TW351753B - Apparatus for measuring vertical displacement of stage - Google Patents

Apparatus for measuring vertical displacement of stage

Info

Publication number
TW351753B
TW351753B TW086104883A TW86104883A TW351753B TW 351753 B TW351753 B TW 351753B TW 086104883 A TW086104883 A TW 086104883A TW 86104883 A TW86104883 A TW 86104883A TW 351753 B TW351753 B TW 351753B
Authority
TW
Taiwan
Prior art keywords
stage
vertical displacement
scale glass
light
measuring vertical
Prior art date
Application number
TW086104883A
Other languages
English (en)
Inventor
Tei-Ko Cho
Original Assignee
Samsung Aerospace Ind Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Samsung Aerospace Ind Ltd filed Critical Samsung Aerospace Ind Ltd
Application granted granted Critical
Publication of TW351753B publication Critical patent/TW351753B/zh

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D3/00—Control of position or direction
    • G05D3/12—Control of position or direction using feedback

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
  • Details Of Measuring And Other Instruments (AREA)
TW086104883A 1996-04-16 1997-04-15 Apparatus for measuring vertical displacement of stage TW351753B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019960011454A KR0165222B1 (ko) 1996-04-16 1996-04-16 X-y스테이지의 수직방향 변위 측정장치

Publications (1)

Publication Number Publication Date
TW351753B true TW351753B (en) 1999-02-01

Family

ID=19455827

Family Applications (1)

Application Number Title Priority Date Filing Date
TW086104883A TW351753B (en) 1996-04-16 1997-04-15 Apparatus for measuring vertical displacement of stage

Country Status (4)

Country Link
JP (1) JPH1038516A (zh)
KR (1) KR0165222B1 (zh)
CN (1) CN1168968A (zh)
TW (1) TW351753B (zh)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100554876C (zh) * 2005-10-14 2009-10-28 鸿富锦精密工业（深圳）有限公司 光学式定位装置
CN103148779B (zh) * 2013-01-30 2016-01-13 中国科学院长春光学精密机械与物理研究所 位置测量设备中光源的调整装置
CN108195293B (zh) 2018-03-26 2024-05-10 磐石电气（常州）有限公司 一种数字式位移传感器及其位移测量方法
CN108981623B (zh) * 2018-07-23 2020-04-28 浙江大学 一种基于微波信号的远距离微小位移探测方法
CN109164465B (zh) * 2018-08-29 2023-04-28 西安电子科技大学 基于微脉冲激光雷达测量云高的同轴光学系统
WO2024101465A1 (ko) * 2022-11-08 2024-05-16 엘지전자 주식회사 릴레이티브 액티브 얼라인 장치

Also Published As

Publication number Publication date
KR0165222B1 (ko) 1999-03-20
CN1168968A (zh) 1997-12-31
JPH1038516A (ja) 1998-02-13
KR970071034A (ko) 1997-11-07

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