TW393359B - Spinneret manufacturing process via molding - Google Patents

Spinneret manufacturing process via molding Download PDF

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Publication number
TW393359B
TW393359B TW87106662A TW87106662A TW393359B TW 393359 B TW393359 B TW 393359B TW 87106662 A TW87106662 A TW 87106662A TW 87106662 A TW87106662 A TW 87106662A TW 393359 B TW393359 B TW 393359B
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Taiwan
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layer
electroforming
spinning
nozzle
spun
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TW87106662A
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Chinese (zh)
Inventor
Yau Cheng
Bo-Yuan Shiu
Jia-Lung Guo
Shr-Chang Tzeng
Shang-Wen Kang
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Nat Science Council
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  • Moulds For Moulding Plastics Or The Like (AREA)

Abstract

The uniformity and consistency of capillary holes is very important in manufacturing spinneret. For this reason, high precision machining was used to fabricate the mold insert. The spinneret were then electroformed from the molded structure for mass production. The lifetime of spinneret could be enhanced by hard coating technique. The manufacturing processes of spinneret, including lithography, molding and assembling, were proposed in this patent. The mold can also be made by other process, such as electric discharge machining (EDM), laser machining, or plasma etching.

Description

A7 B7 五、發明説明( 產業上之應用領域 本發明揭示運用光刻模仁製法,及模造後的喷嘴及 紡口整體製程。 15 發明背景 微機械製造模仁 近年來以模造法生產微機械元件有重大進展;模仁 之生產可使用光刻技術提高精密度,並且批量生產公差 極小的元件。不但成本降低,而且提高產品一致性。非 光刻方法所生產的模仁,其公差與精密度相當。而使用 光刻術可以大幅降低公差’使其小於精密度十倍以上, 視生產程序而定。 經濟部中央襟準局員Η消費合作社印製 20 光刻批量生產微機械模仁時,因生產設備價格昂 貴’因此如何利用光刻生產精密度及一致性高的噴孔, 再轉換為模仁以進行大量生產’是此製程的重要議題。 模造紡口 使用於人造纖維喷絲口(喷孔)之機械形狀為影響 25抽絲品質之重大因素之-。-般而言,越細的絲須要^ 本紙張 國家標準(CNS ) A4規格(210x297公釐) (請先閱讀背面之注意事項再填寫本頁)A7 B7 V. Description of the Invention (Industrial Application Fields) The present invention discloses the use of a photolithographic mold manufacturing method, and the overall process of nozzles and spinning orifices after molding. 15 BACKGROUND OF THE INVENTION Significant progress has been made; the production of mold cores can use lithography to increase precision and mass-produce components with very small tolerances. Not only the cost is reduced, but the consistency of the product is also improved. The mold cores produced by non-lithography methods have tolerances comparable to precision . And the use of lithography can greatly reduce the tolerance 'to less than ten times the precision, depending on the production process. Printed by a member of the Central Bureau of the Ministry of Economic Affairs and the Consumer Cooperatives. The equipment is expensive, so how to use lithography to produce high-precision and consistent nozzles and then convert them into mold cores for mass production is an important issue in this process. Molded spinning nozzles are used in artificial fiber spinnerets (jet nozzles) ) The mechanical shape is one of the major factors affecting the quality of 25 wire drawing.-In general, the thinner the wire is, the national standard of this paper CNS) A4 size (210x297 mm) (Please read the back of the precautions to fill out this page)

A7 B7 五、發明説明(2 ) J喷孔’但生產微小喷孔時,往往深寬比有一定之限 制’也就是喷孔的深度受限制。然兩擁有一致性紡口的 喷孔’是量產上重要條件,否則所喷出之絲粗細不同, 5 在後續工作上會造成不良的影響。 近年來微小機械元件之模造技術快速發展,製造精 度已經到次微米之境界(光碟片),不但生產快速、成本 低而且一致性非常高。 10 習知技藝 .生產’偏这法鹿屏攻然 而當喷孔直徑小於200微米時,一般而言以放電加工高 5 價位之紡口,仍然存在t列缺點: 1.喷孔的深寬比降低至3比1以下。 2·喷孔直徑的公差與直徑的比例上升至百分之—以 諳 先 聞 讀 背 λ 注 意 事 碩 再 本袈 頁 訂 上 經濟部中央標準局員工消費合作社印製 上 喷孔孔深之公差與孔深比例上升至百分之 以 發明要點 4 本紙張尺度適用中國國家標準(CNS ) Α4規格(210X 297公釐) A7 B7 五、發明説明(3 ) 利用光趾觀生產摸仁乃洗在先阻上製造光刻麗,再 5 本發朋摸仁製^,及模造後、纺口〜製法,能 太幅增進工列性質: ςι·提高小孔徑喷孔之深寬比。 ^2.減少紡口上噴孔孔徑之公差。 ^ 3.減少紡口上喷孔孔深之公差。 10 4 .製造平滑曲式喷孔轉換角。 \s.可製造各種平面形狀的異形紡Ρ。 表例說明 15 表一模造法紡口製程流程圖 圖式說明 經濟部中央標準局員工消費合作社印製 (請先閲讀背面之注意事項再填寫本頁) 圖1模造精密紡口之製程 2〇 a.精密加工喷孔 b. 多節精密喷孔填入金屬板之空穴中焊接 c. 多節喷孔一端開轉換角為模仁 d. 以塑膠射出成形後,在射出模表面鍍導電模作 為電鍍底層 本紙張尺度適用中國國家標準(CNS ) A4規格(210X297公釐) 經濟部中央標準局員工消費合作社印製 A7 ______ B7 五、發明説明(4 ) ~~-— e·電鑄成型後脫膜,並以拋光控制此微喷嘴結構 厚度 f.將機械加工之紡口本體與電鑄所得的微喷嘴擴 5 散接合 圖2模造精密紡口製程 a. 紡口本體上數層焊接層並與組裝成型的微嘴嘴 接合後’進行高分子材料射出成形 b. 射出後脫模 ίο c.以導電的硬焊層為基底電鑄微噴孔結構 d.紡口本體與微喷嘴高溫接合,同時去除射出之 高分子,微噴嘴表面並拋光以控制厚度 201.射出成形之高分子 圖3模造紡口實施例一的硬臈改良製程 15 ^如模造紡口實施例一(圖丄^〜⑴的步驟射出 成型後’隨後在射出模表面錄導電層及非金 屬磲膜 以高分子保護柱體的硬膜 C·以反應離子蝕刻(RIE)未保護的硬骐露出底下 20 的導電層 d·去除高分子保護層(隨後可重複圖i.e〜f之步 驟製造紡口) -------- --- 6 標準(CNS)⑽祕(21Qx297公麓) ~~ (請先聞讀背面之注意事1!再填寫本頁) '訂· A7 A7 經濟部中央標準局負工消費合作社印製 五、發明说明(5 ) 圖4極Γ造紡口實施例二的硬膜改良製程 a·如模造實施例二(圖2.a〜b)的步驟射出成 型,隨後在射出模表面鍍導電層及非金屬硬 5 膜 b. 以高分子保護柱體的硬臈 c. 以反應離子餘刻(rie)未保護的硬臈露出底下 的導電層 d. 去除高分子保護層(隨後可重複圖之步 10 製造纺口)。 發明之詳細說明 矣Μϋϋ分兩太部份處理,氙板w料一加丁, 15 口。模仁加工之部份,乃。am*越高深寬 ~—-~~---------------- 比一、高精廣^、高均4M4之製程較厚J:,而且射出或熱壓 成形k使用溫度比紡口操作溫度傳,所以模仁可使里低 。模仁製出之後,可使甩摸造座複复 旒虞。射出或熱壓速度快、成本低,惟有電鑄之時間較 2° 長。但因模仁經射出模造轉換後、高深寬比結構的反模 深寬比降低,可以採用高速電鑄。 本發明所提出的模造法紡口製程流程圖如表一所 m ml mf nn n^i βΛ\) nn ^mf —^ϋ ^ V 1 I. I .. ,^¾ i (請先閱讀背面之注意事項再填寫本頁) 本,.,氏張尺度通州r國國豕襟準(CNS) Α4規格(2ι〇χ297公幻 Λ7 Λ7 經濟部中央標準局員工消費合作社印製 五、發明説明(6 ) ~~~ 示,係運用光刻及電鑄製造方法製造精密噴孔,而後經 焊接並開轉換角製作多節喷孔並加以组裝。 5 —種製造纖維纺口.的方法,包括下列步驟: (1) 以精密加工生產小型模仁,再填入空穴利用多節組 裝焊接製造高深寬比的大型模仁; (2) 利用上述模仁進行模造; (3) 脫模後利用蒸鍍、濺鍍、無電鍍或其它方法產生一 10 導電層,而後在此導電層上進行鎳電鑄; (4) 電鑄後之紡口薄板經拋光控制孔深後,與紡口本體 進行接合而製成紡口。 而上述製造纖錐纺诀中i利嚴上述模仁進行 15 槔造方式可選用射出成形,或熱壓成形;其中接合方式 而製成紡口可選用高溫擴散接合,或高溫硬焊。其中精 密加工方法生產小型模仁,係包括X光深刻(LIGA)、 雷射加工、放電加工或反應離子餘刻等等。其中在電鱗 紡口結構前可先運用蒸鍍、碑鍍、無電鍍,或電鍍方式 20 鍍上一層導電的硬金屬膜,或含陶磁粉末之金屬膜再進 行電鑄’以增強噴孔表面的硬度。在模造成形嘴孔後及 電鑄喷孔前’在射出模表面鍍上非金屬硬膜;以高分手 (諳先聞讀背面之注意事項再填寫本頁) --1„--;--II---_---:---策—-----訂 本紙張尺度適用中國國家標準(CNS ) A4規格(210 X 297公釐) A7 A7 15 經濟部中央標準局員工消費合作社印製 20 B7 五、發明説明(7 ) 材料保護喷孔柱體部份後,隨後以反應離子蝕刻將^^底 非導體姓盡露出金屬,並從金屬層開始電鑄的技術。 一種製造纖維紡口的方法,包括下列步驟: (1) 以精密加工生產小型模仁,再填入空穴利用多節 組裝焊接製造高深寬比的大型模仁; (2) 在紡口本體上以電鍍、濺鍍等方法上一層至多層 焊接導電薄膜,將此紡口本體與喷孔模仁對位夹 緊後進行射出成型; (3) 將模仁與紡口本體分離;隨後將本體置入錄電 鑄槽中電鑄喷孔部份; <4) f鑄完成後,加高溫高壓使電鑄層和紡口本體因 焊結層而強力結命,輯再以拋光控制纺口喷孔 深度。 、 而上述製造纖維紡口的方法中,利用上述模仁進行 模造方式可翻射^成形,或顏成形;其巾接人方气 而製成紡π可高溫缝接合,或高溫硬焊。財精 密加工方法生產小賴仁,係包括父細刻(Η碑、 雷射加工、放電加工或反應離子钱刻等等。其雷 紡口結構前可先運用驗、频、鱗錢,絲鑛方式 本紙張尺度適财_家髀A7 B7 V. Description of the invention (2) J nozzle hole ’However, when producing small nozzle holes, there is often a limit on the aspect ratio’, that is, the depth of the nozzle hole is limited. However, the two nozzles with consistent spun openings are an important condition for mass production, otherwise the thickness of the spun silk will be different, which will cause adverse effects in subsequent work. In recent years, the molding technology of small mechanical components has developed rapidly, and the manufacturing accuracy has reached the sub-micron level (optical discs). Not only is the production fast, the cost is low, and the consistency is very high. 10 Know-how. Production of this method of deer screen attack. However, when the diameter of the spray hole is less than 200 microns, generally speaking, the spinning nozzle with a higher price of 5 is still subject to the t column disadvantages: 1. The aspect ratio of the spray hole Reduced below 3 to 1. 2 · The ratio of the diameter of the nozzle hole to the diameter has risen to 100% —by reading the first page and reading the lambda. Note that this page should be printed on the title page. Proportion to hole depth rises to percent to the point of invention 4 The paper size is applicable to the Chinese National Standard (CNS) A4 specification (210X 297 mm) A7 B7 V. Description of the invention (3) The use of bare-toe view to produce touch kernels is the first Resistive fabrication of photolithography, and then 5 copies of this method, and after molding, spinning ~ manufacturing method, can greatly improve the properties of the process: ιι · Increase the aspect ratio of small aperture nozzles. ^ 2. Reduce the tolerance of the orifice diameter on the spinning orifice. ^ 3. Reduce the tolerance of the nozzle hole depth on the spinning mouth. 10 4. Make smooth curved nozzle switching angle. \ s. Can produce all kinds of special-shaped spinning P. Description of Table Example 15 Table 1 Flow chart of the spinning process of the molding method Printed by the Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs (please read the precautions on the back before filling this page) Figure 1 Manufacturing process of molding precision spun 20a .Precision machining nozzles b. Multi-section precision nozzles are filled into the cavity of the metal plate and welded. C. Multi-section nozzles are opened at one end to convert the angle to the mold core. D. After plastic injection molding, the conductive mold is plated on the surface of the injection mold as Electroplated bottom layer The paper size is applicable to Chinese National Standard (CNS) A4 specification (210X297 mm) Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs A7 ______ B7 V. Description of the invention (4) ~~ -— e. Film, and control the thickness of this micro-nozzle structure with polishing f. Spread the mechanically processed spinning nozzle body and the micro-nozzle obtained by electroforming to expand and loosen. Fig. 2 Molding precision spinning nozzle process a. Several layers of welding layer on the spinning nozzle body and After the assembled micro-nozzle is joined, the polymer material is injection-molded. B. The mold is ejected after injection. C. The micro-jet hole structure is electroformed based on the conductive brazed layer. D. Remove injection Polymer, micro-nozzle surface and polishing to control the thickness 201. Injection molding of the polymer Figure 3 Molded spinning orifices in the first embodiment of the improved process 15 ^ As molded spinning orifices in the first embodiment (Figure 丄 ^ ~ ⑴ steps of injection After molding ', the conductive layer and non-metallic film are then recorded on the surface of the injection mold. The hard film of the pillar is protected with a polymer. C. The unprotected hard film is exposed by reactive ion etching (RIE). The conductive layer under 20 is exposed. The polymer is removed. Protective layer (these steps can be repeated after the steps of Figures i ~ f) -------- --- 6 Standard (CNS) Secrets (21Qx297 male feet) ~~ (Please read the notes on the back first 1! Please fill in this page again) 'Order · A7 A7 Printed by the Central Standards Bureau of the Ministry of Economic Affairs and Consumer Cooperatives 5. V. Description of the invention (5) Fig. 4 Hard film improvement process a. Example 2 (Fig. 2.a ~ b): Injection molding, and then coating the surface of the injection mold with a conductive layer and a non-metallic hard 5 film b. Protect the pillars with a polymer polymer c. Use a reactive ion to etch (rie) The unprotected hard palate exposes the conductive layer underneath. D. Remove the polymer protective layer (step 10 can be repeated later). Manufacture of spinning mouth). Detailed description of the invention 矣 Μϋϋ is divided into two parts, Xenon plate w plus one gallon, 15 parts. Mold core processing part, but. The higher the depth of the am ~~~~~- -------------- Thicker than the first, high precision ^, high average 4M4 process J :, and the injection or hot press forming k use temperature than the spinning mouth operating temperature, so the mold can be Make the inside low. After the mold core is made, you can make the mold to recover the mold. The injection or hot pressing speed is fast and the cost is low, but the time for electroforming is longer than 2 °. However, after the mold core is converted by injection molding, High aspect ratio structure reduces the aspect ratio of the counter die, and high-speed electroforming can be used. The flow chart of the spinning process of the molding method proposed in the present invention is shown in Table 1. m ml mf nn n ^ i βΛ \) nn ^ mf — ^ ϋ ^ V 1 I. I .., ^ ¾ i Note: Please fill in this page again.) This, .., Zhangzhou standard Tongzhou r country standard (CNS) Α4 specifications (2ιχχ297 public fantasy Λ7 Λ7 printed by the staff consumer cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 5. ) ~~~ Shown is the use of photolithography and electroforming manufacturing methods to produce precision nozzle holes, and then welding and opening the conversion angle to make multiple nozzle holes and assembly. 5-a method of manufacturing fiber spinning mouth, including the following Steps: (1) Produce small mold kernels by precision machining, fill in the cavities, and use a multi-section assembly and welding to produce large mold kernels with high aspect ratio; (2) Use the above mold kernels for molding; (3) Use steam after demolding. Electroplating, sputtering, electroless plating, or other methods produce a 10 conductive layer, and then electroforming nickel on this conductive layer; (4) After the electroformed spinning plate is polished to control the hole depth, it is joined with the spinning body The spinning mouth is made. And the above-mentioned manufacturing method of the taper spinning method is strict. Injection molding, or hot pressing; where the spun joint is made by high-temperature diffusion bonding or high-temperature brazing. The precision processing method produces small mold cores, including X-ray deep (LIGA), laser processing, and electrical discharge. Processing or reactive ion etching, etc. Among them, before the electrospinning structure, evaporation, stele plating, electroless plating, or electroplating method 20 can be used to coat a conductive hard metal film or a metal film containing ceramic magnetic powder. "Electroforming" to enhance the hardness of the nozzle surface. After molding the nozzle hole and before the electroforming nozzle hole, the surface of the injection mold is plated with a non-metallic hard film; (This page) --1 „-; --II ---_---: ------------- The size of the paper used in this edition applies to the Chinese National Standard (CNS) A4 (210 X 297 mm) ) A7 A7 15 Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs 20 B7 V. Description of the invention (7) After protecting the spray nozzle cylinder part, the reactive non-conducting surname will be used to expose the metal at the bottom of the non-conductor, and The technology of electroforming from metal layer. A method for making fiber spinning mouth It includes the following steps: (1) Production of small mold cores by precision machining, and filling in cavities to produce large mold cores with high aspect ratios using multi-section assembly welding; (2) Electroplating, sputtering, etc. on the spinning body One to multiple layers of conductive film are welded, and the spinning nozzle body is aligned with the nozzle hole mold for injection molding; (3) The mold kernel is separated from the spinning hole body; then the body is placed in the electroforming nozzle in the electroforming nozzle Part; < 4) After the casting is completed, the high temperature and high pressure are added to make the electroformed layer and the spinning body strong due to the welding layer, and then the polishing nozzle is controlled by polishing. In the method for manufacturing a fiber spun mouth, the molding method described above can be used for injection molding, or color forming; the towel can be made into spun π, which can be welded at high temperature, or brazed at high temperature. The production method of Xiaolairen by Caicai precision processing method includes the father's fine engraving (stone monument, laser processing, electrical discharge processing, or reactive ion money engraving, etc.). The laser spinning structure can be used before inspection, frequency, scale money, silk ore Ways This Paper Scales Money_ 家 _

(諳先閱讀背面之注意事項再填"本頁〕 '衣-(谙 Please read the precautions on the back before filling in " this page] '衣-

、1T A7 A7 經濟部中央標準局員工消費合作社印製 五、發明説明(8 ) 鍍上一層導電的硬金屬膜,或含陶磁粉末之金屬膜再進 行電鑄,以增強喷孔表面的硬度。在模造成形喷孔後及 電鑄喷孔前’在射出模表面鑛上非金屬硬膜;以高分子 5 材料保護噴孔柱體部份後’隨後以反應離子蝕刻將基底 非導體蝕盡露出金屬,並從金屬層開始電鑄的技術。 模仁製造 10 一般細丹尼纖維紡口上的喷孔,密度約為每平方公 分2個喷孔,光刻生產的喷孔密度可以大幅提高十倍 (約每平方公分20個),而增加生產喷孔模仁之效 率。同時以光刻生產紡口也可大幅縮小喷孔的孔徑公 差。 15 精密噴孔製造 在金屬枉體上加工出直徑小於200微米的噴孔, 喷孔可貫穿或留一層薄金屬封口於金屬柱體底部,柱體 20 外形可以為圓形或任意形狀,但要易於悍接及定位。柱 向視製程而定由0·5毫米至數毫米不一。該喷孔可由 X光深刻及電鑄或其它方式製出如圖2(a)所示;模仁 組裝按紡口設計之噴孔分佈在金屬板上加工出上述柱 狀空穴,再視喷孔柱高及空穴深度(通常為數皿幻將 ----f---:---' 衣------訂 (請先聞讀背面之注意事項再填寫本頁) 本紙張尺度適用巾酬家縣^ (CNS) μ規格(卩敝‘公幻 ——-- 上述喷孔柱填人—節至多節。填滿後再以硬焊方式將喷 孔柱體與金屬.板焊結如圖i (b)所示。硬烊時,且金屬 薄層封^姉胁最下方,叫止㈣滲入喷孔 (其他上郎喷孔若有焊料滲入可經轉換角製程清除)。 填滿後賴仁絲再麵絲触製轉妓。表面抛 光後的模域後以或放電加工M造轉換角如圖 1⑹所示,轉換角可利用原有之喷孔做為中心點,故 可減少定位所需的時間。 模造紡口製法 模造紡實施例一為電鑄精密微喷孔之薄板,再與紡 口本體尚溫擴散接合。此接合須對位,但薄板厚度易於 控制。接合面因轉換導角冬故,對位精度可降至=十微 米而不增加成本。 模造紡口實施例二為利用紡口本體(通常為不鏽 鋼)導電之特性,經與精密噴孔接合、射出噴孔柱體、 脫模後直接在紡口本體上電鑄。但因電鑄材質為錦,須 經高溫接合處理後以增強結合力。 模造紡實施例三為實施例一與實施例二的硬膜處 A7 B7 、發明説明(10 理製程’㈣善觀的耐膜性 15 實施例一 L利用上賴仁進賴造,模造法可以是射出成形或 熱壓成形。 2 ·脫模後_蒸鍍、猶、無電料其它方法產生一 導電層如圖1(⑴所示,而在此導電層上進行電鑄 如圖1 (e)所示。 3 .上一步_電層加錢,可喊鍍、賴、無電锻 或電锻上-層導電的硬金屬膜或含陶磁粉末之金 屬臈。 .電鑄後之紡口薄板,經拋光控制孔深後,與紡口本 體進行向溫擴散接合或高溫硬焊而製成紡口如圖 1 (f)所示。 請 閱 意 事 項 再 # ’衣 I I 訂 經濟部中—ii消—作社印製, 1T A7 A7 Printed by the Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs 5. Description of the invention (8) Electroplated hard metal film or ceramic film containing ceramic magnetic powder and then electroformed to enhance the hardness of the surface of the nozzle. After forming the injection hole and before the electroforming injection hole, 'the non-metallic hard film is on the surface of the injection mold; after protecting the nozzle hole part with polymer 5', the substrate non-conductor is etched out by reactive ion etching Metal and electroforming technology starting from metal layers. Mould manufacture 10 The density of the orifices on the spinneret of general fine denier fiber is about 2 orifices per square centimeter. The density of orifices produced by photolithography can be increased ten times (approximately 20 per square centimeter), which increases production The efficiency of the nozzle hole. At the same time, the production of spinning orifices by photolithography can also greatly reduce the aperture tolerance of the nozzle holes. 15 Precision Nozzle Manufacture Nozzle holes with a diameter of less than 200 microns are processed on the metal body. Nozzles can penetrate or leave a thin metal seal at the bottom of the metal cylinder. The shape of the cylinder 20 can be circular or any shape. Easy to connect and position. Column direction varies from 0.5 mm to several mm depending on the process. The nozzle hole can be made by X-ray deep and electroforming or other methods, as shown in Figure 2 (a); the nozzle holes of the mold core assembly according to the spinning opening are distributed on the metal plate to process the above-mentioned columnar cavity, and then the nozzle is viewed. Column height and cavity depth (usually the number of dishes ——f ---: --- 'clothing ---- order (please read the precautions on the back before filling this page) This paper The standard is suitable for towels and households (CNS) μ specifications (卩 敝 'public fantasy --- the above-mentioned nozzle column is filled with people-at most sections. After filling, the nozzle column and the metal plate are brazed. The solder joint is shown in Fig. I (b). When it is hard, and the metal layer is sealed at the bottom, it is called the stopper infiltration nozzle (other Shanglang nozzles can be removed by the conversion angle process if there is solder penetration). After filling up, Lai Rensi touches the face with prostitutes. After the surface is polished, the mold area is transformed by or electric discharge machining to make the conversion angle as shown in Figure 1⑹. The conversion angle can use the original nozzle hole as the center point, so it can be reduced. The time required for positioning. Molding spinning method The first example of the spinning method is a thin plate of electroformed precision micro-nozzles, which is then diffusely joined to the spinning body. This joint must be aligned, but the thickness of the sheet is thick. Degree is easy to control. Due to the conversion of the lead angle, the alignment accuracy can be reduced to ten micrometers without increasing the cost. The second embodiment of the molded spinneret is to use the electrical conductivity of the spinneret body (usually stainless steel). Nozzle joining, ejection of the nozzle post, and electroforming directly on the spinning body after demolding. However, because the electroforming material is brocade, it must be subjected to high temperature joining treatment to enhance the bonding force. The third embodiment of the molding spinning is the first embodiment. With the hard film part A7 and B7 of the second embodiment, the description of the invention (10 physical process, the good film resistance of 15), the first embodiment is made by Shanglairen, and the molding method can be injection molding or hot pressing. 2 After the mold _ evaporation, still, no electricity, other methods to produce a conductive layer as shown in Figure 1 (⑴), and electroforming on this conductive layer is shown in Figure 1 (e). 3. Previous step_ Money can be plated, laminated, electrolessly forged or electro-forged with a conductive hard metal film or a metal grate containing ceramic magnetic powder. The electroformed spinneret sheet is polished to control the depth of the hole, and is then carried out with the spinneret body. Fig. 1 (f) shows the spun joint made by diffusion diffusion bonding or brazing at high temperature. Please read the item of interest and then # ’clothing I I order in the Ministry of Economic Affairs—ii 消 —printed by the company

實施例二 將紡口本體上與噴孔板介面以電錄、激锻等方法上 層至多層焊接導電薄膜,再將此紡口本體與噴孔 模仁對位夾緊,使用射出成形或熱壓將塑膠擠入模 仁之噴孔中如圖2 (a)所示。 2·將模仁與紡口本體分離如圖2 (b)所示。 i紙張尺度適$巾_ _家;CNS) "μ 規格 uuTxJIfp- A7 A7In the second embodiment, the interface between the spun orifice body and the orifice plate is superimposed to a multi-layer welded conductive film by electric recording, forging, etc., and then the spun orifice body and the orifice die core are aligned and clamped, and the plastic is formed by injection molding or hot pressing. Squeeze into the injection hole of the mold kernel as shown in Figure 2 (a). 2. Separate the mold core from the spinneret body as shown in Figure 2 (b). i Paper size is suitable for towels _ _home; CNS) " μ specifications uuTxJIfp- A7 A7

五、發明説明+1 ) 3·直接置電鑄槽中、電鑄喷孔部份如圖2(c)所示, 如圖2 (d)所示 15 經濟部中央標準局員工消費合作社印製 20 或稃以蒸鑛、濺鑛、無電鍍或電鍍上一層導電的 硬金屬膜或含陶磁粉末之金屬獏,再進行電鑄。 5 4·電鑄兀成後,加咼温高壓使電檮層和紡口本體因焊 結層而強力結合,最麟以拋缝娜口喷孔深度 實施例 本法使用非導電性硬膜處理,以改善實施例一及實 施例二製造之喷孔的耐磨性質。 (a) ·實施例一的硬膜處理製程 1.如圖!所示模造的步驟糾成型後,隨後在 射出模表面鍍上導電層轉金屬硬膜如圖 3 (a)所示。 2·將喷孔部份,以高分子塗佈,保護非金屬硬膜 如圖3 (b)所示。 3.使用反應離子侧或錢编彳,去除分佈在底 層非金屬硬膜,露出金屬導電層部份如圖3⑹ 所示。 將高分子去除如圖3(<^)所示 5·隨後可重複®上述圖1分驟製造纺口〆 _13 本紙張尺度適用中國國家標準(CNS ) Α4規格(210Χ 297公釐) (諸先閲讀背面之注意事項再填寫本頁)V. Description of the invention +1) 3. The electroforming nozzle hole directly placed in the electroforming tank is shown in Figure 2 (c), as shown in Figure 2 (d). 15 Printed by the Staff Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs. 20 Or, a layer of conductive hard metal film or metal powder containing ceramic magnetic powder is used for steaming, splatting, electroless plating or electroplating, and then electroforming. 5 4 · After the electroforming is completed, the high temperature and high pressure are added to make the electrical layer and the spun joint body strongly bonded due to the welding layer. The most depth is the depth of the spray hole. This method uses a non-conductive hard film treatment. In order to improve the abrasion resistance of the nozzle holes manufactured in the first and second embodiments. (a) · Hard film processing process of the first embodiment 1. As shown in the figure! After the molding step shown in the figure is corrected, the surface of the injection mold is then plated with a conductive layer to a metal hard film as shown in Figure 3 (a). 2. Coating the nozzle part with polymer to protect the non-metallic hard film, as shown in Figure 3 (b). 3. Use the reactive ion side or coin braid to remove the non-metallic hard film distributed on the bottom layer and expose the part of the metal conductive layer as shown in Figure 3⑹. The polymer is removed as shown in Figure 3 (< ^). 5 · Then it can be repeated later. Figure 1 above can be used to make the spun 〆_13 This paper size applies the Chinese National Standard (CNS) A4 specification (210 × 297 mm) ( (Please read the notes on the back before filling out this page)

A7 B7 五、發明説明(12 ) (b) ·實施例二的硬膜處理製程 1. 如圖2所示模造步驟射出成型後,隨後在射出 模表面鍍上導電層及非金屬硬臈如圖4(a) 5 所示。 2. 將喷孔部份,以高分子塗佈,保護非金屬硬膜 如圖4 (b)所示。 3. 使用反應離子蝕刻或溶液蚀刻,去除分佈在底 層非金屬破膜,露出金屬導電層部份如獨4 (c) 10 所示。 4. 將高分子去除如圖3(d)所示。 5·隨後可重複上述圖1之步驟製造紡口。 15 (讀先閱讀背面之注意事項再填寫本頁)A7 B7 V. Description of the invention (12) (b) · Hard film processing process of the second embodiment 1. As shown in Fig. 2, after the injection molding process, the surface of the injection mold is plated with a conductive layer and a non-metallic hard metal. 4 (a) 5 as shown. 2. Coat the nozzle part with a polymer to protect the non-metallic hard film, as shown in Figure 4 (b). 3. Use reactive ion etching or solution etching to remove the non-metallic broken film distributed on the bottom layer, and expose the metal conductive layer as shown in Figure 4 (c) 10. 4. Remove the polymer as shown in Figure 3 (d). 5. Subsequently, the above-mentioned steps of FIG. 1 can be repeated to manufacture the spinning mouth. 15 (Read the notes on the back before filling in this page)

經濟部中央標準局員工消費合作社印製 20 25 _14 本紙張尺度適用中國國家標準(CNS ) A4規格(21〇Χ297公釐) A7 B7 五、發明説明(丄3) 表 一 精密喷口製造 > 多節喷孔組裝 光刻及電鑄製造 焊接並開轉換角 射出成型 紡口本體塗硬焊層後 與喷孔模仁對位夾緊 \ C 脫膜後鍍導電層 射出成型 1 (實施例三)硬膜處理 I > 模仁與纺口本體分離 電鑄喷孔薄板 (實施例三)硬膜處理 (請先閱讀背面之注意事項再填寫本頁)Printed by the Consumers' Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs 20 25 _14 This paper size applies to the Chinese National Standard (CNS) A4 (21〇 × 297 mm) A7 B7 V. Description of the invention (丄 3) Table 1 Precision nozzle manufacturing > more Nozzle hole assembly lithography and electroforming manufacturing Welding and open-angle conversion injection molding The spinneret body is coated with brazing layer and clamped with the injection hole die core. C After plating, the conductive layer is injection molded. 1 (Example 3) Hard film Treatment I > Separating the mold core from the spinneret body, the electroformed orifice plate (Example 3), hard film treatment (please read the precautions on the back before filling this page)

、tT 喷孔薄板與紡口擴散 接舍 電鑄喷孔結構 拋光控制噴孔 厚度 經濟部中央標準局員工消費合作社印製 拋:光控制 喷孔厚度 喷孔與紡口高溫 接合 (並去除射出之高分子) (實施例一) 15 抛光控制 喷孔庳度 (實施例二) 本紙張尺度適用中國國家標準(CNS ) A4規格(210X 297公釐)、 TT nozzle hole sheet and spinning mouth diffused. Electroformed nozzle hole structure polishing control nozzle hole thickness. Printed and polished by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs. Light control nozzle hole thickness. (Polymer) (Example 1) 15 Polishing control nozzle hole size (Example 2) This paper size applies Chinese National Standard (CNS) A4 specification (210X 297 mm)

Claims (1)

2. 3. 4. 經濟部中央標準局員工消費合作社印製 5. 一種製造纖維紡口的方法,包括下列步驟: (1) ·以精密加工生產小型模仁,再填入空穴利用 多節組裝焊接製造高深寬比的大型模仁; (2〉‘利用上述模仁進行模造; (3〉·脫模後利用蒸鍍、濺鍍、無電鍍或其它方法 產生一導電層,而後在此導電層上進行錄電 鑄; ' (4) ·電鑄後之紡口薄板經拋光控制孔深後,與紡 口本體進行接合而製成纺口。 如申請專利範圍第1項製造纖維紡口的方法,其 中採取模造方式可選用射出成形,或熱壓成形: 如申請專利範圍第1項製造纖維紡口的方法,其 中接合方式可選用高溫擴散接合,或高溫硬焊 —種製造纖維紡口的方法,包括下列步驟: (1) ·以精密加工生產小型模仁,再填入空穴利 用多節組裴焊接製造高深寬比的大型模 仁; (2)·在紡口本體上以電鍍、濺鍍等方法上_ 層至多層焊接導電薄膜,將此紡口本體與喷 孔模仁對位夾緊後進行射出成型; (3〉.將模仁與紡口本體分離;隨後將本體置 入鎳電鑄槽中電鑄喷孔部份; (4)·電鑄完成後,加高溫高壓使電鎿層和紡 口本體因焊結層而強力結合,最後再以拋光 控制紡口噴孔深度。 H利範圍第4項所述製造纖維纺口的方 當材2體i艘i一層至數層薄膜,其中選 錄:鉻、銀、鋼、鈇,及此等金屬各 種可能比例之合金’此薄膜可同時作為雷鏤的導 電層及高溫焊料的技術。w㈣觸㈣ ..........:………Θ裝:··. (請先閲讀背面之注意事項再填寫本頁) 、? 本紙張尺度巾 ® ® S標準(CNS)A4·規格(210 X 297公; 一-"_2. 3. 4. Printed by the Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 5. A method for manufacturing fiber spinning mouth, including the following steps: (1) · Production of small mold kernels by precision processing, and filling in holes to use multiple sections Assembly and welding to manufacture large mold cores with high aspect ratios; (2> 'Using the above mold cores for molding; (3> · Evaporation, sputtering, electroless plating or other methods to produce a conductive layer after demolding, and then conductive here Electro-casting is performed on the layer; '(4) · The spun sheet after electroforming is polished to control the depth of the hole, and then joined with the spun body to make the spun spout. Method, in which the molding method can be used for injection molding or hot pressing: For example, the method of manufacturing fiber spun joints in the first patent application range, wherein the bonding method can be high temperature diffusion bonding, or high temperature brazing-a method of manufacturing fiber spun joints. The method includes the following steps: (1) · Production of small mold cores by precision machining, and filling in cavities to manufacture large mold cores with high aspect ratios using multi-section welding; (2) · Electroplating on the spinning body, Sputtering and other methods _ Layer-to-multilayer welding conductive film, this spinning spout body and nozzle orifice are clamped in position for injection molding; (3>. Separating the mold core from the spinning spout body; then put the body into a nickel electroforming tank for electroforming Nozzle part; (4) After the electroforming is completed, add high temperature and high pressure to make the electric reed layer and the spinneret body strongly bonded due to the welding layer, and finally control the spouter orifice depth by polishing. The above-mentioned one-layer to several-layer film of the square material of the fiber spinning mouth is selected from among: chromium, silver, steel, osmium, and alloys of various possible proportions of these metals. Technology of conductive layer and high-temperature solder.w㈣contact㈣ .................. ………… Θ: (Please read the precautions on the back before filling this page) 、? This paper scale towel ® ® S Standard (CNS) A4 · Specifications (210 X 297 Male; A- " _ 申請專利範圍 6 ^ tit,® # 1項所述製造纖轉σ的方法, 精密加工方法包括X光深刻(LIGA)、雷 7如放電加卫或反應離子侧等等。 圍第4項所述製造纖維纺口的方 ΪΙαί11精密加工方法包括X光深刻(LIGA)、 或反應離子侧等等。 ^^專利敕圍第i項所述製造纖維紡口方法,其 二在,,紡Π結構前可先運用蒸鏟、濺鍍、無電 或電鍍方式鍍上一層導電的硬金屬膜,或含 9 ,磁粉末之金屬膜再進行電鑄,以增強喷孔表面 的硬麾。 如=請專利範園第4項所述製造纖維紡口方法, ^中在電鑄紡口結構前可先運用蒸錢、賤鐵、無 電鍍’、或電锻方式艘上一層導電的硬余屬膜,或 含陶磁粉末金屬膜再進行電鑄,以增強噴孔表 面的硬度。 10 11 如申凊專利範園第1項所述製造纖維紡口的方 法’在模造成形喷孔馋及電鑄,孔前,在射出模 表面鍍上非金屬硬膜,·以高分子材料保護喷孔^ 體部份後,隨後以反應離子蝕刻將基底非^體餘 盡露出金屬,並從金屬層開始電鑄的技術。 經濟部中央擦準局貝工消費合作社印装 如申請專利範園第4項所述製造纖維紡0的方 法’在模造成形喷孔後及電鑄喷孔前,在射出模 表面鍍上非金屬硬腺;以高分子材料保護喷孔柱 體部份後,隨後以反應離子蝕刻將基底非導體餘 盡露出金屬,並從金屬層開始電鑄的技術。 L紙張尺度適用中國國家楯準(CNS)A4規格(210x297公釐)The scope of patent application 6 ^ tit, ® # 1 The method for manufacturing fiber to σ, precision machining methods include X-ray deep (LIGA), Ray 7 such as discharge guard or reactive ion side, and so on. The method for manufacturing the fiber spinning mouth described in item 4 includes the X-ray deep (LIGA), or the reactive ion side, and so on. ^^ The method for manufacturing fiber spinning mouth described in item i of the patent. Secondly, before spinning the structure, a conductive hard metal film may be applied by steaming shovel, sputtering, electroless or electroplating, or containing Then, the metal film of the magnetic powder is further electroformed to enhance the hard surface of the spray hole surface. For example, please refer to the patent for the method of fabricating fiber spun spouts described in Item 4. Before the electrospun spun structure can be steamed, base iron, electroless plating, or electro-forging, a layer of conductive hard material can be used on the ship. Metal film, or ceramic film containing ceramic magnetic powder, and then electroformed to enhance the hardness of the nozzle surface. 10 11 The method of manufacturing fiber spinning mouth as described in item 1 of Shenyang Patent Fanyuan ', before forming the injection nozzle and electroforming, the non-metal hard film is plated on the surface of the injection mold before the hole is formed, protected by a polymer material. After spraying the body portion, the substrate non-body residue is then exposed to metal by reactive ion etching, and electroforming is started from the metal layer. The method of manufacturing fiber spinning as described in item 4 of the patent application park is printed by the shelling consumer cooperative of the Central Bureau of Accreditation of the Ministry of Economic Affairs. Hard gland; after protecting the nozzle pillar part with polymer material, the substrate non-conductor is exposed to the metal by reactive ion etching, and the technology of electroforming is started from the metal layer. L paper size applies to China National Standard (CNS) A4 (210x297 mm)
TW87106662A 1998-04-30 1998-04-30 Spinneret manufacturing process via molding TW393359B (en)

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