TW383250B - Method and apparatus for optical polishing - Google Patents

Abstract

A kind of polishing tool used for local optical polishing on the workpiece. The tool has a soft working surface connected with a polishing pad or disk. The feature is that the pressure applied on the workpiece can be selectively changed in operation. The method employs different areas passing the tool or change the effective area contacting the workpiece. The invention relates to a method employing a polishing tool for optical polishing on an optical workpiece. The maximum working area of the tool is much smaller than the workpiece including the path for the tool to traverse the workpiece and insuring the contact pressure and effective area of the tool on the workpiece. In order to get the next stage polishing, at the time of driving the tool on the passway, it can change the said applied pressure and effective contact area by method of dynamics. When the method is applied to an object, for example, a set of optical polishing tool on a generally smooth structural member, or a guiding device on an optical workpiece, including a three-dimensional transmission mechanism for the object on the surface of structural member whose movement is controllable. A hinged link is connected to the object by the transmission device so that the object can rotate around a virtual support. The virtual support is fixed relative to the transmission mechanism and located at the junction between the workpiece and the tool.

Description

MB7 The present invention mainly relates to polishing, grinding, and trimming of optical surfaces, and is particularly suitable for producing large-sized mirrors. The shape may be spherical, aspherical, or non-circular. The present invention is dedicated to well-established machining processes including grinding, polishing, and trimming 'performed in a container using loose abrasive or abrasive particles. A disc pad or disc is used to apply abrasive to the workpiece. "Sculpting, 'is the subsequent polishing process, which is applied to the surface to varying degrees in order to produce very slight changes in surface rain." Tools "are part of the machine. It is equipped with a disk pad to coat the abrasive To the workpiece. The diameter of the disc pad is generally used as the diameter of the tool. The process is usually wet. After polishing for a certain period of time, the workpiece is cleaned and optical tests are performed. This optical test The purpose is to identify those protruding parts that have not yet reached the desired contours, although they have been polished. It is best to perform further polishing in these protruding areas ... generally can be achieved by changing the pressure and speed of the polishing disc. It may be necessary to perform many experiments to reduce the error ', and the process has been repetitive. For surfaces that are not spherical (on a spherical part), this repetitive cutting is a long process. Mechanization has been tested and has achieved some success (see below), but has failed to provide a technology that is common to rival craftsmanship. Large tools and small There are different problems. 3/16 This paper size applies the Chinese National Standard (CNS) Α4 specification (210 × 297 mm) (Please read the precautions on the back before filling this page), -ιτ Staff of the Central Standards Bureau of the Ministry of Economic Affairs Cooperative Yin Chang

MB7 The present invention mainly relates to polishing, grinding, and trimming of optical surfaces, and is particularly suitable for producing large-sized mirrors. The shape may be spherical, aspherical, or non-circular. The present invention is dedicated to well-established machining processes including grinding, polishing, and trimming 'performed in a container using loose abrasive or abrasive particles. A disc pad or disc is used to apply abrasive to the workpiece. "Sculpting, 'is the subsequent polishing process, which is applied to the surface to varying degrees in order to produce very slight changes in surface rain." Tools "are part of the machine. It is equipped with a disk pad to coat the abrasive To the workpiece. The diameter of the disc pad is generally used as the diameter of the tool. The process is usually wet. After polishing for a certain period of time, the workpiece is cleaned and optical tests are performed. This optical test The purpose is to identify those protruding parts that have not yet reached the desired contours, although they have been polished. It is best to perform further polishing in these protruding areas ... generally can be achieved by changing the pressure and speed of the polishing disc. It may be necessary to perform many experiments to reduce the error ', and the process has been repetitive. For surfaces that are not spherical (on a spherical part), this repetitive cutting is a long process. Mechanization has been tested and has achieved some success (see below), but has failed to provide a technology that is common to rival craftsmanship. Large tools and small There are different problems. 3/16 This paper size applies the Chinese National Standard (CNS) Α4 specification (210 × 297 mm) (Please read the precautions on the back before filling this page), -ιτ Staff of the Central Standards Bureau of the Ministry of Economic Affairs Cooperative Yin Chang

A Fu Ren speaks ‘the best quality can be achieved with large tools. They are usually shaped like a dagger and a mouth. However, the manufacturing and improvement of these workpieces. Π ^ —— 疋 疋 is special,…… and to be carried out under the condition of expensive research and development 'expect some tools 仏 ㈣ solution and = In terms of 'small tools', they can more accurately imitate manual polishing and :, use: unfortunately, if their operations are automated two: residuals: defects, these defects are difficult to remove with the same tool. For example, the tool's The edges may create many 2 or grooves that are narrower than the tool itself. They can be seen during the optical test, but if you want to use the same: to remove the daggers, new similar defects may be generated, only the position is slightly changed. Changing the tool will cause other problems, but the setting is a little bit I. Changing tools can cause other problems. It is a very slow process to eliminate defects caused by the tool by gradually applying a small amount of processing on the female bar or by light and slow tapping of the original protective gear. Although these topics do not make the processing process obsolete ’, they greatly extend the sequence of repetitive processing and the overall restainability. U.S. Patent No. 4,128,968 (1978) describes an automatic polishing machine in which the influence of small tool edges in a honing machine is reduced by the local auxiliary movement of the tool. The center of the contact area is continuously polished when this small tool vibrates in high frequency at the appropriate position, but the edge of the area is polished to the paper rule SiTSi Home Standard (CNS) Α4 specification (please read the back first page order economy) Printed by the Consumers' Cooperatives of the Ministry of Health

A Fu Ren speaks ‘the best quality can be achieved with large tools. They are usually shaped like a dagger and a mouth. However, the manufacturing and improvement of these workpieces. Π ^ —— 疋 疋 is special,…… and to be carried out under the condition of expensive research and development 'expect some tools 仏 ㈣ solution and = In terms of 'small tools', they can more accurately imitate manual polishing and :, use: unfortunately, if their operations are automated two: residuals: defects, these defects are difficult to remove with the same tool. For example, the tool's The edges may create many 2 or grooves that are narrower than the tool itself. They can be seen during the optical test, but if you want to use the same: to remove the daggers, new similar defects may be generated, only the position is slightly changed. Changing the tool will cause other problems, but the setting is a little bit I. Changing tools can cause other problems. It is a very slow process to eliminate defects caused by the tool by gradually applying a small amount of processing on the female bar or by light and slow tapping of the original protective gear. Although these topics do not make the processing process obsolete ’, they greatly extend the sequence of repetitive processing and the overall restainability. U.S. Patent No. 4,128,968 (1978) describes an automatic polishing machine in which the influence of small tool edges in a honing machine is reduced by the local auxiliary movement of the tool. The center of the contact area is continuously polished when this small tool vibrates in high frequency at the appropriate position, but the edge of the area is polished to the paper rule SiTSi Home Standard (CNS) Α4 specification (please read the back first page order economy) Printed by the Consumers' Cooperatives of the Ministry of Health

4/14 Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs 6/16

Zeiss has introduced a counterstaining tool with an extension that is approximately half the diameter of the workpiece. As with the large tools described above, basically the entire working surface of this tool can be in contact with the workpiece at any time. The inclination of the tool is determined by its contact with the workpiece. In their patent application GB-A-2163076, the size of such tools basically increases with the size of the workpiece. The object of the present invention is to improve the speed and accuracy of this repetitive machining process. The present invention provides a novel tool for local polishing that enables a fast 'automated, computer-controlled product with a wide range of materials suitable for optical quality surfaces. Due to the advantages of the present invention, it is possible to provide a processing method of the oblique angle i under continuous control conditions, which has no edges and has various shapes for processing glass materials. In accordance with a first feature of the present invention, a method for optically polishing a workpiece surface is provided, which includes: placing a tool having a flexible working surface in place on the surface of the jade piece so that the flexible working surface and the flexible working surface There is a contact area between the workpiece surfaces, wherein the flexible working surface is substantially smaller than the surface of the side workpiece; and the toolbox is automatically controlled for the paper size of the workpiece. Ϋ 县 家 县 (CNS) M Specification (2 丨 G χ π7 公 (Please read the precautions on the back before filling in this page)

Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs A7 ___B7____. V. Description of Invention ^ / 14) Less. " The shape of the removed part " is set to be circularly symmetric. The movement mode of the surface tool can be spiral on the repair surface. The tool itself can rotate on the secondary shaft, which can be the sleeve of the tool itself. Gao Zhenzheng is a working method or method of repairing tools. It is used to eliminate the phenomenon of exchange caused by other tools sinking. The software makes it obsolete: the movement of the tool can be optimally calculated in order to improve the quality of a specific workpiece, rather than used to produce an arbitrary shape of the rounded part. It is not required. At the same time, the high-vibration effect of distant species inevitably makes the area of local polishing larger, which is not a requirement. US Patent No. 5,157,878 (1992) is fascinated by a kind of ~ polishing police on the workpiece. Polishing tools. British patent application 2 259 662 (1993) is fascinated by a machine suitable for .post-dyed aspheric soft hotspot lens groups, it is like a multi-axis Yao bed To replace Yao Daotou. The University of Arizona and the University of Protestant University have already described some of these machines. They have a counterstaining tool with a diameter less than half or more than the diameter of the workpiece. Basically, the entire working surface of this tool can be used at any time. Contact with the workpiece. The inclination angle of the tool is determined by its heavy contact with the workpiece. An example was published in ESO Conference and Workshop Proceedings Issue 42, 215-218 and ESO Garching, 27-30, April 1992 * " Production of advanced aspheric surfaces using high-speed grinding The method of assisting Russia, written by DDWalkker and others. 5/16 This paper uses Chinese National Standard (CNS) A4 specifications (210X297 mm) again. I ^ — ^ 1 ϋ »n ^ — ^^^ 1 t ^ i ^^ 1 • Shiy In n ^ i Hi. ^ 1 ^ 1-»1— ^^^ 1- * 1 ^ 11 In I— ^^ 1 * nn I (Please read the precautions on the back before filling this page)

The position of the surface to control this contact area. With regard to the second feature of the present invention, there is provided an apparatus for optically polishing the surface of a workpiece, including:-a gripper, Xiao Yi loses the workpiece, a tool 'having-a flexible working surface, wherein the flexible working surface is substantially Smaller than the surface of the workpiece; a transmission device for moving the H relative to the surface of the workpiece to form a contact area between the surface of the flexible red watchmaker I and a control device for controlling the transmission device to automatically The position of the jade relative to the surface of the red piece is controlled to control the contact area. (Please read the precautions on the back before filling in this page)%) The diameter of the tool is generally less than 2% of the diameter of the workpiece (2 Orders printed by the Staff Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 7/26 The pressure applied by the tool is distributed in the axial direction It can be symmetrical. Tools can be mounted on driven bearings' they allow the tool to rub the workpiece in any desired movement at a controlled speed. The tool can be mounted on a motor-driven auxiliary shaft, which It can be on the axis of symmetry of the tool. The tool can be controlled to rotate on this axis as part of its polishing movement. The workpiece can be mounted on a continuously rotating turntable. This paper scale is applicable to China's national standard 7 ^

4/14 Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs 6/16

Zeiss has introduced a counterstaining tool with an extension that is approximately half the diameter of the workpiece. As with the large tools described above, basically the entire working surface of this tool can be in contact with the workpiece at any time. The inclination of the tool is determined by its contact with the workpiece. In their patent application GB-A-2163076, the size of such tools basically increases with the size of the workpiece. The object of the present invention is to improve the speed and accuracy of this repetitive machining process. The present invention provides a novel tool for local polishing that enables a fast 'automated, computer-controlled product with a wide range of materials suitable for optical quality surfaces. Due to the advantages of the present invention, it is possible to provide a processing method of the oblique angle i under continuous control conditions, which has no edges and has various shapes for processing glass materials. In accordance with a first feature of the present invention, a method for optically polishing a workpiece surface is provided, which includes: placing a tool having a flexible working surface in place on the surface of the jade piece so that the flexible working surface and the flexible working surface There is a contact area between the workpiece surfaces, wherein the flexible working surface is substantially smaller than the surface of the side workpiece; and the toolbox is automatically controlled for the paper size of the workpiece. Ϋ 县 家 县 (CNS) M Specification (2 丨 G χ π7 公 (Please read the precautions on the back before filling in this page)

A7

These hard pan Qings are glued to a sheet of stainless steel (6). 0 Annoyance Committee 明 · Indicates whether the printed version of the Central Standards Bureau of the Ministry of Economic Affairs, the Bayer Consumer Cooperatives, has been revised. Approval allowed 05. Description of the invention (7/14) This sheet is glued to an elastic material (5) with shrinkable shoulders. This layer of material is made of rubber, rubber or plastic. Foam-like material. Another thin sheet of steel (4) is glued on this shrinkable elastic layer. Mole force * is added to the upper sheet (4) through a set of annular pressure rings (8). This set of annular pressure ring (8) is on — 4. _ eight jaw flat spring (9). -The main transmission mechanism (1) is described in detail here. It is a screw drive device driven by a motor. Its structure is a market-type stepper motor equipped with a hollow 狰 -threaded rotor to drive a vertical plunger. The plunger itself is lengthened by a compressive itch spring mounted on the plunger (lower). A commercially available standard force sensor is incorporated in the compression spring. The main transmission mechanism can increase the historical force at the center of the working surface of the tool when the transmission mechanism works vertically downward. A stiffener (3) slaps on the upper side of the eight-claw spring (9). The edge transmission mechanism (2) shown is one of three edge transmission mechanisms equally divided by angle, and three edge transmission mechanisms The structure is the same as that of the main transmission mechanism (1). They are arranged at equal intervals along the circumference and can be pushed or positioned onto the reinforcement ring (3). They are also equipped with a load cell 'to control the tilt and slope of the bottom of the green ridge and the overall pressure and shape together with the main transmission mechanism (1). This tool laughs in a very sharp beginning (.10), phase: there is a pen (12) on the body for access, in fact, it has electrical connectors and wiring (to show). Shell 醴 (1〇) has a support flange or some lugs This paper is suitable for paper 81 (Please read the note on the back before filling this page), 1T

The position of the surface to control this contact area. With regard to the second feature of the present invention, there is provided an apparatus for optically polishing the surface of a workpiece, including:-a gripper, Xiao Yi loses the workpiece, a tool 'having-a flexible working surface, wherein the flexible working surface is substantially Smaller than the surface of the workpiece; a transmission device for moving the H relative to the surface of the workpiece to form a contact area between the surface of the flexible red watchmaker I and a control device for controlling the transmission device to automatically The position of the jade relative to the surface of the red piece is controlled to control the contact area. (Please read the precautions on the back before filling in this page)%) The diameter of the tool is generally less than 2% of the diameter of the workpiece (2 Orders printed by the Staff Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 7/26 The pressure applied by the tool is distributed in the axial direction It can be symmetrical. Tools can be mounted on driven bearings' they allow the tool to rub the workpiece in any desired movement at a controlled speed. The tool can be mounted on a motor-driven auxiliary shaft, which It can be on the axis of symmetry of the tool. The tool can be controlled to rotate on this axis as part of its polishing movement. The workpiece can be mounted on a continuously rotating turntable. This paper scale is applicable to China's national standard 7 ^ A7 __ B7 ___. Each stepper motor of Mrkr is computer driven by a standard integrated stepper motor controller, which has a power amplifier stage. The force value indicated by the residual force sensor 傅Enter the computer through a standard analog-to-digital converter. The tool is mounted on two paired horizontal boards through flanges or lugs (1 1), which are composed of a stepper motor and a gear It is driven by a bar gear mechanism. This kind of automatic system can also be equipped with a device to make the tool spin, if so ... It also needs to be equipped with a split ring to power the tool. The working force is 8 to 50 g / cm2 on the working surface. Printed by the Shellfish Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs (please read the legal notices on the back and fill in this note). Effective control of tool movement includes the application of Workpieces, such as the pressure distribution control on the mirror 'and the speed of the moving tool relative to the mirror_distribution control (impact: impact, rotation). As in the above description-the article is titled: the use of high-speed scrap production to produce advanced aspheric auxiliary The method of the mirror is 々, as the paper will admire, while the machine is running, the control device uses the output of the operator's reflection. The machine remotely measures the road force distribution between the mirror and the relative speed distribution, and The total lateral friction (resistance) on the tool (grinding disc). Through calibration, anti-grinding speed and repeated reflections at every point on the mirror surface during polishing may be defeated These data are combined to judge how the mirror's hemp is formed; these data will be displayed mechanically and the form of moxibustion will be changed accordingly. At the end of each run, it is not only necessary to determine the optical garden shape and the required phase. For comparison, it is necessary to compare the changes of the children's needles with the observed changes. However, the rule system for determining grinding must be changed accordingly in order to grasp the system. 10/16 This paper standard is applicable to the Chinese national standard (CNS) A4 size (210X 297 mm) Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the invention ^^ 14) The tool can move on a fixed workpiece, and this kind of movement can produce rotation with the workpiece The same effective processing results. In order to better understand the present invention, we will now explain some miscellaneous contents by way of example and in combination with some of the Thai test drawings. These drawings are: Figure 1A is an axial sectional view of a grinding tool of the present invention by Zhao Xian; 1B is a plan view of a spring installed horizontally in the tool shown in FIG. 1A; FIG. 1C is a plan view of a set of annular disk force rings in the tool shown in FIG. 1A 5 FIG. 2 is a grinding further embodying the present invention Axial sectional view of the tool ° Fig. 3 is a schematic cross-sectional view, corresponding to the wishing drawing of Fig. 2 and the dragging structure of Fig. 2, which more clearly illustrates the support structure of the tool head. 9 Fig. 4 is a view along Fig. 3 3 is a schematic view taken along the line A--A in FIG. 3; FIG. 5 is a schematic sectional view corresponding to the view in FIG. 2, showing the working part of the tool in various shapes; FIG. 6 is the pressure of the flexible working surface of the tool in use in FIG. The distribution curve is a function of the radius of the center of the tool as the center of the initial viscosity. The market in Figure 1 is an example of the present invention. Polishing is provided by some hard bitumen (7). The workpiece (not shown) is in contact with the bottom surface of the hard palate. 8/16

In nfl ^ i ml \, '(Please read the precautions on the back before filling in this page) This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) ^, u Invention said 4 sealed or permanently Seal 'for bulging. The exhaust force of the air is very close to the required polishing pressure. The bulging part of the tool covers the working surface with throwing material. The polishing material may include materials such as cloth, felt, flexible polyurethane foam or a hard asphalt block mosaic, and the polishing material b is adhered to the film. This material can be polished normally with fine abrasives. Under the control of the computer, the tool moves to the workpiece through the machine, initially contacts at various positions, and then increases the approach procedure to compress the bulge portion and gradually increase the contact area. This process is illustrated briefly in Figure 5. When that happens, the bulging space is compressed, but when the volume of the dagger is reduced by less than ten percent, the air pressure is increased by less than ten percent. Therefore, the polishing pressure determined by the air pressure is constantly in the range of ten percent. When the required contact area is obtained in this way, the tool and workpiece can be rotated or moved in any form required for polishing by a computer-controlled motor. Printed by the Consumers' Cooperative of the Central Bureau of Standards, Ministry of Economic Affairs (please read the notes on the back before filling this page) This tool can be used in different ways. In this case the tool is filled or partially depressurized, bringing the diaphragm close to the average radius of curvature (concave or convex) of the workpiece. A slight correction is then made to the air pressure, resulting in a distributed pressure applied to the entire (or part) surface of the tool in contact with the workpiece. The pressure distribution is controlled by air pressure and tension in the rubber. A pressure distribution can be obtained by selecting a suitable radial change in the thickness of the rubber film, which decreases to zero outside the edge of the contact surface with the workpiece. This has been shown in Figure 6 with some different radius surface pressure ranges. Conversely, by reducing the air pressure, an effect similar to that of an annular grinding disc can be obtained. This paper is suitable for Guancai County (CNS) A4 size 13/16 (210x 297 mm) A7

These hard pan Qings are glued to a sheet of stainless steel (6). 0 Annoyance Committee 明 · Indicates whether the printed version of the Central Standards Bureau of the Ministry of Economic Affairs, the Bayer Consumer Cooperatives, has been revised. Approval allowed 05. Description of the invention (7/14) This sheet is glued to an elastic material (5) with shrinkable shoulders. This layer of material is made of rubber, rubber or plastic. Foam-like material. Another thin sheet of steel (4) is glued on this shrinkable elastic layer. Mole force * is added to the upper sheet (4) through a set of annular pressure rings (8). This set of annular pressure ring (8) is on — 4. _ eight jaw flat spring (9). -The main transmission mechanism (1) is described in detail here. It is a screw drive device driven by a motor. Its structure is a market-type stepper motor equipped with a hollow 狰 -threaded rotor to drive a vertical plunger. The plunger itself is lengthened by a compressive itch spring mounted on the plunger (lower). A commercially available standard force sensor is incorporated in the compression spring. The main transmission mechanism can increase the historical force at the center of the working surface of the tool when the transmission mechanism works vertically downward. A stiffener (3) slaps on the upper side of the eight-claw spring (9). The edge transmission mechanism (2) shown is one of three edge transmission mechanisms equally divided by angle, and three edge transmission mechanisms The structure is the same as that of the main transmission mechanism (1). They are arranged at equal intervals along the circumference and can be pushed or positioned onto the reinforcement ring (3). They are also equipped with a load cell 'to control the tilt and slope of the bottom of the green ridge and the overall pressure and shape together with the main transmission mechanism (1). This tool laughs in a very sharp beginning (.10), phase: there is a pen (12) on the body for access, in fact, it has electrical connectors and wiring (to show). Shell (10) has a support flange or some lugs, paper-like degree of wealth 81 (please read the note on the back before filling out this page), 1T Consumer Affairs Cooperation Printed by the Central Government Bureau of the Ministry of Economic Affairs · Π "v: ': A7 ---; ____B7 5. Description of the invention (or curved). In order to reduce the applied pressure to zero at the edge of the bulge contact surface, you can use Method. Similarly, the rubber diaphragm can have a non-uniform thickness. A device that rotates the tool about its axis is available. It can be made to work if a higher polishing speed is required. This second example includes a Method to position the tool directly on the workpiece at the required contact angle. This angle is such that the axis of the tool is orthogonal to the polished surface at the central contact point. However, non-orthogonal axes can also be selected. In that case the polishing effect approaches or appears at the edge of the tool. The method of controlling the angle of the tool is described as a virtual fulcrum, as described in Figures 2 to 4. It includes some hinged Or the rod is used to tilt the center frame of the tool device around the center of the tool contact surface. The advantage of this virtual fulcrum is that the contact angle can be changed without having to rotate the tool over the workpiece. If the fulcrum is far away from the tool, it will cross. The condition of the workpiece. In addition, there is little or no frictional resistance between the polishing tool and the actuator that changes the contact angle, which minimizes the force used by the actuator. Although the present invention has passed two main units for optical polishing Explained, and the specific content specified in the attached rights are also possible. ____ 16/16 This paper size applies to Laijia County (CNS) A4 specification (21GX297 mm) ------ ： ----- V— (Please read the notes on the back before filling this page) Order A7 __ B7 ___. Each stepper motor of Mrkr is computer driven by a standard integrated stepper motor controller. The controller has a power amplifier stage. The force value indicated by the residual force sensor is input to the computer through a standard analog-to-digital converter. The tool is installed in two via flanges or lugs (1 1) On the opposite horizontal boards, they are driven by a stepping motor and a rack-and-pinion transmission mechanism. This panning system can also be equipped with a device that spins the tool, if so ... It also needs to be equipped with a split ring Power the tool. The total downward force applied by the tool to the workpiece is 8 to 50 g / cm2 on the working surface. Printed by the Shellfish Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs (please read the legal notice on the back first) Save this entry 萸) Effectively control the movement of the tool including the pressure distribution control of the tool applied to the workpiece, such as a mirror 'and the speed of the moving tool relative to the mirror _ distribution control (collision: hit, rotation). As in the obsession —The article is titled: The method of producing high-speed aspheric auxiliary mirrors by high-speed research and development. As the paper admires, the control device uses the output of the operator while the machine is running. The machine telemeters the road force distribution between the tool and the mirror, the relative velocity distribution, and the total lateral friction (resistance) on the tool (grinding disc). With calibration, it is possible to defeat the anti-grinding speed and the repeated repetition of every point on the mirror surface during the polishing process. These data are combined to determine how the mirror's roe is formed; these data will be displayed mechanically and the form of moxibustion will be changed accordingly. At the end of each run, it is necessary not only to compare the optical shape with the required one, but also to compare the changes in the needles with the observed changes. However, the rule system for determining grinding must be modified accordingly. History in order to master the system. 10/16 This paper size is applicable to China National Standards (CNS) A4 (210X 297 mm) Printed by A7, consumer cooperation of the Central Standards Bureau of the Ministry of Economic Affairs _____B7_ ___ 5. Description of the invention & / 14) The second of the invention A specific example can be explained with reference to FIGS. 2 to 6. The tool (not shown) is mounted on a rear plate 1 of Rouya. The web piece is trapped on the tool head 2. The tool head is burned on the bearing _3 and the fixed hollow is rotated by 4 and Driven by a metal bellows thinner 5, the coupling ^ loads the tool in the private direction. A channel in the hollow sleeve enables the air pressure behind the flexible rear panel to be changed. The flexible sleeve coupling 5 is connected to the turning leather repair wheel 7 through a knurled nut 6, and the knurled cock mother interchanges tool holders of different specifications. The belt car is mounted on the rolling sleeve bearing _8. The 歯 -shaped belt transmits power from the small pulley 1 0, and the small belt object receives power from a separately installed motor through a flexible shaft 11 (not shown ). The belt transmission device is installed on the plate 12, and the plate 2 is connected to an intermediate plate 13 through two connecting rods 14. The -end of the connecting rod is more connected to the plate 13 and the other end It is more connected to the board 12. These continuous samples strongly make the board 12 private, and thus also force the tool to swing around a imaginary fulcrum P near the center of the tool on the plane of the drawing. This mechanical connection method is also shown in Figure 3, it is only an illustration, not to scale. The good method of the auxiliary link 24 shown in the orthogonal scraping surface view of FIG. 4 is to have similar movement in the orthogonal elastic yellow surface. • The relative motion of the tool is limited to Θ around the virtual support point P. Turn around. The inclination is controlled by two bi-directional hydraulic cylinders (5 5 ^ ^ cylinders) connected to two copper and position transmitters (not shown). Therefore, it can be accurately recorded by using the position A signal input to the control circuit. Set the appropriate angle. The fixed hollow shaft 4 is connected to the loading rod 16 and the added sample is softened 11/16. The paper size is applicable to China National Standard (CNS) A4 (210X297 mm) | _ 一 --- ^ --- -袭 ------ il ------- ^ (Please read the precautions on the back before filling out this page) The Central Consumers Bureau of the Ministry of Economic Affairs, Consumer Cooperatives Co., Ltd. A7 B7 V. Invention Description "/: L ) 4 The limit of taking 1 7 can only make two movements with respect to the rigid outer shape connected to the plate 12. The loading force 16 is added to the sleeve 1 4 and then added to the tool. The device 19 is adjusted by the solenoid valve 18, and the force measuring sensor is used to measure the far force. The actual force applied to the tool will be a little different from it, because it has a flexible support table 17 and a bellows sleeve. The spring constants of 5 are all acting in the axial direction. The position sensor 20 in this example is a linear adjustable differential transformer (LVDT), which measures the direction of the loaded car and outputs a signal. According to this signal The axial spring force * can be determined to correct the reading of the load cell. The side of the tool due to friction with the workpiece The forward force is determined by the strain: 16 installed on the load rod 16 and the load rod is locally thinner so that it can be changed to respond to this force. The flexible tube 22 and the load sample 16 The central channel is connected and air is introduced into the flexible warm sheet 1. The control of this pressure is explained below. The pressured air is supplied and supplied by a standard pump (not shown). However, it should be noted that other washing It is also possible to use liquid gambling. In the second example, the change in the contact area used for polishing is performed by calculating the amount of compression of a soft tool under computer control. This example illustrates the method One effect is that the polishing pressure can be held substantially in an absolute circle with a contact area and a force. In ® 2, the soft tool is a piece of rubber warmed by air-blown mosquitoes. For workpieces with a diameter of 250 nut [, it The diameter is 50mro * the thickness is 2mm; or it increases or decreases in proportion to the size of the workpiece, which is used for less or less light area. The diaphragm is blown by computer-made compressed air, or it is temporarily dense. 12/16 paper Degree applies to China National Standard (CNS) A4 specification (210X 297 mm) Binding —_ > (Please read the precautions on the back before filling out this page) ^, u Invention said 4 sealed or permanently sealed 'so that Bulge. The exhaust force of the air is extremely close to the required polishing pressure. The bulge of the tool covers the working surface with a polishing material. The polishing material can include materials such as cloth, felt, flexible polyurethane foam or a hard pitch A material such as a mosaic, the polishing material is adhered to the film. This material can be polished normally with a fine abrasive. Under the control of a computer, the tool moves to the workpiece through the machine and starts to contact at various positions , Then increase the approach procedure so that the bulge is compressed and gradually increase the contact area. This process is illustrated briefly in Figure 5. When that happens, the bulging space is compressed, but when the volume of the dagger is reduced by less than ten percent, the air pressure is increased by less than ten percent. Therefore, the polishing pressure determined by the air pressure is constantly in the range of ten percent. When the required contact area is obtained in this way, the tool and workpiece can be rotated or moved in any form required for polishing by a computer-controlled motor. Printed by the Consumers' Cooperative of the Central Bureau of Standards, Ministry of Economic Affairs (please read the notes on the back before filling this page) This tool can be used in different ways. In this case the tool is filled or partially depressurized, bringing the diaphragm close to the average radius of curvature (concave or convex) of the workpiece. A slight correction is then made to the air pressure, resulting in a distributed pressure applied to the entire (or part) surface of the tool in contact with the workpiece. The pressure distribution is controlled by air pressure and tension in the rubber. A pressure distribution can be obtained by selecting a suitable radial change in the thickness of the rubber film, which decreases to zero outside the edge of the contact surface with the workpiece. This has been shown in Figure 6 with some different radius surface pressure ranges. Conversely, by reducing the air pressure, an effect similar to that of an annular grinding disc can be obtained. This paper is suitable for Guancai County (CNS) A4 size 13/16 (210x 297 mm) Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the invention | 2 / 1i The tool is carried on a motor-driven slide. Under the control of the i10 computer, they can change the position of the tool relative to the workpiece as described above. In addition, rapid position and force changes can be performed by the magnetic actuator 18. By using a flexible support 17 without a sliding device, the error caused by friction can be reduced. The total force (pressure multiplied by surface 穑) from the force 〇 to the workpiece owes as the contact area increases. This total force is encoded by a force-measuring sensor. The force measured by this load cell can be compared with the force according to the position collar to confirm the operation. Other load cells, such as strain gauge 21, knit the polishing force in a direction parallel to the surface of the workpiece ^ 〇 The speed of removing (grinding) the broken glass during the polishing process depends on hard work factors, including tools Sorrow, speed and lateral resistance. Phase L is input to the computer based on the reading from the load cell. The position of the tool is determined by the three vertical clear plates driven by the motor, and the position of the turntable supporting and supporting the workpiece. The workpiece rotation position must also be edited. The speed of a spin tool (if used) can be determined by the motor's electric washing or by a rotary encoder. Therefore: The ten computer angles fe drive the tool from a given speed to suit the workpiece. For a specific workpiece, the law of burial is derived from some experience. According to these burial laws, the combined results of grinding speed and pressure, speed and polishing time, or the combination of resistance, speed, and time are directly proportional. Be sure to violate some of the proportionality constants when starting work. For this reason, before and after working on some working surfaces for a period of time, ordinary optical tests are used to determine 14/16. This paper size is applicable to the Chinese National Standard (CNS) A4 specification (210X 297 mm) l · J-- ------ install ------ order ^ -------- line (please read the notes on the back before filling this page) Printed by A7 B7 of the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs 、 Explanation of the invention | 3 / ι) 4 The speed of removing broken pimple. Under the current circumstances, the burial law is determined. The function can digitally integrate the instantaneous grinding speed to determine the equivalent map of the actual ground glass during work. Using this determined isomap, we can get an effect very close to the required strategy. The proportionality constant can be redefined in later work cycles. It may take longer to lift the noodles at a higher height so that they can be ground away first, which is a well-known method of processing rotating tools. Due to the effect of the present invention, the computer transmission device can set the tool at a high point of the workpiece and adjust the tool contact area to match this high point. In this way, the high point area can be lowered without causing the surrounding area to decrease at the same time. In the absence of the present invention, undesired processing was performed in areas near the high point or in the high point area, and the surface of these areas became low. The lower areas are more eliminated than the original spot areas, because it is impossible to add glass, and these low areas will inevitably cause all remaining surfaces to be re-polished. Another method for measuring the force applied to a workpiece is to use a force-sensing device (not in a tool) that supports the workpiece. The workpiece is usually placed on a common rotary table, in which configuration the load cell can be mounted between the turntable and the workpiece. They can be rotated together with the workpiece, and the axial tubular shaft that drives the workpiece can be electrically connected to help the split ring and / or an optical free space data transmission device. A machine can make a series of tools. The minimum contact surface precision of a piece can usually be less than a quarter of the specific light surface area. The rubber pancreas can also be manufactured in such a way that it is at zero pressure. The following is a flat 15/16 This paper size is applicable to the Chinese National Standard (CNS) A4 specification (210'〆29? Mm) ^^^ 1-1 til fm ^^^^ 1 mu i ^ i ^ i ^ ϋ— J ml I (Please read the precautions on the back before filling out this page) Printed by the Consumer Affairs Department of the Central Bureau of Standards of the Ministry of Economic Affairs · π "v: ': A7 ---; ____B7 5. Description of the invention (or curved surface) In order to reduce the applied pressure to the edge of the bulge contact surface to zero, the method of increasing the thickness of the diaphragm rubber can be used. Similarly, the rubber diaphragm can have a non-uniform thickness. The axis rotation device is available. It can be used when the polishing speed needs to be increased. This second example includes a method to position the tool directly on the workpiece at the required contact angle. || This angle is So that the axis of the tool contacts in the center Is orthogonal to the polishing surface. However, non-orthogonal axes can also be selected, in which case the polishing action approaches or appears at the edge of the tool. The method of controlling the angle of the tool is described as a virtual fulcrum, such as As shown in Figures 2 to 4. It includes some articulated plates or rods to tilt the center frame of the tool device about the center of the tool contact surface. The advantage of this virtual fulcrum is that the contact angle can be changed while It is not necessary to turn the tool over the workpiece. If the fulcrum is far away from the tool, it may cross the workpiece. In addition, the frictional resistance between the polishing tool and the actuator that changes the contact angle is small or non-existent. The force is the least. Although the present invention has been explained by two hosts for optical polishing, the specific content specified in the attached claims are also possible. County (CNS) A4 Specification (21GX297 mm)

Claims (1)

No. 85109804 Chinese Patent Application Range Amendment Date: 88/06/14 — Sixth, apply for an exclusive scope # 1. A method for optically polishing the surface of a workpiece, including: relative to the surface of the workpiece-flexible The tool of the working surface is placed in a proper position so that there is a contact area between the flexible working surface and the workpiece surface, wherein the flexible working surface is substantially smaller than the i-plane of the workpiece; and the toolbox is automatically controlled For the position of the workpiece surface, the contact area is controlled. 2. The method according to item 2 of the scope of patent application, wherein the surface of the workpiece can be selectively changed to change the contact area. Wherein, the maximum value of the central area of the contact area of the pressure applied to the surface of the workpiece by the flexible working surface by the method described in item 1 or 2 of the scope of patent application is decreased to the periphery thereof. Is zero. 4. The method described in the scope of the patent application: 13 items 2 & v The pressure exerted on the surface of the workpiece by the flexible working surface has a peak value and gradually decreases toward the edge of the contact area. : 5. The method according to item 1 or 2 of the patent application scope, wherein the pressure exerted on the surface of the workpiece by the flexible working surface is a flat-loaded synonymous form and has a maximum value in the contact area center of. 6 'The method described in item 1 or 2 of the patent application scope of the Central Standards Bureau of the Ministry of Economic Affairs, including applying a central force on the central area of the flexible work surface to provide pressure on the surface of the workpiece Center increment. 7. The method according to item 6 of the scope of patent application, comprising applying a force on an area of the flexible working surface surrounding the central area and laterally spaced from the central area to provide a pressure applied to the surface of the workpiece. The paper size of this paper is applicable (2iQx297l ¥ y No. 85109804 Chinese patent application scope amendment this year month day revision date: 88/06/14 — six, application special # scope 1.-a method of optical polishing workpiece surface, The method includes: placing a tool with a flexible working surface relative to the surface of the workpiece so that the flexible working surface has a contact area with the workpiece surface, wherein the flexible working surface is substantially larger than the workpiece. i face is small; and automatically control the position of the toolbox to the workpiece surface to control the contact area. 2. The method as described in item 2 of the scope of patent application, wherein the workpiece surface can be selectively changed to change The contact area, wherein the flexible working surface is applied to the work by the method described in item 1 or 2 of the patent application range. The maximum value of the central area of the pressure contact area on the surface of the workpiece decreases to zero from its periphery. 4. As described in the scope of patent application 帛 13 Ge 2 & v The flexible work surface is applied on the surface of the workpiece The pressure has a peak value and gradually decreases toward the edge of the contact area.: 5. The method according to the scope of patent application 帛 1 or 2, wherein the pressure applied to the surface of the workpiece by the flexible working surface It is a flat-loaded homonymous form with a maximum value at the center of the contact area. Printed by the Consumer Cooperatives of the Central Bureau of Standards of the Ministry of Economic Affairs 6 'The method as described in the scope of patent application 帛 1 or 2 is included in the flexibility A central force is applied to the central area of the work surface to provide a central increase in pressure applied to the surface of the workpiece. 7. The method as described in item 6 of the scope of the patent application, which includes surrounding the central area and the central area. The laterally spaced areas of the flexible work surface apply forces to provide the pressure applied to the surface of the workpiece. The paper size is applicable (2iQx297l ¥ y Ministry of Economy Central Standard Printed by the Consumer Bureau of the Associate Bureau * The patent scope of the patent application is increased. And the method described in item 1 or 2 of the patent scope of the application is described in the following paragraphs. A rigid support is supported, and the method includes controlling the force in the fluid cavity to control the pressure applied to the surface of the workpiece above the contact area. 9. The method according to the scope of patent application No. 8 wherein The area of the diaphragm is varied in order to provide a desired pressure distribution. The method as described in item 1 or 2 of the patent application includes rotating the tool about an axis to provide a rotary polishing action 1 'The method as described in item 1 or 2 of the scope of Shen 6 Qing patent includes using a main transmission mechanism to control the angle of attack between the tool and the surface of the workpiece, and using another transmission mechanism to control the position of the tool. ^ 12. The method according to item u of the scope of patent application, wherein the tool is clamped on an object by an articulated link, and the tool angle is controlled to articulate around a virtual fulcrum on the surface of the workpiece. 13. The method as described in item 丨 or 2 of the scope of patent application, including determining the path across the workpiece, predicting the contact area at the position of the path, and applying pressure above the contact area to achieve the desired The required polishing, as well as the "Hellow II mobile" meta tool simultaneously dynamically controls the pressure and the contact area based on the prediction. 14. An apparatus for optically polishing the surface of a workpiece, comprising: a holder for holding the workpiece; a tool 'having a flexible working surface, wherein the flexible working surface is substantially smaller than the surface of the workpiece; I n I-nn-n I ^ 1 I-III D ^, T (Please read the notes on the back first and fill out this page) Patent application scope The Consumer Cooperative of the Central Standards Bureau of the Ministry of Economics prints a transmission device to move the tool relative to the workpiece surface to form a contact area between the flexible work surface and the workpiece surface; and a control device for The transmission device is controlled to automatically control the position of the tool relative to the X-piece surface to control the contact area. 15. The device as described in item 14 of the towel range, wherein the control device is used to control the transmission mechanism so that the position of the tool on the surface of the workpiece can be selectively changed to change the contact area. 16. The device according to item 14 or 15 of the May patent scope, wherein the tool is used to apply pressure to the surface of the workpiece using a flexible working surface, and the pressure is from the center area of the contact area. The maximum value down to its periphery decreases to zero. 17. The device as described in claim 14 or ι5 of the patent scope, wherein the tool is used to utilize the flexible work surface to apply pressure on the surface of the workpiece, wherein the pressure has a peak and is directed toward the The edges of the contact area gradually decrease. 18. The device according to item 14 or 15 of the scope of patent application, wherein the tool is used to utilize the flexible working surface to apply pressure on the surface of the workpiece, wherein the pressure is a Gaussian form of a flat load and has a The maximum is at the center of the contact area. 19. The device as claimed in claim 14 or 15, wherein the tool includes a central drive mechanism for applying a central force in the "" area of the flexible work surface to provide application to the surface of the workpiece The central increase of the pressure. 20. The device described in item 19 of the scope of patent application, wherein the M-scale scale of the tool is applicable to China ------ ^ ----- .. 4-- ( Please read the notes on the back before filling in this page) Order • mm Βδ C8 D8 The scope of patent application also includes at least one transmission mechanism for the flexible An area of the work surface applies a force to provide the central increase in pressure applied to the surface of the workpiece. 21. The device as described in item 14 or 15 of the patent application scope, wherein the tool comprises a diaphragm, which is formed by a It is supported by a rigid support forming a fluid cavity, and the control device is used to control the pressure in the fluid cavity to control the pressure applied to the surface of the workpiece above the contact area. Of 21 Device in which the thickness of the diaphragm is varied over its area so as to provide a desired pressure distribution. 23. The device according to item 14 or 15 of the scope of patent application, comprising means for rotating the tool about an axis 24. The device according to item 14 or 15 of the scope of patent application includes a main transmission mechanism for controlling the angle of attack between the tool and the surface of the workpiece; and two other Transmission mechanism for controlling the position of the tool on a plane perpendicular to the running direction of the transmission device. 25. The device as described in item 24 of Shenyan's patent scope, wherein the tool is printed by the Consumers' Cooperative of the Central Government Standards Bureau of the Ministry of Economic Affairs. Fan (please read the precautions on the back before filling this page) An articulated link is clamped on an object to allow the tool to be hinged around a virtual fulcrum located on the surface of the workpiece. 26. If the scope of patent application The device according to item 14 or 15, wherein the control device is used to determine a path across the workpiece to predict a contact area at the position of the path = and a position to be applied to the interface. The pressure above the area to achieve the desired polishing, and to control the movement of the tool along the path are the same as the control of the pressure and the contact area dynamically based on the prediction. This paper size applies the Chinese National Standard (CNS) A4 specification ( 210X: 297 mm