TW397256U - A fastener for the wafer boat - Google Patents

A fastener for the wafer boat

Info

Publication number
TW397256U
TW397256U TW87213935U TW87213935U TW397256U TW 397256 U TW397256 U TW 397256U TW 87213935 U TW87213935 U TW 87213935U TW 87213935 U TW87213935 U TW 87213935U TW 397256 U TW397256 U TW 397256U
Authority
TW
Taiwan
Prior art keywords
fastener
wafer boat
boat
wafer
Prior art date
Application number
TW87213935U
Other languages
Chinese (zh)
Inventor
Hua-Shiang Liou
Shu-Li Duan
Original Assignee
United Microelectronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Microelectronics Corp filed Critical United Microelectronics Corp
Priority to TW87213935U priority Critical patent/TW397256U/en
Publication of TW397256U publication Critical patent/TW397256U/en

Links

TW87213935U 1998-08-25 1998-08-25 A fastener for the wafer boat TW397256U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW87213935U TW397256U (en) 1998-08-25 1998-08-25 A fastener for the wafer boat

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW87213935U TW397256U (en) 1998-08-25 1998-08-25 A fastener for the wafer boat

Publications (1)

Publication Number Publication Date
TW397256U true TW397256U (en) 2000-07-01

Family

ID=21635688

Family Applications (1)

Application Number Title Priority Date Filing Date
TW87213935U TW397256U (en) 1998-08-25 1998-08-25 A fastener for the wafer boat

Country Status (1)

Country Link
TW (1) TW397256U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111312625A (en) * 2020-02-27 2020-06-19 至微半导体(上海)有限公司 Groove body structure and method for preventing groove body structure from shaking and deviating
CN112885768A (en) * 2020-12-30 2021-06-01 华灿光电（浙江）有限公司 Epitaxial wafer carrier of etching baking equipment

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111312625A (en) * 2020-02-27 2020-06-19 至微半导体(上海)有限公司 Groove body structure and method for preventing groove body structure from shaking and deviating
CN112885768A (en) * 2020-12-30 2021-06-01 华灿光电（浙江）有限公司 Epitaxial wafer carrier of etching baking equipment
CN112885768B (en) * 2020-12-30 2023-10-13 华灿光电（浙江）有限公司 Epitaxial wafer carrier of etching baking equipment

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Legal Events

Date Code Title Description
GD4K Issue of patent certificate for granted utility model filed before june 30, 2004
MK4K Expiration of patent term of a granted utility model