TW373322B - Semi-spherical crystal particle electrode structural capacitor forming method - Google Patents

Semi-spherical crystal particle electrode structural capacitor forming method

Info

Publication number
TW373322B
TW373322B TW086117922A TW86117922A TW373322B TW 373322 B TW373322 B TW 373322B TW 086117922 A TW086117922 A TW 086117922A TW 86117922 A TW86117922 A TW 86117922A TW 373322 B TW373322 B TW 373322B
Authority
TW
Taiwan
Prior art keywords
semi
crystal particle
spherical crystal
forming method
particle electrode
Prior art date
Application number
TW086117922A
Other languages
Chinese (zh)
Inventor
Wen-Yi Xie
Kuo-Tai Huang
Jun-Yuan Wu
Original Assignee
United Microelectronics Corporaiton
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Microelectronics Corporaiton filed Critical United Microelectronics Corporaiton
Priority to TW086117922A priority Critical patent/TW373322B/en
Application granted granted Critical
Publication of TW373322B publication Critical patent/TW373322B/en

Links

Abstract

A kind of semi-spherical crystal particle electrode structural capacitor forming method, with the application of semi-spherical crystal particle electrode structure, to raise the area of capacitor electrode form increasing capacity value, meanwhile, can also take tantalum oxide as dielectric layer, for using the characteristics of its high dielectric constant, to obtain capacitor of high capacity value. Moreover, in addition to raising capacity value of the capacitor, can also reduce the power leakage to a certain extend, for achieving good component property.
TW086117922A 1997-11-28 1997-11-28 Semi-spherical crystal particle electrode structural capacitor forming method TW373322B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW086117922A TW373322B (en) 1997-11-28 1997-11-28 Semi-spherical crystal particle electrode structural capacitor forming method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW086117922A TW373322B (en) 1997-11-28 1997-11-28 Semi-spherical crystal particle electrode structural capacitor forming method

Publications (1)

Publication Number Publication Date
TW373322B true TW373322B (en) 1999-11-01

Family

ID=57941727

Family Applications (1)

Application Number Title Priority Date Filing Date
TW086117922A TW373322B (en) 1997-11-28 1997-11-28 Semi-spherical crystal particle electrode structural capacitor forming method

Country Status (1)

Country Link
TW (1) TW373322B (en)

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