TW365566B - Moving robot - Google Patents

Moving robot

Info

Publication number
TW365566B
TW365566B TW086111725A TW86111725A TW365566B TW 365566 B TW365566 B TW 365566B TW 086111725 A TW086111725 A TW 086111725A TW 86111725 A TW86111725 A TW 86111725A TW 365566 B TW365566 B TW 365566B
Authority
TW
Taiwan
Prior art keywords
handle
motor
common
moving robot
driven
Prior art date
Application number
TW086111725A
Other languages
English (en)
Inventor
Yasuhito Itagaki
Original Assignee
Yasuhito Itagaki
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yasuhito Itagaki filed Critical Yasuhito Itagaki
Application granted granted Critical
Publication of TW365566B publication Critical patent/TW365566B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/06—Programme-controlled manipulators characterised by multi-articulated arms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/106—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/106—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links
    • B25J9/1065—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links with parallelograms
    • B25J9/107—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links with parallelograms of the froglegs type

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
TW086111725A 1996-08-13 1997-08-12 Moving robot TW365566B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8213643A JPH1058359A (ja) 1996-08-13 1996-08-13 搬送ロボット

Publications (1)

Publication Number Publication Date
TW365566B true TW365566B (en) 1999-08-01

Family

ID=16642557

Family Applications (1)

Application Number Title Priority Date Filing Date
TW086111725A TW365566B (en) 1996-08-13 1997-08-12 Moving robot

Country Status (6)

Country Link
EP (1) EP0881043A1 (zh)
JP (1) JPH1058359A (zh)
KR (1) KR19990064175A (zh)
CN (1) CN1198698A (zh)
TW (1) TW365566B (zh)
WO (1) WO1998006544A1 (zh)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6450755B1 (en) * 1998-07-10 2002-09-17 Equipe Technologies Dual arm substrate handling robot with a batch loader
CN100342519C (zh) * 2003-07-16 2007-10-10 东京毅力科创株式会社 搬送装置及驱动机构
US8668422B2 (en) * 2004-08-17 2014-03-11 Mattson Technology, Inc. Low cost high throughput processing platform
US8267636B2 (en) 2007-05-08 2012-09-18 Brooks Automation, Inc. Substrate transport apparatus
TWI660446B (zh) * 2007-05-08 2019-05-21 美商布魯克斯自動機械公司 具有使用機械轉換機構之複數可動臂的基板運送裝置
CN104913025A (zh) * 2015-06-11 2015-09-16 邓莉莉 一种工业机器人用的传动轴结构

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0825151B2 (ja) * 1988-09-16 1996-03-13 東京応化工業株式会社 ハンドリングユニット
JP3181455B2 (ja) * 1993-11-20 2001-07-03 東京エレクトロン株式会社 搬送アーム装置及びこれを用いた処理室集合装置

Also Published As

Publication number Publication date
KR19990064175A (ko) 1999-07-26
JPH1058359A (ja) 1998-03-03
WO1998006544A1 (fr) 1998-02-19
EP0881043A1 (en) 1998-12-02
CN1198698A (zh) 1998-11-11

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