TW366549B - Wafer ring chuck inspection device - Google Patents
Wafer ring chuck inspection deviceInfo
- Publication number
- TW366549B TW366549B TW087108285A TW87108285A TW366549B TW 366549 B TW366549 B TW 366549B TW 087108285 A TW087108285 A TW 087108285A TW 87108285 A TW87108285 A TW 87108285A TW 366549 B TW366549 B TW 366549B
- Authority
- TW
- Taiwan
- Prior art keywords
- detecting
- bearing
- arm
- clamping ring
- rotary
- Prior art date
Links
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The wafer ring chuck inspection device disclosed in the present invention includes a substrate, a rotatable device on the substrate for turning a ring chuck, including said rotatable device a bearing device, a rotary arm and a clamping ring support, being the rotary arm connected onto the bearing for rotation and having said bearing a bearing inside, with the end of the rotary arm connected to the clamping ring seat, for securing the wafer clamping ring for testing, a detecting arm bearing disposed on the substrate next to the rotary device, a detecting arm passing through the upper part of said detecting seat for securing a detecting element, traveling said detecting arm along the detecting arm bearing for adjustment of the location of the detecting element, connected at the end of the detecting arm for detection of thickness of the wafer clamping ring.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW087108285A TW366549B (en) | 1998-05-28 | 1998-05-28 | Wafer ring chuck inspection device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW087108285A TW366549B (en) | 1998-05-28 | 1998-05-28 | Wafer ring chuck inspection device |
Publications (1)
Publication Number | Publication Date |
---|---|
TW366549B true TW366549B (en) | 1999-08-11 |
Family
ID=57941139
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW087108285A TW366549B (en) | 1998-05-28 | 1998-05-28 | Wafer ring chuck inspection device |
Country Status (1)
Country | Link |
---|---|
TW (1) | TW366549B (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7024954B1 (en) * | 2003-01-14 | 2006-04-11 | Cypress Semiconductor Corporation | Microelectronic wafer examination apparatus and method for using the same |
TWI475234B (en) * | 2013-07-18 | 2015-03-01 | Chroma Ate Inc | Inspection machine with fan-shaped turntable transmission equipment |
TWI572873B (en) * | 2012-12-07 | 2017-03-01 | 鴻海精密工業股份有限公司 | Test connector |
-
1998
- 1998-05-28 TW TW087108285A patent/TW366549B/en active
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7024954B1 (en) * | 2003-01-14 | 2006-04-11 | Cypress Semiconductor Corporation | Microelectronic wafer examination apparatus and method for using the same |
TWI572873B (en) * | 2012-12-07 | 2017-03-01 | 鴻海精密工業股份有限公司 | Test connector |
TWI475234B (en) * | 2013-07-18 | 2015-03-01 | Chroma Ate Inc | Inspection machine with fan-shaped turntable transmission equipment |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR950011043A (en) | Positioning Stage Device | |
EP1249621A3 (en) | Device for clamping supports | |
EP1067589A3 (en) | Semiconductor substrate aligner apparatus and method | |
WO2006064169A3 (en) | Current-loop position sensor and antifriction bearing equipped with same | |
TW366549B (en) | Wafer ring chuck inspection device | |
EP1072359A3 (en) | Semiconductor wafer polishing apparatus | |
SE8602366D0 (en) | DEVICE FOR DETECTION OF TOOL DAMAGES | |
MY132776A (en) | Method and device for determining an angular error and use of the device | |
TW338104B (en) | Non-contact type inspection system | |
EP0826969A3 (en) | Substrate inspection apparatus and method therefore | |
JP2007071726A (en) | Detector support device | |
ATE203943T1 (en) | DEVICE FOR ALIGNING RUNOUT OF A TOOL | |
FR2675737A1 (en) | ELECTRICAL OR ELECTRONIC SHEET CONTROL DEVICE FOR PRINTING MACHINES. | |
TW344107B (en) | Semiconductor wafer-polishing device | |
JPH0524622A (en) | Supporting fixture for conveyance belt | |
EP1092947A3 (en) | Method for the detection of the alignment of a cylindrical body with respect to a reference direction | |
CN213225720U (en) | Bearing ring end surface polishing clamp | |
ATE345180T1 (en) | SEALING DEVICE WITH A TWO-PART RING BODY | |
ATE317822T1 (en) | TRACING DEVICE FOR A MATERIAL WEB | |
DE50006875D1 (en) | TOOL HOLDER FOR MACHINE TOOLS AND TOOL ARRANGEMENT FOR MACHINE TOOLS | |
DE69012041D1 (en) | Fault detection device for direction of rotation detector. | |
KR920020667A (en) | Wafer Center Control | |
JPH10325715A (en) | Method and apparatus for detection of position | |
JPH04177851A (en) | Device for inspecting wafer appearance | |
KR100453637B1 (en) | Before and behind adjuster of grinding shaft used in grinding machine |