TW360965B - Metallization process using artificial gravity - Google Patents

Metallization process using artificial gravity

Info

Publication number
TW360965B
TW360965B TW086113444A TW86113444A TW360965B TW 360965 B TW360965 B TW 360965B TW 086113444 A TW086113444 A TW 086113444A TW 86113444 A TW86113444 A TW 86113444A TW 360965 B TW360965 B TW 360965B
Authority
TW
Taiwan
Prior art keywords
vias
metallization process
jerking motion
forces
artificial gravity
Prior art date
Application number
TW086113444A
Other languages
Chinese (zh)
Inventor
Kung Linliu
Original Assignee
Vanguard Int Semiconduct Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vanguard Int Semiconduct Corp filed Critical Vanguard Int Semiconduct Corp
Priority to TW086113444A priority Critical patent/TW360965B/en
Application granted granted Critical
Publication of TW360965B publication Critical patent/TW360965B/en

Links

Landscapes

  • Printing Elements For Providing Electric Connections Between Printed Circuits (AREA)

Abstract

Voids in via holes in integrated circuits have been effectively removed by heating the vias to a relatively low temperature and then subjecting the entire structure (including the vias) to artificial gravitational forces. Said forces may be steadily applied, as in centrifuging, or they may be applied intermittently by using a jerking motion which is repeated several times. A number of different ways for implementing such jerking motion are described. These include magnetic repulsion, vertical pulling by a motor, and providing a pressure differential between the top and bottom sides of the integrated circuit holder.
TW086113444A 1997-09-17 1997-09-17 Metallization process using artificial gravity TW360965B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW086113444A TW360965B (en) 1997-09-17 1997-09-17 Metallization process using artificial gravity

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW086113444A TW360965B (en) 1997-09-17 1997-09-17 Metallization process using artificial gravity

Publications (1)

Publication Number Publication Date
TW360965B true TW360965B (en) 1999-06-11

Family

ID=57940730

Family Applications (1)

Application Number Title Priority Date Filing Date
TW086113444A TW360965B (en) 1997-09-17 1997-09-17 Metallization process using artificial gravity

Country Status (1)

Country Link
TW (1) TW360965B (en)

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