TW385277B - Slippable roller coveyor for clean rooms - Google Patents

Abstract

A powered conveyor for use in a clean room environment. Objects are moved by slippable rollers on roller shafts. The roller shafts are driven by chain and sprocket or by belt and pulley. The driving mechanism is contained within an enclosure. There is a roller shaft seal that retains particulate matter within the enclosure and inhibits the flow of air into the enclosure. An evacuator removes air and particulates from the enclosure. The roller shafts may extend across the width of the moving surface path, or across only a portion of the path.

Description

A7 B7 丨 4 repairs'

Supplement I V. Description of the invention (5) The route was sent to Shanlian. A pair of bushing supports 54 can rotatably receive the roller shaft 50. The roller bearing assembly 22b rotatably houses the shaft 50 in a seat 54 along the side of the surface path 53 opposite to the drive assembly 22a. The support 54 is attached to and supported by the side rail 23. As described above, the driving mechanism for the roller shaft 50 may generate particulate matter when the device 20 is operated. To accommodate particulate matter, the panel, seal, and support assembly seals the drive mechanism in the second part of the first-closed volume 29a. The cladding of volume 29a is relatively airtight, allowing the evacuator 30 to generate sub-atmospheric pressure in the first and second parts of volume 29a. It is better if a small amount of air leaks into the volume 29 a. The side rail member 23 is on one side of the second portion of the closed volume 29a. The upper panel 66 and the outer panel 69 are another boundary on the second part of the volume 29a. The bottom panel 58, the inner panel 60, and the sealing support 64 also provide a boundary for the volume 29a. The seal 62 can be used for any gap between the Cymbidium panels 58 and 60. A part of the roller shaft 50 is included in the volume 29a. Shaft and cylinder seal 68 can accommodate the roller shaft 50 ° in a rotatable manner. The two-piece elastic fixed roller shaft seal is provided between the cylinder seal 66, the face plate 68, and the support 64. The roller shaft seal first piece 70 contacts the upper half of the barrel seal 68, and is also housed in a cavity formed in the upper panel 66. The recess 70a of the sheet 70 receives the rib 66a of the panel 66, and is thereby held in position. The second piece of roller shaft seal 72 is in contact with the bottom half of the cylinder seal 68 and is accommodated in a cavity defined by the seal support 64. The recess 72a of the M 72 receives the rib 64a of the support 64, and is thereby Stay in position. The sealing sheets 70 and 72 are made of an elastic material such as a cellular urethane of an open cell type. This elasticity makes the tablets 70 and 72 tolerant of the driving mechanism and the paper size of the paper applicable to Chinese national standards (CNS> A4 specification (210X297 mm) (please read the precautions on the back before filling this page). Printed by the cooperative-8-Revised the Dingfeng Bureau of the Central Ministry of Economic Affairs; printed by the consumer cooperative A7 B7 V. Description of the invention (1) Background of the invention The conveyor is widely used for various applications for moving objects in the manufacturing environment 1 '. Sometimes manufacturing occurs in a clean room, in which case the objects being transported are sensitive to pollution. The carrier should not expose the object to pollution threats. Any contaminants produced by the carrier should be minimal and controlled. Control lotus One method of contamination from a feeder is to use a lotus feeder with low inherent pollutant generation. One type of lotus feeder is a type with a driven, slidable roller as described in US Patent 3,951,255. These rollers rotate without sliding unless the object being transported stops when it encounters an obstacle. When the object stops, the roller in contact with the object is opposite Its inner roller shaft slides instead of sliding relative to the object. Therefore, a small amount of pollutants are generated on the object, and only a limited number of rollers slide, and the sliding occurs on the wear-resistant roller to the shaft interface. Although the inherently clean type of transport Device, but even if it is powered, the sliding roller lotus feeder may not be clean enough for some types of clean rooms. What is needed is a power suitable for the clean room environment, a sliding roller conveyor. The invention is a novel and This is achieved in a non-obvious way. SUMMARY OF THE INVENTION Brief description of one aspect of the present invention is to provide a conveyor for moving a product along a path. The carrier includes a first \ many roller shafts at least at least Part of it extends below, or it can extend completely below the path. Many slidable rollers are driven by the roller shaft. A driving mechanism drives the roller shaft. The driving mechanism is mainly enclosed in an enclosure, the enclosure defines a closed Volume. Baogu includes one or two-piece elastic roller shaft seal. One oil emptyer from 1 paper size. Shizhou China storehouse standard (CNS) Λ4 Specifications (210 X 297 mm) Λ (Please read the notes on the back before filling out this page) — & | Install-^ ---- Order ------

Printed by the Ministry of Economic Affairs and Intellectual Property Bureau's Consumer Cooperative A7 B7 V. Description of the invention (8) The particulate matter generated by the drive mechanism of the device 220 is contained in the enclosed volumes 229a and 229b, the first part of the first enclosed volume 229a The motor 26 is included therein, and the panel 225 surrounds the motor 26. The second part of the first enclosed volume 229a includes a drive mechanism of the drive assembly 222a therein. The second enclosed volume 229b includes the drive assembly 222b therein. The driving mechanism 0 volume 229a and 229b are in fluid communication. Particulate matter is expelled through the nozzle 28. Although some elements of the present invention are mentioned or shown as being within the first or second part of the volume 229a, those skilled in the art generally understand that the present invention includes other combinations. As the device 220 and the device 120 have similarities 9 Those skilled in the art understand that there is-the fourth embodiment is similar to the device 20 (This fourth embodiment includes a pulley and a belt drive mechanism, which drives many extensions completely over And the roller shaft 50 below the surface path 53. The shaft, seal, faceplate, and other components of this fourth embodiment are individually described in the second-»second and third embodiments. Although the present invention is described in the drawings and The above description is exemplified and described in detail 9 but it is regarded as illustrative rather than restrictive in nature. Please understand that only the preferred embodiments have been illustrated and described by M and are within the spirit M of the present invention. All changes and modifications want to be protected > Description of component number 20 Device 21 Transport assembly 22a Drive assembly 22b Roller shaft support assembly 23 Side rails 24 feet Please read the precautions on the back, and this paper size applies the Chinese National Standard (CNS) Α4 specification (210 X 297 (Mm) 11-Revised A7 B7 printed by the Military Standards and Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs. 5. Description of the invention (2) The closed volume removes air and particles. In another aspect of the invention, the roller shaft seal is two pieces Where the separation is K, and I... The separation coincides with the plane defined by the center line of the roller shaft. In another aspect of the present invention, the driving mechanism may include a chain and a sprocket, or a pulley and a belt. On the other hand, there may be a driving mechanism along one side of the conveyor, or there may be a driving mechanism on both sides of the conveyor. One of the items of the present invention is to provide a power conveyor with slidable rollers, which is suitable for a clean room environment. Another object of the present invention is to make a sliding roller The power supply of the clean room environment is easy to assemble and tolerates misalignment. From the description, the drawings, and the scope of the patent application, these and many other objects and advantages of the present invention will be understood. (Brief description of the drawings) FIG. 1 is a side view of a first embodiment of the present invention. FIG. 2 is a view of FIG. 1 with several parts of the driving mechanism exposed. Fig. 3 is a sectional view taken along line 3-3 of Fig. 2. FIG. 4 is an enlarged view of the top of FIG. 3. Figure 5 is a side view of part of the roller shaft seals H70 and 72. FIG. 6 is a view showing a second embodiment of the present invention, which is similar to the cross-sectional view of FIG. FIG. 7 is an enlarged view of the top of FIG. 5. FIG. 8 is a view similar to FIG. 6 but showing a third embodiment of the present invention. Explanation of the preferred embodiment This paper size is applicable to Chinese national standard ((’NS) Λ4 specification (.210X 297mm) _ r _ (Please read the precautions on the back before filling in this page)

Addition of the edge to 7 hands and two hands _ V. Description of the invention (9) 25 Panel 26 Motor and gearbox assembly 28 Nozzle Please read 29a First closed volume read back 30 Evacuator note 32 Main drive sprocket 34 Second chain refilling 36 Tensioning mechanism on this page 38 Idle chain gold A 40 Lubricator mechanism 42 Cross shaft 44 Cross chain m 46 Outer drive sprocket 48 Inner drive chain m 50 Roller shaft 52 Sliding roller 'Mill 53 Surface path Economy 54 Bushing Support Department Wisdom 58 Bottom Panel Wisdom Property 60 Inner Panel Bureau Staff 62 Sealed Consumption 64 Sealed Supporter 6 4a Printed by Rib Agency 66 The size of the paper for the top panel applies to Chinese national standards (C'NS > A4 size (210X 297 mm)

-12-Correction page Printed by the Bureau of Labor and Economics of the Ministry of Economic Affairs, only A7 B7 > V. Description of the invention (3) For the purpose of promoting the understanding of the principle of the present invention, please refer to the embodiments illustrated in the drawings And specific embodiments will use M to describe these embodiments. However, (please understand that it is not intended to limit the scope of the present invention. I intend that those skilled in the art of the present invention will normally come up with these changes and other modifications in the illustrated device. The examples illustrate many other applications of the principles of the present invention. The present invention relates to a power conveyor with slidable rollers suitable for a clean room environment. The drive mechanism of the conveyor is inside the evacuated casing. Particulate matter is contained in the cladding and finally evacuated from the lotus feeder. The evacuated particles are removed from the clean room. In this way, a power conveyor with a slideable roller can be operated in the clean room without violating the clean room particles Counting standard. The present invention has four embodiments, which differ in how the roller shaft is driven and whether the roller shaft spans the entire moving surface path. In the first embodiment, one end of the roller shaft is provided with a key and a sprocket. The K drive and the other end of the roller shaft are rotatably received in a roller shaft supporting assembly on the other side of the moving surface path. In the second embodiment, the roller shaft moves along Each side of the surface path is driven by the K chain, and extends only under a part of the surface path, leaving the center of the path relatively open. There are also embodiments similar to the first and second third and fourth embodiments. The third embodiment includes a pulley and a belt driven along one side of the surface path and rotatably received on the other side of the surface path. The fourth embodiment includes a pulley drive shaft along each side of the surface path, The center of the path is relatively open. This paper size applies the Chinese national standard (('NS) Λ4 specification (210X 297 mm) _ _ (Please read the precautions on the back before filling out this page): 0¾ .-- ^- -^-, 玎

V. Description of the invention (10) A7 B7 Printed by the Intellectual Property Bureau of the Ministry of Economic Affairs Employee Cooperatives 66a Ribs 68 Shaft cylinder seal 69 Outer panel 70 Roller shaft seal first piece 70a recess 71 Semicircular cutout 72 Roller shaft seal second piece 72a recess 73 Centerline 120 Device 121 Transport assembly 122a First roller drive assembly 122b Second roller drive assembly 129 Second closed volume 129a First closed volume 1 2 9 b Second closed volume 150 Second group of roller shafts 152 Slidable Roller 154 Shaft limiter 166 Upper panel 1 6 6 a Rib 168 Corner panel 174 Product guide 2 20 Device (Please read the precautions on the back before filling this page)

This paper size applies the Chinese National Standard (CNS) A4 specification (210X2.97 mm) 13 '' Amended page Central Bureau of Standards of the Ministry of Economy ^: Printed by the Industrial and Consumer Cooperatives A7 B7 'V. Description of the invention (4) Figure 1- 5 shows a device 20, a first embodiment of the present invention. The device 20 includes a transport assembly 21 which is supported by legs 24 from a side rail 23 to K. The lotus delivery assembly 21 packs I. Including the drive assembly 22a, M along one side of the device 20 and the roller shaft support assembly 22b along the other side of the device 20. The feet 24 also support the motor and gearbox assembly 26M and the evacuation unit 30. The motor and gearbox assembly 26 provides power to the main drive sprocket 32 by the first key (not shown), K is generally skilled in the art. The sprocket 32 drives the cross shaft 42. The shaft 42 rotates the cross sprocket 44. The sprocket 44 powers a second chain 3 4 in the roller drive assembly 22a. The motor assembly 26 and the associated drive mechanism are enclosed by K in an assembly on a panel 25. In The inside of these panels and associated seals is the first part of a first closed volume 29a. The volume 29a of the cladding is relatively airtight, allowing the evacuator 30 to generate sub-atmospheric pressure within the first part of volume 29a. The illustrated driving mechanism generates particulate matter, which is contained in the panel 25 and is finally discharged through a nozzle 28. The nozzle 28 is generally attached to an air-enclosed space that will further remove particles from the clean room area. Please note, A separate evacuation system for the clean room can replace the evacuation system 30. This system will be attached to the nozzle 28 and generate sub-atmospheric pressure in the volume 29a. It is better if a small amount of air leaks into the volume 29a. Chain 34 travels within drive assembly 22a After a series of tensioning mechanism 36, idler sprocket 38, and oiler mechanism U0. Chain 34 drives many outer drive sprocket 46 and inner drive sprocket 48. Sprockets 46 and 48K are attached to the roller shaft 50 in an alternating manner. Roller Shaft 50K-A method described in U.S. Patent No. 3,951,255, which is incorporated herein by reference, drives a plurality of slidable rollers 5 2. The top of the roller 5 2 coincides with a surface path 5 3 and the object follows this paper Dimensions apply to Chinese national standard (('NS) Λ4 specifications (210 X 297 mm) n (Please read the precautions on the back before filling in this page)

V. Description of the invention (11) 222 Main drive pulley 224 Main drive belt 226 Drive shaft 228 Roller shaft drive belt 2 2 9 a First closed volume 229b Second closed volume 246 Pulley (Please read the precautions on the back before filling this page ) -a The paper size printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economy applies the Chinese National Standard (CNS) A4 specification (21 × 297 mm) 14-Correction page A7 B7 丨 4 repairs'

Supplement I V. Description of the invention (5) The route was sent to Shanlian. A pair of bushing supports 54 can rotatably receive the roller shaft 50. The roller bearing assembly 22b rotatably houses the shaft 50 in a seat 54 along the side of the surface path 53 opposite to the drive assembly 22a. The support 54 is attached to and supported by the side rail 23. As described above, the driving mechanism for the roller shaft 50 may generate particulate matter when the device 20 is operated. To accommodate particulate matter, the panel, seal, and support assembly seals the drive mechanism in the second part of the first-closed volume 29a. The cladding of volume 29a is relatively airtight, allowing the evacuator 30 to generate sub-atmospheric pressure in the first and second parts of volume 29a. It is better if a small amount of air leaks into the volume 29 a. The side rail member 23 is on one side of the second portion of the closed volume 29a. The upper panel 66 and the outer panel 69 are another boundary on the second part of the volume 29a. The bottom panel 58, the inner panel 60, and the sealing support 64 also provide a boundary for the volume 29a. The seal 62 can be used for any gap between the Cymbidium panels 58 and 60. A part of the roller shaft 50 is included in the volume 29a. Shaft and cylinder seal 68 can accommodate the roller shaft 50 ° in a rotatable manner. The two-piece elastic fixed roller shaft seal is provided between the cylinder seal 66, the face plate 68, and the support 64. The roller shaft seal first piece 70 contacts the upper half of the barrel seal 68, and is also housed in a cavity formed in the upper panel 66. The recess 70a of the sheet 70 receives the rib 66a of the panel 66, and is thereby held in position. The second piece of roller shaft seal 72 is in contact with the bottom half of the cylinder seal 68 and is accommodated in a cavity defined by the seal support 64. The recess 72a of the M 72 receives the rib 64a of the support 64, and is thereby Stay in position. The sealing sheets 70 and 72 are made of an elastic material such as a cellular urethane of an open cell type. This elasticity makes the tablets 70 and 72 tolerant of the driving mechanism and the paper size of the paper applicable to Chinese national standards (CNS> A4 specification (210X297 mm) (please read the precautions on the back before filling this page). Printed by the cooperative-8-Correction ΑΑ Β7 ', V. Description of the invention (6) Misalignment of the components of the shell. The first piece 70 and the second piece 72 each wrap around the cylinder of the seal 68 about 180 degrees. In each piece The semicircular cutouts 71 of 70 and 72 are in contact with about half of the respective cylinder seals 68. The pieces 70 and 72 are adjacent to each other on a plane defined by the center line 73 of the roller shaft 50. The width W of the pieces 70 and 72 is about 25 inches, However, the present invention is not limited to this width W. Compared with the assembly required if the sheets 70 and 72 are replaced by a single sheet or a non-elastic sheet, the two-piece elastic structure allows each component to be easily assembled to the roller shaft 50. Sheet 70 And 72 maintain an effective air seal while tolerating misalignment of the shaft. The first and second portions of volume 29a are in fluid communication with each other. Although certain elements of the present invention are mentioned or shown as being first or second in volume 29a Part two, but generally proficient in this technique As will be appreciated, the present invention includes other combinations. Figures 6 and 7 show a device 120, a second embodiment of the invention. The device 120 is similar to the device 20, but includes a second drive mechanism, a second set of roller shafts, and a second A set of sliding rollers and a second enclosed volume inside the second envelope. Some differences between device 20 and device 120 will now be explained. Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs (please read the note on the back first) Please fill in this page again.) Device 120 includes a transport assembly 121 supported by feet 24. Assembly 121 includes a first roller drive assembly 122 a along one side of surface path 53 and another along surface path 53 The second roller driving assembly 122b on one side. The assembly 122b is a mirror image of the assembly 122a. Within the driving assembly 122b, a second group of roller shafts 150 is driven by sprocket wheels 46 and 48. The shaft 150 is driven by a bushing The support 54 and the shaft limiter 15 4 are supported by the roller. The roller shaft 150 extends only under a part of the surface path 53. The path 53 coincides with the top of the slideable roller 152. The roller shaft 150 does not span the whole The surface path 53 is the same in the device 20, so the device The paper size of the central opening of 120 applies to the Chinese National Standard (CNS) A4 specification (210X 297 mm) 9 Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs Λ7 B7 V. Description of the invention (7) and allow the clean room air to flow The drive mechanism of the device 120 is contained in the second closed volume 129. The first portion of the first closed volume 129a includes the motor 26 therein. The second portion of the first volume 129a includes the motor 26 therein. The drive mechanism of the drive assembly 122a. The first volume 129a is similar to the first closed volume 29a. A second enclosed volume 129b includes a drive mechanism for the drive assembly 122b therein. The volumes 129a and 129b are in fluid communication with each other, and particulate matter is removed through the nozzle 28 to K. The closed volume 12 9 b and the second part of the volume 129a are defined by some elements that are the same as the second part of the closed volume 29a. The upper boundary of the volume 129 is defined by the upper panel 166, which is contained in the corner panel 168 and the product guide 174. The roller shaft seal first piece 70 is housed in a cavity defined by the upper channel 166 and is retained by the rib 166a. The roller shaft seal second piece 72 is housed in a cavity defined by a support 64. Although some of the inventions of the present invention are mentioned or shown or shown in the first or second part of the volume 129a, those skilled in the art generally understand that the present invention includes other combinations. Fig. 8 shows a device 2 2 0, a third embodiment of the present invention. Device 2 2 0 is similar to device 120 and has a mirrored drive assembly that extends along both sides of path 53 to the drive roller shaft 1 50 and extends only under a portion of the moving surface path 53. The difference between device 120 and device 220 is that the device 120 is driven by a chain and the device 220 is driven by a belt. The main drive pulley 222 is driven by a motor 26 (not shown). The main drive belt 224 is driven by a pulley 222 and drives an intermediate pulley attached to the drive shaft 2 2 6. The roller shaft drive belt 2 2 8 is driven by the shaft 2 2 6 and in turn drives the pulley 2 46. The pulley 2 46 drives the roller shaft 150. This paper size applies to Chinese National Standard (CNS) Α4 specification (210X 297 mm) ---- Γ ----] ^ w ^ .-- r (Please read the precautions on the back before filling this page) ——Order 10-

Printed by the Ministry of Economic Affairs and Intellectual Property Bureau's Consumer Cooperative A7 B7 V. Description of the invention (8) The particulate matter generated by the drive mechanism of the device 220 is contained in the enclosed volumes 229a and 229b, the first part of the first enclosed volume 229a The motor 26 is included therein, and the panel 225 surrounds the motor 26. The second part of the first enclosed volume 229a includes a drive mechanism of the drive assembly 222a therein. The second enclosed volume 229b includes the drive assembly 222b therein. The driving mechanism 0 volume 229a and 229b are in fluid communication. Particulate matter is expelled through the nozzle 28. Although some elements of the present invention are mentioned or shown as being within the first or second part of the volume 229a, those skilled in the art generally understand that the present invention includes other combinations. As the device 220 and the device 120 have similarities 9 Those skilled in the art understand that there is-the fourth embodiment is similar to the device 20 (This fourth embodiment includes a pulley and a belt drive mechanism, which drives many extensions completely over And the roller shaft 50 below the surface path 53. The shaft, seal, faceplate, and other components of this fourth embodiment are individually described in the second-»second and third embodiments. Although the present invention is described in the drawings and The above description is exemplified and described in detail 9 but it is regarded as illustrative rather than restrictive in nature. Please understand that only the preferred embodiments have been illustrated and described by M and are within the spirit M of the present invention. All changes and modifications want to be protected > Description of component number 20 Device 21 Transport assembly 22a Drive assembly 22b Roller shaft support assembly 23 Side rails 24 feet Please read the precautions on the back, and this paper size applies the Chinese National Standard (CNS) Α4 specification (210 X 297 (Mm) 11-Correct the tributary edge such as 7 punches with two hands and spirits to add _ V. Description of the invention (9) 25 Panel 26 Motor and gearbox assembly 28 Nozzle Please read 29a First closed volume read back 30 Evacuator note 32 Main drive sprocket items 34 Second chain refilling 36 Tensioning mechanism on this page 38 Idle chain gold A 40 Lubricator mechanism 42 Cross shaft 44 Cross chain m 46 Outer drive sprocket 48 Inner drive chain m 50 Roller shaft 52 May Roller wheel 'Mill 53 Surface path economy 54 Bushing seat pedestal 58 Bottom panel Wisdom 60 Inner panel bureau Employees 62 Seal consumption 64 Seal support person 6 4a Rib society printing 66 Upper board order The paper size applies to China's national standard (C'NS > A4 size (210X 297 mm)

-12-correction page

V. Description of the invention (10) A7 B7 Printed by the Intellectual Property Bureau of the Ministry of Economic Affairs Employee Cooperatives 66a Ribs 68 Shaft cylinder seal 69 Outer panel 70 Roller shaft seal first piece 70a recess 71 Semicircular cutout 72 Roller shaft seal second piece 72a recess 73 Centerline 120 Device 121 Transport assembly 122a First roller drive assembly 122b Second roller drive assembly 129 Second closed volume 129a First closed volume 1 2 9 b Second closed volume 150 Second group of roller shafts 152 Slidable Roller 154 Shaft limiter 166 Upper panel 1 6 6 a Rib 168 Corner panel 174 Product guide 2 20 Device (Please read the precautions on the back before filling this page)

This paper size applies to Chinese National Standard (CNS) A4 (210X2.97mm) 13 '' correction page

V. Description of the invention (11) 222 Main drive pulley 224 Main drive belt 226 Drive shaft 228 Roller shaft drive belt 2 2 9 a First closed volume 229b Second closed volume 246 Pulley (Please read the precautions on the back before filling this page ) -a Printed by the Consumers' Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs, the paper size is applicable to the Chinese National Standard (CNS) A4 specification (21 × 297 mm) 14-Revised page

Claims (1)

Α8 Β8 C8 D8 88. 5. 2 4 Rev. Original 6. Scope of patent application 1. A slidable roller conveyor for clean room for moving products along a path, including: the first many roller shafts, in the path At least a part of which extends below; a first plurality of slidable rollers driven by the first roller shafts; a first driving mechanism for driving the first roller shafts; a first envelope of the first driving mechanism , Defines a first closed volume; M and an evacuation device for removing air and particles from the closed volume. 2. For example, the sliding roller feeder for clean room in the scope of the patent application, wherein the first casing includes a roller shaft seal, including a first piece and a second piece, the first piece and The second sheet is elastic. 3. For example, the sliding roller feeder for clean room in the scope of the patent application, wherein one of the first sheet or the second sheet includes a recess, and the first envelope includes a rib, and the rib is Receiving in the recess for holding the first piece or the second roll in place. 4 < Slide roller feeder for clean room, as described in the second patent application range, wherein the first roller shaft has a centerline, and the first sheet and the second sheet are about The planes of the center lines are adjacent to each other. Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs (please read the precautions on the back before filling out this page) 5. If you apply for a sliding roller conveyor for clean rooms in the scope of patent application No. 4. The driving mechanism includes a pulley attached to at least one of the first roller shafts, and a pulley belt for driving the pulley. 6. The slidable roller conveyor for clean room according to item 4 of the patent application scope, wherein the first driving mechanism includes a sprocket attached to at least one of the first roller shafts, and a sprocket for driving the sprocket. chain. 7. Sliding roller transport for clean room, as described in item (1) of the scope of patent application. The paper size applies to Chinese national standard (CNS> Α4 specification (210X297 mm) -1- Α8 Β8 C8 D8 88. 5. 2 4 Rev. Original 6. Scope of patent application 1. A slidable roller conveyor for clean room for moving products along a path, including: the first many roller shafts, in the path At least a part of which extends below; a first plurality of slidable rollers driven by the first roller shafts; a first driving mechanism for driving the first roller shafts; a first envelope of the first driving mechanism , Defines a first closed volume; M and an evacuation device for removing air and particles from the closed volume. 2. For example, the sliding roller feeder for clean room in the scope of the patent application, wherein the first casing includes a roller shaft seal, including a first piece and a second piece, the first piece and The second sheet is elastic. 3. For example, the sliding roller feeder for clean room in the scope of the patent application, wherein one of the first sheet or the second sheet includes a recess, and the first envelope includes a rib, and the rib is Receiving in the recess for holding the first piece or the second roll in place. 4 < Slide roller feeder for clean room, as described in the second patent application range, wherein the first roller shaft has a centerline, and the first sheet and the second sheet are about The planes of the center lines are adjacent to each other. Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs (please read the precautions on the back before filling out this page) 5. If you apply for a sliding roller conveyor for clean rooms in the scope of patent application No. 4. The driving mechanism includes a pulley attached to at least one of the first roller shafts, and a pulley belt for driving the pulley. 6. The slidable roller conveyor for clean room according to item 4 of the patent application scope, wherein the first driving mechanism includes a sprocket attached to at least one of the first roller shafts, and a sprocket for driving the sprocket. chain. 7. Sliding roller transport for clean room, as described in item (1) of the scope of patent application. The paper size applies to Chinese national standard (CNS> Α4 specification (210X297 mm) -1- A8 B8 C8 D8 Patent Application Package S Rib ►i.— ΠΗΠ The shaft part of the extension drive surface rolls 1 to a minimum, and the diameter can be rolled by the road wheel on the roller. The second first send. The transport wheel and capacity roller M are closed. The sealing and sliding shaft can be rolled to the first room and the second to the net boundary at @ S 2 包 S are 1 TA I-_ 7 ^ mm Move the special house 逞 Tsing Ma S 22nd Shen first as the first 8. The four pieces of the first piece and the third piece of the 1st with encapsulation. The compact shaft bullet wheel has a roller, including a four-pack first shell and a two-three pack. The first one is IB Λ_αβ »Li Zhuan please Ψ If 9 get E, the roller can be included in the alcove. Use the item 1 of the item 5 of the 4th or 3rd of the package, and the 2nd and 2nd (and please read the precautions on the back before filling out this page). The interior is recessed, and it is covered by the 50th article. The ribs r2M ^ one holding cover including the package 10 pieces, four shells, or a lotus wheel, three rolls, and the slip can be made available, and the room is used. The fourth and third pieces are used next to the neighbor. In this case, the center of the flat line is centered on the center line of the IB1 · wheel dm jlui tumbling twenty-two, including the middle, including the medium, and the rollers to help 39 smooth room. Net in Items used ο 1 Fan Fan Li specially invited Φ If the sender of the printed device of the Consumer Cooperative Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs rolls up to 2nd, it should be as small as Appendix 1 including the non-drive second drive. Leather wheel with leather wheel with leather 8 * 1 · ^ Π ΒZΠ House for 1 and the belt of the lotus wheel, wheel, roll, roll, slide, slide, slide, slide, slide, slide, slide, slide, slide, slide, slide, slide, slide, slide, slide, slide, slide If the 12-key wheel chain of this drive is supplied with 1 and wheel i > 0 1 the paper size is applicable to Chinese National Standard (CNS) A4 specification (210X297 mm) 2 A8 B8 C8 D8 Patent Application Package S Rib ►i.— ΠΗΠ The shaft part of the extension drive surface rolls 1 to a minimum, and the diameter can be rolled by the road wheel on the roller. The second first send. The transport wheel and capacity roller M are closed. The sealing and sliding shaft can be rolled to the first room and the second to the net boundary at @ S 2 包 S are 1 TA I-_ 7 ^ mm Move the special house 逞 Tsing Ma S 22nd Shen first as the first 8. The four pieces of the first piece and the third piece of the 1st with encapsulation. The compact shaft bullet wheel has a roller, including a four-pack first shell and a two-three pack. The first one is IB Λ_αβ »Li Zhuan please Ψ If 9 get E, the roller can be included in the alcove. Use the item 1 of the item 5 of the 4th or 3rd of the package, and the 2nd and 2nd (and please read the precautions on the back before filling out this page). The interior is recessed, and it is covered by the 50th article. The ribs r2M ^ one holding cover including the package 10 pieces, four shells, or a lotus wheel, three rolls, and the slip can be made available, and the room is used. The fourth and third pieces are used next to the neighbor. In this case, the center of the flat line is centered on the center line of the IB1 · wheel dm jlui tumbling twenty-two, including the middle, including the medium, and the rollers to help 39 smooth room. Net in Items used ο 1 Fan Fan Li specially invited Φ If the sender of the printed device of the Consumer Cooperative Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs rolls up to 2nd, it should be as small as Appendix 1 including the non-drive second drive. Leather wheel with leather wheel with leather 8 * 1 · ^ Π ΒZΠ House for 1 and the belt of the lotus wheel, wheel, roll, roll, slide, slide, slide, slide, slide, slide, slide, slide, slide, slide, slide, slide, slide, slide, slide, slide, slide If the 12-key wheel chain of this drive is supplied with 1 and wheel i > 0 1 the paper size is applicable to Chinese National Standard (CNS) A4 specification (210X297 mm) 2