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Transition And Organic Metals Composition Catalysts For Addition Polymerization
(AREA)
Abstract
A catalyst composition of polystyrene or vinylaryl compounds, comprising: (a) a compound represented by TiR1'R2'R3'R4' (I), where R1', R2', R3', and R4' are hydrogen, C1-C6 alkyl, C6-C12 aryl, C1-C4 alkoxy, C6-C12 aryloxy, amino or halogen; (b) a compounds of silicon, germanium or tin of cyclopentadiene represented by formula (II) where R is hydrogen, C1-C4 alkyl, C6-C12 aryl or halogen, R1, R2, R3 and R4 are hydrogen, C1-C4 alkyl, C6-C12 aryl, or silyl, X is silicon, germanium or tin in IVA group elements of the periodic table; (c) a cocatalyst of active transition metal of MAO, wherein the component ratio of (a), (b) and (c) is 10<SP>-1</SP> to 10<SP>1</SP> : 10<SP>-1</SP> to 10<SP>1</SP> : 20 to 1000.
TW085100268A1996-01-111996-01-11Catalyst composition of polystyrene or vinylaryl compounds, and the polymerization method therewith
TW363982B
(en)
A base resin for use in chemically amplified resist and a manufacturing method thereof the invention relates to a base resin for use in a chemically amplified resist and a manufacturing method thereof, the base resin containing two t-butyl groups