TW395394U - Oblique sensing and anti-tumbling device for transportation of semi-conductor chips boat - Google Patents

Oblique sensing and anti-tumbling device for transportation of semi-conductor chips boat

Info

Publication number
TW395394U
TW395394U TW88203615U TW88203615U TW395394U TW 395394 U TW395394 U TW 395394U TW 88203615 U TW88203615 U TW 88203615U TW 88203615 U TW88203615 U TW 88203615U TW 395394 U TW395394 U TW 395394U
Authority
TW
Taiwan
Prior art keywords
boat
transportation
semi
conductor chips
tumbling device
Prior art date
Application number
TW88203615U
Other languages
Chinese (zh)
Inventor
Jiun-Rung Bai
Original Assignee
Taiwan Semiconductor Mfg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taiwan Semiconductor Mfg filed Critical Taiwan Semiconductor Mfg
Priority to TW88203615U priority Critical patent/TW395394U/en
Publication of TW395394U publication Critical patent/TW395394U/en

Links

TW88203615U 1999-03-10 1999-03-10 Oblique sensing and anti-tumbling device for transportation of semi-conductor chips boat TW395394U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW88203615U TW395394U (en) 1999-03-10 1999-03-10 Oblique sensing and anti-tumbling device for transportation of semi-conductor chips boat

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW88203615U TW395394U (en) 1999-03-10 1999-03-10 Oblique sensing and anti-tumbling device for transportation of semi-conductor chips boat

Publications (1)

Publication Number Publication Date
TW395394U true TW395394U (en) 2000-06-21

Family

ID=21645634

Family Applications (1)

Application Number Title Priority Date Filing Date
TW88203615U TW395394U (en) 1999-03-10 1999-03-10 Oblique sensing and anti-tumbling device for transportation of semi-conductor chips boat

Country Status (1)

Country Link
TW (1) TW395394U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112331584A (en) * 2020-10-14 2021-02-05 华虹半导体(无锡)有限公司 System and method for detecting position of vertical wafer boat

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112331584A (en) * 2020-10-14 2021-02-05 华虹半导体(无锡)有限公司 System and method for detecting position of vertical wafer boat
CN112331584B (en) * 2020-10-14 2022-07-19 华虹半导体(无锡)有限公司 System and method for detecting position of vertical wafer boat

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Legal Events

Date Code Title Description
GD4K Issue of patent certificate for granted utility model filed before june 30, 2004
MK4K Expiration of patent term of a granted utility model