the sample contains a corrosive or When reacting with gas). More specifically, pumping the ILS laser 500 at or near the critical value includes selecting the correct pump laser power 100, using the beam changer 2000 and the lens 206 in the laser crystal 507. Focusing conditions at the place, and the adjustment of the paper and thorn stab towel Guan Jiabiao (CNsTX4 specification (21GX297)) (Please read the precautions on the back before filling this page) ---: --j ------ -lilli—— Order— • HI nn m € t · ^ —. -48- Printed by A7 _______B7___, Shellfish Consumer Cooperative, Central Bureau of Standards, Ministry of Economic Affairs 5. Description of the invention (46) Modulation conditions of system 300. Use of the present invention The method for detecting the kind of gas further includes driving the ILS laser 500 at or near the critical value but above the critical value. According to the present invention, the driver 100 appropriately pumps the ILS laser 500. If necessary, pumping the beam The stream E is appropriately shaped by the beam forming device 200, which conforms to the optical requirements of the ILS laser 500. Furthermore, when the gas detection system 10 is operated in a pulse or intermittent mode, it is adjusted as described above. Transformer assembly, in particular, the modulator 30 丨 can cycle The ground beam E is interrupted to prevent the beam e from reaching the ILS laser 500. The beam F output from the self-modulator 301 and the beam shaping device 200 is appropriately directed to the ILS laser 500. According to this method When the beam F enters the chamber 400 through the window 402 placed in the wall of the sealed container body 401, the beam F is appropriately pointed at the ILS laser 1 § 500 ° additional focus and direction of the beam F The beam current f can be appropriately achieved when it passes from the window 402 to the focusing lens 206, where the focusing lens 206 appropriately focuses the beam current F and directs it through the mirror 501. The beam current F is appropriately pumped at or near a critical value. Crystal 507, and the output beam flooding system is properly pointed at the gas sample in the gas sample tank 406, and the exiting beam current, like from "Brother 5 03 and 5 05", contains the gas from ( Impurity) -like absorption data 'and then leave the gas chamber 400 through a window 403 which is appropriately placed in the wall of the sealed container body 40 01. Using the modulator 304' the ILS laser 500 can be in a pulse mode or Operates in an intermittent mode, the modulator 304 is properly connected to the modulator 301 synchronizes and periodically samples the output beam from the ILS laser and transmits the sampling wheel thus known to the optical analyzer assembly 600 and the detector assembly 700. The paper size is suitable ^-:-(read first (Notes on the back of Min Du, please fill out this page)

-49- Α7 Β7 V. Description of the Invention (47). Or 'in the case where the pumping laser 100 includes a diode laser', the power supplied to the diode laser's pumping laser can be modulated

I is synchronized with the modulator 304. Suitably, the mirror 601 directs the sampled output beam G from the ILS laser 500 to the photodetector assembly 600 and the detector assembly 700. Or 'without using the modulator 304, the detector assembly 700 can be turned on and off. Sampling the output from the ILS laser 500. The method for detecting a gas type of the present invention further includes analyzing an output beam g sampled from the ILS laser 500. Preferably, the optical analyzer assembly 600 is spectrally analyzed and the detector assembly 700 appropriately analyzes the beams sampled from the ILs 500. The optical analyzer assembly 600 appropriately spreads the beam G from the ILS laser 500 through the beam expansion device 600C, the diffraction devices 600A, 600B, and the focusing device 600D, as appropriate. The spectrally-analyzed ILS absorption data leaving the optical analyzer assembly 600 is suitably spatially shifted to be detected by a detector assembly 700 that includes &apos; for example, the multiplexer 701. What will be noticed is that 'the gas detection system i 0 and method of the present invention can be used to obtain water-like images in different wavelength ranges such as HC1 rotten gas or non-corruption gas such as N2 Absorption spectrum of vaporous impurities. In particular, Figures 7 and 8 show that the characteristics of water vapor in each environment (humorous or non-corrosive) can be obtained through the operation of the gas detection system 10. In particular, Figure 7 shows a graph of the normalized laser intensity / absorption versus wavelength for water in HC1 (Curve 900) and N2 (Curve 902) in the range of approximately 1433 to 1440 nm, while Figure 8 shows Similar graphs of normalized laser intensity / absorption versus wavelength for water in HC1 (curve 904) and N2 (curve 906) in a wavelength range of approximately 1420 to 1434 nm. The paper size is in accordance with China National Standard Net (CNS) M specifications (2) 〇 &gt; &lt; 297mm) (Please read the precautions on the back before filling this page),-°

T Printed by the Shellfish Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs -50- Printed by the Zhengong Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs A7 ______ B7______ 5. Description of the Invention (48) ~ The spectra shown in Figures 7 and 8 are based on The optical analyzer assembly 600 is obtained by measuring the output of the diode 701. As will be noticed, each data point depicts results from a different measurement. The information presented in the graphs shown in Figures 7 and 8 demonstrates that water can successfully be tested in argon chloride using the method of the present invention. In addition, these water absorption spectra are the same in appearance, regardless of whether the measurement is performed in hydrogen chloride or nitrogen, it proves that there is no spectral interference from hydrogen chloride, even if it occurs at very high concentrations (for example, a total atmospheric pressure). Knowing the relationship between strength and concentration, once the characteristic characteristics of the impurity, such as water vapor, are obtained, the concentration of the impurities contained in the sample can be obtained at any time. According to the present invention, the computer 802 can be appropriately programmed to interpret the data and provide an output showing the presence and / or concentration of impurities contained in the sample. Typical graphs of water absorption intensity versus water concentration in N2 gas obtained through the use of the present invention are shown in Figures 9 and 10. The &amp; gas water purification system is based on an infiltration unit and in-line purifiers in Figures 9 and 10, respectively. (It will be noticed that 'the absorption characteristics found in the spectral characteristics must be determined. Because intracavity laser spectroscopy provides enhanced sensitivity over conventional methods, weak transfers that have not been measured previously with the gas of the invention The detection system will become measurable for the first time. In these cases, these weak transfers can be used to identify spectral characteristics and prove the presence of gas species. These weak transfers can also be determined by the gas detection system 10, whereby So that the concentration of the gas species can be determined by the intensity corresponding to the absorption characteristics of these weak transfers.) This paper size applies the Chinese National Standard (CNS) A4 specification (210X 297 feet) -------- © ^ 1 — (Please read the notes on the back before filling out this page) Order --- — J .---------- ,, ----- -51-Staff Consumption of Central Standards Bureau, Ministry of Economic Affairs Cooperative printed A7 B7 V. Description of the invention (49) Although the present invention has been shown above to be used to obtain corrosive gases | like hci, [impurities in :, like water vapor lm, light i, for Familiar with itt: It will be obvious to people Other suitable impurities are corrosive or reactive gas and may also be used in the embodiment of the present invention. Examples of corrosive gases suitable for use with the present invention include, but are not limited to, the following: N20, NO, N02, HONO, HN02, so, S03, H2S04, Cl2, CIO, C1202, HOC, PH3, OCS, HI, HF, HBr., BC13, BC1, S02, BF3, Br2, I2, F2, 〇3, AsH3, NH3, SiH4, B2H4, HN03, HCN, HNC, H2S, COF2, and CH4 xXx 'where X is F Or Cl and x is equal to 1 to 4. Corrosive or reactive gases specifically disclosed herein, including those listed above, are not meant to be exhaustive; rather, other corrosive or reactive gases, when appropriate for the particular use under consideration Can be used. For example, the 30-hour rotten gas may include other corrosive gases used in the manufacture of semiconductor devices. In addition, it will be appreciated that the corrosive gas may comprise a combination of any number of corrosive gases such as those listed above. It will be further noticed that the type of gas to be detected may include, but is not limited to, one or more of the corrosive gases listed above. Those who are keen on this technique will perceive that the degree of detection obtained through the implementation of the present invention usually exceeds that which can be obtained through the ‘conventional device’. Furthermore, the gas detection system 10 can be used in-line and obtains rapid, near-instantaneous measurements of the presence and quantity of impurities contained in a particular corrosive sample, thereby solving many of the problems that occur with the use of conventional seismic settings. Install 丨 丨 (Please read the precautions on the back before filling in this page)

, 1T -52-

V. Description of the invention (50) 1 Disadvantages. In particular, the method of the present invention provides rapid, in-situ water vapor detection in a gas sample containing a corrosive gas to a degree that is not available in conventional techniques. It should be understood that the above description relates to preferred embodiments of the present invention, and that the present invention is not limited to the specific forms shown herein. Variations in the design and arrangement of the elements described herein can be made without departing from the scope of the invention as expressed in the scope of the appended patents. Furthermore, the application of the gas detection system 10 and the position of the ILs gas detector can be changed as desired in a semiconductor manufacturing apparatus, for example. For example, the specific configuration of the gas detection system 10 itself and the different components within the ILS chamber 400, when their configuration and configuration properly enable the ILS laser 500 in a-rapidly reproducible form The optical system can be changed when it is optically excited. These and other changes to the design, configuration, and application of the present invention that are now known and thereafter proposed by those skilled in the art are expected from the scope of the attached patent application. (Please read the precautions on the back before filling in this page) ------- ο Packing 1 Printed by the Central Standards Bureau of the Ministry of Economic Affairs, Bei Gong Xiao F Cooperative, printed on paper standards applicable to China National Standards (CNS) Λ4 specifications (210X297 (Mm) 1 ----! — II ------ 政 ------------ 1- I ί -53- A7 B7 V. Description of the invention (51) Component reference 200 ... Beam shaping device 201... Frame 202... Variable slot device 203... Focus lens 204... Adjustment lens 205... Variable slot device 206... Focus lens 207 ... Mounting 300 ... Beam modulation assembly 301 ... Modulator 302 ... Electrical connector 303 ... Driver 304 ... Modulator 400 ... Room assembly _ 4 0 0A ... Sample system 401 ... Container base Ministry of Economic Affairs Central Standards Bureau staff printing Cooperative print A ... pump laser system B ... ILS laser and chamber C ... spectrometer D ... detector And electronics F ... incident beam Η ... beam G ... beam E ... beam 1A ... gain medium 1B ... gain medium 1C ... gain medium 2 A. _ · mirror 2B. .. Diffraction Grating 2C ... High Reflector 3 A ... Mirror 3B ... Mirror 3C ... Partial Mirror 4 .. Cavity Absorber 5 .. Ray Cavity 10. Gas detection system 100. Laser pump 100. Laser driver (It is necessary to read the precautions on the back before filling this page) 402 .. Window 403 .. Window 404 .. Window 405 ... Window 406 ... Gas sample tank body 407 ... Gas sample tank holder This paper size applies Chinese National Standard (CNS) Λ4 specification (210X297 mm) -54- A7 B7 Central Ministry of Economic Affairs Standard Bureau employee consumer cooperative printed 600C ... Optical beam expansion device 600D ... Focusing lens assembly 601 ... Folding mirror 602 ... Lens mount 603 ... Lens 605 ... Lens 607. Diffraction grating 608 .. Mounting piece 609 .. Diffraction grating 610 .. Mounting piece 611 ... Lens 7 0 0 ... Detection benefit assembly 701 .. Multi-channel array detector 702 · · Mounting parts 7 0 3 ... Electronic board 704 ... BNC connector and shield_cable 8 0 0 ... Computer system 801 ··· Analog to digital converter 8 0 2 ... Computer (please first (Read the notes on the back and fill out this page)

V. Description of the invention (52) 408 ..... Input conduit 409... Output conduit 410... Cap 410A... Interstitial material 411... Input pipe 412... Output pipe 500... 1. S laser 500A ... cooling system 501 ... mirror 503 ... mirror 505 ... mirror 507 ... laser crystal 508 ... crystal holder 509 ... thermoelectric cooler 510 ... copper heat sink 5 11 ... Thermal sensor 512 .. Electrical temperature control interface 600 ... Photoharmonic device 600A ... Diffraction grating assembly 600B ... Diffraction grating total cost Paper size applies to Chinese National Standard (CNS) A4 specification (210X 297 mm)

Claims (1)

、 Application for Patent Scope No. 86105046 Application for Patent Scope Amendment Date of this revision: July 88 (Please read the note on the back. Please fill in this page before filling out this page) 1. A gas detection system (10). A method for detecting the presence of a gas species in a gas sample, which is a corrosive gas, to detect the presence of a gas species in a gas sample containing a corrosive gas. The method includes the following steps: (a) selecting a spectral range, where ⑴ The gas type has at least one absorption characteristic and (11) the humiliating gas does not have interference absorption characteristics in nature; (b) a laser device (500) is provided, and the laser device (500) includes a laser Cavity (5) and a gain medium (507) located therein, the gain medium (507) outputting light having a wavelength distribution, at least a part of the wavelength distribution is within the selected spectral range (C) providing a gas sample cell (406) having a transparent window for light in the selected spectral range so that a beam of light can Through the gas Sample slot (406) 9 * Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs (d) Insert the gas sample slot (406) into the laser (500) so that the medium from the enrichment (5) the output light passes through the gas sample before leaving the laser cavity; (e) a gas sample containing a corrosive gas is inserted into the gas sample slot (406) so that the gain medium (50) 7) The output light passes through the gas sample 'The gas sample is sealed in the gas sample tank (406) so that the corrosive gas does not react with the laser (500); and this paper size applies China National Standard (CNS) A4 (210 x 297 mm I -56- 、 Application for Patent Scope No. 86105046 Application for Patent Scope Amendment Date of this revision: July 88 (Please read the note on the back. Please fill in this page before filling out this page) 1. A gas detection system (10). A method for detecting the presence of a gas species in a gas sample, which is a corrosive gas, to detect the presence of a gas species in a gas sample containing a corrosive gas. The method includes the following steps: (a) selecting a spectral range, where ⑴ The gas type has at least one absorption characteristic and (11) the humiliating gas does not have interference absorption characteristics in nature; (b) a laser device (500) is provided, and the laser device (500) includes a laser Cavity (5) and a gain medium (507) located therein, the gain medium (507) outputting light having a wavelength distribution, at least a part of the wavelength distribution is within the selected spectral range (C) providing a gas sample cell (406) having a transparent window for light in the selected spectral range so that a beam of light can Through the gas Sample slot (406) 9 * Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs (d) Insert the gas sample slot (406) into the laser (500) so that the medium from the enrichment (5) the output light passes through the gas sample before leaving the laser cavity; (e) a gas sample containing a corrosive gas is inserted into the gas sample slot (406) so that the gain medium (50) 7) The output light passes through the gas sample 'The gas sample is sealed in the gas sample tank (406) so that the corrosive gas does not react with the laser (500); and this paper size applies China National Standard (CNS) A4 (210 x 297 mm I -56- Sixth, patent application scope Economy Zou Intellectual Property Bureau employee consumer cooperation Du printed clothing (f) After leaving the laser cavity (5), direct the light output from the gain medium (507) to a detector assembly (700) determine the appearance and / or concentration of the type of gas in the gas sample; ^ the gas detection system (10) contains: (a) the laser cavity (5); (b) existing in it Within the gain medium (507), the gain medium (507) outputs light having a wavelength distribution, at least a part of the wavelength distribution is in the spectral range; (c) is included in the laser (500) the gas sample tank; (d) a conduit (408,409) for inserting the gas sample containing the corrosive gas in the gas sample tank (406); and (e) for determining The presence and / or concentration of gas species in the gas sample is detected by the detector assembly (700), and the light output from the laser (500) is directed to the detector assembly (700). 2. The gas detection system (10) according to item 丨 of the patent application scope, wherein the gain medium (507) is pumped by a pumping laser (100), and the pumping laser (100) The system is selected from the group consisting of solid-state crystal lasers and two-pole chirped lasers. 3. The gas detection system (丨) as described in item 丨 of the patent application scope, wherein the laser cavity (5) is contained in a chamber (400), and the chamber (400) is Constructed to evacuate the type of gas to be detected. 4. The gas detection system (10) according to item 1 of the scope of patent application, wherein the gas sample is contained in the area of the laser cavity (5), which is compensated by astigmatism and reduced from the The size of the light output by the gain medium (507) applies to the Chinese paper standard (CNS) A4 (210 X 297 mm). I _1 ^ 1 · 1 · nna ^ i 'N * ^ ϋ nnn B— 0 nnnnn 1 I /-. Cftc (Please read the precautions on the back before filling this page) -57- A8 B8 C8 D8 6. The scope of patent application is scattered. 5. The gas detection system (10) as described in item 1 of the scope of the patent application, wherein the gain medium (507) includes an element including Cr: Tm: Ho: YAG, Cr4 +: YSO, Cr4 +: YAG, Cr4 +: YSAG , Er: GSGG, Er3 +: YLF, Er3 +: Yb3 +: Glass, Ho3 +: YSGG, Ho3 +: Tm3 +: LuAG, Tm3 +: Ho3 +: YLF, Tm3 +: Ho3 +: YAG, Tm3 +: Ca Y SOAP, Tm3 +: YLF, Tm3 +: Tb3 +: YLF, Tm3 +: glass, Tm3 +: Ca La SOAP, Tm3 +: YOS, Tm3 +: YSGG, Tm3 +: YAG, Yb3 +: YAG, Cr: forsterite, Er: Yb: glass, Co2 +: MgF2, Cr2 +: ZnSe, Laser crystal materials selected from the group of Cr2 +: ZnS / ZnSe / ZnTe, Ti3 +: A1203, and Ni2 +: BaLiF3. 6. The gas detection system (10) according to item 2 of the scope of patent application, wherein the pumping laser (100) has an output formed by a beam forming device (200), the beam forming device is from It is selected from the group consisting of diffraction optics, refractive optics, gradient indexing optics in which refractive index changes axially, gradient indexing optics in which refractive index changes radially, micro-optics, and combinations thereof. (Please read the notes on the back before filling out this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs This paper applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) -58-