TW358977B - Adjacent exposure device of variable lighting angles - Google Patents

Adjacent exposure device of variable lighting angles

Info

Publication number
TW358977B
TW358977B TW086118522A TW86118522A TW358977B TW 358977 B TW358977 B TW 358977B TW 086118522 A TW086118522 A TW 086118522A TW 86118522 A TW86118522 A TW 86118522A TW 358977 B TW358977 B TW 358977B
Authority
TW
Taiwan
Prior art keywords
exposure device
adjacent exposure
light
variable lighting
lighting angles
Prior art date
Application number
TW086118522A
Other languages
Chinese (zh)
Inventor
Yoneta Tanaka
Hiromi Kai
Original Assignee
Ushio Electric Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP21326697A external-priority patent/JP3334569B2/en
Application filed by Ushio Electric Inc filed Critical Ushio Electric Inc
Application granted granted Critical
Publication of TW358977B publication Critical patent/TW358977B/en

Links

Landscapes

  • Formation Of Various Coating Films On Cathode Ray Tubes And Lamps (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

A sort of adjacent exposure device, having: light emitter for emission of lights including ultra-violet ray, and light mask seat for seating the light mask, workpiece for securing workpieces, including: mechanism for tilting the light emitter, making its light emit slant from said light emitter.
TW086118522A 1996-09-27 1997-12-09 Adjacent exposure device of variable lighting angles TW358977B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP25584696 1996-09-27
JP21326697A JP3334569B2 (en) 1996-09-27 1997-08-07 Proximity exposure system with variable irradiation angle

Publications (1)

Publication Number Publication Date
TW358977B true TW358977B (en) 1999-05-21

Family

ID=57940563

Family Applications (1)

Application Number Title Priority Date Filing Date
TW086118522A TW358977B (en) 1996-09-27 1997-12-09 Adjacent exposure device of variable lighting angles

Country Status (1)

Country Link
TW (1) TW358977B (en)

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees