TW359414U - Improvement of lamp filament assembly for ion implanter - Google Patents

Improvement of lamp filament assembly for ion implanter

Info

Publication number
TW359414U
TW359414U TW085204882U TW85204882U TW359414U TW 359414 U TW359414 U TW 359414U TW 085204882 U TW085204882 U TW 085204882U TW 85204882 U TW85204882 U TW 85204882U TW 359414 U TW359414 U TW 359414U
Authority
TW
Taiwan
Prior art keywords
improvement
ion implanter
lamp filament
filament assembly
lamp
Prior art date
Application number
TW085204882U
Other languages
Chinese (zh)
Inventor
Jin-Tu Weng
Original Assignee
Taiwan Semiconductor Mfg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taiwan Semiconductor Mfg filed Critical Taiwan Semiconductor Mfg
Priority to TW085204882U priority Critical patent/TW359414U/en
Publication of TW359414U publication Critical patent/TW359414U/en

Links

TW085204882U 1996-04-05 1996-04-05 Improvement of lamp filament assembly for ion implanter TW359414U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW085204882U TW359414U (en) 1996-04-05 1996-04-05 Improvement of lamp filament assembly for ion implanter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW085204882U TW359414U (en) 1996-04-05 1996-04-05 Improvement of lamp filament assembly for ion implanter

Publications (1)

Publication Number Publication Date
TW359414U true TW359414U (en) 1999-05-21

Family

ID=54644018

Family Applications (1)

Application Number Title Priority Date Filing Date
TW085204882U TW359414U (en) 1996-04-05 1996-04-05 Improvement of lamp filament assembly for ion implanter

Country Status (1)

Country Link
TW (1) TW359414U (en)

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