TW366549B - Wafer ring chuck inspection device - Google Patents

Wafer ring chuck inspection device

Info

Publication number
TW366549B
TW366549B TW087108285A TW87108285A TW366549B TW 366549 B TW366549 B TW 366549B TW 087108285 A TW087108285 A TW 087108285A TW 87108285 A TW87108285 A TW 87108285A TW 366549 B TW366549 B TW 366549B
Authority
TW
Taiwan
Prior art keywords
detecting
bearing
arm
clamping ring
rotary
Prior art date
Application number
TW087108285A
Other languages
Chinese (zh)
Inventor
Shr-Ming Chen
Wei-Chieh Hsu
Shr-Rung Lin
Original Assignee
Vanguard Int Semiconduct Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vanguard Int Semiconduct Corp filed Critical Vanguard Int Semiconduct Corp
Priority to TW087108285A priority Critical patent/TW366549B/en
Application granted granted Critical
Publication of TW366549B publication Critical patent/TW366549B/en

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

The wafer ring chuck inspection device disclosed in the present invention includes a substrate, a rotatable device on the substrate for turning a ring chuck, including said rotatable device a bearing device, a rotary arm and a clamping ring support, being the rotary arm connected onto the bearing for rotation and having said bearing a bearing inside, with the end of the rotary arm connected to the clamping ring seat, for securing the wafer clamping ring for testing, a detecting arm bearing disposed on the substrate next to the rotary device, a detecting arm passing through the upper part of said detecting seat for securing a detecting element, traveling said detecting arm along the detecting arm bearing for adjustment of the location of the detecting element, connected at the end of the detecting arm for detection of thickness of the wafer clamping ring.
TW087108285A 1998-05-28 1998-05-28 Wafer ring chuck inspection device TW366549B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW087108285A TW366549B (en) 1998-05-28 1998-05-28 Wafer ring chuck inspection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW087108285A TW366549B (en) 1998-05-28 1998-05-28 Wafer ring chuck inspection device

Publications (1)

Publication Number Publication Date
TW366549B true TW366549B (en) 1999-08-11

Family

ID=57941139

Family Applications (1)

Application Number Title Priority Date Filing Date
TW087108285A TW366549B (en) 1998-05-28 1998-05-28 Wafer ring chuck inspection device

Country Status (1)

Country Link
TW (1) TW366549B (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7024954B1 (en) * 2003-01-14 2006-04-11 Cypress Semiconductor Corporation Microelectronic wafer examination apparatus and method for using the same
TWI475234B (en) * 2013-07-18 2015-03-01 Chroma Ate Inc Inspection machine with fan-shaped turntable transmission equipment
TWI572873B (en) * 2012-12-07 2017-03-01 鴻海精密工業股份有限公司 Test connector

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7024954B1 (en) * 2003-01-14 2006-04-11 Cypress Semiconductor Corporation Microelectronic wafer examination apparatus and method for using the same
TWI572873B (en) * 2012-12-07 2017-03-01 鴻海精密工業股份有限公司 Test connector
TWI475234B (en) * 2013-07-18 2015-03-01 Chroma Ate Inc Inspection machine with fan-shaped turntable transmission equipment

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