TW358156B - Alignment detector - Google Patents

Alignment detector

Info

Publication number
TW358156B
TW358156B TW087113555A TW87113555A TW358156B TW 358156 B TW358156 B TW 358156B TW 087113555 A TW087113555 A TW 087113555A TW 87113555 A TW87113555 A TW 87113555A TW 358156 B TW358156 B TW 358156B
Authority
TW
Taiwan
Prior art keywords
regulators
photo
surrounding light
alignment detector
detector
Prior art date
Application number
TW087113555A
Other languages
English (en)
Inventor
qi-hong Wei
Original Assignee
United Microelectronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Microelectronics Corp filed Critical United Microelectronics Corp
Priority to TW087113555A priority Critical patent/TW358156B/zh
Priority to US09/191,912 priority patent/US6049383A/en
Application granted granted Critical
Publication of TW358156B publication Critical patent/TW358156B/zh

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
    • G01B11/27—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
    • G01B11/272—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes using photoelectric detection means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
TW087113555A 1998-08-18 1998-08-18 Alignment detector TW358156B (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
TW087113555A TW358156B (en) 1998-08-18 1998-08-18 Alignment detector
US09/191,912 US6049383A (en) 1998-08-18 1998-11-13 Aligner detector including an electrooptic modulator for each diffraction order

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW087113555A TW358156B (en) 1998-08-18 1998-08-18 Alignment detector

Publications (1)

Publication Number Publication Date
TW358156B true TW358156B (en) 1999-05-11

Family

ID=21631047

Family Applications (1)

Application Number Title Priority Date Filing Date
TW087113555A TW358156B (en) 1998-08-18 1998-08-18 Alignment detector

Country Status (2)

Country Link
US (1) US6049383A (zh)
TW (1) TW358156B (zh)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4771180A (en) * 1985-10-11 1988-09-13 Matsushita Electric Industrial Co. Ltd. Exposure apparatus including an optical system for aligning a reticle and a wafer
JPH0480762A (ja) * 1990-07-23 1992-03-13 Canon Inc 位置検出装置及びその検出方法

Also Published As

Publication number Publication date
US6049383A (en) 2000-04-11

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Legal Events

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