TW352500B - A process for fabricating a product using a high frequency plasma, and apparatus for the same - Google Patents

A process for fabricating a product using a high frequency plasma, and apparatus for the same

Info

Publication number
TW352500B
TW352500B TW085114958A TW85114958A TW352500B TW 352500 B TW352500 B TW 352500B TW 085114958 A TW085114958 A TW 085114958A TW 85114958 A TW85114958 A TW 85114958A TW 352500 B TW352500 B TW 352500B
Authority
TW
Taiwan
Prior art keywords
fabricating
high frequency
product
same
frequency plasma
Prior art date
Application number
TW085114958A
Other languages
Chinese (zh)
Inventor
Georgy Vinogradov
Shimao Yaneyama
Original Assignee
Mc Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mc Electronics Co Ltd filed Critical Mc Electronics Co Ltd
Priority to TW085114958A priority Critical patent/TW352500B/en
Application granted granted Critical
Publication of TW352500B publication Critical patent/TW352500B/en

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  • Treatment Of Fiber Materials (AREA)
  • Chemical Or Physical Treatment Of Fibers (AREA)

Abstract

A process for fabricating a product including the steps of subjecting a substrate to a composition of entities, at least one of the entities emanating from a species generating by a plasma excited by a high frequency field provided by an inductive coupling structure in which the phase and anti-phase capacitive currents into the plasma are substantially balanced.
TW085114958A 1996-12-04 1996-12-04 A process for fabricating a product using a high frequency plasma, and apparatus for the same TW352500B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW085114958A TW352500B (en) 1996-12-04 1996-12-04 A process for fabricating a product using a high frequency plasma, and apparatus for the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW085114958A TW352500B (en) 1996-12-04 1996-12-04 A process for fabricating a product using a high frequency plasma, and apparatus for the same

Publications (1)

Publication Number Publication Date
TW352500B true TW352500B (en) 1999-02-11

Family

ID=57940088

Family Applications (1)

Application Number Title Priority Date Filing Date
TW085114958A TW352500B (en) 1996-12-04 1996-12-04 A process for fabricating a product using a high frequency plasma, and apparatus for the same

Country Status (1)

Country Link
TW (1) TW352500B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI829781B (en) * 2018-10-10 2024-01-21 美商蘭姆研究公司 Apparatus for generating plasma

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI829781B (en) * 2018-10-10 2024-01-21 美商蘭姆研究公司 Apparatus for generating plasma

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