A7 B7 五、發明説明（1 ) 本發明為1997年12月15日歸檔，序號第08/990,848 之部分連續。本發明係有關於脈衝電力系統*且特別是有 關於電氣放電雷射用之高脈衝率脈衝電力系統。 在典型的氣體放電雷射中，一增益媒體被二長形電極 間之電氣放電創立為循環氣體•非常高的電壓通常為啟動 放電所必需的，不過一旦放電開始，電漿被創立1其將該 等電極間的電阻降至幾乎為〇，有效地創立幾乎為短電 路。此需有方法來限制一旦放電已開始之電流。處理此二 課題之共同方法為與該等電極並聯地提供一「尖峰」電容 器（Cp)。該尖峰電容器定期地被啟動放電的電壓充電，但 —次脈衝僅有足夠電氣能量。在該等電極間被高電壓所創 立的幾乎短電路排出該尖峰電容器之能量，其中斷該脈 衝。在高脈衝率電氣放電雷射（例如每秒1,000脈衝）中， —氣體循環系統在該等電極間產生一氣體流（如1,000英 吋/秒），其在下一個脈衝前以新鮮的氣體替換由每一脈衝 結果所致之在該等電極間的離子化氣體。此下一個脈衝為 類似於前者在尖峰電容器上被另一個快速充電所產生•因 此，該脈衝電力系統之工作為在該尖峰電容器上以例如為 每秒1,000次的所要之脈衝率就一次脈衝提供足夠的電 壓與電氣能量》 在習知技藜之系統中，尖峰電容器使用高電壓開關來 使充電電容器Co充電，與使用如閘流管之高電壓開關將 充電電容器上之能量傳送至尖峰電容器，而由12-20KV之 DC電源被充電》其他習知技藜之脈衝電力系統使用磁力脈 請 先 閲 讀 背 面 之 注 項 寺 裝 訂 線 本紙張尺度通用中國國家栋準（CNS ) A4規格（210X297公釐） 經濟部中央橾準局貝工消費合作社印製 A7 B7 五、發明説明（2 ) 衝壓縮電路以提供所需的尖峰電容器之快速重覆高電壓’ 高能量充電。例子在美國專利第5, 448, 580號與第 5, 313, 481號被描述，其被納於此處做為參考*這些電路 通常運用多級之LC網路，其將相當長、相當低的電壓脈衝 轉變為所需的非常短之高電壓脈衝。 該習知技藝包括脈衝電力系統供應非常高電壓的短脈 衝用於如l,〇〇〇Hz範圍內之脈衝率的準分子雷射之工業用 氣體放電雷射。這些雷射需在許多週中每天24小時可靠地 作業，僅有關機時間以便日常維護。其有對提高可靠性之 脈衝電力系統的需求，其可在2,0 0 0Hz至5, 0 0 0Hz或更髙 範圍內的脈衝率下作業。 本發明提供一種高脈衝率脈衝電源用於以2,000Hz或 更大的比率供應受控制之高能量電氣脈衝。該電源包括一 脈衝產生電路，包括一充電電容器、一固態開關與一電流 限制感應器。在脈衝產生電路內被產生之脈衝在至少二個 脈衝壓縮電路內被壓縮，且一升壓脈衝變壓器將尖峰電壓 増加到至少12,000伏特。一個非常快速的調節後電源被提 供以在少於400微秒內將充電電容器充電，與一包括有程 式化後之處理器的脈衝控制系統控制該充電電容器之充 電，其精度達到在以每秒至少2, 000次充電之速度下為小 於百分之一· 本發明之較佳實施例對提供準分子雷射所需之電氣 脈衝為有用的，其以達到2, 000Hz或更高之脈衝率提供每 脈衝5. 5焦耳之脈衝。在此實施例中，一尖峰電容器在 本紙張尺度適用中國國家標準（CNS ) A4規格（210X：297公釐） m- —ϋ t In In i (請先閲讀背面之注意事項再i本頁) 訂 線 好Μ部中呔打苹而..iJ.T消於合竹ii印纪 A7 _____________B7_ 五、發明説明（3 ) 約100ns內以16,000伏特之範圍內由零電壓至放電電壓 被充電達到5.5焦耳。此乃實質上比習知技藝之設計快並 在雷射效率上提供重大的改良。此較快的升壓時間係使用 二級之脈衝壓縮與一個1:23之脈衝變壓器，以在該第一 級與第二級間具有一支四段之直不銹鋼桿作為輔助「捲 繞」而達成。在此較佳實施例中，每一脈衝之脈衝能量以 一回饋控制系統被控制，其中先前脈衝之能置被測量且該 等測量被用以為充電電容器決定控制電壓。此充電電容器 再使用調節後電源被充電至該控制電壓。極端迅速的精確 充電被提供，其中該充電電容器以每微秒約3伏特的速度 被充電到超過該控制脈衝幾伏特，然後經由一放電電路放 電至該控制電壓。 第1圖為本發明之一較佳實施例的方塊圓。 第2圖為上面較佳實施例之簡化電路圖。 第3圓為上面較佳實施例之一部分的高電壓電源之組 合方塊圖，電路圓· 第4圖為用於上面較佳實施例之脈衝變壓器的透視組 裝圖。 第5圖為用於上面較佳實施例之脈衝變壓器的主要捲 繞圓。 第6A，6B與6C圖為時間線圖顯示使用上面較佳實施 例之脈衝壓縮。 第7圖為提供雙極脈衝之簡化電路圖* 第8A與8B圖為顯示一可飽和感應器之二方向圖。A7 B7 V. Description of the Invention (1) The present invention was filed on December 15, 1997, and serial number 08 / 990,848 is continuous. The present invention relates to pulsed power systems * and, in particular, to high pulse rate pulsed power systems for electrical discharge lasers. In a typical gas discharge laser, a gain medium is created as a circulating gas by an electrical discharge between two long electrodes. Very high voltage is usually necessary to start the discharge, but once the discharge begins, the plasma is created. The resistance between these electrodes drops to almost zero, effectively creating almost a short circuit. There needs to be a way to limit the current once the discharge has started. A common approach to these two issues is to provide a "spike" capacitor (Cp) in parallel with the electrodes. This spike capacitor is periodically charged by the voltage that initiates discharge, but the pulse has only enough electrical energy. The almost short circuit created by the high voltage between the electrodes discharges the energy of the spike capacitor, which interrupts the pulse. In high-pulse-rate electrical discharge lasers (eg 1,000 pulses per second), a gas circulation system generates a gas flow (such as 1,000 inches / second) between the electrodes, which is replaced by fresh gas before the next pulse The result of each pulse is an ionized gas between the electrodes. This next pulse is similar to the former generated by another fast charge on the spike capacitor. Therefore, the operation of the pulse power system is to provide one pulse on the spike capacitor at a desired pulse rate of, for example, 1,000 times per second. Sufficient voltage and electrical energy "In the conventional system, the spike capacitor uses a high voltage switch to charge the charging capacitor Co, and uses a high voltage switch such as a thyristor to transfer the energy on the charging capacitor to the spike capacitor. The 12-20KV DC power supply is used for charging. The pulse power system of other conventional techniques uses magnetic pulses. Please read the note on the back. The binding size of this paper is the standard of China National Building Standard (CNS) A4 (210X297 mm). ) Printed by A7 B7, Shellfish Consumer Cooperative, Central Bureau of Standards, Ministry of Economic Affairs. 5. Description of the invention (2) The circuit is compressed to provide the required peak capacitors for fast repeating high-voltage 'high-energy charging. Examples are described in US Patent Nos. 5, 448, 580 and 5, 313, 481, which are incorporated herein by reference. * These circuits usually use multi-level LC networks, which will be quite long and low. The voltage pulse is transformed into the very short high voltage pulse required. This conventional technique involves supplying short pulses of very high voltage to a pulsed power system for industrial gas discharge lasers with an excimer laser having a pulse rate in the range of 1,000 Hz. These lasers need to be operated reliably 24 hours a day for many weeks, with only shutdown times for routine maintenance. There is a need for a pulsed power system for improved reliability, which can operate at pulse rates in the range of 2,000 Hz to 5,000 Hz or more. The present invention provides a high-pulse-rate pulse power supply for supplying a controlled high-energy electrical pulse at a rate of 2,000 Hz or more. The power supply includes a pulse generating circuit including a charging capacitor, a solid state switch, and a current limit inductor. The pulses generated in the pulse generating circuit are compressed in at least two pulse compression circuits, and a boost pulse transformer increases the peak voltage 増 to at least 12,000 volts. A very fast regulated power supply is provided to charge the charging capacitor in less than 400 microseconds, and a pulse control system including a stylized processor controls the charging of the charging capacitor with an accuracy of less than one second Less than one percent at a rate of at least 2,000 charges. The preferred embodiment of the present invention is useful for providing electrical pulses required for excimer lasers, which can achieve pulse rates of 2,000 Hz or higher. Provides a pulse of 5.5 joules per pulse. In this embodiment, a sharp-peak capacitor applies the Chinese National Standard (CNS) A4 specification (210X: 297 mm) at this paper size. M- —ϋ t In In i (Please read the precautions on the back before this page) In order to make a good line, the ministry beats Ping Er .. iJ.T disappears in Hezhu ii, Yinji A7 _____________B7_ 5. Description of the invention (3) It is charged from zero voltage to discharge voltage to 5.5 within about 100ns within a range of 16,000 volts joule. This is substantially faster than the design of conventional techniques and provides significant improvements in laser efficiency. This faster boost time uses a two-stage pulse compression and a 1:23 pulse transformer, with a four-section straight stainless steel rod between the first and second stages as an auxiliary "winding" and Reached. In this preferred embodiment, the pulse energy of each pulse is controlled by a feedback control system, wherein the previous pulse energy level is measured and these measurements are used to determine the control voltage for the charging capacitor. This charging capacitor is recharged to the control voltage after reconditioning. Extremely rapid accurate charging is provided, wherein the charging capacitor is charged at a rate of about 3 volts per microsecond to a few volts above the control pulse, and then discharged to the control voltage via a discharge circuit. FIG. 1 is a square circle according to a preferred embodiment of the present invention. FIG. 2 is a simplified circuit diagram of the above preferred embodiment. The third circle is a combined block diagram of the high-voltage power supply part of the above preferred embodiment, and the circuit circle. Figure 4 is a perspective assembly diagram of the pulse transformer used in the above preferred embodiment. Fig. 5 is the main winding circle of the pulse transformer used in the above preferred embodiment. Figures 6A, 6B, and 6C are timeline diagrams showing pulse compression using the preferred embodiment above. Figure 7 is a simplified circuit diagram for providing bipolar pulses. Figures 8A and 8B are two directional diagrams showing a saturable sensor.
本紙張尺度通用中國固家標準（CNS ) A4規格（2丨0><297公釐） ------λ-----裝------訂--„---Γ--線 (诗先閲讀背面之注意事項再本頁) 經濟部中央梯準局員工消费合作社印製 A7 B7 五、發明説明（4 ) 第9圖顯示一共振電源之電路圖。 第10A與10B圖顯示在一較佳實施例中壓縮導線之安 裝。 本發明之較佳實施例可參照各該等圖被描述· 本發明之一第一實施例，其為工業用窄頻帶KrF準 分子雷射所用之脈衝電力系統，其以方塊圖形式被顯示於 第1圇·此較佳實施例之簡化組合圖與電路圖被顯示於第 2圖•該等圓顯示一較佳實施例由申請人構建及測試，用 於在該準分子雷射之尖峰電容器上以2, OOOHz或更高範圍 之脈衝率，將20 8伏特之三相標準工廠交流電0. 5焦耳轉 變為6焦耳，12Kv至22Kv電氣脈衝。系統之描述首先在 下面被提供，隨後有該系統之各別模組與元件的某些重要 細部之更詳細的描述。 此較佳實施例以第1圓與第2圖所示地被製造成四個 分別的模組，其每一個為準分子雷射系統之重要部分且每 一個在普通預防維修計畫的過程中可於零件故障的事件 中快速地被更換•這些模組由申請人指定為：高電壓電源 模組20、整流子模組40、壓縮頭模組60與雷射室摸組80。 高電壓電源模組20包含一 300伏特整流器22用於將 電源10來之208伏特三相工廠電力轉變成300伏特DC* 反相器24將整流器22之輸出轉變成ΙΟΟΚΗζ至200KHz範 圍內之高頻率300伏特脈衝。反相器24之頻率與接通期間 被HV電源控制板21控制以提供系統之最終脈衝能量的過 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） I„ „--1---„--裝------訂丨一---,--線 (請先閱讀背面之注$項再Ϊ本頁) 結沪部屮头榀率=?·-=ί.τ.消抡合作.M卬纪 A7 ______________E__ 五、發明説明（5 ) 程調節。反相器24之輸出在升壓變壓器26升壓至約1200 伏特。變壓器26之輸出被整流器28轉變成1, 200伏特， 其包括一標準橋整流器電路30與一濾波電容器32。由電 路30來之DC電氣能量如第1圖中顯示地控制反相器24之 HV電源控制板21所指導地使整流子模組40內之8. 1 yF Co 充電電容器42充電，HV電源控制板21內之設定點被雷射 系統控制板100設定。 讀者必須注意到在第1圖中所顯示之實施例，雷射系 統所用之電源能量控制係由電源模組20所提供。在整流子 40與壓縮頭60內之電氣電路係用來放大及壓縮由電源模 組20儲存在充電電容器42上之電氣能量。做為此控制之 例子下，第1圖指示出控制板100已控制電源以提供700 伏特至充電電容器，其在充電週期之際被固態開關46由下 游的電路中加以隔離出來· 整流子模組40包含Co充電電容器42,其在此實施例 中為電容器之排組以並聯被連接以提供總共8. lj«f之電 容。電壓分割器44提供回饋電壓信號至HV電源控制板 21，其被電源控制板21使用以限制電容器42之充電至該 電壓（稱之為「控制電壓」）’其在形成為電氣脈衝及在整 流子40與壓縮頭60內被壓縮與放大時會在尖峰電容器上 產生所要的放電電壓通過電極83與84。 在此實施例中（被設計來以每秒2, 000脈衝之脈衝率 在3焦耳.之範圍內與14,000伏特提供電氣脈衝）’電源20 大約需有.250微秒（如第6A圖所示）來使充電電容器42充The paper size is in accordance with the China Solid Standard (CNS) A4 specification (2 丨 0 > < 297 mm) ------ λ ----- installation ------ order-„--- Γ--line (Notes on the back of the poem first, then this page) Printed by the Consumers Cooperative of the Central Ladder Bureau of the Ministry of Economic Affairs A7 B7 V. Description of Invention (4) Figure 9 shows the circuit diagram of a resonant power supply. 10A and 10B The drawing shows the installation of a compressed wire in a preferred embodiment. The preferred embodiment of the present invention can be described with reference to these drawings. One of the first embodiments of the present invention is an industrial narrowband KrF excimer laser The impulse power system used is shown in block diagram form 1 囵. The simplified combination diagram and circuit diagram of this preferred embodiment are shown in figure 2. The circles show a preferred embodiment constructed by the applicant and Test for converting a 20-volt three-phase standard factory alternating current of 0.58 Joules into 6 Joules and 12Kv to 22Kv electrical pulses on the excimer laser peak capacitor with a pulse rate in the range of 2,000 Hz or higher. The description of the system is first provided below, followed by some weights of the various modules and components of the system A more detailed description of the details. This preferred embodiment is manufactured as shown in the first circle and the second figure into four separate modules, each of which is an important part of the excimer laser system and each is in the ordinary Preventive maintenance programs can be quickly replaced in the event of a component failure. • These modules are designated by the applicant as: high voltage power module 20, commutator module 40, compression head module 60 and laser chamber. Touch group 80. The high-voltage power module 20 includes a 300-volt rectifier 22 for converting the 208-volt three-phase factory power from the power source 10 into a 300-volt DC * inverter 24 to convert the output of the rectifier 22 into a range of 100KHz to 200KHz. High frequency 300 volt pulse within. The frequency and inverter period of inverter 24 is controlled by HV power control board 21 to provide the final pulse energy of the system. The paper size is applicable to Chinese National Standard (CNS) A4 specification (210X297 mm) ） I „„ --1 --- „-install ------ order 丨 一 ---,-(please read the note on the back before reading this page) Rate =? ·-= Ί.τ.elimination cooperation.M 卬 纪 A7 ______________E__ 5. Description of the invention (5) Regulation. The output of the inverter 24 is boosted to about 1200 volts by the boost transformer 26. The output of the transformer 26 is converted to 1,200 volts by the rectifier 28 and includes a standard bridge rectifier circuit 30 and a filter capacitor 32. The DC electrical energy from the circuit 30 controls the inverter 24's HV power control board 21 as shown in FIG. 1 to charge the 8.1 yF Co charging capacitor 42 in the rectifier module 40, and the HV power control The set point in the board 21 is set by the laser system control board 100. The reader must note that in the embodiment shown in FIG. 1, the power control of the power used by the laser system is provided by the power module 20. The electrical circuits in the commutator 40 and the compression head 60 are used to amplify and compress the electrical energy stored in the charging capacitor 42 by the power module 20. As an example of this control, the first figure indicates that the control board 100 has controlled the power supply to provide 700 volts to the charging capacitor, which is isolated by the solid-state switch 46 from the downstream circuit during the charging cycle. Rectifier module Lj «f 的 量。 40 includes Co charging capacitor 42, which in this embodiment is a bank of capacitors connected in parallel to provide a total of 8. lj« f of capacitance. The voltage divider 44 provides a feedback voltage signal to the HV power control board 21, which is used by the power control board 21 to limit the charging of the capacitor 42 to this voltage (referred to as a "control voltage"). When the sub 40 and the compression head 60 are compressed and amplified, a desired discharge voltage is generated on the peak capacitor through the electrodes 83 and 84. In this embodiment (designed to provide electrical pulses with 14,000 volts at a pulse rate of 2,000 pulses per second in the range of 3 Joules), the power supply 20 requires approximately .250 microseconds (as shown in Figure 6A). (Shown) to charge the charging capacitor 42
本紙張尺度通州肀國國家標準（CNS ) A4規格（210X297公釐） L--.--1-----裝------訂--„---^--線 (靖先閲讀背面之注意事項#,¾本頁) A7 B7 五、發明説明（6 ) ' 電至700伏特。因此，當由整流子控制板41來之信號關閉 固態開關44時，充電電容器42以所需的電壓被完全地充 電及穩定，其啟動將儲存在充電電容器之3焦耳電氣能量 轉變成通過電極83與84之14, 000伏特放電的非常快之步 驟。就此實施例而言，固態開關46為一種IGBT開關，雖 然其他如SCR，GTO，MCT等之其他開關技術可被使用。一 個60 OnH充電感應器48與固態開關46成串聯而在開關46 關閉以使Co充電電容器42放電時暫時限制流過開關46之 電流。 就第一級脈衝產生50而言，在充電電容器42上之充 電如第6B圖顯示地因而在5#s內使Ci 8.5；wf電容器接 通。 可飽和感應器54使電容器52上之電壓關閉而變成飽 和的，以如第6C圖所示地就第一級壓縮讓電容器52來之 電壓在大約55 0fts之傳送時間期間內經由1:23之升壓脈衝 變壓器56傳送至Cp-i電容器62。 經沪部中戎打^->(ο··=:.τίή·抡合作杉印父 ---.----I I 裝-- (請先閲讀背面之注意本頁) 線 脈衝變壓器56之設計在下面被描述。就績效方面而 言，此變壓器為極端有效率之脈衝變壓器，將700伏特 1 7,500安培550ns的脈衝率變換為16,100伏特，760安培 550ns脈衝，其在非常短暫地被儲存在壓縮頭模組60內之 Cp-!電容器排組62內》 -個U-1可飽和感應器64(具有大約125ηΗ飽和電感） 使16. SnFCp-i電容器排組62上之電壓關閉約550ns，然後 讓CP l上之充電流入（在約100ns內）位於雷射室80之頂端This paper is standard Tongzhou Lao National Standard (CNS) A4 (210X297 mm) L --.-- 1 ----- installation ------ order-„--- ^-line (jing First read the note on the back #, ¾ page) A7 B7 V. Description of the invention (6) 'Electricity to 700 volts. Therefore, when the solid-state switch 44 is turned off by the signal from the commutator control board 41, the charging capacitor 42 is used as The required voltage is fully charged and stabilized, and its activation converts the 3 Joules of electrical energy stored in the charging capacitor into a very fast step of discharging through the electrodes 83 and 84,000 volts. For this embodiment, the solid state switch 46 It is an IGBT switch, although other switching technologies such as SCR, GTO, MCT, etc. can be used. A 60 OnH charge sensor 48 is connected in series with the solid state switch 46 and temporarily limited when the switch 46 is closed to discharge the Co charging capacitor 42 The current flowing through the switch 46. As far as the first-stage pulse generation 50 is concerned, the charging on the charging capacitor 42 causes Ci 8.5; the wf capacitor to be switched on within 5 # s as shown in FIG. 6B. Saturable inductor 54 The voltage on capacitor 52 is turned off and becomes saturated, as shown in FIG. 6C For the first stage compression, the voltage from the capacitor 52 is transmitted to the Cp-i capacitor 62 via the 1:23 boost pulse transformer 56 within a transmission time of about 55 0 fts. Via the Ministry of Shanghai, China Rongda ^-> (ο ·· = :. τίή · 抡 Cooperation Sugiyuki ---.---- II installation-(Please read the note on the back first) The design of the line pulse transformer 56 is described below. In terms of performance This transformer is an extremely efficient pulse transformer. It converts 700 volts at 17,500 amps and 550 ns pulse rate to 16,100 volts and 760 amps at 550 ns pulse. It is stored in the compression head module 60 for a short time. Within bank 62 "-A U-1 saturable inductor 64 (with a saturation inductance of about 125η）) turns off the voltage on the 16. SnFCp-i capacitor bank 62 for about 550ns, and then allows the charge on CP l to flow in (about Within 100ns) Located at the top of the laser chamber 80
本紙張尺度適/fl中國國家標率（CNS ) Α4規格（210X297公釐） 經濟部中央標準局貝工消費合作社印製 A7 B7 五、發明説明（7 ) 的16. 5nFCp尖峰電容器82,其與電極83及84成並聯地 被連接。此由55 0ns長之脈衝轉變為l〇〇ns長之脈衝以使 Cp尖峰電容器82的充電形成如第1圚在65所示的第二級 與最後壓縮* 在充電開始流入安裝於雷射室模組並形成其一部分之 尖峰電容器82後的約10 0ns，在尖峰電容器82上之電壓 已達到約14,000伏特且電極間之放電開始·此放電持續約 5 0ns，在此時雷射於準分子雷射之共振室內發生•此共振 室被線狹窄包裝86界定，其在此例中由一 3稜鏡光束擴大 器、一調變鏡與一中階梯光柵組成且一輸出耦合器88在此 例中包含一個10%的R鏡。此雷射之雷射脈衝為窄頻帶之 2〇1^24811111約1〇111：[之脈衝且重覆率為每秒2,000脈衝。該 等脈衝定義一雷射光束90且此光束之脈衝被光電二極管 92所監控。 由光電二極管92來之信號被傳輸至控制板100內之處 理器102,且該處理器使用此能量信號及較佳地其他歷史 性脈衝能量資料來為下一個與（或）未來的脈衝設定命令電 壓*在較佳實施例中該雷射在一系列短猝發（如在2, 000Hz 〇. 5秒猝發100脈衝被約0.1秒之空檔時間分開）作業，控 制板100中之處理器102以特殊的運算法則被程式化，其 使用最近的脈衝能量信號與在猝發之所#先前脈衝的能量 信號及其他的歷史性脈衝剖面資料來為後續的脈衝選擇控 制電壓，以使脈衝至脈衝的能量變異最小，亦使猝發至猝 發的能量差異最小。此計算被控制板100內之處理器102 ^_ -10- 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） (請先閲讀背面之注意事項再t本頁) II--裝·This paper is suitable / fl China National Standards (CNS) A4 specification (210X297 mm) Printed by A7 B7, Shellfish Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 5. Description of the invention (7) 16. 5nFCp spike capacitor 82, which is similar to The electrodes 83 and 84 are connected in parallel. This changes from a pulse of 55 ns long to a pulse of 100 ns long, so that the charge of the Cp spike capacitor 82 forms the second stage and the final compression as shown in Figure 1 at 65. * At the beginning of charging, it flows into the laser chamber. About 100 ns after the module and forming part of the peak capacitor 82, the voltage on the peak capacitor 82 has reached about 14,000 volts and the discharge between the electrodes begins. This discharge lasts about 50 ns, at which time the laser is excimated on the excimer Occurs in a laser resonance chamber • This resonance chamber is defined by a narrow line package 86, which in this example consists of a 3 稜鏡 beam expander, a modulating mirror, and a mid-step grating and an output coupler 88 in this example Contains a 10% R mirror. The laser pulse of this laser is a narrow band of 211 ^ 24811111 and about 10111: [pulse and the repetition rate is 2,000 pulses per second. These pulses define a laser beam 90 and the pulses of this beam are monitored by a photodiode 92. The signal from the photodiode 92 is transmitted to the processor 102 in the control board 100, and the processor uses this energy signal and preferably other historical pulse energy data to set commands for the next and / or future pulses Voltage * In the preferred embodiment, the laser operates in a series of short bursts (eg, a burst of 100 pulses at 0.5 Hz at 0.5 seconds and a gap time of about 0.1 seconds). The processor 102 in the control board 100 A special algorithm is programmed that uses the most recent pulse energy signal and the energy signal of the previous pulse in the burst # and other historical pulse profile data to select a control voltage for subsequent pulses so that the pulse-to-pulse energy Minimal variation also minimizes the energy difference from burst to burst. This calculation is performed by the processor 102 in the control board 100. ^ _ -10- This paper size applies to the Chinese National Standard (CNS) A4 specification (210X297 mm) (Please read the precautions on the back before t this page) II--install ·
.1T .—r -線· A7 __ B7 五、發明説明（8 ) ， 使用此運算法則在約3.5#s的期間之際被賨施。該雷射脈 衝於第6C圓之IGBT開關46之To擊發後5//s發生，且約 需有20/zs來收集該雷射脈衝能量資料（開關46之擊發的 開始被稱為To)。因此，新的控制電壓值就先前的脈衝（在 2, OOQHz時擊發期間為5 0 0 VS)於IGBT開關46擊發後約70 微秒為準備好的（如第6A圖所示）。此運算法則之特點在美 國專利申請案序號第0 9/0 34, 8 70號有更詳細的描述，其被 納於此處做為參考。 此較佳實施例被提供電子電路，其由先前的電源恢復 在充電電容器42上的超額能量，此實質地減少能量浪費並 在雷射室80振鈴後實際地消失。 此被能量恢復電路57完成，其由能量恢復感應器58 與能量恢復二極體59組成，此二個成串聯組合再以並聯通 過Co充電電容器42被連接。由於該脈衝電力系統之阻抗 未正確地符合該室者，且由於該室阻抗在脈衝放電之際於 其幅度有數個階的變化，一負的進行「反射」由主脈衝被 產生，其朝該脈衝產生系統之前端後退地傳播•在超額能 量經由壓縮頭60與整流子40已向後傳播•開關46因控制 器之擊發信號的去除而開啟。能量恢復電路57使該反射之 極性逆轉，其如在感應器58被二極體59對電流逆轉加以 箝位般地經由共振自由回轉（由充電電容器42與能量恢復 感應器58組成之L-C電路的振鈴之一半週期）在充電電容 器42上產生負電壓。其淨結果為由室80被反射能量的實 質全部由每一脈衝被恢復且在充電電容器42被儲存為正 本紙張尺度適川中國國家標準（CNS ) A4規格（210X297公釐） -------1------裝------訂--.--.--線 (請先閲讀背面之注項再本頁) A7 B7 五、發明説明（9 ) 壓充電而備於由下一個脈衝所運用•第6圖為一時間線 圖，顯示在電容器Co，^，Cp-i與Cp上之充電•此圖顯示 在Co上能量恢復之過程· 為了完整地運用在可飽和感應器中所用磁性材料之完 全的B-H曲線搖擺，一 DC偏壓電流被提供，使得每一感應 器在一脈衝被啟動時被開關46之關閉逆向地飽和· 在整流子可飽和感應器48與54的情形中，此係藉由 •提供大約15A之偏壓電流向後（相對於一般脈衝電流）流動 通過該等感應器而完成。此偏壓電流係被通過隔離感應器 Lbl的偏壓電流來源12Q所提供。真實的電流流動由電源 通過整流子之接地連接、通過脈衝變壓器之主要捲繞、通 過可飽和感應器54、通過可飽和感應器48及通過隔離感 應器Lbl，如箭頭B1所指示地向後運行至偏壓電流來源 120。 在壓縮頭可飽和感應器的情形中，大約為5A之偏壓電 流B2由第二偏壓電流來源126通過隔離感應器Lb2被提 供。在壓縮頭處，該電流分裂且主要部分B2-1通過可飽和 感應器LPl 64且後退通過隔離感應器Lb3而後退至第二偏 壓電流來源126。較小部分之電流B2-2運行後退通過連接 壓縮頭60與整流子之HV電纜、通過至接地之脈衝變壓器 輔助捲繞、且通過一偏壓電阻器回到第二偏壓電流來源 126。此第二較小電流被使用來使該脈衝變壓器偏壓使得其 就脈衝作業被重置。分裂為二支之電流的數置被每一路徑 之電阻所決定，且特意地被調整使得每一路徑接收到正確 -12- 本紙張尺度適用中國國家標率（CNS ) A4規格（210X297公釐） 請先閏讀背面之注意事項再 •本頁) 裝· 訂 線 A7 B7 五、發明説明（10 ) 數量的偏壓電流。 在此實施例中，吾人稱由工廠電源10至電極及至電極 84後之接地的通過該系統之脈衝能量流動為「前進流動」 且此方向為前進方向。當吾人稱例如為可飽和感應器之電 氣元件為前進傳導，吾人意即其在朝向該等電極之方向被 偏壓成為飽和以傳導「脈衝能量」。當其為逆向傳導時， 其被偏壓成為飽和以在離開電極朝向充電電容器之方向傳 導能量。電流（或電子流）通過該系統流動的實際方向視你 是在系統內何處而定•電流流動的方向現在被解釋，以消 除混淆的可能來源。 在此較佳實施例中，Co被充電（例如為）正700伏特， 使得當開關46為關閉時電流以朝向Ci電容器52 (此意即電 子實際上以逆轉方向流動）之方向由電容器42通過電容器 42流動。類似地，電流是由C!電容器52通過脈衝變壓器 56之主要側邊朝向接地流動•因此•電流與脈衝能童之方 向相同，是由充電電容器42向脈衝變壓器56·就如下面 解釋的，在說明「脈衝變壓器」之段落中，在脈衝變壓器 56之主要迴圈與輔助迴圈二者之電流流動均朝向接地。其 結果為在脈衝變壓器56與電極間之電流流動於放電之際 是依離開電極朝向變壓器56之方向•因此在放電之際的電 子流動方向是由接地通過脈衝變壓器56之輔助側邊暫時 地到CP-i電容器62上通過感應器64，暫時地到Cp電容器 82上，通過感應器81，通過電極84(其為放霉陰極）通過 放電電漿，，通過電極83且回到接地。因此，在脈衝變壓器 -13- 本紙張尺度適州中國國家捸準（CNS ) A4規格（210X297公釐） ' -----1--1 — 装------tr——r--.--0 (請先閲讀背面之注f項再本頁) A7 __ ___B7_ 五、發明説明（11 ) 36之間，電流於放電之際以與脈衝能量相同之方向流動。 立刻地，隨後的放電電流與電子流動如上面解釋地被 逆轉，且特殊的提供已在此實施例被做成，以如在上面說 明「能量恢復」之段落所解釋般地處理逆轉的電流流動》 本較佳實施例之電源部分的更詳細之電路圖被顯示於 第3圖。就如第3圖所示者，整流器22為一提供脈衝相位 控制的整流器，具有正150V至-150 VDC的輸出。反相器24 實際上為三個反相器24A，24B與24C。反相器24B與24C 在8yFCo充電電容器42比命令電壓小50伏特時被關掉， 且反相器24A在Co42之電壓稍微超過命令電壓時被關掉。 此程序在靠近充電結束時降低充電率。升壓變壓器26A， 26B與26C每一個均為7KW之級數且將電壓轉變為1,200 伏特AC。 三個橋整流器30A，3GB與3QC被顯示。HV電源控制 板21將12位元之數位命令轉換為類比信號且將之與由Co 電壓監視器44來之回饋信號45。當回饋電壓超過命令電 壓時，反相器24A如上面討論般地被關掉> Q2開關關閉以 驅散儲存在電源內之能量，Q3隔離開關36開啟以防止任 何額外的能量離開電源且Q1放電開關38關閉以釋放Co 42 上之電壓下降至Co等於命令電壓為止。Q1在此時開啟》 整流子40與壓縮頭6 0之主要元件被顯示於第1與2 圓，且在上面以有關於系統之作業被討論。在此段落吾人 描述整流子之製作細節。 固態開關46為一種P/N CM 1 0 0 0 HA-28H IGBT開關， -14 — (請先閲讀背面之注項再'本頁) -裝· 訂 -線 本紙張尺度通州中國國家標準（CNS ) A4規格（210X297公釐） 一 經沪部中^"-^^::=:^消抡合作^"^ A7 __ _B7__ 五、發明説明（12 ) 彳 由Powerex公司在賓州Youngwood的辦公室所提供· 變壓器48，54與64為類似於美國專利第5, 448, 580 號與第5, 315, 611號所描述之可飽和感應器。可飽和感應 器64之頂端與斷面圖分別在第8A與8B圖中被顯示。然 而，在此實施例之該等感應器中，電通排除金屬件301， 302，303與304如第8B圔顯示地被加在一起以減少在該 等感應器內之電逋洩漏•這些電通排除件在飽和之前實質 地減少通過感應器之電流流動且大大地改進系統內該感應 器之脈衝形成績效。此電流作成四個迴路通過垂直的導 體。其進入305處而在一個中央有“Γ標示之大直徑導體 向下運行，並在周圍亦以“1”標示之六個較小的導體向上 運行。其他的迴路被類似地編號並在306處離開•其有由 電通排除金靥本身形成之額外的等值匝，且為五匝感應器 之第三匝。此具有之好處在於該電通排除金屬元件之電壓 被維持在全電壓之一半，而允許在該電通排除金屬零件與 其他匝之金屬桿間的安全釋抑間隔減小· 電容器排組42, 52與62均由以並聯連接之現有存貨 的電容器排組組成。這些電容器可由如Murata之供應商在 喬治亞州Smyrna辦公室取得。申請人之連接電容器與感應 器的較佳方法為在特殊的印刷電路板之具有鎳鍍銅導線者 以類似於美國專利第5, 448, 580號之方式用螺絲在正負接 頭將之連接。 脈衝變壓器56亦類似於美國專利第5, 448, 580號與第 5, 313, 481號所描述的脈衝變壓器；然而，本實施例之脈 -15- 本紙張尺度適州中國國家榇準（CNS ) A4規格（210X297公釐） —^iT線 (諳先聞讀背面之注f項再 本頁) 好？5;-部中头«.卒^,-=:.1.消卟合作私卬1·! A7 __ ___B7_ 五、發明説明（13 ) ' 衝變論器在輔助捲繞僅具有單一匝及23主要捲繞。脈衝變 壓器56之圖被顯示於第4圖· 23主要捲繞之每一包含一 鋁線圈56A具有二凸緣（每一個具有扁平邊緣及螺紋孔）， 其以螺絲被鎖至第4圖顯示之底部邊緣的印刷電壓板56B 的正負接頭。絕緣器56C將每一線圈之正接頭由相鄰線圓 的負接頭加以分開。在線圈凸緣間為一中空圓筒，為1/16 英吋長，有〇. 87501)，壁厚度為約1/32英吋*該線圈被包 以 1 英吋寬，0. 7mil 厚之 MetglasTM2605 S3A 與 0. lmil 厚 之聚酯薄膜，直至絕緣之MetglasTM包繞之OD為2. 24英 吋為止。形成一主要捲繞之單一包繞的線圈透視圖被顯示 於第5圖。 該變壓器之輔助部分為一單一 OD不銹網桿被安裝於 電氣玻璃做成之緊密配裝的絕緣管內。其捲繞在第4圓為 成四段。第4圖中之56D所示的不銹網輔助部分在印刷電 路板56B之接地導線56E被接地，且高電壓接頭被顯示於 5 6F。如上面指出者，該主要捲繞之+與一接頭間的700伏 特脈衝會在接頭5 6F於輔助側邊產生負16, 100伏特脈衝· 此設計提供非常低之洩漏電感而允許極端快速的輸出上升 時間。 ..1T .—r -line · A7 __ B7 V. Description of the invention (8), this algorithm is used during the period of about 3.5 # s. The laser pulse occurred 5 // s after the To firing of the IGBT switch 46 in the 6C circle, and about 20 / zs was needed to collect the laser pulse energy data (the start of firing of the switch 46 is called To). Therefore, the new control voltage value is prepared based on the previous pulse (50 VS during firing at OOQHz) about 70 microseconds after firing of the IGBT switch 46 (as shown in Figure 6A). The characteristics of this algorithm are described in more detail in US Patent Application Serial Nos. 0 9/0 34, 8 70, which are incorporated herein by reference. This preferred embodiment is provided with an electronic circuit that recovers the excess energy on the charging capacitor 42 from the previous power source, which substantially reduces energy waste and virtually disappears after the laser chamber 80 rings. This is completed by an energy recovery circuit 57 which is composed of an energy recovery sensor 58 and an energy recovery diode 59, which are combined in series and then connected in parallel through a Co charging capacitor 42. Because the impedance of the pulsed power system does not match the room correctly, and because the room impedance has several orders of magnitude change during the pulse discharge, a negative "reflection" is generated by the main pulse, which is directed towards the The pulse generation system is propagated backwards at the front end. • The excess energy has been propagated backwards through the compression head 60 and the commutator 40. The switch 46 is turned on due to the removal of the firing signal from the controller. The energy recovery circuit 57 reverses the polarity of the reflection, and rotates freely via resonance as if the current was reversed by the diode 59 at the inductor 58 (the LC circuit composed of the charging capacitor 42 and the energy recovery sensor 58 One half cycle of the ringing) generates a negative voltage on the charging capacitor 42. The net result is that substantially all of the energy reflected by the chamber 80 is recovered by each pulse and stored in the charging capacitor 42 as the original paper size. Applicable to China National Standard (CNS) A4 specification (210X297 mm) ----- --1 ------ Installation ------ Order --.--.---- (please read the note on the back first and then this page) A7 B7 V. Description of the invention (9) Prepared for use by the next pulse. Figure 6 is a timeline diagram showing the charging of capacitors Co, ^, Cp-i and Cp. • This figure shows the process of energy recovery on Co. The complete BH curve of the magnetic material used in the saturable inductor swings, and a DC bias current is provided, so that each sensor is reversely saturated by the switch 46 off when a pulse is activated. In the commutator saturable inductor In the cases of 48 and 54, this is accomplished by providing a bias current of approximately 15A to flow backward (relative to the general pulse current) through these sensors. This bias current is provided by the bias current source 12Q through the isolation inductor Lbl. The actual current flows from the power supply through the ground connection of the commutator, through the main winding of the pulse transformer, through the saturable inductor 54, through the saturable inductor 48, and through the isolation inductor Lbl, running backwards as indicated by arrow B1 Bias current source 120. In the case of a compression head saturable inductor, a bias current B2 of about 5 A is supplied from the second bias current source 126 through the isolation inductor Lb2. At the compression head, this current is split and the main part B2-1 passes through the saturable inductor LP164 and backs up to the second bias current source 126 through the isolation inductor Lb3. The smaller part of the current B2-2 runs backwards through the HV cable connecting the compression head 60 to the commutator, auxiliary winding through a pulse transformer to ground, and back to the second bias current source 126 through a bias resistor. This second smaller current is used to bias the pulse transformer so that it is reset for pulse operation. The number of currents split into two branches is determined by the resistance of each path, and is specifically adjusted so that each path receives the correct -12- This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) ) Please read the precautions on the back of this page before • This page) Binding and binding A7 B7 V. Description of the invention (10) The amount of bias current. In this embodiment, we call the pulsed energy flow through the system from the factory power source 10 to the electrode and to the electrode 84 ground "forward flow" and this direction is the forward direction. When we call an electrical element such as a saturable sensor as forward conduction, we mean that it is biased to saturation in the direction of these electrodes to conduct "pulse energy". When it is reverse conducting, it is biased to saturation to conduct energy in a direction away from the electrode toward the charging capacitor. The actual direction of current (or electron flow) flowing through the system depends on where you are in the system. • The direction of current flow is now explained to eliminate possible sources of confusion. In this preferred embodiment, Co is charged (for example) to positive 700 volts, so that when the switch 46 is closed, the current is passed by the capacitor 42 in the direction of the Ci capacitor 52 (meaning the electrons actually flow in a reverse direction). The capacitor 42 flows. Similarly, the current flows from the C! Capacitor 52 to the ground through the main side of the pulse transformer 56. Therefore, the current is in the same direction as the pulse energy child, and is charged from the capacitor 42 to the pulse transformer 56. As explained below, in In the paragraph describing the “pulse transformer”, the current flow of both the main loop and the auxiliary loop of the pulse transformer 56 is directed to ground. The result is that when the current between the pulse transformer 56 and the electrode flows during discharge, it leaves the electrode toward the transformer 56. Therefore, the direction of electron flow during discharge is temporarily grounded through the auxiliary side of the pulse transformer 56 to The CP-i capacitor 62 passes through the inductor 64, temporarily to the Cp capacitor 82, through the inductor 81, through the electrode 84 (which is a mold release cathode) through the discharge plasma, through the electrode 83, and returns to ground. Therefore, in the pulse transformer-13- this paper size is suitable for China National Standard (CNS) A4 specification (210X297 mm) '----- 1--1 — installed ------ tr——r- -.-- 0 (Please read the note f on the back and then on this page) A7 __ ___B7_ V. Description of Invention (11) Between 36, the current flows in the same direction as the pulse energy during discharge. Immediately, the subsequent discharge current and electron flow are reversed as explained above, and a special provision has been made in this embodiment to handle the reversed current flow as explained in the paragraph describing "energy recovery" above 》 A more detailed circuit diagram of the power supply section of this preferred embodiment is shown in FIG. 3. As shown in Figure 3, the rectifier 22 is a rectifier that provides pulse phase control and has an output of positive 150V to -150 VDC. The inverter 24 is actually three inverters 24A, 24B, and 24C. The inverters 24B and 24C are turned off when the 8yFCo charging capacitor 42 is 50 volts less than the command voltage, and the inverter 24A is turned off when the voltage of Co42 slightly exceeds the command voltage. This procedure reduces the charging rate towards the end of charging. The step-up transformers 26A, 26B, and 26C are each a 7KW series and convert the voltage to 1,200 volts AC. Three bridge rectifiers 30A, 3GB and 3QC are shown. The HV power control board 21 converts a 12-bit digital command into an analog signal and combines it with a feedback signal 45 from a Co voltage monitor 44. When the feedback voltage exceeds the command voltage, the inverter 24A is turned off as discussed above> The Q2 switch is turned off to dissipate the energy stored in the power supply, and the Q3 isolation switch 36 is turned on to prevent any extra energy from leaving the power supply and Q1 is discharged Switch 38 is closed to release the voltage on Co 42 until Co equals the command voltage. Q1 is turned on at this time. The main components of commutator 40 and compression head 60 are shown in circles 1 and 2, and the operation of the system is discussed above. In this paragraph I describe the details of making commutators. The solid state switch 46 is a P / N CM 1 0 0 0 HA-28H IGBT switch, -14 — (Please read the note on the back before 'this page)-binding · binding-thread paper size Tongzhou China National Standard (CNS ) A4 specification (210X297 mm) Once approved by the Ministry of Shanghai ^ "-^^ :: =: ^ elimination cooperation ^ " ^ A7 __ _B7__ V. Description of the invention (12) 彳 Powerex's office in Youngwood, PA Supplied transformers 48, 54 and 64 are saturable inductors similar to those described in US Patent Nos. 5,448,580 and 5,315,611. The top and cross-sectional views of the saturable sensor 64 are shown in Figures 8A and 8B, respectively. However, in the inductors of this embodiment, Dentsu's exclusion metal parts 301, 302, 303, and 304 are added together as shown in Figure 8B 圔 to reduce electric leakage in these inductors. The components substantially reduce the current flow through the inductor before saturation and greatly improve the pulse formation performance of the inductor in the system. This current is made into four loops through vertical conductors. It enters 305 and runs down on a large-diameter conductor marked "Γ" in the center, and runs up on six smaller conductors also marked "1" around it. The other circuits are similarly numbered and located at 306 Leaving • It has the additional equivalent turns formed by Dentsu's own metal chip and is the third turn of the five-turn inductor. This has the advantage that the voltage of the Dentsu's metal element is maintained at half of the full voltage, and Allows for a safer hold-down interval between the electric-excluded metal part and the metal rod of other turns. Capacitor banks 42, 52, and 62 are composed of capacitor banks of existing stock connected in parallel. These capacitors can be made by Murata, for example. The supplier obtained it from the office of Smyrna, Georgia. The applicant's preferred method of connecting capacitors and inductors is to use nickel-coated copper wires on a special printed circuit board in a manner similar to US Patent No. 5,448,580. The screws are connected at the positive and negative terminals. The pulse transformer 56 is also similar to the pulse transformers described in US Pat. Nos. 5,448,580 and 5,313,481; however, the actual例 之 脉 -15- This paper is in the size of China State Standards (CNS) A4 (210X297mm) of ^ ZiT line (I read the note f on the back and then this page) Good? 5; Head «.. ^,-= :. 1. De-portraiting cooperation private 1 ·! A7 __ ___B7_ V. Description of the invention (13) 'The impulse theorem has only a single turn in the auxiliary winding and 23 main windings. Pulse Transformer 56 is shown in Figure 4. 23 main windings each contain an aluminum coil 56A with two flanges (each with a flat edge and threaded hole), which are locked to the bottom shown in Figure 4 with screws The positive and negative connectors on the edge of the printed voltage board 56B. The insulator 56C separates the positive connector of each coil by the negative connector of the adjacent wire circle. A hollow cylinder between the coil flanges is 1/16 inch long, 87501), wall thickness is about 1/32 inches * The coil is covered with 1 inch wide, 0.7mil thick MetglasTM 2605 S3A and 0.1mil thick polyester film, until the insulated MetglasTM is wrapped around it The OD is up to 2.24 inches. A perspective view of a single-wound coil forming a main winding is shown in Figure 5. The auxiliary part of the transformer is A single OD stainless steel mesh rod is installed in a tightly fitted insulating tube made of electrical glass. It is wound around the fourth circle into four segments. The auxiliary portion of the stainless steel mesh shown at 56D in Figure 4 is The ground wire 56E of the printed circuit board 56B is grounded, and the high voltage connector is shown at 56F. As noted above, the 700 volt pulse between the main winding + and a connector will be generated at the auxiliary side of connector 5 6F Negative 16, 100 Volt Pulses · This design provides very low leakage inductance while allowing extremely fast output rise times. .
Cp電容器82係由28個0.5 9n f電容器排組組成，安 裝於該室壓力管之頂端。（典型而言，krF雷射係在由1. 0 %氪，0.1%氟及其餘為氖組成之雷射氣體操作·）該等電 極每一為固態銅條，約28英吋長，其以約0.5至1.0英吋 被分開。在此實施例中，頂端的電極為陰極，且底部之電 -16- 本紙張尺度適;ϊ]中國國家標準（CNsTA4規;}T(ll〇X297公釐) ---.----„---__.裝------訂——r----線 (讀先閱讀背面之注$項再本頁) 五、 發明説明（14 A7 B7 極如第1圖所示地被連接於接地。 在上述的系統中Co以正電壓被充電且電子之流動係 進入雷射室之接地電極。該電路可容易地逆轉為以約7〇〇 伏特之負電壓充電，且電子流動為由該接地電極至該高電 壓電極。同樣地，通過電極間隙之電子的逆轉流動可藉由 改變輔助捲繞（即該四段的不銹鋼管）的極性而被達成。 第7圖顯示一修改，其將允許該雷射之雙極操作。在 此情形中，二個電源被提供，一個供應+1, 200伏特且另一 個提供-1,200伏特。此外，開關46被複製，故吾人有46 A 與46B。當46A為關閉時|系統之極性如同上面所詳細描 述者。然而，在46A開啟且開關46B關閉時，其結果之脈 衝為在各處為逆轉的，且逋過放電間隙之電子流動為由接 地電極至高電壓電極（在此情形中為+14, 000伏特）。在此 情形中，能量恢復電路57為不需要的•取代的是（例如）C〇A 在To被充電至+700V，46A將關閉讓Coa通過感應器48放 電，然後其將開啟且46B將關閉讓反射能量在能量之恢復 後於Cob上被恢復，46B開啟。然後Cob被充電至-700V， 且在下一個To 4 6B關閉以讓Cob通過該電路而放電。其結 果為交替改變放電方向》此實施例應可提供該等電極之更 均勻磨耗》 本發明之此較佳實施例包括顯示於第10A與10B圖之 壓縮頭安裝技術。第10圖為該雷射系統之側断面圖，顯示 該壓縮器導線模組相對於電極83與84之位置。此技術被 設計來使壓縮導線室連接有關的阻抗最小，同時有助於壓 -17 — 本紙張尺度適川中國國家標率（CNS ) A4規格（210X297公釐） 請 先 閲 面 之 注 項The Cp capacitor 82 is composed of 28 0.5 9n f capacitor banks and is installed on the top of the pressure tube in the chamber. (Typically, a krF laser is operated with a laser gas consisting of 1.0% 氪, 0.1% fluorine, and the rest is neon.) Each of these electrodes is a solid copper strip, approximately 28 inches long, which is About 0.5 to 1.0 inches are separated. In this embodiment, the electrode at the top is the cathode, and the electricity at the bottom is -16- The paper is of suitable size; ϊ] Chinese national standard (CNsTA4 regulation;) T (110 × 297 mm) ---.---- „---__. Install ------ order-r ---- line (read the note on the back first, then this page) 5. Description of the invention (14 A7 B7 as shown in Figure 1) The ground is connected to the ground. In the above system, Co is charged with a positive voltage and the flow of electrons enters the ground electrode of the laser chamber. This circuit can be easily reversed to charge with a negative voltage of about 700 volts, and the electrons The flow is from the ground electrode to the high-voltage electrode. Similarly, the reverse flow of electrons through the electrode gap can be achieved by changing the polarity of the auxiliary winding (ie, the four-stage stainless steel tube). Figure 7 shows a Modifications that will allow bipolar operation of the laser. In this case, two power sources are provided, one supplying +1,200 volts and the other providing -1,200 volts. In addition, the switch 46 is duplicated, so we have 46 A and 46B. When 46A is off | The polarity of the system is as detailed above. However, when 46A is on and switch 46B is off At this time, the resulting pulse is reversed everywhere, and the flow of electrons across the discharge gap is from the ground electrode to the high voltage electrode (+14,000 volts in this case). In this case, the energy recovery circuit 57 is not required. • Instead of (for example) CoA being charged to + 700V at To, 46A will be turned off for Coa to discharge through inductor 48, then it will be turned on and 46B will be turned off to allow the reflected energy to recover after energy It was restored on Cob, 46B was turned on. Then Cob was charged to -700V, and turned off on the next To 4 6B to let Cob discharge through the circuit. As a result, the discharge direction was changed alternately. This embodiment should provide such electrodes More uniform wear "This preferred embodiment of the present invention includes the compression head mounting technology shown in Figures 10A and 10B. Figure 10 is a side cross-sectional view of the laser system showing the compressor wire module relative to the electrode Positions 83 and 84. This technology is designed to minimize the impedance associated with the connection of the compressed lead room, and at the same time helps to reduce the pressure of the paper. This paper is suitable for the China National Standard (CNS) A4 size (210X297 mm). read Notes above
裝 訂 旅 A7 _B7_ 五、發明说明（15) 丨 縮頭之快速更換。如第10A與10B圖顯示地，其接地連接 是以壓縮頭背面的約28英吋長之槽錠連接（在第10A圖為 81A，在第10B圖為81B)被做成•該槽之頂端被配裝有可 撓曲的指備料。較佳的指備料為以Multilamr®商標所販 售者。 該高電壓連接在可飽和感應器64之6英吋直徑的平滑 底部與第10A圖中之可撓曲指備料的偶配陣列間被做成· 就如上述者，較佳的指備料為Multilamr®。此配置允許 壓縮頭之更換，以便在5分鐘內完成修理或預防性維護。 在習知技藝的脈衝電力系統中，由電氣元件之漏油是 為一問題。在此較佳實施例中，油絕緣之元件被限制為該 等可飽和感應器。進而言之，顯示於第8B圖之可飽和感應 器被罩在壺狀的油容納罩殼內，其中所有的密封連接被置 於高於油面以實質地消除漏油的可能性•例如感應器64內 之最低的密封在第8B圖中被顯示於308。 在本發明之另一較佳實施例中，如第1與2圖顯示之 運用二個整流器、一個反相器與一個變壓器的第一個較佳 實施例所描述之電源模組被一個現貨電源與一個共振充電 電路取代》此一後者之方式提供充電電容器的更快速的充 電。 顯示此較佳實施例之電氣電路被顯示於第9圖。在此 情形中，具有480VAC/40安培輸入與1, 200VDC 50安培輸 出之標準電容器充電電源20 0被使用。此種電源可由如 Ecgar，Maxwell，Kaiser與Ale等供應商處取得。此電源 -18- 本紙張尺度迠用中國國家標準（CNS ) A4規格（210 X 297公釐） ---^--.--K---裝------1T------涑 (請先閲讀背面之注意事項再本頁) A7 _____ B7 五、發明説明（16) . 連續地改變325 aF電容器202至控制板204所命令之電壓 222。此控制板202亦命令IGBT開關206關閉及開啟，以 由電容器20 2傳送能量至電容器42·感應器208將電容器 202與42有關的傳送時間設定為常數•控制板20 2接收一 電壓回饋212,其為電容器42上之電壓的比例，並接收一 電壓回饋214，其為流動通過感應器208之電流的比例。 因此，在以命令電壓饋入控制板204下，一精確的計算可 由電容器42與感應器208內所儲存的變壓器做成，以與所 需的充電命令電壓210比較·控制板204將由此一計算決 定在充電週期中的正確時間以開啟IGBT開關206。 在IGBT開關206開啟後，儲存在感應器208之能量將 通過二極體路徑216傳送至電容器42。即時能量計算之精 確度將決定存在於電容器42上之最後電壓的波動刻溝的 數量。由於此系統之極端充電率，大多的刻構將存在以符 合系統調節要求之±0.05% ·因此一個分洩電路將被使 用。 當通過感應器208之電流流動停止時，分洩電路216 將被控制板204命令而停止·電容器42與電阻器220之時 間常數將為夠快的，以使電容器42分洩至命令電壓210, 而不致成為總充電週期之可感知的數量。 熟習該技藝之人將瞭解到，根據上面揭示所表達的教 習，本發明的許多其他實施例為可能的。 因此，讀者將由所附的申請專利範圍與其法定的等值 物決定本發明之領域。 -19- 本紙張尺度適用中國國家捸準（CNS ) Α4規格（210X297公釐） ---K--„--u-I 裝------訂--1----線. (請先聞讀背面之注意事項再I本頁) ♦ A7 B7 五、發明説明（17) 元件編號 譯 名 元件編號 譯 名 10 電源 41 整流子控制板 20 高電壓電源模組 42 充電電容器 21 電源控制板 44 電壓分割器，，電壓 22 整流器 監視器 24 反相器 45 回饋信號 24Α 反相器 46 固態開關 24Β 反相器 46Α 固態開關 24C 反相器 46Β 固態開關 26 升壓變壓器 48 充電感應器 26Α 升壓變壓器 50 第一級脈衝產生 26Β 升壓變壓器 52 電容器 26C 升壓變壓器 54 可飽和感應器 28 整流器 56 脈衝變壓器 30 標準橋整流器電路 56Α 鋁線圈 30Α 標準橋整流器電路 56Β 印刷電路板 30Β 標準橋整流器電路 56C 絕緣器 30C 標準橋整流器電路 56D 不銹網輔助部分 32 濂波電容器 56Ε 接地導線 34 濾波電容器，Q2開關 56F 高電壓接頭 36 Q3隔離開關 57 能量恢復電路 38 Q1放電開關 58 能量恢復感應器 40 ，整流子模組 59 能量恢復二極體 -20- 請先聞讀背面之注意事項再本頁) -裝- 訂 旅 本紙張尺度適州中國國家標準（CNS ) Α4規格（210X297公嫠） 五、發明説明（18 ) A7 B7 好Μ部中呔 元件標 號對照 表 元件編號 譯 名 元件編號 譯 名 60 壓縮頭模組 202 電容器 61 第一級壓縮 204 控制板 62 電容器排組 206 IGBT開關 64 可飽和感應器 208 感應器 65 第二級壓縮 210 命令電壓 80 雷射室模組 212 電壓回饋 81 感應器 214 電壓回饋 81Α 槽錠連接 216 二極體路徑，分洩電路 81Β 槽錠連接 222 命令電壓，電阻器 82 尖峰電容器 301 電通排除金屬件 83 電極 302 電通排除金屬件 84 電極 303 電通排除金屜件 86 線狹窄包裝 304 電通排除金屬件 88 輸出耦合器 308 密封 89 指備料 90 雷射光束 92 光電二極管 100 雷射系統控制板 102 處理器 120 偏壓電流來源 126 偏壓電流來源 200 ,標準電容器充電電源 -21- 本紙張尺度適州中國國家標準（CNS ) Α4規格（210X297公嫠） ---.--'--^--裝------訂——^----舞 (請先閲讀背面之注意事項再•本頁) ·Binding Travel A7 _B7_ V. Description of the Invention (15) 丨 Quick replacement of the retractable head. As shown in Figures 10A and 10B, the ground connection is made by a 28-inch slot ingot on the back of the compression head (81A in Figure 10A and 81B in Figure 10B). Equipped with flexible finger stock. Preferred materials are those sold under the Multilamr® trademark. This high voltage connection is made between the 6-inch diameter smooth bottom of the saturable sensor 64 and the mating array of flexible finger stocks in Figure 10A. As mentioned above, the preferred finger stock is Multilamr ®. This configuration allows the compression head to be replaced for repair or preventive maintenance in less than 5 minutes. In conventional pulsed power systems, oil leakage from electrical components is a problem. In this preferred embodiment, the oil-insulated elements are limited to such saturable inductors. Furthermore, the saturable sensor shown in Figure 8B is covered in a pot-shaped oil-receiving casing, in which all sealed connections are placed above the oil level to substantially eliminate the possibility of oil leakage. For example, the sensor The lowest seal within 64 is shown at 308 in Figure 8B. In another preferred embodiment of the present invention, the power module described in the first preferred embodiment using two rectifiers, an inverter and a transformer as shown in Figs. 1 and 2 is a spot power supply. Replaced with a resonant charging circuit, this latter way provides faster charging of the charging capacitor. The electrical circuit showing this preferred embodiment is shown in FIG. In this case, a standard capacitor charging power supply 200 with a 480VAC / 40 amp input and 1,200VDC 50 amp output is used. Such power sources can be obtained from suppliers such as Ecgar, Maxwell, Kaiser and Ale. This power supply-18- This paper size adopts China National Standard (CNS) A4 specification (210 X 297 mm) --- ^ --.-- K --- installation ------ 1T ---- -涑 (Please read the precautions on the back before this page) A7 _____ B7 V. Description of the invention (16). Continuously change the voltage 222 from 325 aF capacitor 202 to the control board 204. The control board 202 also orders the IGBT switch 206 to be turned off and on to transmit energy from the capacitor 202 to the capacitor 42. The inductor 208 sets the transmission time related to the capacitors 202 and 42 to a constant. The control board 20 2 receives a voltage feedback 212, It is the ratio of the voltage on the capacitor 42 and receives a voltage feedback 214 which is the ratio of the current flowing through the inductor 208. Therefore, when the command voltage is fed into the control board 204, an accurate calculation can be made by the capacitor 42 and the transformer stored in the inductor 208 to compare with the required charging command voltage 210. The control board 204 will calculate from this The correct time in the charging cycle is decided to turn on the IGBT switch 206. After the IGBT switch 206 is turned on, the energy stored in the inductor 208 is transmitted to the capacitor 42 through the diode path 216. The accuracy of the instant energy calculation will determine the number of fluctuating grooves of the last voltage present on the capacitor 42. Due to the extreme charging rate of this system, most of the engravings will exist to meet the system's regulation requirements of ± 0.05%. Therefore, a drain circuit will be used. When the current flow through the inductor 208 stops, the bleeder circuit 216 will be stopped by the command of the control board 204. The time constant of the capacitor 42 and the resistor 220 will be fast enough to allow the capacitor 42 to bleed to the command voltage 210 Without becoming a perceptible number of total charge cycles. Those skilled in the art will appreciate that many other embodiments of the invention are possible based on the teachings expressed in the above disclosure. Therefore, the reader will determine the scope of the present invention by the scope of the attached patent application and its legal equivalent. -19- This paper size applies to China National Standard (CNS) Α4 size (210X297 mm) --- K-„-uI Packing ------ Order--1 ---- line. (Please Read the precautions on the back before reading this page) ♦ A7 B7 V. Description of the invention (17) Component number translation Component number translation 10 Power supply 41 Commutator control board 20 High voltage power module 42 Charging capacitor 21 Power control board 44 Voltage Divider, voltage 22 Rectifier monitor 24 Inverter 45 Feedback signal 24A Inverter 46 Solid state switch 24B Inverter 46A Solid state switch 24C Inverter 46B Solid state switch 26 Step-up transformer 48 Charging inductor 26A Step-up transformer 50 First-stage pulse generation 26B step-up transformer 52 capacitor 26C step-up transformer 54 saturable inductor 28 rectifier 56 pulse transformer 30 standard bridge rectifier circuit 56A aluminum coil 30A standard bridge rectifier circuit 56B printed circuit board 30B standard bridge rectifier circuit 56C insulator 30C Standard Bridge Rectifier Circuit 56D Stainless Steel Auxiliary Section 32 Wave Capacitor 56E Ground Wire 34 Filter Capacitor, Q2 Switch 56F High Power Crimp connector 36 Q3 isolation switch 57 Energy recovery circuit 38 Q1 discharge switch 58 Energy recovery sensor 40, commutator module 59 Energy recovery diode -20- Please read the precautions on the back before this page)-Installation-Order Traveling paper standard Shizhou Chinese National Standard (CNS) A4 specification (210X297 gong) V. Description of the invention (18) A7 B7 Part No. in the middle part of the good part of the good part of the reference table of the component number translation name component number translation name 60 compression head module 202 capacitor 61 First stage compression 204 Control board 62 Capacitor bank 206 IGBT switch 64 Saturable inductor 208 Inductor 65 Second stage compression 210 Command voltage 80 Laser chamber module 212 Voltage feedback 81 Inductor 214 Voltage feedback 81Α Slot ingot connection 216 Diode path, Drain circuit 81B Slot ingot connection 222 Command voltage, resistor 82 Spike capacitor 301 Electricity elimination metal piece 83 Electrode 302 Electricity elimination metal piece 84 Electrode 303 Electricity elimination gold drawer piece 86 Wire narrow package 304 Electricity elimination metal Pieces 88 output coupler 308 seal 89 finger stock 90 laser beam 92 photodiode 100 Laser system control board 102 Processor 120 Bias current source 126 Bias current source 200, Standard capacitor charging power supply-21- This paper is in the size of China State Standard (CNS) Α4 (210X297 mm) ---. --'-- ^-Equipment ------ Order —— ^ ---- Dance (please read the precautions on the back before this page) ·