TW340246B - Vacuuming pipe structure of wafer placement seat - Google Patents

Vacuuming pipe structure of wafer placement seat

Info

Publication number
TW340246B
TW340246B TW086112813A TW86112813A TW340246B TW 340246 B TW340246 B TW 340246B TW 086112813 A TW086112813 A TW 086112813A TW 86112813 A TW86112813 A TW 86112813A TW 340246 B TW340246 B TW 340246B
Authority
TW
Taiwan
Prior art keywords
vacuuming
wafer placement
placement seat
hollow
guide pipe
Prior art date
Application number
TW086112813A
Other languages
Chinese (zh)
Inventor
Chii-Wenn Jang
Jiang-Chuan Lii
Wenn-Jou Luo
Liang-Jye Wang
Original Assignee
Mos Electronics Taiwan Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mos Electronics Taiwan Inc filed Critical Mos Electronics Taiwan Inc
Priority to TW086112813A priority Critical patent/TW340246B/en
Application granted granted Critical
Publication of TW340246B publication Critical patent/TW340246B/en

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

A vacuuming pipe structure of a wafer placement seat, which matches with a machine vacuuming device for externally connecting to a wafer placement seat having a vacuum conduit for carrying out the vacuuming operation of the wafer placement seat, which comprises: an installation section being an assembly of a block, a pipeline and a fastening element for matching with other elements of the vacuuming device; a guide pipe being a longitudinal hollow pipeline, one end of which is connected to the installation section, and the hollow through hole thereof being the air passage for the vacuuming operation; and an insertion pipe being a short hollow pipeline, one end of which is connected to the other end of the guide pipe, the hollow through hole thereof and the hollow through hole of the guide pipe forming a connected air passage, the outside diameter thereof being smaller than the outside diameter of the guide pipe and the inside diameter of the vacuum conduit but close to the inside diameter of the vacuum conduit, for being inserted into the vacuum conduit during the vacuuming operation.
TW086112813A 1997-09-05 1997-09-05 Vacuuming pipe structure of wafer placement seat TW340246B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW086112813A TW340246B (en) 1997-09-05 1997-09-05 Vacuuming pipe structure of wafer placement seat

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW086112813A TW340246B (en) 1997-09-05 1997-09-05 Vacuuming pipe structure of wafer placement seat

Publications (1)

Publication Number Publication Date
TW340246B true TW340246B (en) 1998-09-11

Family

ID=58263422

Family Applications (1)

Application Number Title Priority Date Filing Date
TW086112813A TW340246B (en) 1997-09-05 1997-09-05 Vacuuming pipe structure of wafer placement seat

Country Status (1)

Country Link
TW (1) TW340246B (en)

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees