TW393575B - Optical heterodyne, phase sensitive surface plasma wave biosensor - Google Patents

Optical heterodyne, phase sensitive surface plasma wave biosensor Download PDF

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Publication number
TW393575B
TW393575B TW088101282A TW88101282A TW393575B TW 393575 B TW393575 B TW 393575B TW 088101282 A TW088101282 A TW 088101282A TW 88101282 A TW88101282 A TW 88101282A TW 393575 B TW393575 B TW 393575B
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wave
phase
surface plasma
laser light
optical
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TW088101282A
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Chinese (zh)
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Cheng Jou
Jian-Yuan Han
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Cheng Jou
Han Jian Yuan
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55Specular reflectivity
    • G01N21/552Attenuated total reflection
    • G01N21/553Attenuated total reflection and using surface plasmons
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/41Refractivity; Phase-affecting properties, e.g. optical path length
    • G01N21/45Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods

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  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

In conventional method, the surface plasma resonance (SPR) biosensor detects the intensity change of the reflected P polarized wave (TM wave) when the surface plasma wave is being generated. Simultaneously, there is a phase change of the reflected P polarized wave as well. Besides, the phase change of the reflected P polarized wave is significantly enhanced in comparison with the amplitude change when the incident angle of the laser beam is around the SPR angle. Once the antibody-antigen combination is formed and immobilized on the metal thin film of SPR generator, the extra phase change of the reflected P polarized light is then observed. A common path Mach-zehnder optical heterodyne interferometer, which provides higher stability and sensitivity of the phase measurement, is therefore suggested to sense the concentration of the antigen of the test biological substance. A novel SPR phase sensitive biosensor with the feature of optical common path configuration and optical heterodyne technique is proposed in this patent.

Description

五、發明説明(/ A7 B7 傳統上經由ELISA方法檢測病原趙(細菌或病毒)至少需要三天,它 必須經過清洗-反應-清洗等步驟方可完成,如果利用光纖生物感知器,雖 然可以大大的縮短檢驗的時間至20分鐘,然而需要iabei螢光劑方可執 行’而且在勞光彳貞測靈敏度上有其限制。目前最新的方法是利用SPR (surface plasma resonance)可同時擁有快速檢驗而且不需使用螢光劑的 優點' ° SPR的基本原理主要在量測P波(p polarized wave or TM wave)在 菱鏡内產生全反射的條件下;Kgsin0 = Ksp;Kg=2Vi^Ks C 中ω為入射雷射光頻率εο, ει, (請先《讀背面之注$項再填窝本頁) —HI—---1r 經濟部智慧财產局貝工消费合作杜印製 u +ε , * \Gl+£2j 為不同介質的介質係數,因激發表面電 楽·波(surface plasma wave,SPW)造成P波反射強度的改變(如第一圖), 並藉以確定產生SPR共振的入射光角度ΘΓ,•這種方考已廣泛的被採用在生 物醫學或化學物質的抉速檢驗中)·然西該種方法利用反射光強度的變化來 值測’在靈敏度上較低。亦有利用SPR方法結合電化學感知器(chemical electro-sensor)以量測電流進行化學物質分析。本發明則提供一種新的 光學共同路徑架構及外差干涉相位偵測技術之表面電漿波生物感知器(即艰 biosensor) ’來量測產生表面電漿波p反射波的相位(phase)變化,以取 代反射先強度(intensity)的變化,進而即時求得被測試體在溶液中的濃 度•然而因相位偵測極易受到外界環境變化的干擾,光學共同路徑架構對 本纸張幻t逍用中國两家揉率(cps > A视I®· ( 210X297公釐) -----装,'------訂.---------竽-------1----------- A7 ------ B7___ 五、發明説明(厶) ~ — --Π ' | 外界環境變化有免疫A力丨本發明結合表面電n外差干涉技術及光學 j 共同路妓構’利用她取代_度的_技術,在系統制錄度上可大I | 幅提高β Ρ ί ^ h lV. Description of the Invention (/ A7 B7 Traditionally, it takes at least three days to detect the pathogenic Zhao (bacteria or virus) by ELISA method, and it must be completed by washing-reaction-washing steps. If fiber optic biosensors are used, it can greatly The test time is shortened to 20 minutes, however, iabei fluorescent agent is required to perform it, and there is a limitation on the sensitivity of the test. The latest method is to use SPR (surface plasma resonance) to have a fast test at the same time. Advantages of using no fluorescent agent '° The basic principle of SPR is mainly under the condition of measuring the total reflection of p wave (p polarized wave or TM wave) in the diamond mirror; Kgsin0 = Ksp; Kg = 2Vi ^ Ks C ω is the frequency of incident laser light εο, ει, (please read “Notes on the back of the page before filling in this page) —HI —--- 1r Printed by U. * \ Gl + £ 2j is the dielectric coefficient of different media. The P-wave reflection intensity changes due to the excited surface plasma wave (SPW) (as shown in the first figure), and the angle of incident light that generates SPR resonance is determined. ΘΓ, • this way The test has been widely used in the biomedical or chemical substance determination test.) · Ranxi This method uses the change in reflected light intensity to measure the value ', which is low in sensitivity. There are also chemical substance analyses using SPR methods combined with electrochemical electro-sensors to measure current. The present invention provides a new plasma common path architecture and heterodyne interference phase detection technology for surface plasma wave biosensors (that is, biosensors) to measure the phase change of the surface plasma wave p reflected wave. To replace the change in the intensity of the reflection first, and then obtain the concentration of the test object in the solution in real time. However, because the phase detection is very susceptible to interference from changes in the external environment, the optical common path architecture is useful for this paper. Two kneading rates in China (cps > A as I® · (210X297 mm) ----- install, '------ order .--------- 竽 ----- --1 ----------- A7 ------ B7___ V. Description of the invention (厶) ~---Π '| The external environment is immune to changes A 丨 The present invention combines surface electricity n Heterodyne interference technology and optical j common road structure 'Using her technology to replace _degrees, the system recording degree can be large I | amplitude increase β Ρ ί hl

光學共同路徑外差干涉相位偵測表面電漿波生物感知器之光學架構如丨I J 第二圖。當線偏極化之雷射光(由P波及s波組合)(1)經厶波片(2)及分光| JThe optical architecture of the common path heterodyne interference phase detection surface plasma wave biosensor is as shown in the second figure. Polarized laser light (combined with P and s waves) (1) via chirped wave plate (2) and beam splitting | J

2 I I 片Β&(3)分成兩束光;信號光束及參考光束,信號光束經Wi頻率驅動器(41)繁乂2 I I slice B & (3) is divided into two beams; the signal beam and the reference beam, the signal beam is complicated by the Wi-frequency driver (41)

° 本T 之聲光調變(Acousto-Optic modulator)A0M(4)使雷射光產生頻率Wi偏移,Ϊ丨 參考光束則經A0M(4)及聲光調變驅動器(42)產生Wz頻率偏移,調整信號 I 光(Pr^)入射至表面電漿波生物感知器(SPR)組件⑹的入射角0 (如第^ 圖)大於臨界角而產生全反射並與參考光束(p2+S2)在極化光分光片pBS⑺ 丨· 重合,其中P!波與P2波產生外差干涉,其拍頻(beat frequency) , 丨 同時Α波與S2波亦產生外差干涉,拍頻亦為Μ,由於乃波在SPR組件(6) 線 經濟部智慧财產局员工消免合作社印製° The Acousto-Optic modulator A0M (4) of this T causes the laser light to generate a frequency Wi offset, and the reference beam passes the A0M (4) and the acousto-optic driver (42) to generate a Wz frequency offset. And adjust the signal I light (Pr ^) to the surface plasma wave biosensor (SPR) component ⑹ The angle of incidence 0 (as shown in Figure ^) is greater than the critical angle to generate total reflection and is related to the reference beam (p2 + S2) The polarized light beam splitter pBS⑺ 丨 · coincides, in which the P! Wave and P2 wave cause heterodyne interference, and its beat frequency, 丨 At the same time, A wave and S2 wave also generate heterodyne interference, and the beat frequency is also M, Because Naibo eliminates the printing of cooperatives in the SPR component (6) of the Ministry of Economic Affairs' Intellectual Property Bureau employees

激發表面電漿波而產生相位改變,然而\波則因不激發表面電漿波而無任 I 何改變’由光偵檢器Dp(8)與Ds(8)並經過濾波器(9)分別量測到的外差干 | 涉P波(P!+P2)及S波(Si+SJ信號可寫成The phase change occurs when the surface plasma wave is excited. However, the wave does not change at all because it does not excite the surface plasma wave. The light detectors Dp (8) and Ds (8) pass through the filter (9), respectively. Measured heterodyne interference | P-wave (P! + P2) and S-wave (Si + SJ signals can be written as

Ip(^Wt) = IPi+Pj = 2λΑρΛ^ cos(AWt + Φρ, -φρ2)........................(1)Ip (^ Wt) = IPi + Pj = 2λΑρΛ ^ cos (AWt + Φρ, -φρ2) .............. (1)

VV

Is(AWt) = ISi+S2 = cos(/VWt + <|)S| - <|)S2) ........................( 2 ) 本紙張適用中Η國家標準(cys )人4胁(210X297公釐) A7 B7 .(4) 五、發明説明(3 ) 並輸入到鎖相放大器(Lock in Amplifier)(10)中,可直接讀出ip(Awt) 及Is(ZXWt)的相位差δ及外差干涉P波及S波反射光強度之比尤。其中 δ = [(φΡι -Φρ2)-(Φ51 -Φ52)] ................................................(3) 义V^P|^P2 Asi^S2 由於(ΦΡ2,Φ5ι木2)及(ΪΡ2,ISl,IS2)均為常數,由Eq (3)⑷可得知本發明 可同時取得匕波相位φΡι及振幅Ip,大小的改變。對外差干涉P波(ρι+ρ2)& S波(S!+S2)而言’第二圖光學架構形成共同路徑。在相位量測上對外界環 〆」 境干擾具有免疫能力而大幅提升相位測試精度。 第三圖中表面電漿波SPR光學組件中玻璃基板(glass based plate)(53) 表面蒸鍍金(Au)或銀(Ag)等金屬薄膜(54)厚度約500A其中光折射率匹 配溶液(index matching oil)(52)的目的在結合菱鏡(51)與玻填基板(53) 使其折射率相同,在金屬膜(54)表面上鍍一層測試菌體或病毒之抗體(55) 並與具有測試菌體或病毒之抗原(56)結合並產生作用,在反應器(58)中 而形成抗原抗體結合體(57)。表面電漿波的產生與金屬薄膜表面因附著抗 原抗體結舍體(57)而改變了有效的光折射率,使得反射的p波產生相位及 強度的改變。同時利用反射外差干涉P波的相位以及振幅大小的改變進行 本紙張尺度遑用中國两家揉準(CNS ) Α4规格(210X297公釐) (請先Μ讀背面之注意事項再填寫本頁) .粲. 經济部中央橾準局貝工消费合作社印氧 經濟部中*橾準局真工消费合作杜印輦 A7 B7 五、發明説明(f) ' -- 菌體的快速檢驗是本發明專利的主要内容β 本發明專利具有下列幾項優點: 1.靈敏料;外差干涉技術應用在她的即時,_量為近代光學領域中 伽靈敏度最高的方法之〜她嶋-種創新的外差干涉相位偵 測技術,偵測靈敏度比利用測量反射波強度的方法大幅提高。 2·本發明提出-種全新的光學架構絲光學共同祕,可大大提高相侧 測的歡度及錄度,且不受外界觀的干擾。 3. 本發明不需要螢光劑,使檢驗過程快速而且簡單化。 4. 本發明使用鎖相放大器可做相位及振福的即時量測。 5· ’本發啊科1:測反射外奸涉之ρ波触減祕大小,紗共同路 徑光學架構並同時量測外差干涉Ρ波及S波的振幅大小比值;^,不受雷 射光強度不穩定的影馨《囷式之簡要說明及圖式原件符號說明如後。 冬人及遇用TSBI家揉準(CNS ) A4规格(210X297公釐) I !:裝 I I (請先閲讀背面之注意事項再嗔寫本頁) *π A9 B9 C9 D9 圖式ϋ) 第一圖菱鏡表面電漿波產生說明圖 第二囷光學共同路徑外差干涉相位偵測表面電漿波生物感知器架構圖 第三囷表面電漿波生物感知器SPR光學組件圖 (請先閲讀背面之注意事項再行緣製) 訂 -線丨丨. 經濟部智慧財產局貝工消費合作社印製 本纸張尺度逋用中國國家#準(CNS ) A4规格(210X297公釐) 經濟部智慧财產局員工消費合作杜印製 A9 B9 C9 D9 圖式cy 符號元件說明: (1)線偏極化雷射光源 (2) λ/2波片 (3)分光片 (4)聲光調變器(acousto-optic modulator) (41)驅動器(driver 1) (42)驅動器(driver 2) (5)反射鏡 (6) SPR組件 ⑺極化光分光鏡 (8)偵檢器 (9)濾波器 (10)鎖相放大器 (11)個人電腦 (51)菱鏡 (52)折射率匹配溶液 (53)玻璃基版 (54)金屬薄膜 (55)測試菌體物抗體 (56)測試菌體物抗原 (57)抗原抗體結合體 (5 8)反應器(reaction chamber) (69?玻璃.劈鱗. 、 (60/金屬 電介_ (請先閲讀背面之注意事項再行繪裝) -β i!_ 本紙張尺度逋用中國國家揉準(CNS ) A4規格(210X297公釐)Is (AWt) = ISi + S2 = cos (/ VWt + < |) S |-< |) S2) ......... . (2) This paper is applicable to China National Standard (cys) person 4 threats (210X297 mm) A7 B7. (4) V. Description of the invention (3) and input to the lock in amplifier (10) , Can directly read out the phase difference δ of ip (Awt) and Is (ZXWt) and the ratio of the reflected light intensity of heterodyne interference P wave and S wave. Where δ = [(φΡι -Φρ2)-(Φ51 -Φ52)] .............. ............. (3) Meaning V ^ P | ^ P2 Asi ^ S2 Since (ΦΡ2, Φ5ι 木 2) and (ΪΡ2, IS1, IS2) are constants, given by Eq ( 3) It can be known that the present invention can simultaneously obtain changes in the phase of the dagger wave φP1 and the amplitude Ip. In terms of heterodyne interference P-wave (ρι + ρ2) & S-wave (S! + S2), the second optical architecture forms a common path. In phase measurement, it is immune to the external environment. This greatly improves the phase test accuracy. In the third figure, the surface plasma plasma wave SPR optical module has a glass based plate (53) and a metal film (54) with a thickness of 500A on the surface such as gold (Au) or silver (Ag). The optical refractive index matching solution (index) The purpose of matching oil) (52) is to combine the diamond lens (51) with the glass-filled substrate (53) so that their refractive indices are the same. The surface of the metal film (54) is plated with an antibody (55) for testing bacteria or viruses and is The antigen (56) of the test bacterium or virus binds and has an effect, and forms an antigen-antibody conjugate (57) in the reactor (58). The generation of the surface plasma wave and the surface of the metal thin film due to the attachment of the antibody antibody body (57) changed the effective optical refractive index, which caused the phase and intensity of the reflected p-wave to change. At the same time, the changes in the phase and amplitude of the reflected heterodyne interference P wave are used for the paper size. The two Chinese standards (CNS) Α4 size (210X297 mm) (please read the precautions on the back before filling this page) . 粲. Central Laboratories, Ministry of Economic Affairs, Shellfish Consumer Cooperatives, Printed Oxygen Ministry of Economics, 橾 Institute for Real Labor, Consumers Cooperation, Du Yin 辇 A7 B7 V. Description of Invention (f) '-The rapid inspection of bacteria is the invention patent The main content of this invention patent has the following advantages: 1. Sensitive material; heterodyne interference technology is applied to her in real time, the amount is the most sensitive method of gamma in the field of modern optics ~ her innovative heterodyne Interferometric phase detection technology, the detection sensitivity is greatly improved than the method of measuring the intensity of reflected waves. 2. The present invention proposes a new type of optical architecture, the common secret of silk optics, which can greatly improve the degree of joy and recording of the phase side measurement, and is not affected by external interference. 3. The invention does not require fluorescer, which makes the inspection process fast and simple. 4. The present invention uses a phase-locked amplifier for instant measurement of phase and vibration. 5 · "Benfa Ake 1: Measure the size of the ρ wave of the reflection treacherous wave, reduce the size of the ρ wave, reflect the optical structure of the common path of the yarn, and simultaneously measure the amplitude ratio of the heterodyne interference P wave and S wave; ^, not subject to laser light intensity The unstable Ying Xin's brief description of the 囷 style and the illustration of the original drawing symbols are as follows. Winter people and encountered TSBI home (CNS) A4 size (210X297 mm) I !: Install II (Please read the precautions on the back before writing this page) * π A9 B9 C9 D9 Schematic ϋ) First Figure Schematic illustration of the plasma wave generation on the surface of the Rhombus mirror Figure 2 The common optical path heterodyne interference phase detection surface plasma wave biosensor architecture Figure 3 The surface plasma plasma wave biosensor SPR optical component diagram (please read the back first (Notes for re-margining system) Order-line 丨 丨. Printed on paper scales by the Intellectual Property Bureau of the Ministry of Economic Affairs, Shellfish Consumer Cooperatives, using China National Standard #CNS (CNS) A4 (210X297 mm) Intellectual Property of the Ministry of Economic Affairs Bureau's consumer cooperation Du printed A9 B9 C9 D9 schematic cy symbol element description: (1) linearly polarized laser light source (2) λ / 2 wave plate (3) beam splitter (4) acousto-optic modulator ( acousto-optic modulator) (41) driver (driver 1) (42) driver (driver 2) (5) reflector (6) SPR component ⑺ polarization beam splitter (8) detector (9) filter (10) ) Lock-in amplifier (11) Personal computer (51) Rhombus (52) Refractive index matching solution (53) Glass substrate (54) Metal film (55) Test for bacterial body antibodies (56) Test bacterial substance antigen (57) antigen-antibody conjugate (5 8) reaction chamber (69? Glass. Split scale., (60 / metal dielectric _ (Please read the precautions on the back before Line drawing) -β i! _ This paper size is in Chinese National Standard (CNS) A4 (210X297 mm)

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393575 AS B8 C8 D8 六、申請專利範園⑴ ~~ : 1. 一種光學共同路徑外差干涉相位偵測表面電漿波生物感知器,它能定性 及定量測定菌體或病毒種類及其濃度,架構可由一表面電漿波光學組件 (6),一線偏極化雷射光源(1 ),一入/2波片(2),二分光片(3),二聲 光調變器(4),二驅動器(41)(42), —極化光分光片(7),一反射面鏡(5), 二光偵測器(8),二濾波器(9),一鎖相放大器(1〇)及一個人電膘(η)等 組成,於表面電漿波光學組件中測試菌體或病毒的抗原與附著在淘試片 金屬薄膜表面的抗體結合後,藉由入射雷射光P波(TM波)在金屬表面 上產生表面電漿波而造成反射的P波相位改變及振幅改變;外差干涉P 波(PJP2)與外差干涉S波(Si+Sg)構成光學共同路徑,它對外界環境 變化有免疫能力>·系統擁有較高的相位及振幅量測穩定度,靈敏度及信 號雜訊比(SNR)j利用鏑相放大器可同時量取反射外差干涉P波的相位 及振幅的改變進而求得被測菌體或病毒的濃度;所使用的鎖相放大器可 * . / 由相位偵測器偵測相位變化j線偏極化雷射可使用固體(含半導體)或氣 - 體雷射,聲光調變器可使用相位調變器(phase modulator),電光調變 j 器(Electro-optical modulator)產生雷射光頻率偏移j聲光調變器可 利用機械式震動或旋轉光柵(grating)產生入射雷射光頻率偏移’雷射 光可 線偏極化互相垂直且雷射光頻率不同之雷射|雷射光可以使用 / 電流調制方式產生雙頻率且線偏極化互相垂直的半專體雷射;其中SPR 本纸張尺度逋用中國國家揉率(CNS > A4规格(210X297公釐) ---------^ ! (請先Η讀背面之注意事項再填寫本頁) 订 線 經濟部智慧财產局員工消費合作社&製 a 393575 六、申請專利範圍(y 組件中的菱鏡可由半球形相同玻璃材質取代,並配合聚焦之入射p波雷 射光取代平行雷射光束產生表面電漿波$系統中單一偵檢器可採用2維 列陣光偵檢器(2-D photo detector array),以達到同時量測多個不 同入射角之要求。 2.如申請專利範圍第一項所記載之光學共同路徑外差干涉相位偵測表面 電漿波生物感知器中金屬薄膜可吸附被測試物體之化學物質,本發明 可應用於氣體或液體之化學物質偵測。 11—^—1—111 111I 線 —ί (請先聞讀背面之注$項再填寫本頁) 經濟部智慧財產局員工消费合作杜印製 210X297公釐) 私纸浪尺度逋用中國國家#率(CJ4S )八4规格(393575 AS B8 C8 D8 VI. Patent Application Fan Yuan ⑴ ~~: 1. An optical common path heterodyne interference phase detection surface plasma wave biosensor, which can qualitatively and quantitatively determine the species or concentration of bacteria or viruses, The structure can be composed of a surface plasma wave optical component (6), a linearly polarized laser light source (1), an input / 2-wave plate (2), a two beam splitter (3), and two acousto-optic modulators (4). , Two drivers (41) (42),-polarization beam splitter (7), a reflecting mirror (5), two light detectors (8), two filters (9), and a phase-locked amplifier (1 〇) and a human electroluminescence (η) and other components, in the surface plasma wave optical components of the test bacteria or virus antigens and antibodies attached to the surface of the metal film of the test film after binding, the incident laser light P wave (TM (Wave) produces a surface plasma wave on a metal surface, which causes a change in the phase and amplitude of the reflected P wave; the heterodyne interference P wave (PJP2) and the heterodyne interference S wave (Si + Sg) form an optical common path, which is Immunity to environmental changes> The system has high phase and amplitude measurement stability, sensitivity and signal-to-noise ratio (SNR) j Phase-amplifiers can be used to simultaneously measure the phase and amplitude changes of the reflected heterodyne interference P waves to determine the concentration of the bacteria or virus to be tested; the phase-locked amplifier used can detect the phase by a phase detector Changing j-line polarized laser can use solid (including semiconductor) or gas-body laser, acousto-optic modulator can use phase modulator, electro-optical modulator (Electro-optical modulator) Laser light frequency offset j acousto-optic modulator can use mechanical vibration or rotating grating (grating) to generate incident laser light frequency offset 'laser light can be linearly polarized and mutually perpendicular laser light with different laser light frequency | laser light You can use / current modulation to generate semi-specific lasers with dual frequencies and linear polarizations. The SPR paper size uses the Chinese national kneading rate (CNS > A4 size (210X297 mm) ---- ----- ^! (Please read the notes on the back before filling in this page) Ordering Line Consumer Intellectual Property Co., Ltd. of the Intellectual Property Bureau of the Ministry of Economic Affairs & a 393575 VI. Patent application scope Hemispherical identical glass Material replacement, and the use of focused incident p-wave laser light instead of parallel laser beams to generate surface plasma waves. A single detector in the system can use a 2-D photo detector array to achieve Requirement to measure multiple different incident angles at the same time. 2. The optical common path heterodyne interference phase detection surface plasma wave biosensor described in the first item of patent application scope can absorb the chemical substances of the test object. The invention can be applied to the detection of chemical substances in gas or liquid. 11 — ^ — 1—111 111 线 —ί (please read and read the note on the back of the page before filling out this page) Intellectual Property Bureau, Ministry of Economic Affairs, Consumer Consumption Du printed 210X297 mm) Private paper wave scale 逋 用 中国 国 # Rate (CJ4S) 8 specifications (
TW088101282A 1999-01-28 1999-01-28 Optical heterodyne, phase sensitive surface plasma wave biosensor TW393575B (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100347546C (en) * 2005-09-02 2007-11-07 清华大学 Sensing method of protein chip and detection system therefor
CN102289083A (en) * 2011-08-23 2011-12-21 中国科学院光电技术研究所 Far-field super-resolution visual imaging device and imaging method
EP2633288A4 (en) * 2010-10-28 2017-11-29 General Electric Company Systems and methods for detection and imaging of two-dimensional sample arrays

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100347546C (en) * 2005-09-02 2007-11-07 清华大学 Sensing method of protein chip and detection system therefor
EP2633288A4 (en) * 2010-10-28 2017-11-29 General Electric Company Systems and methods for detection and imaging of two-dimensional sample arrays
CN102289083A (en) * 2011-08-23 2011-12-21 中国科学院光电技术研究所 Far-field super-resolution visual imaging device and imaging method
CN102289083B (en) * 2011-08-23 2013-04-03 中国科学院光电技术研究所 Far-field super-resolution visual imaging device and imaging method

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