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Application filed by Taiwan Semiconductor Mfg Co LtdfiledCriticalTaiwan Semiconductor Mfg Co Ltd
Priority to TW086110234ApriorityCriticalpatent/TW346646B/en
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Publication of TW346646BpublicationCriticalpatent/TW346646B/en
An optical fiber controller for integrated circuit high current implantation equipment, which comprises: a ground level control module for adjusting and setting a signal level required by the high current implantation equipment; a pair of optical fiber transmission lines; a high voltage level control module for receiving a set signal transmitted from the ground level control module via the optical fiber transmission lines, thereby controlling the status of the high voltage portion of the high current implantation equipment, and transmitting the status to the ground level control module via the optical fiber transmission lines.
TW086110234A1997-07-181997-07-18Optical fiber controller for integrated circuit high current implantation equipment
TW346646B
(en)